KR102584401B1 - Apparatus for controling fluid and method for controling fluid - Google Patents

Abstract

Disclosed is a fluid control device capable of controlling the amount of discharged fluid in different ranges.
The fluid control device includes a main body having an inflow path and an outlet path and forming a first flow path capable of communicating with the inflow path and a second flow path capable of communicating with the discharge path, a differential pressure generator, and a fluid flow in at least one of the first flow path and the second flow path. A measuring unit for measuring the state of the discharge valve, an outlet valve disposed between the second flow passage and the discharge passage, an inlet valve disposed between the inflow passage and the first passage, and selective control of the discharge end valve and the inlet end valve to discharge the discharge. It includes a control unit for controlling the amount of fluid discharged into the furnace into a micro flow rate range and a general flow rate range in which the fluid amount is greater than the micro flow rate range.

Description

Fluid control device and fluid control method {Apparatus for controlling fluid and method for controlling fluid}

The present invention relates to a fluid control device and a fluid control method, and more specifically, to a fluid control device and a fluid control method that can control the amount of fluid discharged in different ranges.

In general, a mass flow controller (MFC) is a device that controls and supplies the mass (i.e., fluid volume) of fluid, and can measure, control, and discharge the fluid volume without a conversion process. A mass flow controller is a key component used to control fluid volume in various fields (e.g., semiconductor manufacturing processes). More specifically, fluid volume control is becoming very important in the semiconductor manufacturing process, and demand for and interest in mass flow controllers that precisely control fluid volume at high speeds is increasing.

A conventional mass flow controller includes a plurality of pressure sensors that detect the pressure of the fluid flowing through the flow path, a control unit that measures the fluid amount based on signals detected from the pressure sensor, and a control unit that controls the fluid amount through control commands transmitted from the control unit. It consists of an actuator. Accordingly, when a certain amount of fluid flows into the flow path, a plurality of pressure sensors detect the pressure of the fluid within the flow path, and the control unit that receives the signal regarding the fluid pressure value calculates the fluid amount from the signal regarding the fluid pressure value. Thus, a control command is transmitted to the actuator. Accordingly, the actuator adjusts the fluid volume through control commands.

However, the conventional mass flow controller has a problem in that the amount of fluid discharged from one flow path is limited to a single range. That is, in order to form the discharged fluid amount into multiple ranges, the conventional mass flow controller had to increase the number of flow paths according to the range of the discharged fluid amount. Accordingly, the conventional mass flow controller had a problem in that when the discharged fluid volume was set to multiple ranges, the total volume of the mass flow controller increased due to the increased number of flow paths.

In addition, when the conventional mass flow controller sets the discharged fluid volume in different ranges, the fluid volume is not precisely controlled in controlling the fluid volume range with a relatively small size value among the different fluid volume ranges discharged. There was a problem.

KR 10-1901967 B1

The present invention is intended to solve the above problems and provides a fluid control device and a fluid control method that can control the amount of fluid discharged through a single flow path to different ranges.

In addition, the present invention provides a fluid control device and a fluid control method that can precisely control the amount of fluid discharged in a micro flow rate range.

The present invention has an inflow passage through which a fluid flows in and an discharge passage through which the fluid is discharged, and forms on the inside a first passageway capable of communicating with the inflow passage and a second passageway connected to the first passageway and capable of communicating with the discharge passage. main body; a differential pressure generator installed between the first flow path and the second flow path; a measuring unit configured to measure the state of fluid in at least one of the first flow path and the second flow path; a discharge end valve disposed between the second flow path and the discharge path to open and close the space between the second flow path and the discharge path; an inflow end valve disposed between the inflow passage and the first flow passage to open and close the connection between the inflow passage and the first flow passage; And by selectively controlling the discharge end valve and the inlet end valve through the preset volume value of the first flow path and the measured value of the measuring unit, the amount of fluid discharged from the discharge path is set to a first flow rate range and a first flow rate. It includes a control unit for controlling the second flow rate range that is larger than the range.

The measuring unit may include: a first sensor for measuring the pressure of fluid in the first flow path; a second sensor for measuring the pressure of fluid in the second flow path; and a temperature sensor for measuring the temperature in the first flow passage, wherein the control unit discharges a fluid amount in a first flow rate range from the discharge passage through the measured values measured by the first sensor and the temperature sensor. and control the fluid volume in the second flow rate range to be discharged from the discharge passage through the measured values measured by the first sensor and the second sensor.

The control unit includes a receiving module that receives measured values from the first sensor, the second sensor, and the temperature sensor; a judgment module for determining whether the amount of fluid to be discharged from the discharge path is in a first flow rate range or a second flow rate range; and a control module connected to the determination module and the receiving module, and controlling the operation sequence and opening/closing amounts of the inlet valve and the outlet valve according to the determination result of the determination module.

The control module alternates the inlet valve and the outlet valve under the condition according to Equation 1 below according to the preset volume value of the first flow path and measured values of the first sensor and the temperature sensor. to open and close it.

[Equation 1]

(Here, Q(sccm) is the fluid volume value, P1 is the pressure value of the fluid in the first flow path when the inlet and outlet valves are closed (i.e., at the first time point), and P2 is the fluid pressure value when the inlet valve is closed. When closing and opening the discharge end valve (i.e., at the second time point), it is the pressure value of the fluid in the first flow path, t is the time value between the first time point and the second time point, and vol is the preset first flow path. is the volume value, and temp means the temperature value of the fluid in the first flow path.)

The control module, in a state in which one of the inlet end valve and the outlet end valve is opened, the inflow is controlled under the condition according to Equation 2 below according to the measured values of the first sensor and the second sensor. Adjust the opening ratio of the other one of the end valve and the discharge end valve.

[Equation 2]

(Here, Q(sccm) is the fluid volume value, K is the proportionality constant value, P1 is the pressure value of the fluid in the first flow path, and P2 means the pressure value of the fluid in the second flow path.)

The difference between the measured values of the first sensor and the second sensor is equal to the preset value of the differential pressure generator, and the control module adjusts the opening rate of the inflow end valve in a state in which the discharge end valve is opened. The fluid volume when adjusted is formed to be larger than the fluid volume when the opening rate of the outlet valve is adjusted with the inlet valve open.

