KR102542890B1 - Wafer elongation device - Google Patents

Abstract

The present invention relates to a wafer extension device implemented to prevent separation of a mount tape from a ring frame, and is formed in a circular ring shape to the lower side of the ring frame to which the mount tape is attached. a lower ring-type jig on which it is seated; and an upper ring-shaped jig that adheres to an upper side of the ring frame seated on the lower ring-shaped jig and fastens the ring frame and the mount tape at the same time.

Description

Wafer elongation device {Wafer elongation device}

The present invention relates to a wafer extension device, and more particularly, to a wafer extension device implemented to prevent separation of a mount tape from a ring frame.

Recently, a semiconductor chip and a semiconductor package including the semiconductor chip capable of storing vast amount of data and processing the vast amount of data within a short period of time have been developed.

Recently, in order to reduce the volume and thickness of a semiconductor package, a technique for reducing the thickness of a semiconductor chip is being developed. In order to reduce the thickness of semiconductor chips, a technique of polishing the back surface of wafers on which semiconductor chips are formed has been developed.

However, when the thickness of the wafer is reduced by polishing the rear surface of the wafer, the shape of the wafer is greatly deformed. When the shape of the wafer is greatly deformed, there is a problem in that defects frequently occur in an individualization process of individualizing a semiconductor chip from a wafer and a die attach process.

In the process, a mount tape is attached to the ring frame and a wafer is formed on it. This is the process of moving on to the next process after separating each wafer by extending the ring frame.

In the process, the phenomenon of falling due to lack of adhesion of the mount tape is intermittently occurring.

In the case of the prior art, in the process of pressing the ring frame with one middle ring at the bottom and the separated left and right upper plates at the top, the mount tape falls intermittently during elongation, and there was a problem that high-priced products were defective during mass production.

On the other hand, the above-mentioned background art is technical information that the inventor possessed for derivation of the present invention or acquired in the process of derivation of the present invention, and cannot necessarily be said to be known art disclosed to the general public prior to filing the present invention. .

Korean Patent Registration No. 10-1006526 (2011.01.07. Notice)

One aspect of the present invention provides a wafer extension device implemented to prevent separation of the mount tape from the ring frame.

The technical problem of the present invention is not limited to the technical problem mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

In the wafer extension device according to an embodiment of the present invention, in the wafer extension device implemented to prevent separation of the mount tape from the ring frame, it is formed in a circular ring shape to which the mount tape is attached. a lower ring-type jig on which the lower side of the ring frame is seated; and an upper ring-shaped jig that adheres to an upper side of the ring frame seated on the lower ring-shaped jig and fastens the ring frame and the mount tape at the same time.

In one embodiment, the wafer extension device according to an embodiment of the present invention moves upward along the central openings of the lower ring-shaped jig and the upper ring-shaped jig, which simultaneously fasten the ring frame and the mount tape, while the mount tape It may further include; an elevating extension part that lifts the upward direction from the bottom surface.

In one embodiment, the wafer extension device according to another embodiment of the present invention is installed along the lateral edge of the elevation extension portion, and sprays compressed air before the upper surface of the elevation extension portion touches the lower surface of the mount tape to the mount tape. It may further include a foreign matter removal unit for removing foreign matter attached to the bottom surface of the tape.

In one embodiment, the foreign matter removal unit, the mounting ring fixedly installed along the side edge of the elevating extension unit; Elevating actuators spaced apart at regular intervals along the upper side of the holding ring are installed in plurality; It is formed in a circular ring shape forming an inner diameter larger than the outer diameter of the lifting extension part, supported by the lifting actuator, and is moved downward from the upper surface of the lifting extension part by the lifting actuator in a normally contracted state, elongation a lifting ring that is moved upward from an upper surface of the lifting and extending portion by the driven lifting actuator; And a plurality of pieces are spaced apart at regular intervals along the upper side of the inner circumferential surface of the elevating ring forming the steel surface facing upward, and the foreign matter attached to the bottom surface of the mount tape is sprayed with compressed air toward the bottom surface of the mount tape. It may include; injection module to remove.

