KR102514922B1 - Method for preparing device, and Device prepared therefrom - Google Patents

Abstract

providing a support member having a coil pattern disposed on one surface thereof; disposing a first coating layer on the surface of the coil pattern by supplying at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and an aromatic cyclic compound having an unsaturated functional group and a polar functional group; disposing a second coating layer containing a parylene-based polymer on the first coating layer by supplying parylene-based radicals derived from a parylene-based precursor onto the first coating layer; disposing a magnetic layer on top and bottom of the support member; and disposing an electrode electrically connected to the coil pattern on the magnetic layer. A device manufacturing method including and a device manufactured thereby are presented.

Description

Device manufacturing method, and device manufactured thereby {Method for preparing device, and Device prepared therefrom}

It relates to a device manufacturing method, and a device obtained thereby.

With the miniaturization and thinning of electronic devices, devices such as inductors applied to these electronic devices are also required to be miniaturized and have high capacities.

In the case of a thin-film power inductor, a polymer coating layer, which is an insulating film, is introduced on the surface of the conductor pattern to prevent contact between the conductor pattern constituting the coil and the magnetic material constituting the body.

In order to introduce a polymer coating layer on the surface of the conductor pattern, a wet method such as spin coating is generally used.

Spin coating involves a solvent. Therefore, it is difficult to introduce a uniform coating layer on the surface of a conductor pattern having a three-dimensional structure due to a difference in volatilization rate of a solvent on the surface of a conductor pattern having a three-dimensional structure.

A dry method such as iCVD may be considered for introducing a coating layer on the surface of the conductor pattern. In iCVD, an initiator is pyrolyzed into radicals by a hot filament, and then the radicals proceed with a polymerization reaction of monomers to introduce a polymer coating layer on a substrate.

In iCVD, radicals are generated only in adjacent regions of hot filaments arranged in a straight line. Therefore, it is difficult to introduce a uniform coating layer on the surface of the conductor pattern having a three-dimensional structure that does not have a constant distance from the hot filament.

Therefore, a method of introducing a uniform and robust coating layer on the surface of a conductor pattern having a three-dimensional structure is required.

Republic of Korea Patent Publication No. 10-2017-0090144

One aspect of the present invention is to provide a new device manufacturing method that introduces a robust and uniform coating layer on the surface of a conductor pattern.

Another aspect of the present invention is to provide a device manufactured by the manufacturing method.

according to one side

providing a support member having a coil pattern disposed on one surface thereof;

disposing a first coating layer on the surface of the coil pattern by supplying at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and an aromatic cyclic compound having an unsaturated functional group and a polar functional group;

disposing a second coating layer containing a parylene-based polymer on the first coating layer by supplying parylene-based radicals derived from a parylene-based precursor onto the first coating layer;

disposing a magnetic layer on top and bottom of the support member; and

A device manufacturing method including disposing an electrode electrically connected to the coil pattern on the magnetic layer is provided.

According to another aspect,

A support member having a coil pattern disposed on one side or both sides;

a first coating layer disposed on a surface of the coil pattern;

a second coating layer disposed on the first coating layer;

a magnetic layer that surrounds both surfaces of the second coating layer and the support member and includes a magnetic material; and

An electrode disposed on the magnetic layer and electrically connected to the coil pattern;

The first coating layer includes at least one selected from a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, an aromatic cyclic compound having an unsaturated functional group and a polar functional group, and derivatives thereof,

A device is provided in which the second coating layer includes a parylene-based polymer.

According to one aspect, the adhesion of the coating layer to the coil pattern is improved by disposing an intermediate layer derived from a non-fluorine-based acrylic compound or an aromatic heterocyclic compound between the coil pattern and the coating layer containing the parylene-based polymer. The durability of the device is improved.

1 is a schematic diagram of a method of disposing a first coating layer and a second coating layer according to an exemplary embodiment.
2 is a partial cross-sectional schematic view of a substrate to which a coating layer is introduced according to an exemplary embodiment.
3 is a partial cross-sectional schematic view of a substrate to which a coating layer is introduced according to an exemplary embodiment.
4 is a partial cross-sectional schematic view of a substrate to which a coating layer is introduced according to an exemplary embodiment.
5 is a partial cross-sectional schematic view of a substrate to which a coating layer is introduced according to an exemplary embodiment.
6A is a schematic perspective view of a device to which a coating layer is introduced according to an exemplary embodiment.
6B is a schematic diagram of a II′ cross section of a device to which a coating layer is introduced according to an exemplary embodiment.
Fig. 7 is a schematic cross-sectional view of a coating apparatus according to an exemplary embodiment.
8a is an XPS analysis result of the first coating layer of Example 1-1.
8B is an XPS analysis result of the first coating layer of Examples 1-4.
8C is a contact angle measurement result for the first coating layer of Example 1-1.
8d is a contact angle measurement result for the first coating layer of Examples 1-4.
8e is a contact angle measurement result for the first coating layer of Comparative Example 1-1.
8F is an adhesion test result for the coating layer of Example 1-1.
8g is an adhesion test result for the coating layer of Examples 1-6.
8H is an adhesion test result for the coating layer of Examples 1-11.
8i is an adhesion test result for the coating layer of Comparative Example 1-1.
8j is an ATR-FTIR measurement result for the first coating layer of Example 1-1.
8k is an ATR-FTIR measurement result for the first coating layer of Examples 1-4.
8l is an ATR-FTIR measurement result for the second coating layer of Example 1-1.
8m is an ATR-FTIR measurement result for the second coating layer of Examples 1-3.
<Description of symbols for main parts of drawings>
10: substrate, coil pattern 15: first coating layer
20: second coating layer 30: third coating layer
50: magnetic layer 60: coil
61: support member 62: first coil pattern
63: second coil pattern 64 via hole
65: coating layer 65a: first coating layer
65b: second coating layer 70: electrode
71: first electrode 72: second electrode
80: device
100: first vaporizer 110: first transfer pipe
120: first heat source 200: first flow controller
250: first valve 300: pyrolysis machine
310: second transfer pipe 320; 2nd heat source
400: deposition chamber 500: cold trap
600: vacuum pump 700: second vaporizer
710: third transfer pipe 800: second flow controller
850: second valve 1000: coating device

Since the present inventive concept described below may be applied with various transformations and may have various embodiments, specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the present creative idea to a specific embodiment, and should be understood to include all transformations, equivalents, or substitutes included in the technical scope of the present creative idea.

Terms used below are only used to describe specific embodiments, and are not intended to limit the present inventive idea. Singular expressions include plural expressions unless the context clearly dictates otherwise. Hereinafter, terms such as “comprise” or “have” are intended to indicate that there is a feature, number, step, operation, component, part, component, material, or combination thereof described in the specification, but one or the other It should be understood that the presence or addition of the above other features, numbers, steps, operations, components, parts, components, materials, or combinations thereof is not precluded. "/" used below may be interpreted as "and" or "or" depending on the situation.

In the drawings, the thickness is enlarged or reduced to clearly express various layers and regions. Like reference numerals have been assigned to like parts throughout the specification. Throughout the specification, when a part such as a layer, film, region, plate, etc. is said to be "on" or "above" another part, this includes not only the case directly on top of the other part, but also the case where there is another part in the middle thereof. . Throughout the specification, terms such as first and second may be used to describe various components, but the components should not be limited by the terms. Terms are used only to distinguish one component from another. Components having substantially the same functional configuration in the present specification and drawings refer to the same reference numerals, and redundant description is omitted.

In the present specification, "two-dimensional structure" is a structure in which the size of one dimension (eg x dimension) is 1/100 or less compared to the size of the other two dimensions (eg y and z dimensions) means For example, metal thin films, polymer sheets, etc. have a two-dimensional structure.

In this specification, a "three-dimensional structure" means a structure in which the sizes of three dimensions (eg, x, y, and z dimensions) are similar to each other. For example, a sphere, a cube, a regular tetrahedron, and the like have a three-dimensional structure. It is also possible to have a three-dimensional structure introduced into a part of the surface of the two-dimensional structure. For example, a printed circuit board on which a three-dimensional circuit including a concave-convex structure is printed on a two-dimensional substrate also has a three-dimensional structure.

In this specification, “conformal coating layer” means a coating layer disposed on the surface of a substrate to conform to the topology of the substrate.

Hereinafter, a device manufacturing method according to exemplary embodiments and a device manufactured thereby will be described in more detail.

A device manufacturing method according to an embodiment includes providing a support member having a coil pattern disposed on one surface; Disposing a first coating layer on the surface of the coil pattern by supplying at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and an aromatic cyclic compound having an unsaturated functional group and a polar functional group; disposing a second coating layer containing a parylene-based polymer on the first coating layer by supplying parylene-based radicals derived from a parylene-based precursor onto the first coating layer; Disposing a magnetic layer on top and bottom of the support member; and disposing an electrode electrically connected to the coil pattern on the magnetic layer.

In a device manufacturing method, disposing a first coating layer by supplying at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound containing an unsaturated functional group, and an aromatic cyclic compound containing an unsaturated functional group and a polar functional group on the surface of a coil pattern. By including the, adhesion between the second coating layer disposed on the first coating layer and the coil pattern is improved. Thus, adhesion between the coil pattern and the second coating layer is improved, and the second coating layer provides additional corrosion resistance, oxidation resistance, water resistance, and chemical resistance to the coil pattern. Therefore, the corrosion resistance, oxidation resistance, water resistance, and chemical resistance of the coil pattern including the first coating layer and the second coating layer are improved, and the second coating layer coated on the coil pattern does not easily separate from the coil pattern, so that the coil pattern remains for a long time. can be reliably protected. The above-described first coating layer may be called various names such as a modification layer, an intermediate layer, and an adhesive layer. The above-described second coating layer may be otherwise called various names such as a protective layer, a sealing layer, a blocking layer, and an insulating layer.

In the step of providing a support member having a coil pattern disposed on one surface, the coil pattern may have a three-dimensional structure, for example, as shown in FIGS. 6A and 6B .

Referring to FIGS. 6A and 6B , the device 80 includes a magnetic layer 50 , a coil 60 disposed within the magnetic layer 50 , and an electrode 70 disposed on the magnetic layer 50 . Referring to FIGS. 6A and 6B , a support member 61 having coil patterns 62 and 63 disposed on one surface thereof is provided.

First, the support member 61 is prepared. A plurality of metal layers (not shown) may be disposed on both sides of the support member 61, and these metal layers (not shown) may be used as a seed layer when forming a coil or the like. A via hole for forming the via 64 may be formed in advance in the support member 61 . The via hole may use a mechanical drill, a laser drill, or the like.

Next, coil patterns 62 and 63 are formed on the support member 61 . The coil patterns 62 and 63 may be formed by forming a seed layer and forming a plating layer on the seed layer. At this time, the via 64 may also be formed at the same time. As the plating method, electrolytic copper plating, electroless copper plating, or the like can be used. For example, CVD (chemical vapor deposition), PVD (physical vapor deposition), sputtering, subtractive, additive, SAP (semi-additive process), MSAP (modified semi-additive) Process) can be used.

Conventionally, a silane-based compound, for example, an alkoxysilane compound represented by the following chemical formula, has been used to improve the binding force between a substrate such as metal, metal oxide, glass, ceramic, and the like and a polymer coating layer. In the formula below, R ₄ is a common organic functional group.

