KR20000040112A - Spacer forming method for field emission display - Google Patents
Spacer forming method for field emission display Download PDFInfo
- Publication number
- KR20000040112A KR20000040112A KR1019980055664A KR19980055664A KR20000040112A KR 20000040112 A KR20000040112 A KR 20000040112A KR 1019980055664 A KR1019980055664 A KR 1019980055664A KR 19980055664 A KR19980055664 A KR 19980055664A KR 20000040112 A KR20000040112 A KR 20000040112A
- Authority
- KR
- South Korea
- Prior art keywords
- spacer
- field emission
- emission display
- metal frame
- paste
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/88—Mounting, supporting, spacing, or insulating of electrodes or of electrode assemblies
- H01J1/96—Spacing members extending to the envelope
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
- H01J9/185—Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
Description
본 발명은 전계 방출 표시 소자의 제조방법에 관한 것으로, 특히 몰딩(molding)법에 의해 형성된 금속틀을 이용한 전계 방출 표시 소자의 스페이서 형성방법에 관한 것이다.The present invention relates to a method of manufacturing a field emission display device, and more particularly, to a method of forming a spacer of a field emission display device using a metal frame formed by a molding method.
일반적으로 전계 방출 표시 소자(Field Emission Display; FED)는 FEA(field emission array)를 매트릭스- 어드레스할 수 있고, CRT와 같이 전자빔으로 형광체를 자극하여 음극선 발광을 일으키는 원리를 이용한 표시기이다.In general, a field emission display (FED) is a display using a principle of matrix-addressing a field emission array (FEA) and generating cathode ray emission by stimulating a phosphor with an electron beam like a CRT.
이러한 전계 방출 소자는 대향하는 캐소드판과 애노드판과, 그들 사이에 스페이서가 개재된다. 또한, 캐소드판에는 게이트 전극과 전자를 방출하는 수개의 에미터 팁이 구비되고, 애노드판에는 ITO(indium tin oxide) 전극과 형광체가 구비되어, 전계 방출 표시 장치의 컬러화를 실현한다. 또한, 스페이서는 외부압력이 1기압, 내부압력이 10-6Torr에서 캐소드판과 애노드판을 지지하여 깨지거나 휘지않도록 일정 간격을 유지하고, 인쇄방법이나 프리폼(perform) 형태의 스페이서 형성방법에 의해 형성된다.Such a field emission device has opposing cathode and anode plates with a spacer interposed therebetween. In addition, the cathode plate is provided with a gate electrode and several emitter tips for emitting electrons, and the anode plate is provided with an indium tin oxide (ITO) electrode and a phosphor to realize colorization of the field emission display device. In addition, the spacer is held at a constant interval so that the cathode plate and the anode plate are not broken or bent at an external pressure of 1 atm and an internal pressure of 10 to 6 Torr, and by a printing method or a method of forming a spacer in a preform form. Is formed.
그러나, 인쇄방법에 의한 스페이서 형성방법은, 20인치 이상의 대면적 표시패널의 경우 한번 인쇄에 의한 스페이서 원료의 주입량의 한계(약 20㎛)로 인하여 스페이서의 평탄도가 감소되고, 스페이서의 허물어짐 등의 문제가 야기되어 화면의 고정세화를 얻는데 어려움이 있을 뿐만 아니라 공정이 복잡한 문제가 있다.However, in the method of forming a spacer by the printing method, in the case of a large-area display panel of 20 inches or more, the flatness of the spacer is reduced due to the limitation of the injection amount of the spacer raw material by about one printing (about 20 μm), and the spacer is torn down. In addition to the difficulty of obtaining a high definition of the screen caused by the problem of the process is a complicated problem.
또한, 프리폼 형태의 스페이서 형성방법은, 수작업으로 진행되기 때문에 대면적 표시 패널의 제조에 부적합하므로, 수율이 낮을 뿐만 아니라 제조비용이 높은 문제가 있다.In addition, the method of forming a preform spacer is not suitable for manufacturing a large area display panel because it is performed manually, and thus there is a problem that the yield is low and the manufacturing cost is high.
