KR19990026637A - Transverse electric field liquid crystal display device - Google Patents
Transverse electric field liquid crystal display device Download PDFInfo
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- KR19990026637A KR19990026637A KR1019970048845A KR19970048845A KR19990026637A KR 19990026637 A KR19990026637 A KR 19990026637A KR 1019970048845 A KR1019970048845 A KR 1019970048845A KR 19970048845 A KR19970048845 A KR 19970048845A KR 19990026637 A KR19990026637 A KR 19990026637A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134363—Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/40—Arrangements for improving the aperture ratio
Abstract
본 발명의 횡전계방식 액정표시장치는 보호막이 벤조사이클로부텐(BenzoCycloButene)으로 이루어져 있다. 데이터전극은 게이트절연막 위에 형성되어 있으며, 공통전극은 보호막 위에 데이터배선과 일부분이 오버랩되도록 형성되어 데이터배선에 기인하는 전계를 차단함과 동시에 데이터배선 영역으로 빛이 새는 것을 방지한다. 박막트랜지스터는 게이트배선 위에 형성되어, 게이트배선이 박막트랜지스터의 게이트전극 역할을 한다.In the transverse electric field liquid crystal display device of the present invention, the protective film is made of BenzoCycloButene. The data electrode is formed on the gate insulating layer, and the common electrode is formed to overlap a portion of the data line on the passivation layer to block an electric field due to the data line and to prevent light leakage into the data line area. The thin film transistor is formed on the gate wiring so that the gate wiring serves as a gate electrode of the thin film transistor.
Description
본 발명은 액정표시장치에 관한 것으로, 특히 개구율이 향상되고 제조비용이 절감된 횡전계방식 액정표시장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device, and more particularly, to a transverse electric field type liquid crystal display device having improved aperture ratio and reduced manufacturing cost.
최근, 휴대용 텔레비젼이나 노트북 컴퓨터에 많이 사용되는 박막트랜지스터 액정표시장치(TFT LCD)에서 대면적화가 강력하게 요구되고 있지만, 상기한 TFT LCD에는 시야각에 따라 콘트라스트비(contrast ratio)가 변하는 문제가 있었다. 이러한 문제를 해결하기 위해, 광보상판이 장착된 트위스트네마틱(twisted nematic) 액정표시장치, 멀티도메인(multi-domain) 액정표시장치 등과 같은 여러가지 액정표시장치가 제안되고 있지만, 이러한 여러가지 액정표시장치로는 시야각에 따라 콘트라스트비가 저하되고 색상이 변하는 문제를 해결하기 힘든 실정이다.Recently, a large area has been strongly demanded in thin film transistor liquid crystal displays (TFT LCDs), which are widely used in portable televisions and notebook computers. However, the above-described TFT LCDs have a problem in that contrast ratio is changed depending on the viewing angle. In order to solve this problem, various liquid crystal display devices such as a twisted nematic liquid crystal display device equipped with an optical compensation plate and a multi-domain liquid crystal display device have been proposed. It is difficult to solve the problem that the contrast ratio decreases and the color changes depending on the viewing angle.
광시야각을 실현하기 위해 제안되는 다른 방식의 액정표시장치인 횡전계방식(in plane switching mode)의 액정표시장치가 JAPAN DISPLAY 92 P547, 일본특허 특개평 7-36058, 일본특허 특개평 7-225538, ASIA DISPALY 95 P107 등에 제안되고 있다.Another type of liquid crystal display device that is proposed to realize a wide viewing angle is a liquid crystal display device of the in plane switching mode (JAPAN DISPLAY 92 P547, Japanese Patent Laid-Open No. 7-36058, Japanese Patent Laid-Open No. 7-225538, It is proposed to ASIA DISPALY 95 P107.
