KR102566357B1 - Manufacturing method of antibacterial substrate and the antibacterial substrate thereby - Google Patents

Abstract

The present invention relates to an antibacterial and antiviral substrate, and relates to a first step of preparing a glass substrate, and putting the glass substrate into a process chamber for a sputtering process so that the entire surface of the glass substrate is antibacterial and antiviral. A second step of forming a layer and a third step of forming a functional layer on top of the antibacterial and antiviral layer by introducing the glass substrate on which the antibacterial and antiviral layer is formed into a load lock chamber connected to the process chamber. A method for manufacturing an antibacterial and antiviral substrate and an antibacterial and antiviral substrate produced thereby are technical points. As described above, the present invention promotes antibacterial and antiviral properties by forming an antibacterial and antiviral layer on the entire surface of a glass substrate by a sputtering process, and functions by a continuous process without separate pretreatment or process interruption after forming the antibacterial and antiviral layer. It is possible to increase production efficiency while reducing production cost by promoting continuity of the process by forming a layer, and supplying reaction gas during the sputtering process of forming the antibacterial and antiviral layer to determine the reactivity of the compound constituting the antibacterial and antiviral layer. By increasing the composition of the complete compound for the antibacterial/antiviral layer, it is possible to provide an antibacterial and antiviral substrate with high permeability and high hardness.

Description

Manufacturing method of antibacterial and antiviral substrate and antibacterial and antiviral substrate prepared thereby {Manufacturing method of antibacterial substrate and the antibacterial substrate thereby}

The present invention relates to an antibacterial and antiviral substrate, wherein an antibacterial and antiviral layer is formed on the entire surface of a glass substrate by a sputtering process to promote antibacterial and antiviral properties, and functions by a continuous process after forming the antibacterial and antiviral layer. It relates to a method for manufacturing an antibacterial and antiviral substrate to increase production efficiency by forming a layer to promote continuity of the process, and to an antibacterial and antiviral substrate manufactured thereby.

Recently, with the emergence of new viruses and bacteria around the world, research on antibacterial and antiviral products is being actively conducted.

A simple method of imparting antibacterial and antiviral properties to a product includes coating an antibacterial and antiviral material on the surface of the product or attaching an antibacterial and antiviral film to the surface of the product.

In general, silver (Ag) or copper (Cu) nanoparticles are used as the most commonly used antibacterial and antiviral substances, and they are used by coating them on the product surface. After time, these antibacterial and antiviral substances are peeled off, and there is a problem in that they do not perform their functions.

Therefore, in recent years, antibacterial and antiviral films have been widely used in that they are convenient to apply and can be applied to various products.

In particular, these antibacterial and antiviral films are coated or attached to elevator operation buttons used by many people, touch panels of various electronic products, and various operation buttons.

However, in the case of such an antibacterial/antiviral film, the surface of the substrate is simply provided in a form in which the antibacterial/antiviral material is coated, and the problem of the antibacterial/antiviral material being peeled off over time still remains.

In addition, when such an antibacterial/antiviral film is coated on the surface of a product, it also serves to protect the surface of the product to some extent. If it is not performed, the antibacterial and antiviral properties gradually deteriorate.

On the other hand, in the case of a portable information communication terminal such as a smart phone, input and output of various information is implemented through a display panel, and it is operated by touching it and information is acquired. A cover window is formed on the upper surface of the display panel to protect it, and research on a glass-based cover window has recently been actively conducted.

In particular, in the case of a smartphone, many harmful bacteria adhere to the surface of the cover window during continuous hand touch, and are continuously exposed to droplets or surrounding viruses or bacteria, so that the surface of the smartphone is parasitic with harmful bacteria. A very suitable environment is created.

Accordingly, there is a need to impart antibacterial and antiviral properties to the cover window for protecting the display panel of a smartphone and to maintain it.

Patent application number 10-2020-0117137 (antibacterial flexible cover window)

The present invention was invented in response to the above necessity, and an antibacterial and antiviral layer is formed on the entire surface of a glass substrate by a sputtering process to promote antibacterial and antiviral properties, and a functional layer is formed by a continuous process after forming the antibacterial and antiviral layer. Its purpose is to provide a method for manufacturing an antibacterial and antiviral substrate to increase production efficiency by forming a process continuity and to provide an antibacterial and antiviral substrate prepared thereby.

