KR102671930B1 - Apparatus and method for detecting operation fault of the device power supply in the automatic test equipment - Google Patents

Abstract

The present invention is a semiconductor test equipment device power supply implemented to detect malfunctions of a device power supply (DPS) in automatic test equipment (ATE) using a digital decision circuit rather than the existing analog circuit method. This relates to a device and method for detecting malfunction of a power supply, wherein the digital judgment circuit receives the output current value or output voltage value converted to digital by an analog-to-digital converter and compares it with a preset digital limit value to determine malfunction of the device power supply. It determines whether or not

Description

Apparatus and method for detecting operation fault of the device power supply in the automatic test equipment}

The technical field of the present invention relates to an apparatus and method for detecting malfunction of a device power supply of semiconductor test equipment. In particular, in semiconductor test equipment (automatic test equipment (ATE)), device power supply is detected using a digital decision circuit rather than the existing analog circuit method. It relates to an apparatus and method for detecting malfunction of a device power supply of semiconductor inspection equipment implemented to detect malfunction of a device power supply (DPS).

The device power supply (DPS) in semiconductor test equipment (automatic test equipment (ATE)) uses a DAC (Digital Analog Converter) to determine PCL (Plus(+) Current Limit Level; +Current Limit Level). Level (voltage)) and NCL (Minus(-) Current Limit Level (voltage)) limit values are set, and output is input to ADC (Analog Digital Converter) using an analog comparator. By comparing the current with the limit value, it determines whether +overcurrent or -overcurrent has occurred, and outputs a +overcurrent generation signal (PCF; +Over-Current Fault) or a -overcurrent generation signal (NCF; -Over-Current Fault).

The semiconductor inspection equipment device power supply described above uses a DAC to determine the limit values of OVL (Over-voltage limit level) and UVL (Under-voltage limit level). setting, and using an analog comparator, compare the output voltage input to the ADC with the limit value to determine whether overvoltage or undervoltage has occurred, and generate an overvoltage occurrence signal (OVF; Over-Voltage Fault) or an undervoltage occurrence signal (UVF; Under-Voltage Fault). Voltage Fault) can also be output.

Korean Patent No. 10-0648275 (registered on November 14, 2006) shortens the time during which overcurrent flows in the power supply unit by allowing a power-off operation signal to be applied to the relay control unit quickly without a test controller command after overcurrent detection. In addition, a semiconductor test device for protecting expensive semiconductor test equipment is disclosed. A semiconductor test device that is connected to a test controller and tests a semiconductor device under the control of the test controller, responds to the control of the test controller. a power supply unit that generates power to be supplied to the semiconductor device; an overcurrent detection unit that detects whether overcurrent is supplied from the output of the power supply unit; A probe card that connects a semiconductor device and a semiconductor test device; and a relay connected between the power supply unit and the probe card and transmitting power from the power supply unit to the semiconductor device according to the detection result of the overcurrent detection unit. According to the disclosed technology, when overcurrent occurs due to a defective product in a device power supply for semiconductor testing, the control method is changed to block the power relay of the device without a test controller command after detecting the overcurrent, thereby reducing the test time. In addition, because overcurrent is cut off more quickly, expensive test equipment can be protected.

Korean Patent No. 10-1724551 (registered on April 3, 2017) discloses a semiconductor test device interface board that implements a power protection circuit that can operate at low voltage without a separate additional power source. According to the disclosed technology, a power protection circuit for detecting overcurrent in the power supplied through the input terminal from the power supply device of the semiconductor inspection equipment and blocking the power supplied to the DUT through the output terminal; And the input terminal is connected to the input terminal of the power protection circuit, and the output terminal is connected to the ground terminal of the power protection circuit, so that the positive voltage is provided through the input terminal and converted to a negative voltage, and the power protection circuit is provided through the output terminal. By including a positive-negative voltage converter for output to the ground terminal of the device, it can operate at low voltage under the same voltage or power resource conditions as before, and also prevents damage due to overcurrent, and is a semiconductor test device. By embedding a low-voltage operation power protection circuit (i.e., a power protection circuit with a low operating voltage) on the interface board, damage due to overcurrent can be prevented under the same voltage or power resource conditions as before without adding a separate power source to the semiconductor test device interface board. can be prevented.