In one embodiment, the injection module, while forming an opening on the upper inclined surface of the inner circumferential surface of the lifting ring and perpendicular to the upper inclined surface of the inner circumferential surface of the lifting ring formed on the inside of the lifting ring; a rotation block formed in a cylindrical shape corresponding to the shape of the first seating groove and rotatably connected to the first seating groove; a block rotation induction unit that is spaced apart from the first seating groove to the rear and transmits compressed air to the first seating groove and at the same time rotates and drives the rotating block; a second seating groove formed along an inner side of the rotation block while forming an opening at the front end of the rotation block; and a spray block connected to the second seating groove and configured to inject compressed air transmitted through the rotary block toward the front of the rotary block while rotating together as the rotary block rotates.

In one embodiment, the injection block is formed in communication from the rear end of the rotary block to the inner side of the second seating groove so as to transfer the compressed air supplied to the first seating groove to the second seating groove. coffin; It is seated in close contact with the inside of the second seating groove to seal the outlet of the second seating groove, and as compressed air flows into the second seating groove, it moves forward along the second seating groove by air pressure. an opening/closing block in which an inclined surface formed at a front end is exposed from the second seating groove; a second transmission pipe formed in communication from the rear end of the opening/closing block to the front inclined surface of the opening/closing block to spray compressed air flowing into the second seating groove through the front inclined surface of the opening/closing block; a first magnetic body installed at the rear end of the opening/closing block; It faces the first magnetic body and is installed inside the second seating groove to fasten the first magnetic body, and pulls the opening and closing block, which has been moved forward by compressed air, using magnetism after the supply of compressed air is terminated to fasten again. a second magnetic body; a cover that is rotatably connected to the opening of the first seating groove and covers the opening of the first seating groove when the opening/closing block is inserted into the first seating groove; a third magnetic body installed at the front end of the cover; and a fourth magnetic body installed in the opening of the first seating groove to engage the third magnetic body while forming an opposite polarity to the third magnetic body.

In one embodiment, the block rotation induction unit is spaced apart from the first seating groove rearward and is formed on the inside of the lifting ring, and receives compressed air supplied from a compressed air supply device from one side and passes through the inner space while rotating. a rotation chamber that transmits the first seating groove through the other side after the rotation chamber; a block rotation shaft having a front end installed at the center of the rear end of the rotation block by shaft coupling and having a rear end rotatably connected to a rear end of the rotation chamber after being inserted into the rotation chamber; and a plurality of rotation guide vanes installed along the circumference of the block rotation shaft disposed in the rotation chamber to induce rotation of the block rotation shaft by compressed air passing through the rotation chamber.

According to one aspect of the present invention described above, it is possible to provide an effect.

Effects of the present invention are not limited to the effects mentioned above, and various effects may be included within a range apparent to those skilled in the art from the contents to be described below.

1 is a diagram showing a schematic configuration of a wafer extension apparatus according to an embodiment of the present invention.
FIG. 2 is a view showing a workpiece to be processed by the wafer stretching apparatus according to an embodiment of the present invention of FIG. 1 .
FIG. 3 is a view showing a method of processing the workpiece of FIG. 2 using the wafer extension apparatus according to an embodiment of the present invention of FIG. 1 .
4 is a diagram showing a schematic configuration of a wafer extension apparatus according to another embodiment of the present invention.
FIG. 5 is a view showing the foreign matter removal unit of FIG. 4 .
6 and 7 are views showing the injection module of FIG. 4 .

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The detailed description of the present invention which follows refers to the accompanying drawings which illustrate, by way of illustration, specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable one skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different from each other but are not necessarily mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be implemented in another embodiment without departing from the spirit and scope of the invention in connection with one embodiment. Additionally, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. Accordingly, the detailed description set forth below is not to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all equivalents as claimed by those claims. Like reference numbers in the drawings indicate the same or similar function throughout the various aspects.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

1 is a diagram showing a schematic configuration of a wafer extension apparatus according to an embodiment of the present invention.

