KR20000019806A - Charger of wafer transfer apparatus - Google Patents

Charger of wafer transfer apparatus Download PDF

Info

Publication number
KR20000019806A
KR20000019806A KR1019980038079A KR19980038079A KR20000019806A KR 20000019806 A KR20000019806 A KR 20000019806A KR 1019980038079 A KR1019980038079 A KR 1019980038079A KR 19980038079 A KR19980038079 A KR 19980038079A KR 20000019806 A KR20000019806 A KR 20000019806A
Authority
KR
South Korea
Prior art keywords
wafer
charger
transfer apparatus
signal
light emitting
Prior art date
Application number
KR1019980038079A
Other languages
Korean (ko)
Inventor
강희복
Original Assignee
윤종용
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 윤종용, 삼성전자 주식회사 filed Critical 윤종용
Priority to KR1019980038079A priority Critical patent/KR20000019806A/en
Publication of KR20000019806A publication Critical patent/KR20000019806A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: A charger of a wafer transfer apparatus is provided to prevent the damage caused by the crash of the wafer through outputting interlock signal. CONSTITUTION: A charger comprises a sensor which senses the existence of a wafer(2), being installed on both side of a wafer loading space(1), and a controller(6) which generates an alarm signal to inform the existence of the wafer by analyzing a sensing signal or an interlock signal for controlling the operation of a wafer transfer apparatus. The sensor is an optical sensor comprising a light emitting diode(5a) or a photo detector(5b). The charger prevents the damage of the wafer which is inserted in a teflon guide(3a,3b) of the charger. In addition, it prevents a new-entered wafer from acting in the case that the wafer is not completely unloaded.

Description

웨이퍼 이송장치의 차저Charger of Wafer Feeder

본 발명은 반도체 장치 제조설비의 웨이퍼 이송장치에 관한 것으로, 더욱 상세하게는 차저의 테프론 가이드에 낀 웨이퍼를 감지하여 경고신호를 출력하거나, 인터록신호를 출력하여 무리한 후속 동작으로 인해 웨이퍼가 파손되는 것을 방지할 수 있도록 하는 웨이퍼 이송장치의 차저(charger of wafer transfer apparatus)에 관한 것이다.The present invention relates to a wafer transfer device of a semiconductor device manufacturing facility, and more particularly, to detect a wafer caught on a teflon guide of a charger and output a warning signal, or to output an interlock signal to prevent the wafer from being damaged due to an excessive subsequent operation. It relates to a charger of a wafer transfer apparatus that can be prevented.

웨이퍼 이송장치의 차저(charger)는 웨이퍼를 프로세스 챔버(process chamber)로, 프로세스 챔버에서 언로드 카세트(unload cassette)로 웨이퍼를 이송하는 반송계의 한 유닛(unit)이다. 이는 차저가 웨이퍼를 수납하면서 차저 테프론 가이드에 1매 혹은 2매 정도의 웨이퍼가 끼어 언로딩이 모두 안된 상태에서 그 다음의 후속 동작이 진행되면서 미쳐 언로딩되지 않은 웨이퍼와 새롭게 수납되는 웨이퍼가 충돌하여 이들이 파손되는 경우가 있다.The charger of the wafer transfer device is a unit of a transfer system that transfers a wafer to a process chamber and to an unload cassette from the process chamber. This is because the charger holds the wafer and one or two wafers are inserted in the charger Teflon guide and the unloading is not performed. Then, the unloaded wafer and the newly received wafer collide with each other. These may be damaged.

상기한 바와 같은 문제점을 제거하기 위하여 제안된 본 발명의 목적은 차저의 안치공간에 웨이퍼가 존재하는지를 확인하고, 안치공간의 웨이퍼가 완전하게 언로딩되지 않은 경우 이를 알리는 경고신호를 출력하거나, 혹은 웨이퍼 이송장치의 동작을 제어하기 위한 인터록신호를 출력하여 웨이퍼의 충돌로 인한 웨이퍼의 파손을 방지할 수 있도록 하는 웨이퍼 이송장치의 차저를 제공함에 있다.An object of the present invention proposed to eliminate the problems described above is to check whether the wafer exists in the charger space of the charger, and output a warning signal informing if the wafer is not completely unloaded, or the wafer The present invention provides a charger for a wafer transfer device that outputs an interlock signal for controlling the operation of the transfer device to prevent breakage of the wafer due to a collision of the wafer.

