KR102673558B1 - Suction pad and suction pad assembly - Google Patents

Abstract

The present invention discloses a pad for suction. The present invention relates to a body having an opening extending in the longitudinal direction, a pad cover connected to one end of the body and extending in a radial direction of the body, and a plurality of protrusions protruding from the surface of the pad cover and parallel to the radial direction. and a suction pad including a first pattern unit disposed in a similar manner and a second pattern unit disposed on the pad cover closer to the opening than the first pattern unit.

Description

Suction pad and suction pad assembly {Suction pad and suction pad assembly}

The present invention relates to an adsorption pad and an adsorption pad assembly.

Generally, a transfer robot or the like is used to supply and unload a substrate to a processing device. For example, when adsorbing and transporting an adsorption object such as a glass plate, liquid crystal display panel substrate, resin plate-shaped molded product, or metal thin plate, a vacuum adsorption device can be used to adsorb the adsorption object.

A vacuum adsorption device is used to adsorb, desorb and transport products such as substrates, and is usually installed in a transport or mounting system or device to adsorb an object through direct connection with the object. The vacuum suction pad applied to the vacuum suction device generally consists of an suction port connected to the suction port of the vacuum pump and a flexible suction pad fixed to the end of the suction port, and absorbs the compressed air while it passes through the vacuum pump. As the air within the pad is drawn into the vacuum pump and discharged to the outside along with the compressed air, negative pressure is generated within the adsorption pad to adsorb the object.

At this time, the adsorbed state can be maintained initially, but the suction pad does not achieve close contact with the object, so the object falls off from the vacuum suction device during the transport or installation process, which not only delays the transport and installation work, Damage to the object can cause various problems, including economic loss. Accordingly, there is a growing demand for adsorption pads that can adsorb objects having various directions and angles and maintain airtightness for the objects.

Embodiments of the present invention can provide an adsorption pad that maintains stable suction power while securing a contact area in contact with the adsorbed object.

One aspect of the present invention includes a body having an opening extending in the longitudinal direction, a pad cover connected to one end of the body and extending in a radial direction of the body, and a plurality of protrusions protruding from the surface of the pad cover, A suction pad is provided, including a first pattern unit disposed side by side in a radial direction and a second pattern unit disposed on the pad cover closer to the opening than the first pattern unit.

Additionally, the first pattern unit includes a first pad protrusion disposed adjacent to the opening of the body and a second pad protrusion disposed outside the first pad protrusion in the radial direction, and the first pad protrusion and At least one of the second pad protrusions may change in height in the radial direction.

Additionally, the first pattern unit may further include a third pad protrusion disposed outside the second pad protrusion in the radial direction.

Additionally, side walls of the first pad protrusion and the second pad protrusion facing each other may be concave.

Additionally, the second pattern unit may include a support protrusion disposed outside the opening and a guide groove recessed in the support protrusion.

Additionally, the second pattern unit may further include a connector connecting the neighboring support protrusions.

In addition, it is arranged to circumnavigate the outside of the first pattern unit and may further include a sub-pattern recessed in the pad cover.

Another aspect of the present invention includes a shaft having a passage through which gas moves inside, and an adsorption pad disposed at one end of the shaft, wherein the adsorption pad includes a body having an opening extending in the longitudinal direction, the body of the body A pad cover connected to one end and extending in the radial direction of the body, a plurality of protrusions protruding from the surface of the pad cover, a first pattern unit arranged side by side in the radial direction, and the opening than the first pattern unit Provides a pad assembly for suction including a second pattern unit disposed adjacent to the pad cover.

In addition, it is disposed between the shaft and the body and may further include a connecting means having a thread.

Other aspects, features and advantages in addition to those described above will become apparent from the following drawings, claims and detailed description of the invention.

The suction pad according to the present invention may be provided with a first pattern unit and a second pattern unit on the suction surface to secure the surface area of the suction surface and not disturb the smooth air flow in the suction space.

1 is a conceptual diagram schematically showing a substrate adsorption device according to an embodiment of the present invention.
Figure 2 is a perspective view of the suction pad assembly of Figure 1;
Figure 3 is a perspective view of the suction pad of Figure 2.
Figure 4 is a cross-sectional view of the suction pad of Figure 3.
FIG. 5 is a view showing the bottom of the suction pad of FIG. 3.
FIG. 6 is a cross-sectional view taken along line XX' of FIG. 5.
Figure 7 is an enlarged view of area A of Figure 5.
Figure 8 is a cross-sectional view taken along Y-Y' of Figure 7.

