KR102588715B1 - Device for preventing leak of gas - Google Patents

Abstract

The present invention relates to a device for preventing fume gas leakage from pipe fittings. The fume gas leakage prevention device of the pipe fitting of the present invention comprises: a pipe fitting part including a male unit provided at an end of a first pipe, and a female unit provided at an end of a second pipe to be connected to the first pipe and detachably coupled to the male unit; and a fume gas leakage prevention part that is disposed to surround the outside of the pipe fitting while including a connection area between the first pipe and the second pipe, and prevents leakage of fume gas from the first pipe or the second pipe when the pipe fitting is unfitted, thereby capable of preventing fume gas from leaking when piping fittings are removed.

Description

Device for preventing leak of gas in plumbing fittings

The present invention relates to a device for preventing fume gas leakage from pipe fittings. More specifically, it can prevent fume gas from leaking when a pipe fitting is released, thereby protecting the safety of workers and preventing fires from occurring. It relates to a device for preventing fume gas leakage from pipe fittings, which can prevent gas leakage in advance.

Gas piping used in precision fields such as semiconductor or display manufacturing processes generally uses SUS tubes, and SUS 304, 316, and 316L are typically used.

The SUS tube has low reactivity and has been widely used as a gas supply and transfer pipe due to its rigidity and the ability to undergo various post-treatments. However, it corrodes with some specific gases such as Cleaning Gas (NF3), generating impurities such as Fe. The resulting impurities were absorbed into the semiconductor and display thin film, causing defects.

On the other hand, aluminum tubes do not react with specific gases that react with SUS, so they can minimize the detection of impurities due to chemical reactions during semiconductor or display manufacturing by minimizing the coalescence area. However, due to their ductility, they are severely deformed and cannot be post-processed by electrolytic polishing. There was a limitation.

In addition, cracks are prone to occur when bending the tube, so eddy currents may occur depending on the flow of gas, and there is a problem that the inside of the gas tube may become clogged during the welding process.

Meanwhile, in all processes using gas, including the semiconductor manufacturing process, complete sealing must be done to prevent gas leakage during the gas connection process. There are various sealing methods for this, but among them, the VCR fitting (Vacuum Coupling Radiation fitting) method is widely used.

The VCR fitting is a method of sealing by welding a gland to a tube and inserting and tightening a metal gasket between the two glands, as shown in Figures 1 and 2. In other words, insert a nut into the SUS tube and attach the gland by welding it. A gasket is inserted between the two glands and the bolt and nut are tightened to compress the space between the two glands with the gasket.

In other words, assemble in the Arabic order of Figure 2. These VCR fittings not only have perfect sealing, but also have the advantage of being able to be repeatedly loosened and tightened by replacing the gasket.

Meanwhile, when dismantling assembled VCR fittings, work must be done under conditions without fume gas (smoke generated by distillation, chemical reactions, etc.), but it is difficult to verify these conditions. If the VCR fitting is dismantled with fume gas remaining and the fume gas leaks, it is not only harmful to the human body but can also cause a fire, so the development of technology to solve this problem is required.

Korea Intellectual Property Office Application No. 10-1996-0052389 Korea Intellectual Property Office Application No. 10-2016-0027142 Korea Intellectual Property Office Application No. 10-2020-0111179 Korea Intellectual Property Office Application No. 20-2007-0007951

The purpose of the present invention is to prevent fume gas leakage from pipe fittings, which can prevent fume gas leakage when disconnecting pipe fittings, thereby protecting the safety of workers and preventing fires from occurring in advance. The device is provided.

The above object includes a pipe fitting unit including a male unit provided at an end of a first pipe, and a female unit provided at an end of a second pipe to be connected to the first pipe and detachably coupled to the male unit; and a connection area between the first pipe and the second pipe, which is disposed to surround the outside of the pipe fitting portion, and prevents leakage of fume gas from the first pipe or the second pipe when the pipe fitting portion is unfitted. This is achieved by a fume gas leak prevention device of a pipe fitting, characterized in that it includes a fume gas leak prevention unit.