도 1은 종래의 횡전계방식 액정표시장치를 나타내는 도면이다. 상기한 종래의 횡전계방식 액정표시장치는 도 1(a)에 나타낸 바와 같이, 제1기판(10) 위에 배열되어 화소영역을 정의하는 게이트배선(1) 및 데이터배선(2)과, 상기한 게이트배선(1)과 평행하게 화소내에 배열된 공통배선(3)과, 상기한 게이트배선(1)과 데이터배선(2)의 교차점에 배치된 박막트랜지스터와, 상기한 화소내에 데이터배선(2)과 대략 평행하게 배열된 데이터전극(8) 및 공통전극(9)으로 구성된다. 도 1(b)에 나타낸 바와 같이, 박막트랜지스터는 제1기판(10) 위에 형성되어 게이트배선(1)과 접속되는 게이트전극(5)과, 상기한 게이트전극(5) 위에 적층된 게이트절연막(12)과, 상기한 게이트절연막(12) 위에 형성된 활성층(15)과, 상기한 활성층(15) 위에 형성되어 데이터배선(2)과 데이터전극(8)에 각각 접속되는 소스전극(6) 및 드레인전극(7)으로 구성된다. 화소내의 공통전극(9)은 제1기판(10) 위에 형성되어 공통배선(3)에 접속되며 데이터전극(8)은 게이트절연막(12) 위에 형성되어 박막트랜지스터의 드레인전극(7)에 접속된다. 보호막(20)은 박막트랜지스터의 반도체층(20) 위에만 형성되어 있으며, 제1기판(10) 전체에 걸쳐서 제1배향막(23a)이 도포되어 있다.1 is a view showing a conventional transverse electric field type liquid crystal display device. In the conventional transverse electric field type liquid crystal display device, as shown in FIG. 1A, the gate line 1 and the data line 2 are arranged on the first substrate 10 to define a pixel area. The common wiring 3 arranged in the pixel in parallel with the gate wiring 1, the thin film transistor arranged at the intersection of the gate wiring 1 and the data wiring 2, and the data wiring 2 in the pixel. And a data electrode 8 and a common electrode 9 arranged in substantially parallel with each other. As shown in FIG. 1B, the TFT may include a gate electrode 5 formed on the first substrate 10 and connected to the gate wiring 1, and a gate insulating layer stacked on the gate electrode 5. 12, the active layer 15 formed on the gate insulating film 12, the source electrode 6 and the drain formed on the active layer 15 and connected to the data wiring 2 and the data electrode 8, respectively. It consists of an electrode 7. The common electrode 9 in the pixel is formed on the first substrate 10 and connected to the common wiring 3, and the data electrode 8 is formed on the gate insulating film 12 and connected to the drain electrode 7 of the thin film transistor. . The passivation layer 20 is formed only on the semiconductor layer 20 of the thin film transistor, and the first alignment layer 23a is coated over the entire first substrate 10.
제2기판(11)에는 박막트랜지스터, 게이트배선(1), 데이터배선(2), 공통배선(3) 근처로 빛이 새는 것을 방지하는 차광층(28)이 형성되어 있으며, 그 위에 컬러필터층(29) 및 제2배향막(23b)이 형성되어 있다. 또한, 상기한 제1기판(10) 및 제2기판(11) 사이에는 액정층(30)이 형성되어 있다.The second substrate 11 is formed with a light blocking layer 28 that prevents light leakage near the thin film transistor, the gate wiring 1, the data wiring 2, and the common wiring 3. 29) and the second alignment film 23b are formed. In addition, a liquid crystal layer 30 is formed between the first substrate 10 and the second substrate 11.
상기한 바와 같이 구성된 횡전계방식 액정표시장치에 있어서, 외부구동회로로부터 전압이 인가되면, 데이터전극(8)과 공통전극(9) 사이에 기판(10, 11)의 표면과 평행한 횡전계가 발생한다. 따라서, 액정층(30) 내의 액정분자가 상기한 횡전계를 따라 회전하게 되며, 그 결과 액정층(30)을 통과하는 빛의 양을 제어하게 된다.In the transverse electric field type liquid crystal display device configured as described above, when a voltage is applied from an external driving circuit, a transverse electric field parallel to the surfaces of the substrates 10 and 11 is formed between the data electrode 8 and the common electrode 9. Occurs. Accordingly, the liquid crystal molecules in the liquid crystal layer 30 rotate along the above-described transverse electric field, thereby controlling the amount of light passing through the liquid crystal layer 30.