Hereinafter, the configuration and operation of the present invention will be described in detail with reference to embodiments of the present invention shown in the attached drawings.

Since the present invention can be modified in various ways and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the drawings, identical or corresponding components will be assigned the same reference numerals and redundant description thereof will be omitted. .

In the following embodiments, terms such as first and second are used not in a limiting sense but for the purpose of distinguishing one component from another component.

In the following examples, singular terms include plural terms unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have mean the presence of features or components described in the specification, and do not exclude in advance the possibility of adding one or more other features or components.

In the drawings, the sizes of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are shown arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is shown.

FIG. 1 is a conceptual diagram schematically showing a substrate adsorption device according to an embodiment of the present invention, FIG. 2 is a perspective view of the adsorption pad assembly of FIG. 1, and FIG. 3 is a perspective view of the adsorption pad of FIG. 2.

1 to 2, the substrate adsorption device 1 may include an adsorption pad assembly 10 connected to the first pipe 20A, the second pipe 20B, and the third pipe 20C. there is.

The substrate adsorption device 1 according to the present invention is a device used when transporting the substrate SB from a predetermined stage to the next stage. The substrate adsorption device 1 may include an adsorption pad assembly 10 having an adsorption pad 100 in contact with the substrate SB in order to transfer the substrate SB.

The substrate adsorption device 1 is mounted on an external structure and can adsorb and move the substrate SB using the suction force of the adsorption pad assembly 10. For example, the substrate adsorption device 1 may transport the substrate SB for a processing process of the substrate SB.

For example, the substrate adsorption device 1 performs a process of cutting the substrate SB into a predetermined number of dividing elements, a process of removing the edges formed when the substrate SB is cut, and a process of removing the edges formed when the substrate SB is cut. ), such as cleaning the surface. The substrate SB is transferred to a predetermined stage at each processing stage, and when processing is completed, it may be transferred to another stage for the next processing.

For example, the substrate SB may be made of a brittle material substrate such as a glass substrate or a ceramic substrate, or a resin substrate such as a PET (polyethylene terephthalate resin) substrate or a polyimide resin substrate. Additionally, the substrate SB may include a metal plate. As an example, the substrate SB may be a metal plate that forms frames and structural components of ships, aircraft, automobiles, and home appliances. For example, the material of the metal sheet may be made of high-strength steel or hardenable steel alloy, or may be a non-ferrous metal sheet such as aluminum or magnesium. Additionally, the metal sheet may be a flat metal sheet having a set thickness or a curved metal sheet. However, the shape and material of the substrate SB are not limited to this and may be appropriately selected depending on the purpose.

The substrate adsorption device 1 can transfer the substrate SB to a later process in the process and transfer it to the next processing process after the process is completed.

The substrate adsorption device 1 may form an adsorption structure for transporting the substrate SB by connecting the first pipe 20A and the second pipe 20B. Additionally, a plurality of joints inserted into the first pipe 20A and the second pipe 20B may be connected along the same axis to form an adsorption structure to fit the shape of the substrate SB. The joints constituting the substrate adsorption device 1 can vary the arrangement of the adsorption pad assembly 10 on which it is mounted.

Referring to Figures 2 and 3, a plurality of suction pad assemblies 10 may be mounted on the substrate adsorption device 1, and each suction pad assembly 10 connected to the plurality of joints is provided. A suction line 12 may be provided for each assembly 10.

The adsorption pad assembly 10 may include a shaft 11 and an adsorption pad 100. Specifically, the adsorption pad assembly 10 may be provided with a structure having an intake pipe through which gas sucked from the adsorption pad 100 installed at one end passes.

The shaft 11 may have a passage through which gas moves therein. The shaft 11 may connect the suction pad 100 and the suction line 12 in contact with the substrate SB. Additionally, in an optional embodiment, the shaft 11 may have a structure in which portions of the shaft 11 are overlapped and inserted to alleviate shock during transportation.

The suction pad 100 may be disposed at one end of the shaft 11. The suction pad 100 can directly contact the substrate SB to adsorb and fix the substrate SB. For example, the suction pad 100 may have a hemispherical shape and may be made of a material with elasticity to relieve impact.

FIG. 4 is a cross-sectional view of the suction pad of FIG. 3, FIG. 5 is a view showing the bottom of the suction pad of FIG. 3, and FIG. 6 is a cross-sectional view taken along line XX' of FIG. 5.