The pipe fitting part may further include an airtight gasket provided in an area where the male unit and the female unit come into contact with each other to keep the area airtight.

The fume gas leak prevention unit includes a female rotation module whose one end is connected to the female unit to form one body with the female unit; and a device housing that exposes a portion of the other end of the female rotation module to the outside and surrounds a portion of the female rotation module and an outside of the pipe fitting portion, the device housing being exposed to the outside of the device housing. The other end area of the female rotation module is capable of relative rotation while remaining airtight with respect to the device housing.

The female rotation module includes a unit coupling portion that is in contact with the female unit and forms one body with the female unit; a handle portion exposed to the outside of the device housing and serving as a handle for rotating the female unit; and a housing connection portion disposed between the unit coupling portion and the handle portion, connecting the unit coupling portion and the handle portion, but being recessed inward, and to which the device housing is connected.

The fume gas leak prevention unit includes a gas suction line connected to the device housing and sucking fume gas within the device housing; A line opening and closing member that opens and closes the gas suction line; And it may further include a loosening prevention member coupled to the device housing and the female rotation module and preventing random loosening of the device housing with respect to the female rotation module.

According to the present invention, it is possible to prevent fume gas from leaking when a pipe fitting is removed, thereby protecting the safety of workers and preventing a fire from occurring in advance.

Figure 1 is a structural diagram for a general VCR fitting.
Figure 2 is a work flow chart of VCR fitting.
Figure 3 is a structural diagram of a fume gas leak prevention device for pipe fittings according to the first embodiment of the present invention.
Figures 4 to 7 are step-by-step construction diagrams of the fume gas leak prevention device for the pipe fitting of Figure 3.
Figure 8 is a structural diagram of a fume gas leak prevention device for pipe fittings according to a second embodiment of the present invention.
Figure 9 is a cross-sectional structural diagram of Figure 8.
Figure 10 is a control block diagram for the fume gas leak prevention device of Figure 8.
Figure 11 is a structural diagram of a fume gas leak prevention device for pipe fittings according to a third embodiment of the present invention.
Figure 12 is a cross-sectional structural diagram of Figure 11.
Figure 13 is a control block diagram for the fume gas leak prevention device of Figure 11.

Below, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily implement the present invention.

However, since the description of the present invention is only an example for structural or functional explanation, the scope of the present invention should not be construed as limited by the embodiments described in the text.

For example, the embodiments can be modified in various ways and can take on various forms, so the scope of rights of the present invention should be understood to include equivalents that can realize the technical idea.

In addition, the purpose or effect presented in the present invention does not mean that a specific embodiment must include all or only such effects, so the scope of the present invention should not be understood as limited thereby.

In this specification, the present embodiments are provided to complete the disclosure of the present invention and to fully inform those skilled in the art of the scope of the invention. And the present invention is only defined by the scope of the claims.

Accordingly, in some embodiments, well-known components, well-known operations and well-known techniques are not specifically described to avoid ambiguous interpretation of the invention.

Meanwhile, the meaning of the terms described in the present invention is not limited to the dictionary meaning and should be understood as follows.

When a component is referred to as being “connected” to another component, it should be understood that it may be directly connected to the other component, but that other components may also exist in between. On the other hand, when a component is said to be “directly connected” to another component, it should be understood that no other components exist in between. Meanwhile, other expressions that describe the relationship between components, such as “between” and “immediately between” or “neighboring to” and “directly neighboring to”, should be interpreted similarly.

Singular expressions should be understood to include plural expressions, unless the context clearly indicates otherwise, and terms such as “comprise” or “have” refer to the specified features, numbers, steps, operations, components, parts, or them. It is intended to indicate the existence of a combination, and should be understood as not excluding in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

All terms used herein, unless otherwise defined, have the same meaning as commonly understood by a person of ordinary skill in the field to which the present invention pertains.

