KR19990079126A - Surface substrate of plasma display panel and manufacturing method thereof - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of a plasma display panel (hereinafter referred to as a PDP), and in particular, after coating a photosensitive material on a substrate, a plurality of line-shaped grooves are formed to be arranged in parallel with each other on one surface of the substrate. Forming a display electrode material on the substrate subjected to the first process, and removing the remaining photosensitive material and the display electrode material deposited on the photosensitive material together; A third process of depositing a transparent electrode material on a rough substrate and coating a photosensitive material thereon to selectively expose the photosensitive material and spraying a developer toward the substrate to remove unnecessary portions of the photosensitive material; and The photoresist remaining after removing the unnecessary portion of the transparent electrode material by spraying the etchant toward the substrate after the three-step process A method of manufacturing a surface substrate of a PDP and a surface substrate of the PDP manufactured according to the present invention, comprising a fourth process of forming a display electrode and a transparent electrode on a substrate by removing the quality, reduce defects of the display electrode and the transparent electrode. The adhesion between the display electrode and the glass substrate is improved, and then the oxidation of the display electrode is prevented during firing to form a dielectric to improve the performance of the PDP.

Description

Surface substrate of plasma display panel and manufacturing method thereof

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of a plasma display panel (hereinafter referred to as a PDP). In particular, a display electrode material is filled in a groove of a glass substrate to form a display electrode without etching the display electrode material, and to be stacked on the display electrode. A surface substrate of a PDP for forming a transparent electrode and a method of manufacturing the same.

In general, a PDP is a flat panel display device using a penning gas for a discharge phenomenon, and constitutes an information display unit of a plasma display device. The PDP is divided into an AC type and a DC type according to a discharge method.

A typical AC PDP is composed of a surface substrate 1 and a rear substrate 5 positioned opposite to each other with a predetermined space therebetween as shown in FIGS. 1A and 1B.

The display electrode 2 is formed on one surface of the surface substrate 1 so as to be arranged in parallel with each other, and the display electrode 2 is disposed on an opposite surface of the rear substrate 5 to the surface substrate 1. The address electrodes 6 are arranged in parallel with each other so as to be orthogonal to each other. In this case, the display electrode 2 and the address electrode 6 are formed on a stripe.

In addition, a dielectric layer 3 having a uniform thickness is formed on the display electrode 2 to limit the discharge current during discharge and facilitate the generation of wall charges, and sputtering occurs during discharge on the dielectric layer 3. A magnesium oxide protective film 4 is deposited to protect the display electrode 2 and the dielectric layer 3.

In addition, partition walls 7 are formed between the surface substrate 1 and the rear substrate 5 to separate the address electrodes 6 into a plurality of discharge cells to prevent color mixing between cells and to secure a discharge space. On the address electrode 6, phosphors 8 divided into red, green and blue are coated.

In addition, a discharge gas such as neon (Ne), helium (He), xenon (Xe), or the like is injected into the discharge space between the surface substrate 1 and the rear substrate 5, and the surface substrate 1 and the rear substrate. 5 is frit-sealed using the hardened sealing material 9.

The PDP configured as described above discharges the surface of the dielectric layer 3 and the protective layer 4 on the electrode by applying a voltage between the transparent electrodes to generate ultraviolet rays. By the ultraviolet rays, the phosphor coated on the back substrate 5 is excited and emits light, and color display is performed by the phosphor coated separately.

Referring to FIG. 2, a process of forming the display electrode of the surface substrate of the PDP according to the related art is as follows.

First, the transparent electrode material 11 'is sputtered toward the glass substrate 10 to coat the transparent electrode material 11' on the glass substrate 10, and then a photoresist (11 ') is formed on the transparent electrode material 11'. 12; Photo Resist, hereinafter referred to as PR).

When the coating of the PR 12 is completed, the PR 12 is selectively exposed through a mask 13 having an opening formed according to a predetermined pattern, and then the developer 14 is sprayed toward the glass substrate 10. To remove unnecessary portions of the PR 12.

At this time, since the chemical composition of the PR 12 is changed when exposed, the chemical composition of the exposed portion 12 ′ and the unexposed portion 12 ″ of the PR 12 is different from each other. Therefore, when the developer 14 is supplied toward the PR 12, the unnecessary part 12 "of the two parts is removed by the developer 14, and only the PR 12 of the necessary part 12 'remains. Will be.

Thereafter, the etchant 15 is sprayed toward the glass substrate 10 to remove unnecessary portions of the transparent electrode material 11 ′. At this time, the PR 12 remaining without being removed in the developing process serves to protect the transparent electrode material 11 ′ coated thereunder from being melted by the etching solution 15.

