KR102812044B1 - 임프린트 장치, 임프린트 방법, 물품 제조 방법 및 저장 매체 - Google Patents

임프린트 장치, 임프린트 방법, 물품 제조 방법 및 저장 매체 Download PDF

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KR102812044B1
KR102812044B1 KR1020210167967A KR20210167967A KR102812044B1 KR 102812044 B1 KR102812044 B1 KR 102812044B1 KR 1020210167967 A KR1020210167967 A KR 1020210167967A KR 20210167967 A KR20210167967 A KR 20210167967A KR 102812044 B1 KR102812044 B1 KR 102812044B1
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substrate
pattern
target shot
region
imprint
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KR20220083588A (ko
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겐지 요시다
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020210167967A 2020-12-11 2021-11-30 임프린트 장치, 임프린트 방법, 물품 제조 방법 및 저장 매체 Active KR102812044B1 (ko)

Applications Claiming Priority (2)

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JPJP-P-2020-205610 2020-12-11
JP2020205610A JP7581033B2 (ja) 2020-12-11 2020-12-11 インプリント装置、インプリント方法、物品の製造方法、およびコンピュータプログラム

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KR20220083588A KR20220083588A (ko) 2022-06-20
KR102812044B1 true KR102812044B1 (ko) 2025-05-23

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US (1) US12228855B2 (https=)
JP (1) JP7581033B2 (https=)
KR (1) KR102812044B1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160327857A1 (en) * 2014-01-21 2016-11-10 Canon Kabushiki Kaisha Imprint apparatus and method of manufacturing article

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5828626B2 (ja) * 2010-10-04 2015-12-09 キヤノン株式会社 インプリント方法
JP5868215B2 (ja) 2012-02-27 2016-02-24 キヤノン株式会社 インプリント装置およびインプリント方法、それを用いた物品の製造方法
JP6494185B2 (ja) * 2013-06-26 2019-04-03 キヤノン株式会社 インプリント方法および装置
JP6320183B2 (ja) * 2014-06-10 2018-05-09 キヤノン株式会社 インプリント装置、インプリント方法、および物品製造方法
JP6525567B2 (ja) * 2014-12-02 2019-06-05 キヤノン株式会社 インプリント装置及び物品の製造方法
JP6628491B2 (ja) * 2015-04-13 2020-01-08 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP2017157635A (ja) 2016-02-29 2017-09-07 キヤノン株式会社 インプリント装置及び物品の製造方法
JP2018029101A (ja) 2016-08-16 2018-02-22 キヤノン株式会社 インプリント装置、および物品製造方法
KR102369538B1 (ko) * 2017-09-28 2022-03-03 캐논 가부시끼가이샤 성형 장치 및 물품 제조 방법
JP7210155B2 (ja) 2018-04-16 2023-01-23 キヤノン株式会社 装置、方法、および物品製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160327857A1 (en) * 2014-01-21 2016-11-10 Canon Kabushiki Kaisha Imprint apparatus and method of manufacturing article

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US12228855B2 (en) 2025-02-18
US20220187702A1 (en) 2022-06-16
JP7581033B2 (ja) 2024-11-12
KR20220083588A (ko) 2022-06-20
JP2022092734A (ja) 2022-06-23

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