As described above, the device power supply in conventional semiconductor inspection equipment compares the output voltage with the over-voltage limit and under-voltage limit using an analog comparator (or comparison circuit). , Compare the output current with the over-current limit to determine whether it operates normally or whether there is an abnormality. Here, the limit value is generally set by DAC. In order to recognize malfunctions of the device power supply in real time in existing semiconductor inspection equipment, an analog comparator (or comparison circuit) is used. In other words, the conventional technology as described above had the disadvantage that in the case of a semiconductor inspection equipment device power supply, the number of DACs to set the limit value increased and unnecessary analog circuits also existed.

Korean Patent No. 10-0648275 Korean Patent No. 10-1724551

The problem to be solved by the present invention is to solve the above-described shortcomings. In semiconductor test equipment (automatic test equipment; ATE), a device power supply is provided using a digital decision circuit rather than the existing analog circuit method. To provide an apparatus and method for detecting malfunction of a semiconductor inspection equipment device power supply implemented to detect malfunction of DPS).

As a means of solving the above-described problem, according to one feature of the present invention, the output current value or output voltage value converted to digital by the analog-to-digital converter is input and compared with a preset digital limit value to determine the device power supply. Provided is a device for detecting malfunction of a semiconductor inspection equipment device power supply that includes a digital judgment circuit for determining malfunction.

In one embodiment, the device for detecting malfunction of the semiconductor inspection equipment device power supply includes a selection circuit for periodically selecting one of the output current and output voltage input to the analog-to-digital converter and inputting it to the analog-to-digital converter. It is characterized by including more.

In one embodiment, the analog-to-digital converter receives the output current or output voltage selected through the selection circuit, converts it into digital, and applies the output current or output voltage to the digital judgment circuit through a digital bus. It is characterized by

In one embodiment, the digital judgment circuit unit is characterized in that the digital limit value is preset and stored in a register.

In one embodiment, the digital decision circuit unit is characterized in that it detects whether the device power supply is malfunctioning using a digital decision circuit that operates digitally.

In one embodiment, the digital decision circuit uses a digital decision circuit to compare the output current value or output voltage value converted to digital by the analog-to-digital converter with a digital limit value stored in a register to operate the device power supply. It is characterized by determining the presence or absence of defects.

In one embodiment, the digital decision circuit unit periodically monitors the output current value or output voltage value converted to digital by the analog-to-digital converter using a digital decision circuit.

In one embodiment, the digital decision circuit unit periodically reads the output current value or output voltage value converted to digital by the analog-to-digital converter using a digital decision circuit, compares it with the digital limit value stored in the register, and powers the device. It is characterized by determining whether there is a malfunction of the supply machine.

In one embodiment, the digital judgment circuit unit is characterized by having a plurality of registers to determine the degree of malfunction of the device power supply in multiple stages.

In one embodiment, the digital judgment circuit periodically stores the output current value or output voltage value converted to digital by the analog-to-digital converter in a buffer, and determines the output current value or output voltage value stored in the buffer in time. It is characterized by checking the change in current or voltage.

In one embodiment, the digital judgment circuit unit includes a +current limit register that stores a limit value of the +current limit level; -Current limit register, which stores the limit value of the current limit level; an overvoltage limit register that stores the limit value of the overvoltage limit level; a low-voltage limit register that stores the limit value of the low-voltage limit level; A first digital judge that compares the output current value applied from the analog-to-digital converter with the limit value of the +current limit level stored in the +current limit register to determine whether a +overcurrent has occurred and outputs a +overcurrent occurrence signal; A second digital judge that determines whether an overcurrent has occurred by comparing the output current value applied from the analog-to-digital converter with the limit value of the current limit level stored in the -current limit register and outputs an overcurrent occurrence signal; A third digital judge that determines whether an overvoltage has occurred by comparing the output voltage value applied from the analog-to-digital converter with a limit value of the overvoltage limit level stored in the overvoltage limit register and outputs an overvoltage occurrence signal; And a fourth digital judge that determines whether low voltage has occurred by comparing the output voltage value applied from the analog-to-digital converter with the limit value of the low voltage limit level stored in the low voltage limit register and outputs a low voltage occurrence signal. Do it as