The present invention is to achieve the above object, in the first step of preparing a glass substrate, and by introducing the glass substrate into a process chamber for a sputtering process, an antibacterial/antiviral layer on the entire surface of the glass substrate. and a third step of forming a functional layer on the antibacterial/antiviral layer by introducing the glass substrate on which the antibacterial/antiviral layer is formed into a deposition chamber connected to the process chamber. A method for manufacturing an antibacterial and antiviral substrate and an antibacterial and antiviral substrate manufactured thereby are technical points.

In addition, in the second step, it is preferable to supply a reaction gas from a reaction gas supply source formed on one side of the process chamber to increase the reactivity of the compound constituting the antibacterial and antiviral layer, and the reaction gas is the antibacterial and antiviral It is preferable to supply to a gas reaction region spatially separated from the sputtering region for forming the layer.

In addition, the process chamber in the second step preferably includes a drum-type substrate holder that rotates therein, and the target holder is disposed in a direction perpendicular to the rotational axis of the substrate holder.

In addition, it is preferable that the target holder is formed singular or plural, and a shielding film may be formed around the target holder.

In addition, the glass substrate in the first step may be supplied in units of cells by cutting the mother substrate, or may be supplied in sheet cutting, and the glass substrate in units of cells or the sheet-cut glass substrate is chemically strengthened to increase strength. can be reinforced.

In addition, a load-lock chamber or an in-line chamber for in-line sputtering may be used as the deposition chamber.

Also, after the third step, it is preferable to laminate a privacy film on the rear surface of the glass substrate.

In addition, it is preferable to form an adhesive layer for bonding with an object on the back surface of the glass substrate or the back surface of the privacy film.

In addition, the adhesive layer may be formed of a film structure composed of OCA or OCR, or OCA/PET/OCA or OCR/PET/OCR, and a film structure composed of OCA/PET/OCA or OCR/PET/OCR. , the adhesive strength of the OCA or OCR of the portion adhering to the object may be relatively lower than the adhesive strength of the OCA or OCR formed on the opposite side.

In addition, the antibacterial/antiviral layer may include any one or a mixture of two or more of silver, platinum, copper, and titanium dioxide, and the functional layer may include an AF (Anti-Finger) coating layer, AR (Anti Reflective) may be any one or more of the coating layer.

As described above, the present invention promotes antibacterial and antiviral properties by forming an antibacterial and antiviral layer on the entire surface of a glass substrate by a sputtering process, and functions by a continuous process without separate pretreatment or process interruption after forming the antibacterial and antiviral layer. It is possible to increase production efficiency while reducing production costs by promoting process continuity by forming layers.

In addition, during the sputtering process of forming the antibacterial/antiviral layer, a reaction gas is supplied to increase the reactivity of the compound constituting the antibacterial/antiviral layer, thereby increasing the composition of the complete compound for the antibacterial/antiviral layer, resulting in high permeability and high hardness. Antibacterial and antiviral substrates can be provided.

In addition, in the present invention, as the target holder continuously rotates, an antibacterial/antiviral layer is formed on the glass substrate, and a process in which the reaction gas participates in the reaction of the compounds constituting the antibacterial/antiviral layer is repeatedly performed. By forming the virus layer, the antibacterial/antiviral layer according to the present invention has more uniform physical properties depending on the thickness, and the antibacterial/antiviral property is also highly measured, and the antibacterial/antiviral layer is implemented as a complete compound, resulting in high hardness It has conductivity and high permeability.

Figure 1 - A diagram showing a flow chart for the manufacturing method of the present invention.
Figure 2 - A diagram showing a schematic diagram of a sputtering device using the manufacturing method of antibacterial and antiviral substrates according to the present invention.
Figure 3 - A schematic diagram showing the main parts of the manufacturing process of the antibacterial and antiviral substrate according to the present invention.
Figure 4 - A schematic diagram of an antibacterial and antiviral substrate according to an embodiment of the present invention.
5 - A diagram showing a comparison table for transmittance and each component according to various embodiments of the present invention.
Figure 6 - a graph showing oxygen content and transmittance according to the embodiment of Figure 5;
7 - A table showing optical properties and hardness according to various embodiments of the present invention.
Figure 8 - A diagram showing an actual photograph of an antibacterial and antiviral substrate according to an embodiment of the present invention.
Figure 9 - Data specifying antibacterial and antiviral properties of antibacterial and antiviral substrates according to an embodiment of the present invention.