Referring to FIGS. 4 to 6 , the suction pad 100 may include a body 101, a pad cover 102, a first pattern unit 110, and a second pattern unit 120. The suction pad 100 may be disposed between the suction line 12 and the object. The adsorption pad 100 may form a passage through which negative pressure fluid flows. The suction pad 100 is formed to have an area in contact with a portion of the object, and is mounted to cover the object, so that it can have an adsorption force for transport.

The body 101 is connected to the shaft 11 to secure the pad cover 102. The body 101 may be connected to the shaft 11 at one end, and the other end may be connected to the pad cover 102. The body 101 may form a passage for exhausting gas by forming an intake port at the center of the pad cover 102. For example, the body 101 may have a first opening 101H extending in the longitudinal direction. The first opening 101H extends to have a predetermined diameter and may form a passage through which gas flows in the space sealed by the pad cover 102. In addition, the body 101 may be provided with a coupling means for coupling to the shaft 11 at one end to enable easy attachment and detachment of the suction pad 100.

As an example, the suction pad assembly 10 is disposed between the shaft 11 and the body 101 and may further include a connection means (not shown) having a thread. The body 101 may be integrally coupled with the shaft 11 through a connecting means (not shown). A connecting means (not shown) coupled to the body 101 may be installed on the inner or outer peripheral surface of the body 101 or the inner or outer peripheral surface of the shaft 11. For example, the connecting means (not shown) may be provided as an insert socket type in which one end is connected to the outer peripheral surface of the body 101 and the other end is inserted into the inner peripheral surface of the shaft 11. The connecting means (not shown) may have threads on its outer and inner surfaces. That is, the connecting means (not shown) connecting the body 101 and the shaft 11 may be interconnected by providing a female connection part or a male connection part. A connecting means (not shown) provided as an insert socket type can be separated or mounted on the body 101 and the shaft 11 by rotating in one direction.

The suction pad 100 can be easily mounted on or detached from the shaft 11 through a connection means (not shown) mounted on the body 101. When the suction pad 100 is worn or the suction pad assembly 10 ) can be easily connected and disconnected when performing maintenance, effectively saving work time.

The pad cover 102 is connected to one end of the body 101 and may be configured to extend in the radial direction of the body 101. The pad cover 102 forms a suction port connected to the body 101 and may form a contact surface with the object. The pad cover 102 has one side open toward an object and may be formed to have depth on the inside. The pad cover 102 may be in close contact with the top of the object and block air flow outside the pad cover 102.

When the pad cover 102 vertically descends or rises to adsorb an object, it is elastically supported so that it can move slightly in an oblique direction with the body 101, so the pad cover 102 is secure even if the surface of the object is curved. It can be easily absorbed. The pad cover 102 may be made of soft elastic rubber, silicone, or synthetic resin to increase the volume of the contact surface with the object. However, the material of the pad cover 102 is not limited to this and various materials may be used.

The adsorption pad 100 can induce a flow of gas between the object and the pad cover 102. For example, the pad cover 102 may have a repeating pattern on the surface that contacts the object. The pad cover 102 can reliably adsorb the substrate SB even if the surface of the substrate SB is curved due to a pattern repeatedly formed on the same surface. Accordingly, a complete vacuum state of the object and the pad cover 102 can be maintained.

The pad cover 102 forms a gas flow passage between the shaft 11 and the object, and may be formed with a step. Specifically, the pad cover 102 may be shaped to have an outer diameter that gradually enlarges from the body 101 and the connection end. The diameter of the adsorption surface that adsorbs the object may have the largest diameter, but the part through which the gas passes may be formed with a relatively small diameter. Accordingly, the surface in contact with the adsorbed object becomes wider, enabling stable adsorption, and as the diameter decreases, the path through which the gas flows can be guided in one direction.

The pad cover 102 may have a folded section. The pad cover 102 has elasticity so that it can be folded or bent, and the gap can be widened or narrowed to have elasticity in a rising or falling direction. In detail, the pad cover 102 may have at least one foldable section. By opening or folding the folded section of the pad cover 102 at a predetermined angle, the path through which gas is sucked can be appropriately adjusted.

The pad cover 102 may have a second opening 102H having a larger diameter than the first opening 101H. Additionally, the pad cover 102 may have a larger radius than the second opening 102H to form an adsorption surface. The adsorption surface may have an enlarged diameter from the second opening 102H and may have an inclined surface inclined at a certain angle. That is, the pad cover 102 may have a smaller cross-sectional area as it rises from the suction surface to the top.