However, in order to bind such a silane-based compound onto the substrate, pretreatment of the substrate is required. For example, through a Piranha solution (H ₂ SO ₄ +H ₂ O ₂ ) solution treatment or oxygen plasma treatment on a substrate such as metal, glass, ceramic, etc., a hydroxyl group (-OH group) is formed on the substrate It is required to introduce The hydroxyl group (-OH group) generated on the surface of the substrate reacts with the silane-based compound, and the silane-based compound is bonded to the surface through a covalent bond. In addition, additional curing by heat treatment is required to provide sufficient binding force between the silane-based compound and the substrate. If there is no additional curing process such as heat treatment, the binding force may be insufficient.

Compared to the conventional method of wet coating a composition containing a silane-based compound to form a first coating layer, the coating method of the present invention is simpler and more efficient because it does not require an additional curing process such as plasma pretreatment and/or heat treatment. am. In addition, additional facilities for plasma treatment and/or heat treatment are not required. In addition, since it is a dry method that does not apply a coating solution on the coil pattern, additional steps such as removal of solvent after coating are unnecessary, so the time required for the overall process is shortened and the process is simplified. In addition, there is no problem of environmental contamination by volatilized solvents. In addition, since the first coating layer and the second coating layer can be continuously deposited in the same chamber by the same dry method, the manufacturing efficiency is improved.

Next, at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound including an unsaturated functional group, and an aromatic cyclic compound including an unsaturated functional group and a polar functional group is supplied on the surfaces of the coil patterns 62 and 63 to form a first coating layer ( 65a) is placed.

The first coating layer 65a is formed by supplying at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and an aromatic cyclic compound having an unsaturated functional group and a polar functional group on the surfaces of the coil patterns 62 and 63. In the disposing step, the terminal substituent connected to the oxygen atom of the non-fluorine-based acrylic compound contains 5 or less carbon atoms, and an aromatic heterocyclic compound containing an unsaturated functional group and an aromatic cyclic compound containing an unsaturated functional group and a polar functional group For example, it is a 5-membered ring or a 6-membered ring, the aromatic heterocyclic compound includes one or more heteroatoms selected from nitrogen, oxygen, and sulfur, and the heteroatoms included in the aromatic heterocyclic compound 1 to 4, the aromatic ring compound does not contain a hetero atom, the unsaturated functional group is a functional group containing a double bond or triple bond, and the polar functional group may be a functional group containing an oxygen or sulfur atom.

The non-fluorine-based acrylic compound does not contain a fluorine atom in its molecule, and may contain 5 or less carbon atoms in a substituent bonded to the terminal oxygen of the ester bond (-C(=O)O-). If a fluorine atom is included in the molecule, adhesion to the substrate may decrease. If the number of carbon atoms bonded to the terminal oxygen atom is excessively increased to 6 or more, adhesion to the substrate may deteriorate.

The heterocyclic compound containing an unsaturated functional group may be, for example, a compound represented by Formulas 1 to 9 below, and an aromatic ring compound containing an unsaturated functional group and a polar functional group may be a compound represented by Formulas 10 to 11 below:

<Formula 1> <Formula 2> <Formula 3>

<Formula 4> <Formula 5> <Formula 7>

<Formula 7> <Formula 8> <Formula 9>

<Formula 10> <Formula 11>

In the above formulas, R ₁ to R ₁₄ are each independently selected from unshared electrons, hydrogen, an alkyl group having 1 to 5 carbon atoms, a vinyl group, an allyl group, or a propargyl group, and R ₁ to R ₄ is a vinyl group, an allyl group, or a propalyl group, at least one of R ₆ , R ₇ and R ₉ is a vinyl group, an allyl group, or a propalyl group, and at least one of R ₁₀ to R ₁₄ is One is a vinyl group, an allyl group, or a propalyl group, R ₁₅ to R ₂₆ are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, a hydroxyl group, a thiol group, a vinyl group (vinyl), an allyl group (allyl) , Or is selected from a propargyl group, at least one of R ₁₅ to R ₂₀ is a vinyl group, an allyl group, or a propargyl group, and at least the other is a hydroxy group or a thiol group, and R ₂₁ to R ₂₆ At least one of them is a vinyl group, an allyl group, or a propalyl group, and at least the other is a hydroxyl group or a thiol group. Compounds represented by Formulas 1 to 11 may include, for example, a vinyl group. Compounds represented by Chemical Formulas 10 to 11 may further include a hydroxy group or a thiol group in addition to a vinyl group. The number of hydroxyl groups included in the compounds represented by Chemical Formulas 10 and 11 may be, for example, one or two. Compounds represented by Chemical Formulas 10 to 11 can be more firmly bound onto a substrate, that is, a coil pattern, by including two hydroxyl groups or thiol groups.

The aromatic heterocyclic compound including an unsaturated functional group may be, for example, an azole-based compound having a vinyl group, a pyridine-based compound having a vinyl group, and the like. Aromatic heterocyclic compounds containing an unsaturated functional group are, for example, 4-vinylpyridine, 2-vinylpyridine, 3-allypyridine, and 1-vinylimide. sol (1-vinylimidazole) or 2-methyl-1-vinylimidazole (2-methyl-1-vinylimidazole).

The aromatic ring compound containing an unsaturated functional group and a polar functional group is, for example, a phenyl-based compound having a vinyl group and a hydroxyl group, a cyclopentadienyl-based compound having a vinyl group and a hydroxyl group, a phenyl-based compound having a vinyl group and a thiol group, and a vinyl and a cyclopentadienyl-based compound having a thiol group. The aromatic ring compound containing an unsaturated functional group and a polar functional group is, for example, 1,2-dihydroxy-4-vinylbenzene, 1,2-dithiol-4-vinylbenzene, 1,2-dihydroxy-4- vinyl cyclopentadiene, 1,2-dithiol-4-vinylcyclopentadiene.

The non-fluorine-based acrylic compound may be, for example, a compound represented by Formula 20 below:

<Formula 20>

In the formula, R ₂₇ is hydrogen, methyl, ethyl, propyl, butyl, hydroxymethyl, or 2-hydroxyethyl, and R ₂₈ is hydrogen or methyl.

The non-fluorine-based acrylic compound may be, for example, (2-hydroxyethyl) methacrylate or (2-hydroxyethyl) acrylate.

The first coating layer 65a is a self-assembled layer of a non-fluorine-based acrylic compound chemically adsorbed on a coil pattern, a heterocyclic compound including an unsaturated functional group, and/or an aromatic cyclic compound including an unsaturated functional group and a polar functional group. ) can be. A non-fluorine-based acrylic compound, a heterocyclic compound including an unsaturated functional group, and/or an aromatic cyclic compound including an unsaturated functional group and a polar functional group are adsorbed and/or condensed on the coil pattern to form a chemical bond with the pipe to be chemically adsorbed. . For example, as shown in FIG. 1 , nitrogen atoms of 1-vinylimidazole may be chemically adsorbed by forming a chemical bond on the substrate, that is, the surface of the coil pattern. In addition, a non-fluorine-based acrylic compound, a heterocyclic compound including an unsaturated functional group, and/or an aromatic cyclic compound including an unsaturated functional group and a polar functional group may be self-assembled on a substrate, that is, a coil pattern, to form a monomolecular layer. It is also possible to form a plurality of layers of a non-fluorine-based acrylic compound, a heterocyclic compound containing an unsaturated functional group, and/or an aromatic cyclic compound containing an unsaturated functional group and a polar functional group. The first coating layer may be formed of, for example, a monomolecular compound without including a polymer. The first coating layer 65a may be obtained by, for example, chemical vapor deposition (CVD). No additional heat treatment is required after the formation of the first coating layer 65a.

Next, a second coating layer 65b including a parylene-based polymer is disposed on the first coating layer 65a by supplying parylene-based radicals derived from a parylene-based precursor onto the first coating layer 65a.

The second coating layer 65b may include a parylene-based polymer grafted to an unsaturated functional group included in the first coating layer 65a. For example, referring to FIGS. 1, 6A, and 6B, the first coating layer 65a is formed by reacting radicals derived from the parylene-based precursor with an unsaturated functional group included in a heterocyclic compound forming the first coating layer 65a. ) may be grafted with an unsaturated functional group to form the second coating layer 65b. Since the unsaturated functional group included in the first coating layer 65a reacts with radicals derived from the parylene-based precursor to form a parylene-based polymer, a separate catalyst or initiator for the graft reaction may not be used. Accordingly, the formation of the second coating layer 65b may proceed more simply. Since the chemically adsorbed first coating layer 65a is disposed on the coil patterns 62 and 63, the second coating layer 65b and the first coating layer 65a can be bonded more easily and strongly. As a result, the second coating layer 65b may be more strongly adhered to the coil patterns 62 and 63 . The second coating layer can be obtained by, for example, chemical vapor deposition (CVD). The first coating layer and the second coating layer may be, for example, conformal coating layers. Accordingly, the first coating layer and the second coating layer may form a uniform coating layer on a three-dimensional coil pattern having a complicated structure as well as a sheet-shaped two-dimensional coil pattern. The second coating layer 65b is an insulating layer.

In order to help the understanding of this creative idea, the mechanism by which the parylene-based polymer forms the second coating layer and the effect obtained by the second coating layer are explained in more detail, but this is to help the understanding of this creative idea, and this creative idea in any form does not limit the scope of

The second coating layer containing the parylene-based polymer is obtained by forming a polymer-type thin film by chemical vapor deposition (CVD) from parylene-based dimer powder represented by the following Chemical Formulas 12 to 19, for example. lose In the second coating layer containing the parylene-based polymer, the parylene-based dimer in powder form is evaporated by heat, and the evaporated parylene-based dimer is thermally decomposed while passing through the thermal decomposition unit of the coating device to be converted into parylene-based monomers, and the parylene-based monomer is cooled before being diffused into the vacuum chamber, and the cooled monomer is polymerized in the vacuum chamber to form a polymer layer in the form of a film on the surface of the coil pattern. Since the polymerization reaction of the parylene-based monomer proceeds at a very low pressure and room temperature of 30° C. or less, thermal stress is not generated on the surface of the coil pattern. In addition, since the coating using the parylene-based monomer is a dry coating, unlike the wet coating, the coating is uniformly applied even in the fine gaps on the coil pattern, regardless of the shape of the coil pattern, such as sharp needles, holes, corners, corners, and fine holes. It is possible to form a uniform conformal coating film on the coil pattern. In addition, since pinholes and/or pores are not generated in the second coating layer including the parylene-based polymer, excellent protective film properties can be provided on the coil pattern. In addition, the second coating layer comprising a parylene-based polymer can completely seal the coil pattern and has excellent water resistance because it absorbs little moisture and/or oxygen. Accordingly, the water resistance of the coating pattern coated with the second coating layer containing the parylene-based polymer is improved. In addition, the second coating layer including the parylene-based polymer has excellent chemical resistance because it is hardly affected by most chemicals such as acids, alkalis, or solvents. In addition, the second coating layer including the parylene-based polymer has excellent light transmittance before coating. There is no change in the aesthetic appearance of the surface of the post-coil pattern. In addition, the surface lubricity of the coated coil pattern is improved by the second coating layer containing the parylene-based polymer. Therefore, there is almost no adsorption of fine dust or viscous oil components on the coated coil pattern.