Referring to FIG. 1 , a wafer stretching apparatus 10 according to an embodiment of the present invention includes a lower ring-shaped jig 100 and an upper ring-shaped jig 200 .

The lower ring-shaped jig 100 is formed in a circular ring shape, and the lower side of the ring frame F to which the mount tape T is attached as shown in FIG. 2 is seated.

The upper ring-shaped jig 200 is manufactured by through-processing in a circular ring shape, and is in close contact with the upper side of the ring frame F seated on the lower ring-shaped jig 100, so that the ring frame F and the mount tape ( T) is simultaneously tightened to maximize the compression force with the lower ring-shaped jig 100.

The wafer extension apparatus 10 according to an embodiment of the present invention having the configuration described above may further include a lifting/extending unit 300 .

The lifting extension part 300 rises as shown in FIG. 3 along the central openings of the lower ring-shaped jig 100 and the upper ring-shaped jig 200 to which the ring frame F and the mount tape T are simultaneously fastened. While moving, the mount tape (T) is lifted upward from the bottom surface, and a wiper formed on the upper side of the mount tape (T) is processed to be a plurality of individual chips.

The wafer extension apparatus 10 according to an embodiment of the present invention having the configuration described above performs through-processing of the upper ring-shaped jig 200, which is an upper frame, to form a lower ring-shaped jig 100, which is a lower ring guide. It is attached to the ring frame (F) by compression and the mount tape (T) can be prevented from being separated during the extension.

4 is a diagram showing a schematic configuration of a wafer extension apparatus according to another embodiment of the present invention.

Referring to FIG. 4 , the wafer extension apparatus 20 according to another embodiment of the present invention includes a lower ring-shaped jig 100, an upper ring-shaped jig 200, a lifting and extending unit 300, and a foreign matter removal unit 400. include

Here, since the lower ring-shaped jig 100, the upper ring-shaped jig 200, and the elevating extension part 300 are the same as those of FIG. 1, their descriptions will be omitted.

The foreign matter removal unit 400 is installed along the lateral edge of the elevating and extending unit 300, and sprays compressed air before the upper surface of the elevating and extending unit 300 touches the bottom surface of the mount tape T to mount the tape T ) to remove foreign substances such as dust or sand attached to the bottom.

Wafer extension device 20 according to another embodiment of the present invention having the configuration described above is attached to the lower surface of the mount tape T at a stage before the mount tape T and the elevation extension part 300 come into close contact. Damage or damage to the mount tape T during elongation due to possible dust or sand can be minimized.

FIG. 5 is a view showing the foreign matter removal unit of FIG. 4 .

Referring to FIG. 5 , the foreign matter removal unit 400 includes a holding ring 410 , a lifting actuator 420 , a lifting ring 430 and a spraying module 500 .

The holding ring 410 is fixedly installed along the lateral edge of the elevating extension part 300 .

A plurality of elevating actuators 420 are installed at regular intervals along the upper side of the holding ring 410, and are elongated and driven before the elevating extension part 300 is driven to lift the elevating ring 430. let it

The elevating ring 430 is formed in a circular ring shape forming an inner diameter larger than the outer diameter of the elevating extension part 300 and is supported by the elevating actuator 420. It moves downward from the upper surface of the elevation extension part 300 and is moved upward from the upper surface of the elevation extension part 300 by the elevation actuator 420 driven by extension.

A plurality of injection modules 500 are spaced apart at regular intervals along the upper side of the inner circumferential surface of the elevating ring 430 forming the steel surface 431 to face upward, and the mount tape T is compressed air toward the bottom. is sprayed to remove foreign substances attached to the bottom of the mount tape (T).

The foreign matter removal unit 400 having the configuration described above may be dust or sand, etc. As a result, the mount tape T may be damaged or damaged during the elongation process.

6 and 7 are views showing the injection module of FIG. 4 .

