KR19980018453U - Jig for disassembling and assembling isolation valve for semiconductor device manufacturing process - Google Patents
Jig for disassembling and assembling isolation valve for semiconductor device manufacturing process Download PDFInfo
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- KR19980018453U KR19980018453U KR2019960031865U KR19960031865U KR19980018453U KR 19980018453 U KR19980018453 U KR 19980018453U KR 2019960031865 U KR2019960031865 U KR 2019960031865U KR 19960031865 U KR19960031865 U KR 19960031865U KR 19980018453 U KR19980018453 U KR 19980018453U
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67017—Apparatus for fluid treatment
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Abstract
본 고안은 반도체소자 제조 공정의 진공 라인에 주로 사용되는 아이솔레이션 밸브의 분해 및 조립을 용이하게 할 수 있도록 한 치구에 관한 것이다.The present invention relates to a jig to facilitate the disassembly and assembly of the isolation valve mainly used in the vacuum line of the semiconductor device manufacturing process.
이를 위해, 본 고안은 상부면 중앙에 나사산을 가지는 안내공(1)이 형성되고 하부면에는 밸브 안착면(2)이 형성되는 사각틀 구조의 치구 몸체(3)와 상기 치구 몸체(3) 상부면의 안내공(1)에 승강가능하게 결합되어 하강시 상·하부 밸브몸체(4a),(4b)가 서로 밀착되도록 밸브 뚜껑(5) 상면을 가압하게 되는 밸브 뚜껑 가압수단으로 구성된 반도체소자 제조 공정용 아이솔레이션 밸브 분해 및 조립용 치구이다.To this end, the subject innovation is a jig body 3 and the jig body 3 of the square frame structure is formed with a guide hole (1) having a thread in the center of the upper surface and the valve seating surface (2) is formed on the lower surface A semiconductor device manufacturing process comprising a valve lid pressurizing means that pressurizes the upper and lower valve bodies 4a and 4b so that the upper and lower valve bodies 4a and 4b closely contact each other when being lowered and coupled to the guide hole 1 of the apparatus. Isolation valve for disassembly and assembly jig.
Description
본 고안은 반도체소자 제조 공정용 아이솔레이션 밸브 분해 및 조립용 치구에 관한 것으로서, 더욱 상세하게는 반도체소자 제조 공정의 진공 라인에 주로 사용되는 아이솔레이션 밸브의 분해 및 조립을 용이하게 할 수 있도록 한 치구에 관한 것이다.The present invention relates to a jig for disassembling and assembling an isolation valve for a semiconductor device manufacturing process, and more particularly, to a jig for facilitating disassembly and assembly of an isolation valve mainly used in a vacuum line of a semiconductor device manufacturing process. will be.
일반적으로, 아이솔레이션 밸브(Isolation Valve)는 반도체소자 제조용 반응챔버에 연결되는 진공라인 상에 설치되어 반응챔버 내로 유기되는 진공압을 인가 또는 차단하는데 사용되는 밸브이다.In general, an isolation valve is a valve which is installed on a vacuum line connected to a reaction chamber for manufacturing a semiconductor device and used to apply or block a vacuum pressure induced in the reaction chamber.
한편, 종래의 노말 클로즈 타입(Normal Close Type)인 아이솔레이션 밸브(10)는 도 1에서 나타낸 바와 같이, 평상 상태에서는 조립된 상·하부 밸브몸체(4a),(4b) 내에 내장된 압축스프링(11)의 힘에 의해 벨로우즈(13)가 하강하여 도면상 수직인 A방향의 관로를 폐쇄하게 된다.Meanwhile, as shown in FIG. 1, the conventional normal close type isolation valve 10 has a compression spring 11 embedded in the upper and lower valve bodies 4a and 4b assembled in a normal state. The bellows 13 is lowered by the force of) to close the pipeline in the A direction perpendicular to the drawing.
즉, 평상시에는 A방향의 관로와 이에 대해 수직인 B방향 관로는 서로 연통되지 못하고 격리된 상태이다.That is, normally, the pipeline in the A direction and the pipeline in the B direction perpendicular thereto are not in communication with each other and are isolated.
