KR19990062744A - Resin sealing device - Google Patents

Abstract

The present invention improves the productivity by lowering the weight of the apparatus and increasing the speed of the upper and lower joints according to the weight reduction of the upper and lower parts of the upper and lower dies. The double toggle mechanism 60 A table 36 for supporting the lower thermal bar 4 and a table 32 connected to one end of the double toggle mechanism , Two of the tables are placed and fixed vertically in an opposed state by a tie-bar 33, and the remaining tables are present between the opposed two tables. The toggle mechanism 60 is configured so that the toggle link pivoting direction is the same as the direction in which the upper and lower metal molds 2 and the flange box 7 are attached and detached.

Description

Resin sealing device

The present invention relates to a resin encapsulation device for encapsulating a semiconductor element mounted on a lead frame.

A conventional example of this type of resin sealing apparatus is shown in Fig. The figure is a front view of a conventional apparatus.

The upper and lower pairs of the upper die 1 and the lower die 2 are detachably fitted to the upper and lower row cylinders 3 and 4, respectively. A required number of ports 5 for loading the resin and a flanger 6 for melting and injecting the loaded resin are arranged in a corresponding number in the lower die 2, And is connected to a flange box 7 which is detachably fitted and mounted on the lower portion of the lower mold 2 like a mold. Therefore, the support block 8 under the lower tray 4 is provided so as not to interfere with the flange box 7 at the time of resin injection and the receipt of a resin stock. In other words, since the support block 8 is arranged so as to avoid the area in which the flange box (longitudinal shape in the port column direction) moves up and down, the support block 8 becomes longitudinally long in the port column direction. In addition, the flange box is divided into a shape for fitting the flange box and is installed upright in relation to the connection between the flange box and the driving unit for driving the flange box.

The upper table 9 supporting the upper nipple 3 is fixedly supported by a tie bar 11 and a fixing nut 12 installed upright from the lower table 10. The tie bar 11 is inserted into the upper surface of the lower table 10 in such a manner that a monolayer portion is attached thereto and is fixed by a fixing nut 13 on the lower surface side of the lower table 10. Between the upper table 9 and the lower table 10, a moving table 14 for supporting the lower thermal plate 4 is provided so as to be movable up and down along the tie bar 11. [ A lead frame and a loader for supplying the resin tablet to the lower mold 2 are disposed between the tie bar 11 and the lower heat bar 4 in a dimensionless relationship in the vertical movement of the lower thermal bar 4 An unloader (not shown) for taking the molded article out of the mold, and a guide rail 15 for a die cleaner (not shown) for cleaning the mold after molding. A transfer unit 16 is fixed to a lower surface of the moving table 14 and incorporates a driving force converting mechanism 17 using a ball screw to move the flange box 7 and the flange 6 up and down. A lower portion of the driving force converting mechanism 17 is connected to an electric motor provided on the inner side in the direction orthogonal to the paper surface of Fig. 5 by a belt transmitting mechanism 18. [

Between the transfer unit 16 and the lower table 10, there is provided a double toggle mechanism 19 for moving the moving table 14 up and down. The double toggle mechanism 19 has a structure in which a driving force converting mechanism 20 using a ball screw like the transfer unit 16 is built in the center of the lower table 10 and a crosshead 21 fixed to the upper end of the ball screw, A base link 24 rotatably connected to the lower table 10 by a branch pin 23 and a long link 22 rotatably connected to the left and right sides of the lower portion of the transfer unit 16 by branch pins 25, (26) and the like are arranged symmetrically with respect to the driving force converting mechanism (20). Further, each of these links is rotatably connected by mutually different point pins. The lower portion of the driving force converting mechanism 20 is connected to an electric motor provided on the inner side in the direction orthogonal to the paper surface of the drawing by the belt transmission mechanism 27. [

FIG. 6 is a cross-sectional view of FIG. 5A-A, where the Tw dimension shown in this figure is the transverse pitch of the four tie bars 11, that is, the width pitch dimension when viewed from the front of the apparatus. The Td dimension is the depth pitch dimension of the tie bars 11. Further, the lower mold 2 is detachable in the downward direction of the paper surface of Fig. 6, and the flange box 7 of Fig. 5 is also the same. In addition, the heat plate itself may be detached from the apparatus when the dimension of the mounting die is changed. 6 is the branch pin 23 of the double toggle mechanism 19 and is located on the axial line of the branch pin 23 on the space for securing the rotation space and the apparatus in most cases Part of the outer diameter is caught. Therefore, it is necessary to secure a dismantling space for maintenance of the branch pin 23. For the above reasons, the relationship between the Tw dimension and the Td dimension can be expressed by the following equation, where d is the outer diameter dimension of the tie bar 11, K is the mold width dimension, and L is the overall length dimension of the branch pin 23. [

Tw - dK ... ... (One)

Td - d3 · L ... ... (2)

Further, in the case of the automatic apparatus, since the guide rail 15 exists, the Tw dimension is larger than the dimension obtained by the formula (1) by the dimension of the guide rail 15. [

Incidentally, the resin encapsulation device shown in Fig. 5 has the following drawbacks.