The determination module further includes an input member that receives input as to whether the amount of fluid to be discharged from the discharge path is in the first flow rate range or the second flow rate range.

The discharge path is formed in an orifice structure to generate differential pressure when fluid passes through it.

The differential pressure generator, the inlet valve, and the outlet valve each have an orifice, the size of the orifice of the differential pressure generator is smaller than the size of the orifice provided in the inlet valve and the outlet valve, and the discharge It is formed larger than the size of the orifice formed in the furnace.

The present invention provides a process for supplying fluid to a fluid control device and moving the fluid from a first flow path of the fluid control device to a second flow path of the fluid control device; A process of measuring the pressure value of the fluid in the first flow path and the pressure value of the fluid in the second flow path; A process of discharging fluid from the fluid control device to a second flow rate range based on the measured pressure values; A process of changing the flow rate range discharged from the fluid control device, wherein the process of changing the discharged flow rate range includes re-measuring the pressure of the fluid in the first flow path and measuring the temperature of the first flow path. process; and discharging fluid in a first flow rate range that is a flow rate range smaller than the second flow rate range, based on the preset volume value of the first flow path, the remeasured pressure value, and the temperature value of the first flow path; Includes.

According to the present invention, the amount of fluid discharged from a single internal flow path can be controlled to different ranges. Accordingly, the overall volume of the fluid control device can be minimized, and fluid can be discharged from the fluid control device to different and heterogeneous ranges.

In addition, the fluid control device uses a volumetric flow rate control method to precisely control the fluid volume in a relatively small discharged fluid volume range (i.e., a fine flow rate range) among different heterogeneous ranges.

In addition, the fluid control device uses a differential pressure flow control method, allowing precise control of the fluid volume over a relatively large discharged fluid volume range (i.e., general flow rate range).

Additionally, the fluid control device can selectively control a plurality of valves using a differential pressure flow control method to organically adjust the fluid amount in the general flow rate range.

1 is a diagram schematically showing the structure of a fluid storage tank, a fluid control device, and a substrate manufacturing facility according to an embodiment of the present invention.
Figure 2 is a diagram showing the structure of a fluid control device according to an embodiment of the present invention.
Figure 3 is a diagram of operating the inlet valve to discharge in a micro flow rate range.
Figure 4 is a diagram of operating the inlet valve and outlet valve to discharge in a fine flow rate range.
Figure 5 is a diagram of operating the discharge end valve to discharge in a fine flow rate range.
Figure 6 is a diagram of discharging fluid volume in the normal flow rate range by controlling the discharge end valve.
Figure 7 is a diagram of controlling the inlet end valve to discharge fluid volume in the normal flow rate range.
Figure 8 is a flow chart showing a fluid control method according to an embodiment of the present invention.

The embodiments described herein may be modified in various ways. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, the specific embodiments disclosed in the attached drawings are only intended to facilitate understanding of the various embodiments. Accordingly, the technical idea is not limited to the specific embodiments disclosed in the attached drawings, and should be understood to include all equivalents or substitutes included in the spirit and technical scope of the invention.

Terms containing ordinal numbers, such as first, second, etc., may be used to describe various components, but these components are not limited by the above-mentioned terms. The above-mentioned terms are used only for the purpose of distinguishing one component from another.

In this specification, terms such as “comprise” or “have” are intended to indicate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof. When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

Meanwhile, a “module” or “unit” for a component used in this specification performs at least one function or operation. And, the “module” or “unit” may perform a function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of “modules” or a plurality of “units” excluding a “module” or “unit” that must be performed on specific hardware or performed on at least one processor may be integrated into at least one module. Singular expressions include plural expressions unless the context clearly dictates otherwise.

In addition, when describing the present invention, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description thereof is abbreviated or omitted.

Hereinafter, various embodiments will be described in more detail with reference to the attached drawings.

The fluid control device according to an embodiment of the present invention may be a device that supplies fluid flowing from a fluid storage tank to a substrate manufacturing facility where a substrate manufacturing process is performed. That is, the fluid control device receives fluid from a storage tank and can supply different ranges of fluid depending on the process taking place in the substrate manufacturing facility. In the following, the case where the fluid is a gaseous substance (i.e., gas) will be described by way of example.

1 is a diagram schematically showing the structure of a fluid storage tank, a fluid control device, and a substrate manufacturing facility according to an embodiment of the present invention.

First, with reference to FIG. 1, the structure of the fluid storage tank 10 from which the fluid control device 100 receives fluid and the structure of the substrate manufacturing facility 20 to which the fluid control device 100 supplies fluid are discussed. Explain.

The fluid storage tank 10 may be a tank that stores fluid. It may include a tank housing (not shown), a supply hose (not shown), and an input module (not shown).

The tank housing may be provided in the shape of a container in which fluid can be stored. For example, the inside of a tank housing may be divided into a plurality of spaces. Different fluids (i.e., gases) may be stored in a plurality of spaces inside the tank housing.

In general, different processes may be performed in the substrate manufacturing facility 20 to which fluid is to be supplied. For example, a substrate manufacturing process and a cleaning process may be performed in the substrate manufacturing facility 20. Here, the substrate manufacturing process may be an etching process and a thin film deposition process, and the fluid supplied during the substrate manufacturing process may be a fluid containing, for example, NH ₃ , NF ₃ , SiH ₄ , PH _{3 ,} etc. Additionally, the cleaning process may be a process of removing by-products generated during an etching process or a thin film deposition process, and the fluid supplied during the cleaning process may be a fluid containing H ₂ , Ar, etc. Accordingly, the fluid supplied during the substrate manufacturing process and the fluid supplied during the cleaning process can be stored separately in different spaces inside the tank housing.

The supply hose may be a passage through which fluid in the tank housing moves to the fluid control device 100. The supply hose is installed in the tank housing, and one end of it may communicate with a space where fluid is stored inside the tank housing. Additionally, the other end of the supply hose may be connected to the inlet 111 of the fluid control device 100, which will be described later. For example, the supply hose may be made of a rubber material so that it can bend and expand freely.

