KR102580827B1 - Electronic pressure controller and method for controlling chamber pressure using the same - Google Patents

Abstract

An electronic pressure controller capable of precisely controlling the pressure of a chamber and a chamber pressure control method are disclosed.
The electronic pressure controller includes a housing having a flow path for receiving fluid and guiding it to a chamber, at least one valve installed in the housing and opening and closing the flow path, a first sensor for measuring the pressure of the fluid flowing in the flow path, and the fluid flowing in the flow path. By comparing the first measurement value measured by the first sensor with the second sensor and preset pressure value for measuring the flow rate, and controlling the valve based on the change rate of the second measurement value measured by the second sensor, Includes a controller that regulates pressure.

Description

Electronic pressure controller and method for controlling chamber pressure using the same}

The present invention relates to an electronic pressure controller and a method of controlling the pressure of a chamber using the same. More specifically, it relates to an electronic pressure controller capable of precisely controlling the pressure of a chamber and a method of controlling the pressure of a chamber using the same.

In general, an electronic pressure controller is a device that supplies fluid to a chamber, and can measure and control the amount of fluid supplied and discharge it into the chamber. Electronic pressure controllers are key components used to control fluid volume in various fields (e.g., semiconductor manufacturing processes). Recently, fluid volume control has become very important in the semiconductor manufacturing process, and demand for and interest in electronic pressure controllers that precisely control fluid volume at high speed are increasing.

A conventional electronic pressure controller consists of a valve that opens and closes the flow path, a pressure sensor that detects the pressure of the fluid moving through the flow path, and a controller that measures the internal pressure of the chamber based on the signal detected from the pressure sensor. When a certain amount of fluid flows into the chamber through the flow path, the pressure sensor detects the pressure of the fluid in the flow path, and the internal pressure of the chamber can be indirectly measured through the detected pressure.

However, the conventional electronic pressure controller does not directly measure the internal pressure of the chamber, but indirectly measures the internal pressure of the chamber through the fluid pressure in the flow path, so even if the pressure sensor reaches the set pressure value, the actual pressure of the chamber The value may fall short of the set pressure value. In other words, there is a problem that the actual pressure value of the chamber does not reach the set pressure value when the pressure sensor reaches the set pressure value due to the length of the flow path between the pressure sensor and the chamber. Accordingly, the internal pressure of the chamber could not be precisely controlled, and the internal pressure of the chamber was not stabilized.

J.P. 2013-229052 A

The present invention is intended to solve the above problems and provides an electronic pressure controller capable of precisely controlling the pressure of a chamber and a method of controlling the pressure of the chamber using the same.

In addition, the present invention provides an improved electronic pressure controller that can quickly stabilize the pressure inside the chamber and a method of controlling the pressure of the chamber using the same.

Additionally, the present invention provides an electronic pressure controller capable of predicting the stabilization state of the chamber and a method of controlling the pressure of the chamber using the same.

An electronic pressure controller according to embodiments of the present invention for solving the above problems includes a housing provided with a flow path for receiving fluid and guiding it to a chamber; At least one valve installed in the housing and opening and closing the flow path; a first sensor for measuring the pressure of the fluid flowing through the flow path; a second sensor for measuring the flow rate of the fluid flowing through the flow path; And comparing the preset pressure value with the first measurement value measured by the first sensor, and controlling the valve based on the change rate of the second measurement value measured by the second sensor to adjust the pressure inside the chamber. Includes controller;

The second sensor is disposed between the first sensor and the valve, and the controller compares the rate of change of the second measured value with a preset flow rate change rate range, and the rate of change of the second measured value is set to the set rate. The valve is further opened to adjust the amount of fluid flowing into the chamber so that it falls within the flow rate change range.

The controller includes a receiving module connected to the first sensor and the second sensor, respectively; a determination module that determines the actual pressure value of the chamber by comparing the first measured value and the set pressure value, and comparing the change rate of the second measured value with the set flow rate change rate range; and a control module that adjusts the opening/closing amount and opening time of the valve according to the results of the determination module.

The determination module determines that, when the rate of change of the second measured value calculated at the point when the first measured value becomes equal to the set pressure value is within the set flow rate change range, the actual pressure value is equal to the set pressure value. If it is determined that they are the same, and the rate of change of the second measured value calculated at the point when the first measured value becomes equal to the set pressure value is not within the set flow rate change rate range, the actual pressure value becomes the set pressure value. It is judged to be less than the value.

When the judgment module determines that the actual pressure value is less than the set pressure value, the control module expands the opening degree of the valve or controls the valve to increase the time the valve is open.