The present invention relates to an antibacterial and antiviral substrate, wherein an antibacterial and antiviral layer is formed on the entire surface of a glass substrate by a sputtering process to promote antibacterial and antiviral properties, and functions by a continuous process after forming the antibacterial and antiviral layer. It is to increase the production efficiency by forming a layer to promote the continuity of the process.

In addition, during the sputtering process of forming the antibacterial/antiviral layer, a reaction gas is supplied to increase the reactivity of the compound constituting the antibacterial/antiviral layer, thereby increasing the composition of the complete compound, thereby providing a high-permeability, high-hardness antibacterial and antiviral substrate. is to do

Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. Figure 1 shows a flow chart for the manufacturing method of the present invention, Figure 2 shows a schematic diagram of a sputtering device for manufacturing an antibacterial and antiviral substrate according to the present invention, Figure 3 is an antibacterial according to the present invention And it shows a schematic view of the main part of the manufacturing process of the antiviral substrate, Figure 4 is a schematic diagram of the antibacterial and antiviral substrate according to one embodiment of the present invention, Figure 5 is the transmittance and transmittance according to various embodiments of the present invention It shows a comparison table for each component, Figure 6 is a graph showing the oxygen content and transmittance according to the embodiment of Figure 5, Figure 7 is a table showing the optical characteristics and hardness according to various embodiments of the present invention, Figure 8 is Actual photos of antibacterial and antiviral substrates according to an embodiment of the present invention are shown, and FIG. 9 is data specifying the antibacterial and antiviral properties of the antibacterial and antiviral substrates according to an embodiment of the present invention.

As shown, the method of manufacturing an antibacterial and antiviral substrate according to the present invention includes a first step of preparing a glass substrate 10 and a process chamber 100 for a sputtering process of the glass substrate 10. ) to form an antibacterial/antiviral layer 20 on the entire surface of the glass substrate 10, and the glass substrate 10 on which the antibacterial/antiviral layer 20 is formed is placed in the process chamber ( 100), and a third step of forming a functional layer 30 on top of the antibacterial/antiviral layer 20.

The antibacterial and antiviral substrate according to the present invention is attached to the surface of the product to impart antibacterial and antiviral properties, and is attached to the surface of elevator operation buttons, display panels of various electronic products, various operation buttons, etc. will be.

In one embodiment of the present invention, it is intended to be used as a glass-based cover window for protecting a display panel, particularly a touch display panel.

In the present invention, the front surface means a surface that can be touched by a user, and means a surface that is contacted by a touch pen, etc., and means a surface in an upward direction in the drawing. And, in the present invention, the back surface is a surface opposite to the front, and means a surface opposite to the touch, that is, a surface in a direction toward the display panel, and means a surface in a downward direction in the drawing.

In addition, it can be applied not only to flat-type displays, but also to various flexible displays of foldable, rollable, sliding, and stretchable types.

First, a glass substrate 10 is prepared by the method of manufacturing an antibacterial and antiviral substrate according to the present invention (first step).

The glass substrate 10 according to the present invention uses thin glass having a thickness of 30 to 500 μm and is attached to the surface of a product, operation and control buttons, or a display panel so that it can be used as a window cover.

The glass substrate 10 may be supplied in units of cells by cutting the mother substrate, or supplied by sheet cutting. In the case of the mother substrate, 370x470mm or 400x500mm can be used, and in the case of the cell-unit glass substrate 10, it is provided by laser cutting to a size and shape according to product specifications.

In addition, a sheet-cut glass substrate 10 may also be provided, in which the mother substrate is only sheet-cut in cell units using a laser, and is temporarily cut in cell units, but the sheet state is maintained. Depending on the process environment or product specifications, the cell unit glass substrate 10 may be provided or the sheet-cut glass substrate 10 may be provided.