또한, 상기 A방향의 관로와 B방향의 관로를 서로 연결시킬 경우에는, 상부 밸브몸체(4a) 일측의 공기주입구(14)를 통해 밸브몸체 내부로 공기를 주입하여 고무패드(15)가 상승하도록 하므로써 이에 연동하는 압축스프링(11)의 압축 작용에 의해 A방향의 관로가 개방되도록 하므로써 서로 통하도록 하였다.In addition, when connecting the pipe in the A direction and the pipe in the B direction, injecting air into the valve body through the air inlet 14 on one side of the upper valve body 4a so that the rubber pad 15 is raised. Thus, the pipes in the A direction are opened by the compression action of the compression springs 11 interlocked with each other.
즉, 상기 공기주입구(14)를 통해 밸브몸체 내로 공기가 주입되어 피스톤 운동을 하는 고무패드(15)가 밸브몸체 내부의 압력 증가로 인해 상승함에 따라 상기 고무패드(15)에 결합된 스프링 보호용 중공축(16) 또한 밸브 뚜껑(5)에 상단이 고정된 압축스프링(11)을 압축시키는 방향으로 상승하게 되며, 이에 연동하여 고무패드(15) 하부위치의 밸브몸체 일측과 압축스프링(11) 하단부 사이에 연결된 벨로우즈(13) 또한 수축하게 되므로써 A방향의 관로를 밀폐하고 있던 차폐판(17)이 A방향 관로 선단으로부터 이격되어 A방향의 관로가 개방된다.In other words, the air is injected into the valve body through the air inlet 14, the rubber pad 15 for the piston movement as the piston rises due to the increase in the pressure inside the valve body, the spring protection hollow coupled to the rubber pad 15 The shaft 16 also rises in the direction in which the upper end of the compression spring 11 is fixed to the valve cap 5 in the compression direction, and in conjunction with this, the valve body one side and the lower end of the compression spring 11 at the lower position of the rubber pad 15. As the bellows 13 connected therebetween also contracts, the shielding plate 17 which has sealed the pipeline in the A direction is spaced apart from the tip of the pipeline in the A direction to open the pipeline in the A direction.
이와 같이, 상기 아이솔레이션 밸브(10)는 압축스프링(11)의 복원력과 밸브몸체 내부로 주입되는 공기압의 대소 관계에 따라 A방향의 관로와 B방향의 관로를 서로 격리시키거나 연결시켜 반응챔버내로 유기되는 진공을 인가 또는 차단하는 역할을 하게 된다.As such, the isolation valve 10 separates or connects the pipeline in the A direction and the pipeline in the B direction according to the magnitude relationship between the restoring force of the compression spring 11 and the air pressure injected into the valve body. It serves to apply or block the vacuum.
그러나, 이와 같은 종래의 아이솔레이션 밸브(10)는 부해시, 상·하부 밸브몸체(4a),(4b)의 접합부에 형성된 플랜지(18)의 체결공(19)을 관통하여 결합된 체결나사(12)에 압축스프링(11)의 복원력에 기인한 인장력이 작용하여 분해시 쉽게 풀리지 않게 되는 단점이 있었다.However, such a conventional isolation valve 10 has a fastening screw 12 coupled through the fastening hole 19 of the flange 18 formed at the joint portion of the upper and lower valve bodies 4a and 4b upon loading. The tension force due to the restoring force of the compression spring 11 acts on)) so that it is not easily released during disassembly.
즉, 압축스프링(11)의 복원력에 의해 상부 밸브몸체(4a)에 미는 힘이 작용하여 체결나사(12)에 인장력이 걸리게 되므로 인해 플랜지(18)와 체결나사(12) 접촉면과의 마찰력이 증가하여 체결나사(12)를 분해하는데 큰 힘이 소요될 뿐만 아니라, 체결나사(12)가 휘어지거나 나사산이 손상되어 밸브를 사용하지 못하게 되는 등의 문제점이 있었다.That is, since the pushing force acts on the upper valve body 4a by the restoring force of the compression spring 11, and the tensioning force is applied to the fastening screw 12, the frictional force between the flange 18 and the contact surface of the fastening screw 12 is increased. Not only takes a large force to disassemble the fastening screw 12, there was a problem such that the fastening screw 12 is bent or the thread is damaged to prevent the use of the valve.