The control module controls the valve to close the flow path when the judgment module determines that the actual pressure value is equal to the set pressure value.

The flow path includes a first flow path that receives fluid and is connected to the valve and the second sensor, and a second flow path that extends from the first flow path and is connected to the chamber and to which the first sensor is connected, The control module controls timing of the valve in proportion to the fluid speed in the second flow path.

The second flow path has a diameter smaller than that of the first flow path, and its diameter gradually decreases along the direction in which the fluid moves.

The second flow path is provided with a differential pressure element in at least part of the second flow path to generate a differential pressure when fluid passes therein, and measures the speed of the fluid in the second flow path based on the differential pressure element. It further includes a third sensor disposed at the front end of the second flow path, and a fourth sensor disposed at the rear end of the second flow path.

The valve includes at least one of a magnetic valve, a solenoid valve, and a piezo valve.

A method of controlling pressure in a chamber according to embodiments of the present invention includes the steps of opening a valve of an electronic pressure controller to supply fluid to the chamber; A process of calculating a first measurement value by measuring the pressure of a fluid moving in a flow path; A process of first determining whether the chamber is stabilized by comparing the first measurement value with a preset pressure value; When it is determined that the chamber is stabilized, the rate of change of the second measured value of the flow rate of the fluid measured at the time of comparing the first measured value and the set pressure value is compared with a preset flow rate change range, and the change rate of the chamber pressure is determined. Process of further determining whether stabilization is possible; And when it is further determined that the pressure of the chamber has been stabilized, a process of controlling the pressure of the chamber to a pressure corresponding to a subsequent process.

The process of determining whether the chamber is stabilized includes determining that the chamber is stabilized when the first measurement value is equal to the set pressure value, and determining that the chamber is stabilized when the first measurement value is different from the set pressure value. It is determined that the chamber is not stabilized, and the opening rate of the valve is adjusted.

The process of additionally determining whether the chamber is stabilized includes, when the second measurement value change rate is within the set flow rate change rate range, determining that the chamber is stabilized and closing the valve, and the second measurement value change rate is determined to be within the set flow rate change rate range. If the flow rate change rate is not within the set range, it is determined that the chamber is not stabilized and the valve is further opened or the opening time of the valve is increased.

According to the present invention, the pressure of the chamber can be precisely controlled through measured values from different sensors. Accordingly, it is possible to more easily stabilize the pressure inside the chamber.

Additionally, it is possible to re-check whether the internal pressure of the chamber is stabilized multiple times. Accordingly, it can be more clearly confirmed whether the internal pressure of the chamber is set to a preset pressure value.

Additionally, depending on the process taking place in the chamber, the internal pressure composition of the chamber can be quickly changed.

1 is a diagram schematically showing the structures of a fluid storage tank, an electronic pressure controller, and a chamber according to embodiments of the present invention.
Figure 2 is a perspective view of an electronic pressure controller according to embodiments of the present invention.
Figure 3 is a cross-sectional view schematically showing the structure of an electronic pressure controller according to an embodiment of the present invention.
Figure 4 is a cross-sectional view schematically showing the structure of an electronic pressure controller according to another embodiment of the present invention.
5A to 5C are diagrams illustrating the operation sequence of an electronic pressure controller according to an embodiment.
Figure 6 is a flow chart showing a pressure control method according to an embodiment of the present invention.

The embodiments described herein may be modified in various ways. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, the specific embodiments disclosed in the accompanying drawings are only intended to facilitate understanding of the various embodiments. Accordingly, the technical idea is not limited to the specific embodiments disclosed in the attached drawings, and should be understood to include all equivalents or substitutes included in the spirit and technical scope of the invention.

Terms containing ordinal numbers, such as first, second, etc., may be used to describe various components, but these components are not limited by the above-mentioned terms. The above-mentioned terms are used only for the purpose of distinguishing one component from another.

In this specification, terms such as “comprise” or “have” are intended to indicate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof. When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

Meanwhile, a “module” or “unit” for a component used in this specification performs at least one function or operation. And, the “module” or “unit” may perform a function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of “modules” or a plurality of “units” excluding a “module” or “unit” that must be performed on specific hardware or performed on at least one processor may be integrated into at least one module. Singular expressions include plural expressions unless the context clearly dictates otherwise.

In addition, when describing the present invention, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description thereof is abbreviated or omitted.

Hereinafter, various embodiments will be described in more detail with reference to the attached drawings.