The parylene precursor may include, for example, at least one selected from dimers represented by Chemical Formulas 12 to 19:

<Formula 12> <Formula 13> <Formula 14> <Formula 15>

<Formula 16> <Formula 17> <Formula 18> <Formula 19>

Parylene-based polymers included in the second coating layer 65b include Parylene N, Parylene C, Parylene D, Parylene AF-4, Parylene HT, Parylene VT-4, Parylene CF, Parylene A, and Parylene. It may include at least one selected from Len AM, Parylene H, Parylene SR, Parylene HR, and Parylene NR. Water resistance may be improved by including the parylene-based compound in the parylene-based polymer. Parylene-based polymers may include, for example, Parylene N.

In order to supply a non-fluorine-based acrylic compound, an aromatic heterocyclic compound containing an unsaturated functional group, and/or an aromatic cyclic compound containing an unsaturated functional group and a polar functional group on the surfaces of the coil patterns 62 and 63, a heterocyclic compound containing an unsaturated functional group is provided. The vaporization temperature of the cyclic compound and/or the aromatic cyclic compound containing an unsaturated functional group and a polar functional group is, for example, 25 to 150 °C, 30 to 140 °C, 40 to 130 °C, 50 to 120 °C, 60 to 110 °C, or 70 °C. It may be ~ 100 ° C., but is not necessarily limited to this range and may be adjusted according to the boiling point of the compound to be vaporized.

In order to supply parylene-based radicals derived from the parylene-based precursor onto the first coating layer 65a, the vaporization temperature of the parylene-based precursor is, for example, 100 to 200°C, 110 to 190°C, 120 to 180°C, or 130 to 130°C. 170°C, and the pyrolysis temperature of the parylene precursor is, for example, 500-750°C, 550-750°C, 550-700°C, 600-700°C, 650-700°C, 660-700°C, or 670-690°C. can While the first coating layer 65a and the second coating layer 65b are introduced, the temperature of the coil patterns 62 and 63 may be 20 to 40°C, 20 to 35°C, or 20 to 30°C. By having the vaporization temperature, thermal decomposition temperature and/or pipe temperature within these ranges, water resistance and adhesion of the coating layer may be improved, and a more uniform coating layer may be introduced.

The thickness of the first coating layer 65a may be, for example, 100 nm or less, 90 nm or less, 80 nm or less, 70 nm or less, 60 nm or less, 50 nm or less, 40 nm or less, 30 nm or less, 20 nm or less, or 10 nm or less. The thickness of the first coating layer 65a is, for example, 0.1 nm to 100 nm, 0.5 nm to 90 nm, 1 nm to 80 nm, 1 nm to 70 nm, 1 nm to 60 nm, 1 nm to 50 nm, 1 nm to 40 nm, 1 nm to 30 nm, 1 nm to 20 nm, Or it may be 1 nm to 10 nm. When the first coating layer 65a has a thickness within this range, the binding force of the second coating layer 65b may be further improved.

The thickness of the second coating layer 65b is 10 nm to 500 μm, 10 nm to 200 μm, 10 nm to 100 μm, 10 nm to 50 μm, 10 nm to 20 μm, 10 nm to 15 μm, 10 nm to 10 μm, 10 nm to 5 μm, 10 nm to 1 μm, 10 nm to 500 nm, 10 nm to 300 nm, 10 nm to 200 nm, or 10 nm to 100 nm. When the second coating layer 65b has a thickness within this range, water resistance and adhesiveness of the second coating layer 65b may be improved, and a more uniform coating layer may be introduced. If the thickness of the second coating layer 65b is too thin, the coating effect may be insignificant. If the thickness of the second coating layer 65b is too thick, a uniform coating layer may not be obtained.

Next, through holes 64 may be formed through central portions of the first coil pattern 62 and the second coil pattern 63 of the support member 61 . The through hole 64 is then filled with a magnetic material to form a magnetic core. In this case, characteristics such as inductance may be improved.

Next, a plurality of magnetic layers 50 are formed by placing magnetic materials on the upper and lower portions of the support member 61, pressing and curing the magnetic materials, and dicing them to obtain the magnetic layers 50.

Next, a first electrode 71 and a second electrode 72 electrically connected to the coil patterns 62 and 63 are formed on the magnetic layer 50, that is, the electrode 70 to obtain the device 80. .

The coil patterns 62 and 63 may include at least one of a seed layer and a plating layer. The seed layer may include titanium (Ti), titanium-tungsten (Ti-W), molybdenum (Mo), chromium (Cr), nickel (Ni), nickel (Ni)-chromium (Cr), or an alloy thereof. . The seed layer may have a single-layer or multi-layer structure. A seed layer having a multi-layered structure may have a second layer disposed on the first layer and the second layer. The second layer may be of the same metal as the plating layer. The second layer may be, for example, copper (Cu). The plating layer may include copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pd), or alloys thereof. The plating layer may be, for example, a metal belonging to groups 1 to 16 of the periodic table of elements. The plating layer may be, for example, copper (Cu), aluminum (Al), stainless steel, nickel (Ni), zinc (Zn), iron (Ti), titanium (Ti), lead (Pb), cobalt (Co), chrome (Cr), tungsten (W), magnesium (Mg), gold (Au), silver (Ag), platinum (Pt), or alloys thereof. The alloy may be, for example, a Co-Cr-W-Ni-Mg alloy.

A device manufacturing method according to an embodiment will be described in more detail with reference to FIGS. 6A, 6B, and 7 .

First, a coating device is prepared.

The coating device 1000 includes a first vaporizer 100 that accommodates and vaporizes the parylene precursor powder, a first flow controller 200 connected to the first vaporizer 100, and a first flow controller 200. A thermal decomposition device 300 connected thereto, a deposition chamber 400 in which parylene glass radicals passing through the thermal decomposition device 300 are deposited on a substrate, a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group and/or an unsaturated functional group, and A second vaporizer 700 for accommodating and vaporizing an aromatic ring compound containing a polar functional group therein, a second flow rate controller 800 communicating with the second vaporizer 700, cooling for cooling by discharging gas generated during deposition, etc. A trap 500 and a vacuum pump 600 for maintaining a vacuum inside the deposition chamber 400 are included. A first valve 250 capable of opening and closing is disposed between the first flow controller 200 and the thermal decomposer 300, and a second valve 850 capable of opening and closing between the second flow controller 800 and the deposition chamber 300 is placed

The second vaporizer 700 heats the non-fluorine-based acrylic compound supplied to the inside, an aromatic heterocyclic compound having an unsaturated functional group, and/or an aromatic ring compound including an unsaturated functional group and a polar functional group, and vaporizes the non-fluorine-based acrylic compound and the unsaturated functional group. Produces an aromatic heterocyclic compound having and/or an aromatic cyclic compound containing an unsaturated functional group and a polar functional group. For example, in a predetermined space connected to the second vaporizer 700, a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and/or an aromatic ring including an unsaturated functional group and a polar functional group are introduced into the second vaporizer 700. It is possible to introduce compounds. The second vaporizer 700 is provided with a third transfer pipe 710 formed with a long cylindrical inner space on the left and right to move along the inner space. A non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and/or an aromatic cyclic compound including an unsaturated functional group and a polar functional group are heated and vaporized at a temperature of about 25 to 150° C. in the second vaporizer 700. The compound, an aromatic heterocyclic compound having an unsaturated functional group, and/or an aromatic cyclic compound having an unsaturated functional group and a polar functional group is supplied to the deposition chamber 400 along the third transfer pipe 710 in the form of a single molecule.

The first vaporizer 100 generates a vaporized parylene precursor by heating the parylene precursor powder supplied therein. A container (not shown) containing parylene powder may be disposed in the first vaporizer 100 . Alternatively, it is possible to introduce parylene precursor powder into the first vaporizer 100 in a predetermined space connected to the first vaporizer 100 . The first vaporizer 100 is provided with a first transfer pipe 110 formed with a long cylindrical inner space on the left and right, and a first heat source 120 is disposed on the outer surface of the space to vaporize parylene powder accommodated therein. It allows you to move along the inner space. A heat wire coil or the like may be used as the heat source 120 on the outer surface of the first vaporizer 100 . The parylene precursor powder is heated to a temperature of about 100 to 200° C. in the first vaporizer 100 and moved toward the thermal decomposer 300 along the first transfer pipe 110 in the form of a vaporized parylene precursor.

The thermal cracker 300 communicates with the first vaporizer 100 and includes a second transfer pipe 310 through which the vaporized parylene precursor generated in the first vaporizer 100 moves, and the vaporized parylene precursor It includes a second heat source 320 that generates parylene free radicals by heating and pyrolysis. In the thermal decomposer 300, the vaporized parylene precursor supplied from the first vaporizer 100 is thermally decomposed to generate parylene free radicals, that is, parylene monomer. The internal temperature of the thermal decomposer 300 is about 500 to 750 °C. The form of the pyrolysis machine 300 is, for example, a form of a furnace through which a second transfer pipe 310 made of quartz passes therein. In order to minimize heat loss of the first vaporizer 100 and the thermal cracker 300, a heat insulating layer may be disposed outside them.

The deposition chamber 400 communicates with the thermal decomposer 300 and includes a space formed therein. A support member having a coil pattern disposed on at least one surface thereof is disposed in an inner space of the deposition chamber 400 .

Next, the vaporized non-fluorine-based acrylic compound generated from the second vaporizer 700, an aromatic heterocyclic compound having an unsaturated functional group, and/or an unsaturated functional group and a polar functional group are grouped on the surface of the support member having the coil pattern disposed on at least one surface thereof. An aromatic ring compound containing is supplied. The vaporized non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and/or an aromatic cyclic compound including an unsaturated functional group and a polar functional group are chemically adsorbed on the surface of the substrate, and the non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and A first coating layer in which an aromatic ring compound including an unsaturated functional group and a polar functional group is self-assembled by chemisorption is deposited. The inside of the deposition chamber 400 is a low-temperature environment of about 20 to 40° C. adjacent to room temperature. The supply time of the vaporized non-fluorine-based acrylic compound, the aromatic heterocyclic compound having an unsaturated functional group, and/or the aromatic cyclic compound including an unsaturated functional group and a polar functional group into the deposition chamber 400 is 10 to 50 minutes, 15 to 30 minutes, It may be 20 to 40 minutes. If the supply time of the vaporized non-fluorine-based acrylic compound, the aromatic heterocyclic compound having an unsaturated functional group, and/or the aromatic cyclic compound having an unsaturated functional group and a polar functional group is too short, the first coating layer may not be formed properly, and the first coating layer may not be formed properly. If the formation time is excessively long, substantial changes in the first coating layer may be insignificant. The pressure inside the deposition chamber 400 is 2 to 20 times greater than before supplying the vaporized non-fluorine-based acrylic compound, the aromatic heterocyclic compound having an unsaturated functional group, and/or the aromatic cyclic compound having an unsaturated functional group and a polar functional group. can be maintained In this pressure range, the first coating layer may be deposited more efficiently. The rate at which the vaporized non-fluorine-based acrylic compound, the aromatic heterocyclic compound having an unsaturated functional group, and/or the aromatic cyclic compound including an unsaturated functional group and a polar functional group are supplied to the inside of the deposition chamber 400 is It can be adjusted within the range where the pressure is maintained.

