KR20000009683A - Client tray transmission apparatus for a semiconductor device test equipment - Google Patents

Abstract

PURPOSE: A client tray transmission apparatus for a semiconductor device test equipment is provided, which transmits a client tray which a semiconductor device is filled to a loading device, transmits an empty client tray to an unloading device, or can quickly transmits a loaded client tray to a unloading stacker and transmits a tray lifting device. CONSTITUTION: The client tray transmission apparatus comprises: a first transmission assembly (200) for transmitting a client tray which a semiconductor device is filled to a loading device, transmitting an empty client tray to an unloading device, or transmitting a loaded client tray to a unloading stacker; a second transmission assembly (300) which is independently operated with the first transmission assembly (200) for performing the loading and unloading of the client tray; a LM basic assembly (120) for moving the first transmission assembly (200) and the second transmission assembly (300) in a vertical direction; and a vertical bar (110) for supporting the LM basic assembly (120). Thereby, it is possible to decrease the time consumed in the unloading and loading of the client tray.

Description

Customer Tray Feeder of Semiconductor Device Inspection Equipment

The present invention relates to a customer tray transfer device of the semiconductor device inspection equipment, and more particularly, to transfer the customer tray containing the semiconductor device to the loading device, or to load the completed inspection of the semiconductor device to inspect the finished semiconductor device The empty customer tray can be transported to the unloading device for fast loading, or the loaded customer tray can be quickly and safely transported to the unloading stacker, and the tray lifter freely moving the customer tray can be picked up and released. The present invention relates to a customer tray transfer device of a semiconductor device inspection device capable of minimizing time spent on loading and unloading.

In the recent electronics industry, while the output and function of electronic devices such as integrated circuits and semiconductor chips are rapidly increasing, various efforts have been made to reduce their size and unit manufacturing cost. One such method is to increase the test speed of electronic devices by simultaneously testing a plurality of electronic devices in an inspection process for inspecting the characteristics and performance of manufactured electronic devices.

Each manufactured electronic device, e.g. one semiconductor element, is manufactured in a small and delicate manner so that it is housed within a carrier module to prevent the risk of breakage during handling and to maintain a precise position for testing of the characteristics, The carrier module is loaded into a tray designed to meet the manufacturer's specifications and loaded into the tester to check the electrical characteristics and performance of the semiconductor device.

In order to improve the inspection speed of the semiconductor device or to ensure the safety of the semiconductor device, the inspector is placed in a customer tray, loaded into a stacker, and transferred to the loader by a transfer device, and then transferred to a test tray suitable for the inspection equipment. Then proceed with the test. After the inspection is completed, the semiconductor device is transferred to a customer tray previously transferred to an unloading unit by a transfer device. In the semiconductor inspection equipment, a tray conveying device for moving the customer tray from the stacker to the loading unit or from the loading unit to the unloading unit is inevitably required.

In the conventional customer tray feeder, one motor used as a power source is assembled to a plate assembled perpendicular to the base plate in front of the inspection equipment, and the two customer tray feeders connect the pulley and the LM guide connected to the motor through the belt. It is assembled in one piece by using. These two customer tray feeders were designed to be collectively controlled during horizontal movement. Therefore, when one customer tray feeder loads or unloads a customer tray, the other customer tray feeder waits until the operation of the active customer tray feeder is completed without performing any operation. . As a result, there has been a drawback that a large amount of time is spent loading and unloading the customer tray.

The present invention has been made to solve the conventional problems as described above, the object of the present invention is to freely move the tray lifting device for performing the operation of picking up or placing the customer tray containing the semiconductor device to inspect the completed semiconductor device In order to minimize the time spent on loading and unloading to provide a customer tray transfer device of the semiconductor device inspection equipment.

1 is a perspective view of a customer tray transfer device of the semiconductor device inspection equipment according to an embodiment of the present invention,

FIG. 2 is a front view of a customer tray feeder of the semiconductor device inspecting apparatus illustrated in FIG. 1;

3 is an exploded perspective view of the first conveyance assembly of the customer tray conveying apparatus shown in FIG. 1;

4 is an exploded perspective view of a second conveyance assembly of the customer tray conveying apparatus shown in FIG. 1, and

5 is a view showing a state in which the customer tray feeder coupled to the tray lifting device according to an embodiment of the present invention.