일반적인 횡전계방식 액정표시장치에서는 보호막(20)이 제1기판(10)에 걸쳐서 적층되어 있기 때문에, 상기한 보호막(20)이 캐패시터 역할을 하여 데이터전극(8)과 공통전극(9) 사이의 횡전계의 세기가 감소하게 된다. 따라서, 도면에 나타낸 바와 같이, 박막트랜지스터 위에만 보호막(20)을 형성하여 반도체층(150)을 보호하는 경우에는 전극(8, 9) 사이의 횡전계의 세기가 감소하지 않기 때문에 구동전압을 낮출 수 있게 된다. 그러나, 상기한 보호막(20)의 두께는 약 3000Å이기 때문에, 제1배향막(23a)을 도포했을 때 배향막(123a)에 단차가 발생하게 된다. 이러한 단차는 상기한 배향막(23a)을 러빙과 기계적인 방법으로 배향할 때, 배향막(23a)에 미배향영역이 발생하게 되어 전경(disclination)이 생기는 원인이 된다.In a typical transverse electric field type liquid crystal display device, since the passivation layer 20 is stacked over the first substrate 10, the passivation layer 20 acts as a capacitor to form a gap between the data electrode 8 and the common electrode 9. The strength of the transverse electric field is reduced. Therefore, as shown in the figure, when the protective film 20 is formed only on the thin film transistor to protect the semiconductor layer 150, the driving voltage is lowered because the strength of the transverse electric field between the electrodes 8 and 9 does not decrease. It becomes possible. However, since the thickness of the said protective film 20 is about 3000 micrometers, when the 1st orientation film 23a is apply | coated, the level | step difference will arise in the orientation film 123a. Such a step causes an unoriented region to be generated in the alignment layer 23a when the alignment layer 23a is oriented by rubbing and a mechanical method, thereby causing disclination.
보호막(20)과 게이트절연막(12)은 일반적으로 SiOx나 SiNx와 같은 무기물로 이루어져 있다. 따라서, 상기한 보호막(20)과 게이트절연막(12)은 에칭선택비가 동일하거나 비슷하기 때문에, 박막트랜지스터를 제외한 영역의 보호막(20)을 에칭할 때에 게이트절연막(12)도 에칭되는 일이 자주 발생하게 되어 화면에 얼룩이 생기게 된다.The passivation layer 20 and the gate insulating layer 12 are generally made of an inorganic material such as SiOx or SiNx. Therefore, since the protective film 20 and the gate insulating film 12 have the same or similar etching selectivity, the gate insulating film 12 is also often etched when the protective film 20 in the region excluding the thin film transistor is etched. This will stain your screen.
본 발명은 상기한 점을 감안하여 이루어진 것으로, 보호막을 벤조사이클로부텐(BenzoCycloButene)으로 형성하여 균일한 셀갭을 갖는 횡전계방식 액정표시장치를 제공하는 것을 목적으로 한다.SUMMARY OF THE INVENTION The present invention has been made in view of the above, and an object thereof is to provide a transverse electric field type liquid crystal display device having a uniform cell gap by forming a protective film with benzocyclobutene.
본 발명의 다른 목적은, 공통전극을 데이터배선과 오버랩시켜 상기한 데이터배선의 전계에 의한 액정분자의 영향을 감소함과 동시에 상기한 공통전극이 차광층의 역할을 함으로써 제조공정이 간단하고 제조비용이 대폭 절감된 횡전계방식 액정표시장치를 제공하는 것이다.It is another object of the present invention to reduce the influence of liquid crystal molecules by the electric field of the data wiring by overlapping the common electrode with the data wiring, and at the same time the manufacturing process is simple and the manufacturing cost by the common electrode serves as a light shielding layer It is to provide a greatly reduced transverse electric field type liquid crystal display device.
본 발명의 또 다른 목적은, 박막트랜지스터를 게이트배선 위에 형성함으로써 개구율이 대폭 향상된 횡전계방식 액정표시장치를 제공하는 것이다.It is still another object of the present invention to provide a transverse electric field type liquid crystal display device having a greatly improved aperture ratio by forming a thin film transistor on a gate wiring.