The electronic pressure controller according to embodiments of the present invention may be a device that supplies fluid introduced from a fluid storage tank to, for example, a chamber where a substrate manufacturing process is performed and controls the internal pressure of the chamber. That is, the electronic pressure controller receives fluid from the fluid storage tank, supplies gas to the chamber, and can set the pressure inside the chamber to a different pressure depending on the substrate manufacturing process taking place in the chamber. In the following, the case where the fluid is a gaseous substance (i.e., gas) will be described by way of example.

1 is a diagram schematically showing the structures of a fluid storage tank, an electronic pressure controller, and a chamber according to embodiments of the present invention.

First, with reference to FIG. 1, the structure of the fluid storage tank 10 to which the electronic pressure controller 100 receives fluid and the structure of the chamber 20 to which the electronic pressure controller 100 supplies fluid will be described. .

The fluid storage tank 10 may be a tank that stores fluid and supplies the fluid to an electronic pressure controller. It may include a tank housing (not shown) and a supply hose (not shown).

The tank housing may be provided in the shape of a container in which fluid can be stored. For example, the inside of a tank housing may be divided into a plurality of spaces. Different fluids (i.e., gases) may be stored in a plurality of spaces inside the tank housing.

In general, different processes may occur in the chamber 20 to which fluid is to be supplied. For example, a substrate manufacturing process and a cleaning process may be performed in the chamber 20. Here, the substrate manufacturing process may be an etching process and a thin film deposition process, and the fluid supplied during the substrate manufacturing process may be a fluid containing, for example, NH3, NF3, SiH4, PH3, etc. Additionally, the cleaning process may be a process of removing by-products generated during the etching process or the thin film deposition process, and the fluid supplied during the cleaning process may be a fluid containing H2, Ar, etc. Accordingly, the fluid supplied during the substrate manufacturing process and the fluid supplied during the cleaning process can be stored separately in different spaces inside the tank housing.

The supply hose may be a passage through which fluid in the tank housing moves to the electronic pressure controller 100. The supply hose is installed in the tank housing, and one end of it may communicate with a space where fluid is stored inside the tank housing. Additionally, the other end of the supply hose may be connected to the inlet 111 of the electronic pressure controller 100, which will be described later. For example, the supply hose may be made of a rubber material so that it can bend and expand freely.

The chamber 20 can accommodate a substrate therein. The chamber 20 is connected to the electronic pressure controller 100 and can receive different types of fluids depending on the process. As described above, the chamber 20 can be supplied with the fluid necessary for etching and deposition when the substrate manufacturing process progresses. Additionally, when a cleaning process is performed, the chamber 20 can be supplied with the fluid required for the cleaning process.

The structures of the above-described fluid storage tank 10 and chamber 20 are not limited to this and may vary.

Figure 2 is a perspective view of an electronic pressure controller according to an embodiment of the present invention, and Figure 3 is a cross-sectional view schematically showing the structure of an electronic pressure controller according to an embodiment of the present invention.

In the following, the electronic pressure controller 100 according to an embodiment of the present invention will be described with reference to FIGS. 1 to 3. According to embodiments of the present invention, the electronic pressure controller 100 includes a housing 110 having a flow path 112 for receiving fluid and guiding it to the chamber 20, and is installed in the housing 110 and the flow path 112 ), at least one valve 120 that opens and closes, a first sensor 130 for measuring the pressure of the fluid flowing through the flow path 112, and a second sensor 140 for measuring the flow rate of the fluid flowing through the flow path 112. ) and the chamber ( 20) It may include a controller 150 that adjusts the internal pressure.

The housing 110 may be a part of the body of the electronic pressure controller 100. For example, the housing 110 is made of a plurality of metallic blocks with a flow path formed on the inside, and can be assembled into integrated pipes using separate fastening means. The housing 110 has an inlet 111 on one side and an outlet 113 on the other side. Additionally, the housing 110 may have a passage 112 inside the housing 110, which is a passage through which fluid can move. Meanwhile, the fluid flowing into the housing 110 may move along a direction (hereinafter referred to as a moving direction) from one side of the housing 110 to the other side.

The inlet 111 is formed in a portion (i.e., one side) of the housing 110 adjacent to the fluid storage tank 10, and can receive fluid into the electronic pressure controller 100. The inlet 111 may supply the fluid supplied from the fluid storage tank 10 to the flow path 112.

Meanwhile, the inlet 111 may have a constant diameter toward the flow path 112 (that is, along the moving direction). On the other hand, the inlet 111 may be formed so that its diameter gradually decreases toward the flow path 112 (that is, along the moving direction). That is, the size of the inner diameter of the housing 110 forming the inlet 111 may be formed to decrease along the direction of movement of the fluid.