한편, 아이솔레이션 밸브(10)의 조립시에는 압축스프링(11)의 복원력이 워낙 커서 작업자 혼자만의 힘으로는 밸브 뚜껑(5)를 눌러 상·하부 밸브몸체(4a),(4b)를 접합시키지 못하므로 체결나사(12)를 조립할 수 없는 문제점이 있었으며, 비록 다른 사람이 밸브 뚜껑(5)를 눌러준다해도 여러개의 체결나사(12)를 플랜지(18)에 체결하는 동안 계속 힘들게 밸브 뚜껑(5)를 누르고 있어야 하는 등 많은 문제점이 있었다.On the other hand, when assembling the isolation valve 10, the restoring force of the compression spring 11 is so great that it is not possible to press the valve cap 5 to join the upper and lower valve bodies 4a and 4b by the force of the operator alone. Therefore, there was a problem in that the fastening screw 12 could not be assembled, and even though the other person presses the valve cap 5, the valve cap 5 continues to be hard while the fastening screws 12 are fastened to the flange 18. There were many problems, such as holding down.
특히, 아이솔레이션 밸브(10)의 용량이 매우 큰 경우, 압축스프링(11)의 힘 또한 매우 커 다른 작업자가 눌러도 닫히지 않아, 다른 기계의 힘을 빌어야 하나 적당한 치구가 없어 아이솔레이션 밸브(10)의 클램핑에 의해 많은 시간 및 노력이 낭비되는 등 많은 문제점이 있었다.In particular, when the capacity of the isolation valve 10 is very large, the force of the compression spring 11 is also very large so that it cannot be closed even by another operator, but the power of the other machine should be applied to the clamping of the isolation valve 10 because there is no suitable jig. There are many problems such as wasted a lot of time and effort.
본 고안은 상기한 제반 문제점을 해결하기 위한 것으로서, 반도체소자 제조 공정의 진공 라인에 주로 사용되는 아이솔레이션 밸브의 분해 및 조립시, 간단히 조작할 수 있는 치구를 사용하여 아이솔레이션 밸브의 분해 및 조립을 용이하게 할 수 있도록 한 반도체소자 제조 공정용 아이솔레이션 밸브 분해 및 조립용 치구를 제공하는데 그 목적이 있다.The present invention is to solve the above-mentioned problems, and when disassembling and assembling the isolation valve mainly used in the vacuum line of the semiconductor device manufacturing process, the disassembly and assembly of the isolation valve can be easily performed using a jig that can be easily operated. An object of the present invention is to provide a jig for disassembling and assembling an isolation valve for a semiconductor device manufacturing process.
상기한 목적을 달성하기 위해, 본 고안은 상부면 중앙에 나사산을 가지는 안내공이 형성되고 하부면에는 밸브 안착면이 형성되는 사각틀 구조의 치구 몸체와, 상기 치구 몸체 상부면의 안내공에 승강가능하게 결합되어 하강시 상·하부 밸브몸체가 서로 밀착되도록 밸브 뚜껑 상면을 가압하게 되는 밸브 뚜껑 가압수단으로 구성된 반도체소자 제조 공정용 아이솔레이션 밸브 분해 및 조립용 치구이다.In order to achieve the above object, the present invention is a jig body of the rectangular frame structure is formed with a guide hole having a thread in the center of the upper surface and the valve seating surface is formed, and the lifting hole to the guide hole of the upper surface of the jig body It is a jig for disassembling and assembling the isolation valve for a semiconductor device manufacturing process consisting of a valve lid pressurizing means that pressurizes the upper and lower valve bodies so that the upper and lower valve bodies are in close contact with each other when descending.
도 1은 아이솔레이션 밸브를 나타낸 종단면도1 is a longitudinal cross-sectional view showing an isolation valve
도 2는 본 고안의 치구를 나타낸 사시도Figure 2 is a perspective view showing the jig of the subject innovation
도 3은 본 고안의 치구 사용 상태를 나타낸 종단면도Figure 3 is a longitudinal cross-sectional view showing the jig use state of the present invention
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
1 : 안내공2 : 안착면1: Guide 2: Seating surface
3 : 치구 몸체4a,4b : 상·하부 밸브몸체3: jig body 4a, 4b: upper and lower valve body
5 : 밸브 뚜껑6 : 승강축5: valve cap 6: lifting shaft
7 : 회전 손잡이8 : 누름판7: rotary knob 8: pressing plate
9 : 밸브 슬립 방지홈9: Valve slip prevention groove
이하, 본 고안의 일 실시예를 첨부도면 도 2 및 도 3 을 참조하여 상세히 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described in detail with reference to FIGS. 2 and 3.