도1은 본 발명에 따른 웨이퍼 이송장치의 차저를 나타내는 개략도이다.1 is a schematic view showing a charger of a wafer transfer device according to the present invention.

※ 도면의 주요 부분에 대한 부호의 설명 ※※ Explanation of code about main part of drawing ※

1 : 안치공간 2 : 웨이퍼1: Settlement space 2: Wafer

3a,3b : 테프론 가이드 4a,4b : 아암3a, 3b: Teflon guide 4a, 4b: arm

5a : 발광소자 5b : 수광소자5a: light emitting element 5b: light receiving element

6 : 제어수단6: control means

상기 목적을 달성하기 위한 본 발명의 웨이퍼 이송장치의 차저는 테프론 가이드 사이의 안치공간에 안치된 다수개의 웨이퍼를 아암에 의해 카세트로 이송하도록 된 웨이퍼 이송장치의 차저에 있어서, 상기 안치공간의 양단에 설치되어 웨이퍼의 잔류상태를 감지하는 감지수단과, 상기 감지수단의 감지신호를 분석하여 웨이퍼 잔류시 이를 알리기 위한 경고신호나 이송장치의 동작을 제어하기 위한 인터록신호를 생성하게 되는 제어수단으로 구성되는 것을 특징으로 한다.The charger of the wafer transfer apparatus of the present invention for achieving the above object is a charger of the wafer transfer apparatus to transfer a plurality of wafers placed in the settled space between the Teflon guide to the cassette by the arm, both ends of the settled space And sensing means for detecting a residual state of the wafer, and a control means for analyzing a detection signal of the sensing means to generate a warning signal for notifying when the wafer remains, or an interlock signal for controlling the operation of the transfer apparatus. It is characterized by.

상기 감지수단은 안치공간의 양단에 설치되어 광을 조사하고, 이를 수신하는 발광소자와 수광소자로 구성된 광센서로 구성되는 것이 바람직하다.The sensing means is preferably provided at both ends of the settled space is composed of an optical sensor consisting of a light emitting element and a light receiving element for irradiating light and receiving it.

이하, 본 발명의 구체적인 실시예를 첨부한 예시도면을 참조하여 보다 상세히 설명한다.Hereinafter, with reference to the accompanying drawings, a specific embodiment of the present invention will be described in more detail.

도1을 참조하면, 다수개의 웨이퍼(2)가 안치되는 안치공간(1)의 양측에는 테프론 가이드(3a)(3b)가 설치되고, 상기 안치공간(1)의 상부에는 다수개의 웨이퍼(2)를 잡아 언로딩 카세트로 언로딩하는 아암(4a)(4b)이 설치되며, 안치공간(1)의 양단, 즉 안치공간(1)에 안치된 웨이퍼의 유무를 감지하게 되는 발광소자(5a)와 수광소자(5b)가 각각 구성되어있다.Referring to FIG. 1, Teflon guides 3a and 3b are provided at both sides of a settling space 1 in which a plurality of wafers 2 are placed, and a plurality of wafers 2 are placed on the settling space 1. Arms (4a) and (4b) for holding and unloading into the unloading cassette are installed, and the light emitting element (5a) for detecting the end of the settled space (1), that is, the presence or absence of the wafer placed in the settled space (1) The light receiving element 5b is comprised, respectively.

그리고, 상기 발광소자(5a)와 수광소자(5b)는 제어수단(6)에 연결되어서 안치공간(1)에 웨이퍼가 있는지를 알리며, 이 발광소자(5a)와 수광소자(5b)의 감지신호를 인가받은 제어수단(6)은 이 감지신호에 의해 안치공간(1)에 웨이퍼가 있는지를 판단하고, 1개 혹은 2개 이상의 웨이퍼가 존재시 이를 알리는 경고신호와 웨이퍼 이송장치의 동작을 일시적으로 정지시키기 위한 인터록신호를 생성하여 출력하도록 구성되어 있다.Then, the light emitting element 5a and the light receiving element 5b are connected to the control means 6 to indicate whether there is a wafer in the settled space 1, and the detection signal of the light emitting element 5a and the light receiving element 5b. The control means 6, which has been applied to determine whether there is a wafer in the settled space 1 by this detection signal, and temporarily warns the operation of the wafer transfer device and the warning signal informing of the presence of one or more wafers. And generate and output an interlock signal for stopping.

이와같이 구성된 본 발명은 다음과 같이 작동된다.The present invention thus constructed operates as follows.

