KR19980049512U - Connecting device of inspection equipment and device - Google Patents

Connecting device of inspection equipment and device Download PDF

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Publication number
KR19980049512U
KR19980049512U KR2019960062677U KR19960062677U KR19980049512U KR 19980049512 U KR19980049512 U KR 19980049512U KR 2019960062677 U KR2019960062677 U KR 2019960062677U KR 19960062677 U KR19960062677 U KR 19960062677U KR 19980049512 U KR19980049512 U KR 19980049512U
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KR
South Korea
Prior art keywords
pib
capacitor
resistor
inspection equipment
inspection
Prior art date
Application number
KR2019960062677U
Other languages
Korean (ko)
Inventor
심창복
Original Assignee
문정환
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 문정환, 엘지반도체 주식회사 filed Critical 문정환
Priority to KR2019960062677U priority Critical patent/KR19980049512U/en
Publication of KR19980049512U publication Critical patent/KR19980049512U/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/20Modifications of basic electric elements for use in electric measuring instruments; Structural combinations of such elements with such instruments
    • G01R1/203Resistors used for electric measuring, e.g. decade resistors standards, resistors for comparators, series resistors, shunts

Abstract

본 고안은 검사 장비와 소자의 연결 장치에 관한 것으로, 특히 커패시터와 저항을 내장한 PIB(Performance Interface Board)에 관한 것이다.The present invention relates to a device for connecting inspection equipment and devices, and more particularly, to a performance interface board (PIB) incorporating a capacitor and a resistor.

이를 위한 본 고안의 검사 장비와 소자의 연결 장치는 소자, 상기 소자를 검사하는 검사 장비와 상기 소자와 검사 장비 사이에 커패시터와 저항이 내장되어 위치하는 PIB를 포함하여 구성됨을 특징으로 한다.The device for connecting the test equipment and the device of the present invention for this purpose is characterized in that it comprises a device, the test equipment for inspecting the device and the PIB is located between the device and the test equipment is built in the capacitor.

Description

검사 장비와 소자의 연결 장치Connecting device of inspection equipment and device

본 고안은 검사 장비와 소자의 연결 장치에 관한 것으로, 특히 커패시터와 저항을 내장한 PIB(Performance Interface Board)에 관한 것이다.The present invention relates to a device for connecting inspection equipment and devices, and more particularly, to a performance interface board (PIB) incorporating a capacitor and a resistor.

일반적으로 PIB는 PIB 배면쪽의 콘택홀에 연결된 각종 검사 장비와 PIB상의 반도체 소자를 정합시키면서 연결시켜주는 배선의 역할을 하며, 상기 각종 검사 장비의 입출력 신호가 상기 PIB내의 배선 또는 부품을 통하여 상기 반도체 소자에 전달된다.In general, the PIB serves as a wiring for matching and connecting various inspection equipment connected to the contact hole on the rear side of the PIB and semiconductor elements on the PIB, and the input / output signals of the various inspection equipment are connected to the semiconductor through the wiring or components in the PIB. Delivered to the device.

이하 첨부된 도면을 참조하여 종래의 검사 장비와 소자의 연결 장치를 설명하면 다음과 같다.Hereinafter, referring to the accompanying drawings, a conventional apparatus for connecting an inspection apparatus and a device will be described.

도 1은 종래의 PIB를 나타내는 평면도이다.1 is a plan view showing a conventional PIB.

도 1에서와 같이, 각종 검사 장비와 반도체 소자를 정합시키면서 연결시켜주는 PIB(11) 외측의 소정부위에 저항 또는 커패시터와 납땜으로 부착되는 접촉부(12)가 있고, 순수 금속선으로 되어 검사 장비와 반도체 소자를 연결시켜 주는 배선들(13)이 있다.As shown in Fig. 1, there is a contact portion 12 attached to a resistor or a capacitor and soldering on a predetermined portion outside the PIB 11 that connects and connects various inspection equipments and semiconductor elements. There are wires 13 connecting the devices.

