KR19990029514U - In-line double-sided exposure device - Google Patents

Abstract

An inline double-sided exposure apparatus is disclosed which enables both surfaces of a material to be exposed simultaneously.

The inline double-sided exposure apparatus includes a supply reel in which a thin sheet of material is wound; Photosensitive film attachment means for continuously attaching the photosensitive film to each of both surfaces of the material supplied from the supply reel; Timing adjusting means for adjusting the supply timing by adjusting the tension of the material having the photosensitive film passing through the photosensitive film attaching means; A second profile, an ultraviolet lamp disposed at the upper and lower portions of the second profile, respectively, a blender positioned between the material and the two ultraviolet lamps so as to be opened and closed, and transmitting or blocking light emitted from the two ultraviolet lamps; Exposure means including a pair of masks in close contact with both surfaces of the mask and having a predetermined pattern, and mask moving means for moving the mask; Conveying means for conveying the material whose exposure has been completed by the exposure means; Characterized in that it comprises a; receptacle winding the material passed through the conveying means.

Description

In-line double-sided exposure device

The present invention relates to a double-sided exposure apparatus that is capable of simultaneously exposing both sides of the material, and more particularly, to an in-line double-sided exposure apparatus that can perform the photosensitive dry film attaching and exposing process by in-line work. It is about.

In general, a semiconductor lead frame is a core component of a semiconductor package together with a semiconductor chip, and serves as a lead connecting the inside and the outside of the semiconductor package and a support for supporting the semiconductor chip.

The semiconductor lead frame is usually manufactured by a stamping process or an etching fixation process. The stamping process is a manufacturing method for forming a product by punching a thin sheet of material sequentially transferred using a press mold apparatus into a predetermined shape. . On the other hand, the etching process is a manufacturing method for forming a product by a chemical method to corrode a desired portion using a chemical.

Recently, the semiconductor lead frame has been required to have a small size and a fine pitch according to the trend of high integration and thinning of semiconductor chips. Since such products require precision for formation of fine pitch, etc., they are mainly manufactured by the above-described etching fixing. According to one example of the etching process, a photoresist is coated on the surface of the thin plate material, an exposure process of irradiating light after fixing a mask having a predetermined pattern thereon, and a portion or exposure exposed by chemicals By removing the portion that is not present, a lead frame having a predetermined pattern is manufactured.

When the lead frame is manufactured by the above-mentioned etching fixation, when the mask is placed on one surface of the raw material and then exposed and etched, the pattern precision on the other surface is lowered, which is a barrier to fine pitch. In view of this point, a process of simultaneously exposing both surfaces of a material has been disclosed.

1 is a schematic cross-sectional view showing an exposure apparatus for manufacturing a conventional lead frame. Referring to this, the conventional exposure apparatus has a case 10, a guide table (not shown) for guiding the transfer of the raw material 1, and an ultraviolet lamp installed symmetrically on the upper and lower portions of the case 10, respectively. (20) 30, a blender positioned between the material (1) and the two ultraviolet lamps (20, 30), respectively, to transmit or block the light emitted from the ultraviolet lamps (20, 30) ( a pair of masks (41) (43) and a pair of masks (41) (43), which are in close contact with both sides of the blinder (21) (31), each of the material (1), and have a predetermined pattern, respectively. It consists of a mask movable means 40 for flowing it.

The material 1 is wound around each of a pair of reels (not shown) positioned outside the case 10, and is supplied into the case 10 continuously by a predetermined pitch. On both sides of the material supplied into the case 10, a dry film is applied to be exposed to light during exposure.

Each of the pair of masks 41 and 43 has a symmetrical pitch pattern, and when the material 10 is supplied, the pitch patterns positioned on each of both surfaces thereof must match each other. To this end, the mask movable means 40 contacts the two masks 41 and 43 to both surfaces of the material 10 and then closes them by vacuum adsorption. Subsequently, imaging is performed using a camera, and the mask movable means 10 is finely moved to match the two masks 41 and 43 while monitoring the same. Thereafter, the ultraviolet lamps 20 and 30 are turned on and the bladder 21 and 31 are opened to emit light from the ultraviolet lamps 20 and 30 to the masks 41 and 43. . The dry film is exposed to the pattern of the masks 41 and 43. Thereafter, the bladders 21 and 31 are closed, and the ultraviolet lamps 20 and 30 blink. The mask moving means 40 deviates the masks 41 and 43 from the material 1, and the material 1 transfers a predetermined pitch through the guide post (not shown). Leadframes are fabricated throughout.