<Explanation of symbols for main parts of drawing>

100: customer tray feeder 110: vertical bar

120: LM base plate assembly 121: LM base plate

122: ball screw guide block 123: first tray stopper

124: ball screw shaft 126: LM guide rail

131: first capplex 132: second capplex

200: first transfer assembly 210: first step motor

220: first motor bracket 230: first LM block plate

234: First upper sensor flag 240: First LM block

243,342: first fastening end 250: first motor pulley

254: first timing belt 255, 355: second fastening end

256: first screw pulley 260: first ball screw nut

262: first nut housing 268, 368: third fastening end

270: first elevating guide plate 272,372: guide groove

280: first sensor block 282: speed sensor

286: limit sensor 300: second transfer assembly

310: second step motor 320: second motor bracket

330: Second LM block plate 334: Second upper sensor flag

336: second tray stopper 340: second LM block

343: first fastening end 350: second motor pulley

354: second timing belt 355: second fastening end

356: second screw pulley 360: second ball screw nut

362: second nut housing 370: second lifting guide plate

380: second sensor block 382: lower sensor flag

386: Stacker position check sensor 400: Tray lifting device

410: Cylinder Bracket

In order to achieve the above object, the present invention,

A first transfer assembly for transferring the customer tray containing the semiconductor elements to the loading apparatus, transferring the empty customer tray to the unloading apparatus, or transferring the customer tray loaded with the inspected semiconductor elements to the unloading stacker;

A second transfer assembly disposed symmetrically with the first transfer assembly and operating independently of the first transfer assembly to perform loading or unloading of the customer tray independent of operation of the first transfer assembly;

An LM base plate extending in a lateral direction and having an LM guide rail protruding therein, a pair of ball screw guide blocks protruding in one direction from both ends of the LM base plate, and between the ball screw guide blocks and the LM base plate. An LM base plate assembly having a ball screw shaft extending parallel to and acting as a fixed axis, the LM base plate assembly supporting the first conveying assembly and the second conveying assembly in a transverse direction so as to reciprocate; And

Provided is a customer tray transfer device for semiconductor device inspection equipment including a vertical bar for holding and holding the LM base plate assembly.

As described above, in the customer tray feeder according to the present invention, the ball screw shaft is fixed to the shaft, and the two step motors are assembled to the moving shafts of the first and second transfer assemblies which are separated in a symmetrical shape. By using them as separate control and power sources, the two assemblies work independently of each other to load and unload customer trays.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view of a customer tray transfer device of the semiconductor device inspection equipment according to a preferred embodiment of the present invention, Figure 2 is a front view of the customer tray transfer device of the semiconductor device inspection equipment shown in FIG.

1 and 2, the customer tray conveying apparatus 100 according to the present invention is mainly the first conveying assembly 200 and the second conveying assembly 300, LM for supporting the reciprocating movement in the transverse direction possible Base plate assembly 120, and a plurality of vertical bars 110 for fixedly supporting the LM base plate assembly 120.

The lower end of the vertical bar 110 is fixed to the support frame (not shown) of the tray elevating device 400 (see FIG. 5), and the upper end of the vertical bar 110 is the middle of the semiconductor device inspection equipment (not shown). It is fixed to a frame (not shown).

The LM base plate assembly 120 extends laterally perpendicular to the vertical bar 110 and is secured in the middle of the vertical bar 110. The LM base plate assembly 120 includes an LM base plate 121 extending in the lateral direction, a pair of ball screw guide blocks 122 protruding in one direction from both ends of the LM base plate 121, and a ball screw guide block 122. And a ball screw shaft 124 extending parallel to the LM base plate 121 and acting as a fixed shaft. Inside the LM base plate 121, an LM guide rail 126 is mounted over the entire length of the LM base plate 121.

A plurality of tray position check sensors 128 are attached to both sides of the LM base plate 121 above the LM guide rail 126. On the inner surface of the ball screw guide block 122, the first tray stopper 123 is formed to protrude inward. The tray position sensor 128 has a tray position sensor as the first conveyance assembly 200 and the second conveyance assembly 300 move laterally along the ball screw shaft 124 of the LM base plate assembly 120. By generating detection signals when 128 is reached, their position control is enabled. As a result, the tray position checking sensor 128 primarily prevents the first conveying assembly 200 or the second conveying assembly 300 from colliding with the ball screw guide block 122. When the first tray stopper 123 is not controlled by the tray position sensor 128, the first conveying assembly 200 or the second conveying assembly 300 collides with the ball screw guide block 122. It performs the function of preventing the secondary.