Subsequently, when the remaining PR 12 is removed by spraying the stripping liquid 16 toward the glass substrate 10, the glass substrate 10 having the transparent electrode 11 having a desired shape is obtained.

When the transparent electrode 11 is completed as described above, the display electrode material 17 'is sputtered toward the glass substrate 10 on which the transparent electrode 11 is formed. 17 ') and the PR 18 on the display electrode material 17'.

Subsequently, the PR 18 is partially exposed through the mask 19 having an opening formed according to a predetermined pattern, and then the developer 20 is sprayed toward the glass substrate 10 to remove unnecessary portions of the PR 18. Remove the part.

Thereafter, the etchant 21 is sprayed toward the glass substrate 10 to remove unnecessary portions of the display electrode material 17 '. In this case, since the display electrode material 17 'is generally deposited in multiple layers, multi-level etching is performed by sequentially spraying an etchant appropriate for each material.

For example, since the display electrode material 17 'is formed by sequentially stacking Cr, Cu, and Cr, the display electrode material 17' is sprayed with an etching solution for Cr, an etching solution for Cu, and an etching solution for Cr, respectively, in the etching process. Perform a three-step etch to remove unnecessary parts.

Finally, when the remaining PR 18 is removed by spraying the stripping liquid 22 toward the glass substrate 10, the glass substrate 10 having the display electrode 17 and the transparent electrode 11 having a desired shape is formed. You get

Thereafter, a dielectric is coated on the glass substrate 10 by a printing method to form a dielectric layer (3 in FIGS. 1A and 1B) on the display electrode 17, and then the glass substrate 10 having the dielectric layer 3 formed thereon. After drying for a predetermined time it is calcined at a high temperature of 500 ℃ or more in the kiln.

Subsequently, when a magnesium oxide protective film (4 of FIGS. 1A and 1B) is deposited on the dielectric layer 3 to protect the display electrode 2 and the dielectric layer 3 from sputtering occurring during discharge, a surface substrate (FIGS. 1A and 1B) is deposited. 1) of 1b is completed.

However, the surface substrate of the PDP and the method of manufacturing the same according to the related art are manufactured by manufacturing the surface substrate 1 by depositing the display electrode 17 on the transparent electrode 11. Since the adhesion between the display electrodes 17 is lowered, a separate metal layer must be formed therebetween to improve the adhesion therebetween.

For the same reason, silver (Au), copper (Cu), and the like, which are excellent in electrical conductivity, cannot be used alone for the display electrode 17, and in general, different types of metal materials are deposited in multiple layers. 17).

Therefore, the etching process for forming the display electrode 17 requires a plurality of etching processes to etch different metal layers individually, thereby increasing the total number of processes and selecting an appropriate etching solution according to each metal layer. There is a problem that it is difficult to set the process conditions during etching. In addition, when the process conditions are not properly set during etching, damage to the display electrode 17 may be inevitable, thereby degrading the performance of the PDP.

In addition, the conventional technique is likely to damage the transparent electrode 11 formed wider than the display electrode 17 under the display electrode material 17 'when the display electrode material 17' is etched. 11) and repeatedly performing exposure, development, and etching processes to form the display electrode 17, so that open (disruption) is easily generated in the transparent electrode 11 and the display electrode 17, and the dielectric layer ( When 3) is fired at a high temperature, oxidation of the display electrode 17 occurs, thereby causing damage to the display electrode 17.

Therefore, due to the above problems, the performance of the PDP decreases and the defective rate increases, and the productivity decreases due to the increase of the total number of processes, thereby lowering the yield of the PDP.

The present invention has been made to solve the above problems, by filling the display electrode material in the groove of the glass substrate to form a display electrode without etching the display electrode material and to form a transparent electrode in a superimposed state on the display electrode The surface substrate of the PDP to reduce the defects of the display electrode and the transparent electrode and to improve the adhesion between the display electrode and the glass substrate and to prevent the oxidation of the display electrode during firing to form a dielectric, thereby improving the performance of the PDP. Its purpose is to provide its manufacturing method.

1A is a block diagram showing a structure of a plasma display panel (hereinafter referred to as PDP) according to the prior art;

1B is a partial cross-sectional view of FIG. 1A,

2 is a configuration diagram illustrating a process of forming a display electrode of a surface substrate of a PDP according to the prior art;

3 is a diagram illustrating a process of forming a display electrode of the surface substrate of the PDP according to the present invention.