상기한 목적을 달성하기 위해, 본 발명에 따른 횡전계방식 액정표시장치는 제1기판 및 제2기판과, 상기한 제1기판 위에 종횡으로 배열된 게이트배선 및 데이터배선과, 상기한 게이트배선 위에 형성된 박막트랜지스터와, 상기한 게이터배선과 평행하게 배열된 데이터전극과, 상기한 제1기판 전체에 걸쳐서 도포된 BCB로 이루어진 보호막과, 상기한 보호막 위에 데이터전극과 평행하게 배열됨과 동시에 일부분이 상기한 데이터배선과 오버랩되는 공통전극과, 상기한 공통전극과 보호막 위에 도포된 제1배향막과, 제2기판에 형성된 차광층과, 상기한 제2기판 전체에 걸쳐서 형성된 컬러필터층과, 상기한 컬러필터층 위에 도포된 제2배향막과, 상기한 제1기판과 제2기판 사이에 형성된 액정층으로 구성된다.In order to achieve the above object, a transverse electric field type liquid crystal display device according to the present invention comprises a first substrate and a second substrate, a gate wiring and a data wiring arranged vertically and horizontally on the first substrate, and on the gate wiring. A thin film transistor, a data electrode arranged in parallel with the gator wiring, a BCB coated over the first substrate, and a protective film formed on the passivation layer in parallel with the data electrode. The common electrode overlapping the data wiring, the first alignment layer coated on the common electrode and the passivation layer, the light shielding layer formed on the second substrate, the color filter layer formed on the entire second substrate, and the color filter layer. And a coated second alignment film and a liquid crystal layer formed between the first substrate and the second substrate.
박막트랜지스터는 상기한 게이트배선 위에 형성되어 있다. 즉, 상기한 박막트랜지스터는 게이트배선과, 상기한 게이트배선 위에 형성된 게이트절연막과, 상기한 게이트절연막 위에 형성된 반도체층과, 상기한 반도체층 위에 형성된 소스전극 및 드레인전극으로 구성된다.The thin film transistor is formed on the gate wiring described above. That is, the thin film transistor includes a gate wiring, a gate insulating film formed on the gate wiring, a semiconductor layer formed on the gate insulating film, and a source electrode and a drain electrode formed on the semiconductor layer.
보호막이 유기물인 BCB로 이루어져 있기 때문에 균일한 셀갭을 유지할 수 있을 뿐만 아니라 러빙에 의한 배향처리시 배향막의 단차에 의한 미배향영역이 생기지 않는다.Since the protective film is made of BCB, which is an organic material, not only a uniform cell gap can be maintained but also an unoriented region due to the step of the alignment film is not generated during the alignment treatment by rubbing.
보호막 위에 상기한 데이터배선과 오버랩되는 공통전극은 데이터배선에 기인하는 전계를 차단함과 동시에 상기한 데이터배선 근처로 빛이 새는 것을 방지한다. 공통배선과 데이터전극은 보호막을 사이에 두고 축적용량(storage capacitor)을 형성한다.The common electrode overlapping the data line on the passivation layer blocks an electric field due to the data line and prevents light leakage near the data line. The common wiring and the data electrode form a storage capacitor with a protective film interposed therebetween.
도 1(a)는, 종래 횡전계방식 액정표시장치의 평면도.1A is a plan view of a conventional transverse electric field type liquid crystal display device.
도 1(b)는, 도 1(a)의 A-A'선 단면도.(B) is sectional drawing A-A 'of FIG. 1 (a).
도 2는, 본 발명에 따른 횡전계방식 액정표시장치의 평면도.2 is a plan view of a transverse electric field type liquid crystal display device according to the present invention;
도 3(a)는, 도 2의 B-B'선 단면도.FIG. 3A is a cross-sectional view taken along the line BB ′ of FIG. 2.
도 3(b)는, 도 2의 C-C'선 단면도.FIG. 3B is a cross-sectional view taken along the line CC 'of FIG. 2.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
101 : 게이트배선 102 : 데이터배선101: gate wiring 102: data wiring
103 : 공통배선 106 : 소스전극103: common wiring 106: source electrode
107 : 드레인전극 108 : 데이터전극107: drain electrode 108: data electrode
109 : 공통전극 110 : 제1기판109: common electrode 110: first substrate
111 : 제2기판 112 : 게이트절연막111: second substrate 112: gate insulating film
115 : 반도체층 120 : 보호막115: semiconductor layer 120: protective film
123 : 배향막 128 : 차광층123: alignment layer 128: light shielding layer
129 : 컬러필터층 130 : 액정층129: color filter layer 130: liquid crystal layer
이하, 첨부한 도면을 참조하여 본 발명에 따른 횡전계방식 액정표시장치를 상세히 설명한다.Hereinafter, a transverse electric field type liquid crystal display device according to the present invention will be described in detail with reference to the accompanying drawings.