Subsequently, parylene-based radicals derived from the parylene precursor generated in the thermal decomposition unit 300 are supplied onto the first coating layer 65a. The parylene free radical generated in the thermal decomposition unit 300 proceeds with a graft polymerization reaction on the surface of the first coating layer 65a with an aromatic heterocyclic compound and/or an unsaturated functional group of an aromatic cyclic compound including an unsaturated functional group and a polar functional group to form a second coating layer 65b including a parylene-based polymer on the first coating layer 65a. The inside of the deposition chamber 400 is a low-temperature environment of about 20 to 40° C. adjacent to room temperature. The second coating layer 65b comprising a parylene-based polymer is formed by graft polymerization of vaporized parylene free radicals and unsaturated functional groups of a non-fluorine-based acrylic compound, aromatic heterocyclic compound/aromatic cyclic compound, and this polymerization reaction is carried out at room temperature. It is carried out at a low temperature of about 20 to 40 ℃ adjacent to. Therefore, the coil pattern is titanium (Ti), titanium-tungsten (Ti-W), molybdenum (Mo), chromium (Cr), nickel (Ni), nickel (Ni)-chromium (Cr), copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pd), or alloys thereof. Since the deposition is substantially performed at room temperature, thermal denaturation and deterioration due to heat of the complex coil patterns 62 and 63 can be prevented. Therefore, it is applicable to virtually all types of coil patterns 62 and 63 . Referring to FIGS. 6A to 6D , a conformal coating layer having a constant thickness is formed to match the surface contours of the coil patterns 62 and 63 . The pressure inside the deposition chamber 400 may be maintained at 1.5 to 10 times the pressure before parylene glass radicals are supplied. In this pressure range, the second coating layer 65b may be deposited more efficiently. A rate at which parylene glass radicals are supplied into the deposition chamber 400 may be controlled within a range in which the above-described internal pressure of the deposition chamber 400 is maintained.

The first vaporizer 100, the second vaporizer 700, the thermal decomposer 300, and the deposition chamber 400 all maintain an internal vacuum state during the coating process. To this end, a cooling trap 500 and a vacuum pump 600 are connected to the deposition chamber 400 . The cooling trap 500 is a device for collecting and cooling gases generated during coating, and the vacuum pump 600 communicating with the cooling trap 500 is a first vaporizer 100 and a second vaporizer 700 during the coating process. ), the thermal decomposer 300 and the deposition chamber 400, and serves to make a vacuum inside and maintain their vacuum state.

A first flow rate controller 200 is disposed between the first vaporizer 100 and the thermal decomposer 300 . The first flow rate controller 200 controls the rate at which the vaporized parylene precursor passes through the thermal decomposer 300 and is supplied into the deposition chamber 400 . The first flow rate controller 200 constantly controls the amount of the vaporized parylene precursor supplied to the deposition chamber 400 after passing through the thermal decomposer 300 .

A first valve 250 capable of opening and closing is disposed between the first flow controller 200 and the thermal decomposer 300 . The first valve 250 may be closed when preparing for the next step after the coating layer forming step is completed or when charging of the parylene precursor powder is required during the coating layer forming step. The first valve 250 is, for example, a vacuum ball valve.

A second flow controller 800 is disposed between the second vaporizer 700 and the deposition chamber 400 . The second flow controller 800 controls the rate at which the vaporized non-fluorine-based acrylic compound, the aromatic heterocyclic compound having an unsaturated functional group, and/or the aromatic cyclic compound including an unsaturated functional group and a polar functional group are supplied into the deposition chamber 300 . do. The content of the vaporized non-fluorine-based acrylic compound, the aromatic heterocyclic compound having an unsaturated functional group, and/or the aromatic cyclic compound having an unsaturated functional group and a polar functional group being supplied to the deposition chamber 400 by the second flow controller 800 is kept constant. Adjust.

A second valve 850 capable of opening and closing is disposed between the second flow controller 700 and the deposition chamber 400 . The second valve 850 prepares for the next step after the coating layer forming step is completed, or, during the coating layer forming step, a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and/or an aromatic cyclic compound including an unsaturated functional group and a polar functional group. can be locked if recharging is required. The second valve 850 is, for example, a vacuum ball valve.

The amount of the vaporized parylene precursor supplied into the deposition chamber 400 is constantly controlled by the first flow controller 200 . Accordingly, as the pressure inside the deposition chamber 400 is maintained within a certain range, it is easy to control the process of forming a coating layer on the surface of the substrate. In addition, it is possible to prevent a decrease in the deposition rate of the coating layer due to pressure variations inside the deposition chamber 400 . Thus, the coating layer deposition rate is improved, and consequently, the productivity of coating layer manufacturing is improved.

A device according to another embodiment includes a support member having a coil pattern disposed on one side or both sides; A first coating layer disposed on the surface of the coil pattern; and a second coating layer disposed on the first coating layer. A magnetic layer that surrounds both surfaces of the second coating layer and the support member and includes a magnetic material; An electrode disposed on the magnetic layer and electrically connected to the coil pattern; wherein the first coating layer includes at least one selected from a non-fluorine-based acrylic compound, an aromatic heterocyclic compound having an unsaturated functional group, and derivatives thereof, and the second coating layer comprises: Includes parylene-based polymers.

Referring to FIGS. 6A to 6B , the device 80 includes a magnetic layer 50 , a coil 60 disposed within the magnetic layer 50 , and an electrode 70 disposed on the magnetic layer 50 .

The magnetic layer 50 forms the exterior of the device 80 . The magnetic layer 50 includes first and second surfaces facing in a first direction, third and fourth surfaces facing in a second direction, and fifth and sixth surfaces facing in a third direction. It may be a hexahedral shape, but is not limited thereto. The magnetic layer 50 may include metal powder and a binder resin. The metal powder may include iron (Fe), chromium (Cr), or silicon (Si) as a main component, and for example, iron (Fe)-nickel (Ni), iron (Fe), iron (Fe)- It may include chromium (Cr)-silicon (Si), etc., but is not limited thereto. The binder resin may include epoxy, polyimide, liquid crystal polymer, and the like. The binder resin may be an acrylic resin, an epoxy resin or a derivative thereof.

The device 80 may be a power inductor, and in this case, the coil 60 may store electricity in the form of a magnetic field and maintain an output voltage to stabilize power.

The coil 60 penetrates the support member 61, the first coil pattern 62 and the second coil pattern 63 formed on one side and the other side of the support member 61, and the support member 61, respectively, and the first coil A via hole 64 electrically connecting the pattern 62 and the second coil pattern 63 and a coating layer 65 covering the first coil pattern 62 and the second coil pattern 63 are included. The coating layer 65 includes a first coating layer 65a and a second coating layer 65b.

The support member 61 is intended to make the coil 60 thinner and easier, and the material or type thereof is not particularly limited as long as it can support the coil patterns 62 and 63. For example, it may be a copper clad laminate (CCL), a polypropylene glycol (PPG) substrate, a ferrite substrate, a metal-based soft magnetic substrate, an insulating substrate made of insulating resin, and the like. Insulating resins include thermosetting resins such as epoxy resins, thermoplastic resins such as polyimide, or resins impregnated with reinforcing materials such as glass fibers or inorganic fillers, such as prepregs and ABF (Ajinomoto Build-up). Film), FR-4, BT (Bismaleimide Triazine) resin, PID (Photo Imagable Dielectric) resin, and the like may be used. In terms of maintaining rigidity, an insulating substrate containing glass fibers and an epoxy resin may be used, but is not limited thereto.

The coil patterns 62 and 63 each have a planar coil shape. The flat coil-shaped coil patterns 62 and 63 may be plating patterns formed by an isotropic plating method, but are not limited thereto, and may be plating patterns formed by an anisotropic plating method. In the case of a planar coil shape, the number of turns may be at least two, which is advantageous for implementing thin and high inductance.

The coil patterns 62 and 63 may include a seed layer and a plating layer. The seed layer is a first layer containing at least one of titanium (Ti), titanium-tungsten (Ti-W), molybdenum (Mo), chromium (Cr), nickel (Ni), and nickel (Ni)-chromium (Cr). layer and the plating layer and the same material, for example, may be composed of a second layer containing copper (Cu). The plating layer may include copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pd), or alloys thereof, and generally As may include copper (Cu), but is not limited thereto.

Coil patterns 62 and 63 are disposed on one side or both sides of the supporting member 61 .

The via 64 penetrates the support member 61 and thus has a thickness corresponding to the support member 61 . The via 64 electrically connects the coil patterns 62 and 63 . A current path continues, and as a result, one coil rotating in the same direction is formed.

The via 64 may also be composed of a seed layer and a plating layer, and specific examples are as described above. That is, the via 64 may be formed simultaneously with the coil patterns 62 and 63 . The horizontal cross-sectional shape of the via 64 may be, for example, circular, elliptical, or polygonal. The vertical cross-sectional shape of the via 64 may be, for example, a tapered shape, a reverse taper shape, an hourglass shape, a columnar shape, or the like.

The coating layer 65, that is, the insulating film is to prevent contact between the magnetic material of the body 50 and the coil patterns 62 and 63, and the insulating film 65 is specifically formed on the surface of the coil patterns 62 and 63. It includes a first coating layer 65a and a second coating layer 65b formed on the surface of the first coating layer 65a.

The first coating layer 65a acts as a kind of adhesion promotion layer, and due to the existence of the first coating layer 65a, chemical etching, heat treatment, and the like are unnecessary unlike the prior art.

The second coating layer 65b substantially serves as an insulating layer. The second coating layer 65b may include a parylene-based polymer, and may be formed by coating such a material by chemical vapor deposition (CVD) or the like.

The electrode 70 serves to electrically connect the device 80 to the electronic device when the device 80 is mounted on the electronic device. The electrode 80 includes a first electrode 71 and a second electrode 72 disposed spaced apart from each other on the magnetic layer 50 . If necessary, the electrode 70 may include a pre-plating layer (not shown) to improve electrical reliability between the coil 60 and the electrode 70 .

The first electrode 71 is connected to a lead terminal of the first coil pattern 62 drawn to the first surface of the magnetic layer 50 . The second electrode 72 is connected to the lead terminal of the second coil pattern 63 drawn to the second surface of the magnetic layer 50 .

The first electrode 71 and the second electrode 72 may include, for example, a conductive resin layer and a conductor layer formed on the conductive resin layer. The conductive resin layer may be formed by paste printing or the like, and may include at least one conductive metal selected from the group consisting of copper (Cu), nickel (Ni), and silver (Ag) and a thermosetting resin. The conductor layer may include at least one selected from the group consisting of nickel (Ni), copper (Cu), and tin (Sn). For example, a nickel (Ni) layer and a tin (Sn) layer are sequentially plated. can be formed by

Referring to FIG. 2, a device according to another embodiment includes a substrate such as a coil pattern (substrate, 10); And a first coating layer (not shown) disposed on the surface of the substrate, wherein the first coating layer includes a non-fluorine-based acrylic compound, an aromatic heterocyclic compound including an unsaturated functional group, an aromatic cyclic compound including an unsaturated functional group and a polar functional group, and a second coating layer 20 comprising at least one selected from derivatives thereof and disposed on the surface of the first coating layer (not shown), wherein the second coating layer 20 is a paryl derived from a parylene precursor. Contains ren-based polymers. Durability, water resistance, chemical resistance, and biocompatibility of the device may be improved by including the first coating layer (not shown) and the second coating layer 20, which are conformal coating layers introduced on the surface of the substrate.

Referring to FIG. 3 , a device according to an embodiment includes a substrate 10 such as, for example, a coil pattern; A first coating layer (not shown) comprising at least one selected from a non-fluorine-based acrylic compound, an aromatic heterocyclic compound including an unsaturated functional group, an aromatic cyclic compound including an unsaturated functional group and a polar functional group, and derivatives thereof; a second coating layer 20 comprising a parylene-based polymer derived from a parylene precursor; and a third coating layer 30 including a copolymer of a parylene-based radical derived from a parylene precursor and another organic monomer. Water resistance and chemical resistance of the device may be further improved by including the three-layer structure of the coating layer. Other organic monomers may be, for example, acrylic monomers.