The cell-unit glass substrate 10 or the sheet-cut glass substrate 10 is chemically strengthened to provide a thin glass substrate 10 while reinforcing strength. In one embodiment of the present invention, the compressive stress of the glass substrate 10 according to chemical strengthening is 500 Mpa or more.

Meanwhile, in one embodiment of the present invention, when the glass substrate 10 is to be applied as a flexible cover window, the entire area of the flat portion and the folding portion is formed to have a uniform thickness, or the folding portion is thinner than the flat portion. It may be formed by slimming. In this case, the thickness of the flat portion of the glass substrate 10 is generally 30 to 500 μm, and the thickness of the folding portion is about 10 to 100 μm. The folding portion is formed by processing a very thin glass plate.

In addition, the present invention can be used for protecting the CPI film by placing it on the CPI (Clear Polyimide) film cover on the upper part of the display panel by maintaining the folding characteristics and strength characteristics.

Then, the glass substrate 10 is put into the process chamber 100 for a sputtering process to form an antibacterial/antiviral layer 20 on the entire surface of the glass substrate 10 (step 2). ).

The device for the sputtering process in the present invention is similar to a conventional sputtering device, and may be a batch type sputtering device or an in-line sputtering device.

This sputtering device is basically equipped with a power supply for applying power to the process chamber 100 and the target, and a vacuum pump for adjusting the degree of vacuum in the process chamber 100 .

In addition, in the present invention, a load lock chamber is further formed on one side of the process chamber 100, and the glass substrate 10 according to the present invention is put into the process chamber 100 through the load lock chamber 210. can

As shown in FIG. 2, the process chamber 100 includes a drum substrate holder 110 that rotates therein, and the target holder is perpendicular to the rotational axis of the substrate holder 110. (120) is placed.

In addition, the target holder 120 may be formed singular or plural, and in one embodiment of the present invention, as shown in FIG. 2, the target holders are located on both sides of the substrate holder 110 around the substrate holder 110. (120) is arranged.

On the other hand, a shielding film 130 is formed around the target holder 120 to separate the sputtering area S from other spaces in the process chamber, thereby reducing the reactivity of the compound forming the antibacterial/antiviral layer 20. and to form a complete compound.

A glass substrate 10 is loaded around the drum-shaped substrate holder 110 according to the present invention, and the substrate holder 110 is rotated at about 100 rpm. A target 121 is mounted on the target holder 120 to maintain a high vacuum of 5.0E-4pa or less.

In one embodiment of the present invention, the target 121 may use a mixed target 121 such as TiOxCu/TiOxAg (including 0.5 to 3% of Cu or Ag content) or a single target 121 such as TiOxCu or TiOxAg. there is. When the TiOxCu/TiOxAg target 121 is used, the TiOxCuO/TiOxAgO mixed antibacterial/antiviral layer 20 is formed, and when the TiOxCu target 121 is used, the TiOxCuO antibacterial/antiviral layer 20 is formed, , When using the TiOxAg target 121, the TiOxAgO antibacterial/antiviral layer 20 is formed.

The antibacterial/antiviral layer 20 according to the present invention is formed to approximately 1 to 100 nm.

In the present invention, the antibacterial/antiviral layer 20 may be formed by AC sputtering, DC sputtering, or RF sputtering according to the process environment or the type of target to be used as the antibacterial/antiviral layer 20.

On the other hand, when the sputtering process is performed using the target 121, the stoichiometric ratio of the antibacterial/antiviral layer 20 to be deposited must be precisely matched, but all ions separated from the target 121 do not participate in the reaction. As a result, the antibacterial/antiviral layer 20 having an accurate stoichiometric ratio corresponding to the target 121 may not be formed.

That is, the antibacterial/antiviral layer 20 may be formed of an incomplete compound, which provides an opaque or low hardness antibacterial/antiviral layer 20, resulting in quality degradation.

Accordingly, the present invention supplies a reaction gas to the process chamber 100 to increase the reactivity of the compound constituting the antibacterial/antiviral layer 20 . In this case, the reaction gas is supplied to a gas reaction region R spaced apart from the sputtering region S for generating the antibacterial/antiviral layer 20 .

2 and 3, in an embodiment of the present invention, in a position perpendicular to the target holder 120 in a direction perpendicular to the axial direction of the substrate holder 110 to supply the reaction gas. The reaction gas supply source 300 is formed by supplying the reaction gas so that the sputtering area S and the gas reaction area R are spatially separated.