As described above, the conventional exposure apparatus has an advantage that the lead frame can be manufactured in a continuous process, that is, an in-line process. However, the mask moving apparatus is used to align the mask so that every exposure process is performed. Since the position of the mask needs to be monitored and aligned, the manufacturing process of the lead frame takes a long time.

Therefore, the present invention was devised to overcome the above-mentioned disadvantages, and the in-line type in which the mask is aligned in advance and the two masks can be hard-contacted by the pneumatic material to greatly shorten the exposure time. The object is to provide a double-sided exposure apparatus.

1 is a schematic cross-sectional view showing an exposure apparatus for manufacturing a conventional lead frame.

Figure 2 is a schematic cross-sectional view showing an inline double-sided exposure apparatus according to an embodiment of the present invention.

Figure 3 is a schematic cross-sectional view showing a photosensitive film attachment means according to the present invention.

4 is a plan view of FIG.

Figure 5 is a schematic exploded perspective view showing a mask movable means according to the present invention.

Figure 6 is a schematic cross-sectional view showing a mask movable means according to the present invention.

<Explanation of symbols for the main parts of the drawings>

1 ... Lead frame material 3 ... Photosensitive film 3 ... Tape

50.Supply reel 60 ... Acceptor reel 100

110 First profile 120 Preheating means

121,122 ... 1st preheat roller member 123,124 ... 2nd preheat roller member

130 ... Pressure roller member 131,132 ... First compression roller member

133,134 ... 2nd compression roller member 140,141 ... supply roller member

145,146 Winding member 150 Driving force 155,156,157 Power transmission

160 Timing adjustment means 161 Arm 163 Rotating member

165 Elastic members 200 Exposure means 210 Second profile

220,230 UV lamp 221,223 BIND 301 1st fixing member

310 ... first opening 320 ... first mask 401 ... second fixing member

410.2nd opening 420.Body 430.Flange

440 ... 2nd mask 450 ... elevation member 460 ... installation groove

500 Lifting means 510 Guide post 511 Guide member

513 Guide groove 520 Pneumatic cylinder 521 Cylinder body

523 ... rod 600 ... position adjusting means

610 Positioning screw 611 Rotating part 613 Moving part

613,621 Roller 620 ... Elastic bias member 700 ... Transport means

710 ... 3rd profile 711 ... Guide rail 720 ... 1st stopper

730 ... 2nd stopper 740 ... gripper

Inline type double-sided exposure apparatus according to the present invention in order to achieve the above object, and a feed reel wound of a thin material; A first profile having an inlet and an outlet through which the material can enter and exit, a preheating means located in the first profile, a compression roller member formed to face the top and bottom of the material, and a photoresist film attached thereto, and a compression roller member A supply roller member for supplying a photosensitive film to each one, a driving source for driving the compression roller member and the supply roller member, and a power transmission unit for transmitting power of the driving source, each continuously on both sides of the material supplied from the supply reel. Photosensitive film attachment means for attaching a photosensitive film; An arm hinged to the first profile, a rotating member rotatably installed at an end of the arm and in contact with the material, and an elastic member installed around the hinge of the arm to provide elastic force in one direction of the arm; And timing adjustment means for adjusting the supply timing by adjusting the tension of the material with the photosensitive film passing through the photosensitive film attachment means. A brine for transmitting or blocking the light emitted from the two UV lamps, respectively located in the second profile, the upper and lower UV lamps installed in the upper and lower portions of the second profile, and open and close between the material and the two UV lamps. Furthermore, exposure means including a pair of masks which are in close contact with both surfaces of the material and have a predetermined pattern, and mask moving means for moving the mask; Transfer means for transporting the material whose exposure has been completed by the exposure means; It characterized in that it comprises a; receptacle winding the material passed through the conveying means.

Hereinafter, an inline double-sided exposure apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic view showing an inline double-sided exposure apparatus according to an embodiment of the present invention.