Referring to FIG. 4 , a device according to an embodiment includes a substrate 10 such as a coil pattern; A first coating layer (not shown) comprising at least one selected from a non-fluorine-based acrylic compound, an aromatic heterocyclic compound including an unsaturated functional group, an aromatic cyclic compound including an unsaturated functional group and a polar functional group, and derivatives thereof; a second coating layer 20 comprising a parylene-based polymer derived from a parylene precursor; a third coating layer 30 comprising a copolymer of a parylene-based radical derived from a parylene precursor and another organic monomer; and a second coating layer 20 including a parylene-based polymer derived from a parylene precursor. Water resistance and chemical resistance of the device can be further improved by the coating layer including such a 4-layer structure. Other organic monomers may be, for example, acrylic monomers.

Referring to FIG. 5 , a device according to an embodiment includes a substrate 10 such as, for example, a coil pattern; A first coating layer (not shown) comprising at least one selected from a non-fluorine-based acrylic compound, an aromatic heterocyclic compound including an unsaturated functional group, an aromatic cyclic compound including an unsaturated functional group and a polar functional group, and derivatives thereof; a second coating layer 20 comprising a parylene-based polymer derived from a parylene precursor; a third coating layer 30 comprising a copolymer of a parylene-based radical derived from a parylene precursor and another organic monomer; a second coating layer 20 comprising a parylene-based polymer derived from a parylene precursor; and a third coating layer 30 including a copolymer of a parylene-based radical derived from a parylene precursor and another organic monomer. Water resistance and chemical resistance of the device may be further improved by including the five-layer structure of the coating layer. Other organic monomers may be, for example, acrylic monomers.

In the present specification, "aromatic heterocyclic compound" refers to a monocyclic compound in which an aromatic ring contains one or more heteroatoms selected from N, O, P, or S, and the remaining ring atoms are carbon. ) or a bicyclic organic compound. The aromatic heterocycle may include, for example, 1-5 heteroatoms and 5-10 ring members. The O, S or N may be oxidized and have various oxidation states.

Aromatic monocyclic heterocyclic compounds include, for example, thiophene, pyrrole, imidazole, pyrazole, thiazole isothiazole 1,2,3-oxadiazole, 1,2,4-oxadiazole, 1,2 ,5-oxadiazole, 1,3,4-oxadiazole, 1,2,3-thiadiazole, 1,2,4-thiadiazole, 1,2,5-thiadiazole, 1,3 ,4-thiadiazole, isothiazole, oxazole, isoxazole, 1,2,4-triazole, 1,2,3-triazole, tetrazole pyridine, 2-pyrazine, pyrazine, pyrimidine, etc. can be heard

The aromatic heterocyclic compound includes a case in which an aromatic heterocyclic ring is fused to one or more aromatic rings (cylco aromatic), alicyclic rings (cyclo aliphatic), or heteroaromatic rings (cyclo heteroaromatic).

Aromatic bicyclic heterocyclic compounds include, for example, indole, isoindole, indazole, purine, quinoline, isoquinoline, and the like.

In the present specification, "unsaturated functional group" means a functional group having one or more carbon-carbon double bonds or carbon-carbon triple bonds. Unsaturated functional groups are, for example, vinyl groups, allyl groups, and the like.

In the present specification, "aromatic heterocyclic compound containing an unsaturated functional group" refers to a compound in which the above-described unsaturated functional group is substituted in the aromatic heterocyclic ring of the above-described aromatic heterocyclic compound. For example, imidazole substituted with a vinyl group, pyridine substituted with a vinyl group, and the like.

As used herein, "alkyl group" refers to a group of fully saturated branched or unbranched (or straight-chain or linear) hydrocarbons.

Examples of alkyl include, but are not limited to, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, isopentyl, neopentyl, iso-amyl, n-hexyl , 3-methylhexyl, 2,2-dimethylpentyl, 2,3-dimethylpentyl, n-heptyl and the like.

Hereinafter, the coating layer forming method related to the embodiment will be described in detail with reference to Examples and Comparative Examples. Incidentally, the examples shown below are only provided for illustrative purposes, and the present invention is not limited to the following examples.

(Manufacture of coated device)

Example 1-1: First coating layer (1-vinylimidazole) and second coating layer (Parylene N) coating

A chamber in which the first vaporizer, the second vaporizer, and the pyrolysis unit were connected was prepared.

One sheet of aluminum foil (thickness: 100 μm) having a size of 300 mm × 300 mm was installed in a vertical direction inside a vacuum chamber having a diameter of 700 mm and a height of 800 mm.

The temperature of the second vaporizer was adjusted to 80° C., and the pressure inside the vacuum chamber was adjusted to 10 mTorr or less. The temperature of the vacuum chamber was 25°C.

1-vinylimidazole was introduced into the second vaporizer. 1-vinylimidazole was supplied at a constant flow rate to the vacuum chamber via the second vaporizer. The rate at which vaporized 1-vinylimidazole was supplied to the vacuum chamber was maintained at 100 mTorr by using a second MFC (Mass Flow Controller, MKS 1152C, MKS Instruments, USA). After 20 minutes have elapsed from the point at which 1-vinylimidazole is supplied into the chamber (the point at which 1-vinylimidazole is adsorbed and/or condensed on the surface of the aluminum foil), the needle valve of the second vaporizer is closed and The supply of imidazole (1-vinylimidazole) was stopped and deposition was terminated.

The temperature of the first vaporizer was adjusted to 140°C, the temperature of the thermal decomposer to 670°C, and the pressure inside the vacuum chamber was adjusted to 10 mTorr or less. The temperature of the vacuum chamber was 25°C.

Parylene N dimer powder was introduced into the first vaporizer. Parylene N dimer powder was supplied to the vacuum chamber via the first vaporizer and the pyrolysis unit. Parylene N dimer was vaporized in a vaporizer and then pyrolyzed into free radicals in a thermal decomposer and supplied into the vacuum chamber at a constant flow rate. The rate at which parylene dimer vaporized in the first vaporizer is supplied to the thermal decomposer was maintained at a pressure of 20 mTorr in the reaction chamber using a first MFC (mass flow controller, MKS 1153A, MKS Instruments, USA). The temperature of the MFC was maintained at 185°C. After 90 minutes had elapsed from the point at which parylene radicals were supplied into the chamber (the point at which deposition of the second coating layer started), the supply of parylene N dimer powder was stopped. After confirming that the monomer was completely deposited by reducing the pressure in the vacuum chamber to 10 mTorr or less, the deposition was terminated. After adjusting the pressure of the vacuum chamber to atmospheric pressure, the coated aluminum foil was taken out.

X-ray photoelectron spectroscopy (XPS), Attenuated Total Reflection Fourier Transform Infrared (ATR-FTIR) spectroscopy, and water (H ₂ O) contact angle measurement of 1-vinylimidazole chemisorption on the surface of aluminum foil - It was confirmed that the first coating layer, which is a self-assembly layer of vinylamidazole monomers, was deposited. Through SEM (Scanning Electron Microscope) cross-sectional analysis, it was found that a second coating layer, a parylene polymer, was deposited on the first coating layer by a graft reaction between the 1-vinylamidazole monomer chemically adsorbed on the surface of the aluminum foil and the parylene radical. Confirmed. The thickness of the second coating layer was about 2 μm.

Example 1-2: First coating layer (4-vinylpyrine) and second coating layer (parylene N) coating

A coating layer was deposited in the same manner as in Example 1-1, except that 4-vinylpyridine was used instead of 1-vinylimidazole.

Example 1-3: First coating layer (1-vinylimidazole) and second coating layer (Parylene C) coating

A coating layer was deposited in the same manner as in Example 1-1, except that parylene C dimer was used instead of parylene N dimer.

Example 1-4

A coating layer was deposited in the same manner as in Example 1-1, except that (hydroxyethyl)methacrylate was used instead of 1-vinylimidazole.

Example 1-5

A coating layer was deposited in the same manner as in Example 1-3, except that (hydroxyethyl)methacrylate was used instead of 1-vinylimidazole.

Examples 1-6 to 1-10

Coating layers were deposited in the same manner as in Examples 1-1 to 1-5, respectively, except that the time for supplying the compound for forming the first coating layer into the chamber was changed from 20 minutes to 40 minutes.

Examples 1-11 to 1-15

Coating layers were deposited in the same manner as in Examples 1-1 to 1-5, except that the supply time of the compound for forming the first coating layer into the chamber was changed from 20 minutes to 60 minutes.

Comparative Example 1-1: Parylene N alone coating

A coating layer was deposited in the same manner as in Example 1-1, except that the step of depositing the first coating layer containing 1-vinylimidazole was omitted and only the second coating layer containing parylene N was deposited.

Comparative Example 1-2: Parylene C single coating

A coating layer was deposited in the same manner as in Examples 1-3, except that the step of depositing the first coating layer containing 1-vinylimidazole was omitted and only the second coating layer containing Parylene C was deposited.

Comparative Example 1-3: First coating layer (siloxane compound) and second coating layer (parylene N) coating

Instead of 1-vinylimidazole monomer, 1,3,5,7-tetravinyl-1,3,5,7-tetramethylcyclotetrasiloxane (1,3,5,7-tetravinyl-1 A coating layer was deposited in the same manner as in Example 1-1, except that ,3,5,7-tetramethyltetrasiloxane, pV4D4) was used.

Evaluation Example 1-1: XPS analysis of Al substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 1-1 to 1-15 and Comparative Examples 1-1 to 1-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

Some of the analysis results are shown in Figs. 8a to 8b. 8A is for Example 1-1, and FIG. 8B is for Example 1-4.

As shown in FIG. 8A, after 1-vinylimidazole was coated on the Al substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Al substrate.

As shown in FIG. 8B, after (hydroxyethyl)methacrylate was coated on the Al substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

It was determined that zinc (Zn) and lead (Pb) peaks were detected as impurities contained in aluminum metal.

Evaluation Example 1-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 1-1 to 1-15 and Comparative Examples 1-1 to 1-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in FIGS. 8C to 8E and Table 1 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

FIG. 8C is for Example 1-1, FIG. 8D is for Example 1-4, and FIG. 8E is for Comparative Example 1-1.

contact angle [°] Example 1-1 63.3 Example 1-4 53.8 Comparative Example 1-1 43.0

As shown in Table 1, the contact angle increased by introducing the first coating layer on the Al substrate. Therefore, it was confirmed that the first coating layer was introduced on the Al substrate.

Evaluation Example 1-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 1-1 to 1-15 and Comparative Examples 1-1 to 1-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 2 and FIGS. 8F to 8I below.

Adhesion evaluation Example 1-1 5B Example 1-2 5B Example 1-3 5B Example 1-4 0B Example 1-5 2B Example 1-6 5B Examples 1-8 5B Examples 1-9 2B Examples 1-10 4B Example 1-11 5B Examples 1-13 5B Examples 1-14 2B Examples 1-15 4B Comparative Example 1-1 0B Comparative Example 1-2 0B Comparative Example 1-3 0B

As shown in Table 2 and FIGS. 8f to 8i, the adhesion of the coating layers of Examples was excellent as most of 4B or more, and the adhesion of the coating layers of Comparative Examples 1-1 to 1-3 were all 0B and poor.