Here, the shielding film 130 is also formed in the gas reaction region R to prevent the reaction gas from entering the sputtering region S as much as possible.

The reaction gas is supplied by precisely controlling the amount by a mass flow controller (MFC) from the reaction gas supply source 300, and the reaction gas may be oxygen or nitrogen as needed, and is a gas along with argon, which is a plasma generating gas. Supply by adjusting the supply amount.

The reaction gas supply source 300 further increases the coating density of the antibacterial/antiviral layer 20 by combining the reaction gas using a separate RF power, and induces formation of a complete compound. In one embodiment, a stable metal oxide layer was obtained as the antibacterial/antiviral layer 20 by combining O ₂ , which is a reaction gas, with the TiOxCu or TiOxAg target 121 using an RF output of 13.56Mhz.

In the present invention, the antibacterial/antiviral layer 20 may include any one of silver, platinum, copper, and titanium dioxide, or a mixture of two or more thereof.

The antibacterial and antiviral substances are known to have excellent antibacterial and antiviral properties, and in the case of copper, they are known to have excellent bacteria removal functions. Any one and copper may be used in combination.

Formation of the antibacterial/antiviral layer 20 on an existing substrate may be performed through processes such as spray, dip coating, bar coating, stamping, slot coating, etc. In this case, it was formed by coating on a substrate using an antibacterial/antiviral resin composition containing silver, platinum, copper, and titanium dioxide. In this case, antibacterial and antiviral performance was not high, hardness was low, antibacterial and antiviral substances were detached, and durability was low, so antibacterial and antiviral durability was not high.

In the case of forming the antibacterial/antiviral layer 20 by the sputtering process according to the present invention, the reaction gas is supplied to increase the reactivity of the compound constituting the antibacterial/antiviral layer 20, and the antibacterial/antiviral layer composed of a complete compound. By forming the virus layer 20, an antibacterial/antiviral layer 20 having high transmittance is provided.

In addition, in the case of forming the antibacterial/antiviral layer 20 by the sputtering process according to the present invention, adhesion to the antibacterial/antiviral substrate and coating properties are excellent, and thickness control is easy, so antibacterial/antiviral and It is possible to obtain an antibacterial/antiviral layer 20 having high antibacterial/antiviral durability and high hardness.

Here, as shown in FIG. 2, according to one embodiment of the present invention, the substrate holder 110 is formed to pivot at about 100 rpm, and the target 121 and the gas reaction region R are positioned perpendicular to each other. are formed, are separated from each other in space by the shielding film 130, and are positioned in a direction perpendicular to the rotational axis of the substrate holder 110.

Accordingly, as the substrate holder 110 continuously rotates, the antibacterial and antiviral layer 20 is formed on the glass substrate 10, and the reaction gas is involved in the reaction of the compound constituting the antibacterial and antiviral layer 20. In addition, the process in which the antibacterial/antiviral layer 20 is formed and the reaction gas is involved in the reaction of the antibacterial/antiviral layer 20 is repeatedly performed.

By this process, a uniform and high content of reaction gas exists in the entire section according to the thickness of the antibacterial/antiviral layer 20, and the antibacterial/antiviral layer 20 has more uniform physical properties, Antiviral properties are also highly rated. In addition, since the antibacterial/antiviral layer 20 is implemented as a complete compound, it has high hardness and high permeability. This will be explained again in FIGS. 5 and 6 to be described later.

In addition, the glass substrate 10 on which the antibacterial/antiviral layer 20 is formed is put into a deposition chamber connected to the process chamber 100 to form a functional layer 30 on the antibacterial/antiviral layer 20. (step 3).

The load lock chamber 210 or an inline chamber for inline sputtering may be used as the deposition chamber.

As one embodiment of the present invention, as shown in FIG. 2, the load lock chamber 210 is disposed on one side of the process chamber 100, and when the formation of the antibacterial/antiviral layer 20 is completed, the substrate holder ( 110) is moved to the load lock chamber 210, and the functional layer 30 is formed on the antibacterial/antiviral layer 20 by a thermal evaporation process.