The pad cover 102 may have a plurality of patterned protrusions formed on the suction surface. The pattern continuously formed on the pad cover 102 can prevent the object from leaving and increase its robustness. In addition, the plurality of pattern protrusions formed on the pad cover 102 can absorb shock when contacting the substrate SB and secure the contact surface with the substrate SB as much as possible.

The first pattern unit 110 may be disposed on the suction surface of the pad cover 102. The first pattern unit 110 may have a plurality of protrusions protruding from the surface of the pad cover 102 and arranged side by side in the radial direction. The first pattern unit 110 may be arranged along the suction surface of the pad cover 102. The first pattern unit 110 may be arranged to be spaced apart from the neighboring first pattern unit 110 by a predetermined distance.

Specifically, the first pattern units 110 may be continuously arranged in the circumferential direction of the pad cover 102. The first pattern units 110 arranged adjacently are arranged at a predetermined angle with respect to the central axis of the pad cover 102. That is, by allowing gas to flow between the first pattern unit 110 and the neighboring first pattern unit 110, the gas in the receiving space formed by contact with the pad cover 102 can be guided to form an intake airflow. .

As the area in contact with the object increases, the adsorption power can increase. Therefore, in order to fix the adsorption state of the substrate SB, it is necessary to sufficiently increase the area in contact with the substrate SB so that the adsorption force acting on the area covered by the pad cover 102 is large. However, in the case of a conventional suction pad that directly adheres the suction surface to the object, the adsorption may be released due to the flow of the substrate SB during adsorption or transfer of the substrate SB having a curved surface. In other words, simply expanding the adsorption range acting on the substrate SB may cause the axis center to become distorted and deviate during the transfer operation.

The suction pad 100 of the present invention arranges the first pattern unit 110 and the second pattern unit 120 protruding on the surface of the suction surface to maximize the contact surface with the substrate SB. ) and the adsorption surface can be sucked in. Air flowing between the first pattern unit 110 and the adjacent first pattern unit 110 may pass between the second pattern unit 120 inside the pad cover 102 and through the suction line 12.

Figure 7 is an enlarged view of area A of Figure 5, and Figure 8 is a cross-sectional view taken along Y-Y' of Figure 7.

Referring to FIGS. 7 and 8 , the first pattern unit 110 may have an arrangement such that gas flows in a constant direction.

The first pattern unit 110 may include a first pad protrusion 111, a second pad protrusion 112, and a third pad protrusion 113.

The first pattern unit 110 protrudes from the inclined surface of the pad cover 102, and the maximum height protruding from the surface of the pad cover 102 may have different heights.

The first pad protrusion 111 may be disposed adjacent to the first opening 101H of the body 101. The first pad protrusion 111 may have a first width 111w and a first length 111L. The first pad protrusion 111 is disposed innermost in the first pattern unit 110 and may have the highest protrusion height. The first pad protrusion 111 adjacent to the center of the suction pad 100 protrudes the highest and can receive the greatest pressure.

The first pad protrusion 111 may have a different height on one side and a different height on the other side. Specifically, the protrusion height of the side wall facing the second pad protrusion 111 and the protrusion height of the opposite side of the first pad protrusion 111 may be different. The first pad protrusion 111 protrudes at a first height h1, and the first pad protrusion 111 has a first inclination angle S1 and is provided in a shape partially inclined toward the second pad protrusion 112. You can.

The second pad protrusion 112 may be disposed radially outside the first pad protrusion 111 . The second pad protrusion 112 may be disposed between the first pad protrusion 111 and the third pad protrusion 113. Additionally, the second pad protrusion 112 may be provided in a concave shape on both sides. Specifically, the protruding height of the sidewall of the second pad protrusion 112 facing the first pad protrusion 111 may be different from that of the sidewall facing the third pad protrusion 113 . The second pad protrusion 112 protrudes to a second height h2, and the second pad protrusion 112 has a second inclination angle S2 and is provided in a shape partially inclined toward the third pad protrusion 113. You can.

The third pad protrusion 113 may be disposed outside the second pad protrusion 112 in the radial direction. One side of the third pad protrusion 113 protrudes to a third height h3, and its cross section may have a protruding shape with a third inclination angle S3.