As shown, the exposure target material 1, for example, the lead frame material, is continuously transferred while being wound around the supply reel 50 and the accommodation reel 60, and the attachment and exposure of the photosensitive film 3 are performed. To this end, the in-line double-sided exposure apparatus is a photosensitive film for sequentially attaching the photosensitive film 3 to each of both surfaces of the material (1) supplied from the supply reel 50 in sequence between the supply reel 50 and the receiving reel (60) The timing adjusting means 160 for adjusting the supply timing by adjusting the tension of the attachment means 100, the material 1 with the photosensitive film passing through the photosensitive film attachment means 100, and the photosensitive film 3 is coated After placing a mask of a predetermined pattern on each side of the exposure means 200 for irradiating ultraviolet light and exposed, and the conveying means 700 for conveying the exposed material 1 through the exposure means 200 is completed. It is configured to include.

As described above, the constructed in-line double-sided exposure apparatus proceeds continuously when passing through the supply reel 50 and the photosensitive film attachment means 100 in the flow of the material (1). On the other hand, in the exposure means 200, the exposure process is performed in such a way that the exposure is performed on both surfaces of the material 1 by stopping and proceeding again, so that the material 1 is intermittently transferred. That is, in the exposure process, the material 1 in the exposure means 200 stops, and the supply reel 50 is continuously supplied. At this time, the timing adjusting means 160 prevents the material 1 supplied from being loosened. The transfer means 700 is operated in accordance with the exposure timing of the exposure means 200, and pulls the material (1) when the material (1) moves. The accommodating reel 60 receives a force in a winding direction by a driving motor, and stops by a clutch (not shown) when the transfer of the material 1 is stopped by the exposure means 200 and the conveying means 700. do.

Hereinafter, the structures and operations of the exposure film attaching means 100, the timing adjusting means 160, the exposure means 200, and the transfer means 700 will be described in detail with reference to the accompanying drawings.

3 is a schematic cross-sectional view showing the exposure film attaching means 100 and the timing adjusting means 160 according to an embodiment of the present invention, Figure 4 is a plan view of FIG.

As shown, the exposure film attaching means 100 includes a first profile 110 having an inlet 111 and an outlet 112 through which the material 1 can enter and exit, and within the first profile 110. A supply roller member for supplying the photosensitive film 3 to each of the preheating means 120 positioned, the pair of pressing roller members 130 formed in pairs so as to face the upper and lower sides of the raw material 1, and the pressing roller members 130. 140 and 141, winding roller members 142 and 143 which wind the tape 4 other than the photosensitive film 3 wound around the supply roller members 140 and 141, and the compression roller member 130. Guide roller members 145 and 146 for guiding the transfer of the photosensitive film 1 having passed therethrough, the preheating means 120, the compression roller member 130, and the guide roller members 145 and 146. ) Is configured to include a driving source 150 for driving) and power transmission units 155, 156, and 157 for transmitting power of the driving source 150.

The preheating means 120, as shown, a pair of rotatably installed in the first profile 110 so as to thermally compress the upper and lower surfaces of the material (1), respectively, to advance in the conveying direction. The first preheat roller members 121 and 122 and a pair of second preheat roller members 123 and 124 installed in parallel therewith are configured. On the other hand, the preheating means 120 is not shown, but may comprise a conventional heater or a blower connected to the heater.

The pressing roller member 130 is a first pressing roller member 131, 132 and the first pair of upper and lower pairs so as to thermally compress the upper and lower surfaces of the material 1 to proceed in the conveying direction, and the first It is positioned to be adjacent to the compression roller members 131 and 132 and is composed of a second compression roller member 133 and 134 made up of a pair. The roller member 130 is provided by the driving unit 150, is rotated by the rotational force transmitted through the power transmission unit 155, and the thermocompression bonding on each of the upper and lower surfaces of the material (1) passing therebetween The photosensitive film 3 is attached by this. Each of the pair of supply roller members 140 and 141 is a member for providing the photosensitive film 3 to the first compression roller members 131 and 132, and the photosensitive film is wound with the tape 4 attached to an outer surface thereof. have. That is, the photosensitive film 3 provided from the supply roller members 140 and 141 is transferred to the first compression roller members 131 and 132, and the tape 4 is wound around the winding roller member 142. 143). The guide roller members 145 and 146 may be formed of a material 1 to which the photosensitive film 3 is attached between the second compression roller members 133 and 134 and the outlet 112 of the first profile 110. Located on the path through which it passes, guides the transfer of the material (1). As described above, the photosensitive film attachment means 100 according to the present invention is configured to attach the photosensitive film 3 to both sides by preheating and thermocompressing each of the upper and lower surfaces of the material 1 continuously supplied from the supply reel 50. Do it.

