KR19990030920U - Locking device for wafer cassette storage container in semiconductor wafer cassette storage equipment - Google Patents
Locking device for wafer cassette storage container in semiconductor wafer cassette storage equipment Download PDFInfo
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- KR19990030920U KR19990030920U KR2019970043617U KR19970043617U KR19990030920U KR 19990030920 U KR19990030920 U KR 19990030920U KR 2019970043617 U KR2019970043617 U KR 2019970043617U KR 19970043617 U KR19970043617 U KR 19970043617U KR 19990030920 U KR19990030920 U KR 19990030920U
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본고안은 반도체 생산장비 내측으로 웨이퍼 카셋트를 투입하거나 인출토록 하는 반도체 웨이퍼 카셋트 수납장비에 있어서, 반도체 웨이퍼 카셋트 수납장비와 이에 얹어지는 반도체 웨이퍼 보관용기인 포드(Pod)를 고정토록 하는 포드 잠금장치에 관한 것으로, 인덱스 테두리에 포드 뚜껑을 고정하는 고정구를 좌우양측에 가지며, 상기 고정구는 좌우양측에 고정발을 가지며, 고정구의 양측단은 삽치구에 스프링 및 지지볼트에 의해 삽치되어지며, 고정구에 부착된 로울러를 삽치한 브라켓에는 상,하에 로울러를 삽치한 로울러지지대 중앙에 고정된 와이어가 감겨지게 되며, 상기 와이어는 로울러지지대에 삽치된 상,하 로울러를 거쳐 와이어 동작장치와 연결되는 한편, 상기 와이어 동작장치는 좌우양측의 브라켓에 나사축의 양단이 유설되어지며, 그 일측에는 모타의 축과 커플링에 의해 연결되어지며, 상기 나사축에는 이동구가 삽치되어지며, 상기 이동구에는 상기 와이어의 단부가 삽치 고정되도록 한 것으로, 모타가 회전될 때 나사축을 회전시키며, 회전되는 나사축은 이에 삽치된 이동구를 좌우로 이동시킬 때 이동구에 고정된 와이어가 당겨지거나 풀어지게 되며, 와이어의 당김작용시 그 힘은 와이어를 상,하로울러 삽치구의 로울러를 거쳐 고정구 브라켓이 잡아 당기게 되며, 이로 인해 고정구가 작동되도록 하는 것이다.In this paper, a semiconductor wafer cassette storage device for inserting or withdrawing a wafer cassette into a semiconductor production equipment, and a pod lock device for fixing a semiconductor wafer cassette storage device and a pod, which is a semiconductor wafer storage container, mounted thereon, Regarding the index rim on the left and right sides having a fastener for fixing the pod lid, the fastener has a fixed foot on both sides, the two ends of the fastener is inserted by the spring and the support bolts to the insert, attached to the fastener The fixed roller is inserted into the bracket is inserted into the upper and lower rollers are inserted in the center of the roller support is inserted, the wire is connected to the wire operation device via the upper and lower rollers inserted in the roller support, while the wire Both ends of the screw shaft are installed on the brackets on the left and right sides. The side is connected to the motor shaft by the coupling, the screw shaft is inserted into the moving tool, the end of the wire is inserted into the movable tool to be fixed, the motor rotates the screw shaft when the motor rotates, the rotation The screw shaft is pulled or released when the moving tool inserted into the moving tool is moved to the left and right. When pulling the wire, the force pulls the wire up and down through the roller of the insert and the fixing bracket is It pulls out, which causes the fixture to work.
Description
본고안은 반도체 생산장비 내측으로 웨이퍼 카셋트(water casstte)를 투입하거나 인출토록 하는 반도체용 웨이퍼 카셋트 수납장비에 있어서, 반도체 웨이퍼 카셋트 수납장비와 이에 얹어지는 반도체 웨이퍼 카셋트 운반 및 보관용기인 포드(Pod)를 고정토록 하는 포드 잠금 고정장치에 관한 것이다.In this paper, a semiconductor wafer cassette storage device for injecting or withdrawing a water cassette into or out of a semiconductor production equipment, which is a semiconductor wafer cassette storage device and a semiconductor wafer cassette transport and storage container on the pod. It relates to a pod lock fixture to secure the.
반도체 제조에 사용되는 웨이퍼는 웨이퍼 카셋트에 수납되어 보관용기인 포드에 담겨져 운반 및 보관되며, 또한, 카셋트에 수납된 웨이퍼는 포드에 의해 반도체 제조장비와 장비 사이를 이동하게 된다.Wafers used in semiconductor manufacturing are stored in wafer cassettes, stored and stored in pods, which are storage containers, and wafers stored in cassettes are moved between semiconductor manufacturing equipment and equipment by pods.