In one embodiment, the digital judgment circuit unit includes a +current limit register that stores a limit value of the +current limit level; -Current limit register, which stores the limit value of the current limit level; an overvoltage limit register that stores the limit value of the overvoltage limit level; a low-voltage limit register that stores the limit value of the low-voltage limit level; a first selector that selects one of a limit value of the +current limit level stored in the +current limit register and a limit value of the overvoltage limit level stored in the overvoltage limit register; a second selector that selects one of the current limit level limit value stored in the -current limit register and the low voltage limit level limit value stored in the low voltage limit register; The output current value applied from the analog-to-digital converter is compared with the limit value of the +current limit level selected by the first selector to determine whether a +overcurrent has occurred and output a +overcurrent occurrence signal, and the A first digital judge that determines whether overvoltage has occurred by comparing the output voltage value with the limit value of the overvoltage limit level selected by the first selector and outputs an overvoltage occurrence signal; And compares the output current value applied from the analog-to-digital converter with the limit value of the current limit level selected by the second selector to determine whether an overcurrent has occurred and outputs an overcurrent occurrence signal, which is applied from the analog-to-digital converter. It is characterized by a second digital judge that determines whether low voltage has occurred by comparing the output voltage value and the limit value of the low voltage limit level selected in the second selector and outputs a low voltage generation signal.

In one embodiment, the digital judgment circuit unit includes a +current limit register that stores a limit value of the +current limit level; -Current limit register, which stores the limit value of the current limit level; an overvoltage limit register that stores the limit value of the overvoltage limit level; a low-voltage limit register that stores the limit value of the low-voltage limit level; The limit value of the +current limit level stored in the +current limit register, the limit value of the -current limit level stored in the -current limit register, the limit value of the overvoltage limit level stored in the overvoltage limit register, and the low voltage limit register. a selector for selecting one of the limit values of the low voltage limit level stored in; And the output current value applied from the analog-to-digital converter is compared with the limit value of the +current limit level selected in the selector to determine whether a +overcurrent has occurred and output a +overcurrent occurrence signal, and the output applied from the analog-to-digital converter. It determines whether an overcurrent has occurred by comparing the current value with the limit value of the current limit level selected by the selector, and outputs an overcurrent occurrence signal. The output voltage value applied from the analog-to-digital converter and the overvoltage limit selected by the selector It determines whether an overvoltage has occurred by comparing the limit value of the level and outputs an overvoltage generation signal, and determines whether an undervoltage has occurred by comparing the output voltage value applied from the analog-to-digital converter with the limit value of the low voltage limit level selected by the selector. It is characterized by having a digital judge that outputs a low voltage generation signal.

As a means of solving the above-described problem, according to another feature of the present invention, a selection circuit periodically selects one of the output current and output voltage input to the analog-to-digital converter and inputs it to the analog-to-digital converter; The analog-to-digital converter receives the selected output current or output voltage through the selection circuit, converts it into digital, and applies the output current or output voltage to the digital judgment circuit through a digital bus; And the digital judgment circuit receives the output current value or output voltage value converted to digital by the analog-to-digital converter and compares it with a preset digital limit value to determine whether the device power supply is malfunctioning. Provides a method for detecting malfunctions in the power supply of semiconductor inspection equipment devices.

The effect of the present invention is to detect malfunctions in the device power supply (DPS) of a semiconductor device in automatic test equipment (ATE) using a digital decision circuit rather than the existing analog circuit method. By providing a device and method for detecting malfunctions of the inspection equipment device power supply, it is possible to reduce the number of DACs (Digital Analog Converters) and eliminate unnecessary analog circuits.

1 is a diagram illustrating a device for detecting malfunction of a semiconductor inspection equipment device power supply according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating the digital judgment circuit in FIG. 1 as a first example.
FIG. 3 is a diagram illustrating the digital judgment circuit in FIG. 1 as a second example.
FIG. 4 is a diagram illustrating the digital judgment circuit in FIG. 1 as a third example.
Figure 5 is a diagram explaining a method for detecting malfunction of a semiconductor inspection equipment device power supply according to an embodiment of the present invention.