The input module can receive input as to whether the substrate manufacturing facility 20 is a substrate manufacturing process or a cleaning process. For example, the input module may be provided as a receiving sensor that can receive signals containing process information from the substrate manufacturing facility 20, or as an electronic pad that allows workers to input process information. You can.

The substrate manufacturing facility 20 can accommodate a substrate therein. The substrate manufacturing facility 20 is connected to the fluid control device 100 and can receive different types of fluids depending on the process. As described above, the substrate manufacturing facility 20 can receive fluids necessary for etching and deposition when the substrate manufacturing process progresses. Additionally, when a cleaning process is in progress, the substrate manufacturing facility 20 can be supplied with the fluid required for the cleaning process.

Meanwhile, in the substrate manufacturing facility 20, the amount of fluid supplied during the etching and deposition process may be different from the amount of fluid supplied during the cleaning process. For example, the fluid volume range of the fluid required for the substrate manufacturing process may be smaller than the fluid volume range of the fluid required for the cleaning process. In the following, a case where the fluid amount range required for the substrate manufacturing process is a micro flow rate range will be exemplarily described, and a case where the fluid amount range required for the cleaning process will be a general flow rate range will be exemplarily explained. Here, the micro flow rate range is 1/100 of F.S (Full Scale) or less, and the general flow rate range is 1/10 of F.S (Full Scale) or less or 1/1 of F.S (Full Scale) or less. do. In addition, the above-described fluid amount may mean the flow rate of fluid, and the fluid amount described below may also have the same meaning. The structures of the above-described fluid storage tank 10 and the substrate manufacturing facility 20 are not limited to this and may vary.

Figure 2 is a diagram showing the structure of a fluid control device according to an embodiment of the present invention.

In the following, the fluid control device 100 according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2. The fluid control device 100 according to an embodiment of the present invention may be a device that can control the amount of fluid discharged from a single internal flow path to different ranges. More specifically, the fluid control device 100 has an inflow passage 111 through which fluid flows in, an discharge passage 112 through which fluid is discharged, and a first flow path 113 capable of communicating with the inflow passage 111 on the inside. And it may include a main body 110 connected to the first flow path 113 and forming a second flow path 114 capable of communicating with the discharge path 112. In addition, the fluid control device 100 includes a differential pressure generator 120 installed between the first flow path 113 and the second flow path 114, and at least one of the first flow path 113 and the second flow path 114. A measuring unit 130 for measuring the state of the fluid in one, an outlet valve 140 capable of opening and closing between the second flow path 114 and the discharge path 112, an inflow path 111 and a first flow path ( 113) may include an inlet valve 150 that can be opened and closed, and a control unit 160 for controlling the amount of fluid discharged to the discharge path 112 to different heterogeneous ranges. Here, the different types of ranges may include, for example, a micro flow rate range and a general flow rate range that is larger than the micro flow rate range.

The main body 110 may be a part of the body of the fluid control device 100. For example, the main body 110 is made of a plurality of metallic blocks with a flow path formed on the inside, and can be assembled into integrated pipes using separate fastening means. The main body 110 has an inflow passage 111 on one side and an discharge passage 112 on the other side. Additionally, the main body 110 may have a first flow path 113 and a second flow path 114, which are passages through which fluid can move inside. Meanwhile, the fluid flowing into the main body 110 may move along a direction from one side of the main body 110 to the other side (hereinafter referred to as the fluid movement direction).

The inflow passage 111 is formed in a portion (i.e., one side) of the main body 110 adjacent to the fluid storage tank 10, and can receive fluid into the fluid control device 100. The inflow path 111 may be selectively communicated with the first flow path 113. That is, the inflow passage 111 may be connected to or disconnected from the first passage 113 by the operation of the inlet end valve 150, which will be described later. The inflow passage 111 may supply the fluid supplied from the fluid storage tank 10 to the first passage 113.

Meanwhile, the inflow passage 111 may have a constant diameter toward the first passage 113 (that is, along the fluid movement direction). On the other hand, the inflow passage 111 may be formed so that its diameter gradually decreases toward the first passage 113 (that is, along the fluid movement direction). That is, the size of the inner diameter of the main body 110 forming the inflow path 111 may be formed to decrease along the fluid movement direction.

In general, when the flow rate is the same, the smaller the cross-sectional area through which the fluid passes, the faster the fluid can move. Accordingly, when the fluid passes through the inflow passage 111, its moving speed can be increased, and more smoothly from the fluid storage tank 10 to the inside of the main body 110 (i.e., the first passage 113). can be supplied.

The discharge path 112 is installed on a portion (i.e., the other side) of the main body 110 adjacent to the substrate manufacturing facility 20 and can discharge fluid from the fluid control device 100. The discharge path 112 may be selectively communicated with the second flow path 114. That is, the discharge passage 112 may be connected to or disconnected from the second passage 114 by driving the discharge end valve 140, which will be described later. The discharge passage 112 can discharge fluid and supply it to the substrate manufacturing facility 20.

Meanwhile, the discharge passage 112 may have a constant diameter along the fluid movement direction. On the other hand, the discharge passage 112 may be formed so that its diameter gradually decreases along the fluid movement direction. That is, the size of the inner diameter of the main body 110 forming the discharge passage 112 may be formed to decrease along the fluid movement direction. Accordingly, when the fluid passes through the discharge path 112, its moving speed can be increased, and the fluid can be discharged more smoothly and moved to the substrate manufacturing equipment 20.

The differential pressure generator 120 is installed between the first flow path 113 and the second flow path 114, and can connect the first flow path 113 and the second flow path 114. The differential pressure generator 120 may be provided in a tubular shape and may generate a differential pressure between the first flow path 113 and the second flow path 114 when fluid passes. For this purpose, the differential pressure generator 120 is provided with a clamping plate (e.g., orifice plate or nozzle plate) with a hole formed therein, and can tighten the flow of fluid (i.e., induce differential pressure at the front and rear ends). there is. Accordingly, the differential pressure generator 120 may generate a differential pressure between the first flow path 113 and the second flow path 114. For example, the differential pressure generator 120 may be formed in an orifice structure.