Meanwhile, a caflex assembly 130 for arranging and arranging the wires connected to the first transfer assembly 200 and the second transfer assembly 300 on the vertical bar 110 at the bottom of the LM base plate assembly 120. ) Is attached. The multiplex assembly 130 includes a flexible first and second complexes 131, 132, and a multiplex guide 134. Upper ends of the first and second transport complexes 131 and 132 may include a first sensor block 280 (see FIG. 3) and a second sensor of the first transport assembly 200 and the second transport assembly 300. Attached to blocks 380 (see FIG. 4), respectively (FIGS. 1, 2 and 5 show the second capplex 132 separated from the second sensor block 380 for ease of explanation). An electric wire guide 136 penetrates through the middle of the capplex guide 134.

3 is an exploded perspective view of the first conveyance assembly of the customer tray conveying apparatus shown in FIG. 1;

Referring to FIG. 3, first, the first transfer assembly 200 includes a first step motor 210 for generating power, a first motor bracket 220 for fixing and supporting the first step motor 210, and And a first LM block plate 230 and a first LM block 240 for connecting the first motor bracket 220 to the LM base plate assembly 120.

The first step motor 210 includes a first main body 211 and a first motor rod 212 protruding from both sides of the first main body 211. The first fastening hole 213 is formed in the corner of the first body 211.

The first motor bracket 220 includes a central portion 222 and a side portion 224 integrally formed. A first circular opening 221 is formed at the center of the central portion 222, and a second fastening hole 223 is formed around the first circular opening 221. The second fastening hole 223 has a shape and size corresponding to the first fastening hole 213 formed in the four corners of the first body 211. The side portion 224 extends at an angle of 90 degrees toward the first stepper motor 210 from one side of the central portion 222, and a plurality of third fastening holes 225 are formed in the side portion 224. The first step motor 210 passes through a first fastening hole 213 formed in the first body 211 and a second fastening hole 223 formed in the first motor bracket 220 (not shown). It is fixed to the first motor bracket 220 by the).

The first motor bracket 220 is fixed to the first LM block plate 230. That is, the first motor bracket 220 includes a third fastening hole 225 formed in the side portion 224 and a plurality of fourth fastening holes 231 formed at one upper end of the first LM block plate 230 to correspond thereto. Passing bolts (not shown) are secured to the first LM block plate 230.

The first upper sensor flag 234 is attached to the upper surface of the first LM block plate 230. The first upper sensor flag 234 is the LM above the LM guide rail 126 when the first transfer assembly 200 moves transversely along the ball screw shaft 124 of the LM base plate assembly 120. It is detected by the tray position sensor 128 attached to both sides of the base plate 121. As a result, the first upper sensor flag 234 serves as a limit of the maximum travel distance of the first transport assembly 200.

The first LM block 240 is coupled to one side of the first LM block plate 230. To this end, one side of the first LM block plate 230 facing the first LM block 240 is formed with a recess 235 to which the side 241 of the first LM block 240 can be fitted. . The first LM block 240 and the plurality of fifth fastening holes 232 formed in the middle of the first LM block plate 230 in the state of being fitted to the first LM block plate 230 through the side surface 241 and the Correspondingly, it is fixed to the first LM block plate 230 by a fastening bolt (not shown) passing through the sixth fastening hole 242 formed in the first LM block 240. The first LM block 240 is attached to the LM guide rail 126 to reciprocate along the LM guide rail 126 while being mounted on the first LM block plate 230. To this end, a first fastening end 243 having a groove shape corresponding to the shape of the LM guide rail 126 is formed on the other side surface facing the side surface 241 of the first LM block 240.

Meanwhile, a cylindrical first motor pulley 250 is connected to the first motor rod 212 of the first step motor 210. The first motor pulley 250 is connected to the first step motor 210 to receive the rotational force of the first step motor 210. To this end, the first motor pulley 250 is a part of the first motor pulley 250 is inserted into the first step motor 210 through the first circular opening 221 of the first motor bracket 220. In the following, the first motor rod 212 of the first step motor 210 is fixed between the first upper fixing piece 251 and the first lower fixing piece 252 of the first motor pulley 250. .

One end of a vertical first timing belt 254 is fitted to the first motor pulley 250. The other end of the first timing belt 254 is fitted to a cylindrical first screw pulley 256 disposed below the first motor pulley 250. As a result, the rotational force of the first step motor 210 is transmitted to the first screw pulley 256 through the first motor pulley 250 and the first timing belt 254.