Below, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily implement the present invention. However, since the description of the present invention is only an example for structural and functional explanation, the scope of the present invention should not be construed as limited by the examples described in the text. In other words, since the embodiments can be modified in various ways and can have various forms, the scope of rights of the present invention should be understood to include equivalents that can realize the technical idea. In addition, the purpose or effect presented in the present invention does not mean that a specific embodiment must include all or only such effects, so the scope of the present invention should not be understood as limited thereby.

The meaning of terms described in the present invention should be understood as follows.

Terms such as “first” and “second” are used to distinguish one component from another component, and the scope of rights should not be limited by these terms. For example, a first component may be named a second component, and similarly, the second component may also be named a first component. When a component is referred to as being “connected” to another component, it should be understood that it may be directly connected to the other component, but that other components may also exist in between. On the other hand, when a component is referred to as being “directly connected” to another component, it should be understood that there are no other components in between. Meanwhile, other expressions that describe the relationship between components, such as "between" and "immediately between" or "neighboring" and "directly neighboring" should be interpreted similarly.

Singular expressions should be understood to include plural expressions, unless the context clearly indicates otherwise, and terms such as “comprise” or “have” refer to the specified features, numbers, steps, operations, components, parts, or them. It is intended to specify the existence of a combination, and should be understood as not excluding in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

All terms used herein, unless otherwise defined, have the same meaning as commonly understood by a person of ordinary skill in the field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as consistent with the meaning they have in the context of the related technology, and cannot be interpreted as having an ideal or excessively formal meaning unless clearly defined in the present invention.

Now, an apparatus and method for detecting malfunction of a semiconductor inspection equipment device power supply according to an embodiment of the present invention will be described in detail with reference to the drawings.

1 is a diagram illustrating a device for detecting malfunction of a semiconductor inspection equipment device power supply according to an embodiment of the present invention.

Referring to FIG. 1, the apparatus 100 for detecting malfunction of a semiconductor inspection equipment device power supply includes a digital judgment circuit unit 110 and a selection circuit unit 120.

The digital judgment circuit unit 110 receives the output current value or output voltage value converted to digital by an analog-to-digital converter (ADC) and compares it with a preset digital limit value to determine whether the device power supply (DPS) is malfunctioning. judge.

In one embodiment, the digital judgment circuit unit 110 may preset and store the digital limit value in a register (or temporary memory device).

In one embodiment, the digital decision circuit unit 110 can detect whether the device power supply (DPS) is malfunctioning by using a digital decision circuit that operates digitally rather than a conventional analog circuit.

In one embodiment, the digital decision circuit unit 110 stores the output current value or output voltage value converted into digital by an analog-to-digital converter (ADC) using a digital decision circuit in a register (or temporary memory device). By comparing with the digital limit value, it is possible to determine whether the device power supply (DPS) is malfunctioning.

In one embodiment, the digital decision circuit unit 110 may periodically monitor the output current value or output voltage value converted to digital by an analog-to-digital converter (ADC) using a digital decision circuit.

In one embodiment, the digital decision circuit unit 110 periodically reads the output current value or output voltage value converted into digital by an analog-to-digital converter (ADC) at sufficiently short time intervals using a digital decision circuit, and registers (or , temporary memory), it is possible to determine whether the device power supply (DPS) is malfunctioning by comparing it with the digital limit value stored in the device.

In one embodiment, the digital judgment circuit unit 110 may include a plurality of registers to determine the degree of malfunction of the device power supply (DPS) in multiple stages.

In one embodiment, the digital judgment circuit unit 110 may periodically store the output current value or output voltage value converted into digital by an analog-to-digital converter (ADC) in a buffer (or memory), and may store the output current value or output voltage value converted into digital by an analog-to-digital converter (ADC) in a buffer (or memory). , you can check (or be aware of) changes in current or voltage over time (or operation) through the output current value or output voltage value periodically stored in memory.