The measuring unit 130 may measure the state of the fluid in at least one of the first flow path 113 and the second flow path 114. Here, the state of the fluid may include the pressure of the fluid, the temperature of the fluid, the molar ratio of the fluid within a preset volume, etc. That is, the measuring unit 130 measures the pressure of the fluid in at least one of the first flow path 113 and the second flow path 114, the temperature of the fluid in the first flow path 1130, and the temperature of the fluid in the first flow path 113. The molar ratio of a fluid can be measured. To this end, the measuring unit 130 may include a first sensor 131, a second sensor 132, and a temperature sensor 133.

The first sensor 131 can detect the pressure of fluid flowing in the first flow path 113. The first sensor 131 may be connected to the first flow path 113. That is, the first sensor 131 may be disposed between the inflow end valve 150 and the differential pressure generator 120, which will be described later, based on the fluid movement direction. Accordingly, the first sensor 131 can detect the pressure of the fluid flowing from the inflow passage 111 into the first passage 113 and moving to the differential pressure generator 120.

Additionally, the first sensor 131 may be electromagnetically connected to the receiving module 161 of the control unit 160, which will be described later. Accordingly, the first sensor 131 can transmit the measured pressure value to the receiving module 161. For example, the first sensor 131 may be provided as a non-amplified output pressure sensor, an amplified output pressure sensor, or a digital output pressure sensor.

The second sensor 132 may detect the pressure of fluid flowing in the second flow path 114. The second sensor 132 may be connected to the second flow path 114. That is, the second sensor 132 may be disposed between the differential pressure generator 120 and the discharge end valve 140, which will be described later, based on the fluid movement direction. Accordingly, the second sensor 132 can detect the pressure of the fluid flowing into the second flow path 114 through the differential pressure generator 120. Additionally, the second sensor 132 may be electromagnetically connected to the receiving module 161. Accordingly, the second sensor 132 can transmit the measured pressure value to the receiving module 161. For example, the second sensor 132 may be the same as the first sensor 131, and may be applied as a normal pressure sensor incorporating a sensor chip and a diaphragm.

The temperature sensor 133 may measure the temperature of the fluid in the first flow path 113. The temperature sensor 133 is connected to the first flow path 113 and may be electromagnetically connected to the receiving module 161. The temperature sensor 133 can measure the temperature of the fluid moving through the first flow path 113. Additionally, the temperature sensor 133 can convert the measured temperature value into a signal and transmit the converted signal to the receiving module 161. For example, the temperature sensor 133 may be provided as a contact-type temperature sensor or a non-contact-type temperature sensor.

The discharge end valve 140 is installed between the second flow path 114 and the discharge path 112, and may be electromagnetically connected to the control module 163 of the control unit 160. That is, the discharge end valve 140 can adjust the amount of fluid moving from the second flow path 114 to the discharge path 112 according to the control command transmitted from the control unit 160. That is, the discharge end valve 140 can adjust the amount of fluid discharged from the fluid control device 100 by changing the degree of opening between the second flow path 114 and the discharge path 112. The discharge end valve 140 can communicate or close the second flow path 114 and the discharge path 112, and can organically adjust the opening degree during the communication process. The discharge end valve 140 can set the amount of fluid discharged from the discharge path 112 to a micro flow rate range or a general flow rate range through control of the control module 163.

The inlet valve 150 is installed between the inlet 111 and the first flow path 113, and may be electromagnetically connected to the control module 163 of the control unit 160. That is, the inlet end valve 150 is controlled according to the control command transmitted from the control unit 160, and can control the amount of fluid flowing from the inlet passage 111 to the first flow path 113. That is, the inlet end valve 150 can adjust the amount of fluid flowing into the first flow path 113 by changing the degree of opening between the inflow path 111 and the first flow path 113.

Meanwhile, the discharge end valve 140 and the inlet end valve 150 depend on whether the control unit 160 discharges the amount of fluid discharged from the fluid control device 100 in the micro flow rate range or the general flow rate range. , the way it works may vary. That is, the order of operation and degree of opening of the discharge end valve 140 and the inlet end valve 150 can be selectively selected depending on whether the discharge end valve 140 and the inlet end valve 150 are controlled by the control unit 160 in a volumetric or differential pressure manner. It may vary. A detailed explanation related to this will be provided below while explaining the control unit 160.

The control unit 160 controls the operation of the inlet valve 150 and the outlet valve 140, and can control the amount of fluid discharged from the discharge path 112 in different ranges. Here, controlling the discharged fluid volume to different heterogeneous ranges may mean controlling the discharged fluid volume to be discharged in a micro flow rate range or controlling the discharged fluid volume to be discharged in a general flow rate range.

More specifically, the control unit 160 can control the amount of fluid discharged in a volumetric manner and discharge the amount of fluid in a fine flow rate range. Additionally, the control unit 160 can control the amount of fluid discharged using a differential pressure method to discharge the amount of fluid within the normal flow rate range. In the following, the control unit 160 uses the inlet valve 150, the outlet valve 140, the preset volume of the first flow path 113, the temperature sensor 133, and the first sensor 131 (i.e. , a volumetric method) will be described as an example in which the discharged fluid volume is controlled to a fine flow rate range. In addition, the control unit 160 uses the inlet valve 150, the outlet valve 140, the differential pressure generator 120, the first sensor 131, and the second sensor 132 (i.e., differential pressure method). ) The case where the discharged fluid volume is controlled to the general flow rate range is explained as an example.

Additionally, the control unit 160 may be operated manually by the user's judgment or operation. The user selects whether to discharge the fluid in the micro flow rate range or the general flow rate range from the fluid control device 100, and according to the user's selection, the user manually operates the control unit 160 to control the inlet valve 150 and The discharge end valve 140 can be selectively driven.