종래의 검사 장비와 소자의 연결 장치는 PIB에 커패시터와 저항을 부착하기 때문에 반도체 소자의 임피턴스 정합이 어렵고 또한 커패시터와 저항이 크므로 반도체 소자와 검사 장비가 멀어지게 되어 검사 장비에서의 입출력 신호가 정확히 소자에 전달되지 못하며, 소자가 복잡 세밀화에 따른 PIB 구성시 별도의 PCB(Printed Circuit Board)를 추가 부착하여 구성함으로 반도체 소자 특성이 불안하게 되고 많은 시간과 비용이 소요되는 문제점이 있었다.Conventional inspection equipment and device connection devices attach a capacitor and a resistor to the PIB, so it is difficult to match the impedance of the semiconductor device, and because the capacitor and the resistance are large, the semiconductor device and the inspection device are separated, and the input / output signal from the inspection device It is not accurately delivered to the device, and the device is unstable and has a problem that takes a lot of time and cost by adding a separate PCB (Printed Circuit Board) when the device is attached to the PIB configuration due to the complex refinement.

본 고안은 상기의 문제점을 해결하기 위해 안출한 것으로 커패시터와 저항을 PIB에 내장하여 검사 장비에서의 입출력 신호가 정확히 소자에 전달되며, 커패시터와 저항을 직렬로 연결시키고 선택적으로 사용함으로 넓은 주파수 대역폭에서 임피턴스가 낮아 소자의 검사시 안정화 및 잡음을 감소시키고, PCB의 추가 부착이 필요없어 시간과 비용이 절감되는 검사 장비와 소자의 연결 장치를 제공하는데 그 목적이 있다.The present invention was devised to solve the above problems. The capacitor and the resistor are built into the PIB, and the input / output signal from the inspection equipment is correctly transmitted to the device. The capacitor and the resistor are connected in series and selectively used in a wide frequency bandwidth. Its purpose is to provide inspection equipment and device interconnection devices with low impedance, which reduces stabilization and noise during device inspection, and saves time and money by eliminating the need for additional attachment of PCBs.

도 1은 종래의 PIB를 나타내는 평면도1 is a plan view showing a conventional PIB

도 2는 본 고안의 실시예에 따른 PIB를 나타내는 평면도2 is a plan view showing a PIB according to an embodiment of the present invention

*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *

31:PIB32:배선들31: PIB32: Wirings

33:제 1스위치 34:제 2스위치33: first switch 34: second switch

35:제 3스위치 36:제 1저항35: third switch 36: first resistor

37:제 1커패시터38:제 2저항37: first capacitor 38: second resistor

39:제 2커패시터39: second capacitor

본 고안의 검사 장비와 소자의 연결 장치는 소자, 상기 소자를 검사하는 검사 장비와 상기 소자와 검사 장비 사이에 커패시터와 저항이 내장되어 위치하는 PIB를 포함하여 구성됨을 특징으로 한다.The device for connecting the test equipment and the device of the present invention is characterized in that it comprises a device, the test equipment for inspecting the device and the PIB is located between the device and the test equipment is built-in.

상기와 같은 본 고안에 따른 검사 장비와 소자의 연결 장치의 바람직한 실시예를 첨부된 도면을 참조하여 상세히 설명하면 다음과 같다.When described in detail with reference to the accompanying drawings a preferred embodiment of the test equipment and the device for connecting the device according to the present invention as follows.

도 2는 본 고안의 실시예에 따른 PIB를 나타내는 평면도이다.2 is a plan view showing a PIB according to an embodiment of the present invention.