The functional layer 30 may be formed by a sputtering process inside the process chamber 100 according to product specifications or types of the functional layer 30, or may be formed by an inline sputtering process using an inline chamber. . As in one embodiment of the present invention, after moving to the load lock chamber 210, it may be formed by a thermal evaporation deposition process or the like.

The functional layer 30 may be formed of at least one of an anti-finger (AF) coating layer and an anti-reflective (AR) coating layer by thermally evaporating a resin having an anti-finger (AF) or anti-reflective (AR) function. .

In one embodiment of the present invention, an anti-finger (AF) coating layer is formed using a fluorine-based resin. In this case, the thickness is preferably about 10 to 30 nm, and the contact angle is formed to about 110 °.

As described above, the present invention forms an antibacterial/antiviral layer 20 on the entire surface of the glass substrate 10 by a sputtering process to promote antibacterial/antiviral properties, and separate pretreatment after forming the antibacterial/antiviral layer 20 By forming the functional layer 30 by a continuous process without interrupting the process, the continuity of the process can be achieved, thereby reducing production costs and increasing production efficiency.

In addition, during the sputtering process of forming the antibacterial/antiviral layer 20, reaction gas is supplied to increase the reactivity of the compound constituting the antibacterial/antiviral layer 20, thereby increasing the composition of the complete compound, thereby providing high permeability and high hardness antibacterial properties. and an antiviral substrate.

When the formation of the functional layer 30 is completed, the glass substrate 10 is taken out of the process chamber or the load lock chamber 210, and a 180° privacy film is applied to the rear surface of the glass substrate 10 ( 40) are laminated. The thickness of the privacy film 40 is about 0.2 to 0.5 mm.

In addition, an adhesive layer 50 for bonding with an object is formed on the rear surface of the glass substrate 10 or the rear surface of the privacy film 40 . As described above, the object refers to a product for imparting antibacterial and antiviral properties, such as an elevator operation button, a display panel of various electronic products, and various operation buttons.

The adhesive layer 50 may be formed of OCA or OCR, or a film structure made of OCA/PET/OCA or OCR/PET/OCR.

In addition, in the film structure composed of OCA/PET/OCA or OCR/PET/OCR, the adhesive strength of the OCA or OCR at the part adhered to the object is relatively lower than the adhesive strength of the OCA or OCR formed on the opposite side. The adhesive layer 50 has a thickness of about 0.1 to 0.2 mm.

This is to make it easy to replace the antibacterial and antiviral substrate by forming a low adhesive strength in the adhesive portion with the object.

As shown in FIG. 4, the antibacterial and antiviral substrate according to a preferred embodiment of the present invention formed by this process includes a glass substrate 10 and an antibacterial/antiviral layer 20 formed on the entire surface of the glass substrate 10. ) and a functional layer 30 formed on the antibacterial/antiviral layer 20.

The antibacterial/antiviral layer 20 and the functional layer 30 are formed in the process chamber 100 for the sputtering process and the load lock chamber 210 connected to the process chamber 100, respectively. .

The antibacterial/antiviral layer 20 is formed as a complete compound with high reactivity by the reaction gas supplied to the process chamber 100, and has high hardness and high permeability.

In addition, a privacy film 40 may be laminated on the rear surface of the glass substrate 10 , and an adhesive layer 50 for adhesion to an object may be formed on the rear surface of the privacy film 40 .

The adhesive layer 50 may be formed of OCA or OCR, or a film structure made of OCA/PET/OCA or OCR/PET/OCR. In the film structure composed of OCA/PET/OCA or OCR/PET/OCR, the adhesive strength of OCA or OCR at the part adhering to the object is relatively lower than the adhesive strength of OCA or OCR formed on the opposite side thereof, resulting in antibacterial and antibacterial and antibacterial properties. If the virus substrate is damaged, make it easy to separate from the object.

The antibacterial/antiviral layer 20 may include any one or a mixture of two or more of silver, platinum, copper, and titanium dioxide, and the functional layer 30 is an AF (Anti-Finger) coating layer , AR (Anti Reflective) coating layer can be formed of any one or more.

Hereinafter, data obtained by measuring physical properties according to embodiments of the present invention are provided.