On the other hand, the control unit 160 may be automatically operated by a signal transmitted from the substrate manufacturing facility 20. That is, the substrate manufacturing facility 20 generates a signal by selecting whether it is a process that requires a fluid volume in the micro flow rate range (e.g., etching and deposition process) or a process that requires a fluid volume in the general flow rate range (e.g., cleaning process), The control unit 160 can receive the signal and selectively drive the inlet valve 150 and the outlet valve 140 to discharge a fluid amount appropriate for the process. In the following, a case in which the control unit 160 is automatically operated by a signal transmitted from the substrate manufacturing equipment 20 will be described as an example.

More specifically, the control unit 160 may include a reception module 161, a determination module 162, and a control module 163. The receiving module 161 is electromagnetically connected to the first sensor 131, the second sensor 132, and the temperature sensor 133, and the first sensor 131, the second sensor 132, and the temperature sensor 133 ) can receive the measured values. In addition, as described above, the receiving module 161 is electromagnetically connected to the substrate manufacturing facility 20, and receives a process signal requiring a fluid amount in the micro flow rate range and a process signal requiring a fluid amount in the general flow rate range from the substrate manufacturing facility 20. can be received. For example, the receiving module 161 receives measured values from the first sensor 131, the second sensor 132, and the temperature sensor 133 at preset times, or receives measured values in real time. You can. In the following, a case where the receiving module 161 receives measured values in real time from the first sensor 131, the second sensor 132, and the temperature sensor 133 will be described as an example. Additionally, the receiving module 161 may receive process signals from the substrate manufacturing facility 20 in real time.

The judgment module 162 can determine whether the amount of fluid to be discharged from the discharge path 112 is in the micro flow rate range or the general flow rate range. The judgment module 162 is electromagnetically connected to the receiving module 161, and determines whether the amount of fluid to be discharged is in the micro flow rate range or the general flow rate range through the signal received from the substrate manufacturing facility 20 in the receiving module 161. can do.

The control module 163 is connected to the judgment module 162 and the receiving module 161, respectively, and can control the amount of fluid discharged into the fine flow rate range or the general flow rate range according to the judgment result of the judgment module 162. there is.

Figure 3 is a diagram of operating the inlet valve to discharge in a micro flow rate range, Figure 4 is a diagram of operating the inlet valve and outlet valve to discharge in a micro flow rate range, and Figure 5 is a diagram of operating the inlet valve and outlet valve to discharge in a micro flow rate range. This is a diagram of operating the discharge valve to do this.

Referring to FIGS. 3 to 5, when the determination module 162 determines that the amount of fluid to be discharged is within the fine flow rate range, the control module 163 operates the inlet valve 150, the outlet valve 140, and the first Using the preset volume of the flow path 113, the temperature sensor 133, and the first sensor 131 (i.e., in a volumetric manner), the amount of fluid discharged can be controlled within a micro flow rate range.

As shown in FIG. 3, the control module 163 drives the inlet valve 150 to open the inlet 111 and the first flow path 113, and drives the outlet valve 140 to open the inlet 111 and the first flow path 113. The space between the second flow path 114 and the discharge path 112 can be closed. Accordingly, fluid may flow into the first flow passage 113 through the inflow passage 111.

Thereafter, as shown in FIG. 4, the inlet end valve 150 may be driven to close the space between the inflow passage 111 and the first flow passage 113. The control module 163 receives the pressure measurement value of the fluid flowing into the first flow path 113 measured by the first sensor 131 and measures the temperature in the first flow path 113 measured by the temperature sensor 133. A value can be passed. Meanwhile, the control module 163 may have a pre-designed volume value of the first flow path 113 (i.e., the volume of the first flow path 113) input in advance. Meanwhile, the fluid flowing into the first flow path 113 hardly moves to the second flow path 114 due to the differential pressure between the closed second flow path 114, the discharge path 112, and the differential pressure generator 130, Most can stay within the first euro area (113).

Thereafter, the control module 163 may drive the discharge end valve 140 to open the space between the second flow path 114 and the discharge path 112. Accordingly, the fluid in the first flow path 113 can move to the second flow path 112, pass between the open second flow path 114 and the discharge path 112, and move to the discharge path 112. . Accordingly, as the amount of fluid in the first flow path 113 changes, the measured values measured by the first sensor 131 and the temperature sensor 133 may change. The control module 163 monitors the measured value of the first sensor 131 (i.e., the pressure of the fluid in the first flow path 113) and the measured value of the temperature sensor 133 (i.e., the first flow path 113) in real time. temperature) can be transmitted. Here, the control module 163 can control the amount of fluid discharged within the micro flow rate range using Equation 1 below.

[Equation 1]

(Here, Q _(sccm) is the fluid volume value, P ₁ is the pressure value of the fluid in the first flow path when the inlet and outlet valves are closed (i.e., at the first time), and P ₂ is the inlet end valve. When the valve is closed and the outlet valve is opened (i.e., at the second time point), it is the pressure value of the fluid in the first flow path, t is the time value between the first time point and the second time point, and vol is the preset time point. It is the volume value of 1 flow path, and temp means the temperature value of the fluid in the first flow path.)

That is, the control module 163 drives the discharge end valve 140 so that the discharged fluid amount is discharged as much as the fluid amount in the preset micro flow rate range through Equation 1, and the second flow path 114 and the discharge path ( 112) The degree of openness between them can be adjusted. Accordingly, a fluid amount in the micro flow rate range may be discharged from the discharge passage 112. For example, the fluid volume in the micro flow rate range may be less than 1/100 of F.S., as described above.

As shown in FIG. 5, when the amount of fluid discharged from the discharge passage 112 is lower than the preset fine flow rate range, the discharge end valve 140 is operated to move the fluid between the second passage 114 and the discharge passage 112. It can be closed. Thereafter, as shown again in FIG. 3, the space between the inflow passage 111 and the first passage 113 can be opened to receive fluid.

Figure 6 is a diagram of discharging fluid volume in the normal flow rate range by controlling the discharge end valve.

Referring to FIG. 6, when the judgment module 162 determines that the amount of fluid to be discharged is within the general flow rate range, the control module 163 operates the inlet valve 150, the outlet valve 140, and the differential pressure generator 120. ), the amount of fluid discharged can be controlled to a general flow rate range using the first sensor 131 and the second sensor 132 (i.e., differential pressure method).

