JPH10241576A - Color plasma display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a panel with high display image quality even in the case the bus electrode is formed in a thin width and high height size. SOLUTION: A front face substrate 1 comprising a face discharge electrode group consisting of transparent electrodes 3 and bus electrodes 2 formed so as to touch at least partly the electrodes 3, a dielectric layer 4 covering the face discharge electrode group, and a protective layer 5 covering the dielectric layer 4 and a back face substrate 9 comprising a data electrode 7 for writing in data to be displayed, partitioning walls for forming discharge spaces 10, and phosphor bodies 8 are set on opposite to each other, the bus electrodes 2 are at least partially buried in recessed grooves 13 formed in the front face substrate 1 and the surfaces are kept in the same plane as the plane of the transparent electrodes 3 and in parallel to the surface of the front substrate 1. Consequently, independently of the height size (cross-section) of the bus electrodes 2, the dielectric layer 4 is formed to have approximately uniform thickness and stable discharge is carried out in the whole surface area of the panel and the display quality can be heightened.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel used for an information display terminal, a flat panel television, a wall-mounted television, and the like, and more particularly to a structure of an AC surface discharge type color plasma display panel.

[0002]

2. Description of the Related Art FIG. 6 is a perspective view showing a basic structure of a conventional AC type color plasma display panel (hereinafter abbreviated as AC type panel). FIG. 7 is a sectional view taken along line AA in FIG. This conventional panel has a transparent front plate 1.
And a back plate 2 that emits light are arranged to face each other. On the front plate 1, an electrode composed of a bus electrode 2 and a transparent electrode 3 arranged in parallel in one direction forms an electrode group, and a dielectric layer 4 covering the electrode group is provided. Further, a protective layer 5 is formed to protect the dielectric layer 4 from sputtering by gas discharge. On the other hand, data electrodes 7 are arranged on the back plate 9 in a direction perpendicular to the bus electrodes 2 and the transparent electrodes 3. Further, between these data electrodes 7, partition walls for obtaining a discharge space 10 between the data electrodes 7 and the front plate 1. 6 are arranged in parallel, and phosphors 8 are formed between adjacent partitions 6. A space is defined between the front plate 1 and the back plate 9 by the partition 6, and this space is a gas space. In this AC type panel, the front panel 1 performs a surface discharge in a gas in the space to excite the gas to generate ultraviolet rays. The back plate 9 absorbs the ultraviolet light obtained by the discharge in the phosphor 8 and emits visible light. The emitted visible light is transmitted through the front plate 1 to become display light.

A method of forming such an AC type panel will be briefly described. A transparent electrode 3 serving as a surface discharge electrode is formed on a front plate 1. The transparent electrode 3 is formed of, for example, indium oxide (ITO), tin oxide, or the like to a thickness of about 1000 to 2000 ° by a thin film technique such as a sputtering method. This is patterned by a method such as an etching method, and a gap of the transparent electrode 3 formed at this time becomes a gap for performing a surface discharge. Next, the bus electrode 2 is formed on the transparent electrode 3. As a material of the bus electrode 2, for example, a metal such as silver, aluminum, nickel, copper, or chromium is used. The metal is formed by a patterning method using a screen printing method, or a film is formed by a thin film technique such as a sputtering method. Is used.
However, since the bus electrode 2 is mainly formed of a metal, the light transmission is extremely poor, and forming the bus electrode 2 with an increased width impedes transmission of light emitted from the phosphor 8 of the back plate 9. The reason for forming the bus electrode 2 is that the sheet resistance of the transparent electrode 3 is high. The line resistance of the transparent electrode 3 is generally several tens kΩ or more. When a current is supplied here, a voltage drop is remarkable, and driving becomes difficult. Therefore, the bus electrode 2 having a line resistance of about several tens to several hundreds Ω is formed, a current is supplied by the bus electrode 2, and the transparent electrode 3 efficiently discharges the surface.