The rotational force of the first step motor 210 transmitted to the first screw pulley 256 is transmitted to the first ball screw nut 260. To this end, the first ball screw nut 260 is connected to the first nut housing 262, and the first screw pulley 256 is engaged with the first ball screw nut 260 in the first nut housing 262. do. A second fastening end 255 is formed at one side of the first screw pulley 256 facing the first nut housing 262. The first guide hole 257 is formed through the center of the first screw pulley 256. The first guide hole 257 becomes a passage through which the ball screw shaft 124 passes. A plurality of seventh fastening holes 258 are formed around the first guide hole 257. A second circular opening 264 is formed in the center of the first nut housing 262 to accommodate the first ball screw nut 260. An eighth fastening hole 263 is formed around the second circular opening 264.

A second guide hole 266 penetrates through the center of the first ball screw nut 260. The second guide hole 266 becomes a passage through which the ball screw shaft 124 passes. A plurality of ninth fastening holes 265 are formed around the second guide hole 266. A third fastening end 268 is formed at one side of the first ball screw nut 260 facing the first nut housing 262. The third fastening end 268 has an inner diameter larger than the outer diameter of the second fastening end 255 formed on the first screw pulley 256.

The first ball screw nut 260 is inserted into the second circular opening 264 of the first nut housing 262 and the ninth fastening hole 265 of the first ball screw nut 260 and the first nut housing. It is fixed to the first nut housing 262 by a fastening bolt (not shown) passing through the eighth fastening hole 263 of 262. At this time, the first screw pulley 256 is the seventh of the first screw pulley 256 in a state in which the second fastening end 255 is inserted into the third fastening end 268 of the first ball screw nut 260. The first ball screw nut 260 by a fastening bolt (not shown) passing through the fastening hole (not shown) formed in the fastening hole 258 and the third fastening end 268 of the first ball screw nut 260. Is coupled to.

Meanwhile, the first nut housing 262 may include a fastening hole (not shown) formed in one side of the first nut housing 262 and a tenth fastening hole 233 formed in the middle of the first LM block plate 230. Passing bolts (not shown) are secured to the first LM block plate 230. The first lifting guide plate 270 is mounted on the other side of the first nut housing 262 opposite to the first LM block plate 230. That is, the first elevating guide plate 270 may include the eleventh fastening hole 271 formed through the first elevating guide plate 270 and the twelfth fastening hole 267 formed on the side surface of the first nut housing 262. Passing bolts (not shown) are secured to the other side of the first nut housing 262. The first elevating guide plate 270 includes a pair of guide grooves 272 formed perpendicular to the first elevating guide plate 270. The guide groove 272 is provided with the cylinder bracket 410 of the tray lifting device 400 when the tray lifting device 400 (see FIG. 5) is mounted adjacent to the customer tray feeder 100 according to the present invention. It is slidably accommodated in the vertical direction.

One end of the first sensor block 280 is mounted below the first elevating guide plate 270. That is, the first sensor block 280 passes through a fastening hole (not shown) formed under the first lifting guide plate 270 and a thirteenth fastening hole 283 formed in the first sensor block 280. (Not shown) is vertically mounted to the lower portion of the first elevating guide plate 270. In addition, the other end of the first sensor block 280 is mounted below the first LM block 230. That is, the first sensor block 280 passes through a fastening hole (not shown) formed below the first LM block 230 and a fourteenth fastening hole 284 formed in the first sensor block 280 ( (Not shown) perpendicularly to the bottom of the first LM block 230. The speed sensor 282 and the limit sensor 286 are mounted on the bottom surface of the first sensor block 280. The speed sensor 282 senses a lower sensor flag 382 mounted on the bottom surface of the second sensor block 380 of the second transfer assembly 300, which will be described below. The speed sensor 282 detects the lower sensor flag 382 and generates a signal for reducing the rotation speed of the first step motor 210. The limit sensor 286 detects the lower sensor flag 382 and generates a signal for stopping the rotation of the first step motor 210.

4 is an exploded perspective view of the second conveyance assembly of the customer tray conveying apparatus shown in FIG. 1;

Referring to FIG. 4, the second transfer assembly 300 has a configuration substantially similar to the first transfer assembly 200 shown in FIG. 3 and operates independently of the first transfer assembly 200. The second transfer assembly 300 supports the second step motor 310 that generates power, the second motor bracket 320 for holding and supporting the second step motor 310, and the second motor bracket 320. A second LM block plate 330 and a second LM block 340 for connecting to the LM base plate assembly 120 are included.

The second step motor 310 includes a second main body 311 and a second motor rod 312 protruding from both sides of the second main body 311. The first fastening hole 313 is formed in the corner of the second main body 311.