따라서, 본 발명은 상기한 종래의 문제점을 해결하기 위한 것으로서, 공정을 단순화시켜 수율을 향상시키고 제조비용을 감소시킬 수 있는 전계 방출 표시 소자의 스페이서 형성방법을 제공함에 그 목적이 있다.Accordingly, an object of the present invention is to provide a method for forming a spacer of a field emission display device which can simplify the process and improve yield and reduce manufacturing cost.
도 1a 내지 도 1c는 본 발명의 실시예에 따른 전계 방출 표시 소자의 스페이서 형성방법을 설명하기 위한 단면도.1A to 1C are cross-sectional views illustrating a method of forming a spacer of a field emission display device according to an exemplary embodiment of the present invention.
도 2는 본 발명의 실시예에 따른 전계 방출 표시 소자의 스페이서 형성을 위한 금속틀을 나타낸 사시도.2 is a perspective view illustrating a metal frame for forming a spacer of the field emission display device according to an exemplary embodiment of the present invention.
(도면의 주요 부분에 대한 부호의 설명)(Explanation of symbols for the main parts of the drawing)
10 : 애노드 기판 11 : ITO 전극10: anode substrate 11: ITO electrode
12 : 형광체 13 : 스페이서용 페이스트12 phosphor 13 paste for spacer
13A : 스페이서 100 : 금속틀13A: Spacer 100: Metal Frame
H : 홀H: Hall
상기 목적을 달성하기 위한 본 발명에 따른 전계 방출 표시 소자의 스페이서 형성방법은 상부에 ITO 전극 및 형광체가 구비된 애노드 기판을 제공하는 단계; 애노드 기판 상에 기판의 일부를 노출시키는 다수개의 홀을 구비한 스페이서 형성용 금속틀을 고정하는 단계; 홀에 스페이서용 페이스트를 도포하는 단계; 페이스트를 건조 및 소성하는 단계; 및, 금속틀을 제거하는 단계를 포함한다.According to another aspect of the present invention, there is provided a method of forming a spacer of a field emission display device, the method including: providing an anode substrate having an ITO electrode and a phosphor disposed thereon; Fixing a metal frame for forming a spacer having a plurality of holes exposing a portion of the substrate on the anode substrate; Applying a spacer paste into the hole; Drying and baking the paste; And, removing the metal frame.
또한, 금속틀의 높이는 150 내지 3,000㎛이고, 금속틀은 기판의 열팽창 계수와 같은 정도의 금속, 예컨대 0 내지 300℃의 온도에서 83×10-7내지 87×10-7/℃의 열팽창 계수를 갖는 금속으로서, Ni-Cr-Fe 나 Ni-Fe 또는 Ni-Co-Fe로 이루어진 다. 또한, 페이스트는 100 내지 200℃에서 건조시킨다.In addition, the metal frame has a height of 150 to 3,000 µm, and the metal frame has a metal that is about the same as the thermal expansion coefficient of the substrate, for example, a thermal expansion coefficient of 83 × 10 −7 to 87 × 10 −7 / ° C. at a temperature of 0 to 300 ° C. As a metal which has, it consists of Ni-Cr-Fe, Ni-Fe, or Ni-Co-Fe. In addition, the paste is dried at 100 to 200 ° C.
이하, 첨부된 도면을 참조하여 본 발명의 실시예를 설명한다.Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention.
도 1a 내지 도 1c는 본 발명의 실시예에 따른 전계 방출 표시 소자의 스페이서 형성방법을 설명하기 위한 단면도이도, 도 2는 본 발명의 실시예에 따른 전계 방출 표시 소자의 스페이서를 형성하기 위한 금속틀(100)을 나타낸 사시도이다.1A to 1C are cross-sectional views illustrating a method of forming a spacer of a field emission display device according to an embodiment of the present invention. FIG. 2 is a metal frame for forming a spacer of a field emission display device according to an embodiment of the present invention. It is a perspective view which shows 100.
