KR19980013648A - Semiconductor process condition storage device - Google Patents

Abstract

And more particularly, to a semiconductor process condition storage apparatus in which process conditions of various process facilities are managed with a single storage medium and reliability of data storage is improved.

The present invention is characterized in that the central processing unit and the control logic unit are interfaced as control means, the display unit keyboard and the driver are connected to the control unit through the data bus, the memory is connected to the driver, And is configured to store and load process conditions for connected process equipment.

Therefore, according to the present invention, since process condition management is efficiently performed through one storage medium and a large amount of process conditions are stored in the storage medium, management is easy, and stored data is stabilized, There is an effect that is maximized.

Description

Semiconductor process condition storage device

The present invention relates to a semiconductor process condition storage apparatus, and more particularly, to a semiconductor process condition storage apparatus in which process conditions of various process facilities are managed by a single storage medium and reliability of process condition data storage is improved .

In general, the EPROM module is configured to load the necessary conditions or system programs when the automatic etching process (LAM AUTO ETCH), which is a dry etching system of the semiconductor manufacturing line, It is used to store only one condition as a storage medium. For other devices in the semiconductor manufacturing line, another EPROM module was required when the process conditions were different. Therefore, in order to apply all EPROM modules to each facility, a number of EPROM modules and a system program master module corresponding to each device Respectively. However, the number of devices constituting the semiconductor manufacturing line has been so great that problems have arisen in the respective management and storage thereof.

Also, to store and load process conditions in a conventional EPROM module, an EPROM module is connected to the module insertion connector on the lower left of the front display unit of the facility, and a command for storing and loading is inputted, Storage and loading are performed. However, for other types of devices, it is necessary to prepare an EPROM module in which the condition of the device is stored, and a cumbersome and repetitive process of inserting the connector and inserting the connected module before the EPROM module is inserted. In this process, if the data stored in the EPROM is erased due to the contact resistance of the contactor and the module junction, or if the EPROM is damaged, the EPROM module can not be used due to its lifetime.

In this case, if there is no extra EEPROM module, the process condition must be input manually through the keyboard, which could result in erroneous setting of the process condition due to the input error. Therefore, there is a problem that the wafer on which the etching process is performed is defective and the yield is lowered.

It is an object of the present invention to provide a semiconductor process condition storage device capable of storing a plurality of process conditions or programs for various process equipments in one storage medium and easily storing and loading if necessary, I have to.

1 is a diagram showing an embodiment of a semiconductor process condition storage apparatus according to the present invention.

Description of the Related Art [0002]

10: central processing unit 12:

14: Data bus 16, 18: Driver

20: display unit 22: keyboard

24: Memory

According to another aspect of the present invention, there is provided an apparatus for storing semiconductor process conditions for interfacing with a process facility for manufacturing semiconductor devices, comprising: Means for loading data stored in the storage means through a communication port through which input / output of process conditions is performed, or drive means connected to the storage means for storing data to be backed-up from the external means, A display unit for displaying information including the date of creation of the data, the name of the process, and the creator; and a display unit, which is interfaced with the respective units and the data bus, Sikimyeo the data pohan the process conditions by controlling the operation storage and load, is achieved by control means for controlling so as to display the contents stored in said display portion.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 1, an embodiment of a semiconductor process condition storage apparatus according to the present invention includes a central processing unit 10 and a control circuit unit 12 connected to each other as a control means, The drivers 16 and 18 are connected to the display unit 20 and the keyboard 22 through the connected data bus 14. The drivers 16 and 18 are connected to the memory 24 together. The drivers 16 and 18 are connected to receive the write enable signal through the data bus 14 and are connected to the driver 18 Process condition module buses are interfaced to each other, and some of the data buses 14 are connected to the RS communication port.

In the embodiment of the present invention, a power supply for supplying a constant voltage of about 5 V is constructed in the usual manner. The display unit 20 is connected through a ribbon cable, and the RS communication port is connected to a general computer And is configured to be able to change the main body program of the embodiment by connecting to the serial port.

In addition, process conditions or other commands can be input through the keyboard 22, and the display unit 20 displays information such as the date on which the data was generated, the process name, and the creator.

In addition, the memory 24 configured by the embodiment of the present invention can store about 64 process conditions in the case of a nonvolatile RAM having a capacity of 1024 Kbytes, and the stored data can be stored for about 10 years.

When the power is turned off, the data is automatically protected, and more preferably, the power detection circuit is incorporated to ensure the power supply.

In addition, the display unit 20 adopts a liquid crystal display (LCD) and is easy to use, and the generation of particles is minimized by restoring the membrane keyboard.

Then, a description such as a creation date, a process name, or a creator name for the stored data can be added, and this can be confirmed on the display unit. The description field can be input up to 30 characters, including alphanumeric characters, and limited special characters can be used.

Therefore, the process conditions for each equipment used in the semiconductor manufacturing process can be easily stored in a single storage medium, and the stored data is preserved for a long time.

Therefore, the process conditions and the management of the storage medium are easy and the process conditions for loading are stabilized.

Therefore, according to the present invention, the process condition management is efficiently performed through one storage medium, and a large amount of process conditions are stored in the storage medium, so that the management is easy and the stored data is stabilized, There is an effect that this is maximized.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art.

Claims (1)

A semiconductor process condition storage device interfaced with a process facility for storing and loading process conditions for semiconductor manufacturing, comprising: storage means for storing data including process conditions; A drive means connected to the storage means for loading data stored in the storage means or storing data backed up externally through a shuttle port through which input and output of process conditions are performed; A keyboard having keys for inputting various commands and data; A display unit for displaying information including a date of generation of data, a process name, and a creator; A control unit which is interfaced with the data bus and controls the operations of the driving unit in accordance with a command input from the keyboard to store and load data including process conditions and to display the stored contents on the display unit, ; And the semiconductor process condition storage device.