FIG. 8f is the coating layer of Example 1-1, FIG. 8g is the coating layer of Example 1-6, FIG. 8h is the coating layer of Example 1-11, and FIG. 8i is the adhesion test result of the coating layer of Comparative Example 1-1. The coating layer was transparent. Therefore, the surface of the substrate was seen as it was.

8f to 8h, the coating layer was hardly detached.

On the other hand, in FIG. 8i, most of the coating layer was desorbed, and the coating layer was partially desorbed, and the coating layer appeared opaque due to the empty space generated between the substrate and the coating layer.

That is, in FIG. 8i , most of the coating layer was desorbed and only a portion of the coating layer remained and appeared opaque.

Therefore, it was confirmed that the adhesion between the substrate and the second coating layer was remarkably improved by the introduction of the first coating layer.

Evaluation Example 1-4: ATR-FTIR analysis of Al substrate with first coating layer and second coating layer introduced

In the manufacturing process of the substrates coated in Examples 1-1 to 1-15 and Comparative Examples 1-1 to 1-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed. Some of the analysis results are shown in FIGS. 8j to 8m.

FIG. 8j is for the surface of the substrate on which the first coating layer is formed in Example 1-1, and FIG. 8k is for the surface of the substrate on which the first coating layer is formed in Example 1-4.

FIG. 8l is for the surface of the substrate on which the second coating layer is formed in Example 1-1, and FIG. 8m is for the surface of the substrate on which the second coating layer is formed in Example 1-3.

As shown in FIG. 8j, after 1-vinylimidazole is coated on the Al substrate, 1557 cm ^-1 (C = C strethcing), 1604 (C = N stretching), 1490 cm ^-1 (imidazole ring stretching) ), 1204 cm ^-1 (CN streching), 1048 (imidazole ring bending and stretching), 761 cm ^-1 (imidazole ring bending), and 668 cm ^-1 (imidazole ring torsion) due to 1-vinylimidazole peaks were identified. Therefore, it was confirmed that 1-vinylimidazole was coated.

As shown in Figure 8k, after (hydroxyethyl) methacrylate is coated on an Al substrate, 3100-3500 cm ^-1 (OH Stretching), 1716 cm ^-1 (C = O stretching), 1607 cm ^{- 1} (C=C stretching) and 1161 cm ^-1 (ester OC-OC stretching), characteristic peaks attributed to (hydroxyethyl) methacrylate were confirmed. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated. OH stretching vibration (hydrogen bonding) of ATR-FTIR of pure (hydroxyethyl) methacrylate in solution phase is confirmed as a broad peak in the 3100-3600 cm ^-1 region, but on an Al substrate (hydroxyethyl) When coated with methacrylate, it was confirmed that four peaks were split in the 3100-3500 cm ^-1 region.

As shown in FIG. 8L, after parylene N was additionally coated on the first coating layer of 1-vinylimidazole, 3084 cm ^-1 (aromatic CH stretching), 3007 cm ^-1 (CH ₂ stretching), 2917 cm ^-1 (CH ₂ stretching), 2852 cm ^-1 (CH ₂ stretching), 1511 cm ^-1 (aromatic CC stretching), 1448 cm ^-1 (CH bending), 817 cm ^-1 (two adjacent aromatic CH bending), A characteristic peak due to parylene N was confirmed at 540 cm ^-1 (out-of-plane ring bending). Thus, it was confirmed that parylene N was coated.

As shown in FIG. 8m, after parylene C was additionally coated on the first coating layer of 1-vinylimidazole, 3023 cm ^-1 (CH ₂ stretching), 2926 cm ^-1 (CH ₂ stretching), 2858 cm ^-1 (CH ₂ stretching), 1604 (aromatic CC stretching), 1557 cm ^-1 (aromatic CC stretching), 1449 cm ^-1 (CH bending), 1048 cm ^-1 (aromatic Ar-Cl bending), 877 cm ^{- 1} (neighboring chlorine and ethyl group CH bending) and 820 cm ^-1 (two adjacent aromatic CH bending), characteristic peaks attributed to parylene C were confirmed. Thus, it was confirmed that parylene C was coated.

(Based on Cu)

Example 2-1

A coating layer was deposited in the same manner as in Example 1-1, except that copper foil was used instead of the aluminum foil.

Examples 2-2 to 2-15 and Comparative Examples 2-1 to 2-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that copper foil was used instead of the aluminum foil.

Example 2-16: Coating of coil pattern

A coating layer was deposited in the same manner as in Example 1-1, except that a 500 mm×400 mm substrate on which a Cu coil pattern was formed was used instead of the aluminum foil.

It was confirmed that a conformal coating layer was formed on the surface of the Cu coil pattern.

Comparative Example 2-4: Coating of coil pattern

A coating layer was deposited in the same manner as in Example 2-16, except that the step of depositing the first coating layer containing 1-vinylimidazole was omitted and only the second coating layer containing parylene N was deposited.

Evaluation Example 2-1: XPS analysis of Cu substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 2-1 to 2-15 and Comparative Examples 2-1 to 2-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 2-1, after 1-vinylimidazole was coated on the Cu substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Cu substrate.

In Example 2-4, after (hydroxyethyl)methacrylate was coated on the Cu substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 2-2: Water (H ₂ O) Measurement of contact angle

In the manufacturing process of the coated substrates prepared in Examples 2-1 to 2-15 and Comparative Examples 2-1 to 2-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 3 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 2-1 91.5 Example 2-4 98.8 Comparative Example 2-1 87.4

As shown in Table 3, the contact angle increased by introducing the first coating layer on the Cu substrate. Therefore, it was confirmed that the first coating layer was introduced on the Cu substrate.

Evaluation Example 2-3: Adhesion Test (I)

Adhesion tests were performed on the coated substrates prepared in Examples 2-1 to 2-15 and Comparative Examples 2-1 to 2-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 4 below.

Adhesion evaluation Example 2-1 5B Example 2-3 5B Example 2-4 5B Example 2-5 5B Example 2-6 5B Example 2-8 5B Examples 2-9 5B Examples 2-10 5B Examples 2-11 5B Example 2-13 5B Example 2-14 5B Example 2-15 5B Comparative Example 2-1 2B Comparative Example 2-2 0B Comparative Example 2-3 0B

As shown in Table 4, the adhesive strength of the coating layer of Example was excellent as 5B, and the adhesive strength of the coating layers of Comparative Example 2-1 to Comparative Example 2-3 were all poor as 2B or less.

Therefore, it was confirmed that the adhesion between the Cu substrate and the second coating layer was remarkably improved by the introduction of the first coating layer.

Evaluation Example 2-4: Adhesion test (II)

An adhesion test was performed on the surfaces of the coil patterns prepared in Examples 2-16 and Comparative Example 2-4 in the same manner as in Evaluation Example 2-3.

It was confirmed that the coating layer of the coil pattern of Example 2-16 had improved adhesion compared to the coating layer of the coil pattern of Comparative Example 2-4.

Evaluation Example 2-5: ATR-FTIR analysis of Cu substrate with first coating layer and second coating layer introduced

In the process of manufacturing the substrates coated in Examples 2-1 to 2-15 and Comparative Examples 2-1 to 2-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the drawing, a first coating layer is formed in Example 2-1, a first coating layer is formed in Example 2-4, a second coating layer is formed in Example 2-1, and Example 2-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(Fe base)

Example 3-1

A coating layer was deposited in the same manner as in Example 1-1, except that an iron sheet was used instead of the aluminum foil.

Examples 3-2 to 3-15 and Comparative Examples 3-1 to 3-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that an iron sheet was used instead of the aluminum foil.

Evaluation Example 3-1: XPS analysis of Fe substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 3-1 to 3-15 and Comparative Examples 3-1 to 3-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 3-1, after 1-vinylimidazole was coated on the Fe substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Fe substrate.

In Example 3-4, after (hydroxyethyl)methacrylate was coated on the Fe substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 3-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 3-1 to 3-15 and Comparative Examples 3-1 to 3-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 5 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 3-1 83.0 Example 3-4 62.9 Comparative Example 3-1 77.3

As shown in Table 5, the contact angle was changed by introducing the first coating layer on the Fe substrate. Therefore, it was confirmed that the first coating layer was introduced on the Fe substrate.

Evaluation Example 3-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 3-1 to 3-15 and Comparative Examples 3-1 to 3-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 6 below.

Adhesion evaluation Example 3-1 5B Example 3-3 5B Example 3-4 5B Example 3-5 5B Example 3-6 5B Example 3-8 5B Example 3-9 5B Example 3-10 5B Example 3-11 5B Example 3-13 5B Example 3-14 5B Example 3-15 5B Comparative Example 3-1 2B Comparative Example 3-2 0B Comparative Example 3-3 0B

As shown in Table 6, the adhesive strength of the coating layer of Example was excellent as 5B, and the adhesive strength of the coating layers of Comparative Example 3-1 to Comparative Example 3-3 were all poor as 2B or less.

Therefore, it was confirmed that the adhesion between the Fe substrate and the second coating layer was remarkably improved by the introduction of the first coating layer.

Evaluation Example 3-4: ATR-FTIR analysis of Fe substrate with first coating layer and second coating layer introduced

In the manufacturing process of the substrates coated in Examples 3-1 to 3-15 and Comparative Examples 3-1 to 3-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the drawings, a first coating layer is formed in Example 3-1, a first coating layer is formed in Example 3-4, a second coating layer is formed in Example 3-1, and Example 3-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(Ti base)

Example 4-1

A coating layer was deposited in the same manner as in Example 1-1, except that a titanium sheet was used instead of the aluminum foil.

Examples 4-2 to 4-15 and Comparative Examples 4-1 to 4-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that a titanium sheet was used instead of the aluminum foil.

Evaluation Example 4-1: XPS analysis of Ti substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 4-1 to 4-15 and Comparative Examples 4-1 to 4-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 4-1, after 1-vinylimidazole was coated on the Ti substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Ti substrate.

In Example 4-4, after (hydroxyethyl)methacrylate was coated on the Ti substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 4-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 4-1 to 4-15 and Comparative Examples 4-1 to 4-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 7 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 4-1 64.7 Example 4-4 53.5 Comparative Example 4-1 40.8

As shown in Table 7, the contact angle increased by introducing the first coating layer on the Ti substrate. Therefore, it was confirmed that the first coating layer was introduced on the Ti substrate.

Evaluation Example 4-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 4-1 to 4-15 and Comparative Examples 4-1 to 4-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 8 below.

Adhesion evaluation Example 4-1 5B Example 4-3 5B Example 4-5 1B Examples 4-6 5B Examples 4-8 5B Example 4-10 2B Examples 4-11 5B Example 4-13 5B Example 4-14 2B Examples 4-15 3B Comparative Example 4-1 0B Comparative Example 4-2 0B Comparative Example 4-3 0B

As shown in Table 8, the adhesion of the coating layers of Examples 4-1, 4-3, 4-11, 4-13, 4-16, and 4-18 in which 1-vinylimidazole was used was excellent as 5B. did

In Examples 4-5, 4-10, 4-14, and 4-15 in which (hydroxy)methacrylate was used, overall adhesive strength was improved compared to Comparative Examples 4-1 to 4-3, but 1-vinyl imide Compared to the sol, the adhesive strength was poor.

Therefore, it was confirmed that the adhesion between the Ti substrate and the second coating layer was improved by the introduction of the first coating layer.