The second motor bracket 320 has a central portion 322 and a side portion 324 formed integrally. A first circular opening 321 is formed at the center of the central portion 322, and a second fastening hole 323 is formed around the first circular opening 321. The second fastening hole 323 has a shape and size corresponding to the first fastening hole 313 formed at the four corners of the second body 311. The side portion 324 extends at an angle of 90 degrees toward the second step motor 310 from one side of the central portion 322, and a plurality of third fastening holes 325 are formed in the side portion 324. The second step motor 310 passes through a first fastening hole 313 formed in the second body 311 and a second fastening hole 323 formed in the second motor bracket 320 (not shown). ) Is fixed to the second motor bracket 320.

The second motor bracket 320 is fixed to the second LM block plate 330. That is, the second motor bracket 320 has a third fastening hole 325 formed in the side portion 324 and a plurality of fourth fastening holes 331 formed at one upper end of the second LM block plate 330 to correspond thereto. It is fixed to the second LM block plate 330 by passing fastening bolts (not shown).

The second upper sensor flag 334 is attached to the upper surface of the second LM block plate 330. The second upper sensor flag 334 is the LM above the LM guide rail 126 when the second conveyance assembly 300 moves transversely along the ball screw shaft 124 of the LM base plate assembly 120. It is detected by the tray position sensor 128 attached to both sides of the base plate 121. Thereby, the second upper sensor flag 334 acts as a limit of the maximum travel distance of the second transfer assembly 300.

The second tray stopper 336 protrudes from the upper side of the narrow side of the second LM block plate 330 facing the first transfer assembly 200. The second tray stopper 336 is the first tray assembly 200 when the first transfer assembly 200 and the second transfer assembly 300 move laterally along the ball screw shaft 124 of the LM base plate assembly 120. Even if the first transfer assembly 200 and the second transfer assembly 300 collide with each other due to a malfunction of the speed sensor 282 and the limit sensor 286 mounted on the bottom surface of the sensor block 280, interference between them may be prevented. It acts as a buffer to prevent.

The second LM block 340 is coupled to one side of the second LM block plate 330. To this end, a recess 335 is formed at one side of the second LM block plate 330 facing the second LM block 340 to which the side surface 341 of the second LM block 340 can be fitted. . The plurality of fifth fastening holes 332 formed in the middle of the second LM block plate 330 in the state where the second LM block 340 is fitted to the second LM block plate 330 through the side surface 341, and Correspondingly, it is fixed to the second LM block plate 330 by a fastening bolt (not shown) passing through the sixth fastening hole 342 formed in the first LM block 340. The second LM block 340 is attached to the LM guide rail 126 to reciprocate along the LM guide rail 126 while being mounted on the second LM block plate 330. To this end, a first fastening end 343 having a groove shape corresponding to the shape of the LM guide rail 126 is formed on the other side surface opposite to the side surface 341 of the second LM block 340.

Meanwhile, a cylindrical second motor pulley 350 is connected to the second motor rod 312 of the second step motor 310. The second motor pulley 350 is connected to the second step motor 310 to receive the rotational force of the second step motor 310. The second motor pulley 350 has a portion of the second motor pulley 350 inserted into the second step motor 310 through the first circular opening 321 of the second motor bracket 320. The second motor rod 312 of the second step motor 310 is fixed between the second upper fixing piece 351 and the second lower fixing piece 352 of the motor pulley 350.

One end of a vertical second timing belt 354 is fitted to the second motor pulley 350. The other end of the second timing belt 354 is fitted to the cylindrical second screw pulley 356 disposed below the second motor pulley 350. As a result, the rotational force of the second step motor 310 is transmitted to the second screw pulley 356 through the second motor pulley 350 and the second timing belt 354.

The rotational force of the second step motor 310 transmitted to the second screw pulley 356 is transmitted to the second ball screw nut 360. To this end, the second ball screw nut 360 is connected to the second nut housing 362, and the second screw pulley 356 engages with the second ball screw nut 360 in the second nut housing 362. do. A second fastening end 355 is formed at one side of the second screw pulley 356 facing the second nut housing 362. The first guide hole 357 penetrates through the center of the second screw pulley 356. The first guide hole 357 becomes a passage through which the ball screw shaft 124 passes. A plurality of seventh fastening holes 358 are formed around the first guide hole 357. A second circular opening 364 is formed in the center of the second nut housing 362 to receive the second ball screw nut 360. An eighth fastening hole 363 is formed around the second circular opening 364.