Terms defined in commonly used dictionaries should be interpreted as consistent with the meaning they have in the context of the related technology, and cannot be interpreted as having an ideal or excessively formal meaning unless clearly defined in the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the description of the embodiments, the same reference numerals are assigned to the same components, and in some cases, descriptions of the same reference numerals are omitted.

(First Example)

Figure 3 is a structural diagram of the fume gas leak prevention device for the pipe fitting according to the first embodiment of the present invention, and Figures 4 to 7 are step-by-step construction diagrams of the fume gas leak prevention device for the pipe fitting of Figure 3.

Referring to these drawings, the fume gas leak prevention device 100 of the pipe fitting according to this embodiment can prevent fume gas from leaking when the fitting of the pipes 101 and 102 is released, thereby protecting the safety of workers. Meanwhile, prevent fires from occurring in the first place.

The fume gas leak prevention device 100 of the pipe fitting according to the present embodiment that can provide such effects may include a pipe fitting part 110 and a fume gas leak prevention part 130.

The pipe fitting unit 110 is a part that fits the first and second pipes 101 and 102, and includes a male unit 111 provided at the end of the first pipe 101 and a second pipe to be connected to the first pipe 101. It may include a female unit 112 that is provided at the end of the pipe 102 and is detachably coupled to the male unit 111.

An airtightness gasket 113 may be provided in the area where the male unit 111 and the female unit 112 come into contact with each other to keep the area airtight. Due to the airtightness gasket 113, fume gas does not leak between the male unit 111 and the female unit 112.

For reference, learn about gas, steam, mist, dust, and fume. Gas is a substance that exists as a gas at room temperature, vapor is a gaseous organic compound generated from a substance that exists as a liquid at room temperature, mist is a flying substance in the form of small droplets, and dust is mechanical dust, friction, and abrasive work. Fume refers to fine solid particles that are formed when solid vapor is generated by high heat and then rapidly oxidized in the air and then condensed. However, hereinafter, these will not be distinguished separately and will be referred to as fume gas.

Meanwhile, the fume gas leakage prevention unit 130 is arranged to surround the outside of the pipe fitting unit 110, including the connection area between the first pipe 101 and the second pipe 102, and the pipe fitting unit 110 ) serves to prevent fume gas leakage from the first pipe 101 or the second pipe 102 when the fitting is released.

This fume gas leakage prevention unit 130 may include a female rotation module 140, a device housing 150, and a loosening prevention member 170.

The female rotation module 140 is a structure whose one end is connected to the female unit 112 to form one body with the female unit 112. When the female rotation module 140 is rotated, the female unit 112 rotates together.

This female rotation module 140 is exposed to the outside of the device housing 150, and has a unit coupling portion 141 that is coupled to the female unit 112 and forms one body with the female unit 112, and is exposed to the outside of the female unit 112. A handle portion 142 that serves as a handle for rotating the unit 112 is disposed between the unit coupling portion 141 and the handle portion 142 and connects the unit coupling portion 141 and the handle portion 142. However, it is formed to be recessed inward and may include a housing connection portion 143 to which the device housing 150 is connected.

The device housing 150 is a structure that exposes a portion of the other end of the female rotation module 140 to the outside and is arranged to surround a portion of the female rotation module 140 and the outside of the pipe fitting portion 110. .

The other end area of the female rotation module 140 exposed to the outside of the device housing 150 is rotatable with respect to the device housing 150. Therefore, even when the device housing 150 is installed, the fitting can be released by rotating the inner female unit 112 through the female rotation module 140.

The device housing 150 is provided with a gas suction line 161 that suctions the fume gas within the device housing 150, and the gas suction line 161 is opened and closed by the line opening and closing member 162. When releasing the fitting, the fitting can be released by rotating the inner female unit 112 through the female rotation module 140. At this time, if there is leakage of rest gas, open the line opening and closing member 162 and vacuum the gas suction line. Just inhale the leaking gas through (161).

The loosening prevention member 170 is fastened with the through holes 140a and 150a formed in the female rotation module 140 and the device housing 150 when they are installed, as shown in FIGS. 6 to 7.