Referring again to FIG. 7 , the first pattern unit 110 may be formed to have approximately the same width. Specifically, the first pad protrusion 111 may be formed to have a first width 111w and a first length 111L. The second pad protrusion 112 may have a second width (112w) and a second length (112L), and the third pad protrusion 113 may have a third width (113w) and a third length (113L). . At this time, the first pad protrusion 111, the second pad protrusion 112, and the third pad protrusion 113 may have the same width. Additionally, the third length 113L of the third pad protrusion 113 may be formed to be larger than the lengths of the first pad protrusion 111 and the second pad protrusion 112.

The first pattern unit 110 forms a passage through which gas passes through the first pad protrusion 111, second pad protrusion 112, and third pad protrusion 113, which are partially formed with different thicknesses, thereby allowing gas to pass through. The flow can be discharged more efficiently.

Additionally, side walls of the first pad protrusion 111 and the second pad protrusion 112 facing each other may be formed to be concave.

Specifically, the side wall where the first pad protrusion 111 faces the second pad protrusion 112 is defined as the first side wall W1, and the second pad protrusion 112 faces the first pad protrusion 111. The sidewall viewed can be defined as the second sidewall (W2). When the first pad protrusion 111 and the second pad protrusion 112 are viewed from a plane, the first side wall (W1) is formed to be recessed inside the first pad protrusion 111, and the second side wall (W2) may have a shape recessed inside the second pad protrusion 112. Since the first side wall (W1) and the second side wall (W2) are provided in a substantially arch-like shape when viewed from a plane, they can form a support for the adsorption surface but do not interfere with the flow of air in the adsorption space.

Referring to FIG. 8, the cross-sectional shape of the first side wall (W1) is formed with a concave slope toward the inside of the first pad protrusion 111, and the cross-sectional shape of the second side wall (W2) is formed to be concavely inclined toward the inside of the first pad protrusion (111). 112) may protrude at an angle from the bottom.

The second pad protrusion 112 has a third side wall W3 facing the third pad protrusion 113, and the third side wall W3 is formed to be inclined toward the inside of the second pad protrusion 112. You can. It may protrude parallel to the fourth side wall (W4) facing the third side wall (W3).

That is, the first pattern units 110 protrude from the surface of the pad cover 102, but are all formed to be inclined outward in the radial direction of the pad cover 102. As a result, the first pattern unit 110 becomes relatively thick as it approaches the central axis of the pad cover 102, and has a different inclination angle from the surface of the pad cover 102, so that it is uniformly applied to the substrate SB. A contact surface can be formed.

The second pattern unit 120 may be disposed on the pad cover 102 closer to the first opening 101H than the first pattern unit 110.

The second pattern unit 120 is disposed closest to the body 101 and can guide the air in the adsorption space toward the body 101.

The second pattern unit 120 may include a support protrusion 121, a guide groove 122, and a connector 123. The second pattern unit 120 may be provided in a shape in which support protrusions 121 and connectors 123 are continuously arranged. In the second pattern unit 120, support protrusions 121 and connectors 123 may be alternately arranged in the radial direction around the first opening 101H.

The support protrusion 121 may be disposed outside the first opening 101H. The support protrusion 121 is arranged along the edge of the first opening 101H and may protrude to a predetermined height.

The guide groove 122 may be provided in a recessed shape in the support protrusion 121. The guide groove 122 may be partially recessed from the protruding surface of the support protrusion 121. At this time, the recessed shape of the guide groove 122 may be higher than or have the same height as the surface of the connector 123. Additionally, the depressed shape of the guide groove 122 is continuously arranged with the support protrusion 121, thereby forming a groove connected around the first opening 101H. Accordingly, the second pattern unit 120 may form a flow path that guides the flow of gas around the first opening 101H.

The connector 123 may be provided in a shape to connect neighboring support protrusions 121. The connector 123 protrudes between successive support protrusions 121 and may be arranged to have a protrusion height that is relatively lower than that of the support protrusions 121 .

Additionally, the second pattern unit 120 and the first pattern unit 110 may be arranged so that their arrangement positions are staggered. For example, the second pattern unit 120 may be disposed between the first pattern unit 110 and the neighboring first pattern unit 110 . Specifically, the support protrusions 121 and the first pattern unit 110 may be provided in a cross-arranged position so as not to be arranged in a straight line. Accordingly, the gas flowing between the first pattern units 110 naturally forms an airflow that is collected between the second pattern units 120. That is, the first pattern unit 110 and the second pattern unit 120 form a flow path for gas to be sucked into the suction pad 100, so that gas in the adsorption space can be quickly suctioned.

The suction pad 100 may further include a sub-pattern 130 recessed in the pad cover 102.