도 1a를 참조하면, 상부에 ITO(indium tin oxide) 전극(11) 및 형광체(12)가 구비된 애노드 기판(10) 상에 기판(10)의 일부를 노출시키는 다수개의 홀(H)을 구비한 스페이서 형성용 금속틀(100)을 고정한다. 여기서, 금속틀(100)은 몰딩방법에 의해 형성된 것으로서, 도 2에 도시된 바와 같이, 다수개의 홀(H)을 구비하고, 그의 높이는 150 내지 3,000㎛이다. 또한, 금속틀(100)은 기판의 열팽창 계수와 같은 정도의 금속, 예컨대 0 내지 300℃의 온도에서 83×10-7내지 87×10-7/℃의 열팽창 계수를 갖는 금속으로 이루어진다. 바람직하게, 금속틀(100)은 Ni-Cr-Fe 나 Ni-Fe 또는 Ni-Co-Fe로 이루어진다.Referring to FIG. 1A, a plurality of holes H exposing a portion of the substrate 10 on an anode substrate 10 having an indium tin oxide (ITO) electrode 11 and a phosphor 12 thereon is provided. A metal frame 100 for forming a spacer is fixed. Here, the metal frame 100 is formed by a molding method, as shown in Figure 2, has a plurality of holes (H), the height is 150 to 3,000㎛. In addition, the metal frame 100 is made of a metal having the same thermal expansion coefficient as that of the substrate, for example, a metal having a thermal expansion coefficient of 83 × 10 −7 to 87 × 10 −7 / ° C. at a temperature of 0 to 300 ° C. Preferably, the metal frame 100 is made of Ni-Cr-Fe, Ni-Fe or Ni-Co-Fe.
그런 다음, 도 1b에 도시된 바와 같이, 금속틀(100)의 홀(H)에 스페이서용 페이스트(paste; 13)을 도포하여 매립하고 100 내지 200℃에서 건조한 후 소성시킨다. 그리고 나서, 도 1c에 도시된 바와 같이, 금속틀(100)을 제거함으로써, 스페이서(13A)를 완성한다. 이때, 스페이서용 페이스트(13)의 높이와 폭은 건조 및 소성에 의해 수축되었기 때문에, 금속틀(100)을 용이하게 제거할 수 있다.Then, as shown in Figure 1b, by applying a spacer paste (13) in the hole (H) of the metal mold 100, embedded and dried at 100 to 200 ℃ and baked. Then, as shown in FIG. 1C, the spacer 13A is completed by removing the metal frame 100. At this time, since the height and width of the spacer paste 13 are shrunk by drying and baking, the metal mold 100 can be easily removed.
상기한 본 발명에 의하면, 종래의 인쇄방법이나 프리폼에 의핸 스페이서 형성방법 대신에, 몰딩공정에 의해 형성된 스페이서 형성용 금속틀을 이용하여 애노드 기판에 스페이서를 형성하기 때문에, 공정이 단순해짐으로써 수율이 향상되고, 제조비용이 감소된다. 또한, 대면적 패널에도 용이하게 적용할 수 있다.According to the present invention described above, instead of the conventional printing method or the method of forming the spacer by the preform, the spacer is formed on the anode substrate by using the metal frame for forming the spacer formed by the molding process, so that the yield is simplified by the process. It is improved and manufacturing cost is reduced. In addition, it can be easily applied to a large area panel.
또한, 본 발명은 상기 실시예에 한정되지 않고, 본 발명의 기술적 요지를 벗어나지 않는 범위내에서 다양하게 변형시켜 실시할 수 있다.In addition, this invention is not limited to the said Example, It can variously deform and implement within the range which does not deviate from the technical summary of this invention.