Evaluation Example 4-4: ATR-FTIR analysis of Ti substrate to which the first coating layer and the second coating layer were introduced

In the manufacturing process of the substrates coated in Examples 4-1 to 4-15 and Comparative Examples 4-1 to 4-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the figure, a first coating layer is formed in Example 4-1, a first coating layer is formed in Example 4-4, a second coating layer is formed in Example 4-1, and Example 4-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(Pb base)

Example 5-1

A coating layer was deposited in the same manner as in Example 1-1, except that a lead sheet was used instead of the aluminum foil.

Examples 5-2 to 5-15 and Comparative Examples 5-1 to 5-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that a lead sheet was used instead of the aluminum foil.

Evaluation Example 5-1: XPS analysis of Pb substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 5-1 to 5-15 and Comparative Examples 5-1 to 5-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 5-1, after 1-vinylimidazole was coated on the Pb substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Pb substrate. The peak for the nitrogen atom was small.

In Example 5-4, after (hydroxyethyl)methacrylate was coated on the Pb substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 5-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 5-1 to 5-15 and Comparative Examples 5-1 to 5-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 9 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 5-1 86.8 Example 5-4 51.2 Comparative Example 5-1 42.6

As shown in Table 9, the contact angle increased by introducing the first coating layer on the Pb substrate. Therefore, it was confirmed that the first coating layer was introduced on the Pb substrate.

In Example 5-1 coated with 1-vinylimidazole, the contact angle increased remarkably.

Evaluation Example 5-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 5-1 to 5-15 and Comparative Examples 5-1 to 5-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 10 below.

Adhesion evaluation Example 5-1 5B Example 5-3 5B Example 5-4 5B Example 5-5 5B Example 5-6 5B Example 5-8 5B Example 5-9 5B Examples 5-10 5B Example 5-11 5B Example 5-13 5B Example 5-14 5B Example 5-15 5B Comparative Example 5-1 2B Comparative Example 5-2 5B

As shown in Table 10, the adhesion of the coating layers of Examples 5-1, 5-4, 5-6, 5-9, 5-11, and 5-14 using parylene N was comparable to that of Comparative Example 5-1. The adhesion of the coating layer was improved.

The adhesion of the coating layer of Examples 5-3, 5-5, 5-8, 5-10, 5-13, and 5-15 using Parylene C and the adhesion of the coating layer of Comparative Example 5-2 were all excellent as 5B. did

Therefore, it was confirmed that the adhesion between the Pb substrate and the second coating layer was improved to an equal or higher level by the introduction of the first coating layer.

Evaluation Example 5-4: ATR-FTIR analysis of a Pb substrate to which the first coating layer and the second coating layer were introduced

In the process of manufacturing the substrates coated in Examples 5-1 to 5-15 and Comparative Examples 5-1 to 5-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the figure, a first coating layer is formed in Example 5-1, a first coating layer is formed in Example 5-4, a second coating layer is formed in Example 5-1, and Example 5-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(SUS material)

Example 6-1

A coating layer was deposited in the same manner as in Example 1-1, except that a stainless steel substrate (SUS 304 sheet) was used instead of the aluminum foil.

Examples 6-2 to 6-15 and Comparative Examples 6-1 to 6-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that a stainless steel substrate (SUS 304 sheet) was used instead of the aluminum foil.

Evaluation Example 6-1: XPS analysis of SUS substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 6-1 to 6-15 and Comparative Examples 6-1 to 6-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 6-1, after 1-vinylimidazole was coated on the SUS substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for an oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the SUS substrate.

In Example 6-4, after (hydroxyethyl)methacrylate was coated on the SUS substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 6-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 6-1 to 6-15 and Comparative Examples 6-1 to 6-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 11 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 6-1 75.6 Example 6-4 54.6 Comparative Example 6-1 85.0

As shown in Table 11, the contact angle decreased by introducing the first coating layer onto the SUS substrate. Therefore, it was confirmed that the first coating layer was introduced on the SUS substrate.

Evaluation Example 6-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 6-1 to 6-15 and Comparative Examples 6-1 to 6-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 12 below.

Adhesion evaluation Example 6-1 3B Example 6-3 3B Example 6-4 2B Example 6-6 5B Examples 6-8 5B Examples 6-9 2B Examples 6-10 2B Examples 6-11 5B Examples 6-13 5B Examples 6-14 3B Examples 6-15 4B Comparative Example 6-1 0B Comparative Example 6-2 0B Comparative Example 6-3 0B

As shown in Table 12, the adhesive strength of the coating layers of Examples 6-1, 6-3, 6-6, 6-8, 6-11, and 6-13 using 1-vinylimidazole was the coating layer of the comparative example. Compared to the adhesion of the improved.

The adhesive strength of the coating layers of Examples 6-4, 6-9, 6-10, 6-14, and 6-15 using (2-hydroxyethyl) methacrylate was improved compared to that of the coating layers of Comparative Examples, but 1 - It was sluggish compared to the coating layer containing vinylimidazole.

Therefore, it was confirmed that the adhesion between the SUS substrate and the second coating layer was improved by the introduction of the first coating layer.

Evaluation Example 6-4: ATR-FTIR analysis of SUS substrate to which the first coating layer and the second coating layer were introduced

In the manufacturing process of the substrates coated in Examples 6-1 to 6-15 and Comparative Examples 6-1 to 6-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the figure, a first coating layer is formed in Example 6-1, a first coating layer is formed in Example 6-4, a second coating layer is formed in Example 6-1, and Example 6-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(glass substrate)

Example 7-1

A coating layer was deposited in the same manner as in Example 1-1, except that a glass sheet was used instead of the aluminum foil.

Examples 7-2 to 7-15 and Comparative Examples 7-1 to 7-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that a glass sheet was used instead of the aluminum foil.

Evaluation Example 7-1: XPS analysis of the glass substrate to which the first coating layer was introduced

In the process of manufacturing the substrates coated in Examples 7-1 to 7-15 and Comparative Examples 7-1 to 7-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 7-1, after 1-vinylimidazole was coated on the glass substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the glass substrate.

In Example 7-4, after (hydroxyethyl)methacrylate was coated on the glass substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated. Peaks for carbon atoms were significantly reduced compared to those for oxygen atoms.

Evaluation Example 7-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 7-1 to 7-15 and Comparative Examples 7-1 to 7-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 13 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 7-1 38.7 Example 7-4 56.5 Comparative Example 7-1 24.7

As shown in Table 13, the contact angle increased by introducing the first coating layer onto the glass substrate. Therefore, it was confirmed that the first coating layer was introduced on the glass substrate.

Evaluation Example 7-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 7-1 to 7-15 and Comparative Examples 7-1 to 7-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 14 below.

Adhesion evaluation Example 7-1 3B Example 7-3 5B Example 7-4 5B Example 7-5 5B Example 7-6 5B Examples 7-8 5B Examples 7-9 5B Examples 7-10 5B Examples 7-11 5B Examples 7-13 5B Examples 7-14 5B Examples 7-15 5B Comparative Example 7-1 0B Comparative Example 7-2 0B Comparative Example 7-3 0B

As shown in Table 14, the adhesive strength of the coating layers of Examples was excellent as 3B or more, and the adhesive strength of the coating layers of Comparative Examples 2-1 and 2-2 was 0B or less, which was poor.

Therefore, it was confirmed that the adhesion between the glass substrate and the second coating layer was remarkably improved by the introduction of the first coating layer.

Evaluation Example 7-4: ATR-FTIR analysis of the glass substrate to which the first coating layer and the second coating layer were introduced

In the manufacturing process of the substrates coated in Examples 7-1 to 7-15 and Comparative Examples 7-1 to 7-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the drawing, a first coating layer is formed in Example 7-1, a first coating layer is formed in Example 7-4, a second coating layer is formed in Example 7-1, and Example 7-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(Ni base)

Example 8-1

A coating layer was deposited in the same manner as in Example 1-1, except that nickel foil was used instead of the aluminum foil.

Examples 8-2 to 8-15 and Comparative Examples 8-1 to 8-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that nickel foil was used instead of the aluminum foil.

Evaluation Example 8-1: XPS analysis of Ni substrate with first coating layer introduced

In the manufacturing process of the substrates coated in Examples 8-1 to 8-15 and Comparative Examples 8-1 to 8-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 8-1, after 1-vinylimidazole was coated on the Ni substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Ni substrate. Peaks for nitrogen atoms were insignificant.

In Example 8-4, after (hydroxyethyl)methacrylate was coated on the Ni substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 8-2: Water (H ₂ O) Measurement of contact angle

In the manufacturing process of the coated substrates prepared in Examples 8-1 to 8-15 and Comparative Examples 8-1 to 8-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 15 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 8-1 66.9 Example 8-4 55.4 Comparative Example 8-1 87.1

As shown in Table 15, the contact angle decreased by introducing the first coating layer on the Ni substrate. Therefore, it was confirmed that the first coating layer was introduced on the Ni substrate.

Evaluation Example 8-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 8-1 to 8-15 and Comparative Examples 8-1 to 8-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 16 below.

Adhesion evaluation Example 8-1 5B Example 8-3 5B Example 8-5 1B Example 8-6 5B Example 8-8 5B Examples 8-9 4B Examples 8-10 2B Examples 8-11 5B Examples 8-13 5B Examples 8-14 5B Examples 8-15 2B Comparative Example 8-1 0B Comparative Example 8-2 0B Comparative Example 8-3 0B

As shown in Table 16, the adhesion of the coating layers of Examples 8-1, 8-3, 8-6, 8-8, 8-11, and 8-13 using 1-vinylimidazole was excellent as 5B. did The adhesive strength of the coating layer of Comparative Example was poor as 0B.

The adhesive strength of the coating layers of Examples 8-5, 8-9, 8-10, 8-14, and 8-15 using (2-hydroxyethyl) methacrylate was improved compared to that of the coating layers of Comparative Examples, but 1 - It was sluggish compared to the coating layer containing vinylimidazole.

Therefore, it was confirmed that the adhesion between the Ni substrate and the second coating layer was improved by the introduction of the first coating layer.

Evaluation Example 8-4: ATR-FTIR analysis of Ni substrate with first coating layer and second coating layer introduced

In the process of manufacturing the substrates coated in Examples 8-1 to 8-15 and Comparative Examples 8-1 to 8-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the figure, a first coating layer is formed in Example 8-1, a first coating layer is formed in Example 8-4, a second coating layer is formed in Example 8-1, and Example 8-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(Zn base)

Example 9-1

A coating layer was deposited in the same manner as in Example 1-1, except that zinc foil was used instead of the aluminum foil.

Examples 9-2 to 9-15 and Comparative Examples 9-1 to 9-3

A coating layer was deposited in the same manner as in Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-3, except that zinc foil was used instead of the aluminum foil.

Evaluation Example 9-1: XPS analysis of Zn substrate with first coating layer introduced

In the process of manufacturing the substrates coated in Examples 9-1 to 9-15 and Comparative Examples 9-1 to 9-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 9-1, after 1-vinylimidazole was coated on the Zn substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the Zn substrate. In Example 9-4, after (hydroxyethyl)methacrylate was coated on the Zn substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 9-2: Water (H ₂ O) Measurement of contact angle

In the process of manufacturing the coated substrates prepared in Examples 9-1 to 9-15 and Comparative Examples 9-1 to 9-3, a contact angle measuring instrument was used for the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure. The contact angle for water was measured.

Some of the measurement results are shown in Table 17 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 9-1 73.6 Example 9-4 51.7 Comparative Example 9-1 76.5

As shown in Table 17, the contact angle decreased by introducing the first coating layer on the Zn substrate. Therefore, it was confirmed that the first coating layer was introduced on the Zn substrate.