The timing adjusting means 160 is installed around the outlet 112 of the first profile 110 and elastically pressurizes the material 1 through the outlet 112 to adjust the tension. That is, the timing adjusting means 160 is an arm 161 hinged to the first profile 110, a rotating member rotatably installed at the end of the arm 161 and in contact with the material (1) 163 and an elastic member 165 installed around the hinge of the arm 161 to provide an elastic force in one direction of the arm. The elastic member 165 is a conventional member having a restoring force in one direction, and may be implemented as a coil spring or the like.

Therefore, the timing adjusting means 160 adjusts the degree of loosening of the material 1 in accordance with the rotation of the arm 161, thereby continuously supplying the material 1 from the supply reel 50, and will be described later. The intermittent operation may be enabled in the exposure means 200.

As shown in FIG. 2, the exposure means 200 is installed between the timing adjusting means 160 and the transfer means 700, and irradiates light with the mask adhered to both surfaces of the material 1. Exposure is performed. To this end, the exposure means 200 has a second profile 210 having an inlet 211 and an outlet 212 through which the material 1 can enter and exit, and the upper and lower portions of the inside of the second profile 210. Light irradiated from the ultraviolet lamps 220 and 230 and positioned between the material 1 and the two ultraviolet lamps 220 and 230, respectively, symmetrically disposed on the substrate. Binders 221 and 231 for transmitting or blocking the light, a pair of masks 320 and 440 closely contacted to both surfaces of the material 1, and having a predetermined pattern, and the pair of masks 320. ) 440 is mounted, respectively, and comprises a mask movable means 300 for flowing it. Here, since the ultraviolet lamp 220, 230, the blender 221, 231 and the mask 320, 440 is well known, detailed description thereof will be omitted.

The above-mentioned double-sided exposure mask movable means 300 will be described with reference to FIGS. 5 and 6. 5 is a schematic exploded perspective view of the mask movable means, and FIG. 6 is a cross-sectional view of FIG. 5.

As shown, the mask movable means 300 for double-sided exposure includes an installation groove in which the first fixing member 301, the second fixing member 401, and the second fixing member 401 are movably fitted. A lifting member 450 having a lifting force of 460 and installed on the first fixing member 301, lifting means 500 for lifting up and down the lifting member 450, and being positioned on the lifting member 450. It is configured to include a position adjusting means 600 for adjusting the position of the second fixing member 401.

The first fixing member 301 is to close the first mask 320 to the bottom surface of the material 1 supplied with the photoresist applied to both surfaces, and the first opening 310 through which exposure light can be transmitted. ) And a first mask 320 is coupled to the first opening 310. The second fixing member 401 is for bringing the second mask 440 into close contact with the upper surface of the material 1 and has a second opening 410 through which exposure light can be transmitted. The second mask 440 is coupled. The two masks 320 and 440 have patterns corresponding to each other, and their positions are aligned by flowing the second fixing member 401 left and right by the position adjusting means 600. The second fixing member 401 is coupled to the lower surface of the second mask 440, the body portion 420 that can be freely fitted in the installation groove 460, and the installation groove 460 Located in and includes a flange portion 430 protruding to contact the positioning means 600.