<Explanation of symbols for the main parts of the drawings>

50: glass substrate 50 ': groove

51, 58: photoresist (PR) 53, 60: developer

54, 61: etching solution 55: display electrode

55 ': display electrode material 56, 62: stripping liquid

57: transparent electrode 57 ': transparent electrode material

According to a first aspect of the present invention for achieving the above object, after the first coating the photosensitive material on the substrate to form a plurality of grooves in the form of a line so that the photosensitive material is arranged in parallel to each other on the surface of the coated substrate; And a second process of removing the remaining photosensitive material and the display electrode material deposited on the photosensitive material after depositing the display electrode material on the substrate subjected to the first process, and transparent on the substrate subjected to the second process. After depositing an electrode material, coating the photosensitive material thereon, selectively exposing the photosensitive material and spraying a developer toward the substrate to remove unnecessary portions of the photosensitive material, followed by the third step. By spraying the etchant toward the substrate to remove the unnecessary portion of the transparent electrode material by removing the remaining photosensitive material Provided is a method of manufacturing a surface substrate of a PDP comprising a fourth process of forming a display electrode and a transparent electrode on a plate.

In addition, according to the second aspect of the present invention, the first process is a first step of coating a photosensitive material on a substrate, and after selectively exposing the photosensitive material, by spraying a developer toward the substrate unnecessary of the photosensitive material A second step of removing the portion, and a third step of removing the portion of the photosensitive material removed from the substrate by a predetermined depth by spraying the etchant toward the substrate passed through the second step.

In addition, according to a third aspect of the present invention, the first process includes a first step of coating a photosensitive material on a substrate, and applying a physical force to a predetermined position of one surface of the substrate on which the photosensitive material is coated. The second step is to remove by a predetermined depth.

In addition, according to a fourth aspect of the present invention, a substrate is provided with a plurality of line-shaped grooves arranged in parallel to one surface, a plurality of display electrodes formed on one surface of the substrate in a form filled in the grooves of the substrate, and the display electrode. A surface substrate of a PDP comprising a transparent electrode formed on a display electrode in a superimposed state is provided.

According to the present invention configured as described above, the defects of the display electrode and the transparent electrode are reduced, the adhesion between the display electrode and the glass substrate is improved, and the oxidation of the display electrode is prevented during firing to form a dielectric, thereby improving the performance of the PDP. There is an advantage.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

3 is a diagram illustrating a process of forming a display electrode of the surface substrate of the PDP according to the present invention.

Referring to FIG. 3, the surface substrate of the PDP and the method of manufacturing the same will be described below.

The surface substrate of the PDP according to the present invention has a glass substrate 50 formed with a plurality of line-shaped grooves 50 'formed in parallel to each other and filled with the grooves 50' of the glass substrate 50. A plurality of display electrodes 55 formed on one surface of the glass substrate 50, a line-shaped transparent electrode 57 formed on each of the display electrodes 55 to have a width wider than that of the display electrodes 55, and A dielectric layer (not shown) formed to have a uniform thickness on the transparent electrode 57 to limit discharge current during discharge and to facilitate generation of wall charges, and the display electrode 55 from sputtering deposited on the dielectric layer during discharge. ) And a magnesium oxide protective film (not shown) for protecting the dielectric layer.

In order to manufacture the surface substrate of the PDP according to the present invention configured as described above, first, a photoresist 51 (hereinafter referred to as PR) is coated on the glass substrate 50, and then a mask having openings formed according to a predetermined pattern ( 52 is used to selectively expose the PR 51.

Subsequently, the developer 53 is sprayed toward the glass substrate 50 to remove unnecessary portions of the PR 51, and then the etching solution 54 is sprayed toward the glass substrate 50, thereby promoting the PR of the glass substrate 50. By removing the portion 51 removed by a depth of several micrometers, a plurality of line-shaped grooves 50 'are formed on one surface of the glass substrate 50 in parallel with each other.

At this time, the PR 51 remaining without being removed by the developer 53 serves to protect the glass substrate 50 coated thereunder from being removed by the etching solution 54.

Meanwhile, after the PR 51 is coated on the glass substrate 50 in a manner different from the above, the groove 50 'is scratched by scraping one surface of the substrate coated with the PR 51 with a scriber. It may be formed.

When the groove 50 'is completed in the glass substrate 50 as described above, the display electrode material 55' is deposited on the glass substrate 50, and then the stripping liquid 56 is sprayed toward the glass substrate 50. The display electrode 55 is formed on the glass substrate 50 by removing the remaining PR 51 and the display electrode material 55 'deposited on the PR 51 together. In this case, the display electrodes 55 are formed in plural in the form of being filled in the grooves 50 of the glass substrate 50.