In general, when the fluid has the same flow rate, the smaller the cross-sectional area it passes through, the faster the fluid can move. Accordingly, when the fluid passes through the inlet 111, its moving speed can be increased and it can be supplied more quickly from the fluid storage tank 10 to the inside of the housing 110 (i.e., the flow path 112). there is.

The flow path 112 may serve as a path for receiving fluid from the outside of the housing 110 (i.e., the fluid storage tank 10) and moving it to the chamber 20. The flow path 112 may be provided inside the housing 110. The flow path 112 may include a first flow path 112a and a second flow path 112b arranged sequentially along the direction of movement of the fluid.

The front end of the first flow path 112a may be connected to the inlet 111, and the rear end may be connected to the front end of the second flow path 112b. Meanwhile, the front end of the first flow path 112a may be provided with the inlet 111 described above. A valve 120 and a second sensor 140, which will be described later, may be installed in the first flow path 112a. Accordingly, the first flow path 112a can introduce fluid into the first flow path 112a by driving the valve 120.

The front end of the second flow path 112b may be connected to the rear end of the first flow path 112a, and the rear end may be connected to the outlet 113. Meanwhile, the rear end of the second flow path 112b may be provided with an outlet 113, which will be described later. A first sensor 130, which will be described later, may be installed in the second flow path 112b. Accordingly, the fluid flowing in through the first flow path 112a may flow into the second flow path 112b and be supplied to the chamber 20 through the outlet 113.

The outlet 113 is installed in a portion of the flow path 112 adjacent to the chamber 20 (i.e., at the rear end) and can discharge fluid into the chamber 20. The outlet 113 may be provided separately from the second flow path 112b, or may be provided integrally with the rear end of the second flow path 112b.

Meanwhile, the outlet 113 may have a constant diameter along the direction of movement of the fluid. On the other hand, the outlet 113 may be formed so that its diameter gradually decreases along the fluid movement direction. That is, the size of the inner diameter of the housing 110 forming the outlet 113 may be formed to decrease along the moving direction. Accordingly, when the fluid passes through the outlet 113, its moving speed can be increased, and the fluid can be more smoothly discharged and supplied to the chamber 20.

The valve 120 is installed in the flow path 112, and the valve 120 can open or close the inside of the flow path 112, and can organically adjust the opening degree during the communication process. The valve 120 may be electromagnetically connected to the control module 153 of the controller 150. That is, the valve 120 can adjust the amount of fluid moving from the inlet 111 to the outlet 113 according to the control command transmitted from the controller 150. That is, the valve 120 can adjust the amount of fluid supplied to the chamber 20 through the outlet 113 by changing the degree of opening of the flow path 112. For example, the valve 120 may be provided as at least one of a magnetic valve, a solenoid valve, and a piezo valve.

The first sensor 130 can detect the pressure of fluid flowing in the flow path 112. The first sensor 131 may be connected to the second flow path 112b. That is, the first sensor 130 may be disposed between the second sensor 140, which will be described later, and the outlet 113 and the chamber 20, based on the direction of movement of the fluid. Accordingly, the first sensor 130 may pass through the first flow path 112a and detect the pressure of the fluid supplied to the chamber 20 from the second flow path 112b.

Additionally, the first sensor 130 may be electromagnetically connected to the receiving module 151 of the controller 150, which will be described later. Accordingly, the first sensor 130 may transmit the measured first measurement value (i.e., a measurement value related to the pressure of the fluid) to the receiving module 151. For example, the first sensor 130 may be provided as a non-amplified output pressure sensor, an amplified output pressure sensor, a digital output pressure sensor, etc.

The second sensor 140 may measure the flow rate of fluid flowing in the first flow path 112a. The second sensor 140 may be connected to the first flow path 112a. That is, the second sensor 140 may be disposed between the valve 120 and the first sensor 130 based on the fluid movement direction. Accordingly, the second sensor 140 can measure the flow rate of the fluid in the first flow path 112a before flowing into the second flow path 112b.

Additionally, the second sensor 140 may be electromagnetically connected to the receiving module 151. Accordingly, the second sensor 140 may transmit the measured second measurement value (i.e., the fluid flow rate value) to the receiving module 151.