The elevating means 500 includes a guide member 511 having a plurality of guide posts 510, a guide groove 513 that is coupled to the elevating member 450 and to which the guide post 510 is slidably fitted. In addition, the lifting member 450 is composed of a pneumatic cylinder 520 for driving up and down. One end of the guide post 510 is fastened to the first fixing member 301, and is disposed perpendicular to the first fixing member 301. The guide member 511 supports the lifting member 450 so as not to flow left and right, and the guide groove 513 is fitted into the guide post 510 to slide in the longitudinal direction of the guide post 510. . The guide member 511 is preferably formed integrally with the lifting member 450. In addition, the lifting member 450 is provided separately, and may be coupled to the lifting member 450 by a conventional fastening means. The pneumatic cylinder 520 is installed to the cylinder body 521 fastened to the elevating member 450, the cylinder body 521 is capable of linear reciprocating movement, the end of the pneumatic cylinder 520 to the first fixing member 301 Consists of a rod (523) fastened to, and elevating the elevating member 450 relative to the first fixing member (301). Here, the pneumatic cylinder 520 may be changed in the fastening position of the cylinder body 521 and the rod 523.

The position adjusting means 600 moves the second fixing member 401 in a horizontal direction to align the second mask 440 with the first mask 320. To this end, the positioning means 600 is in contact with the outer surface of the flange portion 430 of the second fixing member 401 a plurality of positioning screws 610 for pushing the second fixing member 401 And an elastic bias member 620 contacting the other side of the flange portion 430 which is in contact with each of the positioning screws 610 to elastically press the second fixing member 401. . The positioning screw 610 is a straight line while being in contact with one side of the second fixing member 401 by the rotation of the rotating part 611 and the rotating part 611 coupled to the elevating member 450. It consists of a movable part 613 to be conveyed.

The elastic bias member 620 is in contact with the flange 430 to push the second fixing member 401 in one direction, paired with the positioning screw 610 of the second mask 440 Adjust the position.

Rollers 615 and 621 rotatably installed may be further provided at ends of the positioning screw 610 and the second fixing member 401 of the elastic bias member 620. The rollers 615 and 621 are rotated when a force in a tangential direction of the contact portion is applied at the contact portion with the second fixing member 401 to rotate the second fixing member 401 and the position adjusting screw. 610 and damage to the elastic bias member 620 is prevented.

Hereinafter, the operation of the mask movable apparatus for double-sided exposure according to the present invention will be described.

The mask movable device of the present invention measures the position of the first mask 320 and the second mask 440 by using a separate microsetting device before exposing the above-described material 1 to the above position. The second mask 440 is aligned using the adjusting means 600, that is, the position adjusting screw 610.

Thereafter, the pneumatic cylinder 520 is operated to bring the two masks 320 and 440 into close contact with both surfaces of the supplied lead frame material 1. Thereafter, the lead frame material 1 is exposed by a post process, and the pneumatic cylinder 520 operates in a direction away from the second mask 440. Such a part of the material 1 continuously supplied by the operation is exposed, and after the material 1 is transferred by a predetermined pitch, the alignment operation is not performed again. The masks 320 and 440 are brought into close contact with the material 1 by the operation of 450. This is based on the lifting member 450 being guided and lifted by the guide post 510 to maintain alignment between the initial two masks 320 and 440.

As shown in FIG. 2, the transfer means 700 is positioned between the exposure means 200 and the accommodation reel 60 to transfer the material 1. To this end, the transfer means 700 includes a third profile 710, first and second stoppers 720 and 730 spaced apart from each other on the third profile 710, and the first stopper 720. ) And a gripper 740 installed between the second stopper 730. The gripper 740 is installed on the guide rail 711 provided on the third profile 710 to be slidable. That is, the gripper body 741 is transferred along the guide rail 711 by a normal driving source (not shown), and the arm 743 installed on the gripper body 741 to hold the material 1. ). The arm 743 is connected to the cylinder rod 745 fixed to the gripper body 741 to selectively hold the material 1.

The first and second stoppers 720 and 730 have the same structure, and selectively hold the material 1 according to the operation of the gripper 740. To this end, the two stoppers 720 and 730 are composed of stopper bodies 723 and 733 coupled to the ends of the rods 721 and 731 of the cylinder installed on the third profile 710.

As described above, the operation of the configured conveying means 700 will be described. When the exposure means 200 is exposed to both surfaces of the material 1, the stopper bodies 723 and 733 fix the material 1 and the material 1 by the accommodating reel 60. To prevent stress. Then, when the exposure is completed to a portion of the material 1, the stopper body 723 (733) is raised to allow the material 1 to move freely, and the gripper 740 is the material (1) While transporting the material (1) while moving along the guide rail (711). Thereafter, the stopper bodies 723 and 733 are lowered to fix the material 1, and the gripper 740 is positioned at its original position, that is, toward the exposure means 200. While repeating the above operation, the raw material 1 is intermittently transferred to the housing reel 60.