A second guide hole 366 penetrates through the center of the second ball screw nut 360. The second guide hole 366 becomes a passage through which the ball screw shaft 124 passes. A plurality of ninth fastening holes 365 are formed around the second guide hole 366. A third fastening end 368 is formed at one side of the second ball screw nut 360 facing the second nut housing 362. The third fastening end 368 has an inner diameter larger than the outer diameter of the second fastening end 355 formed in the second screw pulley 356.

The second ball screw nut 360 is inserted into the second circular opening 364 of the second nut housing 362 and the ninth fastening hole 365 of the second ball screw nut 360 and the second nut housing It is secured to the second nut housing 362 by a fastening bolt (not shown) passing through the eighth fastening hole 363 of 362. At this time, the second screw pulley 356 is the seventh of the second screw pulley 356 in a state in which the second fastening end 355 is inserted into the third fastening end 368 of the second ball screw nut 360. The second ball screw nut 360 by a fastening bolt (not shown) passing through the fastening hole (not shown) formed in the fastening hole 358 and the third fastening end 368 of the second ball screw nut 360. Is coupled to.

Meanwhile, the second nut housing 362 may include a fastening hole (not shown) formed in one side of the second nut housing 362 and a tenth fastening hole 333 formed between the second LM block plate 330. It is fixed to the second LM block plate 330 by passing fastening bolts (not shown). The second lifting guide plate 370 is mounted on the other side of the second nut housing 362 opposite the second LM block plate 330. That is, the second elevating guide plate 370 may include the eleventh fastening hole 371 formed through the second elevating guide plate 370 and the twelfth fastening hole 367 formed on the side surfaces of the first nut housing 362. Passing bolts (not shown) are secured to the other side of the second nut housing 362. The second elevating guide plate 370 includes a pair of guide grooves 372 formed perpendicular to the second elevating guide plate 370. The guide groove 372 is a cylinder bracket 410 of the tray lifting device 400 when the tray lifting device 400 (see Fig. 5) is mounted adjacent to the customer tray feeder 100 according to the present invention. It is slidably accommodated in the vertical direction.

One end of the second sensor block 380 is mounted below the second elevating guide plate 370. That is, the second sensor block 380 passes through a fastening hole (not shown) formed in the lower portion of the second lifting guide plate 370 and a thirteenth fastening hole 383 formed in the second sensor block 380. It is mounted perpendicularly to the lower part of the 2nd lifting guide plate 370 by (not shown). In addition, the other end of the second sensor block 380 is mounted under the second LM block 330. That is, the second sensor block 380 is a fastening bolt (not shown) formed in the lower portion of the second LM block 330 and the fastening bolt passing through the fourteenth fastening hole 384 formed in the second sensor block 380 ( Not shown) to be mounted perpendicular to the bottom of the second LM block 330. The lower sensor flag 382 and the stacker position check sensor 386 are mounted on the lower surface of the second sensor block 380.

The lower sensor flag 382 serves as a limit of the maximum distance between the first transport assembly 200 and the second transport assembly 300. That is, the lower sensor flag 382 is adjacent to each other while the first conveying assembly 200 and the second conveying assembly 300 move laterally along the ball screw shaft 124 of the LM base plate assembly 120. Is detected by the speed sensor 282 mounted below the first sensor block 280 of the first transfer assembly 200. As a result, the first transfer assembly 200 and the second transfer assembly 300 reduce the approach speed, and the limit sensor 286 mounted below the first sensor block 280 of the first transfer assembly 200 is reduced. When the lower sensor flag 382 mounted on the second sensor block 380 of the second assembly 300 is detected, the second sensor 300 stops.

The stacker position check sensor 386 may be configured to include a second position when the first transfer assembly 200 and the second transfer assembly 300 move laterally along the ball screw shaft 124 of the LM base plate assembly 120. It detects whether the transfer assembly 300 is positioned on the unloading stacker (not shown).

As mentioned above, in the customer tray conveying apparatus 100 according to the present invention, the first conveying assembly having the ball screw shaft 124 as a fixed shaft and the two step motors 210 and 310 are symmetrically separated. By assembling the moving shaft of the 200 and the second transfer assembly 300 and using them as separate control and power sources of the assembly, the two assemblies 200 and 300 operate independently of each other to perform loading and unloading of the customer tray. . Therefore, the work speed is high, the customer tray can be conveniently transported, and the time for loading and unloading the customer tray can be greatly reduced.