반도체 생산장비 입구에는 반도체 생산장비 내측으로 반도체의 소재가 되는 웨이퍼 또는 웨이퍼가 장착되는 웨이퍼 카셋트를 수납하는 반도체용 웨이퍼 카셋트 수납장비가 부착되어지며, 상기 반도체 웨이퍼 카셋트 수납장비 위에는 웨이퍼를 삽치 보관한 웨이퍼 카셋트를 내장한 보관상자인 포드(Pod)가 장착되어 반도체 생산장비 내측으로 포드내에 삽치된 웨이퍼 장착 카셋트를 이동하거나 반대로 반도체 생산장비 내측으로부터 포드(Pod) 내부로 웨이퍼가 장착된 카셋트를 인출하여 적재하게 된다.At the entrance of the semiconductor production equipment, a semiconductor wafer cassette storage device for storing a wafer which is a material of a semiconductor or a wafer cassette on which a wafer is mounted is attached to the semiconductor production equipment. A wafer cassette for storing wafers is inserted on the semiconductor wafer cassette storage device. Pod, which is a storage box with built-in storage, is installed to move wafer-mounted cassettes inserted into the pod into the semiconductor production equipment, or, on the contrary, to draw and load a wafer-mounted cassette from inside the semiconductor production equipment into the pod. do.
본고안은 반도체 생산장비 내측으로 반도체 웨이퍼를 공급토록 하는 반도체 웨이퍼 수납장비와 그 위에 얹어지는 포드를 고정하기 위한 장치에 관한 것이다.The present invention relates to a semiconductor wafer receiving device for supplying a semiconductor wafer into a semiconductor production equipment and an apparatus for fixing a pod mounted thereon.
반도체 생산장비 내측으로 반도체 웨이퍼를 공급하려면 반도체 웨이퍼가 수장된 카셋트(cassette) 보관용기인 포드를 반도체 웨이퍼 카셋트 수납장비에 얹어 놓은 후, 반도체 웨이퍼 수납장비를 작동시키게 되면 웨이퍼 수납장비에 내장된 포드(Pod)감지 센서에 의해 유, 무 확인후, 반도체 웨이퍼 수납장비의 잠금장치가 작동하여 포드의 뚜껑을 고정함과 동시에 포드의 바닥은 웨이퍼 수납장비 중앙바닥인 인덱스 테이블에 고정되어지게 된다.To supply a semiconductor wafer into the semiconductor production equipment, a pod, a cassette storage container in which the semiconductor wafer is stored, is placed on the semiconductor wafer cassette storage device. When the semiconductor wafer storage device is operated, the pods embedded in the wafer storage device ( After the presence or absence of the Pod detection sensor, the locking device of the semiconductor wafer storage device is operated to fix the lid of the pod, and the bottom of the pod is fixed to the index table, which is the center bottom of the wafer storage device.
그 후, 포드 뚜껑을 고정한 인덱스 테두리가 상승하여 포드 뚜껑과 포드바닥을 분리하여 개방하게 된다. 포드 뚜껑이 개방되면 포드안에 웨이퍼를 삽치한 카셋트가 개방상태로 되며, 그 후 로버트 암(Robort Arm)에 의해 웨이퍼를 삽치한 카셋트가 반도체 생산장비로 이동되어지게 된다.Thereafter, the index rim that secures the pod lid is raised to separate and open the pod lid and the pod bottom. When the pod lid is opened, the cassette into which the wafer is inserted into the pod is opened, and then the cassette into which the wafer is inserted by the Robert Arm is transferred to the semiconductor production equipment.
본고안은 이와 같이 인덱스 테이블에 고정되는 포두뚜껑이 보다 확실하게 고정되도록 하는 잠금장치를 제공하고자 안출된 것으로, 인덱스 테이블 좌우양측에 서로 대칭으로 작동되는 누름장치를 가지며, 상기 누름장치를 구동시키는 동작장치와를 와이어에 의해 서로 연결토록 한 것으로, 하나의 동작장치로 좌우 2개의 누름장치가 작동되도록 한 것이다.The subject of the present invention is to provide a locking device for more securely fixing the lid lid fixed to the index table as described above, having a pressing device symmetrically operated on both sides of the index table, the operation of driving the pressing device The device and the wires are connected to each other by means of one wire, and the two left and right pressing devices are operated by one operation device.