In other words, the loosening prevention member 170 is coupled to the device housing 150 and the female rotation module 140, and serves to prevent random loosening of the device housing 150 with respect to the female rotation module 140. do.

With this configuration, when it is necessary to release the fitting, if it is necessary to release the fitting of the first and second pipes 101 and 102, the fume gas leakage prevention unit 130 is installed as shown in FIG. 7, and then the female rotation module exposed to the outside is installed. The fitting can be released while rotating the female unit 112 through (140). If there is a leak of rest gas during this process, open the line opening and closing member 162 and suck the leaked gas through the gas suction line 161 using a vacuum.

According to this embodiment, which operates based on the structure described above, it is possible to prevent fume gas from leaking when the fittings of the first and second pipes 101 and 102 are released, thereby protecting the safety of workers. It is possible to prevent fires from occurring.

(Second Embodiment)

FIG. 8 is a structural diagram of a fume gas leak prevention device for a pipe fitting according to a second embodiment of the present invention, FIG. 9 is a cross-sectional structural diagram of FIG. 8, and FIG. 10 is a control block diagram of the fume gas leak prevention device of FIG. 8. am.

Referring to these drawings, the fume gas leak prevention device 200 of the pipe fitting according to this embodiment may include a pipe fitting part 110 and a fume gas leak prevention part 130. Additionally, the fume gas leakage prevention unit 130 may include a female rotation module 140, a device housing 150, and a loosening prevention member 170. These structures, functions, and roles are the same as the above-described embodiments.

Meanwhile, in this embodiment, a gas suction line 261 is connected to the device housing 150, and an electromagnetic valve 262 is coupled to the gas suction line 261. The gas suction line 261 is connected to the vacuum pump 263.

Additionally, a gas detection unit 265 is provided in the device housing 150 to detect leakage of fume gas, and is controlled by the controller 280. That is, the controller 280 automatically controls the operation of the electromagnetic valve 262 and the vacuum pump 263 based on the detection signal from the gas detection unit 265. In other words, if fume gas leaks within the device housing 150 during the fitting release operation, the gas detection unit 265 detects this and transmits it to the controller 280, and the controller 280 operates the electronic valve based on this signal. Open (262) and operate the vacuum pump (263) so that the fume gas in the device housing (150) can be automatically sucked in and removed.

The controller 280 that performs this role may include a central processing unit (281, CPU), memory (282, MEMORY), and a support circuit (283, SUPPORT CIRCUIT).

In this embodiment, the central processing unit 281 is provided with a gas detection unit 265 that detects leakage of fume gas within the device housing 150, and these can be applied industrially to be controlled by the controller 280. It can be one of a variety of computer processors available.

Memory 282 (MEMORY) is connected to the central processing unit 281. Memory 282 is a computer-readable recording medium that can be installed locally or remotely, for example, in a readily available storage medium such as random access memory (RAM), ROM, floppy disk, hard disk, or any other digital storage form. It may be at least one memory.

The support circuit 283 (SUPPORT CIRCUIT) is combined with the central processing unit 281 to support typical operations of the processor. This support circuit 283 may include a cache, power supply, clock circuit, input/output circuit, subsystem, etc.

In this embodiment, the controller 280 is provided with a gas detection unit 265 that detects leakage of fume gas within the device housing 150, and these are controlled by the controller 280, such as a series of control processes, etc. may be stored in memory 282. Typically, software routines may be stored in memory 282. Software routines may also be stored or executed by other central processing units (not shown).

Although the process according to the present invention has been described as being executed by software routines, it is also possible that at least some of the processes according to the present invention are performed by hardware. As such, the processes of the present invention may be implemented as software running on a computer system, as hardware such as an integrated circuit, or as a combination of software and hardware.

Even if this embodiment is applied, leakage of fume gas can be prevented when the fittings of the first and second pipes 101 and 102 are released, thereby protecting the safety of workers and preventing fires from occurring in advance.

