KR19990028830A - 비 접촉검사용 레이저 유도 금속성 플라즈마 - Google Patents

비 접촉검사용 레이저 유도 금속성 플라즈마 Download PDF

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Publication number
KR19990028830A
KR19990028830A KR1019980700131A KR19980700131A KR19990028830A KR 19990028830 A KR19990028830 A KR 19990028830A KR 1019980700131 A KR1019980700131 A KR 1019980700131A KR 19980700131 A KR19980700131 A KR 19980700131A KR 19990028830 A KR19990028830 A KR 19990028830A
Authority
KR
South Korea
Prior art keywords
conductor
laser
probe
plasma
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019980700131A
Other languages
English (en)
Korean (ko)
Inventor
데이비드 바니트
모세 벤 슈로모
Original Assignee
데이비드 바니트
엑사이트 엘렉트로 옵티칼 시스템즈 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 데이비드 바니트, 엑사이트 엘렉트로 옵티칼 시스템즈 리미티드 filed Critical 데이비드 바니트
Publication of KR19990028830A publication Critical patent/KR19990028830A/ko
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1019980700131A 1995-07-12 1996-07-11 비 접촉검사용 레이저 유도 금속성 플라즈마 Ceased KR19990028830A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/501,685 US5587664A (en) 1995-07-12 1995-07-12 Laser-induced metallic plasma for non-contact inspection
PCT/US1996/011698 WO1997003365A2 (en) 1995-07-12 1996-07-11 Laser-induced metallic plasma for con-contact inspection

Publications (1)

Publication Number Publication Date
KR19990028830A true KR19990028830A (ko) 1999-04-15

Family

ID=23994608

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980700131A Ceased KR19990028830A (ko) 1995-07-12 1996-07-11 비 접촉검사용 레이저 유도 금속성 플라즈마

Country Status (5)

Country Link
US (1) US5587664A (enExample)
EP (1) EP0882237A2 (enExample)
KR (1) KR19990028830A (enExample)
AU (1) AU6493096A (enExample)
WO (1) WO1997003365A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07140209A (ja) * 1993-09-20 1995-06-02 Fujitsu Ltd 回路配線基板の検査装置およびその検査方法
IL122654A0 (en) * 1997-12-18 1998-08-16 Exsight Electro Optical System Method and apparatus for guiding electric current
US6020747A (en) * 1998-01-26 2000-02-01 Bahns; John T. Electrical contact probe
WO1999056137A1 (en) * 1998-04-27 1999-11-04 Exsight Electro-Optical Systems Ltd. Method and apparatus for testing interconnect networks
WO1999056136A1 (en) * 1998-04-27 1999-11-04 Exsight Electro-Optical Systems Ltd. Method and apparatus for testing interconnect networks using guided electric currents
US6268719B1 (en) * 1998-09-23 2001-07-31 Delaware Capital Formation, Inc. Printed circuit board test apparatus
US6788078B2 (en) 2001-11-16 2004-09-07 Delaware Capital Formation, Inc. Apparatus for scan testing printed circuit boards
EP1692530A4 (en) * 2003-11-12 2011-01-05 Ibm IONIZATION TEST FOR ELECTRICAL VERIFICATION
EP2732299A4 (en) 2011-07-15 2015-03-25 Orbotech Ltd ELECTRICAL TESTING OF ELECTRONIC DEVICES BY MEANS OF ELECTRON BEAM-INDUCED PLASMA STONES
US10488852B2 (en) * 2015-03-12 2019-11-26 Limacorporate S.P.A. Quality control method for regulating the operation of an electromechanical apparatus, for example an EBM apparatus, in order to obtain certified processed products

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4246793A (en) * 1979-02-08 1981-01-27 Battelle Development Corporation Nondestructive testing
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4507605A (en) * 1982-05-17 1985-03-26 Testamatic, Incorporated Method and apparatus for electrical and optical inspection and testing of unpopulated printed circuit boards and other like items
DE3231598A1 (de) * 1982-08-25 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur elektrischen pruefung von mikroverdrahtungen
US4985681A (en) * 1985-01-18 1991-01-15 Siemens Aktiengesellschaft Particle beam measuring method for non-contact testing of interconnect networks
DE3671106D1 (de) * 1985-09-04 1990-06-13 Siemens Ag Vorrichtung fuer die elektrische funktionspruefung von verdrahtungsfeldern, insbesondere von leiterplatten.
ATE52620T1 (de) * 1985-09-04 1990-05-15 Siemens Ag Vorrichtung fuer die elektrische funktionspruefung von verdrahtungsfeldern, insbesondere von leiterplatten.
US4845425A (en) * 1985-09-23 1989-07-04 International Business Machines Corporation Full chip integrated circuit tester
US4703260A (en) * 1985-09-23 1987-10-27 International Business Machines Corporation Full chip integrated circuit tester
US4771230A (en) * 1986-10-02 1988-09-13 Testamatic Corporation Electro-luminescent method and testing system for unpopulated printed circuit boards, ceramic substrates, and the like having both electrical and electro-optical read-out
DE3683053D1 (de) * 1986-10-23 1992-01-30 Ibm Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen.
EP0264481B1 (en) * 1986-10-23 1992-05-13 International Business Machines Corporation Testing method for integrated circuit packaging boards using a laser in vacuum
US4843330A (en) * 1986-10-30 1989-06-27 International Business Machines Corporation Electron beam contactless testing system with grid bias switching
EP0285798A3 (de) * 1987-03-31 1990-03-07 Siemens Aktiengesellschaft Vorrichtung für die elektrische Funktionsprüfung von Verdrahtungsfeldern, insbesondere von Leiterplatten
ATE104059T1 (de) * 1987-12-21 1994-04-15 Siemens Ag Ansteuereinrichtung fuer die vorrichtung zur elektrischen funktionspruefung von verdrahtungsfeldern.
US5032788A (en) * 1989-06-26 1991-07-16 Digital Equipment Corp. Test cell for non-contact opens/shorts testing of electrical circuits
US4970461A (en) * 1989-06-26 1990-11-13 Lepage Andrew J Method and apparatus for non-contact opens/shorts testing of electrical circuits
US5017863A (en) * 1989-10-20 1991-05-21 Digital Equipment Corporation Electro-emissive laser stimulated test
US5179279A (en) * 1991-01-25 1993-01-12 Rensselaer Polytechnic Institute Non-contact electrical pathway
US5202623A (en) * 1992-02-26 1993-04-13 Digital Equipment Corporation Laser-activated plasma chamber for non-contact testing
JPH07140209A (ja) * 1993-09-20 1995-06-02 Fujitsu Ltd 回路配線基板の検査装置およびその検査方法

Also Published As

Publication number Publication date
EP0882237A4 (enExample) 1998-12-09
AU6493096A (en) 1997-02-10
EP0882237A2 (en) 1998-12-09
WO1997003365A2 (en) 1997-01-30
US5587664A (en) 1996-12-24
WO1997003365A3 (en) 1997-04-10

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Date Code Title Description
PA0105 International application

Patent event date: 19980109

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20010710

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20030329

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20030624

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20030329

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I