The selection circuit unit 120 periodically selects one of the output current and output voltage input to the analog-to-digital converter (ADC) and inputs it to the analog-to-digital converter (ADC). At this time, the analog-to-digital converter (ADC) receives the output current or output voltage selected through the selection circuit unit 120, converts it into digital, and outputs the output current value or output voltage value through a digital bus through a digital judgment circuit ( 110).

The apparatus 100 for detecting malfunction of the device power supply of semiconductor test equipment having the configuration described above detects malfunction of the device power supply by using the digital judgment circuit 110 rather than the existing analog circuit method in semiconductor test equipment. By implementing detection, the number of DACs can be reduced and unnecessary analog circuits can be eliminated.

FIG. 2 is a diagram illustrating the digital judgment circuit in FIG. 1 as a first example.

Referring to FIG. 2, the digital judgment circuit unit 110 includes a +current limit register (PCL; +Current Limit Register) (1101), a -current limit register (NCL; -Current Limit Register) (1102), and an overvoltage limit register ( OVL; Over-Voltage Limit Register (1103), Under-Voltage Limit Register (UVL) (1104), first digital judge (1105), second digital judge (1106), third digital judge. It is equipped with a device (1107) and a fourth digital judge (1108).

The +current limit register (PCL) 1101 stores the limit value of the +current limit level.

The -current limit register (NCL) 1102 stores the limit value of the -current limit level.

The overvoltage limit register (OVL) 1103 stores the limit value of the overvoltage limit level.

The low voltage limit register (UVL) 1104 stores the limit value of the low voltage limit level.

The first digital judge (1105) compares the output current value applied from the analog-to-digital converter (ADC) with the limit value of the +current limit level stored in the +current limit register (PCL) (1101) to determine if +overcurrent occurs. It determines whether this has occurred and outputs a +overcurrent generation signal (PCF).

The second digital judge (1106) compares the output current value applied from the analog-to-digital converter (ADC) with the limit value of the current limit level stored in the current limit register (NCL) 1102 to determine whether overcurrent occurs. It determines whether this has been done and outputs an overcurrent generation signal (NCF).

The third digital judge 1107 determines whether an overvoltage has occurred by comparing the output voltage value applied from the analog-to-digital converter (ADC) with the limit value of the overvoltage limit level stored in the overvoltage limit register (OVL) 1103. , Outputs an overvoltage occurrence signal (OVF).

The fourth digital judge 1108 compares the output voltage value applied from the analog-to-digital converter (ADC) with the limit value of the low voltage limit level stored in the low voltage limit register (UVL) 1104 to determine whether low voltage has occurred. , Outputs a low voltage generation signal (UVF).

FIG. 3 is a diagram illustrating the digital judgment circuit in FIG. 1 as a second example.

Referring to Figure 3, the digital judgment circuit unit 110 includes a +current limit register (PCL) (1101), a -current limit register (NCL) (1102), an overvoltage limit register (OVL) (1103), and a low voltage limit register ( UVL) (1104), a first selector (MUX) (1111), a second selector (MUX) (1112), a first digital judge (1113), and a second digital judge (1114). Here, the +current limit register (PCL) (1101), -current limit register (NCL) (1102), overvoltage limit register (OVL) (1103), and undervoltage limit register (UVL) (1104) are shown in FIG. 2. Since the configuration is the same, the description is omitted.

The first selector (MUX) 1111 is a limit value of the +current limit level stored in the +current limit register (PCL) 1101 and the limit value of the overvoltage limit level stored in the overvoltage limit register (OVL) 1103. By selecting one of the selected limit values (i.e., the limit value of the +current limit level or the limit value of the overvoltage limit level), the selected limit value is applied to the first digital judge (1113).

The second selector (MUX) 1112 has a limit value of the current limit level stored in the current limit register (NCL) 1102 and a limit value of the low voltage limit level stored in the low voltage limit register (UVL) 1104. By selecting one of the selected limit values (i.e., -current limit level limit value or low voltage limit level limit value), the selected limit value is applied to the second digital judge (1114).