특히, 상기 누름장치는 스프링에 의해 복귀되도록 하며, 당겨지는 와이어에 의해 누름작동이 행하여지도록 하며, 와이어를 잡아당기는 동작장치는 모터에 의해 회전되는 나사축에 좌우로 이동되는 이동구를 삽치하여 이동구에 좌우 누름장치를 작동시키는 좌우 와이어를 각각 부착토록 한 것이다.In particular, the pressing device is to be returned by the spring, the pressing operation is to be performed by the pulled wire, the operation device for pulling the wire is moved by inserting a moving tool moved left and right on the screw shaft rotated by the motor The left and right wires for activating the left and right pressing devices are attached to the sphere.
도1 - 반도체 웨이퍼 카셋트 수납장비의 사시도.1 is a perspective view of a semiconductor wafer cassette receiving device.
도2 - 웨이퍼 보관용기(Pod)와 인덱스 테이블 및 인덱스 테두리의 부분분해Figure 2-Partial Disassembly of Wafer Containers (Pods) and Index Tables and Index Borders
사시도.Perspective view.
도3 - 인덱스 테두리의 부분단면도.3-partial cross-sectional view of the index border.
도4 - 포드(Pod) 잠금장치의 부분 분해사시도.4-partial exploded perspective view of a pod lock.
도5 - 포드 잠금장치의 잠금상태시의 부분단면도.Fig. 5-A partial sectional view in the locked state of the pod lock.
도6 - 포드 잠금장치의 잠금해제시의 부분단면도.Fig. 6-A partial cross sectional view of the pod lock upon unlocking.
도7 - 포드 잠금장치의 작동기구의 부분사시도.7 is a partial perspective view of the actuator of the pod lock.
포드(31)를 삽치하여 포드의 뚜껑(31-1)을 인덱스 테두리(21)와 고정시키며, 포드의 바닥(31-2)은 인덱스 중앙부인 인덱스 테이블(22)과 고정토록 하는 반도체 웨이퍼 수납장비(1)에 있어서, 인덱스테두리(21) 위 좌우양측에 포드뚜껑(31-1)의 테두리를 고정하는 고정구(11)를 각각 가지며, 상기 고정구(11)는 좌우양측에 고정발(11-1)을 가지며, 고정구(11) 양측단은 지지볼트(12) 및 스프링(13)이 삽치된 삽치구(14)에 의해 지지되어지며, 고정구(11) 중앙의 브라켓트(11-2)에는 로울러(15)가 삽치되어지며, 상기 고정구 중앙의 브라켓트(11-2) 일측에는 상,하에 로울러(17)(18)를 삽치한 로울러지지대(16)가 고정되며, 상기 로울러지지대(16) 중앙에는 와이어(20)의 일측단부가 고정되어지며, 상기 와이어(20)는 고정구의 브라켓트(11-2)에 삽치된 로울러(15)를 감아 돌은 후 로울러지지대(16)의 상방로울러(17)와 하방로울러(18)를 감아 돌은 후, 로울러지지대(16) 앞에 부착한 가이드로울러(25)를 거쳐 와이어 동작장치(41)로 이어지는 한편, 상기 와이어 동작장치(41)는 좌우양측에 지지 브라켓(42-1)(42-2)을 가지며, 상기 좌우 지지브라켓(42-1)(42-2)의 가운데에는 나사축(43)의 양단이 유설되어지며, 나사축(43)의 일단은 모타(44) 축과 연결 고정되어지며, 상기 좌우 지지브라켓(42-1)(42-2)에는 상,하 가이드레일(45-1)(45-2)의 양단부가 고정되어지며, 상기 상,하 가이드레일(45-1)(45-2) 및 나사축(43)에는 와이어(20)의 타측단부를 삽치 고정한 이동구(46)가 유설되어지며, 상기, 이동구(46)에 고정된 상기 좌우와이어(20)는 상기 고정구(11)의 브라켓(11-2)의 로울러(15)를 거쳐 로울러지지대(16)의 중앙에 고정되도록 한 것이다.The pod 31 is inserted to fix the lid 31-1 of the pod to the index rim 21, and the bottom 31-2 of the pod is fixed to the index table 22, which is the center of the index. In (1), each of the fasteners 11 for fixing the rim of the pod lid 31-1 on the right and left sides on the index border 21, the fastener 11 is fixed to the left and right sides 11-1 ), Both ends of the fixture (11) are supported by the insertion bracket (14) in which the support bolt 12 and the spring (13) is inserted, and the roller (11-2) in the center of the fixture (11) 15) is inserted, and the roller support (16) in which the roller (17, 18) is inserted in the upper and lower roller bracket (11-2) one side of the center of the fixture is fixed, the wire in the center of the roller support (16) One side end of the 20 is fixed, and the wire 20 is wound after winding the roller 15 inserted into the bracket 11-2 of the fixture. After winding the upper roller 17 and the lower roller 18 of the base 16 and turning it, it is led to the wire operation device 41 via the guide roller 25 attached to the roller support base 16, and the wire operation. The device 41 has support brackets 42-1 and 42-2 on both the right and left sides, and both ends of the screw shaft 43 are disposed in the center of the left and right support brackets 42-1 and 42-2. One end of the screw shaft 43 is fixedly connected to the motor 44 shaft, and the upper and lower guide rails 45-1 and 45-2 are attached to the left and right support brackets 42-1 and 42-2. ) Both ends are fixed, and the upper and lower guide rails (45-1) (45-2) and the screw shaft (43) is provided with a movable opening (46) for inserting and fixing the other end of the wire (20) The left and right wires 20 fixed to the movable tool 46 are fixed to the center of the roller support 16 via the rollers 15 of the brackets 11-2 of the fixtures 11.