도 2는 본 발명에 따른 횡전계방식 액정표시장치의 평면도이다. 도면에 나타낸 바와 같이, 본 발명에서는 박막트랜지스터가 게이트배선(101) 위에 형성되어 있다. 기판 위에는 서로 교차하는 게이트배선(101)과 데이터배선(102)이 배열되어 있다. 도면에서는 한 화소만이 도시되어 있지만, 실제의 액정표시장치에서는 n개의 게이트배선(101)과 m개의 데이터배선(102)에 의해 n×m개의 화소가 형성되어 있다. 화소내에는 상기한 데이터배선(102)과 평행하게 데이터전극(108)과 공통전극(109)이 배열되어 있으며, 공통전극(109)은 공통배선(103)에 전기적으로 접속된다. 게이트배선(101) 위에는 반도체층(115), 소스전극(106) 및 데이터전극(108)으로 이루어진 박막트랜지스터가 형성되어 있다. 이때, 게이트배선(101)이 박막트랜지스터의 게이트전극 역할을 한다. 도면에 나타낸 바와 같이, 본 발명의 가장 큰 특징은 공통전극(109)의 일부분이 데이터배선(102)과 오버랩된다는 것이다.2 is a plan view of a transverse electric field type liquid crystal display device according to the present invention. As shown in the figure, in the present invention, a thin film transistor is formed on the gate wiring 101. The gate wiring 101 and the data wiring 102 intersecting with each other are arranged on the substrate. Although only one pixel is shown in the figure, n x m pixels are formed by the n gate wirings 101 and the m data wirings 102 in the actual liquid crystal display device. In the pixel, the data electrode 108 and the common electrode 109 are arranged in parallel with the data wiring 102 described above, and the common electrode 109 is electrically connected to the common wiring 103. The thin film transistor including the semiconductor layer 115, the source electrode 106, and the data electrode 108 is formed on the gate wiring 101. In this case, the gate wiring 101 serves as a gate electrode of the thin film transistor. As shown in the figure, the biggest feature of the present invention is that a part of the common electrode 109 overlaps the data wiring 102.
도 3(a) 및 도 3(b)는 각각 도 2의 B-B'선 및 C-C'선 단면도로서, 본 발명의 특징을 뚜렷하게 보여준다. 도면에 나타낸 바와 같이, 제1기판(110) 위에는 게이트배선(101)이 형성되어 있으며, 그 위에 게이트절연막(112)이 적층되어 있다. 본 발명의 게이트배선(101)은 박막트랜지스터의 게이트전극 역할을 겸하는 것으로 스퍼터링방법에 의해 적층된 Al, Mo, Ta 또는 Al합금 등과 같은 약 3000Å의 금속박막을 에칭하여 형성하며, 게이트절연막(112)은 SiNx나 SiOx 등과 같은 무기물을 CVD(Chemical Vapor Deposition)방법에 의해 적층하여 형성한다.3 (a) and 3 (b) are cross-sectional views taken along lines B-B 'and C-C' of FIG. 2, respectively, to clearly show the features of the present invention. As shown in the figure, a gate wiring 101 is formed on the first substrate 110, and a gate insulating film 112 is stacked thereon. The gate wiring 101 of the present invention serves as a gate electrode of a thin film transistor, and is formed by etching a metal thin film of about 3000 kV such as Al, Mo, Ta, or Al alloy deposited by a sputtering method, and the gate insulating film 112. Silver is formed by laminating inorganic materials such as SiNx or SiOx by CVD (Chemical Vapor Deposition) method.