Next, a dielectric layer 4 is formed on the front plate 1 on which the bus electrodes 2 and the transparent electrodes 3 are formed. This dielectric layer 4
Is provided, the electric charge is stored in the dielectric layer 4 by the discharge, and when the discharge is performed continuously, the discharge continues even if the voltage applied to the bus electrode 2 or the transparent electrode 3 is lower than the voltage required for the first discharge. It is possible to do. That is, a capacitor is formed by the bus electrode 2, the transparent electrode 3, and the dielectric layer 4. In addition, if a protrusion exists on the bus electrode 2 or the like, the dielectric layer 4 in that portion becomes thin, and dielectric breakdown occurs. The dielectric layer 4 is usually made of a low-melting glass paste, and is formed by a screen printing method or the like. further,
A protective layer 5 is formed on the dielectric layer 4 in order to prevent sputtering by a gas ionized by the discharge.
Further, the protective layer 5 also has a role of emitting electrons into the gas due to collision of ions and the like, and also has a function of reducing the driving voltage. This protective layer 5 is mainly formed of MgO by an evaporation method or the like.

On the other hand, the data electrodes 7 are formed on the back plate 9. For example, silver, aluminum, nickel, copper, chromium, or the like is used as a material of the data electrode 7 and is patterned by a screen printing method or formed by a thin film technique such as a sputtering method and patterned by etching or the like. A method is used. Next, the partition 6 is formed so as not to overlap the data electrode 7. The partition 6 is formed to provide a space between the front plate 1 and the back plate 9, and the phosphor 8 is applied in the space. As a method for forming the partition walls 6, for example, a lamination printing method, a sand plast method, or the like is used. Next, a phosphor 8 is applied between the partition 6 and the adjacent partition 6 by a printing method or the like.

As described above, the front panel 1 on which the bus electrode 2, the transparent electrode 3, the dielectric layer 4 and the protective layer 5 are formed, and the rear panel 9 on which the data electrode 7, the partition 6 and the phosphor 8 are formed, The bus electrode 2 or the transparent electrode 3 and the data electrode 7 or the partition 6 are bonded so as to be orthogonal. Then, a discharge gas is sealed in the discharge space 10 formed by the bonding. As the discharge gas, for example, a rare gas such as helium, neon, argon, krypton, or xenon is used, and these are used alone or in combination.

[0007]

SUMMARY OF THE INVENTION Such a conventional AC
In the mold panel, the bus electrode 2 provided on the front plate
Is an electrode for supplying a current to the discharge region, so that the lower the electrical resistance of the bus electrode 2, the better. On the other hand, the bus electrode 2 prevents light emitted from the phosphor 8 from passing through the front plate 1. Therefore, using the fact that the electric resistance is inversely proportional to the cross-sectional area of the electrode, as a method of maintaining the low electric resistance and not obstructing the transmission of light emission, the width of the bus electrode 2 is reduced and the height (thickness) is increased. Things are possible. This is also effective in realizing high definition and ultra high definition in the panel. For example, in a medium definition plasma display panel, the pixel size is about 1.0 mm, whereas the pixel size is about 1.0 mm. Since the height is 0.6 to 0.9 mm and the ultra-high definition is 0.3 mm, it is preferable to reduce the width of the bus electrode 2 and increase the height instead.

However, when the height of the bus electrode 2 is increased, the dielectric layer 4 becomes thinnest in a region where the bus electrode 2 exists (a region in FIG. 7A). As described above, since the bus electrode 2 forms a capacitor with the transparent electrode 3 and the dielectric layer 4, the dielectric breakdown easily occurs in a portion where the dielectric layer 4 is thin. For this reason, it is necessary to form the dielectric layer 4 thicker in consideration of preventing dielectric breakdown in the thin portion. However, as a result, the portion of the transparent electrode 3 where the bus electrode 2 is not provided (the region b in FIG. 7) has the dielectric layer 4 formed at least as thick as the bus electrode 2 above the bus electrode 2. As a result, the capacitance as a dividing capacitor is reduced. As a result, a decrease in light transmittance of the dielectric layer 4 and an increase in driving voltage due to a decrease in electric charge stored in the dielectric layer 4 occur. Further, when a color filter is formed on the front plate, if the surface discharge electrode group including the bus electrode 2 and the transparent electrode 3 has irregularities, at least when the color filter is formed by a printing method or the like, cracking of the color filter may occur. There is also a problem that the film thickness tends to be uneven and the display quality of the panel is degraded.

It is an object of the present invention to provide an AC type panel which solves such a problem associated with the height of the bus electrode and has improved display quality.

[0010]

According to the present invention, in an AC type panel, a bus electrode provided with a transparent electrode on a first substrate as a front plate is provided in a concave groove provided on the first substrate. Formed at least partially buried,
The surface is formed on the same plane as the transparent electrode and parallel to the surface of the first substrate. Further, according to the present invention, the bus electrode is formed so as to be entirely buried in a concave groove provided in the first substrate, and the surface is flush with the surface of the first substrate. Are formed in contact with the bus electrodes and in parallel with the first substrate surface.

Here, in the present invention, the concave groove is formed on the surface of the first substrate, or a base dielectric is provided on the surface of the first substrate. Is configured such that a concave groove is formed on the surface thereof. Further, the cross-sectional area of the bus electrode is preferably 100 μm ² or more. Further, in the present invention, a color filter is provided on the first substrate so as to be orthogonal to and in contact with the bus electrode and the transparent electrode.
The surface on the side facing the substrate is parallel to the surface of the first substrate.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) FIG. 1 is a sectional view of a main part of a first embodiment of an AC type panel of the present invention. In the figure, parts equivalent to those of the conventional configuration are denoted by the same reference numerals. That is,
A translucent front plate 1 and a rear plate 2 for emitting light are arranged opposite to each other, and the front plate 1 includes an electrode group consisting of a bus electrode 2 and a transparent electrode 3 arranged in parallel in one direction. Is formed, and a dielectric layer 4 covering the same is provided. Further, a protective layer 5 is formed to protect the dielectric layer 4 from sputtering by gas discharge. On the other hand, data electrodes 7 are arranged on the back plate 9 in a direction perpendicular to the bus electrodes 2 and the transparent electrodes 3, and between the data electrodes 7, a discharge space 10 is formed between the data electrodes 7 and the front plate 1. Partitions not shown in the figure are arranged in parallel, and phosphors 8 are formed between the partitions. The discharge space 10 defined between the front plate 1 and the back plate 9 is a gas space. The front plate 1 performs a surface discharge in the gas in the discharge space 10 to excite the gas to generate ultraviolet rays, and the back plate 9 absorbs the ultraviolet rays obtained by the discharge in the phosphor 8 and emits visible light. Then, the emitted visible light is transmitted through the front plate 1 to be used as display light.

In this embodiment, the front plate 1
A groove 13 is formed along the extension direction of the bus electrode 2, and the transparent electrode 3 is formed so that at least a part is located in the groove 13. Further, the bus electrode 2 is formed in the concave groove 13. At this time, a portion of the bus electrode 2 except for a part of its surface is housed in the concave groove 13, and as a result, the surface of the bus electrode 2 is a transparent electrode not existing in the concave groove 13. 3 is formed so as to be flush with the surface of the front plate 1 and parallel to the surface of the front plate 1. Here, the bus electrode 2
Is set to have a width dimension and a height dimension of 100 μm ² or more. The color filter 1 is arranged so as to be perpendicular to and in contact with the transparent electrode 3 and the bus electrode 2.
1 is formed. The surface of the color filter 11 is made parallel to the surface of the front plate 1.

FIG. 2 is a sectional view showing a method of manufacturing the AC type panel of FIG. 1 in the order of steps. First, as shown in FIG.
Photoresist 12A is uniformly applied to front plate 1 and dried. Thereafter, exposure is performed using a photomask, which is developed, washed with water, and dried to remove the resist in the groove forming portion.
Next, as shown in FIG. 2B, a concave groove 13 is provided on the surface of the front plate 1 through the opening of the photoresist 12A. At this time, it is conceivable to selectively etch the front plate 1 using hydrofluoric acid, or to selectively cut the surface of the front plate 1 using a sandblast method or a laser.
Here, the concave groove 13 was formed by using a sand blast method. That is, the front plate 1 of FIG. 2A is put into a sand blasting device in which a plurality of nozzles for blowing high-speed fine powder are arranged, and a concave groove 13 is provided on the surface of the front plate 1 corresponding to the opening of the photoresist 12. The width and depth of the groove 13 formed at this time can be controlled by the size of the opening of the photoresist 12A, the type and speed of the fine powder, the time during which the fine powder is sprayed, and the like. The width and the depth of the groove 13 must be considered so that the resistance value of the bus electrode 2 formed later does not increase. Although the resistance value of the bus electrode 2 largely depends on the material forming the bus electrode 2, the resistance value is countered by the cross-sectional area of the bus electrode 2 even when the same material is used. Therefore, in this embodiment, the width of the concave groove 13 is set to 20 μm to 100 μm,
The search for the concave groove 13 was 4 μm to 20 μm. It goes without saying that when the width of the concave groove 13 is reduced, the search is performed.

Next, as shown in FIG. 2C, the photoresist 12A is peeled off, and the front plate 1 is washed and dried. Next, a new photoresist 12B is applied for forming a transparent electrode, and dried. After that, exposure is performed using a photomask, which is developed, washed with water, and dried, and the portions other than the transparent electrode forming portion are coated with a photoresist 12B. Then, FIG.
As shown in (D), a transparent electrode 3 is formed on the front plate 1. Usually, a thin film technique such as a sputtering method is often used, and an oxide semiconductor transparent conductive film containing a dopant in SnO ₂ , In ₂ O _3, or the like can be considered. Here, In
ITO in which Sn was added to ₂ O ₃ was used. The thickness was set to 1000 to 2000 °. The photoresist 12B is peeled off from the front plate 1 on which ITO is formed, and is washed and dried. Here, the transparent electrode 3 is formed by a lift-off method.
It goes without saying that it is also possible to form a film on the entire surface of the front plate 1, apply a photoresist, pattern the film, and pattern the film by etching using the film as a mask.

Next, as shown in FIG. 2E, the bus electrode 2 is formed in the recess 13 where the transparent electrode 3 is formed. At this time, as a method of forming the bus electrode 2, a method of forming a paste by mixing an organic solvent and a resin with the electrode material and forming a paste using the electrode material can be considered. In this embodiment, a paste obtained by mixing an organic solvent and a resin with an electrode material is formed in the concave groove 13 by a printing method. At this time, aluminum, silver, nickel, steel, chromium, or the like can be considered as an electrode material, but silver was used here. Also, in the case of the printing method, the screen groove is used to form the groove 13.
There is a method of printing the paste on the front plate 1 without using a screen plate and a method of putting the paste directly on the front plate 1 and embedding the paste in the groove 13 with a squeegee. The paste was printed.
However, when printing using the screen plate, 100 μm
Since it is difficult to form a pattern having a width smaller than the width, the pattern of the screen plate is made wider than the concave groove 13, and finally, the bus electrode 2 is formed up to the surface of the front plate 1.
In the printing stage, the paste was made to protrude from the surface of the front plate 1. This is to prevent the organic solvent and the resin component in the paste from being lost due to the baking, causing shrinkage, and preventing the paste from being formed evenly in the concave groove 13. This front plate 1
After drying and baking at 500 ° C. to 600 ° C., the protruding bus electrode was polished to make the surface of the bus electrode 2 and the surface of the transparent electrode 3 coplanar. Also, the groove 13
The protruding part was removed by laser.

After the formation of the bus electrode 3 in the previous step, FIG.
The color filter 11 is formed as shown in FIG. The color filter 11 was formed by a thick film printing method. The color filter 11 is colored red, green, and grown so as to be the same as the emission color of the phosphor 8 formed on the back plate 9. When the front plate 1 is formed by a printing method, the front plate 1 is formed in a stripe shape orthogonal to the transparent electrodes 3 and the bus electrodes 2, so that the surface of the front plate 1 needs to be flat. If the surface of the front plate 1 has irregularities, unevenness in the film thickness of the color filter 11 and uneven drying occur after printing, which greatly affects the display. But,
As described above, the thickness of the transparent electrode 3 is 1000 to 2000.
、, the transparent electrode 3 and the polished bus electrode 2
Is substantially flat with respect to the front plate 1. Thereby, the color filter 11 can be easily formed.

Next, as shown in FIG. 2 (G), the dielectric 4 is formed on the front plate on which the color filter 11 is formed by printing, drying and firing. Dielectric 4 is 10-4
A thickness of about 0 μm is required, and when the dielectric 4 is thick, printing and drying are repeated a plurality of times, followed by baking or printing,
Drying and baking are repeated several times. Since the dielectric 4 functions as a capacitor in the case of an AC type panel, it is very important to control the thickness from the electrode group consisting of the bus electrode 2 and the transparent electrode 3 and it is necessary that the thickness be uniform over the entire substrate. is there. Finally, as shown in FIG. 2H, a protective layer 5 is formed to protect the dielectric 4 from sputtering from ions generated by the discharge.
To form The protective layer 5 was formed of MgO to a thickness of 0.5 to 3 μm by an evaporation method or the like. Thereby, the manufacture of the front plate of FIG. 1 is completed.

In the AC type panel configured as described above,
Since most of the bus electrode 2 is buried in the concave groove 13, the thickness of the dielectric 4 on the bus electrode 2 and the transparent electrode 3 is kept constant without depending on the height of the bus electrode 2. Thus, the dielectric 4 can be formed uniformly over the entire panel with a minimum thickness that does not cause dielectric breakdown. As a result, the amount of charge stored on the surface of the dielectric 4 is maximized, and the amount of charge stored over the entire surface of the panel is constant, so that stable surface discharge is performed. This also makes it possible to make the bus electrode 2 thinner without increasing the electric resistance, so that the light emission of the phosphor 8 is easily transmitted through the front plate, and the luminous efficiency is improved. A display panel can be realized. further,
The front plate 1 on which the bus electrode 2 and the transparent electrode 3 are formed has irregularities about the thickness of the transparent electrode 3, but the thickness of the transparent electrode 3 is 10
Since the thickness is about 00 to 2000 °, the thickness is negligible in forming a color filter by a printing method, and it can be considered that the front plate is substantially flat.
Thus, high quality display can be realized without the occurrence of cracks and uneven film thickness.

(Second Embodiment) FIG. 3 is a sectional view of a main part of a second embodiment of the present invention. In the second embodiment, the grooves 13 provided in the front panel 1 of the AC type panel of the present invention are provided.
The bus electrode 2 is formed in a buried state, the transparent electrode 3 is formed thin so that at least a part thereof is in contact with the surface thereof, and the color filter 11, the dielectric 4, and the like are further formed on the surface.
The protective layer 5 is formed. Here, the cross-sectional area of the bus electrode 2 is 100 μm ² or more, and the color filter 11 is orthogonally in contact with the transparent electrode 3 and the bus electrode 2, and the surface thereof is parallel to the surface of the front plate 1. Is the same as in the first embodiment.

FIGS. 4A to 4F are sectional views showing a method of manufacturing the front plate of FIG. 2 in the order of steps. First, FIG.
The photoresist 12A is uniformly applied to the front plate 1 and dried as described above. Thereafter, exposure is performed using a photomask, which is developed, washed with water, and dried to remove the photoresist at the groove forming portion. Next, as shown in FIG. 4B, a concave groove 13 is provided in the front plate 1 corresponding to the opening of the resist 12A. As the method of forming the concave groove 13, the method described in the first embodiment can be used as it is. Here, the first
The groove 13 is formed by the sand blast method as in the embodiment of FIG.
Is formed. The width and the depth of the groove 13 are the same as in the first embodiment in that the resistance of the bus electrode 2 to be formed later is not increased. Here, the width of the groove 13 is set to 20 μm to 100 μm. 4 μm to 20 μm depth
And

Next, as shown in FIG. 4C, the photoresist 12A is peeled off, and the front plate 1 is washed and dried. Next, the bus electrode 2 is formed in the concave groove 13. In this embodiment, the bus electrode 2 was formed by a printing method using a paste obtained by forming an electrode material into a paste with an organic solvent and a resin. As the electrode material, aluminum, silver, nickel, steel, chromium, or the like can be considered as in the first embodiment. In this embodiment, silver is used. As a printing method at this time, a paste was printed in the concave grooves 13 using a screen plate. Even in this case, the pattern of the screen plate is wider than the groove 13 and the bus electrode 2 is finally formed in the groove 13 to the surface of the front plate 1. 1 was printed so that the paste protruded from the surface of Sample No. 1. After the front plate 1 is dried and fired at 500 to 600 ° C., the front plate 1 is polished so that the surface of the front plate 1 and the bus electrode 2 are polished.
Was made flat.