5 shows a comparison table for transmittance and each component according to various embodiments of the present invention, in the case of AC sputter and RF sputter (RF Sputter1, RF Sputter2, RF Sputter3). O ₂ was supplied as the reaction gas, 40Khz as the AC sputter power, and 13.56Mhz as the RF sputter power.

6 is a graph showing oxygen content and transmittance according to the embodiment of FIG. 5 .

As shown in FIGS. 5 and 6, the content ratio of O ₂ gas in the RF sputter compared to the AC sputter was measured to be high, which indicates that the reactivity of the O ₂ gas is higher in the RF power, thereby providing a highly permeable antibacterial and antiviral substrate. will be able to obtain

7 is a table showing optical characteristics and hardness according to various embodiments of the present invention, and as shown, it has a pencil hardness of 9H, and has high hardness characteristics as well as antibacterial and antiviral properties to protect the surface of the product. will play a role.

8 shows an actual photograph of an antibacterial and antiviral substrate according to an embodiment of the present invention, as measured in the embodiment of the present invention, transparency of 80% or more and even if the antibacterial/antiviral layer is deposited at a certain thickness or more has been maintained

9 is data (Korea Research Institute of Analysis and Testing (KATR)) measuring antibacterial and antiviral properties of antibacterial and antiviral substrates according to an embodiment of the present invention, log5.0 -> 99.999% (Staphylococcus aureus), log6 .1 -> 99.9999% (E. coli) showed excellent antibacterial and antiviral properties.

As described above, the present invention promotes antibacterial and antiviral properties by forming an antibacterial and antiviral layer on the entire surface of a glass substrate by a sputtering process, and functions by a continuous process without separate pretreatment or process interruption after forming the antibacterial and antiviral layer. It is possible to increase production efficiency while reducing production costs by promoting process continuity by forming layers.

In addition, during the sputtering process of forming the antibacterial/antiviral layer, a reaction gas is supplied to increase the reactivity of the compound constituting the antibacterial/antiviral layer, thereby increasing the composition of the complete compound for the antibacterial/antiviral layer, resulting in high permeability and high hardness. Antibacterial and antiviral substrates can be provided.

In addition, in the present invention, as the target holder continuously rotates, an antibacterial/antiviral layer is formed on the glass substrate, and a process in which the reaction gas participates in the reaction of the compounds constituting the antibacterial/antiviral layer is repeatedly performed. By forming the virus layer, the antibacterial/antiviral layer according to the present invention has more uniform physical properties depending on the thickness, and the antibacterial/antiviral property is also highly measured, and the antibacterial/antiviral layer is implemented as a complete compound, resulting in high hardness It has conductivity and high permeability.

10: glass substrate 20: antibacterial/antiviral layer
30: functional layer 40: privacy film
50: adhesive layer
S: sputtering area R: gas reaction area
100: process chamber 110: substrate holder
120: target holder 121: target
130: shielding film 210: load lock chamber
300: source of reaction gas

Claims (25)