First, since the final force point position of the mold clamping force transmission is wider than the mold width K (see Fig. 6), a considerable rigidity is required for the transfer unit 16 and the moving table 14 at the time of mold clamping It is necessary to increase the weight of the device and further increase the driving force of the upper and lower motions in order to secure rigidity. In order to secure this rigidity, the second-order moment of the longitudinal section can be increased. Such an increase in dimension is accompanied by an increase in the device pass line, thereby deteriorating workability.

Secondly, since the turning direction of the toggle mechanism 19 is orthogonal to the attaching / detaching direction of the mold and the flange box 7, that is, the direction of the row and the support block dividing line, Is divided into two with the support block dividing line interposed therebetween. The presence of the support block is not connected to the improvement of the bending rigidity as shown in the explanatory drawing of the main part in Fig. 8 (a) It is affected by warpage, and unevenness of the metal fitting surface is generated, and problems such as burrs are likely to occur.

Third, since the above-mentioned depression position and the tie bar position are substantially the same, the left and right tie bar extension amounts of the dimensional deviation of the left and right toggle links are different from each other, and accordingly, the left and right mold clamping force unbalance occurs. It is very unlikely that the length of the right toggle link and the length of the left toggle link are completely the same, and even if simultaneous processing is performed, there is a problem that a dimensional error occurs. For example, if the dimension of the right toggle link is longer than the dimension of the left toggle link by 0.01 mm, the tie bar placement position and the toggle link placement position are the same and the cross head 21 is guided not to move left and right, And the right tie bar is stretched by 0.01 mm. The sum of the tie bar elongation is equivalent to the reaction force of the mold clamping force. Therefore, the greater the difference between the left and right extensions, the more the clamping force varies from side to side.

Fourthly, since the tie bars are adhered to the tie bars in the fixed shape of the tie bars on the lower table 10, the means for increasing the total diameter of the tie bars is adopted, , The elongation is small even when the same force is applied, so that sensitivity to the difference in the link dimension is increased, which increases the above-mentioned mold clamping force unbalance.

Fifth, in order to increase the productivity in the automatic apparatus, when the apparatuses shown in Fig. 5 are arranged in a plurality of widthwise directions, in order to minimize or eliminate the width of the guide rails 15 and reduce the tie bar diameter, The width of the double toggle mechanism 19 can not be smaller than the size of the double-toggle mechanism 19, so that a large installation space is required.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described circumstances, and an object of the present invention is to improve productivity by reducing the influence of warpage and increasing bending stiffness, thereby reducing the device load and increasing the speed of the upper / .

It is another object of the present invention to improve molding quality by suppressing warpage which causes burr generation.

It is another object of the present invention to provide an apparatus in which installation space is reduced even if a plurality of units are arranged by reducing the apparatus width.

Fig. 1 is an entire front view of two resin encapsulating devices according to the present invention arranged in parallel. Fig. 1 is a state in which the front left side is separated from a mold,

Fig. 2 is a right side view showing a state in which the link is extended, a right side view showing a top dead center state in which the link is extended,

3 is a left side view showing a state in which a mold is separated,

4 is a front view of an embodiment of the connector,

5 is a front view of a conventional device,

Fig. 6 is a cross-sectional view along the line A-A in Fig. 5,

7 is a cross-sectional view along the line A-A in Fig. 1,

8 is a comparative view showing the relationship between the direction of the force between the present invention and the conventional example and the direction of the flange box,

9 is an explanatory view showing the relationship between the tibia chip pitch and the reaction force due to the link size difference of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS

1: Phase mold 2: Lower mold

3: upper nirvana 4: lower nirvana

5: Port 6: Flanger

7: Flanger box 8: Support block

9: upper table 10: lower table

11: Tie bar 12: Fixing nut

13: Fixing nut 14: Moving table

15: guide rail 16: transfer unit

17: driving force converting mechanism 18: belt transferring mechanism

19: Double toggle mechanism 20: Driving force conversion mechanism

21: Crosshead 22: Short Link 22

23: Branch pin 24: Reference link

25: Branch Pin 26: Long Link

27: belt transmission mechanism 30: support block

31: upper table 32: lower table

33: Tie bar 34: Fixing nut

35: Fixing nut 36: Moving table

40: transfer unit 41: holder

42: ball spline 43: load transducer

44: flange box holder 50: driving force conversion mechanism

51: pulley 52: pulley

53: timing belt 54: belt transfer mechanism

55: Motor with reducer 60: Double toggle mechanism

61: Crosshead 62: Short Link

63: Branch pin 64: Reference link

65: Branch pin 66: Long link

67: connection block 68: ball spline

69: urethane rubber stopper 70: driving force converting mechanism

71: large pulley 72: pulley

73: timing belt 74: belt transmission mechanism

75: electric motor 80: guide rail

81: Split fastening fitting 90: Loader

91: unloader 100: connector

The resin encapsulation device of the present invention is characterized in that first, the toggle link pivoting direction of the double toggle mechanism is configured to be parallel to the direction of the resin tablet array, that is, the arrangement direction of the flange box.