Next, as shown in FIG. 4D, a transparent electrode 3 is formed on the front plate 1. As the transparent electrode 3, the first
ITO in which Sn is added to In ₂ O ₃ in the same manner as in the first embodiment.
It was used. However, in the second embodiment, ITO is formed on the entire surface of the front plate 1 and buttering is performed by etching. Next, as shown in FIG. 4E, a photoresist 12B is uniformly applied on the front plate 1, dried, and further exposed, developed, washed and dried using a photomask. The opening of the photoresist 12B was provided in the portion where the transparent electrode 3 was removed. further,
As shown in FIG. 4 (F), the front plate 1 is etched to remove all the transparent electrodes 3 in the openings of the photoresist 12B to form a shape as an electrode. Next, the front plate 1 after the etching is washed with water and dried, and the photoresist 12 is removed.
B is peeled off. After forming the transparent electrode 3, a color filter 11 is formed. The method of forming the color filter 11 is the same as that of the first embodiment. At this time, the surface of the front plate 1 needs to be flat as in the first embodiment. However, since the transparent electrode 3 has a thickness of 1000 to 2000 °, it is difficult to form the color filter 11 by a printing method. Is the front panel 1
Can be forgotten to be flat.

Also in the AC type panel of the second embodiment, since the bus electrode 2 is buried in the groove 13,
The thickness of the dielectric 4 on the bus electrode 2 and the transparent electrode 3 can be kept constant without depending on the height of the bus electrode 2, and the dielectric 4 can be mounted on the panel with the minimum thickness that does not cause dielectric breakdown. It can be formed uniformly over the entire surface. As a result, the amount of charge stored on the surface of the dielectric 4 is maximized, and the amount of charge stored over the entire panel is constant,
Stable surface discharge is performed. This also makes it possible to make the bus electrode 2 thinner without increasing the electrical resistance, so that the light emission of the phosphor 8 is easily transmitted through the front plate 1 and the luminous efficiency is improved. A plasma display panel can be realized. Further, the front plate 1 on which the bus electrode 2 and the transparent electrode 3 are formed has irregularities about the thickness of the transparent electrode 3, but the thickness of the transparent electrode 3 is 1000 to 2
Color filter 1 by printing method because it is about 2,000Å
The thickness of the front plate 1 is substantially negligible in view of the formation of the substrate 1. The surface of the front plate 1 can be regarded as substantially flat, and the color filter 11 has no cracks and non-uniform film thickness. Can be realized.

(Third Embodiment) As a third embodiment of the present invention, instead of forming the recessed groove 13 in which the bus electrode 2 is buried in the front plate 1 in the second embodiment,
A configuration is conceivable in which a dielectric film is formed on the surface of the substrate, and a concave groove is formed in the dielectric film. FIG. 5 is a cross-sectional view of a main part of the front plate showing the third embodiment in the order of the manufacturing process. First, as shown in FIG. 5A, a photoresist 12 is uniformly applied to the front plate 1, dried, exposed using a photomask, washed with water, dried and dried to form a groove. The photoresist 12 is left in a portion where the photoresist is provided. At this time, the point different from the first and second embodiments is that the grooves 13 are formed by etching the front plate 1 in the first and second embodiments. However, in the third embodiment, the photoresist 12 is left in a portion where the concave groove is to be formed.

Next, as shown in FIG. 5B, a dielectric 4A serving as a base is formed in the opening of the photoresist 12. The method of forming the base dielectric 4A is performed by a printing method.
The base dielectric 4A is formed to be equal to or higher than the height of the photoresist 12A. Underlayer dielectric 4
After printing A, it is dried. If the underlying dielectric 4A is formed higher than the photoresist 12A, or if part or all of the photoresist 12A is covered by the underlying dielectric 4A, a polishing process or the like is performed to expose the photoresist 12A. Need to be done. The polishing process was also performed in this embodiment. Next, as shown in FIG. 5C, the photoresist 12 was peeled off, washed with water, dried, and baked at 500 ° C. to 600 ° C. At this stage, a concave groove 13 is formed in the front plate by the base dielectric 4A.