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019980055664A KR20000040112A (en) | 1998-12-17 | 1998-12-17 | Spacer forming method for field emission display |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019980055664A KR20000040112A (en) | 1998-12-17 | 1998-12-17 | Spacer forming method for field emission display |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20000040112A true KR20000040112A (en) | 2000-07-05 |
Family
ID=19563342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019980055664A KR20000040112A (en) | 1998-12-17 | 1998-12-17 | Spacer forming method for field emission display |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20000040112A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100482323B1 (en) * | 2002-02-04 | 2005-04-13 | 엘지전자 주식회사 | Fabricating method and apparatus of spacer in field emission display |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5492234A (en) * | 1994-10-13 | 1996-02-20 | Micron Technology, Inc. | Method for fabricating spacer support structures useful in flat panel displays |
US5509840A (en) * | 1994-11-28 | 1996-04-23 | Industrial Technology Research Institute | Fabrication of high aspect ratio spacers for field emission display |
KR970051695A (en) * | 1995-12-07 | 1997-07-29 | 이우복 | Method of manufacturing spacer for field emission display device |
US5658832A (en) * | 1994-10-17 | 1997-08-19 | Regents Of The University Of California | Method of forming a spacer for field emission flat panel displays |
-
1998
- 1998-12-17 KR KR1019980055664A patent/KR20000040112A/en not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5492234A (en) * | 1994-10-13 | 1996-02-20 | Micron Technology, Inc. | Method for fabricating spacer support structures useful in flat panel displays |
US5658832A (en) * | 1994-10-17 | 1997-08-19 | Regents Of The University Of California | Method of forming a spacer for field emission flat panel displays |
US5509840A (en) * | 1994-11-28 | 1996-04-23 | Industrial Technology Research Institute | Fabrication of high aspect ratio spacers for field emission display |
KR970051695A (en) * | 1995-12-07 | 1997-07-29 | 이우복 | Method of manufacturing spacer for field emission display device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100482323B1 (en) * | 2002-02-04 | 2005-04-13 | 엘지전자 주식회사 | Fabricating method and apparatus of spacer in field emission display |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6741026B2 (en) | Field emission display including carbon nanotube film and method for fabricating the same | |
US6515415B1 (en) | Triode carbon nanotube field emission display using barrier rib structure and manufacturing method thereof | |
US6429582B1 (en) | Display device with grille having getter material | |
US5477105A (en) | Structure of light-emitting device with raised black matrix for use in optical devices such as flat-panel cathode-ray tubes | |
US20050184634A1 (en) | Electron emission device and method for fabricating the same | |
US6756729B1 (en) | Flat panel display and method of fabricating same | |
US7615916B2 (en) | Electron emission device including enhanced beam focusing and method of fabrication | |
JP2002025477A (en) | Surface display and its manufacturing method | |
JP4469182B2 (en) | Field emission device and manufacturing method thereof | |
US6686678B2 (en) | Flat panel display having mesh grid | |
KR20000040112A (en) | Spacer forming method for field emission display | |
JP3248041B2 (en) | Image forming apparatus and method of manufacturing the same | |
JPH10340674A (en) | Spacer for flat type display screen | |
KR20060029074A (en) | Electron emission display and method of manufacturing the same | |
JP2003123644A (en) | Plane display device and its manufacturing method | |
KR100778408B1 (en) | Field emission display and method for fabricating thereof | |
KR100254682B1 (en) | Method for fixing spacer field emission display | |
KR100315234B1 (en) | Flat panel display device | |
KR100506075B1 (en) | Field emission display devices using high aspect ratio spacer for high voltage screen and manufacturing method thereof | |
KR100542182B1 (en) | Flat panel display device | |
JP2005093125A (en) | Image display device and its manufacturing method | |
KR100212532B1 (en) | Package for fed | |
KR100965542B1 (en) | Method for fabricating field emission display including mesh grid | |
KR20010003450A (en) | Method for forming spacer of field emission display device | |
JPH05325843A (en) | Flat display |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
N231 | Notification of change of applicant | ||
N231 | Notification of change of applicant | ||
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |