KR19990051317A - Dust Removal Device and Dust Removal Method - Google Patents

Abstract

(Objective) The present invention provides a dust removal apparatus capable of efficiently trapping dust generation sources, in particular, dusts of about 0.3 μm or less generated in a semiconductor device manufacturing process over a long period of time, and further compacting the apparatus. It is an object to provide a dust removal method.

(Configuration) The present invention provides a dust removal apparatus for removing dust contained in a gas introduced from a dust generating source, the liquid separation device for removing water and oil in the gas introduced from the dust generating source, and from the liquid separation apparatus. A dust collecting device into which gas is introduced, the dust collecting device includes a filter formed in a cylindrical shape, a gas purifying chamber formed on the outside of the filter, and the liquid separation device inside the filter while surrounding these filters and the gas purifying chamber. A casing having an inlet for introducing gas from the filter and an outlet for communicating the gas purifying chamber to the outside of the filter, a dust removal device sliding against the inside of the filter, and a drive device for driving the dust removal port. On the other hand, the liquid separation device, the inlet for introducing the gas from the dust generating source and the outlet for communicating with the inlet of the dust collector; The paper is provided with a casing, a disk-shaped rotary brush for separating the liquid separation chamber from the inlet to the outlet of the casing, and a driving device for driving the liquid-separated rotary brush. The thickness is 1-75% of the filter length in the said dust collector, It is characterized by the above-mentioned.

Description

Dust Removal Device and Dust Removal Method

The present invention relates to a dust removal apparatus and a dust removal method for trapping and removing dust generated from a dust generating source, and in particular, it is possible to efficiently capture dust of 0.3 μm or less produced in a semiconductor device manufacturing process for a long time efficiently. In addition, the present invention relates to a dust removal apparatus and a dust removal method that enables the compactness of the apparatus.

As the source of dust, for example, semiconductor device manufacturing industry, automobile industry, plastic industry, resource industry, ceramic industry, powder metallurgy industry, tax supply industry, catalyst industry, ferrite industry, color material industry, agrochemical industry, feed processing industry, food industry, waste treatment In the fields of industry, bio-related industry, cosmetics industry, pharmaceutical industry, etc., there exists a problem that dust generate | occur | produces in various facilities, for example, it is known that very fine dust of particle size of about 0.01-50 micrometers generate | occur | produces.

In particular, in recent years, advances in computers and electronic control apparatuses that apply the same have greatly opened their eyes, and accordingly, the manufacturing technology and production amount of semiconductor devices used in computers have grown significantly rapidly. Germanium (Ge), silicon (Si), gallium arsenide (GaAs), gallium phosphorus (GaP) and the like are practically used as semiconductors to be used as raw materials for the semiconductor materials. In view of prevention, it is known that harmful substances are forbidden to dissipate, or gases containing them are harmful substances or adsorb harmful substances in the atmosphere.

Examples of hazardous substances used or produced in semiconductor manufacturing processes include silicon, arsenic, phosphorus, boron, metal hydrides, freons, halogens, halides, nitrogen oxides, and the like. It is not allowed to discharge dust-containing exhaust gas into the atmosphere as it is, firstly, after removing the dust from the exhaust gas, various processes are performed to release it as a safe and clean gas.

Therefore, in order to remove the dust contained in the gas from the said dust generating source, it is proposed to use cyclone, a scrubber, a venturi scrubber, a bug filter, an electrostatic precipitator, a looper, a settling chamber, etc.

However, the marginal particle diameter of the dust that can be captured by these devices is 3.0 μm in a cyclone, 1.0 μm in a scrubber, 10 μm in a looper, and 50 μm in a settling chamber. It is not possible to capture very fine dust.

In addition, although a venturi scrubber, a bug filter, and an electrostatic precipitator can capture 0.1 μm of dust, these devices are expensive on a large scale or have a problem that waste disposal of collected dust is complicated.

When observing the particle size distribution of dust sources, especially dust generated in the semiconductor manufacturing process, most of them occupy about 0.3 μm or less, so experiment to develop a dust collector capable of collecting dust of about 0.3 μm or less. In the process, it can be seen that by using a filter made of a felt-like nonwoven fabric having a thickness of about 1 mm, it is possible to sufficiently collect and collect dust of about 0.3 μm or more.

Therefore, in order to put this filter into practical use, a high-pressure back pressure was applied to wash the filter, and an attempt was made to reuse the filter. However, since the eye of the filter is very small, a very high pressure back pressure must be applied, and therefore, a large-scale, high-performance washing apparatus is required, and the installation area of the whole apparatus becomes large, and the apparatus becomes very expensive. Maintenance costs also proved to be expensive.

On the other hand, as shown in FIG. 6, for example, the filter 101 is formed in the cylindrical shape of a vertical axis, the brush 102 which contacts the inner surface of this filter 101 is provided, and this brush 102 is provided. ) Is introduced into the filter 101 while the gas is introduced into the filter 101 and flows through the inside of the filter 101 from the inside of the filter 101 through the inside of the brush 102, while dust attached to the filter 101 is applied to the brush ( A self regenerating dust collector has been proposed to be separated by rotating 102.

When the inside and the outside of this filter 101 remove the moisture and oil component in the gas containing dust, and let the gas containing this dust penetrate through a filter to remove the said dust, such gas will introduce | transduce. It goes without saying that the side to be used is the inner side and the side through which the gas flows through the filter 101 and the dust is removed and the purified gas is discharged.

However, when this self-regenerating dust collector is used as a dust removal device in an actual semiconductor device manufacturing process, for example, the pressure loss of the filter 101 becomes larger than expected, and the brush 102 is rotated. It has been found that the filter 101 cannot be reproduced even if it is made.

Therefore, as a result of intensive examination, liquid components, such as oil components, which are used in vacuum pumps and oil rotary, etc. used for dust generation in semiconductor manufacturing processes, and aqueous or oily work fluids used for grinding or cutting, Floating in the gas to be treated as a small droplet or attached to the phase of the duct, then flows through the air flow to the filter 101 and attaches to the surface at the same time as dust, the cause of clogging of the filter 101 It turned out to be.

In addition, since oil components and moisture adhering to the surface of the filter 101 penetrate into the eyes of the filter 101 due to gas pressure or capillary action, they are stored and thus adhere to the surface of the filter 101 simultaneously with dust. As a result, it cannot be removed to the extent that the brush 102 is used to sweep it, and as a result, it has been found that the filter causes non-reproducible clogging.

The present invention has been completed in view of the above technical problem, and it is possible to efficiently capture dust generation sources, in particular, dusts of about 0.3 μm or less generated in the semiconductor device manufacturing process over a long period of time, and furthermore, to compact the device. An object of the present invention is to provide a dust removal device and a dust removal method.

1 is a block diagram of an apparatus of the present invention.

It is a schematic diagram which shows the relationship of the filter of a 1st layer and a 2nd layer used for this invention.

3 is a configuration diagram showing another embodiment of the apparatus of the present invention.

4 is a configuration diagram showing still another embodiment of the apparatus of the present invention.

5 is a configuration diagram showing still another embodiment of the apparatus of the present invention.

6 is a block diagram of a self-regulating dust collector invented prior to the present invention.

(Explanation of symbols for the main parts of the drawing)

1: particle generation source 3: liquid separation unit 4: dust collector

7: blower 8: oil absorbent polymer 9: absorbent polymer

31: casing 31a: lower part 31b: upper part

32: liquid separation chamber 33: inlet 34: upper wall

35: exit 36: rotary brush for liquid separation 38: drive device

41: casing 42: spiral brush for dust removal

43: laminated filter (filter) 43A: first layer filter 43B: second layer filter

43C: Third Layer Filter 44: Gas Purification Chamber 45: Outlet

That is, the dust removing apparatus (hereinafter simply referred to as the present apparatus) according to the present invention relates to a dust removing apparatus for removing dust contained in a gas introduced from a dust generating source, and the moisture in the gas introduced from the dust generating source. And a liquid separator for removing an oil component, a dust collector for introducing gas from the liquid separator, wherein the dust collector includes a filter formed in a cylindrical shape, a gas purifying chamber formed outside the filter, and these filters. And a casing having an inlet for enclosing the gas purifying chamber and introducing gas from the liquid separation device inside the filter, and an outlet for communicating the gas purifying chamber to the outside of the filter, and sliding the inner side of the filter. And a drive device for driving the dust removal port, wherein the liquid separation device is configured to introduce gas from the dust generation source. A casing having an inlet port and an outlet port communicating with the inlet port of the dust collector, a disc-shaped rotational brush for separating the liquid separation chamber from the inlet port to the outlet port in the casing, and a drive device for driving the brush. And the thickness of the liquid separation rotating brush is 1-75% of the filter length in the dust collector.

In the apparatus of the present invention, the dust removal device that is slid to the inside of the filter means to shake, rub, or shake off the inside of the filter, and, for example, by using a brush or a spatula to contact the inside of the filter while circumferentially contacting them. Rotate in one direction (rotate in one direction), rotate (reversely rotate in a clockwise or reverse direction), or move a brush, etc. up and down or left and right in the axial direction, or Exercise.

Specifically, for example, the brush or the spatula is rotated or rotated to contact the inside of the filter, or when the filter is vertical, the brush or the spatula is moved up and down so that the brush or the spatula comes into contact with the inside of the filter, or the filter is horizontal. In the case of a shape, the brush or the spatula may be moved left and right so that the brush and the spatula come into contact with the inside of the filter, or the hose is violently moved through a pressurized gas through a flexible hose, and the inside of the filter may be shaken like a whip. .

In addition, in the apparatus of the present invention, the gas purifying chamber means a space between a gas containing dust penetrating through a filter and a side from which the dust is removed (outer peripheral surface of the filter) to an outlet for communicating with the outside.

In the apparatus of the present invention, the inside and the outside of the filter are considered to remove the dust by passing the gas containing the dust through the filter after removing the moisture and oil components in the gas containing the dust. It goes without saying that the side to be introduced is on the inside, and this gas flows through the filter, and the side from which the dust is removed and the purified gas is discharged is the outside.

In addition, in the apparatus of the present invention, in addition to the above configuration, it is preferable to provide a blower that forms an air flow flowing through the liquid separator and the dust collector in order from the dust generating source in order.

In addition, in the apparatus of the present invention, if necessary, an absorbent polymer, an oil absorbent polymer, or a laminate of an absorbent polymer and an oil absorbent polymer is disposed at the bottom of the liquid separation chamber, so that the water and oil components in the gas are absorbed thereafter. It is preferable because it is simple.

In the present invention, the lower part of the liquid separation chamber may be separated from the upper part. This configuration is preferable because maintenance in the liquid separation chamber becomes extremely easy.

Further, in the apparatus of the present invention, the dust removing port of the dust collecting device is composed of a dust removing rotary brush, and the dust removing rotating brush has a hair spiral surface around the central axis located at the center of the filter of the dust collecting device. The spiral brush may be formed to be parallel to each other, and the spiral brush may be configured to rotate by the driving device of the dust collector, thereby making it possible to efficiently remove dust. In this case, the dust removal rotating brush formed in a spiral shape may be formed continuously, may be formed intermittently, and may be spirally formed as a whole.

Further, in the apparatus of the present invention, the dust removal port of the dust collector is composed of a central axis located at the axis of the filter of the dust collector and hair that has been planted on the central axis, so that the planted hair is slid to the filter of the dust collector. That is, as mentioned above, it may be comprised so that the dust attached to this filter by driving by the said drive apparatus may be rotated or rotated in the circumferential direction, or it moves in the axial direction, while contacting the filter of the said dust collector.

In the present invention, when such a device is a vertical dust removing device, the dust collecting device may be disposed above the liquid separating device, and the introduction port of the dust collecting device and the outlet of the liquid separating device may be used in combination. By doing so, the apparatus is compact, the structure is simple, handling is extremely easy, and extremely economical.

Further, in the apparatus of the present invention, the dust removal port of the dust collector and the liquid separation rotating brush of the liquid separation device may have a common central axis, and the driving device of the dust removal port and the driving device of the liquid separation rotation brush may be used together. The structure is simplified.

In particular, in the apparatus of the present invention, the filter of the dust collector may be constituted by a laminated filter in which three or more layers of filters whose eyes are reduced in order from the inside to the outside may be laminated, whereby fine dust can be efficiently removed. .

In this case, the laminated filter includes a first layer filter having an eye size of about 200 μm, a second layer filter having an eye size of 50-200 μm, and a third layer having an eye size smaller than that of the second layer filter and larger than 1 μm. It is preferable that a filter is formed in that dust can be efficiently removed over a long period of time.

In the apparatus of the present invention, the thickness of the laminated filter is not particularly limited as long as it can remove dust efficiently and economically, but is generally 0.5-20 mm. That is, when the thickness of the laminated filter is less than 0.5 mm, the desired dust removal rate cannot be achieved. When the laminated filter exceeds 20 mm, the pressure loss caused by the filter increases, and as a result, a large blower is required and the equipment cost increases. From these viewpoints, the thickness of the laminated filter is preferably 1-10 mm, more preferably 1.5-7.5 mm. In this case, the thickness of the first layer filter is 20-50% of the total thickness of the multilayer filter, the thickness of the second layer filter is 30-60% of the total thickness of the multilayer filter, and the thickness of the third layer filter is the total thickness of the multilayer filter. It is preferably 1-25% of.

The apparatus of the present invention is applied to efficiently remove dust from the dust generating source described above. Particularly, the dust generating source includes dust equipment and dust equipment for generating dust in a semiconductor device manufacturing process including a large amount of fine dust. It is suitably used for dust equipment.

The dust removal method (hereinafter referred to simply as the present invention method) according to the present invention is a dust removal method for removing dust contained in a gas generated from a dust generating source. And removing the oil component and the water from the gas before introducing, and filtering the gas by flowing through the gas from the inside to the outside of the filter of the dust collector formed in a cylindrical shape.

In the method of the present invention, the inside and the outside of the filter are considered to remove the dust by passing the gas containing the dust through the filter after removing water and oil components in the gas containing dust. It goes without saying that this side is the inside, and this gas flows through the filter, and the side on which the dust is removed and the purified gas is discharged is outside.

In the method of the present invention, the dust removal port is slidly bonded to the filter of the dust collector, that is, as described above, while rotating or rotating in the circumferential direction or moving in the axial direction while contacting the filter of the dust collector, By doing so, the surface of the filter may be cleaned to remove dust trapped by the filter.

In this case, the dust removal device is often, eventually intermittently or always continuously, slid to the filter of the dust collector, that is, rotates or reciprocates in the circumferential direction while contacting the filter of the dust collector or reciprocates in the axial direction. Alternatively, the surface of the filter may be cleaned to remove dust trapped in the filter by performing a coordinated movement of these.

In the dust removal method, as the dust removal opening used, the same thing as the apparatus of this invention is mentioned.

That is, the dust removal opening means to shake, rub, or shake off the inside of the filter. For example, by using a brush or a spatula, they are rotated in the circumferential direction while contacting the inside of the filter (rotation in one direction). Or rotating (clockwise rotation or reverse rotation in turn), or moving a brush or the like up or down or left or right in the axial direction, or performing a combination of these.

Specifically, for example, the brush or the spatula is rotated or rotated to contact the inside of the filter, or when the filter is vertical, the brush or the spatula is moved up and down so that the brush or the spatula comes into contact with the inside of the filter, or the filter is horizontal. In the case of a shape, the brush or the spatula may be moved left and right so that the brush or spatula comes into contact with the inside of the filter, or the hose is violently moved through a pressurized gas through a flexible hose, and the inside of the filter may be blown off like a scratch. .

According to the present invention (which includes both the apparatus of the present invention and the method of the present invention), the gas containing dust from the dust generating source is introduced into the liquid separation apparatus to separate water, oil, and the like. It will be introduced to the dust collector. Therefore, there is no fear that water, oil or dust adsorbed on these together with the surface of the filter of the dust collector will be prevented, and the clogging of the filter will be prevented from being promoted by the moisture or oil component in the gas.

In addition, as a dust collector, a filter is formed in a tubular shape, the gas flows from the inside to the outside, and the dust is removed from the filter at the dust removal port disposed therein to recover the dust collection capacity. Since the dust collector is used, it is not necessary to install a large-scale backwashing device for the regeneration of the dust collecting filter, and the whole apparatus can be made compact.

In particular, in the present invention, the thickness of the rotary brush for separating the liquid in the liquid separator is 1-75%, preferably 3-60%, more preferably 5-50 of the length of the cylindrical filter in the dust collector. By the dimension of%, this rotating brush can naturally deteriorate the ventilation and effectively remove the moisture and oil components in the gas from the dust generating source without causing the enlargement of the blower or reducing the processing capacity. The adhesion of moisture and oil to the filter of the dust collector and the deterioration or loss of the self-renewal capacity of the filter are prevented. That is, if the thickness of the rotary brush for separating the liquid is less than 1% of the length of the cylindrical filter, the removal rate of the required water and oil cannot be achieved. On the other hand, if the thickness of the rotary brush is greater than 75%, the pressure loss is increased and the introduction efficiency of the processing gas is reduced. In order to achieve the required gas treatment efficiency, it is necessary to increase the size of the equipment and the equipment cost increases, which is not preferable in either case.

(Embodiment of the Invention)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described concretely according to drawing.

The dust removing apparatus according to this embodiment is a case where the dust generating source is a particulate dust generating source 1 generating particulate dust in a semiconductor device manufacturing process. As shown in the configuration diagram of FIG. A liquid separator (3) in communication with the particulate dust generating source (1) through a duct (2), a self-regenerative dust collector (4) directly connected to the upper side of the liquid separator (3), and the dust collector An exhaust duct 5 derived from (4), a noxious gas treatment device 6 and a blower 7 interposed in the exhaust duct 5 are included.

The blower (7) passes the gas from the particulate dust generating source (1) through the duct (2), the liquid separator (3), the dust collector (4), the exhaust duct (5) and the noxious gas treatment device (6). The configuration may be such that the air is discharged into the atmosphere, and in addition to being installed on the exhaust duct 5 as shown in the drawing, for example, the air is installed in the intake duct for sucking in the air provided in the particulate dust generating source 1 or the above-mentioned duct 2 ) Or in the liquid separation device 3 or in the dust collector 4.

By this blower 7, the gas from the particulate matter generating source 1 is discharged from the duct 2, the liquid separator 3, the dust collector 4, the exhaust duct 5 and the noxious gas treatment device 6 When an air stream is discharged into the atmosphere through the air, the particulate dust generated from the particulate dust generation source 1 and the moisture and oil penetrating into the particulate dust generation source 1 are driven through the air stream, or are pushed to the air stream to extract the duct (2). Is introduced into the liquid separator (3), and as will be described later in detail, after the water, oil and relatively large particulates are removed from the liquid separator (3), it is introduced into the dust collector (4). The remaining particulate dust is removed.

The gas discharged from the dust collector 4 is free of moisture, oil and particulate dust, but contains harmful gas components, and is thus attracted to the noxious gas treatment device 6, where mainly oxidation, reduction, neutralization, etc. It is treated with an adsorbent such as chemical treatment of activated carbon or zeolite, and made innocuous before being released into the atmosphere.

The liquid separation device 3 has a casing 31, and a liquid separation chamber 32 is formed inside the casing 31. In addition, an inlet 33 for communicating the liquid separation chamber 32 to the lead-out duct 2 is formed at a position of a predetermined height from the lower end of the casing 31, and a cylindrical opening is formed in the upper wall 34. The outlet 35 is formed so that the liquid separation chamber 32 communicates with the dust collector 4.

The material for forming the casing 31 is not particularly limited, and for example, paper, wood, synthetic resin, or metal may be used, but it is necessary to have mechanical strength, particularly rigid, enough to withstand the pressure of the air flow.

In this embodiment, the casing 31 is formed of fiber-reinforced synthetic resin (FRP) which is excellent in mechanical strength and excellent in weather resistance, chemical resistance and acid resistance, alkali resistance and heat resistance.

In addition, the shape of the casing 31 is not particularly limited as long as it is a hollow shape capable of forming the liquid separation chamber 32 therein, and the casing 31 may be formed into a polygonal cube, a cylinder, an elliptic cylinder, or the like. Although good, it is preferable to form as simple a shape as possible in order to reduce manufacturing cost.

In this embodiment, the casing 31 is bent flat plate material, hand lay-up method, spray-up method, vacuum bag molding method, pressure bag molding method, autoclavable molding method, cold press molding method, squeeze molding method, reservoir molding method, injection molding method, decompression It is formed into a cylindrical shape that can be easily formed by a known FRP molding method such as injection molding, flavored die molding, and SMC molding.

In addition, the size of the casing 31 is set in accordance with the processing capacity of the unit time required in advance, the processing period such as the conversion cycle of the oil absorbent polymer 8, the absorbent polymer 9, and the like described later.

The liquid separation chamber 32 may be formed inside the casing 31, and a partition wall for partitioning the liquid separation chamber 32 may be provided inside the casing 31, but in this embodiment, the configuration is simplified. At the same time, the casing 31 itself forms the peripheral wall of the liquid separation chamber 32 in order to reduce the size and weight.

In addition, the liquid separation device 3 is provided with a disk-shaped liquid separation rotary brush 36 which is internally in contact with the circumferential wall of the cylindrical outlet 35 of the liquid separation chamber 32 and is rotatable in the longitudinal axis rotation. As a drive source, a drive device M serving as a drive device for the dust removal spiral brush 42 as the dust removal port in the dust collector 4 is provided, and the inside of the liquid separation chamber 32 is discharged from the inlet 33 to the outlet ( The air stream rising toward 35 is configured to pass through the liquid separation rotary brush 36 which rotates continuously.

The material of the hair of the liquid separation rotary brush 36 is not particularly limited, and may be freely selected from among those generally used for hair of a brush, such as metal wires such as natural or synthetic fibers, steel, brass, copper, and composites thereof. You can choose.

In addition, the length of the hair tip of the hair of the liquid separation rotating brush 36 is not particularly limited, and the length of the hair tip from the inner circumferential surface of the casing 31 to the extent that the hair tip touches the inner circumferential surface of the casing 31 is not limited. Is preferred.

In the case where the tip of the hair is longer than the inner circumferential surface of the original body 31, wear may occur on the inner circumferential surface of the casing 31. Therefore, it is not preferable to use a metal wire as the material of the hair, and the casing 31 If the hair tip is largely opened on the inner circumferential surface, the gas containing oil or water may rise between the liquid separation rotary brush 36 and the casing 31, which is not preferable.

However, if the tip of the hair is slightly open at the inner circumferential surface of the casing 31, the hair flows in a centrifugal direction between the peripheral edge of the liquid separation rotating brush 36 and the casing 31 as the liquid separation rotating brush 36 rotates. There is no problem because an airflow is generated, and this airflow prevents the gas containing oil or water from rising between the liquid separation rotary brush 36 and the casing 31.

When the airflow contacts the liquid separation rotary brush 36, the oil and water contained in the airflow are trapped between the hairs of the liquid separation rotary brush 36 and separated from the airflow. The oil and water captured by the liquid separation rotary brush 36 are transported around the liquid separation chamber 32 by the centrifugal force according to the rotation of the brush 36, and self-weighted according to the peripheral wall 39 of the liquid separation chamber 32. Flows into the bottom of the liquid separation chamber 32, and oil and water separate and accumulate up and down.

In addition, a part of dust contained in the air stream, especially dust having a relatively large particle size, is also trapped between the hairs of the rotary separation brush 36 for liquid separation, adsorbed by oil or water attached to the brush 36, or oil by centrifugal force. Or it is conveyed to the peripheral wall 39 of the liquid separation chamber 32 with water, and flows to the bottom of the liquid separation chamber 32.

Then, the remaining dust is sucked into the dust collector 4 from the outlet 35 by the air flow passing between the hairs of the rotary brush 36 for liquid separation.

Here, the thickness x of the liquid separation rotary brush 36 can efficiently capture oil, moisture, and dust having a relatively large particle size, and at the same time reduce the pressure loss caused by the brush 36 and reduce the size of the small blower 7. In order to enable the use of 1-75%, preferably 3-60%, more preferably 5-50 of the effective length y of the axial direction of the cylindrical filter 43 in the dust collector 4 mentioned later. Set to%.

In this embodiment, in order to facilitate disposal of oil, water, or oil and water, the oil absorbent polymer 8, the water absorbent polymer 9, Alternatively, a laminate of the oil absorbent polymer 8 and the absorbent polymer 9 is disposed to adsorb oil, water, or oil and water that have flowed into the bottom of the liquid separation chamber 32 to these polymers, thereby adsorbing these polymers into a liquid separation chamber ( 32) it can be extracted and disposed of.

In this case, the form which arrange | positions the oil absorption polymer 8 or the water absorbing polymer 9 to the bottom of the liquid separation chamber 32 is not specifically limited, For example, a granular or powder form suitable thickness in the bottom of the liquid separation chamber 32 is suitable. In this case, both of them may be mixed and filled, but the oil absorbent polymer 8 and the absorbent polymer 9 may be divided into layers in the form of upper and lower layers so that both may be disposed of and disposed of. desirable.

In order to increase the workability of the waste treatment, the oil absorbent polymer 8 and the absorbent polymer 9 may be disposed in the waste disposal process separately. It is preferable to form each integral body, and, as this integral body, the porous body which carried the oil absorptive polymer 8 or the water absorbent polymer 9, and the synthetic resin which mix | blended the oil absorptive polymer 8 or the water absorbent polymer 9 is carried out. You can think of In addition, the shape of such an integrated body is not particularly limited, but in order to avoid the enlargement caused by the increase in the volume of the liquid separation chamber 32, for example, to form a film, sheet or plate shape that can be stored in the bottom of the liquid separation chamber 32. desirable.

The oil-absorbing polymer 8 used here is not particularly limited as long as it absorbs and retains oil, and in this case, a known one can be used.

Here, the absorbent polymer 9 to be used is not particularly limited as long as it absorbs and retains water, and in this case, a known one can be used.

In addition, the portion 31a lower than the inlet 33 of the casing 31 is decomposable at the upper portion 31b, and a predetermined amount of water, oil or dust is formed at the bottom of the liquid separation chamber 32. The lower part 31a of this casing 31 at the time of high conversion, or when the conversion time of the oil absorbent polymer 8, the absorbent polymer 9, or the laminated body of the oil absorbent polymer 8, and the absorbent polymer 9 arrives. It can be decomposed and transported to a fractionation treatment plant for separating water, oil or water and oil or polymers containing these and dusts and other dusts. Then, after the new absorbent polymer 9 and the oil absorbent polymer 8 are put into the lower portion 31a of the casing 31 emptied after the fractionation, the lower portion 31a is brought into contact with the upper portion 31b of the casing 31. do.

In addition, a plurality of lower portions 31a of the casing 31 are prepared, the lower portion 31a of the casing 31 containing the recovered oil, water, dust, and the like, the new absorbent polymer 9, and the oil absorbent polymer 8. The lower casing 31a of the other casing 31 which has been inserted may be replaced.

In this way, the operator can be finished without touching the oil absorbent polymer (8) or the absorbent polymer (9) or the laminate of the oil absorbent polymer (8) and the absorbent polymer (9), which directly absorbs harmful dust or harmful substances. Can increase.

On the other hand, in this case, it is preferable to remove the lower part 31a of the casing 31 in which recovered oil, water, dust, etc., and then seal the upper surface opening part with the cover 31c to increase safety.

The dust collector 4 prevents dust from being separated and accumulated from the air stream between the liquid separator 3 and prevents pressure loss due to flow resistance from the liquid separator 3. In order to further downsize the whole apparatus and to improve the transport safety of the recovered dust and the like to the post-treatment plant, in this embodiment, the liquid separator 3 is directly connected.

That is, the dust collector 4 of this embodiment has a cylindrical casing 41 having a longitudinal axis cap disposed coaxially with the casing 31 on the upper side of the liquid separator 3. 41, a spiral brush 42 used as a dust removal opening disposed coaxially with the core, and a cylindrical filter 43 in contact with the spiral brush 42 are provided.

In this embodiment, the spiral brush 42 is used as the dust removal port, but the present invention is not limited to this as long as dust can be removed. For example, even a brush or spatula member having a different shape can be used as a dust removal port as long as dust trapped in the filter can be removed.

In addition, a circular gas purifying chamber 44 is formed between the filter 43 and the peripheral wall 41a of the casing 41, and on the upper part of the casing 41, the gas is formed. An outlet 45 for communicating the upper portion of the purification chamber 44 with the exhaust duct 5 is formed.

The lower surface of the casing 41 is covered with the upper wall 34 of the casing 31 of the liquid separation device 3, and in the center of the upper wall 34, the spiral brush 42 for dust removal is viewed in plan view. The outlet 35 of the liquid separation apparatus 3 formed in a circle so as to match the contour is located, and the outlet 35 is used as an introduction port of the dust collector 4.

The material for forming the casing 41 is not particularly limited, and for example, paper, wood, synthetic resin, metal, and the like can be used, but it is necessary to have mechanical strength, particularly rigid, to the extent that it withstands the pressure of the air flow.

In this embodiment, the casing 41 is formed of the synthetic resin which is excellent in mechanical strength and excellent in weather resistance, chemical resistance, acid resistance, alkali resistance, and heat resistance.

The casing 41 has a hollow shape, and a circular gas purifying chamber 44 is formed between the filter 43 and the peripheral wall 41a of the casing 41. However, the filter 43 may be formed over the entire circumference, or formed partially continuously or intermittently in the circumferential direction.

That is, the casing 41 may be formed, for example, in a polygonal shape such as a cubic shape, a rectangular parallelepiped shape, a cylindrical shape, an elliptic cylinder shape, or the like, but in order to reduce the manufacturing cost, the casing 41 is preferably as simple as possible. In addition, in order to make the filtration uniform throughout the cylindrical filter 43, it is preferable to form the gas purifying chamber 44 over the entire circumference of the filter 43. From this point of view, in this embodiment, the casing 41 is formed in a cylindrical shape with a lid.

In addition, the size of the casing 41 is set in accordance with the processing capacity of the unit time required in advance, the conversion cycle of the spiral brush 42, the filter 43 and the like.

The dust removal spiral brush 42 used as the dust removal opening has a central axis 42a, and the hair 42b has a central axis 42a and is parallel to the hair 42b to form a spiral surface. It is a brush and a constant spiral vent 42c is formed between the lines of hair 42b.

The material of the hair 42b of this dust removal spiral brush 42 is not specifically limited, Specifically, For example, metal wires, such as natural or synthetic fiber, steel, brass, copper, etc., hair of a brush generally Can be freely selected from among those used in the present invention. In this embodiment, in order to prevent abrasion of the hair tip of the dust removal spiral brush 42 and the inner surface of the filter 43 for a long time, a synthetic resin hair is used. Dust removal spiral brush 42 is used.

The length of the surface hairs of the hairs 42b needs to be at least such that the tip of the hairs 42b can contact the inner surface of the filter 43 with a certain pressure. It is preferable to bend near the inner side of the filter 43 and to the extent along the inner side of the filter 43 over a predetermined length.

The central shaft 42a of the dust removal spiral brush 42 is connected to the drive unit M mounted on the upper wall 41b of the casing 41, and a liquid is provided on the lower end of the central shaft 42a. The liquid separation rotary brush 36 of the separation device 3 is connected, and by the driving device M, the dust removal spiral brush 42 and the liquid separation rotation brush 36 of the liquid separation device 3 are simultaneously held. It is possible to drive in the same direction.

Instead of rotating the dust removal spiral brush 42 in the driving device M as in the above embodiment, the spiral brush is fixed to rotate the filter 43, or both the spiral brush and the filter are rotated in opposite directions to each other. You may be allowed to.

Since the dust removal spiral brush 42 is a spiral of the hair 42b, when the brush 42 is rotated, the gas in the hollow portion of the filter 43 can be raised or lowered. During operation, the gas is rotated in a rising direction to raise dust evenly over the entire surface of the filter 43, and the gas introduced from the inlet is lifted through the ventilation path 42c to filter the filter. (43) It is advantageous to flow at an even pressure throughout.

When the gas containing dust comes into contact with the dust removal spiral brush 42, the dust is trapped between the hairs 42b and blown to the inner surface of the filter 43 by centrifugal force. In addition, the particulate matter that does not touch the hair 42b of the dust removal spiral brush 42 and floats in the gas reaching the inner surface of the filter 43 through the ventilation path 42c has a gas filter 43. Is captured by the filter 43 by flowing from inside to outside.

In the present invention and the method of the present invention, the inside and the outside of the filter are inside the side to which the gas containing dust is introduced, not to mention the fact that the present invention penetrates the gas from which water and oil have been removed. It is as mentioned above that the side from which the gas from which the dust was removed is discharged is the outer side.

The filter 43 is not particularly limited as long as it can capture 0.3 μm or less of dust. For example, when the minimum particle diameter of the collectable particulate dust is 0.3 μm, it is composed of one piece of 1.5 mm thick felt. can do.

However, in this embodiment, in order to make the minimum particle diameter of collectable particulate dust about 0.01 micrometer, it is comprised by the laminated | multilayer filter which laminated | stacked the filter of three or more layers which eyes become small in order from inside to outside.

The number of stacked layers of the filters 43A, 43B, 43C constituting the filter (stacked filter) 43 may be three or more layers, and in one or two layers, particulate dust having a particle diameter of 0.01 μm cannot be captured, which is not preferable. .

Further, arranging the small-eye filter 43B or 43C on the upstream side of the laminated filter 43 can capture relatively small dust at the size of the snow of the filter 43B or 43C, but the clogging is fast, It is not desirable because the service life is short

The eye size of each of the filters 43A, 43B, 43C of the laminated filter 43 is appropriately set in consideration of the use, the particle size distribution of the particulate dust to be trapped, and the like.

In this embodiment, the first layer filter 43A having an eye size of about 200 μm, the second layer filter 43B having an eye size of 50-200 μm, and the third layer filter having an eye size of 1-50 μm 43C is laminated.

When the airflow containing particulate matter flows through the filter 43, all dust having a particle size larger than the size of the eye a of the first layer filter 43A is trapped by the first layer filter 43A, and the trapped dust is removed. The area which blocks the eye a of the one-layer filter 43A gradually becomes wider.

As a result, the average size of the eye a of the first layer filter 43A becomes small, but the dust is spherical here, assuming that the eye of the filter is square, the dust having the same size as the eye a of the first layer filter 43A. If is considered to have been captured by the eye a of the first layer filter 43A, the dust filled with snow can pass about 0.2 times or less of the size of the eye.

This value is the theoretical dust collecting particle size in the state where the first layer filter 43A is almost completely clogged. However, when the pressure loss of the multilayer filter 43 becomes large, the dust removal spiral brush 42 rotates, and the multilayer filter ( 43) is reproduced.

As shown in the schematic diagram of FIG. 2, at the boundary between the first layer filter 43A and the second layer filter 43B, the eye a of the first layer filter 43A is the second layer whose eye is smaller than this. The eye b of the filter 43B is divided, and a part of the eye b of the second layer filter 43B is divided by the eye a of the first layer filter 43A.

For this reason, the average value of the eye at the boundary between the first layer filter 43A and the second layer filter 43B is smaller than the size of the eye b of the second layer filter 43B, and the second layer filter 43B is at this boundary. A large amount of dust smaller than the size of the eye b of) is captured, whereby the actual size of the eye at this boundary becomes considerably smaller than the size of the eye b of the second-layer filter 43B.

The final layer filter (here, the third layer filter 43C) according to the number of stacked layers of the filters 43A, 43B, 43C, the size of the eyes a, b, c, etc. of the filters 43A, 43B, 43C of each layer. The actual eye size is also determined at the boundary between the filter 43B and the front layer of the filter, and the dust-limiting particle diameter of the filter 43 is determined.

In reality, since the size of the eye c of the filter 43C of the final layer is only 1 μm or more, the size of the eye of the filter 43C of the final layer and the size of the eye of the filter 43B of the previous layer can be manufactured. By selecting as described above or increasing the number of laminated sheets of the filter, the dust-limiting particle size can be set to about 0.01 μm or less.

The thickness of the multilayer filter 43 is determined in consideration of the pressure difference between the particulate matter generating source 1 and the suction pressure of the blower 7, the ventilation to pressure loss of the filter 43, the mechanical strength of the filter 43, and the like. What is necessary is just to set it to 5 mm or more in this embodiment.

In addition, the thickness of each filter 43A, 43B, 43C of the laminated filter 43 is also similar to the pressure difference between the particulate matter generating source 1 and the suction pressure of the blower 7 and the respective filters 43A, 43B, 43C. May be determined in consideration of the air permeability, the pressure loss, and the mechanical strength of each filter 43A, 43B, 43C. In this embodiment, the thickness of the first layer filter 43A is equal to 20 of the total thickness of the multilayer filter 43. -50%, thickness of second layer filter 43B is 30-60% of total thickness of laminated filter 43, thickness of third layer filter 43C is 1-25 of full thickness of laminated filter 43 It is in%.

The material of each of the filters 43A, 43B, 43C constituting the laminated filter 43 is not particularly limited, and examples thereof include natural fibers, synthetic fibers or mixtures thereof, stretched synthetic resin films, foamed synthetic resins, and soluble kneaded products of synthetic resins. The porous body, the ceramic porous body, etc. which eluted and formed may be used, and when a fiber is used, the structure may employ | adopt either the knitted structure, the woven structure, or the nonwoven structure.

The natural fibers are classified into organic and inorganic ones. Examples of the organic natural fibers include vegetable fibers such as cotton, soup, and pulp, and animal fibers such as wool, wool, pig hair, abrasion, and silk. Examples of the inorganic natural fibers include ceramic fibers such as glass fibers, rock wool and asbestos.

The synthetic fibers are classified into organic and inorganic ones. Examples of the organic synthetic fibers include polyamide fibers, polyester fibers, acrylic fibers, and acetate fibers. Examples of the inorganic synthetic fibers include carbon fibers and boron fibers. The example is mentioned.

However, the material of each filter needs to use a material that does not decompose, corrode or react with substances contained in the air stream being treated.

In this embodiment, the first layer filter 43A is formed by superimposing polypropylene fibers having a thickness of about 4 mm, and the second layer filter 43B is formed by superimposing polypropylene fibers having a thickness of about 3 mm, and the third layer. The filter 43C is formed by overlapping polypropylene fibers having a thickness of about 1 mm.

On the other hand, when the plurality of layers of the filter 43A, the filter 43B, and the filter 43C are laminated here, the filter 43A, the filter 43B, and the filter 43C of each layer are set in close contact with each other in order. For example, the filter 43A, the filter 43B, and the filter 43C of each layer may not necessarily be integrally integrated by, for example, bonding or the like.

The laminated filter 43 can be reinforced with a reinforcing material, and examples of the reinforcing material include a porous plate made of a metal, a synthetic resin, and the like. This reinforcing material may be fixed to a filter 43A, a filter 43B, or a filter 43C which is a layer of the laminated filter 43 by a method such as bonding, screwing, riveting, or locking, and not being combined with either of these filters. You don't have to.

The laminated filter 43 may be reinforced by resin impregnation, in which case the resin may be impregnated with only one layer of filter 43A, filter 43B, or filter 43C, or may be impregnated with a plurality of layers of filters. You may impregnate the filter 43A * 43B * 43C of all layers.

Particulate dust adhering to the laminated filter 43 is cleaned by contacting the inner surface of the filter 43 while the dust removal spiral brush 42 rotates, and falls downward by its own weight.

The dust removal spiral brush 42 operates the drive unit M in a reverse direction periodically or occasionally at an appropriate time, so that the hair 42b writes the inner surface of the filter 43 downwards from the top. You may reverse the rotation. Then, after the appropriate time required to shake off the particulate dust from the laminated filter 43 and the dust removal spiral brush 42 has elapsed, the filter 43 is returned to the original rotation direction from the reverse rotation. The pressure difference between the inside and the outside returns to the original, so that an efficient arc reaction is restored over the front of the filter 43.

In addition, since the inner surface of the laminated filter 43 is cleaned by the dust removal spiral brush 42, the particulate dust which is clogged with the eyes is removed and regenerated, and the dust removal spiral brush 42 is When the hair 42b vibrates by the reaction of cleaning the inner surface of the laminated filter 43, the full particulate dust falls between the hairs 42b, and is regenerated. On the other hand, in this embodiment, although the dust trapped by the dust removal spiral brush 42 is removed and the laminated filter 43 is regenerated, this invention is not specifically limited to this, The shape of the brush or spatula of another shape is not limited to this, either. Even in the absence of, if the dust trapped in the filter can be removed thereby, regeneration of the laminated filter is possible.

In this embodiment in which the dust removal spiral brush 42 is continuously rotated, the dust removal and dust removal spiral brush 42 and the multilayer filter 43 by the dust removal spiral brush 42 and the laminated filter 43 are performed. Regeneration is performed in parallel and at the same time, and the dust collection capacity can be maintained for a long time.

In addition, since the gas introduced into the dust collector 4 is a gas from which oil and water are removed as mentioned above, oil, water, and dust do not adhere to the laminated filter 43 thoroughly. As a result, clogging of the multilayer filter 43 is prevented, and since oil and moisture do not penetrate the multilayer filter 43 and become impossible to remove, it is possible to maintain the dust collecting ability for a longer period of time.

The dust dropped from the dust removal spiral brush 42 and the laminated filter 43 is discharged from the outlet 35 of the liquid separation device 3, which also serves as an inlet of the dust collector 4, of the rotary brush 36 for liquid separation. It falls to the liquid separation chamber 32 through the circumference | surroundings and hair, and finally falls to the bottom of the liquid separation chamber 32, and is stored with the dust isolate | separated into the said liquid separation chamber 32. Therefore, the dust separated and removed by the dust collector 4 and the waste separated by the liquid separator 3 can be carried together to a post-treatment plant, such as a fractionation treatment plant, so that a worker has less chance of touching harmful substances. Increased safety

On the other hand, in this embodiment, in the disposal of the dust collected at the bottom of the liquid separation apparatus 3, in order to ensure the safety of unspecified third parties against harmful substances, the dust recovered at the bottom in the casing 31 and As needed, it is possible to arrange | position the waste container, such as the bag which surrounds the laminated body of the oil absorbent polymer 8 and the absorbent polymer 9, provided in the lower part 31a of the casing 31. As shown in FIG.

In addition, the central axis (42a) is configured as a double axis, the common drive device (M) or a separate drive device to separate the liquid separation rotary brush 36 and the dust removal spiral brush 42 independently of each other It may be rotated in the direction or the reverse direction.

For example, as shown in FIG. 3, the liquid separator 3 and the dust collector 4 are independent of each other, so that the outlet 35 of the liquid separator 3 and the introduction port 47 of the dust collector 4 are separated from each other. ) May be communicated with the intermediate duct 10. Here, the driving device M1 for driving the liquid separation rotary brush 36 of the liquid separation device 3 and the driving device M2 for driving the dust removal spiral brush 42 of the dust collector 4 are respectively. Although it is provided, it may be made to drive both in common by the common drive apparatus which has a suitable transmission mechanism which interlocks the liquid-separation rotating brush 36 and a spiral brush.

In particular, as shown in Fig. 3, independent of the upper wall 41b of the casing 41, a cover 41c is provided which covers the hollow portion of the filter 43 or the entire surface of the filter 43 from the upper side. On the upper side of the cover 41c, an assembly chamber 46 in which the gas purifying chamber 44 continuous to the outer pole of the filter 43 is evenly formed is formed, and the outlet port (in the center of the assembly chamber 46) is formed. When the 45 is configured to be opened, the flow path resistance from the outer surface of the filter 43 to the outlet port 45 becomes equal in the circumferential direction. In this way, by equalizing the flow path resistance from the outer circumferential surface of the filter 43 to the outlet port 45 in the circumferential direction, the arcing ability of the filter 43 can be made even more uniform in the circumferential direction.

On the other hand, also in this embodiment, the thickness x 'of the liquid separation rotary brush in the liquid separator 3 is 1-75% of the effective length y' of the filter 43 in the dust collector 4. , Preferably set to 3-60%, more preferably 5-50%, thus avoiding the increase in pressure loss by the rotary brush 36 or the enlargement of the blower 7 while avoiding the oil portion, the moisture, and the relative size. It is possible to efficiently capture dust having a large particle size. That is, if the thickness of the rotary brush for liquid separation is less than 1% of the length of the cylindrical filter, the desired removal rate of moisture and oil cannot be achieved. In order to achieve the desired gas treatment efficiency, it is necessary to increase the size of the equipment, thereby increasing the equipment cost.

The casing 41, the dust removal spiral brush 42 and the filter 43 of the dust collector 4 are not limited to the vertical axis, but may be arranged on the horizontal axis as shown in FIG. 4, for example. And also in this embodiment, the thickness x "of the liquid separation rotation brush in the liquid separation apparatus 3 is 1-75% of the effective length y" of the filter 43 in the dust collector 4, and is preferable. Preferably 3-60%, more preferably 5-50%, to achieve the same effect.

In each of the above embodiments, for example, as shown in Fig. 4, a partition valve (31d) is formed in the shape of a funnel, and a partition valve ( 37) may be provided so that the waste, such as oil, water or fine particles dust recovered into the liquid separator 3 may be extracted at any time by opening and closing the partition valve 37.

In each of the above embodiments, as the dust removal opening, the dust removal spiral brush 42 is used to contact the inner surface of the filter 43 of the dust collector 4 so as to be rotatable in position. Although it demonstrated, this invention is not limited to this. That is, in addition to the dust removal spiral brush, using a spatula for dust scraping, etc., they rotate or reciprocate in the circumferential direction or reciprocate in the axial direction, or knit them while contacting the filter of the dust collector. By exercising, the dust trapped by the filter 43 may be removed and collected.

When the dust removal spiral brush or the spatula for dust scraping is formed in a spiral shape, it may be formed intermittently as a whole, in addition to the case where they are formed continuously, and may be in a spiral shape as a whole.

In addition, as shown in FIG. 5, the side into which the gas containing dust is introduce | transduced and the side into which the gas from which dust was removed may be replaced based on the shape of the filter 43, In this case, dust removal The position of the spiral brush 42 is also replaced based on the shape of the filter 43. The dust removal spiral brush 42 may be driven by the drive device M, or the dust removal spiral brush 42 may be fixed and the filter 43 may be driven by the drive device M on the contrary. In the dust removal tool shown in Fig. 5, in place of the dust removal spiral brush 42, the shape of the filter may adopt another shape such as a rectangle.

In each of the above embodiments, an example of a semiconductor device manufacturing industry that generates a large amount of particulate dust as a source of dust has been described. However, the present invention is not limited thereto, and as the source of dust, for example, plastic industry, Applicable to resource industry, ceramic industry, powder metallurgy industry, tax supply industry, catalyst industry, ferrite industry, colorant industry, pesticide industry, feed processing industry, food industry, waste disposal industry, biotechnology related industry, cosmetics industry and pharmaceutical industry do.

As described above, according to the dust removal apparatus according to the present invention, a gas containing dust from the dust generating source is introduced into the liquid separation apparatus to separate water, oil, and the like, and then introduced into the dust collector. Therefore, there is no fear that moisture, oil or dust adsorbed on these together will adhere to the surface of the filter of the dust collector, and the progression of clogging of the filter will be prevented from being promoted by moisture or oil in the gas.

In addition, as a dust collecting device, a filter is formed in a cylindrical shape, gas is flowed from the inside to the outside, and dust trapped in the filter is removed by a dust removal port disposed inside the filter to recover the dust collecting capacity of the filter. Since the self-regeneration type dust collector is used, it is not necessary to install a large-scale backwashing device for regeneration of the dust collecting filter, and the whole apparatus can be made compact.

In particular, in the present invention, the thickness of the rotary brush for separating the liquid in the liquid separator is 1-75%, preferably 3-60%, more preferably 5- of the cylindrical filter length in the dust collector. With the 50% dimension, this rotating brush unnecessarily deteriorates the ventilation and increases the pressure loss, which causes the blower to be enlarged or the like, and the processing capacity of the gas is not reduced. The oil can be effectively removed, thereby preventing the adhesion of water or oil to the filter of the dust collector and the deterioration or loss of the self-renewal ability of the filter. As a result, the apparatus can be made more compact, and the equipment cost and running cost can be reduced.

In the apparatus of the present invention, the oil absorbent polymer, the absorbent polymer, and the laminate of the oil absorbent polymer and the absorbent polymer can be arranged at the bottom of the liquid separation chamber in the liquid separation device. Since the oil and the water can be absorbed into this polymer and disposed together with the polymer, this method makes it possible to easily separate the oil or water or the oil and water.

In addition, when the lower part of the liquid separation chamber is formed so as to be separable from the upper part, it is possible to carry out a method of transporting wastes separated from the liquid separation chamber and stored in the bottom of the liquid separation chamber to the aftertreatment for each lower part of the liquid separation chamber. Therefore, by performing this, a worker does not need to contact waste at the time of conveyance to a post-processing plant, and can improve safety further.

Further, in the present invention, when the spiral brush is used as the dust removal port of the dust collector, in which a spiral brush is formed in parallel to form a hair spiral surface around a central axis located at the center of the filter, the spiral brush is a driving device of the dust collector. The rotation of the filter can impart a flow to the gas inside the filter from the gas introduction side of the brush to the opposite side (the evacuation side). As a result, the gas can be introduced at an equal pressure over the entire surface of the filter. The interactions can be averaged over the entire surface, thereby preventing local dust gathering and clogging in the filter.

In addition, in the present invention, when the spiral brush is used as a dust removal port of the dust collector, in which a spiral brush is formed in parallel to form a hair spiral surface around a central axis located at the center of the filter, the dust brush is often collected. By driving the inner surface of the filter in the writing direction from the top to the bottom, the drive device can smoothly and efficiently separate the particulate dust from the spiral brush and the filter.

Also, in the present invention, when the dust collector is disposed above the liquid separator, and the inlet of the dust collector is combined with the outlet of the liquid separator, the dust falling from the dust collector is dropped into the liquid separation chamber so that the liquid separation chamber is separated. This prevents dust from separating and depositing from the air stream and from causing pressure loss due to flow resistance from the liquid separator to the dust collector between the liquid separator and the dust collector. At the same time, the whole apparatus becomes more compact, and the safety of transport to the aftertreatment plant, such as collected dust, becomes high.

In addition, in the present invention, when the filter of the dust collector is composed of a laminated filter in which three or more layers of filters are formed in which the eyes become smaller in order from the inner side to the outer side, the eyes of the filters of the respective layers overlap, in particular, the final layer. The minimum particle diameter of the dust which can be collected can be made smaller than 0.3 micrometer by the overlap of the filter eye of the layer and the previous layer.

In this case, the laminated filter includes a first layer filter having an eye size of about 200 μm, a second layer filter having a size of 50-200 μm, and a third layer filter having an eye size of 1-50 μm. In the case of a laminated filter of layers, the final particle diameter of the dust that can be collected can be about 0.01 μm.

And when the filter of a dust collector is comprised with this laminated filter of 3 layers, the thickness of a laminated filter shall be 0.5-20 mm or more, and the thickness of a 1st layer filter is 20-50% of the total thickness of a laminated filter. When the thickness of the second layer filter is 30-60% of the total thickness of the multilayer filter and the thickness of the third layer filter is 1-25% of the total thickness of the multilayer filter, not only sufficient mechanical strength can be obtained, Excellent dust removal effect can be obtained.

Claims (15)

A dust removal apparatus for removing dust contained in a gas introduced from a dust generating source, comprising: a liquid separation device for removing water and oil components in a gas introduced from the dust generation source, and dust introduced with gas from the liquid separation device The dust collecting device includes a filter formed in a cylindrical shape, a gas purifying chamber formed outside the filter, and a gas from the liquid separation device inside the filter while surrounding these filters and the gas purifying chamber. A casing having an inlet for introducing a gas inlet and an outlet for communicating the gas purifying chamber to the outside of the filter, a dust removal port sliding against the inside of the filter, and a driving device for driving the dust removal port. On the other hand, the liquid separation device, the inlet for introducing gas from the dust source and the outlet for communicating with the inlet of the dust collector The paper is provided with a casing, a disk-shaped rotary brush for separating the liquid separation chamber from the inlet to the outlet of the casing, and a driving device for driving the liquid-separated rotary brush. And wherein the thickness is 1-75% of the length of the filter in the dust collector. The dust removing apparatus according to claim 1, further comprising a blower for forming an air stream flowing to the outside through the liquid separator and the dust collector in order from the dust generating source. The dust removal apparatus according to claim 1 or 2, wherein an absorbent polymer, an oil absorbent polymer, or a laminate of an absorbent polymer and an oil absorbent polymer is disposed at the bottom of the liquid separation device. 4. The dust removing apparatus according to any one of claims 1 to 3, wherein the lower part of the liquid separation device is detachably formed from the upper part. The dust removing port of the dust collecting device is constituted by a dust removing rotary brush, and the dust removing rotating brush is made around the central axis located at the center of the filter of the dust collecting device. A dust removal device comprising: a spiral brush in parallel to form a hair spiral surface, and the spiral brush is configured to rotate by a driving device of the dust collector. The dust removal port of the dust collector is composed of a central axis located at the axial center of the filter of the dust collector and the hair planted on the central axis, and the hair is filtered by the dust collector. And a dust removal device configured to remove dust from the filter by being driven by the driving device so as to be slid. The dust-removing device according to any one of claims 1 to 6, wherein the dust collecting device is disposed above the liquid separating device, and the introduction port of the dust collecting device and the discharge port of the liquid separating device are combined. Dust removal device characterized in that. 8. The dust removal port of the dust collecting device and the rotating brush for separating the liquid of the liquid separating device have a common central axis, and the driving device of the dust removing port and the driving device of the rotating brush for separating the liquid are combined. Dust removal device characterized in that the. The dust removal apparatus according to any one of claims 1 to 8, wherein the filter of the dust collector is composed of a laminated filter in which three or more layers of filters whose eyes are smaller in order from the inner side to the outer side are laminated. 10. The laminated filter according to claim 9, wherein the laminated filter includes a first layer filter having an eye size of about 200 μm, a second layer filter having an eye size of 50-200 μm, and an eye size smaller than a second layer filter, A dust removal device comprising three stacked filters comprising a large third layer filter. The multilayer filter according to claim 9 or 10, wherein the thickness of the multilayer filter is 0.5 to 20 mm, the thickness of the first layer filter is 20-50% of the total thickness of the multilayer filter, and the thickness of the second layer filter is the whole multilayer filter. 30 to 60% of the thickness, and the thickness of the third layer filter is 1 to 25% of the total thickness of the multilayer filter. 12. The dust removing apparatus according to any one of claims 1 to 11, wherein the dust generating source is a dust generating facility in a semiconductor device manufacturing process and a dust generating facility accompanying it. In the dust removal method for removing the dust contained in the gas generated from the dust generating source, the step of removing oil components and water from the gas before introducing the gas into the dust collector, and inside the filter of the cylindrical dust collector And a step of permeating the gas to the outside and filtering the dust. 14. The dust removal method according to claim 13, wherein the dust removal port cleans the surface of the filter and removes the dust trapped by the filter by sliding the filter to the filter of the dust collector. 15. The dust removing method according to claim 14, wherein the dust removing opening cleans the surface of the filter and removes the dust trapped by the filter by slidingly contacting the filter of the dust collector at any time or continuously.