Next, as shown in FIG.
Then, the bus electrode 2 is formed. As a method of forming the bus electrode 2, also in this embodiment, a printing method using a paste obtained by pasting an electrode material with an organic solvent and a resin was used. As the electrode material, aluminum, silver, nickel, steel, chromium, or the like can be considered as in the first and second embodiments.
In this example, silver was used. Also in this embodiment, the first and second
The paste was printed in the concave groove 13 using a screen plate in the same manner as in the embodiment. In addition, the pattern of the screen plate is wider than the groove 13 and the bus electrode 2 is finally formed in the groove 13 up to the surface of the front plate 1. Was printed so as to protrude. This front plate 1 is dried, and
After baking at ℃, the front plate 1 was polished to make the surface of the front plate 1 and the surface of the bus electrode 2 flat. In the third embodiment, the concave groove 13 is provided in the base dielectric 4A by the lift-off method. However, after forming the base dielectric 4A on the entire surface, a method such as the sand blast method described in the first embodiment is used. It is also possible to provide the concave groove 13 by shaving the base dielectric 4A. Thereafter, as shown in FIG. 5E, a color filter 11 and a dielectric 4 are formed in the same manner as in the first and second embodiments to complete a front plate.

Even when an AC-type panel is formed using the front panel of this embodiment, discharge occurs stably over a wide area of the transparent electrode 3 and the amount of electric charge stored in the dielectric 4 increases. Could be lowered. Further, when the height was increased by making the bus electrode 2 thinner, the electrical resistance did not increase, the light emission of the phosphor 8 was sufficiently transmitted, and a bright panel could be obtained. Further, a panel having good color purity was obtained by forming color filters.

The configuration in which the recess 13 is formed in the underlying dielectric 4A and the bus electrode 2 is embedded in the recess 13 as in the third embodiment is the same as in the first embodiment. In this case, a part of the transparent electrode may be formed in the groove provided in the base dielectric, and the bus electrode may be formed in the groove surrounded by the transparent electrode. Also in this case, it is important that the surfaces of the transparent electrode and the bus electrode are formed on the same plane.

Here, JP-A-6-12987 discloses an electrode in which a groove is formed in a front substrate 20 and an antireflection film 21 and a silver thick film 22 are applied to the bottom surface of the groove as shown in FIG. A forming technique is disclosed. This is the front substrate 2
This is a technique for avoiding a decrease in contrast due to the anode 22 that can be seen through 0. For this purpose, a black paste is applied to the groove bottom 21 and fired, and then a thick silver film is applied to the surface of the front substrate 20 and fired. Also in this technique, the anode 22
Is illustrated as being flush with the surface of the front substrate 20, but it is difficult to make the anode 22 flush with the surface of the front substrate 20 because the silver thick film is actually shrunk by firing. In addition, the gazette does not disclose any technique for solving this problem. This prior art is a DC type plasma display panel,
There is no suggestion about the structure of the electrode and the dielectric layer, which is a feature of the PDP.

In Japanese Unexamined Patent Publication No. Hei 4-259728, grooves are formed on both the front base line 31 and the back substrate 35 as shown in FIG.
Are disclosed. This is to obtain a state where there is no unevenness due to the electrodes on the substrate when forming the barrier ribs 33. Also in this technique, the anode 32
Thick film Ni is used for the TO paste and the cathode 34, each of which is embedded with a roll coater, and the remaining unnecessary paste is removed with a spatular jig before firing. For this reason, also in this technique, as in the above-described conventional technique, since the paste shrinks by firing, it is difficult to make the anode 32 and the front substrate 31, and the cathode 34 and the back substrate 35 the same plane as shown in the figure. is there. Furthermore, this prior art is a DC plasma display panel, which is a feature of an AC plasma display panel.
No suggestion is made about the structure of the electrode and the dielectric layer.