게이트절연막(112) 위에는 반도체층(115)이 형성되어 있다. 반도체층(115)은 채널층(channel layer)으로서, 비정질 실리콘(a-Si)을 CVD방법으로 적층하고 에칭하여 형성한다. 도면에는 나타내지 않았지만, 상기한 반도체층(115) 위에는 n+a-Si으로 이루어진 오믹콘택층이 형성되어 있다. 오믹콘택층과 게이트절연막(112) 위에는 데이터배선(102), 소스전극(106), 드레인전극(107), 데이터전극(108)이 형성되어 있다. 상기한 데이터배선(102), 소스전극(106), 드레인전극(107), 데이터전극(108)은 스퍼터링방법에 의해 적층된 Al, Cr, Ti, Al합금과 같은 약 1000Å의 금속박막을 에칭하여 형성한다.The semiconductor layer 115 is formed on the gate insulating layer 112. The semiconductor layer 115 is a channel layer, and is formed by laminating and etching amorphous silicon (a-Si) by a CVD method. Although not shown, an ohmic contact layer made of n + a-Si is formed on the semiconductor layer 115. The data wiring 102, the source electrode 106, the drain electrode 107, and the data electrode 108 are formed on the ohmic contact layer and the gate insulating layer 112. The data wiring 102, the source electrode 106, the drain electrode 107, and the data electrode 108 are etched by a metal thin film of about 1000 mm, such as Al, Cr, Ti, and Al alloy, which are deposited by a sputtering method. Form.
박막트랜지스터, 데이터배선(102), 데이터전극(108) 및 게이트절연막(112) 위에는 보호막(120)이 도포되어 있다. 보호막(120)은 벤조사이클로부텐(BenzoCycloButene)과 같은 유기물을 스핀코팅(spin coating) 방법으로 적층되기 때문에, 보호막(120)의 표면이 평탄하게 된다.The passivation layer 120 is coated on the thin film transistor, the data wiring 102, the data electrode 108, and the gate insulating layer 112. Since the passivation layer 120 is stacked with an organic material such as benzocyclobutene by spin coating, the surface of the passivation layer 120 is flat.
보호막(120) 위에는 공통전극(109)과 공통배선(103)이 형성되어 있다. 도 2 및 도 3(b)에 나타낸 바와 같이, 공통전극(109)의 일부분은 데이터배선(102)과 오버랩되어 있다. 따라서, 상기한 공통전극(109)이 데이터배선(102)에 의해 발생하는 인한 전계를 차단(shielding)함으로써, 액정분자가 데이터배선(102)으로부터 발생하는 전계에 영향을 받는 것이 방지된다. 또한, 상기한 공통전극(109)이 데이터배선(102) 근처로 누설되는 빛을 차단하기 때문에, 도 2에 나타낸 바와 같이 차광층(128)을 게이트배선(101)을 따라서만 형성하는 것이 가능하게 되어 제조공정이 간단해짐과 동시에 제조비용이 대폭 감소한다.The common electrode 109 and the common wiring 103 are formed on the passivation layer 120. As shown in FIG. 2 and FIG. 3B, a part of the common electrode 109 overlaps with the data wiring 102. Accordingly, the common electrode 109 shields an electric field generated by the data wiring 102, thereby preventing the liquid crystal molecules from being affected by the electric field generated from the data wiring 102. In addition, since the common electrode 109 blocks light leaking near the data wiring 102, the light blocking layer 128 can be formed only along the gate wiring 101 as shown in FIG. This simplifies the manufacturing process and significantly reduces the manufacturing cost.
보호막(120)과 공통전극(109) 위에는 폴리이미드(polyimide) 혹은 PVCN(polyvinylcinnamate)계 물질이나 폴리실록산(polysiloxane)계 물질과 같은 광반응성 물질로 이루어진 제1배향막(123a)이 도포되어 있다. 폴리이미드를 배향막으로 사용하는 경우에는 배향막에 배향방향을 결정하기 위해 기계적인 러빙방법을 사용한다. 본 발명과 같이 BCB를 보호막(120)으로 사용하는 경우에는 배향막에 단차가 발생하지 않기 때문에, 러빙공정으로 배향방향을 결정하는 경우에도 미배향영역이 발생하지 않기 때문에 화면에 전경이 생기는 것이 방지된다.On the passivation layer 120 and the common electrode 109, a first alignment layer 123a made of a photoreactive material such as polyimide, polyvinylcinnamate (PVCN), or polysiloxane (polysiloxane) material is coated. When polyimide is used as the alignment film, a mechanical rubbing method is used to determine the orientation direction on the alignment film. When the BCB is used as the protective film 120 as in the present invention, no step occurs in the alignment film, and thus, even when the orientation direction is determined by the rubbing process, the unoriented area is not generated, thereby preventing the foreground from appearing on the screen. .
제1배향막(123a)으로 광반응성 물질을 사용하는 경우에는 배향막에 자외선과 같은 광을 조사하여 배향방향을 결정한다. 배향막에 결정되는 배향방향은 조사되는 광의 편광방향과 같이 광의 고유한 성질에 따라 배향방향이 달라지기 때문에, 기계적인 러빙을 사용했을 때 배향막에 먼지나 정전기가 생기는 문제를 해결할 수 있게 된다.When the photoreactive material is used as the first alignment layer 123a, the alignment direction is determined by irradiating light such as ultraviolet rays to the alignment layer. Since the orientation direction determined by the alignment film varies depending on the intrinsic properties of the light, such as the polarization direction of the irradiated light, it is possible to solve the problem of dust or static electricity generated in the alignment film when mechanical rubbing is used.
공통배선(103)과 데이터전극(108)은 도 2에 나타낸 바와 같이 보호막(120)을 사이에 두고 형성되어 축적용량(storage capacitor)을 형성한다.The common wiring 103 and the data electrode 108 are formed with the passivation layer 120 interposed therebetween to form a storage capacitor as shown in FIG. 2.
도면에는 도시하지 않았지만, 공통배선(3)을 보호막(120) 위에 형성하는 것외에 제1기판(110) 위에 게이트배선(101)과 동시에 형성하는 것도 가능하다. 이때, 공통전극(109)은 보호막(120)에 형성된 콘택홀(contact hole)을 통해 공통배선(103)에 접속된다.Although not shown in the drawing, in addition to forming the common wiring 3 on the passivation layer 120, it is also possible to simultaneously form the gate wiring 101 on the first substrate 110. In this case, the common electrode 109 is connected to the common wiring 103 through a contact hole formed in the passivation layer 120.
제2기판(111)에는 게이트배선, 데이터배선, 공통배선 및 박막트랜지스터 근처로 빛이 새는 것을 방지하기 위한 차광층(128)이 형성되어 있으며, 그 위에 컬러필터층(129)이 형성되어 있다. 차광층(128)은 스퍼터링방법에 의해 적층된 Cr박막이나 CrOx박막을 에칭하여 형성한다. 컬러필터층(129)에는 R, G, B층이 화소마다 반복형성되어 있다. 컬러필터층(129) 위에는 폴리이미드나 광반응성물질로 이루어진 제2배향막(123b)이 도포된 후 러빙이나 광의 조사에 의해 배향방향이 결정된다. 또한, 제1기판(110)과 제2기판(111) 사이에는 진공상태에서 액정이 주입되어 액정층(130)이 형성된다.A light blocking layer 128 is formed on the second substrate 111 to prevent light leakage near the gate wiring, the data wiring, the common wiring, and the thin film transistor, and the color filter layer 129 is formed thereon. The light shielding layer 128 is formed by etching the Cr thin film or CrOx thin film laminated by the sputtering method. In the color filter layer 129, R, G, and B layers are repeatedly formed for each pixel. After the second alignment layer 123b made of polyimide or a photoreactive material is coated on the color filter layer 129, the orientation direction is determined by rubbing or irradiation of light. In addition, a liquid crystal is injected in a vacuum state between the first substrate 110 and the second substrate 111 to form the liquid crystal layer 130.
본 발명의 횡전계방식 액정표시장치에서는 보호막으로 유기물인 BCB를 사용하기 때문에 제1기판과 제2기판 사이의 셀갭을 균일하게 유지할 수 있게 된다. 또한, 공통전극이 상기한 보호막 위에 형성되어 그 일부분이 데이터배선과 오버랩되기 때문에, 상기한 데이터배선 영역에 차광층을 형성할 필요가 없게 되어 제조공정이 간단하게 될 뿐만 아니라 제조비용이 대폭 절감된다. 더욱이, 박막트랜지스터가 게이트배선 위에 형성되기 때문에 개구율이 대폭 향상된다.In the transverse electric field liquid crystal display device of the present invention, since the organic material BCB is used as the protective film, the cell gap between the first substrate and the second substrate can be maintained uniformly. In addition, since the common electrode is formed on the passivation layer and a part thereof overlaps with the data wiring, there is no need to form a light shielding layer in the data wiring region, thereby simplifying the manufacturing process and significantly reducing the manufacturing cost. . Furthermore, since the thin film transistor is formed on the gate wiring, the aperture ratio is greatly improved.
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