The first digital judge (1113) compares the output current value applied from the analog-to-digital converter (ADC) with the limit value of the +current limit level applied from the first selector (MUX) 1111 to determine whether +overcurrent has occurred. It determines and outputs a +overcurrent occurrence signal (PCF), and compares the output voltage value applied from the analog-to-digital converter (ADC) with the limit value of the overvoltage limit level applied from the first selector (MUX) (1111) to determine whether the overvoltage is It determines whether an overvoltage has occurred and outputs an overvoltage occurrence signal (OVF).

The second digital judge (1114) compares the output current value applied from the analog-to-digital converter (ADC) with the limit value of the current limit level applied from the second selector (MUX) 1112 to determine whether overcurrent has occurred. It determines and outputs an overcurrent occurrence signal (NCF), and compares the output voltage value applied from the analog-to-digital converter (ADC) with the limit value of the low voltage limit level applied from the second selector (MUX) (1112). It determines whether something has occurred and outputs a low voltage generation signal (UVF).

The digital judgment circuit unit 110 having the configuration described above can select the limit values stored in the registers 1101 to 1104 with two selectors (MUX) 1111 and 1112, and also has a digital judgment circuit 1113. , 1114) can be composed of two. In this case, in the case of the first digital judge 1113, the output current value or output voltage value applied from the analog-to-digital converter (ADC) is stored in the registers 1101 and 1103. If it is greater than the limit value, it can be determined that the device power supply (DPS) is malfunctioning, and in the case of the second digital judge 1114, the output current value or output voltage value applied from the analog-to-digital converter (ADC) If it is less than the limit value stored in these registers (1102, 1104), it can be determined that the device power supply (DPS) is malfunctioning.

The digital judgment circuit unit 110 having the above-described configuration may be provided with several registers 1101 to 1104 to determine the degree of malfunction of the device power supply (DPS) in several stages.

FIG. 4 is a diagram illustrating the digital judgment circuit in FIG. 1 as a third example.

Referring to Figure 4, the digital judgment circuit unit 110 includes a +current limit register (PCL) (1101), a -current limit register (NCL) (1102), an overvoltage limit register (OVL) (1103), and a low voltage limit register ( UVL) (1104), selector (MUX) (1121), and digital judge (1122) are provided. Here, the +current limit register (PCL) (1101), -current limit register (NCL) (1102), overvoltage limit register (OVL) (1103), and undervoltage limit register (UVL) (1104) are shown in FIG. 2. Since the configuration is the same, the description is omitted.

The selector (MUX) 1121 has a limit value of the +current limit level stored in the +current limit register (PCL) 1101 and a limit value of the -current limit level stored in the -current limit register (NCL) 1102. , select one of the limit values of the overvoltage limit level stored in the overvoltage limit register (OVL) 1103 and the limit value of the undervoltage limit level stored in the undervoltage limit register (UVL) 1104, and set the selected limit value (i.e. , +current limit level limit value or -current limit level limit value or overvoltage limit level limit value or low voltage limit level limit value) is applied to the digital judge (1122).

The digital judge 1122 compares the output current value applied from the analog-to-digital converter (ADC) with the limit value of the +current limit level applied from the selector (MUX) 1121, determines whether +overcurrent has occurred, and determines whether +overcurrent has occurred. It outputs a generated signal (PCF) and compares the output current value applied from the analog-to-digital converter (ADC) with the current limit level limit value applied from the selector (MUX) 1121 to determine whether overcurrent has occurred. -Outputs an overcurrent occurrence signal (NCF) and compares the output voltage value applied from the analog-to-digital converter (ADC) with the limit value of the overvoltage limit level applied from the selector (MUX) 1121 to determine whether overvoltage has occurred. It outputs an overvoltage occurrence signal (OVF), compares the output voltage value applied from the analog-to-digital converter (ADC) with the limit value of the low voltage limit level applied from the selector (MUX) 1121, determines whether low voltage has occurred, and determines whether the low voltage has occurred. Outputs the generated signal (UVF).

The digital judgment circuit unit 110 having the above-described configuration can select the limit values stored in the registers 1101 to 1104 with one selector (MUX) 1121, and the digital judgment circuit 1122 also has a It can be configured as one, and in this case, the output current value or output voltage value applied from the analog-to-digital converter (ADC) is compared with the limit value selected by the selector (MUX) 1121 to determine that the device power supply (DPS) is malfunctioning. I can do it for you.