Second, lines connecting the points of the mutually opposing two toggle links of the double toggle mechanism are parallel to the arrangement direction of the flanges.

The third aspect is characterized in that the dimension of the final reference point pitch of the toggle link is smaller than the dimension before and after the mold and the dimension of the tie bar depth pitch on the left and right sides of the mold is smaller than the dimension of the reference lead frame length of the apparatus .

Fourthly, the tie bar shape is made straight and the tie bar diameter is made to be a simple dimension calculated from the safety factor of 2 to 3 in the repeated tensile fatigue stance of the member.

Fifth, the attachment of the bearing which rotates in contact with and supported by the branch pin of the toggle link is disposed on the link member side other than the transfer unit, the lower table, and the crosshead.

Sixth, in the first apparatus, the heating mechanism is constituted by upper and lower heating plates for heating the upper and lower molds, and the heating unit is supported on the lower surface of the upper table, And the double toggle mechanism is configured to move the moving table up and down between the moving table and the lower table.

Seventhly, in the above narrow-pitch tie bar having a narrow diameter, a member for connecting the narrow-pitch tie bar between the lower table and the moving table and between the moving table and the upper table is provided as a device for preventing the apparatus from being shaken during speed- do.

Eighth, a plurality of resin sealing devices are arranged in parallel as a shake prevention measure of the narrow diameter narrow pitch tie bar, and the upper table or the lower table are connected to each other.

As a ninth anti-shake device for narrow-pitch tie bars, the upper table and the peripheral devices or the same upper tables arranged side by side are freely connected in the connecting direction and / or vertically.

In the tenth, the flange box supports a plurality of flanges for injecting the molten resin into the upper and lower molds, and is detachably supported in the same direction as the attaching / detaching direction of the upper and lower molds .

Eleventh, the double toggle mechanism includes a crosshead fixed to a ball screw shaft end, and a driving force converting mechanism for rotating a ball screw nut screwed to the ball screw shaft.

The twin toggle mechanism is characterized in that the double toggle mechanism is provided with a warp member having a large frictional coefficient which is configured to be in contact with each other when the crosshead and the ball screw nut approach each other by a predetermined dimension or less.

Action

8 (b) and 8 (c) show an example in which the connecting lines of the toggle link pivoting directions of the double toggle mechanism, that is, the connecting points of two mutually facing toggle links, (In the same direction as the arrangement direction of the resin tablet, that is, the attaching / detaching direction of the mold and the flange box 7), as shown in Fig. The rigidity of the mold or the nerves / support block 30 can be utilized, and the rigidity of the entire apparatus can be easily secured. This is also evident from the comparison between the prior art shown in Fig. 8 (a) and Figs. 8 (b) and 8 (c) of the present invention. Accordingly, the moving body can be lightened and increased in speed, and the productivity can be improved. In addition, the weight of the entire device can be reduced.

The toggle link has a finer pitch dimension that is smaller than the size of the mold before and after the mold and the tie bar depth pitch dimensions of the left and right molds are smaller than the target lead frame length dimension of the apparatus to be smaller than the focus pitch dimension. The unclamping force unbalance due to the difference is reduced.

This point is described with reference to FIG. Here, the first-order link dimension difference? K is considered to be absolutely unchanged. Further, the upper table and the upper mold are considered as simple girders, and the warp of the member is ignored.

Let the reaction force of each tie bar be R1 and R2, and let F be the force of the point at which the lower type tilted by the difference in the link dimension first touches the mold. The inclined dimension of the inclined lower mold is defined as DELTA K.

First, when the bottom face of the bottom type contacts

(R1 · D-R2 · D) / W = ΔK / 2C ... ①

D = L / (A E)

L: Tie bar length

A: Tie bar cross-sectional area

E: Young's modulus

.

In order to determine how the force (F) of the initial point-to-point contact varies with the W dimension

R1? W = (W / 2 + C) 占 F? R1 = ((W + 2C) / 2W) ... ②

R2 = ((W - 2C) / 2W) · F (W / 2 - C) ... ③

① In the equation, ② and ③

(2C / W ² ) · F · D = ΔK / 2C

^{F = △ K / (4C 2} · D) · W 2 ... ... ④

.

④ The following two can be deduced from the equation.

• If the W dimension becomes smaller, F can be made smaller.

· When D becomes large, F can be made small. (Shortening the tie bar diameter increases D)

In addition, since the tie bar shape is made straight and the tie bar diameter is made narrow, the unbraided clamping force unbalance due to the difference in the size of the toggle link is hardly generated and the tie bar extension is also increased, The clamping force control becomes possible. Accordingly, occurrence of burr at the time of molding can be suppressed.

In addition, it is possible to reduce the device width due to the toggle link pivoting direction, the tie bar position, and the tie bar diameter, and if a plurality of devices are arranged in parallel, productivity can be improved without securing a large installation space.

In the supporting point of the toggle link, the stationary pin is fixedly supported on the side of the disassembly member called the transfer unit, the lower table and the crosshead, and the rotary support bearing is provided on the link member side, Exchange can be easily performed.

It is also possible to connect the tie bars disposed at the narrow pitch between the upper table and the moving table and between the moving table and the lower table and / or to connect the upper tables of the upper table and other peripheral devices or parallel mounting devices to each other in the connecting direction and / It is possible to prevent shaking in the toggle link rotating direction caused by the narrow pitch and the small diameter.

Embodiment

Hereinafter, an embodiment of the present invention will be described with reference to Figs. 1 to 3. Fig. Fig. 1 is a front view of two resin encapsulating devices according to an embodiment of the present invention. Fig. 1 is a state in which the left side is separated and a state in which the right side is clamped. Fig. 2 is a right side view of the mold clamping state of the embodiment of the present invention, Fig. 3 is a left side view of the mold releasing state, and Fig. 4 is a front view of an embodiment of the connector. 5 are denoted by the same reference numerals. 7 is a sectional view taken along the line A-A in Fig.

First, the dimension P in Fig. 1 is the dimension of the installation interval of the present apparatus, and the dimension of the horizontal width of the apparatus is smaller than the dimension P because it is parallel with the required gap (5 mm to 10 mm).

The upper and lower pairs of the upper die 1 and the lower die 2 are detachably fitted to the upper and lower row cylinders 3 and 4, respectively. A number of ports 5 for loading a required number of resin and a number of flangers 6 for injecting the loaded resin are arranged in the lower mold 2. The flanger 6 is connected to a lower mold 2) is connected to a flange box 7, which is detachably fitted and mounted in the same manner as a mold. Therefore, the support block 30 under the lower heating plate 4 is provided so as not to interfere with the flange box 7 by the height required for attaching and detaching the flange box 7.

The upper table 31 for supporting the upper nipple 3 is fixedly supported by a tie bar 33 and a fixing nut 34 installed upright from the lower table 32. The tie bars 33 are also fixed to the lower table 32 by fixing nuts 35 (Fig. 2) at the upper and lower surfaces as described above. The tie bar diameter is a dimension obtained by taking a safety factor of 2 to 3 on the basis of the repeated tensile fatigue limit value of the member to be used. In the case of the present embodiment, the tie bar material is S45C (fatigue strength 220 N / mm ² ) , The result of the simple calculation is 41.7 mm in diameter (safety factor 2) to 51.0 mm (safety factor 3), and the tie bar diameter is 45 mm. It is necessary to consider a stress concentration factor of about twice the stress concentration factor of the single layer attachment portion in the conventional example, and the tie bar diameter is required to be 58.9 mm to 72.2 mm.

The upper table 31 is finely connected to the adjacent device or peripheral device by the connector 100 in the connection direction or the vertical direction or any direction.

The position of the tie bar 33 to be laid out will be described after explaining the overall configuration of the present embodiment.

A moving table 36 for supporting the lower thermal bar 4 is provided between the upper table 31 and the lower table 32 so as to be movable up and down along the tie bar 33. [ A hole slightly larger than the width of the flange box 7 is formed at the center of the moving table 36 so that the flange box 7 moves up and down when the resin is injected and resin is injected. The entire flange box 7 appears on the moving table only at the time of detachment.

A transfer unit 40 is fixed to the lower surface of the moving table 36 and a driving force converting mechanism 50 using a ball screw is incorporated. A holder 41 fixed to the upper end of the ball screw shaft of the driving force converting mechanism 50 A flange box holder 44 is provided on the upper surface of the holder 41 via a load transducer 43 while being guided in the vertical direction by the two ball splines 42. A flange box 7 is fitted And the flange box 7 and the flange 6 are moved up and down. A pulley 51 is fixed to a lower portion of the driving force converting mechanism 50 and is opposed to the mold removal surface side of the transfer unit 40 by a belt transmission mechanism 54 including pulleys 51 and 52 and a timing belt 53 And is connected to the speed reducer-equipped electric motor 55 (see Fig. In the driving force converting mechanism 50, a ball screw nut is rotatably supported by two pairs of slosstress bearings and a radial bearing, and a pulley 51 is fixed to the lower end surface of the ball screw nut.