The controller 150 compares the preset set pressure value with the first measurement value measured by the first sensor 130, and operates the valve 120 based on the change rate of the second measurement value measured by the second sensor 140. By controlling , the pressure inside the chamber 20 can be set to a preset pressure value. The controller 150 may first determine whether the pressure of the chamber 20 is stabilized using the first measurement value, and secondarily determine whether the pressure of the chamber 20 is stabilized using the second measurement value. The controller 150 may control the valve 120 according to the determined result to stabilize the pressure inside the chamber 20. Here, pressure stabilization is to adjust the interior of the chamber 20 to a controllable pressure range in advance so that the interior of the chamber 20 can be adjusted to a pressure range corresponding to each process before the substrate manufacturing process proceeds in the chamber 20. It may be forming. The controller 150 may include a reception module 151, a determination module 152, and a control module 153.

The receiving module 151 is electromagnetically connected to the first sensor 130 and the second sensor 140, and the first measurement value measured by the first sensor 130 and the second sensor 140 are connected to each other electromagnetically. 2 Measurement values can be received. For example, the receiving module 151 may receive measured values from the first sensor 130 and the second sensor 140 at preset times or time ranges. Alternatively, the receiving module 151 may receive measured values from the first sensor 130 and the second sensor 140 in real time. In embodiments of the present invention, a case where the receiving module 151 receives measured values in real time from the first sensor 130 and the second sensor 140 will be described as an example.

The determination module 152 is electromagnetically connected to the receiving module 151 and can receive the first and second measured values from the receiving module 151 in real time or at time intervals. The judgment module 152 compares the first measured value and the preset pressure value, compares the rate of change of the second measured value with the preset flow rate change rate range to confirm the actual pressure value of the chamber 20, and determines the actual pressure value of the chamber 20. It can be determined whether the pressure is in a stabilized state.

More specifically, the determination module 152 may first determine whether the chamber 20 is stabilized using the first measurement value. That is, the judgment module 152 compares the preset set pressure value with the first measured value, and when the first measured value is equal to the preset set pressure value, it first determines that the internal pressure of the chamber 20 has been stabilized. can do. On the other hand, if the first measurement value is different from the preset pressure value, it may be determined that the internal pressure of the chamber 20 has not been stabilized.

Meanwhile, the judgment module 152 may compare the preset set pressure value range and the first measured value, and compare whether the first measured value is within the preset set pressure value range. When the first measurement value is within a preset pressure value range, the determination module 152 may first determine that the internal pressure of the chamber 20 has been stabilized. On the other hand, the judgment module 152 may determine that the internal pressure of the chamber 20 has not been stabilized when the first measurement value is not within the preset pressure value range.

Meanwhile, even if the determination module 152 first determines that the internal pressure of the chamber 20 has been stabilized, since the first sensor does not directly measure the inside of the chamber 20, the preset pressure value (i.e. 1 measured value) may be different from the actual pressure value of the chamber 20. Depending on the length of the second flow path 112b and the speed of the fluid passing through the second flow path, the second flow path 112b directly measured by the first sensor 130 may be formed at a preset pressure value, but the chamber The interior of (20) may not yet be formed at the preset pressure value. That is, the actual pressure value inside the chamber 20 may be lower than the preset pressure value. Accordingly, the determination module 152 can use the second measurement value to secondarily determine whether the pressure inside the chamber 20 is stabilized.

When the judgment module 152 first determines that the internal pressure of the chamber 20 is stabilized, the judgment module 152 may then compare the second measured value change rate with a preset set flow rate change rate range. To this end, the judgment module 152 may calculate the rate of change of the second measurement value received over a predetermined period of time. The judgment module 152 may compare whether the rate of change of the calculated second measurement value is within a preset set flow rate change rate range. When the rate of change of the second measured value is within the preset flow rate change rate range, the judgment module 152 may make a secondary judgment (i.e., a final judgment) that the internal pressure of the chamber 20 has been stabilized. On the other hand, if the rate of change of the second measured value does not fall within the preset flow rate change rate range, it may be determined that the internal pressure of the chamber 20 has not been stabilized.

The control module 153 can adjust the opening/closing amount and opening time of the valve 120 according to the judgment result of the judgment module 152. The control module 153 may adjust the amount of fluid flowing into the chamber 20 by additionally opening the valve 120 or increasing the opening time of the valve 120. Accordingly, the rate of change of the second measured value can be formed within a preset set flow rate change rate range.

More specifically, when the judgment module 152 determines that the actual pressure value is less than the preset pressure value, the control module 153 expands the opening degree of the valve 120 or opens the valve 120. The valve 120 can be controlled to increase the time. In addition, when the judgment module 152 determines that the actual pressure value is the same as the preset pressure value, the control module 153 closes the first flow path 112a (or maintains a constant valve opening). The valve 120 can be controlled. Accordingly, the internal pressure of the chamber 20 is set to a preset pressure value under the control of the control module 153, so that the pressure inside the chamber 20 can be stabilized. Thereafter, in a state where the pressure inside the chamber 20 is stabilized, the control module 153 may further control the valve 120 so that the chamber 20 has a pressure composition corresponding to the subsequent process.