[0032]

As described above, according to the present invention, the bus electrode is provided in the groove provided in the first substrate as the front plate or in the groove provided in the base dielectric formed on the surface thereof. At least a part of the bus electrode is buried and the surface of the bus electrode is formed flush with the surface of the transparent electrode, the first substrate or the underlying dielectric, so that the surface of the bus electrode can be transparent and independent of the height of the bus electrode. It is possible to keep the thickness of the dielectric on the electrode constant. This allows the dielectric thickness to be uniform over the entire panel at a thickness that does not cause dielectric breakdown, while preventing the thickness from becoming excessive, and the amount of charge stored on the dielectric surface is reduced. The maximum and the amount of charge stored over the entire surface of the panel are constant, and stable surface discharge is performed. In addition, the bus electrode can be made thinner without increasing the electric resistance of the bus electrode, and the light emission of the phosphor is easily transmitted through the first substrate, thereby improving the light emission efficiency. A display panel can be obtained. Furthermore, since the first substrate on which the bus electrodes and the transparent electrodes are formed can be regarded as having a substantially flat surface, even when a color filter is formed by a printing method or the like, the filter is cracked and the film thickness is not uniform. No high-quality plasma display panel is obtained.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a main part of a front plate in an AC type color plasma display panel according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the manufacturing method of the first embodiment in the order of steps.

FIG. 3 is a sectional view of a main part of a front plate in an AC type color plasma display panel according to a second embodiment of the present invention.

FIG. 4 is a sectional view illustrating a manufacturing method of a second embodiment in the order of steps.

FIG. 5 is a sectional view showing a third embodiment together with a manufacturing process.

FIG. 6 is a perspective view of a part of an AC type color plasma display panel to which the present invention is applied.

FIG. 7 is a sectional view taken along the line dd in FIG. 6;

FIG. 8 is a partial cross-sectional view of an example of a conventional plasma display panel.

FIG. 9 is a partial cross-sectional view of another example of the conventional plasma display panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Front plate 2 Bus electrode 3 Transparent electrode 4 Dielectric 5 Protective layer 6 Partition 7 Data electrode 8 Phosphor 9 Back plate 10 Discharge space 11 Color filter 12, 12A, 12B Photoresist 13 Concave groove

Claims (6)

[Claims] A surface discharge electrode group including a transparent electrode and a bus electrode formed so as to be at least partially in contact with the transparent electrode;
A dielectric layer covering the surface discharge electrode group, a first substrate having a protective layer covering the dielectric layer, a data electrode for writing display data, and a partition wall for providing a discharge space, In an AC surface-discharge type plasma display panel in which a second substrate having a phosphor and a second substrate having a fluorescent material are opposed to each other, and a discharge space is defined between the two substrates, the bus electrode has a concave groove provided in the first substrate. A color plasma display panel, wherein at least a part of the color plasma display panel is formed in a state of being buried therein, and a surface thereof is formed flush with the transparent electrode and parallel to the surface of the first substrate. . 2. A surface discharge electrode group including a transparent electrode and a bus electrode formed so as to be at least partially in contact with the transparent electrode;
A dielectric layer covering the surface discharge electrode group, a first substrate having a protective layer covering the dielectric layer, a data electrode for writing display data, and a partition wall for providing a discharge space, In an AC surface-discharge type plasma display panel in which a second substrate having a phosphor and a second substrate having a fluorescent material are opposed to each other, and a discharge space is defined between the two substrates, the bus electrode has a concave groove provided in the first substrate. And the surface is flush with the surface of the first substrate, and the transparent electrode is in contact with the bus electrode and with respect to the surface of the first substrate. A color plasma display panel characterized by being formed in parallel. 3. The color plasma display panel according to claim 1, wherein said concave groove is formed on a surface of said first substrate. 4. The color plasma display panel according to claim 1, wherein a base dielectric is provided on a surface of said first substrate, and a concave groove is formed on a surface of said base dielectric. 5. The color plasma display panel according to claim 3, wherein a cross-sectional area of the bus electrode is 100 μm ² or more. 6. A color filter is provided on the first substrate so as to be orthogonal to and in contact with the bus electrode and the transparent electrode, and a surface of the color filter on a side facing the second substrate is provided. 6. The color plasma display panel according to claim 3, wherein the color plasma display panel is formed parallel to the first substrate surface.