The sub-pattern 130 may be arranged to circle around the outside of the first pattern unit 110. The sub-pattern 130 may be disposed adjacent to the edge of the pad cover 102. The sub-pattern 130 forms a recessed groove in the thickness direction of the pad cover 102, and a portion of the sub-pattern 130 may form a line extending between the arranged first pattern units 110.

The suction pad 100 of the present invention may be provided with a first pattern unit 110 and a second pattern unit 120 on the suction surface adsorbed to the substrate SB. Accordingly, the continuous protrusion pattern can contact the upper surface of the substrate SB to strengthen the adsorption force. Additionally, the first pattern unit 110 and the second pattern unit 120 may be provided so as to secure the surface area of the adsorption surface and not disturb the smooth air flow in the adsorption space. That is, the substrate SB is not separated from the suction pad 100 and can remain adsorbed on the suction pad 100 with a strong suction force.

As such, the present invention has been described with reference to the embodiments shown in the drawings, but these are merely illustrative, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. . Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

Specific implementations described in the embodiments are examples and do not limit the scope of the embodiments in any way. Additionally, if there is no specific mention such as “essential,” “important,” etc., it may not be a necessary component for the application of the present invention.

In the specification of the embodiments (particularly in the claims), the use of the term “above” and similar referential terms may refer to both the singular and the plural. In addition, when a range is described in an example, the invention includes the application of individual values within the range (unless there is a statement to the contrary), and is the same as describing each individual value constituting the range in the detailed description. . Lastly, unless the order of the steps constituting the method according to the embodiment is clearly stated or there is no description to the contrary, the steps may be performed in an appropriate order. The embodiments are not necessarily limited by the order of description of the steps above. The use of any examples or illustrative terms (e.g., etc.) in the embodiments is merely for describing the embodiments in detail, and unless limited by the claims, the scope of the embodiments is not limited by the examples or illustrative terms. That is not the case. Additionally, those skilled in the art will recognize that various modifications, combinations, and changes may be made according to design conditions and factors within the scope of the appended claims or their derivatives.

1: Substrate adsorption device
10: Suction pad assembly
100: Suction pad
101: body
102: Pad cover
110: first pattern unit
120: second pattern unit

Claims (9)

a body having an opening extending in the longitudinal direction;
a pad cover connected to one end of the body and extending in a radial direction of the body;
a first pattern unit in which a plurality of protrusions protrude from the surface of the pad cover and are arranged side by side in the radial direction; and
It includes a second pattern unit disposed on the pad cover closer to the opening than the first pattern unit.
The first pattern unit is
a first pad protrusion disposed adjacent to the opening of the body; and
and a second pad protrusion disposed outside the first pad protrusion in the radial direction,
At least one of the first pad protrusion and the second pad protrusion changes in height in the radial direction,
The first pad protrusion and the second pad protrusion have concave side walls facing each other. delete According to claim 1,
The first pattern unit is
A suction pad further comprising a third pad protrusion disposed outside the second pad protrusion in the radial direction. delete According to claim 1,
The second pattern unit is
a support protrusion disposed outside the opening; and
A suction pad comprising: a guide groove recessed in the support protrusion. According to clause 5,
The second pattern unit is
A suction pad further comprising a connector connecting the neighboring support protrusions. According to claim 1,
A suction pad further comprising: a sub-pattern disposed to circumnavigate the outside of the first pattern unit and recessed in the pad cover. A shaft having a passage through which gas moves therein; and
It includes a suction pad disposed on one end of the shaft,
The adsorption pad is
A shaft having a passage through which gas moves inside an opening extending in the longitudinal direction; and
It includes a suction pad disposed on one end of the shaft,
The adsorption pad is
a body having an opening extending in the longitudinal direction;
a pad cover connected to one end of the body and extending in a radial direction of the body;
a first pattern unit in which a plurality of protrusions protrude from the surface of the pad cover and are arranged side by side in the radial direction; and
A second pattern unit disposed on the pad cover closer to the opening than the first pattern unit,
The first pattern unit is
a first pad protrusion disposed adjacent to the opening of the body; and
and a second pad protrusion disposed outside the first pad protrusion in the radial direction,
At least one of the first pad protrusion and the second pad protrusion changes in height in the radial direction,
The first pad protrusion and the second pad protrusion have concave side walls facing each other. According to clause 8,
A suction pad assembly further comprising a connecting means disposed between the shaft and the body and having a thread.

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