이와 같이 구성된 본고안은 다음과 같이 작동하게 된다.This proposal will be organized as follows.
모타(44)가 작동되어 모타축과 연결된 나사축(43)을 회전시키면 나사축(43)의 좌우양단은 좌우 지지브라켓(42-1)(42-2)에 삽치되어 공회전하게 되지만 회전되는 나사축(43)에 의해 이에 삽치된 이동구(46)는 나사축(43)의 회전에 의해 앞으로 또는 뒤로 이동되어지게 된다.When the motor 44 is operated to rotate the screw shaft 43 connected to the motor shaft, the left and right ends of the screw shaft 43 are inserted into the left and right support brackets 42-1 and 42-2 to be idle, but the screw is rotated. The moving tool 46 inserted therein by the shaft 43 is moved forward or backward by the rotation of the screw shaft 43.
또한, 이동구(46)는 아래,위에 상,하 가이드레일(45-1)(45-2)을 삽치하므로 이동구(46) 나사축(43)에 의해 회전되지 않고, 나사축(43) 및 가이드레일(45-1)(45-2)을 따라 좌우로 이동되어지게 된다. 이동구(46)에는 좌우와이어(20)의 타측단부가 고정되어지므로 이동구(46)의 좌,우 이동은 좌우와이어(20)를 당기거나 밀어주게 된다.In addition, since the movable tool 46 inserts the upper and lower guide rails 45-1 and 45-2 above and below, the movable tool 46 is not rotated by the screw shaft 43 of the movable tool 46, and the screw shaft 43 And it is moved left and right along the guide rail (45-1) (45-2). Since the other end of the left and right wire 20 is fixed to the movable tool 46, the left and right movement of the movable tool 46 is pulled or pushed by the left and right wires 20.
또한, 이동구(46)에 단부가 고정된 와이어(20)는 앞, 뒤의 로크볼트(46-1)에 의해 와이어(20)의 장력을 임의로 조절할 수 있게 된다. 상기에 있어 좌우와이어(20)이 맞닿는 일측 브라켓트(41-2) 하방에는 와이어(20)의 마찰력을 감쇄시키기 위한 가이드로울러(49)가 삽치되어지게 된다.In addition, the end of the wire 20 is fixed to the movable tool 46 is able to arbitrarily adjust the tension of the wire 20 by the front and rear lock bolt 46-1. The guide roller 49 for reducing the frictional force of the wire 20 is inserted below the one side bracket 41-2 in which the left and right wires 20 abut.