종래의 기술에서와 같이, 미도시된 푸쉬(pusher)의 작동으로 언로딩하고자 하는 웨 이퍼가 차저의 안치공간(1)으로 내입된다. 이어서, 아암(4a)(4b)이 작동되어 안치공간(1)의 웨이퍼를 잡아 언로딩 카세트로 언로딩한다.As in the prior art, a wafer to be unloaded by the operation of a pusher (not shown) is introduced into the charger space 1 of the charger. The arms 4a and 4b are then operated to grab the wafer in the settled space 1 and unload it into the unloading cassette.

이 때, 발광소자(5a)는 제어수단(6)에서 공급되는 구동전원으로 구동되어 안치공간(1) 내에 웨이퍼가 존재하는지를 확인하기 위한 광을 조사하고, 이 발광소자(5b)에 대향되게 설치된 수광소자(5b)는 발광소자(5a)에서 조사되는 광을 수신하여 제어수단(6)에 제공한다.At this time, the light emitting element 5a is driven by the driving power supplied from the control means 6 to irradiate light for checking whether a wafer exists in the settled space 1, and is installed to face the light emitting element 5b. The light receiving element 5b receives the light irradiated from the light emitting element 5a and provides it to the control means 6.

이에 따라, 제어수단(6)은 발광소자(5a)와 수광소자(5b)로 구성된 광센서의 감지신호를 인가받아 안치공간(1) 내에 잔류하는 웨이퍼가 존재하는지를 판단한다. 즉, 발광소자(5a)에서 조사된 광이 수광소자(5b)를 통해 수신되지 않는 경우 제어수단(6)은 언로딩 작업후 일부의 웨이퍼가 테프론 가이드(3a)(3b)에 끼어 잔류하는 것으로 판단하고, 반대로 발광소자(5a)에서 조사된 광이 수광소자(5b)를 통해 수신되는 경우에는 언로딩 작업이 완전하게 이루어진 것으로 판단한다.Accordingly, the control means 6 receives the detection signal of the optical sensor composed of the light emitting element 5a and the light receiving element 5b to determine whether there is a wafer remaining in the settled space 1. That is, when the light irradiated from the light emitting element 5a is not received through the light receiving element 5b, the control means 6 indicates that some of the wafers remain in the Teflon guides 3a and 3b after the unloading operation. On the contrary, when the light irradiated from the light emitting element 5a is received through the light receiving element 5b, it is determined that the unloading operation is completed.

그리고, 테프론 가이드(3a)(3b)에 1개 혹은 2개 이상의 웨이퍼가 끼게 되면, 제어수단(6)은 미도시된 경보장치를 구동시켜 웨이퍼의 언로딩이 완전하게 되지 않았음을 알리는 한편, 웨이퍼 이송장치의 전반적인 동작을 제어하는 시스템에 인터록신호를 제공하여 안치공간(1)에 웨이퍼가 존재하는 상태에서 더 이상의 동작이 계속되지 않도록 하는 것이다.If one or two or more wafers are sandwiched in the teflon guides 3a and 3b, the control means 6 drives an alarm not shown to indicate that the unloading of the wafer is not complete. The interlock signal is provided to the system that controls the overall operation of the wafer transfer device so that no further operation is continued in the presence of the wafer in the settling space 1.

다시 말하면, 언로딩이 완전하게 실시되지 않은 상태에서 새로운 웨이퍼가 유입되어 웨이퍼 간의 충돌로 인해 웨이퍼가 파손되는 것을 막게 된다.In other words, new wafers are introduced while the unloading is not carried out completely, thereby preventing the wafers from being damaged due to the collision between the wafers.

따라서, 본 발명에 의하면 차저의 안치공간에 웨이퍼가 존재하는지를 확인하고, 안치공간의 웨이퍼가 완전하게 언로딩되지 않은 경우 이를 알리는 경고신호를 출력하거나, 혹은 웨이퍼 이송장치의 동작을 제어하기 위한 인터록신호를 출력하여 웨이퍼의 충돌로 인한 웨이퍼의 파손을 방지할 수 있는 효과가 있다.Accordingly, according to the present invention, an interlock signal for checking whether a wafer exists in the settled space of the charger and outputting a warning signal informing the user when the wafer in the settled space is not completely unloaded, or controlling the operation of the wafer transfer device. By outputting the effect of preventing the breakage of the wafer due to the collision of the wafer.