As described above, in-line double-sided exposure apparatus according to the present invention provided by the mask fixing means, after performing line alignment, and repeatedly performing the two mask 320, 440 contact and release operation, the exposure time significantly Can be reduced. In addition, by continuously performing a photosensitive film attaching process and an exposure process on both surfaces of the material 1 wound on the supply reel 50, the working speed can be greatly improved.

Claims (9)

A feed reel in which a thin material is wound; Photosensitive film attachment means for continuously attaching the photosensitive film to each of both surfaces of the material supplied from the supply reel; Timing adjusting means for adjusting the supply timing by adjusting the tension of the material having the photosensitive film passing through the photosensitive film attaching means; A brine for transmitting or blocking the light emitted from the two UV lamps, respectively located in the second profile, the upper and lower UV lamps installed in the upper and lower portions of the second profile, and open and close between the material and the two UV lamps. Furthermore, exposure means including a pair of masks which are in close contact with both surfaces of the material and have a predetermined pattern, and mask moving means for moving the mask; Transfer means for transporting the material whose exposure has been completed by the exposure means; In-line double-sided exposure apparatus, characterized in that it comprises a; receptacle winding the material passed through the conveying means. The method of claim 1, wherein the photosensitive film attaching means, A first profile having an inlet and an outlet through which the material can enter and exit, a preheating means located in the first profile, a compression roller member formed to face the top and bottom of the material, and a photoresist film attached thereto, and a compression roller member And a supply roller member for supplying a photosensitive film to each one, a driving source for driving the compression roller member and the supply roller member, and a power transmission portion for transmitting power of the driving source. 3. The preheating means according to claim 2, wherein the preheating means includes at least one pair of preheating roller members rotatably installed on the first profile so as to thermally compress the upper and lower surfaces of the material and advance in the conveying direction thereof. In-line double-sided exposure apparatus. The method of claim 1, wherein the timing adjusting means, An arm hinged to the first profile, a rotating member rotatably installed at an end of the arm and in contact with the material, and an elastic member installed around the hinge of the arm to provide elastic force in one direction of the arm; In-line double-sided exposure apparatus comprising a. The method of claim 1, wherein the mask movable means, A first fixing member mounted with a mask and having a first opening through which exposure light can be transmitted; A second fixing member mounted with another mask and having a second opening through which exposure light can be transmitted; An elevating member having an installation groove in which the second fixing member can be inserted with ease, and being installed to be liftable on the first fixing member; Elevating means for elevating the elevating member with respect to the first fixing member; A position adjusting means installed on the elevating member to adjust a position of the second fixing member. And the mask is brought into close contact with both surfaces of the material by the lifting and lowering of the elevating member while the pair of masks are aligned by the position adjusting means. The method of claim 5, wherein the lifting means comprises: a plurality of guide posts, one end of which is fixed on the first fixing member; A guide member installed on the elevating member and having a guide groove in which the guide post is slidably fitted; And at least one pneumatic cylinder installed between the elevating member and the first fixing member to elevate the elevating member. According to claim 5, The position adjusting means is a plurality of position adjustment including a body portion coupled to the elevating member and the end portion linearly transferred by the rotation of the body portion while being in contact with one side of the second fixing member With screws; And an elastic biasing member which is in contact with another side surface of the second fixing member which is in contact with each of the positioning screws, and elastically pressurizes the second fixing member. The inline double-sided exposure apparatus according to claim 7, further comprising a roller rotatably installed at a portion of each of the positioning screw and the elastic bias member that is in contact with the second fixing member. The method of claim 1, wherein the transfer means, A third profile located between the exposure means and the accommodation reel; First and second stoppers installed on the third profile to be spaced apart from each other and selectively fixing the material; A guide rail installed on the third profile between the first and second stoppers; A gripper slidably installed on the guide rail, the gripper configured to move the material from the first stopper to the second stopper; In-line double-sided exposure apparatus comprising a; drive source for driving the gripper.