Figure 5 is a diagram explaining a method for detecting malfunction of a semiconductor inspection equipment device power supply according to an embodiment of the present invention.

Referring to FIG. 5, the selection circuit unit 120 periodically selects one of the output current and output voltage input to the analog-to-digital converter (ADC) and inputs it to the analog-to-digital converter (ADC) (S501).

When the output current or output voltage selected in step S501 is input, the analog-to-digital converter (ADC) receives the selected output current or output voltage through the selection circuit 120 and converts it into digital to produce an output current value or output voltage. The value is applied to the digital judgment circuit unit 110 through a digital bus (S502).

When the output current value or output voltage value is applied in step S502 described above, the digital judgment circuit unit 110 receives the output current value or output voltage value converted to digital by the analog-to-digital converter (ADC) and inputs the preset value. Comparison with the digital limit value determines whether the device power supply (DPS) is malfunctioning (S503).

When determining whether the device power supply (DPS) is malfunctioning in step S503 described above, the digital judgment circuit unit 110 may preset and store a digital limit value in a register (or temporary memory).

In determining whether the device power supply (DPS) is malfunctioning in step S503 described above, the digital decision circuit unit 110 uses a digital decision circuit that operates digitally rather than a conventional analog circuit to determine whether the device power supply (DPS) is operating properly. It can detect whether the operation is defective.

In determining whether the device power supply (DPS) is malfunctioning in the above-described step S503, the digital judgment circuit unit 110 uses the digital judgment circuit to determine the output current value converted to digital by the analog-to-digital converter (ADC) or By comparing the output voltage value with the digital limit value stored in a register (or temporary memory), it is possible to determine whether the device power supply (DPS) is malfunctioning.

In determining whether the device power supply (DPS) is malfunctioning in step S503 described above, the digital judgment circuit unit 110 uses the digital judgment circuit to determine the output current value converted to digital by the analog-to-digital converter (ADC) or The output voltage value can be monitored periodically.

In determining whether the device power supply (DPS) is malfunctioning in the above-described step S503, the digital judgment circuit unit 110 periodically converts the analog-to-digital converter (ADC) into digital at sufficiently short time intervals using a digital judgment circuit. By reading the converted output current value or output voltage value and comparing it with the digital limit value stored in the register (or temporary memory), it is possible to determine whether the device power supply (DPS) is malfunctioning.

In determining whether the device power supply (DPS) is malfunctioning in step S503 described above, the digital judgment circuit unit 110 configures a plurality of registers to determine the degree of malfunction of the device power supply (DPS) in multiple steps. It can also be equipped with a dog.

In determining whether the device power supply (DPS) is malfunctioning in step S503 described above, the digital judgment circuit unit 110 periodically buffers the output current value or output voltage value converted to digital by the analog-to-digital converter (ADC). It can be stored in (or memory), and changes in current or voltage over time (or operation) can be checked through the output current value or output voltage value periodically stored in the buffer (or memory). there is.

As mentioned above, the embodiment of the present invention is not implemented only through the above-described device and/or operating method, but through a program for realizing the function corresponding to the configuration of the embodiment of the present invention, a recording medium on which the program is recorded, etc. It may be implemented, and such implementation can be easily implemented by an expert in the technical field to which the present invention belongs based on the description of the embodiments described above. Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements can be made by those skilled in the art using the basic concept of the present invention defined in the following claims. It falls within the scope of rights.