이와 같이 나사축(43)에 삽치된 이동구(46)의 이동에 의해 좌우로 당겨지거나 밀어주게 되는 좌우와이어(20)는 다수개의 가이드로울러(50)를 통해 로울러지지대(16) 상,하 로울러(17)(18)를 거쳐 고정구(11)의 브라켓(11-2)에 삽치된 로울러(15)를 감은 후, 상,하 로울러(17)(18)가 삽치된 로울러지지대(16)의 중앙에 와이어(20)의 일측단부가 고정되어지므로 와이어(20)가 당겨질 때 고정구(11)의 브라켓(11-2) 사이의 로울러(15)를 잡아당겨 고정구(11)를 작동시키게 되며, 좌우삽치구(14)의 볼트(12)를 축으로 회전하는 고정구(11)의 고정발(11-1)은 포드(31)의 뚜껑(31-1)을 가압하여 포드뚜껑(31-1)과 인덱스 테두리(21)를 고정토록 하는 것이다.The left and right wires 20 which are pulled or pushed to the left or right by the movement of the moving tool 46 inserted into the screw shaft 43 are roller supports 16 up and down through the plurality of guide rollers 50. After winding the roller 15 inserted into the bracket 11-2 of the fixture 11 via the 17 and 18, the center of the roller support 16 into which the upper and lower rollers 17 and 18 are inserted. Since one end of the wire 20 is fixed to the wire 20, the roller 15 is pulled between the brackets 11-2 of the fixture 11 when the wire 20 is pulled to operate the fixture 11. The fixing foot 11-1 of the fixture 11 rotating the bolt 12 of the jig 14 axially presses the lid 31-1 of the pod 31 to index the pod lid 31-1 and the index. The edge 21 is to be fixed.
반대로 모타를 역회전시키게 되면 좌우와이어(20)가 풀리게 되며, 고정구(11) 양측단에 삽치된 스프링(13)에 의해 고정구(11)는 반대로 회전되어 포드(31) 뚜껑(31-1)의 잠금상태를 해제하게 된다.On the contrary, when the motor is rotated reversely, the left and right wires 20 are released, and the fasteners 11 are reversed by the springs 13 inserted at both ends of the fasteners 11 so that the lids 31-1 of the pod 31-1 are reversed. The lock is released.
본고안은 반도체 웨이퍼 수납장치의 인덱스 테두리 내측에 설치되어 인덱스 위에 포드가 얹혀지게 될 때 포드를 인덱스 테두리에 정확히 고정시키거나 해제시킬 수 있도록 한 것으로, 하나의 모타(44) 및 이에 의해 동작하는 나사축(43)으로 좌우의 고정구(11)를 좌우 2개의 와이어(20)에 의해 동작토록 함으로 말미암아 정확한 동작을 얻을 수 있게 되며, 또한, 고정구(11)는 포드의 뚜껑을 정확하게 고정하여 인덱스 테두리가 상승되어질 때 포드 뚜껑이 동시에 상승되도록 하는 아주 유용한 고안인 것이다.This proposal is to be installed inside the index rim of the semiconductor wafer storage device so that when the pod is placed on the index, the pod can be accurately fixed or released to the index rim. By operating the left and right fasteners 11 by the two wires 20 on the left and right sides of the shaft 43, accurate operation can be obtained. Also, the fasteners 11 accurately fix the lids of the pods so that the index rims It is a very useful design that allows the pod lid to be raised at the same time as it is raised.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019970043617U KR200187489Y1 (en) | 1997-12-30 | 1997-12-30 | A hold/unhold system for the wafer cassette box of sealed type in the wafer cassette load/unload |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019970043617U KR200187489Y1 (en) | 1997-12-30 | 1997-12-30 | A hold/unhold system for the wafer cassette box of sealed type in the wafer cassette load/unload |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19990030920U true KR19990030920U (en) | 1999-07-26 |
| KR200187489Y1 KR200187489Y1 (en) | 2000-07-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019970043617U KR200187489Y1 (en) | 1997-12-30 | 1997-12-30 | A hold/unhold system for the wafer cassette box of sealed type in the wafer cassette load/unload |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200187489Y1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100368101B1 (en) * | 1999-08-11 | 2003-01-15 | 티디케이가부시기가이샤 | Lid latch mechanism for clean box |
| KR100625280B1 (en) * | 2000-08-28 | 2006-09-20 | 주식회사 신성이엔지 | Foup loading apparatus for foup opener |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100734654B1 (en) | 2005-12-28 | 2007-07-02 | 동부일렉트로닉스 주식회사 | Apparatus for closing and opening a pod cover of a standard mechanical interface system |
-
1997
- 1997-12-30 KR KR2019970043617U patent/KR200187489Y1/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100368101B1 (en) * | 1999-08-11 | 2003-01-15 | 티디케이가부시기가이샤 | Lid latch mechanism for clean box |
| KR100625280B1 (en) * | 2000-08-28 | 2006-09-20 | 주식회사 신성이엔지 | Foup loading apparatus for foup opener |
Also Published As
| Publication number | Publication date |
|---|---|
| KR200187489Y1 (en) | 2000-07-15 |
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