Although described above with reference to a preferred embodiment of the present invention, those skilled in the art will be variously modified and changed within the scope of the present invention without departing from the spirit and scope of the invention described in the claims below. I can understand that you can.

Claims (15)

A first transfer assembly for transferring the customer tray containing the semiconductor elements to the loading apparatus, transferring the empty customer tray to the unloading apparatus, or transferring the customer tray loaded with the inspected semiconductor elements to the unloading stacker; A second transfer assembly disposed symmetrically with the first transfer assembly and operating independently of the first transfer assembly to perform loading or unloading of the customer tray independent of operation of the first transfer assembly; An LM base plate extending in a lateral direction and having an LM guide rail protruding therein, a pair of ball screw guide blocks protruding in one direction from both ends of the LM base plate, and between the ball screw guide blocks and the LM base plate. An LM base plate assembly having a ball screw shaft extending parallel to and acting as a fixed axis, the LM base plate assembly supporting the first conveying assembly and the second conveying assembly in a transverse direction so as to reciprocate; And Customer tray transfer apparatus of the semiconductor device inspection equipment comprising a vertical bar for holding and holding the LM base plate assembly. The method of claim 1, wherein the first transfer assembly comprises: a first step motor for generating power, a first motor bracket for fixing and supporting the first step motor, and the first motor bracket to the LM base plate assembly And a first LM block plate and a first LM block, wherein the first step motor includes a first body having a first fastening hole formed at a corner thereof, and a first motor rod protruding from both sides of the first body. The first motor bracket includes a central portion and a side portion integrally formed with a first circular opening, and a first circular opening is formed at the center of the central portion, and a shape and a size corresponding to the first fastening hole are formed around the first circular opening. The first fastening hole having a second fastening hole is formed, and the first step motor is fastened by the fastening bolt passing through the first fastening hole and the second fastening hole. Semiconductor devices customer tray feed unit of the inspection device, characterized in that fixed to the bracket. The method of claim 2, wherein the side portion is formed by extending at an angle of 90 degrees from one side of the central portion toward the first step motor, a plurality of third fastening holes are formed in the side portion, the first motor bracket is the third The customer tray transfer device of the semiconductor device inspection equipment is fixed to the first LM block plate by a fastening bolt passing through the fastening hole and a plurality of fourth fastening holes formed on one side upper end of the first LM block plate. . 4. The recess of claim 3, wherein one side of the first LM block plate facing the first LM block is provided with a recess in which a side surface of the first LM block can be fitted. By a fastening bolt passing through a plurality of fifth fastening holes formed in the middle of the first LM block plate and a sixth fastening hole formed in the first LM block so as to correspond to the first LM block plate through the side surface. A first fastening end having a groove shape corresponding to the shape of the LM guide rail is formed on the other side surface fixed to the first LM block plate, and the first LM block is the first LM block plate. Customer tray transfer device of the semiconductor device inspection equipment, characterized in that attached to the LM guide rail to enable the reciprocating movement along the LM guide rail under the mounted state. According to claim 2, The first transfer assembly is connected to the first step motor, a cylindrical first motor pulley for receiving the rotational force of the first step motor, is fitted to the first motor pulley through one end A first screw and a ball screw nut assembly connected to the other end of the first timing belt to receive the rotational force to horizontally move the first conveying assembly, wherein the first motor rod comprises: the first motor; And a portion of the pulley is sandwiched and fixed between the first upper fixing piece and the first lower fixing piece of the first motor pulley while being inserted into the first step motor through the first circular opening. Customer tray feeder for device inspection equipment. 6. The ball screw nut assembly of claim 5, wherein the ball screw nut assembly comprises: a first screw pulley into which the one end of the first timing belt is fitted; a first ball screw nut engaged with the first screw pulley; And a first nut housing for holding and supporting a first ball screw nut, wherein a second fastening end is formed at one side of the first screw pulley facing the first nut housing, and at the center of the first screw pulley. A first guide hole, which is a passage through which a screw shaft passes, is formed therethrough, and a plurality of seventh fastening holes are formed around the first guide hole, and the center of the first nut housing accommodates the first ball screw nut. A second circular opening is formed, an eighth fastening hole is formed around the second circular opening, and the ball screw shaft is formed at the center of the first ball screw nut. A second guide hole serving as a passage therethrough is formed therethrough, and a plurality of ninth fastening holes are formed around the second guide hole, and a third fastening end is provided at one side of the first ball screw nut facing the first nut housing. Customer tray transport apparatus of the semiconductor device inspection equipment, characterized in that formed. 