도 2는 본 고안의 치구를 나타낸 사시도이고, 도 3은 본 고안의 치구 사용 상태를 나타낸 종단면도로서, 상부면 중앙에 나사산을 가지는 안내공(1)이 형성되고 하부면에는 밸브 안착면(2)이 형성되는 사각틀 구조의 치구 몸체(3)와, 상기 치구 몸체(3) 상부면의 안내공(1)에 승강가능하게 결합되어 하강시 상·하부 밸브몸체(4a),(4b)가 서로 밀착되도록 밸브 뚜껑(5) 상면을 가압하게 되는 밸브 뚜껑 가압수단으로 구성된다.Figure 2 is a perspective view showing a jig of the present invention, Figure 3 is a longitudinal cross-sectional view showing the jig use state of the present invention, a guide hole (1) having a thread in the center of the upper surface is formed and the valve seating surface (2) J) body is formed in a rectangular frame structure (3), and the upper and lower valve body (4a), (4b) is coupled to each other when the lifting and lowering coupled to the guide hole (1) of the upper surface of the jig body (3) It consists of a valve lid pressurizing means for pressing the upper surface of the valve cap 5 to be in close contact.
이 때, 상기 밸브 뚜껑 가압수단은 상기 치구 몸체(3)의 나사산이 형성된 안내공(1)에 결합되게 외주면 상에 나사산이 형성된 승강축(6)과, 상기 승강축(6)을 회전시키도록 승강축(6) 상단에 형성되는 회전 손잡이(7)와, 상기 승강축(6) 하단에 결합되어 하강시 밸브 뚜껑(5) 상면을 누르게 되는 누름판(8)으로 구성된다.At this time, the valve lid pressurizing means to rotate the lifting shaft (6) and the lifting shaft (6) is formed on the outer circumferential surface to be coupled to the threaded guide hole (1) of the jig body (3) It consists of a rotary knob (7) formed at the upper end of the lifting shaft (6), and the pressing plate (8) coupled to the lower end of the lifting shaft (6) to press the upper surface of the valve cap (5).
한편, 상기 치구 몸체(3)의 밸브 안착면(2) 상에는 치구를 이용한 밸브몸체의 분해 또는 조립시, 치구에 고정된 밸브몸체의 미끄러짐을 방지할 수 있도록 하부 밸브몸체(4b)의 선단이 삽입되어 고정되는 원형의 밸브 슬립 방지홈(9)이 형성된다.Meanwhile, the distal end of the lower valve body 4b is inserted into the valve seating surface 2 of the jig body 3 to prevent slippage of the valve body fixed to the jig when disassembling or assembling the valve body using the jig. And a circular valve slip prevention groove 9 is formed.
또한, 상기 치구 몸체(3)의 밸브 안착면(2)상에 형성되는 밸브 슬립 방지홈(9)은 규격별 밸브에 대응하도록 서로 다른 직경을 가지는 복수개의 원형 홈으로 형성되어 구성된다.In addition, the valve slip prevention groove 9 formed on the valve seating surface 2 of the jig body 3 is formed of a plurality of circular grooves having different diameters to correspond to the valve according to the standard.
이와 같이 구성된 본 고안의 작용은 다음과 같다.The operation of the present invention configured as described above is as follows.
먼저, 아이솔레이션 밸브(10) 분해시에는 상·하부 밸브몸체(4a),(4b)로 이루어진 아이솔레이션 밸브(10)를 치구 몸체(3)의 안착면(3) 상에 안착시킨 상태에서 승강축(6) 선단의 회전 손잡이(7)를 돌려 승강축(6)을 하강시킴에 따라, 승강축(6) 하단에 결합된 누름판(8)이 아이솔레이션 밸브(10)의 밸브 뚜껑(5)를 가압하게 된다.First, when disassembling the isolation valve 10, the lifting shaft 10 in the state where the isolation valve 10 made up of the upper and lower valve bodies 4a and 4b is seated on the seating surface 3 of the jig body 3. 6) As the rotary shaft 7 of the tip is lowered to lower the lifting shaft 6, the pressing plate 8 coupled to the lower end of the lifting shaft 6 presses the valve cap 5 of the isolation valve 10. do.