Between the transfer unit 40 and the lower table 32, there is provided a double toggle mechanism 60 for moving the moving table 36 up and down. The double toggle mechanism 60 has a structure in which a driving force converting mechanism 70 using a ball screw such as the transfer unit 40 is built in the center of the lower table 32, And a short link 62, one end of which is connected to the lower table 32 by a branch pin 63. The short link 62 is connected to the lower table 32 by a branch pin 63, And a long link 66 rotatably connected to both the forward and rearward sides of the lower portion of the transfer unit 40 by a point pin 65. These links are freely rotatable by mutually different point pins It is connected. A large pulley 71 is fixed to a lower portion of the driving force converting mechanism 70 and is supported by a belt transfer mechanism 74 composed of a pulley 72 and a timing belt 73 on the side opposite to the mold removal surface side of the lower table 32 And is connected to an electric motor 75 (Fig. In the driving force converting mechanism 70, a ball screw nut is rotatably supported by two pairs of thrust bearings and a radial bearing, and the large pulley 71 is fixed to the lower end surface of the ball screw nut.

The pitch dimension of the branch pin 65, which is a point of the long link 66 for transmitting the clamping force to the lower die, is set to a dimension smaller than the dimension before and after the lower die, and the final arrival positional relation with the reference link 64, And both have an angle of 12 degrees with respect to the vertical direction before and after the state toward the center. Accordingly, since the force vector is directed to the center of the mold in the initial stage of the clamping operation, the internal pressure of the transfer unit 40 connecting the front and rear branch pins 65 is increased to improve the rigidity. The movement of the crosshead 61 is guided by two ball splines 68. The ball spline 68 is fixed to a tie bar between the left and right tie bars of the apparatus and a connecting block 67 which is inserted into the lower table 32 to connect the upper end to the tie bars. The crosshead 61 can be moved up and down without rotation and inclination. A urethane rubber stopper 69 is attached to the lower surface of the crosshead 61. When the crosshead 61 approaches the ball screw nut at a predetermined position or more and the urethane rubber stopper 69 is positioned on the upper surface of the ball screw nut And are brought into contact with each other. The fulcrums of the transfer unit 40 and the lower table 32 and the crosshead 61 constitute the entire fixed support side and the long links 66 and the long links 66, And the base link 64 and the short link 62 are formed as a rotation support bearing. This is economical because it is only necessary to disassemble and replace the relatively light link parts, rather than considering the overhole of the device by abrasion of the branch pin or the rotary support bearing.

The timing belt 53 of the belt transfer mechanism 54 of the transfer unit 40 extends to surround one side of the long link 66. In the belt exchange, the pulleys 51 and 52, the timing belt 53 ), And then remove either of the branch pins that are pivotally connected to the long link. Naturally, when the branch pin is removed, the moving table 36 is hung on the upper table 31 with a stud bolt (not shown) or the like, or the object between the lower table 32 and the moving table 36 is put There is a need.

The mold width direction pitch f of the tie bar 33 is arranged at a position where parts attached to the tie bar 33 do not interfere with the movement of the movable table 36. The depth of the tie bar 33 in the longitudinal direction of the mold, that is, the depth pitch, is a pitch dimension shorter than the length of the target lead frame and narrower than the fixed pitch of the mold clamping force. And the outer diameter of the branch pin (65) is configured so as not to interfere when removing the branch pin (65). The tie bar is a guide rail indicated by reference numeral 80 in the drawing or a fixing nut 34 for fixing the upper table 31. The guide rail 80 serves as a traveling guide such as a loader 90, an unloader 91, a die cleaner (not shown), and the like which move into and out of the mold from the rear side of the apparatus. In this embodiment, Is formed on the inner surface of the tie bar with the same dimension as the thickness of the nut (34). The method of fixing the guide rail 80 to the tie bars 33 is to support and fix the tie bars 33 with the split fastening members 81 split and fastened to the tie bars 33 respectively. The reason why the split fastening is not performed directly on the guide rails is to prevent the guide rails from being bent in the bolt tightening direction when the split fastening portions are screwed with bolts.

Next, the action and effect will be described.

First, in FIGS. 1, 2 and 7, the double toggle mechanism 60 is arranged so as to rotate in the forward and backward directions 1, that is, in the same direction as the port arrangement direction, (B), that is, the depth pitch (e) is smaller than the target lead frame length (h), and at a position narrower than the fixed pitch (m) of the mold clamping force, Since the outside diameter of the tie bar and the outside diameter of the turning point pin 65 are dimensionless such that they do not interfere with each other when the branch pin 65 is removed, the branch pins 63 and 65, which receive the reaction force of the mold clamping force at the time of clamping, The width of the upper table 31, the moving table 36, and the lower table 32 can be determined by setting the width of the tie bar 33 to a short diameter, It is possible to make it smaller. Since the support points of the crosshead 61 and the short link 62 are smaller in the reaction force than those of the branch pins 63 and 65, the pin lengths may be short. For example, in the shape of the tie bars 33 There is no obstacle to removal even if it is covered. The length of the reference link point pin 63 may be divided between the same parts of the adjacent apparatuses of the present embodiment or between the same positions of the other peripheral apparatuses so that a space can be secured. Is T, the pitch size P between devices may satisfy the condition of P? 2? T. This makes it possible to mount a plurality of units in a very small space in the width direction as compared with the conventional apparatus. Therefore, productivity can be improved without securing a large installation space.

The fulcrum portions of the transfer unit 40 and the lower table 32 and the crosshead 61 which are difficult to remove even when the double toggle mechanism 60 is arranged to rotate back and forth are both fixedly supported, 64, and the short link 62 is supported by the rotation shaft, the overhole of the apparatus due to bearing wear or the like can be achieved only by disassembling or exchanging relatively light link components, and by transferring the entire apparatus to a repair shop or the like There is no need to economize.

Further, when the operation of the apparatus is started, the electric motor 75 starts to rotate, and rotation and rotational force are transmitted to the driving force switching mechanism 70 through the belt transmission mechanism 74. When the ball screw nut rotates, the ball screw shaft, that is, the crosshead 61, which is screwed to the ball screw nut rotates, the rotational force of the motor 75 is converted into a thrust, and the thrust is transmitted to the double toggle mechanism 60 and the transfer And transferred to the moving table 36 through the unit 40. [

Here, the operation of the double toggle mechanism 60 will be described in more detail. However, since the double toggle mechanism 60 is symmetrical in the back and forth direction as described above, only the right side of Fig. 3, that is, the front side of the apparatus will be described. As described above, the crosshead 61 is raised by the rotation of the ball screw nut, so that the short link 62 also rises and rotates clockwise around the point 61A. At the same time, the reference link 64 rotates clockwise about the fulcrum pin 63 so that the long link 66 rotates counterclockwise about the fulcrum pin 65, The moving table 36 is pushed upward at a high speed. When the crosshead 61 is located in the vicinity of the lowering limit, the movement amount of the movement table 36 is larger than the movement amount of the crosshead 61, and the motor rotation force, that is, the thrust is also required. On the other hand, when the crosshead 61 comes just before the rise, the opposite action to the above-mentioned action occurs. A very large force can be generated as the upward thrust force with respect to the moving table 36 just before the long link 66 and the reference link 64 become approximately straight. At the same time, the output of the motor is lowered in the direction of the upward rotation and the output restriction is released in the direction of the downward rotation. Accordingly, it is possible to prevent the mold from being damaged even if it collides with the mold by determining the rising position at an incorrect value. The fixing position of the upper table 31 to the tie bar 33 is set such that the fastening allowance at the top dead center position of the moving table 36 relative to the top dead center position of the double toggle mechanism 60 (about 0.7 mm to 1.0 mm in terms of moving table movement) when the entire device is clamped with a wear amount (about 0.3 mm to 0.5 mm in terms of moving table moving amount) of the sliding contact of the toggle link portion And is fixed at a position that has been downwardly corrected by a total sum of dimensions. Therefore, even when the clamping is completed, the long link 66 and the reference link 64 do not actually become straight.

The mold clamping force is controlled to the ascending position of the crosshead 61 to automatically detect the type of touch size in advance and to ascertain the position of the movable table 36 at that position, It is determined based on the calculation formula in which the deformation coefficient is inputted, and the elevating position is determined at the position for generating the predetermined mold clamping force.

At this time, the deformation of the tie bar 33 is detected by a strain gauge (not shown) attached near the lower table 32 of the tie bar 33, and it is checked whether or not a predetermined mold clamping force is generated. This check is performed every time the mold clamping operation is performed. If the mold clamping force is over the specified amount or the mold clamping force is excessive, the next molding is stopped. For the fluctuation below the specified amount, the positioning position is corrected each time, and stable clamping force is generated.

In the present embodiment, since the tie bar 33 is made shorter in diameter, the deformation amount at the time of clamping can be increased, so that the resolution of the clamping force setting is improved and accurate clamping force control becomes possible.

Further, since the arrangement of the tie bars 33 on the turning direction side of the toggle link is narrower than that of the toggle links, for example, when there is a difference between the front and rear toggle link dimensions, the tie bar diameter is a conventional diameter , While the tie bar pitch is also a conventional pitch, the unbalance of the front and rear clamping forces is greatly reduced. It can be considered that the tie bar pitch on the turning direction side of the toggle link is narrow and the tie bar diameter is shortened so that the rigidity on the link rotating direction side is weakened. Since the members for connecting the tie bars are provided between the moving table 36 and the lower table 32, it is possible to prevent the apparatus from moving back and forth in the vertical movement of the moving table 36. [ When the diameter of the tie bar is shortened and the pitch of the tie bar is narrowed, the upper tables 31 and the upper tables of the other peripheral devices or the parallel mounting devices are freely connected in the connecting direction and the vertical direction The shaking of the apparatus can be suppressed.

The support block 8 and the moments of the clamping force are orthogonal so as to perpendicularly intersect the dividing line of the heat bar. In contrast, in the present embodiment, the support block 30 and the nibbles 3, 4), and furthermore, a moment in the direction in which the rigidity of the molds 1, 2 is the strongest, that is, the direction in which the component member passes. That is, if the support block is disposed parallel to the port column direction, the bending stiffness in the direction becomes stronger than the bending stiffness in the orthogonal direction (since the support block is divided (divided) in the orthogonal direction side, the support block can not be a bending stiffness material The movable table 36, the support block 30 and the transfer unit 40 can be made lighter in weight than the conventional device. have.

That is, when the same longitudinal stiffness is secured, the width is narrowed and the thickness dimension is thickened. Since the mold used in the resin encapsulation device is reluctant to bend, the longitudinal dimension (thickness) is effective at the third power of the width dimension, and the weight can be reduced.

In this way, high-speed operation becomes possible as the weight is reduced, productivity is improved, and the stiffness of the constituent members is transferred to the molds in vain, thereby suppressing occurrence of burrs.

The motor 55 with the speed reducer for driving the transfer unit 40 starts to rotate and the belt drive mechanism 54 is driven on the same principle as the above-mentioned crosshead lifting operation, The ball screw shaft or holder 41 is raised by the driving force converting mechanism 50 and the load transducer 43 and the flange box holder 44 and the flange box 7 and the flange 6 are raised And the resin injected into the lower mold is melt-injected into the cavity formed in the upper and lower molds. The melt injecting operation is carried out by speed control by a predetermined speed of the motor until the resin is almost filled in the cavity, while the output signal of the load converter 43 is used for checking whether abnormal main input is not generated, When the flange 6 rises at the position where the filling is completed, the output signal of the load converter 43 is fed back so that the speed control of the forward and reverse directions is performed with the predetermined speed as the upper limit so that the desired cure force is constant Respectively. At this time, the mold clamping must be completed until the resin injection pressure is increased. The mold clamping motor 75 and the resin-sealed motor 55 are interlocked with each other by a control device not shown. When the cure time has elapsed, the motor of the transfer first rotates in the direction opposite to the above, and the flange 6 is lowered.

Thereafter, the clamping is completed and the moving table 36 is lowered. The moving table speed is set to 10 mm / sec or less until the upper and lower molds are completely separated, and at a completely separated position, the mold is lowered at a high speed until just before the molded article is ejected. At the position of the molded product ejection, the curl (unnecessary resin portion) in the port 5 portion and the product of the cavity portion are simultaneously pushed up in synchronism with the ejection speed and the flange rising speed of the transfer, and ejected from the lower mold 2. By synchronizing the electric motors, it is possible to prevent the occurrence of problems such as resin cracks and gate residuals.

When an abnormality occurs in the control device (not shown) during the rapid descent of the moving table, the overrun detection sensor (not shown) set in a direction slightly lower than the descent limit And the brakes attached to the electric motor 75 are braked, and at the same time, the electric power of the electric motor is cut off. However, as described above, accelerating at the time of link breaking unique to the driving force converting mechanism 70 and the toggle mechanism during high-speed rotation requires accelerating and completely stopping the braking of the electric motor 75 in order to secure a large overrun area. Here, the urethane rubber stopper 69 attached to the lower surface of the crosshead 61 abuts against the upper surface of the rotating ball screw nut, thereby braking the rotating portion, rapidly consuming the rotational energy, . As a result, no collision occurs between the rigid bodies, thereby preventing unexpected breakage of the apparatus, and at the same time, it is possible to clear the load bearing problem of the bottom in the semiconductor factory.

As another embodiment of the present invention, the upper table and the lower table described in the above embodiment may be reversed upside down. That is, the upper table according to the embodiment is fixed to the lower base, and the effect of the present invention does not change even when the moving table moves from the upper side to the lower side. The connector 100 may be connected to a member located at a position remote from the base fixing portion. Even when the moving table according to the embodiment is fixed and the upper and lower tables are moved up and down relative to each other, both the upper and lower tables are freed by fixing the moving table of this embodiment, Unchanged.

4A, 4B, 4C, and 4D, the shape of another embodiment of the connector 100 according to the present embodiment is elastically deformed in the connecting direction and the vertical direction, and the two guide mechanisms (a, b) , The above-described effects can be exhibited.

According to the resin encapsulation device of the present invention, since the toggle link pivoting of the double toggle mechanism is configured in the resin tablet arranging direction, that is, in the same direction as the mold and flange box attachment / detachment direction, the rigidity of the mold, The rigidity of the whole can be easily secured. Accordingly, the moving body can be lightened and increased in speed, and the productivity can be improved. Further, the weight of the entire apparatus can be reduced.

Further, by setting the final pitching pitch of the toggle link to be smaller than the size of the mold before and after the mold, and the pitch depth of the tie bars on the left and right sides of the mold is smaller than or equal to the target lead frame length dimension of the apparatus, Even if there is a difference in the size of the toggle link, the unbalance of the clamping force due to the difference is reduced. Further, by making the shape of the tie bar straight and shortening the tie bar diameter, the unbalance is less likely to occur again, and the tie bar is also increased in elongation, so that the resolution of the setting of the mold clamping force is improved and accurate mold clamping force control becomes possible. Accordingly, occurrence of burr at the time of molding can be suppressed.

Further, the apparatus width can be reduced by the toggle link pivoting direction, the tie bar laying position, and the tie bar diameter, and if a plurality of apparatuses are arranged in parallel, productivity can be improved without securing a large installation space.

Further, in the support point of the toggle link, the branch pin is fixedly supported on the side of the transfer member, the lower table, and the cross member, which are difficult to disassemble, and the rotation support bearing is provided on the link member side, Can be easily performed.

It is also possible to connect the tie bars arranged at a narrow pitch between the upper table and the moving table and between the moving table and the lower table, and / or to connect the upper tables and the upper tables or lower tables of other peripheral devices or parallel mounting devices By freely connecting in the connection direction and / or the vertical direction, it is possible to prevent the swinging in the toggle link pivoting direction caused by the narrow pitch and the short diameter.

Claims (12)

An upper and a lower table fixed to a tie bar so as to face each other vertically, a moving table arranged so as to be movable up and down between the upper and lower tables, and a movable table provided on one side of the corresponding one of the upper and lower tables, An upper and a lower pair of upper and lower dies that are detachably fixed to the moving table, and a pair of upper and lower dies, one end of which is connected to the moving table and the other of the upper and lower dies fixed to the moving table, A flange box in which a flange for injecting a molten resin is fixed and fixed in a space formed in the upper mold and the lower mold by the mold clamping, And a heating mechanism for heating the lower mold, wherein in the resin encapsulation device for encapsulating the semiconductor device, Wherein the detachment direction of the upper and lower dies is the same direction as the detachment direction of the flange box and the toggle link rotation direction of the double toggle mechanism is the same direction as the direction of detachment of the flange box. . The resin encapsulation device according to claim 1, wherein a line connecting the points of intersection of two mutually opposing toggle links of the double toggle mechanism is parallel to an arrangement direction of the flange. The tie bar according to claim 1 or 2, wherein the tie bar is made up of four tie bars disposed at predetermined intervals between the front and rear sides of the mold, Wherein the dimensions are smaller than the front and rear dimensions of the mold and the depth pitch dimensions of the tie bars on the left and right sides of the mold are smaller than the dimension of the target lead frame length of the device to a narrow pitch smaller than the above-mentioned critical point pitch size. The tie bar according to claim 1, wherein the tie bar is straight and the outer diameter stress value at the time of maximum-type fastening is an outer diameter dimension in a range of 1/2 to 1/3 times the repeated tensile fatigue limit of the member Sealing device. The resin encapsulation device according to claim 1, wherein a rotation support bearing is provided only at a link member side at a supporting point of the toggle link. 2. The apparatus according to claim 1, wherein the heating mechanism comprises upper and lower heating plates for heating the upper and lower molds, the heating unit is supported on the lower surface of the upper table, and the lower heating plate is supported on the upper surface of the moving table And the double toggle mechanism is configured to move the moving table up and down between the moving table and the lower table. The resin encapsulation device according to claim 1, wherein the tie bars are connected between the upper table and the moving table and between the moving table and the lower table. The resin encapsulation device according to claim 1, wherein a plurality of the resin encapsulation devices are arranged in parallel, and the upper table or the lower table are connected to each other. The resin encapsulation device according to claim 1, wherein the upper table or the lower table is freely connected to the upper tables of the other peripheral devices or the parallel mounting devices or the lower tables in the connecting direction or vertically. 2. The flange box according to claim 1, wherein the flange box comprises: a plurality of flanges for injecting molten resin into the lower metal mold, the lower flange being connected to and supported by the lower metal mold, Wherein the resin encapsulant is a resin encapsulant. 2. The resin encapsulation device according to claim 1, wherein the double toggle mechanism comprises a crosshead fixed to a ball screw shaft end, and a driving force converting mechanism for rotating a ball screw nut coinciding with the ball screw. 12. The resin encapsulation apparatus according to claim 11, wherein the double toggle mechanism comprises a warp member having a large friction coefficient and configured to contact each other when the crosshead and the ball screw nut approach each other by less than a predetermined dimension.