Figure 4 is a cross-sectional view schematically showing the structure of an electronic pressure controller according to another embodiment of the present invention. In the following, an electronic pressure controller according to another embodiment of the present invention will be described in detail with reference to FIG. 4. At this time, description of the same structure as an embodiment of the present invention will be omitted.

The second flow path 112b may be provided with a differential pressure element 112c to generate differential pressure when fluid passes therein. The pressure differential element 112c may generate a differential pressure between the front end of the second flow path 112b and the rear end of the second flow path 112b. For this purpose, the differential pressure element 112c has a tightening plate (e.g., an orifice plate or a nozzle plate) with a hole formed therein, and is capable of tightening the flow of fluid (i.e., the front end of the second flow path and the second flow path). Differential pressure can be induced at the rear end. Accordingly, the differential pressure element 112c can generate differential pressure when fluid passes through the second flow path. For example, the differential pressure element 112c may be formed in an orifice structure.

Meanwhile, the electronic pressure controller 100 may further include a third sensor 160 and a fourth sensor 170. That is, the electronic pressure controller 100 includes a third sensor 160 connected to the front end of the second flow path 112b and a second flow path ( It may further include a fourth sensor 170 connected to the rear end of 112b). Here, the third sensor 160 and the fourth sensor 170 are each electromagnetically connected to the receiving module 151, and can transmit the measured speed values to the receiving module 151.

The receiving module 151 may transmit the speed measurement values measured by the third sensor 160 and the fourth sensor 170 to the determination module 152.

When it is determined that the actual pressure value of the chamber 20 is lower than the preset pressure value, the judgment module 152 calculates the difference, calculates the amount of fluid inflow supplied to the chamber 20 in real time, and calculates the valve opening. The point of fixation can be determined. More specifically, the determination module 152 determines the actual pressure inside the chamber 20 through the first speed measurement value measured by the third sensor 160 and the second speed measurement value measured by the fourth sensor 170. The point in time when the pressure becomes equal to the preset pressure value can be calculated. For example, the determination module 152 determines the length of the second flow path 112b, the first speed measurement value measured from the third sensor 160 at the first time point, and the fourth sensor 170 at the second time point. Using the measured second velocity value, the velocity of the fluid flowing into the chamber 20 from the outlet 113 can be calculated. Here, the judgment module 152 uses formulas for time, distance and speed to check the time for the fluid to flow in equal to the difference between the actual pressure value of the chamber 20 and the preset set pressure value, and the fluid inflow is completed. You can decide when it will happen.

The control module 153 may receive a determination result regarding when fluid will flow in equal to the difference between the actual pressure value of the chamber 20 and the preset pressure value from the judgment module 152. Accordingly, the control module 153 can control the timing of the valve 120 according to the time point corresponding to the decision result received from the judgment module 152. That is, the control module 153 can close the valve 120 at the time corresponding to the judgment result. Accordingly, the valve can be closed at the point when the actual pressure value inside the chamber 20 becomes equal to the preset pressure value, and the pressure inside the chamber 20 can be precisely controlled.

The structure and shape of the electronic pressure controller 100 described above are not limited to this and may vary.

Meanwhile, the process of controlling the pressure inside the chamber using the electronic pressure controller 100 according to embodiments of the present invention will be explained together with the method of controlling the pressure of the chamber.

In the following, a method for controlling pressure in a chamber according to embodiments of the present invention will be described. In the following, in explaining the chamber pressure control method, a case in which the chamber pressure control method is performed using the above-described electronic pressure controller 100 will be described as an example.

FIGS. 5A to 5C are diagrams showing the operation sequence of an electronic pressure controller according to an embodiment of the present invention, and FIG. 6 is a flow chart showing a method of controlling the pressure of a chamber according to an embodiment of the present invention.