More specifically, the control module 163 drives the discharge end valve 140 first, and later operates the inlet end valve 150 according to the driven discharge end valve 140 to adjust the discharged fluid volume to the general flow rate range. It can be discharged. The control module 163 may drive the discharge end valve 140 to establish communication between the second flow path 114 and the discharge path 112. Here, as the space between the second flow path 114 and the discharge path 112 is opened, the measured value of the second sensor 132 may be 0 (i.e., in a vacuum state). Thereafter, the control module 163 may drive the inlet end valve 150 to establish communication between the inlet passage 111 and the first flow path 113. Here, the control module 163 controls the inlet end valve 150 so that the amount of fluid discharged from the discharge passage 112 is within the general flow rate range through Equation 2 below to connect the inlet passage 111 and the first The degree of openness between the flow paths 113 can be adjusted.

[Equation 2]

(Here, Q _(sccm) is the fluid volume value, K is the proportionality constant value, P ₁ is the pressure value of the fluid in the first flow path, and P ₂ means the pressure value of the fluid in the second flow path .)

That is, the control module 163 allows the pressure value of the fluid in the first flow path 113 to be greater than the pressure value of the fluid in the second flow path 114 by a preset value of the differential pressure generator 120, The inlet valve 150 can be driven. Accordingly, the fluid flows between the inflow passage 111 and the first passage 113, passes through the first passage 113, the differential pressure generator 120, and the second passage 114, and is discharged from the discharge passage 112. It can be discharged at a fluid volume within the flow rate range. For example, the fluid volume in the general flow rate range may be less than 1/10 of F.S., as described above.

Figure 7 is a diagram of controlling the inlet end valve to discharge fluid volume in the normal flow rate range.

Referring to FIG. 7, the control module 163 first drives the inlet valve 150 and later drives the outlet valve 140, thereby driving the outlet valve 140 first and then the inlet valve 150. The fluid volume can be discharged in a larger range than the fluid volume when driving. In other words, it can be discharged in the same general flow rate range, but with a larger general flow rate range. The control module 163 may drive the inlet valve 150 to establish communication between the inflow passage 111 and the first flow path 113. Thereafter, the control module 163 may drive the discharge end valve 140 to establish communication between the second flow path 114 and the discharge path 112. Here, the control module 163 allows the fluid amount discharged from the discharge path 112 through Equation 2 above to be discharged in a larger fluid amount range than when the discharge end valve 140 is driven first, The degree of opening between the second flow path 114 and the discharge path 112 can be adjusted by controlling the discharge end valve 140.

That is, the control module 163 allows the pressure value of the fluid in the second flow path 114 to be smaller than the pressure value of the fluid in the first flow path 113 by a preset value of the differential pressure generator 120, The discharge end valve 140 can be driven. Accordingly, the fluid flowing into the inlet 111 passes through the first flow path 113, the differential pressure generator 120, and the second flow path 114, and then passes through the discharge path 112 in the general flow rate range (i.e., the discharge end valve). A larger fluid volume range) than when driving 140 first can be discharged. Here, the general flow rate range may be less than 1/1 of F.S.

In this way, the fluid control device 100 controls the amount of fluid discharged through a single internal flow passage (i.e., the inflow passage 111, the first passage 113, the second passage 114, and the discharge passage 112). It can be controlled in different heterogeneous ranges (i.e., micro flow rate range and general flow rate range). That is, the fluid control device can precisely control the fluid volume in a relatively small discharged fluid volume range (i.e., a fine flow rate range) among different heterogeneous ranges by using a volumetric flow rate control method. In addition, the fluid control device uses a differential pressure flow control method, allowing precise control of the fluid volume with a relatively large discharged fluid volume range (i.e., general flow rate range).

In the following, a fluid control method according to an embodiment of the present invention will be described. In the following, in explaining the fluid control method, a case in which the fluid control method is performed using the above-described fluid control device 100 will be described as an example.

Figure 8 is a flow chart showing a fluid control method according to an embodiment of the present invention.

Referring to FIGS. 3 to 8, as a method for controlling the amount of fluid discharged from a single internal flow path in different heterogeneous ranges, fluid is supplied to the fluid control device 100, and the fluid of the fluid control device 100 is supplied. The process of moving fluid from the first flow path 113 to the second flow path 114 of the fluid control device (S110), the pressure value of the fluid in the first flow path 113 and the fluid in the second flow path 114 Process of measuring the pressure value (S120), process of discharging fluid in the general flow rate range from the fluid control device 100 based on the measured pressure values (S130), and re-measuring the pressure of the fluid in the first flow path 113 and measure the temperature of the first flow path, and based on the preset volume value of the first flow path 113, the remeasured pressure value, and the temperature value of the first flow path 113, the micro flow rate is a flow rate range smaller than the general flow rate range. It may include a process (S140) of discharging fluid by changing the range of the amount of fluid discharged.

Meanwhile, the fluid control method may first discharge the amount of fluid discharged into the micro flow rate range and then change the discharge amount range to the general flow rate range. In the following, the fluid control method will be described as an example in which the discharged fluid volume is first discharged in the general flow rate range and later changed to the fine flow rate range.

Referring to FIG. 6, the fluid is supplied to the fluid control device 100 and the fluid is moved from the first flow path 113 of the fluid control device 100 to the second flow path 114 of the fluid control device 100. (S110). More specifically, the judgment module 162 may determine that the amount of fluid to be discharged is within the general flow rate range. Here, when the judgment module 162 confirms through the receiving module 161 that the substrate manufacturing facility 20 should proceed with the cleaning process, the fluid control device 100 determines that the amount of fluid to be discharged is within the general flow rate range. You can. The determination module 162 may transmit the determined information to the control module 163.