이에 따라, 상기 아이솔레이션 밸브(10)의 상·하부 밸브몸체(4a),(4b)는 가압판의 누름작용에 의해 밀착된 상태를 유지하게 되므로 밸브몸체에 내장된 압축스프링(11)에 의해 체결나사(12)에 인장력이 작용하게 되는 현상을 방지하여 체결나사(12)를 손쉽게 풀어내어 아이솔레이션 밸브(10)의 상·하부 밸브몸체(4a),(4b)를 분리시킬 수 있게 된다.Accordingly, since the upper and lower valve bodies 4a and 4b of the isolation valve 10 are kept in close contact by the pressing action of the pressure plate, the fastening screw is mounted by the compression spring 11 embedded in the valve body. By preventing the phenomenon that the tension force is applied to the (12), the fastening screw 12 can be easily released to separate the upper and lower valve bodies 4a and 4b of the isolation valve 10.
한편, 아이솔레이션 밸브(10)의 조립시에도 역시, 분리된 아이솔레이션 밸브(10)의 상·하부 몸체를 치구에 안착시킨 상태에서 승강축(6) 선단의 회전 손잡이(7)를 돌려 승강축(6) 하단에 결합된 누름판(8)이 아이솔레이션 밸브(10)의 밸브 뚜껑(5)을 가압하도록 만든다.On the other hand, when assembling the isolation valve 10, the rotary shaft 7 at the tip of the elevating shaft 6 is rotated while the upper and lower bodies of the separated isolation valve 10 are seated on the jig. Press plate 8 coupled to the bottom to pressurize the valve cap (5) of the isolation valve (10).
이에 따라, 상부 밸브 몸체(4a)에 결합된 압축스프링(11)이 압축되면서 상부 밸브몸체(4a)는 하강하여 하부 밸브 몸체(4b)와 밀착하게 되며, 이 상태에서 작업자는 체결나사(12)를 손쉽게 체결하여 상·하부 밸브몸체(4a),(4b)를 조립할 수 있게 된다.Accordingly, while the compression spring 11 coupled to the upper valve body 4a is compressed, the upper valve body 4a is lowered to be in close contact with the lower valve body 4b, and in this state, the worker tightens the screw 12. The upper and lower valve bodies (4a, 4b) can be easily assembled by fastening.
이상에서와 같이, 본 고안은 반도체소자 제조 공정의 진공 라인에 주로 사용되는 아이솔레이션 밸브(10)의 분해 및 조립시, 간단히 조작하여 아이솔레이션 밸브(10)를 눌러줄 수 있는 치구를 제공하므로써 아이솔레이션 밸브(10)의 분해 및 조립이 보다 용이하게 이루어지도록 하여 작업자에게 편리함을 제공할 수 있도록 한 매우 유용한 고안이다.As described above, the present invention provides a jig that can press the isolation valve 10 simply by disassembling and assembling the isolation valve 10 mainly used in the vacuum line of the semiconductor device manufacturing process. 10) It is a very useful design to provide convenience to workers by disassembling and assembling more easily.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019960031865U KR200165749Y1 (en) | 1996-09-30 | 1996-09-30 | Assembly and/or disassembly jig for isolation valve for semiconductor chip forming process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019960031865U KR200165749Y1 (en) | 1996-09-30 | 1996-09-30 | Assembly and/or disassembly jig for isolation valve for semiconductor chip forming process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19980018453U true KR19980018453U (en) | 1998-07-06 |
| KR200165749Y1 KR200165749Y1 (en) | 2000-01-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019960031865U KR200165749Y1 (en) | 1996-09-30 | 1996-09-30 | Assembly and/or disassembly jig for isolation valve for semiconductor chip forming process |
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| Country | Link |
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| KR (1) | KR200165749Y1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100897038B1 (en) * | 2008-04-07 | 2009-05-14 | 인천도시가스주식회사 | Jig for disassembling and assembling valve of compressor |
-
1996
- 1996-09-30 KR KR2019960031865U patent/KR200165749Y1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100897038B1 (en) * | 2008-04-07 | 2009-05-14 | 인천도시가스주식회사 | Jig for disassembling and assembling valve of compressor |
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| Publication number | Publication date |
|---|---|
| KR200165749Y1 (en) | 2000-01-15 |
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