7. The apparatus of claim 6, wherein the third fastening end has an inner diameter larger than an outer diameter of the second fastening end. The method of claim 7, wherein the first ball screw nut is fixed to the first nut housing by a fastening bolt passing through the ninth fastening hole and the eighth fastening hole in the state of being inserted into the second circular opening. The first screw pulley is coupled to the first ball screw nut by a fastening bolt passing through the fastening hole formed in the seventh fastening hole and the third fastening end, with the second fastening end inserted into the third fastening end. The first nut housing is fixed to the first LM block plate by a fastening bolt passing through a fastening hole formed in one side of the first nut housing and a tenth fastening hole formed in the middle of the first LM block plate. Customer tray feeder for semiconductor device inspection equipment. 10. The method of claim 8, wherein a first elevating guide plate is mounted on the other side of the first nut housing facing the first LM block plate, and the first elevating guide plate is formed through the first elevating guide plate. 11 is fastened to the other side of the first nut housing by a fastening bolt passing through the fastening hole and the twelfth fastening hole formed on the other side of the first nut housing, and the first lifting guide plate is a pair of guide grooves formed vertically. And the guide groove is configured to slidably receive a cylinder bracket of the tray lifter in a vertical direction when the tray lifter is mounted adjacent to the customer tray feeder. Tray feeder. 10. The method of claim 9, wherein one end of the first sensor block is mounted to the lower portion of the first lifting guide plate, the first sensor block is formed in the fastening hole formed in the lower portion of the first lifting guide plate and the first sensor block. Vertically mounted to a lower portion of the first elevating guide plate by a fastening bolt passing through a thirteenth fastening hole, the other end of the first sensor block is mounted to a lower portion of the first LM block, and the first sensor block is Customer tray of the semiconductor device test equipment, characterized in that mounted vertically to the lower portion of the first LM block by a fastening bolt passing through the fastening hole formed in the lower portion of the first LM block and the fourteenth fastening hole formed in the first sensor block. Conveying device. 11. The method of claim 10, wherein a speed sensor and a limit sensor are mounted on a lower surface of the first sensor block, wherein the speed sensor includes the first conveying assembly and the second conveying assembly transversely along the ball screw axis. In the case of movement, a signal for reducing the rotational speed of the first step motor by detecting a lower sensor flag mounted on the lower surface of the second sensor block of the second transfer assembly which is formed symmetrically with the first sensor block Wherein the limit sensor senses the lower sensor flag to generate a signal for stopping the rotation of the first step motor. 12. The second transport assembly of claim 11, wherein the second transport assembly has a second tray stopper formed corresponding to the first LM block plate and protruding over a narrow side of the second LM block plate facing the first transport assembly. The second tray stopper may include the first transfer assembly due to malfunction of the speed sensor and the limit sensor when the first transfer assembly and the second transfer assembly move laterally along the ball screw shaft. And a tray transfer device for a semiconductor device inspection apparatus, characterized in that a buffer function prevents interference between the second transfer assembly and the second transfer assembly. 13. The second transport assembly of claim 12, wherein the second transport assembly includes a lower sensor flag and a stacker position sensor mounted on a lower surface of the second sensor block, wherein the lower sensor flag comprises the first transport assembly and the second transport sensor. When the conveying assembly is in close proximity to each other while moving in the lateral direction along the ball screw axis, it is detected by the speed sensor or the limit sensor, and the stacker position sensor is configured to connect the first conveying assembly and the second conveying assembly. And moving the second conveying assembly in position on the unloading stacker when moving in the lateral direction along the ball screw axis. According to claim 1, wherein the first upper sensor flag and the second upper sensor flag is attached to the upper surface of the first LM block plate and the second LM block plate, respectively, on both sides of the LM base plate above the LM guide rail A plurality of tray positioning sensors are attached, wherein the tray positioning sensors comprise the first upper sensor flag and the first feed assembly when the first conveying assembly and the second conveying assembly move transversely along the ball screw axis. By detecting a second upper sensor flag to generate a detection signal, the customer tray of the semiconductor device inspection equipment, characterized in that primarily preventing the first transfer assembly or the second transfer assembly from colliding with the ball screw guide block Conveying device. 15. The method of claim 14, wherein the first tray stopper is formed to protrude inward on the inner surface of the ball screw guide block, the first tray stopper is the case where the control by the tray position sensor is not performed, Customer tray transfer apparatus of the semiconductor device inspection equipment, characterized in that to perform the function of preventing the first transfer assembly or the second transfer assembly to collide with the ball screw guide block.