100: Device for detecting malfunction of semiconductor inspection equipment device power supply
110: Digital judgment circuit
120: selection circuit unit
1101: +Current limit register
1102: -Current limit register
1103: Overvoltage limit register
1104: Low voltage limit register
1105, 1113: 1st digital judge
1106, 1114: Second digital judge
1107: 3rd digital judge
1108: 4th digital judge
1111: first selector
1112: Second selector
1121: selector
1122: Digital judge

Claims (5)

A digital judgment circuit for receiving the output current value or output voltage value converted into digital by the analog-to-digital converter and comparing it with a preset digital limit value to determine whether the device power supply is malfunctioning; and a selection circuit for periodically selecting one of the output current and output voltage input to the analog-to-digital converter and inputting it to the analog-to-digital converter;
The digital judgment circuit unit is provided with a plurality of registers to determine the degree of malfunction of the device power supply in multiple stages; +current limit register that stores the limit value of the +current limit level; -Current limit register, which stores the limit value of the current limit level; an overvoltage limit register that stores the limit value of the overvoltage limit level; a low-voltage limit register that stores the limit value of the low-voltage limit level; The limit value of the +current limit level stored in the +current limit register, the limit value of the -current limit level stored in the -current limit register, the limit value of the overvoltage limit level stored in the overvoltage limit register, and the low voltage limit register. a selector for selecting one of the limit values of the low voltage limit level stored in; And the output current value applied from the analog-to-digital converter is compared with the limit value of the +current limit level selected in the selector to determine whether a +overcurrent has occurred and output a +overcurrent occurrence signal, and the output applied from the analog-to-digital converter. It determines whether an overcurrent has occurred by comparing the current value with the limit value of the current limit level selected by the selector, and outputs an overcurrent occurrence signal. The output voltage value applied from the analog-to-digital converter and the overvoltage limit selected by the selector It determines whether an overvoltage has occurred by comparing the limit value of the level and outputs an overvoltage generation signal. It determines whether an undervoltage has occurred by comparing the output voltage value applied from the analog-to-digital converter with the limit value of the low voltage limit level selected by the selector. A device for detecting malfunction of a semiconductor inspection equipment device power supply, characterized by having a digital judge that outputs a low voltage generation signal.
delete The method of claim 1, wherein the analog-to-digital converter is:
The operation of the semiconductor inspection equipment device power supply, characterized in that the output current or output voltage selected through the selection circuit is input, converted to digital, and the output current or output voltage value is applied to the digital judgment circuit through a digital bus. Defect detection device.
The method of claim 1, wherein the digital judgment circuit,
A device for detecting malfunction of a semiconductor inspection equipment device power supply, characterized in that the digital limit value is preset and stored in a register.
A selection circuit periodically selects one of the output current and output voltage input to the analog-to-digital converter and inputs it to the analog-to-digital converter; The analog-to-digital converter receives the output current or output voltage selected through the selection circuit, converts it into digital, and applies the output current or output voltage to the digital judgment circuit through a digital bus; And the digital judgment circuit receives the output current value or output voltage value converted to digital by the analog-to-digital converter and compares it with a preset digital limit value to determine whether the device power supply is malfunctioning. ;
The digital judgment circuit unit includes a plurality of registers to determine the degree of malfunction of the device power supply in multiple stages; +current limit register that stores the limit value of the +current limit level; -Current limit register, which stores the limit value of the current limit level; an overvoltage limit register that stores the limit value of the overvoltage limit level; a low-voltage limit register that stores the limit value of the low-voltage limit level; The limit value of the +current limit level stored in the +current limit register, the limit value of the -current limit level stored in the -current limit register, the limit value of the overvoltage limit level stored in the overvoltage limit register, and the low voltage limit register. a selector for selecting one of the limit values of the low voltage limit level stored in; And the output current value applied from the analog-to-digital converter is compared with the limit value of the +current limit level selected in the selector to determine whether a +overcurrent has occurred and output a +overcurrent occurrence signal, and the output applied from the analog-to-digital converter. It determines whether an overcurrent has occurred by comparing the current value with the limit value of the current limit level selected by the selector, and outputs an overcurrent occurrence signal. The output voltage value applied from the analog-to-digital converter and the overvoltage limit selected by the selector It determines whether an overvoltage has occurred by comparing the limit value of the level and outputs an overvoltage generation signal, and determines whether an undervoltage has occurred by comparing the output voltage value applied from the analog-to-digital converter with the limit value of the low voltage limit level selected by the selector. A method of detecting malfunction of a semiconductor inspection equipment device power supply, characterized by comprising a digital judge that outputs a low voltage generation signal.