(Third Embodiment)

FIG. 11 is a structural diagram of a fume gas leak prevention device for a pipe fitting according to a third embodiment of the present invention, FIG. 12 is a cross-sectional structural diagram of FIG. 11, and FIG. 13 is a control block diagram of the fume gas leak prevention device of FIG. 11. am.

Referring to these drawings, the fume gas leak prevention device 300 of the pipe fitting according to this embodiment may include a pipe fitting part 110 and a fume gas leak prevention part 130. Additionally, the fume gas leakage prevention unit 130 may include a female rotation module 140, a device housing 150, and a loosening prevention member 170. These structures, functions, and roles are the same as the above-described embodiments.

Meanwhile, in the case of this embodiment, the area where the female rotation module 140 and the device housing 150 are connected is guided so that the female rotation module 140 can rotate relative to the device housing 150 while maintaining airtightness with respect to the device housing 150. A rotation guide 345 for confidentiality is further provided. The rotation guide 345 for confidentiality may be implemented through bearings and packing.

Additionally, an alarm 390 is provided outside the device housing 150. The operation of the alarm 390 is controlled by the controller 380. That is, if fume gas is leaked within the device housing 150 during the fitting release operation, the gas detection unit 265 detects this and transmits it to the controller 380, and the controller 380 detects this and transmits it to the controller 380, and the controller 380 detects the electronic valve 262 based on this signal. ) and operate the vacuum pump 263 so that the fume gas in the device housing 150 can be automatically sucked in and removed. At the same time, by operating the alarm 390, the status of fume gas generation is notified to the outside.

Even if this embodiment is applied, leakage of fume gas can be prevented when the fittings of the first and second pipes 101 and 102 are released, thereby protecting the safety of workers and preventing fires from occurring in advance.

As such, the present invention is not limited to the described embodiments, and it is obvious to those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the present invention. Therefore, it should be said that such modifications or variations fall within the scope of the claims of the present invention.

100: Fume gas leak prevention device 101: First pipe
102: second pipe 110: pipe fitting part
111: male unit 112: female unit
113: gasket for airtightness 130: fume gas leakage prevention unit
140: Female rotation module 141: Unit coupling part
142: handle portion 143: housing connection portion
150: device housing 161: gas suction line
162: Line opening and closing member 170: Loosening prevention member

Claims (5)

a pipe fitting unit including a male unit provided at an end of a first pipe, and a female unit provided at an end of a second pipe to be connected to the first pipe and detachably coupled to the male unit; and
It is disposed surrounding the outside of the pipe fitting portion and includes a fume gas leak prevention portion that prevents fume gas leakage from the first pipe or the second pipe when the pipe fitting portion is unfitted,
The fume gas leakage prevention unit,
a female rotation module whose one end is connected to the female unit to form one body with the female unit; and
It includes a device housing that surrounds the female rotation module and the outside of the pipe fitting, and is disposed so that the other end of the female rotation module is exposed to the outside,
A fume gas leak prevention device for a pipe fitting, wherein the female rotation module is rotatable with respect to the device housing.
According to paragraph 1,
The pipe fitting part,
A fume gas leak prevention device for a pipe fitting, further comprising an airtight gasket provided in an area where the male unit and the female unit come into contact with each other to keep the area airtight.
delete According to paragraph 1,
The female rotation module,
a unit coupling portion that is in contact with the female unit and forms one body with the female unit;
a handle portion exposed to the outside of the device housing and serving as a handle for rotating the female unit; and
Fume gas leakage of a pipe fitting, which is disposed between the unit coupling portion and the handle portion and connects the unit coupling portion and the handle portion, but is formed to be recessed inward, and includes a housing connector portion to which the device housing is connected. Prevention device.
According to paragraph 1,
The fume gas leakage prevention unit,
a gas suction line connected to the device housing and sucking fume gas within the device housing;
A line opening and closing member that opens and closes the gas suction line; and
The fume of the pipe fitting further includes a loosening prevention member that penetrates into the through hole formed in each of the device housing and the female rotation module and prevents random loosening of the device housing with respect to the female rotation module. Gas leak prevention device.

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