When the display electrode 55 is formed as described above, the transparent electrode material 57 ′ is deposited on the glass substrate 50, and then the PR 58 is coated on the glass substrate 50, and a mask is formed in which an opening is formed according to a predetermined pattern. (59) is used to selectively expose the PR (58).

Subsequently, the developer 60 is sprayed toward the glass substrate 50 to remove unnecessary portions of the PR 58, and then the etchant 61 is sprayed toward the glass substrate 50 to thereby remove the transparent electrode material 57 ′. ) Remove unnecessary parts. At this time, the PR 58 remaining without being removed by the developer 60 serves to protect the transparent electrode material 57 ′ coated thereunder from being melted by the etchant 61.

Subsequently, when the release liquid 62 is sprayed toward the glass substrate 50 to remove the PR 58 remaining on the transparent electrode material 57 ′, the glass substrate on which the display electrode 55 and the transparent electrode 57 are formed is formed. 50 is completed.

In the method for manufacturing a surface substrate for a PDP according to the present invention as described above, the display electrode 55 is filled by filling the display electrode material 55 'in the groove 50' of the glass substrate 50 without etching the display electrode material 55 '. ), The electrode pattern may be easily formed, and only the transparent electrode material 57 ′ may be etched, thereby preventing damage to the display electrode 55 and the transparent electrode 57.

In particular, when the display electrode 55 is composed of multiple layers, when the etching process is performed, the etching solution used for each material is different and it is difficult to set the etching conditions. There is this.

In addition, since the groove 50 'is formed in the glass substrate 50 coated with the PR 51, the display electrode material 55' is formed by filling the groove 50 'with the display electrode material 55'. Open defects can be easily inspected before deposition of the display electrode material 55 ', and if there is an open, it can be easily repaired, thereby eliminating the open defects of the display electrode 55.

In addition, since the adhesion between the glass substrate 50 and the display electrode 55 is increased, the glass substrate 50 may be formed of a material having low contact resistance and high electrical conductivity with the transparent electrode material 57 'such as Au, Pt, and Ag. ), It is not necessary to provide a separate metal layer to improve the adhesion between the display electrode 55 and the display electrode 55, so that the display electrode 55 can be formed as a single layer. In the case of a material having a high contact resistance with the 57 ', the display electrode 55 has a two-layer structure using a material such as Mo, Cr, Ti, and W having a low contact resistance with the transparent electrode material 57' as an intermediate layer. Since it can be configured, there is an advantage that the process of forming the display electrode 55 is simplified.

In addition, in the present invention, since the transparent electrode 57 is formed on the display electrode 55 so that the transparent electrode 57 covers the display electrode 55, the display electrode generated during the firing to form a dielectric thereafter. There is an advantage that the oxidation of the 55 is prevented so that the display electrode 55 is not damaged.

In addition, as described above, since the defects of the display electrode 55 and the transparent electrode 57 are prevented and the manufacturing process thereof is simplified, the performance of the PDP is improved, as well as the total number of processes is reduced, so that the defect rate of the PDP is reduced and the manufacturing cost is reduced. There is an advantage.

Claims (4)

Coating a photosensitive material on a substrate and then forming a plurality of grooves having a line shape to be arranged in parallel with one surface of the substrate coated with the photosensitive material; and depositing a display electrode material on the substrate that has undergone the first step And a second process of removing the remaining photoresist and the display electrode material deposited on the photoresist, and depositing a transparent electrode material on the substrate subjected to the second process, and then coating the photoresist on the photoresist again. A third process of selectively exposing the material and injecting a developer toward the substrate to remove an unnecessary portion of the photosensitive material; and removing an unnecessary portion of the transparent electrode material by spraying an etchant toward the substrate subjected to the third process And removing the remaining photosensitive material to form a display electrode and a transparent electrode on the substrate. Surface substrate manufacturing method of the PDP, characterized in that made. The method of claim 1, The first process includes a first step of coating a photosensitive material on a substrate, a second step of removing an unnecessary portion of the photosensitive material by spraying a developer toward the substrate after selectively exposing the photosensitive material; And a third step of removing the portion of the substrate from which the photosensitive material is removed by a predetermined depth by spraying the etchant toward the substrate after the two steps. The method of claim 1, The first process includes a first step of coating a photosensitive material on a substrate and a second step of applying a physical force to a predetermined position of one surface of the substrate coated with the photosensitive material to remove the portion by a predetermined depth. Method for producing a surface substrate of the PDP. A substrate having a plurality of line-shaped grooves arranged in parallel to one surface, a plurality of display electrodes formed on one surface of the substrate in a form filled in the grooves of the substrate, and transparent formed on the display electrodes in a state overlapped with the display electrodes Surface substrate of the PDP comprising an electrode.