Referring to FIGS. 6 and 7 , the injection module 500 includes a first seating groove 510, a rotation block 520, a block rotation induction unit 530, a second seating groove 540, and a spray block 550. includes

The first seating groove 510 forms an opening on the upper inclined surface 431 of the inner circumferential surface of the lifting ring 430 and forms an opening on the inner side of the lifting ring 430 so as to be perpendicular to the upper inclined surface 431 of the inner circumferential surface of the lifting ring 430. is formed in

The rotation block 520 is formed in a cylindrical shape corresponding to the shape of the first seating groove 510, is rotatably connected to the first seating groove 510, and is rotationally driven by the block rotation induction unit 530. .

The block rotation induction unit 530 is installed to be spaced apart from the first seating groove 510 to the rear, delivers compressed air to the first seating groove 510 and rotates the rotation block 520 at the same time.

In one embodiment, the block rotation guide unit 530 includes a rotation chamber 531 , a block rotation shaft 532 and rotation guide vanes 533 .

The rotation chamber 531 is spaced apart from the first seating groove 510 rearward and formed inside the elevating ring 430, and receives compressed air supplied from a compressed air supply device (not shown in the drawing for convenience of explanation). After being supplied from one side (L1) and passing through the internal space while rotating, it is delivered to the first seating groove (510) through the other side (L2).

The block rotation shaft 532, the front end is installed in the center of the rear end of the rotation block 520 by shaft coupling, and the rear end is inserted into the rotation chamber 531 and then rotatably connected to the rear end of the rotation chamber 531. , As rotational drive is driven by the rotation guide vane 533, the rotation block 520 is rotationally driven.

A plurality of rotary guide vanes 533 are installed along the circumference of the block rotary shaft 532 disposed in the rotary chamber 531, and the block rotary shaft 532 is rotated by compressed air moving while passing through the rotary chamber 531. induce

The second seating groove 540 is formed along the inside of the rotation block 520 while forming an opening at the front end of the rotation block 520 .

The injection block 550 is installed connected to the second seating groove 540, and rotates together as the rotation block 520 rotates, distributing compressed air delivered through the rotation block 520 to the front of the rotation block 520. spray it with

In one embodiment, the spray block 550 includes a first transmission tube 551, an opening/closing block 552, a second transmission tube 553, a first magnetic body 554, a second magnetic body 555, a cover ( 556), a third magnetic body 557 and a fourth magnetic body 558.

The first transmission pipe 551 is configured to transfer the compressed air supplied to the first seating groove 510 to the second seating groove 540 from the rear end of the rotary block 520 to the inside of the second seating groove 540. communication is formed until

The opening/closing block 552 is seated in close contact with the inside of the second seating groove 540 to seal the outlet of the second seating groove 540, and as compressed air flows into the second seating groove 540, the air The inclined surface 552a formed at the front end is exposed from the second seating groove 540 by being moved forward along the second seating groove 540 by the pressure.

The second delivery pipe 553 is formed in communication from the rear end of the opening and closing block 552 to the front inclined surface 552a of the opening and closing block 552, and the compressed air introduced into the second seating groove 540 is passed through the opening and closing block 552. so that it is sprayed through the front inclined surface (552a) of the.

The first magnetic material 554 is installed at the rear end of the opening/closing block 552 .

The second magnetic body 555 is installed inside the second seating groove 540 while facing the first magnetic body 554 to engage the first magnetic body 554, and the opening/closing block 552 moved forward by compressed air. ) is tightened again by pulling it using magnetism after the supply of compressed air is finished.

The cover 556 is rotatably connected to the opening of the first seating groove 510 and covers the opening of the first seating groove 510 when the opening/closing block 552 is inserted into the first seating groove 510 .

The third magnetic material 557 is installed at the front end of the lid 556 .

The fourth magnetic body 558 forms an opposite polarity to the third magnetic body 557 and is installed in the opening of the first seating groove 510 to engage the third magnetic body 557 .