이는 더 나아가서 웨이퍼 이송장치의 차저에 파손된 웨이퍼가 잔류하면서 공정을 지연하는 것을 미연에 방지할 수 있는 효과가 있다.This further has an effect of preventing the delay of the process while remaining in the charger of the wafer transfer device remaining.

이상에서 본 발명은 기재된 구체예에 대해서만 상세히 설명되었지만 본 발명의 기술사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (2)

테프론 가이드 사이의 안치공간에 안치된 다수개의 웨이퍼를 아암에 의해 카세트로 이송하도록 된 웨이퍼 이송장치의 차저에 있어서,In the charger of the wafer transfer device to transfer a plurality of wafers placed in the settled space between the teflon guide to the cassette by the arm, 상기 안치공간의 양단에 설치되어 웨이퍼의 잔류상태를 감지하는 감지수단과;Sensing means installed at both ends of the settled space and detecting a residual state of the wafer; 상기 감지수단의 감지신호를 분석하여 웨이퍼 잔류시 이를 알리기 위한 경고신호나 이송장치의 동작을 제어하기 위한 인터록신호를 생성하게 되는 제어수단으로 구성되는 것을 특징으로 하는 웨이퍼 이송장치의 차저.And a control means for analyzing a detection signal of the detection means and generating an alarm signal for notifying when the wafer remains, or an interlock signal for controlling the operation of the transfer device. 제1항에 있어서,The method of claim 1, 상기 감지수단은 발광소자와 수광소자로 구성된 광센서로 구성되는 것을 특징으로 하는 상기 웨이퍼 이송장치의 차저.And said sensing means comprises an optical sensor comprising a light emitting element and a light receiving element.
KR1019980038079A 1998-09-15 1998-09-15 Charger of wafer transfer apparatus KR20000019806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019980038079A KR20000019806A (en) 1998-09-15 1998-09-15 Charger of wafer transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019980038079A KR20000019806A (en) 1998-09-15 1998-09-15 Charger of wafer transfer apparatus

Publications (1)

Publication Number Publication Date
KR20000019806A true KR20000019806A (en) 2000-04-15

Family

ID=19550695

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980038079A KR20000019806A (en) 1998-09-15 1998-09-15 Charger of wafer transfer apparatus

Country Status (1)

Country Link
KR (1) KR20000019806A (en)

Similar Documents

Publication Publication Date Title
US6043502A (en) Apparatus and method for sensing an insertion state of a wafer in a cassette
JPH10321699A (en) Wafer-transfer device with wafer erroneous mount detection sensor, semiconductor-manufacturing device with the same, and wafer-transfer method using the same
KR20000019806A (en) Charger of wafer transfer apparatus
KR100729038B1 (en) Sem apparatus for perceives contamination
KR100208031B1 (en) Detecting system for remaining wafer and its method
US20030031535A1 (en) Wafer positioning check in vertical semiconductor furnaces
KR19980014084A (en) Wafer position detection system and wafer detection method of ion implantation facility
KR20050117288A (en) Wafer detecting apparatus in transfer chamber
KR20010046793A (en) Apparatus for detecting an alignment of a wafer
KR100495419B1 (en) Semiconductor manufacturing device
KR970030607A (en) Semiconductor Wafer Transfer Device
KR20040003268A (en) Wafer sorting apparatus having a sensing performance with respect to a wafer abnormally loaded on a wafer cassette
KR980011967A (en) Wafer dual detection system and method of semiconductor manufacturing facility
KR100626360B1 (en) Semiconductor wafer alignment apparatus for detecting damage of semiconductor wafer
KR20000009264A (en) Apparatus of preventing unloading error of prober system
KR20030095528A (en) wafer loading error sensing apparatus in semiconductor fabricating equipment
KR20060075895A (en) Wafer counting device in the wet cleaning system
KR980006007A (en) Wafer Transfer Device
KR200157375Y1 (en) A releasing protection device for return wafer in semiconductor fabrication apparatus
KR100246850B1 (en) Wafer carrier elevator for sensing a wafer incongruent loading after dry etching process
KR100575561B1 (en) Apparatus for safely placing of wafer
KR100219798B1 (en) Wafer transfer apparatus of stepper
KR20050055286A (en) Transporter of wafer cassette carrier and method
KR19980078093A (en) Wafer loading monitoring device of ion implantation facility
KR19980078738A (en) Elevator Vibration Sensing Device for Ion Injection Equipment

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination