KR19990056738A - Glass substrate conveying device - Google Patents

Abstract

This invention discloses a glass substrate conveyance apparatus.

According to the present invention, a cathode and an anode electrostatic charge generating portion are provided on the surface of the carrier arm, and the glass substrate is adsorbed by the electrostatic attraction force between the glass substrate and the carrier arm. Thereby, the surface which a glass substrate wears does not generate | occur | produce, and since a glass substrate is sucked and supported by the attraction force as a whole, a movement does not generate | occur | produce at the time of high speed movement.

Description

Glass substrate conveying device

TECHNICAL FIELD This invention relates to a glass substrate conveyance apparatus. More specifically, it is related with the glass substrate conveyance apparatus which prevents a glass substrate from slipping at the time of conveyance of the glass substrate used as the board | substrate of a liquid crystal display device and a plasma display panel.

Generally, the glass substrate provided as the board | substrate of a liquid crystal display device and a plasma display panel is mounted in a conveyance arm, is charged to a process chamber, and carried out after carrying out a predetermined process.

In the past, as shown in FIG. 1, when the glass substrate 3 is seated on the carrier arm 2, the glass substrate 3 is fixed to the glass substrate seating surface of the carrier arm 2 in order to prevent the glass substrate 3 from slipping. For example, four o-rings (2) were installed.

Thus, the O-ring 2 provided in the conveyance arm 1 adhere | attaches and supports the glass substrate 3, and prevents it from slipping during the glass substrate 3 conveyance.

However, when the O-ring 2 is used as the anti-slip means of the glass substrate 3 as described above, the following problem occurs.

First, the O-ring 2 and the glass substrate 3 are closely supported by the friction force. However, at the portion where the glass substrate 3 and the O-ring 2 are rubbed, wear of the glass substrate 3 occurs due to the friction force described above. Thus, fine dust tends to generate | occur | produce on the glass substrate in which abrasion generate | occur | produced. Moreover, since many O-rings 2 are provided in the conveyance arm 1, the glass substrate 3 wears irregularly and contamination is easy to generate | occur | produce.

Secondly, the glass substrate 3 is tightly supported by four O-rings having a small area. Thereby, the area which the carrier arm 1 and the glass substrate 3 contact is made very small compared with the area of the glass substrate 3 whole. For this reason, a glass substrate moves at the time of high speed movement, and it is difficult to advance a process to an accurate position.

Accordingly, the present invention is to solve the above-mentioned conventional problems, to provide a conveying apparatus for a glass substrate that can prevent the wear of the glass substrate during transportation, and also prevent the movement of the glass substrate during high-speed movement. For the purpose of

1 is a conventional glass substrate transfer device

2 schematically shows a conveying apparatus for a glass substrate according to the present invention.

3 is an enlarged view of a portion “A” of FIG. 2.

(Explanation of symbols for the main parts of the drawing)

11: carrier arm 12: cathode electrostatic charge generating portion

13 anode positive charge generating unit 14 glass substrate

15: power supply unit 16: control unit

In order to achieve the above object of the present invention, according to an embodiment of the present invention, the carrier arm on which the glass substrate is seated, the negative electrode and the positive electrostatic charge generating portion disposed on the glass substrate seating surface of the carrier arm, the negative electrode and A power supply unit for supplying power to the positive electrostatic charge generating unit, and a control unit for controlling whether to supply power to the power supply unit, when the voltage is applied to the negative and positive electrostatic charge generating unit from the power supply, the positive charge and negative charge in the glass substrate Is rearranged to have a polarity opposite to that of the cathode and the anode electrostatic charge generating unit, and the glass substrate is adsorbed to the carrier arm by attraction between charges.

According to the present invention, a cathode and an anode electrostatic charge generating portion are provided on the surface of the carrier arm, and the glass substrate is adsorbed by the electrostatic attraction force between the glass substrate and the carrier arm. Thereby, the surface which a glass substrate wears does not generate | occur | produce, and since a glass substrate is sucked and supported by the attraction force as a whole, a movement does not generate | occur | produce at the time of high speed movement.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a view schematically showing a conveying apparatus for a glass substrate according to the present invention, and FIG. 3 is an enlarged view of a portion “A” of FIG. 2.

In this embodiment, the carrier arm and the glass substrate are adsorbed and supported by using the electrostatic attraction force.

With reference to FIG. 2, the negative electrostatic charge generation part 12 and the positive electrostatic charge generation part 13 are provided in the surface in which the glass substrate 14 is seated in the conveyance arm 11 of the glass substrate conveyance apparatus which concerns on this invention. Is placed. The negative electrostatic charge generating portion 12 is formed on the edge of the surface on which the glass substrate is seated, and the positive charge generating portion 13 is formed in a rim shape inside the negative electrostatic charge generating portion 12, and the arrangement form thereof Can be interchanged. The cathode and anode electrostatic charge generators 12 and 13 are connected to a power supply 15 for supplying power. In this case, the negative terminal (−) of the power supply unit 15 is connected to the negative electrostatic charge generating unit 12, and the positive terminal (+) is connected to the positive electrostatic charge generating unit 13. This power supply unit 15 is connected to the control unit 16. The control unit 16 allows power to be applied from the power supply unit 15 to the negative and positive electrostatic charge generating units 12 and 13 only when the glass substrate is seated and conveyed.

The operation | movement of the conveying apparatus of the glass substrate of this invention which has such a structure is as follows.

As described above, when a predetermined power is applied to the cathode and anode electrostatic charge generators 12 and 13 from the power supply unit 15, negative charges are charged to the cathode electrostatic charge generator 12 as shown in FIG. 3. Positive charges are charged in the positive electrostatic charge generating portion 13. On the other hand, the glass substrate 14 itself has a positive charge and a negative charge, and when the glass substrate 14 is seated on the charged carrier arm 11, the glass substrate is based on the coulomb force. The charges of (14) are redistributed. That is, positive charges are collected on the glass substrate 14 on the cathode electrostatic charge generating unit 12 of the carrier arm 11, and negative charges are collected on the glass substrate 14 on the positive electrostatic charge generating unit 12. Then, between the glass substrate 14 and the carrier arm 11, electric charges having different polarities correspond and are arranged to generate an attraction force according to Coulomb's law. Therefore, the glass substrate 14 is attracted and supported by such attraction. Accordingly, the area in which the static charge generating portions 12 and 13 are formed is larger than the area tightly supported by the conventional O-ring, so that the movement during the high speed movement is less. In addition, since the glass substrate is supported by the attraction force between the charges rather than the frictional force, no damage is caused to the substrate.

In addition, the surface of the carrier arm 11 is preferably made of an insulating material, it is preferable that the carrier device is not grounded as a whole. In addition, a DC voltage of about 500 to 750 V is preferably applied from the power supply unit 15. At this time, when a high voltage is applied from the power supply unit 15, the adsorption force between the glass substrate 14 and the carrier arm 11 increases, but this may cause a defect in the glass substrate 14 during discharge. In addition, it is preferable to maintain a vacuum between the transfer arm 11 and the glass substrate 14. This is because adsorption characteristics are better in a vacuum state.

As described in detail above, according to the present invention, a cathode and an anode electrostatic charge generating unit are provided on the carrier arm surface to adsorb the glass substrate by electrostatic attraction between the glass substrate and the carrier arm. Thereby, the surface which a glass substrate wears does not generate | occur | produce, and since a glass substrate is sucked and supported by the attraction force as a whole, a movement does not generate | occur | produce at the time of high speed movement.

In addition, this invention can be implemented in various changes within the range which does not deviate from the summary.

Claims (5)

A carrier arm on which the glass substrate is seated; A cathode and an anode electrostatic charge generator disposed on the glass substrate seating surface of the carrier arm; A power supply unit supplying power to the cathode and the anode electrostatic charge generating units; It includes a control unit for controlling whether or not the power supply of the power supply, When voltage is applied from the power supply to the cathode and anode electrostatic charge generating portions, the positive and negative charges in the glass substrate are rearranged to have the opposite polarity to the cathode and anode electrostatic charge generating portions, so that the glass substrate is attracted by the charges between the charges. A glass substrate conveyance apparatus, which is adsorbed by a carrier arm. The glass substrate conveying apparatus of claim 1, wherein one of the cathode and the anode electrostatic charge generators is disposed at the edge of the carrier arm, and the other is disposed inside the electrostatic charge generator disposed at the edge. The glass substrate transport apparatus according to claim 1, wherein the transport arm is made of an insulating material. The glass substrate conveyance apparatus of Claim 1 which is a vacuum state between the said conveyance arm and a glass substrate. The glass substrate transfer apparatus of claim 1, wherein the voltage supply unit supplies a DC voltage of about 500 to 750 V to the positive and negative electrostatic charge generating units.