5A to 5C and 6, the present invention is a method of controlling the internal pressure of the chamber 20 using the electronic pressure controller 100, by opening the valve 120 of the electronic pressure controller 100. A process of supplying fluid to the chamber 20 (S110), a process of calculating the first measurement value by measuring the pressure of the fluid moving through the flow path 112 (S120), and calculating the first measurement value with the preset pressure value. A process of first determining whether the chamber 20 is stabilized by comparison (S130). When it is first determined that the chamber 20 is stabilized, the flow rate of the fluid measured at the time of comparing the first measurement value and the set pressure value is determined (S130). A process of secondarily determining whether the pressure of the chamber 20 is stabilized by comparing the second measured value change rate with the preset flow rate change range (S140), and if it is determined that the pressure of the chamber 20 is stabilized, the pressure of the chamber 20 is adjusted. It may include a process (S150) of controlling the pressure corresponding to the subsequent process.

Referring to FIG. 5A, fluid can be supplied to the chamber 20 by opening the valve 120 of the electronic pressure controller 100 (S110). That is, the fluid in the fluid storage tank 10 may flow into the inlet 111 of the electronic pressure controller through the supply hose. Fluid flowing into the inlet 111 may be supplied to the flow path 112.

Referring to FIG. 5B, the valve 120 may be operated to move fluid from the first flow path 112a to the second flow path 112b. Thereafter, the fluid may pass through the outlet 113 and flow into the chamber 20.

Here, the first measurement value can be calculated by measuring the pressure of the fluid moving through the second flow path 112b using the first sensor 130 (S120). That is, the first sensor 130 can measure the pressure of the fluid passing through the second flow path 112b in real time or at a set time range. Thereafter, the first sensor 130 may transmit the measured first measurement value to the receiving module 151. The receiving module 151 may transmit data about the received first measurement value to the determination module 152.

Thereafter, the determination module 152 can first determine whether the chamber is stabilized by comparing the first measurement value with a preset pressure value (S130). That is, the judgment module 152 compares the preset set pressure value with the first measured value, and the first measured value is equal to the preset set pressure value, or the first measured value is formed within the preset set pressure value range. case. It can be initially determined that the internal pressure of the chamber 20 has been stabilized.

When it is first determined that the chamber 20 is stabilized, the judgment module 152 sets the second measurement value change rate for the flow rate of the fluid measured at the time of comparing the first measurement value and the set pressure value to the preset flow rate change rate range. By comparison, it is possible to secondarily determine whether the pressure of the chamber 20 is stabilized (S140). That is, the judgment module 152 may first determine that the internal pressure of the chamber 20 has been stabilized, and then compare the second measured value change rate with a preset set flow rate change rate range.

The judgment module 152 may compare whether the rate of change of the calculated second measurement value is within a preset set flow rate change rate range. Here, when the rate of change of the second measured value is within the preset flow rate change rate range, the judgment module 152 may make a secondary judgment (i.e., a final judgment) that the internal pressure of the chamber 20 has been stabilized.

On the other hand, if the rate of change of the second measured value does not fall within the preset flow rate change rate range, it may be determined that the internal pressure of the chamber 20 has not been stabilized. Accordingly, the determination module 152 may determine that it is necessary to supply more fluid to the chamber 20.

Referring to FIG. 5C, the control module 153 can adjust the opening/closing amount and opening time of the valve 120 according to the determination result of the judgment module 152. If the judgment module 152 determines that the actual pressure value is less than the preset pressure value, the control module 153 expands the opening degree of the valve 120 or increases the time for which the valve 120 is opened. You can.

Additionally, when the determination module 152 determines that the actual pressure value is equal to the preset pressure value, the control module 153 may control the valve 120 so that the first flow path 112a is closed. Accordingly, the internal pressure of the chamber 20 is set to a preset pressure value under the control of the control module 153, so that the pressure inside the chamber 20 can be stabilized.

Afterwards, when it is determined that the pressure of the chamber 20 has stabilized, the pressure of the chamber 20 can be controlled to a pressure corresponding to the subsequent process (S150). That is, in a state where the pressure inside the chamber 20 is stabilized, the control module 153 can additionally control the valve 120 so that the chamber 20 has a pressure composition corresponding to the subsequent process.

In this way, the pressure of the chamber can be precisely controlled through the measured values of different sensors. Accordingly, it is possible to more easily stabilize the pressure inside the chamber. Additionally, it is possible to re-check whether the internal pressure of the chamber is stabilized multiple times. Accordingly, it can be more clearly confirmed whether the internal pressure of the chamber is set to a preset pressure value. Additionally, depending on the process taking place in the chamber, the internal pressure composition of the chamber can be quickly changed.

Although embodiments of the present invention have been described in more detail with reference to the accompanying drawings, the present invention is not necessarily limited to these embodiments, and various modifications may be made without departing from the technical spirit of the present invention. . Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but are for illustrative purposes, and the scope of the technical idea of the present invention is not limited by these embodiments. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. The scope of protection of the present invention should be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope should be construed as being included in the scope of rights of the present invention.