A first step of preparing a glass substrate;
a second step of introducing the glass substrate into a process chamber for a sputtering process and forming an antibacterial/antiviral layer on the entire surface of the glass substrate;
A third step of forming a functional layer on the antibacterial/antiviral layer by introducing the glass substrate on which the antibacterial/antiviral layer is formed into a deposition chamber connected to the process chamber;
The process chamber in the second step includes a drum-type substrate holder that rotates therein, and a target holder is disposed in a direction perpendicular to the rotational axis of the substrate holder,
It is formed on one side of the process chamber, and a reaction gas supply source is formed to supply a reaction gas at a position perpendicular to the target holder in a direction perpendicular to the rotation axis of the substrate holder,
The reaction gas is
An antibacterial and antiviral substrate characterized in that it is supplied to a gas reaction area spatially separated from the sputtering area for generating the antibacterial and antiviral layer to increase the reactivity of the compound constituting the antibacterial and antiviral layer. manufacturing method. delete delete delete The method of claim 1, wherein the target holder is formed in a single number or in plurality. The method of claim 1, wherein a shielding film is formed around the target holder. The method of claim 1, wherein the glass substrate of the first step,
The mother board is cut and supplied in units of cells,
A method for producing an antibacterial and antiviral substrate, characterized in that supplied by sheet cutting. The method of claim 7, wherein the cell-unit glass substrate or the sheet-cut glass substrate is chemically strengthened. The method of claim 1, wherein the deposition chamber,
A method of manufacturing an antibacterial and antiviral substrate, characterized in that the load lock chamber or the inline chamber for inline sputtering. The method of claim 1, after the third step,
Method for manufacturing an antibacterial and antiviral substrate, characterized in that for laminating a privacy film on the back surface of the glass substrate. The method of claim 10, on the back of the privacy film,
A method of manufacturing an antibacterial and antiviral substrate, characterized in that for forming an adhesive layer for adhesion to the object. The method of claim 1, on the back surface of the glass substrate,
A method of manufacturing an antibacterial and antiviral substrate, characterized in that for forming an adhesive layer for adhesion to the object. The adhesive layer according to claim 11 or 12,
using OCA or OCR; or
A method for producing an antibacterial and antiviral substrate, characterized in that it is formed in a film structure consisting of OCA / PET / OCA or OCR / PET / OCR. The method of claim 13, wherein the film structure consisting of OCA / PET / OCA or OCR / PET / OCR,
A method of manufacturing an antibacterial and antiviral substrate, characterized in that the adhesive strength of the OCA or OCR at the part adhering to the object is relatively lower than the adhesive strength of the OCA or OCR formed on the opposite side. The method of claim 1, wherein the antibacterial/antiviral layer,
A method for producing an antibacterial and antiviral substrate comprising a material of any one or a mixture of two or more of silver, platinum, copper and titanium dioxide. The method of claim 1, wherein the functional layer,
A method of manufacturing an antibacterial and antiviral substrate, characterized in that at least one of an anti-finger (AF) coating layer and an anti-reflective (AR) coating layer. glass substrate;
an antibacterial/antiviral layer formed on the entire surface of the glass substrate;
It includes; a functional layer formed on top of the antibacterial/antiviral layer,
The antibacterial/antiviral layer and the functional layer are formed in a process chamber for a sputtering process and a deposition chamber connected to the process chamber, respectively.
The process chamber includes a drum-type substrate holder that rotates therein, and a target holder is disposed in a direction perpendicular to the rotational axis of the substrate holder,
Formed on one side of the process chamber, a reaction gas supply source is formed to supply a reaction gas at a position perpendicular to the target holder in a direction perpendicular to the rotational axis of the substrate holder,
The reaction gas is supplied to a gas reaction area spatially separated from the sputtering area for generating the antibacterial/antiviral layer,
As the substrate holder rotates, an antibacterial/antiviral layer is formed on the glass substrate, and a process in which the reaction gas participates in the reaction of compounds constituting the antibacterial/antiviral layer is repeatedly performed.
The antibacterial and antiviral layer is an antibacterial and antiviral substrate, characterized in that the reactivity is increased and produced as a complete compound. The method of claim 17, wherein the glass substrate,
An antibacterial and antiviral substrate characterized in that it is chemically strengthened. [Claim 18] The antibacterial and antiviral substrate according to claim 17, wherein a privacy film is laminated on the rear surface of the glass substrate. The method of claim 19, wherein on the back of the privacy film,
An antibacterial and antiviral substrate characterized in that an adhesive layer is formed for adhesion with an object. The method of claim 17, wherein on the back surface of the glass substrate,
An antibacterial and antiviral substrate characterized in that an adhesive layer is formed for adhesion with an object. The adhesive layer according to claim 20 or 21,
using OCA or OCR; or
An antibacterial and antiviral substrate characterized in that it is formed of a film structure consisting of OCA / PET / OCA or OCR / PET / OCR. The method of claim 22, wherein the film structure consisting of OCA / PET / OCA or OCR / PET / OCR,
Antibacterial and antiviral substrate, characterized in that the adhesive strength of the OCA or OCR of the portion adhering to the object is relatively lower than the adhesive strength of the OCA or OCR formed on the opposite side. The method of claim 17, wherein the antibacterial/antiviral layer,
An antimicrobial and antiviral substrate comprising any one or a mixture of two or more of silver, platinum, copper and titanium dioxide. The method of claim 17, wherein the functional layer,
An antibacterial and antiviral substrate, characterized in that at least one of an anti-finger (AF) coating layer and an anti-reflective (AR) coating layer.

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