The control module 163 uses the inlet valve 150, the outlet valve 140, the differential pressure generator 120, the first sensor 131, and the second sensor 132 (that is, in a differential pressure method). ) The amount of fluid discharged can be controlled within the normal flow rate range. That is, the control module 163 first drives the outlet valve 140 and then operates the inlet valve 150 according to the driven outlet valve 140 to discharge the discharged fluid volume in the normal flow rate range. You can do it. The control module 163 may drive the discharge end valve 140 to establish communication between the second flow path 114 and the discharge path 112. Thereafter, the control module 163 may drive the inlet end valve 150 to establish communication between the inlet passage 111 and the first flow path 113. Here, the first sensor 131 can measure the pressure value of the fluid in the first flow path 113, and the second sensor 132 can measure the pressure value in the second flow path 114 (S120) . Afterwards, the receiving module 161 receives the pressure values measured by the first sensor 131 and the second sensor 132, and the receiving module 161 can transmit the received pressure values to the control module 163. . The control module 163 can control the inlet valve 150 so that the amount of fluid discharged from the discharge path 112 is within the general flow rate range through Equation 2 below.

[Equation 2]

(Here, Q _(sccm) is the fluid volume value, K is the proportionality constant value, P ₁ is the pressure value of the fluid in the first flow path, and P ₂ means the pressure value of the fluid in the second flow path .)

Accordingly, the fluid flows into the inflow passage 111, passes through the first passage 113, the differential pressure generator 120, and the second passage 114, and reaches the general flow rate range (e.g., 1/10) in the discharge passage 112. of F.S or less) can be discharged. Accordingly, a cleaning process is performed in the substrate manufacturing facility 20, and by-products generated during the etching or deposition process can be removed.

Meanwhile, in the substrate manufacturing facility 20, after the cleaning process is performed, the substrate manufacturing process can be continued. Accordingly, the substrate manufacturing facility 20 needs to receive a fluid amount in the micro flow rate range from the fluid control device 100. Accordingly, the fluid control device 100 can change the discharged fluid amount from the general flow rate range to the fine flow rate range.

Referring to FIGS. 3 to 5, the determination module 162 may determine that the amount of fluid to be discharged through the receiving module 161 is within the fine flow rate range. Here, when the substrate manufacturing facility 20 confirms that the substrate manufacturing process must proceed, the judgment module 162 may determine that the amount of fluid to be discharged by the fluid control device 100 is within the microflow rate range. The determination module 162 may transmit the determined information to the control module 163.

The control module 163 uses the inlet valve 150, the outlet valve 140, the preset volume of the first flow path 113, the temperature sensor 133, and the first sensor 131 (i.e., volume method), the amount of fluid discharged can be controlled in the fine flow rate range. More specifically, the control module 163 drives the inlet valve 150 to open the inlet 111 and the first flow path 113, and drives the outlet valve 140 to open the second flow path ( The space between 114) and the discharge path 112 can be closed. Afterwards, when a predetermined fluid flows into the first flow path 113 through the inflow passage 111, the inlet end valve 150 can be driven to close the space between the second flow path 114 and the discharge passage 112. . Afterwards, the control module 163 receives the pressure measurement value of the fluid flowing into the first flow path 113 measured by the first sensor 131, and receives the pressure measurement value within the first flow path 113 measured by the temperature sensor 133. Temperature measurements can be received.

Thereafter, the control module 163 may drive the discharge end valve 140 to open the space between the second flow path 114 and the discharge path 112. Accordingly, the fluid moves between the open second flow path 114 and the discharge path 112, from the first flow path 113 to the discharge path 112 through the second flow path 114, and from this the first flow path 112 The measured values measured by the sensor 131 and the temperature sensor 133 are changed, and the control module 163 changes the measured value of the first sensor 131 (i.e., the pressure of the fluid in the first flow path 113). The measured value of the temperature sensor 133 (i.e., the temperature of the first flow path 113) can be received in real time. The control module 163 can control the discharge end valve 140 so that the amount of fluid discharged is within the fine flow rate range using Equation 1 below.

[Equation 1]

(Here, Q _(sccm) is the fluid volume value, P ₁ is the pressure value of the fluid in the first flow path when the inlet and outlet valves are closed (i.e., at the first time), and P ₂ is the inlet end valve. When the valve is closed and the outlet valve is opened (i.e., at the second time point), it is the pressure value of the fluid in the first flow path, t is the time value between the first time point and the second time point, and vol is the preset time point. It is the volume value of 1 flow path, and temp means the temperature value of the fluid in the first flow path.)

Accordingly, the fluid may be discharged from the discharge path 112 in a micro flow rate range (eg, 1/100 of F.S. or less). Accordingly, the substrate manufacturing process may proceed in the substrate manufacturing facility 20.

In this way, the fluid control device 100 forms the fluid volume discharged from a single internal flow path into different heterogeneous ranges (i.e., general flow rate range and micro flow rate range), so that the substrate manufacturing facility 20 has different ranges. Fluid volume can be supplied. Accordingly, different ranges of fluid amounts can be supplied to the substrate manufacturing facility 20 through the single fluid control device 100, allowing different processes to proceed in the substrate manufacturing facility 20.

Although embodiments of the present invention have been described in more detail with reference to the accompanying drawings, the present invention is not necessarily limited to these embodiments, and various modifications may be made without departing from the technical spirit of the present invention. . Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention, but are for illustrative purposes, and the scope of the technical idea of the present invention is not limited by these embodiments. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. The scope of protection of the present invention should be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope should be construed as being included in the scope of rights of the present invention.