10: fluid storage tank 20: chamber
100: Electronic pressure controller 110: Housing
120: valve 130: first sensor
140: second sensor 150: controller

Claims (13)

A housing provided with a flow path for receiving fluid and guiding it to the chamber;
At least one valve installed in the housing and opening and closing the flow path;
a first sensor for measuring the pressure of the fluid flowing through the flow path;
a second sensor for measuring the flow rate of the fluid flowing through the flow path; and
A controller that adjusts the pressure inside the chamber by comparing the preset pressure value with the first measurement value measured by the first sensor and controlling the valve based on the change rate of the second measurement value measured by the second sensor. Contains ;,
The second sensor is disposed between the first sensor and the valve,
The controller is,
The rate of change of the second measured value is compared with a preset flow rate change rate range, and the valve is further opened so that the change rate of the second measured value is within the preset flow rate change range to increase the amount of fluid flowing into the chamber. adjust,
a receiving module connected to the first sensor and the second sensor, respectively; a judgment module that determines the actual pressure value of the chamber by comparing the first measured value and the preset pressure value, and comparing the rate of change of the second measured value with the preset flow rate change range; and a control module that adjusts the opening/closing amount and opening time of the valve according to the results of the judgment module. delete delete In claim 1,
The determination module first determines that the pressure inside the chamber is stabilized because the first measured value is equal to the preset pressure value, and determines that the calculated change rate of the second measured value will be within the preset flow rate change rate range. In this case, it is secondarily determined that the actual pressure value is the same as the preset pressure value,
In a state where it is first determined that the first measured value is equal to the preset pressure value, if the calculated change rate of the second measured value is not within the preset flow rate change range, the actual pressure value is determined to be equal to the preset pressure value. An electronic pressure controller that secondarily determines that the pressure is below the set pressure value. In claim 4,
The control module is an electronic type that controls the valve to expand the opening degree of the valve or increase the opening time of the valve when the judgment module determines that the actual pressure value is less than the preset pressure value. Pressure controller. In claim 4,
The control module is an electronic pressure controller that controls the valve to close the flow path when the judgment module determines that the actual pressure value is equal to the preset pressure value. In claim 1,
The flow path includes a first flow path that receives fluid and is connected to the valve and the second sensor, and a second flow path that extends from the first flow path and is connected to the chamber and to which the first sensor is connected,
The control module is an electronic pressure controller that controls timing of the valve in proportion to the fluid speed in the second flow path. In claim 7,
The second flow path has a diameter smaller than that of the first flow path, and the second flow path has a diameter that gradually decreases along the direction in which the fluid moves. In claim 7,
The second flow path is provided with a differential pressure element in at least part of the second flow path to generate differential pressure when fluid passes therein,
To measure the speed of fluid in the second flow path, it further includes a third sensor disposed at the front end of the second flow path based on the differential pressure element, and a fourth sensor disposed at the rear end of the second flow path. Electronic pressure controller. In claim 7,
The valve is an electronic pressure controller including at least one of a magnetic valve, a solenoid valve, and a piezo valve. In a method of controlling the pressure of a chamber for semiconductor processing using an electronic pressure controller,
The process of supplying fluid to the chamber by opening the valve of the electronic pressure controller;
A process of calculating a first measurement value by measuring the pressure of a fluid moving in a flow path;
Comparing the first measured value with a preset pressure value to determine whether the chamber pressure is stabilized;
When it is determined that the chamber is first stabilized by comparing the first measurement value and the preset pressure value, the rate of change of the second measurement value related to the measured flow rate of the fluid is compared with the preset flow rate change rate range, and the chamber pressure The process of secondarily determining whether or not is stabilized; and
When it is determined that the pressure of the chamber is stabilized, controlling the pressure of the chamber to a pressure corresponding to a subsequent process. In claim 11,
The process of determining whether the chamber pressure is stabilized is,
When the first measurement value is equal to the preset pressure value, it is determined that the pressure of the chamber has been stabilized,
A chamber pressure control method for determining that the chamber is not stabilized and adjusting the opening of the valve when the first measured value is different from the preset pressure value. In claim 11,
The process of additionally determining whether the chamber pressure is stabilized is:
When the second measured value change rate is within the preset flow rate change range, it is determined that the pressure in the chamber has stabilized and the valve is closed,
When the second measurement value change rate is not within the preset flow rate change range, a chamber pressure control method determines that the pressure in the chamber is not stabilized and further opens the valve or increases the opening time of the valve. .

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