The above-described embodiments are for illustrative purposes, and those skilled in the art to which the above-described embodiments belong can easily transform into other specific forms without changing the technical spirit or essential features of the above-described embodiments. You will understand. Therefore, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope to be protected through this specification is indicated by the following claims rather than the detailed description above, and should be construed to include all changes or modifications derived from the meaning and scope of the claims and equivalent concepts thereof. .

10, 20: wafer extension device
100: lower ring type jig
200: upper ring type jig
300: lifting extension
400: foreign matter removal unit

Claims (3)

In the wafer extension device implemented to prevent the mount tape from being separated from the ring frame,
a lower ring-shaped jig formed in a circular ring shape to which the lower side of the ring frame to which the mount tape is attached is seated;
an upper ring-type jig that adheres to an upper side of the ring frame seated on the lower ring-type jig and fastens the ring frame and the mount tape at the same time;
a lifting and extending part lifting the mount tape upward from a bottom surface while moving upward along the center openings of the lower ring-shaped jig and the upper ring-shaped jig fastening the ring frame and the mount tape at the same time; and
A foreign matter removal unit installed along a side edge of the lifting and extending part and removing foreign matter attached to the bottom of the mount tape by spraying compressed air before the upper surface of the lifting and extending part touches the lower surface of the mount tape; ,
The foreign matter removal unit,
a mounting ring fixedly installed along a lateral edge of the elevating and extending portion;
Elevating actuators spaced apart at regular intervals along the upper side of the holding ring are installed in plurality;
It is formed in a circular ring shape forming an inner diameter larger than the outer diameter of the lifting extension part, supported by the lifting actuator, and is moved downward from the upper surface of the lifting extension part by the lifting actuator in a normally contracted state, elongation a lifting ring that is moved upward from an upper surface of the lifting and extending portion by the driven lifting actuator; and
A plurality of pieces are installed at regular intervals along the upper side of the inner circumferential surface of the elevating ring that forms the steel surface to face upward, and compressed air is sprayed toward the bottom of the mount tape to remove foreign substances attached to the bottom of the mount tape. Including; injection module to remove;
The injection module,
a first seating groove formed inside the lifting ring so as to be perpendicular to the upper inclined surface of the inner circumferential surface of the lifting ring while forming an opening on the upper inclined surface of the inner circumferential surface of the lifting ring;
a rotation block formed in a cylindrical shape corresponding to the shape of the first seating groove and rotatably connected to the first seating groove;
a block rotation induction unit that is spaced apart from the first seating groove to the rear and transmits compressed air to the first seating groove and at the same time rotates and drives the rotating block;
a second seating groove formed along an inner side of the rotation block while forming an opening at the front end of the rotation block; and
A spray block installed connected to the second seating groove and spraying compressed air transmitted through the rotating block toward the front of the rotating block while rotating together as the rotating block rotates,
The injection block,
a first delivery pipe formed in communication from the rear end of the rotation block to the inside of the second seating groove so as to transfer the compressed air supplied to the first seating groove to the second seating groove;
It is closely seated inside the second seating groove to seal the outlet of the second seating groove, and as compressed air flows into the second seating groove, it is moved forward along the second seating groove by air pressure. an opening/closing block in which an inclined surface formed at a front end is exposed from the second seating groove;
a second delivery pipe formed in communication from the rear end of the opening/closing block to the front inclined surface of the opening/closing block to spray compressed air flowing into the second seating groove through the front inclined surface of the opening/closing block;
a first magnetic body installed at the rear end of the opening/closing block;
It faces the first magnetic body and is installed inside the second seating groove to fasten the first magnetic body, and pulls the opening/closing block, which has been moved forward by compressed air, using magnetism after the supply of compressed air is terminated to fasten again. a second magnetic body;
a cover that is rotatably connected to the opening of the first seating groove and covers the opening of the first seating groove when the opening/closing block is inserted into the first seating groove;
a third magnetic body installed at the front end of the cover; and
and a fourth magnetic body installed in the opening of the first seating groove to fasten the third magnetic body while forming an opposite polarity to the third magnetic body.

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