10: fluid storage tank 20: substrate manufacturing equipment
100: fluid control device 110: main body
120: Differential pressure generating unit 130: Measuring unit
140: outlet valve 150: inlet valve
160: Control unit 163: Control module

Claims (10)

a main body having an inflow path through which a fluid flows in and an outlet path through which a fluid is discharged, and forming an inside of a first flow path capable of communicating with the inflow path and a second flow path connected to the first flow path and capable of communicating with the discharge path;
a differential pressure generator installed between the first flow path and the second flow path;
a measuring unit for measuring the state of fluid in at least one of the first flow path and the second flow path;
a discharge end valve disposed between the second flow path and the discharge path to open and close the space between the second flow path and the discharge path;
an inflow end valve disposed between the inflow passage and the first flow passage to open and close the connection between the inflow passage and the first flow passage; and
The discharge end valve and the inlet end valve are selectively controlled through the preset volume value of the first flow path and the measurement value of the measuring unit, so that the amount of fluid discharged from the discharge passage is greater than the micro flow rate range and the micro flow rate range. It includes a control unit for controlling the general flow rate range,
The measuring unit includes a temperature sensor for measuring the temperature in the first flow path,
The control unit,
a receiving module that receives measured values from a first sensor, a second sensor, and the temperature sensor;
a judgment module for determining whether the amount of fluid to be discharged from the discharge path is in the fine flow rate range or the general flow rate range; and
A control module connected to the determination module and the receiving module, and controlling the operating sequence and opening/closing amounts of the inlet valve and the outlet valve according to the determination result of the determination module,
The control module alternates the inlet valve and the outlet valve under the condition according to Equation 1 below according to the preset volume value of the first flow path and measured values of the first sensor and the temperature sensor. A fluid control device that opens and closes.
[Equation 1]

(Here, Q _(sccm) is the fluid volume value, P ₁ is the pressure value of the fluid in the first flow path when the inlet and outlet valves are closed (i.e., at the first time), and P ₂ is the inlet end valve. When the valve is closed and the outlet valve is opened (i.e., at the second time point), it is the pressure value of the fluid in the first flow path, t is the time value between the first time point and the second time point, and vol is the preset time point. It is the volume value of 1 flow path, and temp means the temperature value of the fluid in the first flow path.) In claim 1,
The measuring unit,
a first sensor for measuring the pressure of fluid in the first flow path;
It includes a second sensor for measuring the pressure of the fluid in the second flow path,
The control unit,
Controlling the fluid volume in the micro flow rate range to be discharged from the discharge passage through the measured values from the first sensor and the temperature sensor, and controlling the discharge from the discharge passage through the measurement values measured by the first sensor and the second sensor A fluid control device that controls the discharge of fluid volume within the general flow rate range. delete delete In claim 2,
The control module, in a state in which one of the inlet end valve and the outlet end valve is opened, the inflow is controlled under the condition according to Equation 2 below according to the measured values of the first sensor and the second sensor. A fluid control device that adjusts the opening ratio of the other one of the end valve and the discharge end valve.
[Equation 2]

(Here, Q _(sccm) is the fluid volume value, K is the proportionality constant value, P ₁ is the pressure value of the fluid in the first flow path, and P ₂ means the pressure value of the fluid in the second flow path .) In claim 5,
The difference between the measured values of the first sensor and the second sensor is equal to a preset value of the differential pressure generator,
The control module determines that the fluid volume when adjusting the opening rate of the inlet valve with the outlet valve open is greater than the fluid volume when adjusting the opening rate of the outlet valve with the inlet valve open. Formed fluid control device. In claim 2,
The determination module further includes an input member that receives input as to whether the amount of fluid to be discharged from the discharge path is in the micro flow rate range or the general flow rate range. In claim 1,
The discharge path is a fluid control device formed in an orifice structure to generate differential pressure when fluid passes through it. In claim 8,
The differential pressure generator, the inlet end valve, and the outlet end valve each have an orifice,
The size of the orifice of the differential pressure generator is smaller than the size of the orifice provided in the inlet valve and the outlet valve, and is larger than the size of the orifice formed in the discharge path. A process of supplying fluid to a fluid control device and moving the fluid from a first flow path of the fluid control device to a second flow path of the fluid control device;
A process of measuring the pressure value of the fluid in the first flow path and the pressure value of the fluid in the second flow path;
A process of discharging fluid in a general flow rate range from the fluid control device based on the measured pressure values;
Including a process of changing the flow rate range discharged from the fluid control device,
The process of changing the discharged flow rate range is,
A process of re-measuring the pressure of the fluid in the first flow path and measuring the temperature of the first flow path; and
A process of discharging fluid in a micro flow rate range, which is a flow rate range smaller than the general flow rate range, based on the preset volume value of the first flow path, the remeasured pressure value, and the temperature value of the first flow path,
The fluid control device,
A main body having an inflow path through which fluid flows in and an outlet path through which fluid is discharged, and forming on the inside the first flow path capable of communicating with the inflow path and the second flow path connected to the first flow path and capable of communicating with the discharge path. ;
a differential pressure generator installed between the first flow path and the second flow path;
a measuring unit for measuring the state of fluid in at least one of the first flow path and the second flow path;
a discharge end valve disposed between the second flow path and the discharge path to open and close the space between the second flow path and the discharge path;
an inflow end valve disposed between the inflow passage and the first flow passage to open and close the connection between the inflow passage and the first flow passage; and
The discharge end valve and the inlet end valve are selectively controlled through the preset volume value of the first flow path and the measurement value of the measuring unit, so that the amount of fluid discharged from the discharge passage is greater than the micro flow rate range and the micro flow rate range. It includes a control unit for controlling the general flow rate range,
The measuring unit includes a temperature sensor for measuring the temperature in the first flow path,
The control unit,
a receiving module that receives measured values from a first sensor, a second sensor, and the temperature sensor;
a judgment module for determining whether the amount of fluid to be discharged from the discharge path is in the fine flow rate range or the general flow rate range; and
A control module connected to the determination module and the receiving module, and controlling the operating sequence and opening/closing amounts of the inlet valve and the outlet valve according to the determination result of the determination module,
The control module alternates the inlet valve and the outlet valve under the condition according to Equation 1 below according to the preset volume value of the first flow path and measured values of the first sensor and the temperature sensor. A fluid control method that opens and closes.
[Equation 1]

(Here, Q _(sccm) is the fluid volume value, P ₁ is the pressure value of the fluid in the first flow path when the inlet and outlet valves are closed (i.e., at the first time), and P ₂ is the inlet end valve. When the valve is closed and the outlet valve is opened (i.e., at the second time point), it is the pressure value of the fluid in the first flow path, t is the time value between the first time point and the second time point, and vol is the preset time point. It is the volume value of 1 flow path, and temp means the temperature value of the fluid in the first flow path.)

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