도 2에서와 같이, 각종 검사 장비와 반도체 소자를 정합시키면서 연결시켜 주며 커패시터와 저항을 내장한 PIB(31)에 검사 장비와 반도체 소자를 연결시켜 주는 배선들(32)이 있다. 여기서 상기 배선들(32)은 순수 금속선이나 제 1, 제 2, 제 3 스위치(33, 34, 35)를 병렬로 갖는 금속선으로 또는 상기 순수 금속선과 상기 제 1, 제 2, 제 3 스위치(33, 34, 35)를 병렬로 갖는 금속선을 혼합하여 형성된다. 여기서 상기 제 1, 제 2, 제 3 스위치(33, 34, 35)를 병렬로 갖는 금속선은 상기 PIB(31)에 내장되거나 상기 검사 장비에 내장된 컨트롤 박스(Control Box)에 의해 상기 각종 검사 장비와 반도체 소자를 정합시키기 위해서 제 1, 제 2, 제 3 스위치(33, 34, 35)가 선택된다. 이때 상기 제 1스위치(33)가 턴온(Turn-on)되면 제 1저항(36)과 제 1커패시터(37)가 직렬로 연결된 금속선과 연결되고, 상기 제 3스위치(35)가 턴온되면 제 2저항(38)과 제 2커패시터(39)가 직렬로 연결된 금속선과 연결되며, 상기 제 2스위치(34)가 턴온되면 순수 금속선과 연결된다.As shown in FIG. 2, there are wirings 32 that match and connect various inspection equipments and semiconductor elements and connect the inspection equipment and semiconductor elements to a PIB 31 having a capacitor and a resistor. Here, the wirings 32 may be pure metal wires or metal wires having the first, second and third switches 33, 34 and 35 in parallel, or the pure metal wires and the first, second and third switches 33. , 34 and 35 are formed by mixing metal wires in parallel. Here, the metal wires having the first, second, and third switches 33, 34, and 35 in parallel may be installed in the PIB 31 or by the control box embedded in the inspection equipment. The first, second and third switches 33, 34 and 35 are selected to match the semiconductor elements. At this time, when the first switch 33 is turned on, the first resistor 36 and the first capacitor 37 are connected to a metal wire connected in series, and when the third switch 35 is turned on, the second switch 33 is turned on. The resistor 38 and the second capacitor 39 are connected to a metal wire connected in series. When the second switch 34 is turned on, the resistor 38 and the second capacitor 39 are connected to a pure metal wire.

본 고안의 검사 장비와 소자의 연결 장치는 커패시터와 저항을 PIB에 내장하여 검사 장비에서의 입출력 신호가 정확히 소자에 전달되며, 커패시터와 저항을 직렬로 연결시키고 선택적으로 사용함으로 넓은 주파수 대역폭에 임피턴스가 낮아 소자의 검사시 안정화 및 잡음을 감소시키고, PIB의 추가 부착이 필요없어 시간과 비용이 절감되는 효과가 있다.The test equipment and the device of the present invention have a built-in capacitor and a resistor in the PIB, so that the input and output signals from the test equipment are correctly transmitted to the device, and the capacitor and the resistor are connected in series and selectively used for impedance at a wide frequency bandwidth. This reduces the stability and noise during device inspection and saves time and money by eliminating the need for additional attachment of the PIB.

Claims (2)

소자;device; 상기 소자를 검사하는 검사 장비;Inspection equipment for inspecting the device; 상기 소자와 검사 장비 사이에 커패시터와 저항이 내장되어 위치하는 PIB를 포함하여 구성됨을 특징으로 하는 검사 장비와 소자의 연결 장치.And a PIB having a capacitor and a resistor in between the device and the test device. 제 1항에 있어서,The method of claim 1, 상기 PIB에 내장된 커패시터와 저항은 직렬로 연결됨을 특징으로 하는 검사 장비와 소자의 연결 장치.Capacitors and resistors built in the PIB is connected in series with the test equipment, characterized in that the device.
KR2019960062677U 1996-12-30 1996-12-30 Connecting device of inspection equipment and device KR19980049512U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960062677U KR19980049512U (en) 1996-12-30 1996-12-30 Connecting device of inspection equipment and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960062677U KR19980049512U (en) 1996-12-30 1996-12-30 Connecting device of inspection equipment and device

Publications (1)

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KR19980049512U true KR19980049512U (en) 1998-10-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960062677U KR19980049512U (en) 1996-12-30 1996-12-30 Connecting device of inspection equipment and device

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KR (1) KR19980049512U (en)

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