Evaluation Example 9-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 9-1 to 9-15 and Comparative Examples 9-1 to 9-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 18 below.

Adhesion evaluation Example 9-1 5B Example 9-3 5B Example 9-5 1B Example 9-6 5B Examples 9-8 5B Example 9-9 3B Examples 9-10 5B Examples 9-11 5B Examples 9-13 5B Examples 9-14 4B Examples 9-15 5B Comparative Example 9-1 0B Comparative Example 9-2 0B Comparative Example 9-3 0B

As shown in Table 18, the adhesion of the coating layers of Examples 9-1, 9-3, 9-6, 9-8, 9-11, and 9-13 using 1-vinylimidazole was excellent as 5B. did The adhesive strength of the coating layer of Comparative Example was poor as 0B.

The adhesive strength of the coating layers of Examples 9-5, 9-9, 9-10, 9-14, and 9-15 using (2-hydroxyethyl) methacrylate was improved compared to that of the coating layers of Comparative Examples, but 1 - It was sluggish compared to the coating layer containing vinylimidazole.

Therefore, it was confirmed that the adhesion between the Zn substrate and the second coating layer was improved by the introduction of the first coating layer.

Evaluation Example 9-4: ATR-FTIR analysis of a Zn substrate introduced with a first coating layer and a second coating layer

In the process of manufacturing the substrates coated in Examples 9-1 to 9-15 and Comparative Examples 9-1 to 9-3, ATR on the surface of the substrate after the introduction of the first coating layer and the surface of the substrate after the introduction of the second coating layer -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the drawings, a first coating layer is formed in Example 9-1, a first coating layer is formed in Example 9-4, a second coating layer is formed in Example 9-1, and Example 9-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

(alloy substrate)

Example 10-1

A coating layer was deposited in the same manner as in Example 1-1, except that a cobalt-chromium-tungsten-nickel-magnesium alloy (Co-Cr-W-Ni-Mg alloy) used as a substrate for stents was used instead of aluminum foil. did

Examples 10-2 to 10-15 and Comparative Examples 10-1 to 10-3

Examples 1-2 to 1-15 and Comparative Examples 1-1 to 1-, except that the cobalt-chrome-tungsten-nickel-magnesium alloy (Co-Cr-W-Ni-Mg alloy) was used instead of the aluminum foil. A coating layer was deposited in the same manner as in 3.

Evaluation Example 10-1: XPS Analysis of Alloy Substrate Incorporating the First Coating Layer

In the process of manufacturing the substrates coated in Examples 10-1 to 10-15 and Comparative Examples 10-1 to 10-3, XPS (X-ray Photoelectron Spectroscopy) analysis was performed on the surface of the substrate after the first coating layer was introduced. It was confirmed whether or not the first coating layer was introduced.

In Example 10-1, after 1-vinylimidazole was coated on the alloy substrate, peaks for oxygen atoms, nitrogen atoms, and carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that 1-vinylimidazole was coated. The peak for the oxygen atom was determined to be due to a hydrophilic functional group such as a hydroxyl group present on the alloy substrate. The peaks for nitrogen atoms were small.

In Example 10-4, after (hydroxyethyl)methacrylate was coated on the alloy substrate, peaks for oxygen atoms and peaks for carbon atoms were confirmed on the surface of the substrate. Therefore, it was confirmed that (hydroxyethyl) methacrylate was coated.

Evaluation Example 10-2: Water (H ₂ O) Measurement of contact angle

In the manufacturing process of the coated substrates prepared in Examples 10-1 to 10-15 and Comparative Examples 10-1 to 10-3, the surface of the substrate after the first coating layer was formed at 25° C. of atmospheric pressure using a contact angle measuring instrument. The contact angle for water was measured.

Some of the measurement results are shown in Table 19 below. The contact angle is the angle between the interface between water and the substrate and the interface between water and air.

contact angle [°] Example 10-1 70.3 Example 10-4 68.8 Comparative Example 10-1 86.4

As shown in Table 19, the contact angle decreased as the first coating layer was introduced onto the alloy substrate. Therefore, it was confirmed that the first coating layer was introduced on the alloy substrate.

Evaluation Example 10-3: Adhesion test

Adhesion tests were performed on the coated substrates prepared in Examples 10-1 to 10-15 and Comparative Examples 10-1 to 10-3. The adhesion test was evaluated by a Scotch Tape Test based on ASTM D3002 and D3359.

The coating layer was cut into 11 straight lines in the horizontal and vertical directions at intervals of 1 mm to form a grid, and then Scotch tape was attached and peeled off on the grid-shaped coating layer to evaluate the area of the coating layer removed. .

The evaluation criteria are as follows.

5B: 0% of the removed area, 4B: less than 5% of the removed area, 3B: 5-15% of the removed area, 2B: 15-35% of the removed area, 1B: 35-65% of the removed area, 0B: removal 65% or more of the area covered

5B to 3B are excellent, and 2B to 0B are poor.

Some of the measurement results are shown in Table 20 below.

Adhesion evaluation Example 10-1 5B Example 10-3 5B Example 10-4 4B Example 10-5 2B Example 10-6 5B Example 10-8 5B Example 10-9 5B Examples 10-10 2B Examples 10-11 5B Examples 10-13 5B Examples 10-14 5B Examples 10-15 5B Comparative Example 10-1 0B Comparative Example 10-2 0B Comparative Example 10-3 0B

As shown in Table 20, the adhesion of the coating layers of Examples 10-1, 10-3, 10-6, 10-8, 10-11, and 10-13 using 1-vinylimidazole was excellent as 5B. did The adhesive strength of the coating layer of Comparative Example was poor as 0B.

The adhesive strength of the coating layers of Examples 10-5, 10-9, 10-10, 10-14, and 10-15 using (2-hydroxyethyl) methacrylate was improved compared to the adhesive strength of the coating layers of Comparative Examples, but 1 - It was sluggish compared to the coating layer containing vinylimidazole.

Therefore, it was confirmed that the adhesion between the alloy substrate and the second coating layer was improved by the introduction of the first coating layer.

Evaluation Example 10-4: ATR-FTIR analysis of the alloy substrate to which the first coating layer and the second coating layer were introduced

In the process of manufacturing the substrates coated in Examples 10-1 to 10-15 and Comparative Examples 10-1 to 10-3, the substrate surface after the introduction of the first coating layer and the surface of the substrate after introduction of the second coating layer were ATR -FTIR (Attenuated Total Reflection Fourier Transform Infrared) spectroscopy was performed to confirm whether the first coating layer and the second coating layer were formed.

Although not shown in the drawing, a first coating layer is formed in Example 10-1, a first coating layer is formed in Example 10-4, a second coating layer is formed in Example 10-1, and Example 10-3 It was confirmed from the ATR-FTIR spectrum that the second coating layer was formed in

Claims (11)

providing a support member having a coil pattern disposed on one surface thereof;
A first coating layer comprising a self-assembled layer of at least one of a non-fluorine-based acrylic compound, an aromatic heterocyclic compound including an unsaturated functional group, and an aromatic cyclic compound including an unsaturated functional group and a polar functional group on the surface of the coil pattern. arranging;
disposing a second coating layer including a parylene-based polymer grafted to an unsaturated functional group included in the first coating layer by supplying a parylene-based radical derived from a parylene-based precursor onto the first coating layer;
disposing a magnetic layer on top and bottom of the support member; and
Disposing an electrode electrically connected to the coil pattern on the magnetic layer;
In the step of disposing the second coating layer, no catalyst or initiator other than the parylene-based precursor is used,
The device manufacturing method, wherein the first coating layer and the second coating layer are conformal coating layers. The method of claim 1, wherein the terminal substituent connected to the oxygen atom of the non-fluorine-based acrylic compound contains 5 or less carbon atoms,
The aromatic heterocyclic compound containing the unsaturated functional group and the aromatic ring compound containing the unsaturated functional group and the polar functional group are 5 membered rings or 6 membered rings,
The aromatic heterocyclic compound includes at least one heteroatom selected from nitrogen, oxygen, and sulfur,
1 to 4 heteroatoms included in the aromatic heterocyclic compound,
The aromatic ring compound is free of heteroatoms,
At least one unsaturated functional group of the aromatic heterocyclic compound and the aromatic ring compound is a functional group containing a double bond or a triple bond,
The device manufacturing method, wherein the polar functional group is a functional group containing an oxygen or sulfur atom. The method of claim 1, wherein the aromatic heterocyclic compound containing an unsaturated functional group is a compound represented by Formulas 1 to 9 below,
A device manufacturing method in which the aromatic ring compound including the unsaturated functional group and the polar functional group is a compound represented by Formulas 10 to 11 below:
<Formula 1><Formula2><Formula3>

<Formula 4><Formula5><Formula7>

<Formula 7><Formula8><Formula9>

<Formula 10><Formula11>

In the above expressions,
R ₁ to R ₁₄ are each independently selected from hydrogen, an alkyl group having 1 to 5 carbon atoms, a vinyl group, an allyl group, or a propargyl group;
At least one of R ₁ to R ₄ is a vinyl group, an allyl group, or a propalyl group;
At least one of R ₆ , R ₇ and R ₉ is a vinyl group, an allyl group, or a propalyl group;
At least one of R ₁₀ to R ₁₄ is a vinyl group, an allyl group, or a propalyl group.
R ₁₅ to R ₂₆ are each independently selected from hydrogen, an alkyl group having 1 to 5 carbon atoms, a hydroxy group, a thiol group, a vinyl group, an allyl group, or a propargyl group;
At least one of R ₁₅ to R ₂₀ is a vinyl group, an allyl group, or a propalgyl group, and at least the other is a hydroxyl group or a thiol group;
At least one of R ₂₁ to R ₂₆ is a vinyl group, an allyl group, or a propalyl group, and at least the other is a hydroxy group or a thiol group. The device manufacturing method according to claim 1, wherein the fluorine-free acrylic compound is a compound represented by Formula 20 below:
<Formula 20>

In the above formula,
R ₂₇ is hydrogen, a methyl group, an ethyl group, a propyl group, a butyl group, a hydroxymethyl group, or a 2-hydroxyethyl group;
R ₂₈ is hydrogen or a methyl group. delete The method of claim 1, wherein the parylene-based precursor comprises at least one selected from dimers represented by the following Chemical Formulas 12 to 19:
<Formula 12><Formula13><Formula14><Formula15>

<Formula 16><Formula17><Formula18><Formula19>

. The method of claim 1, wherein the parylene-based polymer is Parylene N, Parylene C, Parylene D, Parylene AF-4, Parylene HT, Parylene VT-4, Parylene CF, Parylene A, Parylene AM , Parylene H, Parylene SR, Parylene HR, and a device manufacturing method comprising at least one selected from Parylene NR. According to claim 1,
The vaporization temperature of at least one of the non-fluorine-based acrylic compound, an aromatic heterocyclic compound containing an unsaturated functional group, and an aromatic cyclic compound containing an unsaturated functional group and a polar functional group is 25 to 150 ° C,
The device manufacturing method, wherein the vaporization temperature of the parylene-based precursor is 100 to 200 ° C, and the thermal decomposition temperature of the parylene-based precursor is 500 to 750 ° C. The method of claim 1 , wherein the first coating layer has a thickness of 0.1 nm to 100 nm or less, and the second coating layer has a thickness of 100 nm to 500 μm. The method of claim 1, wherein the coil pattern includes at least one of a seed layer and a plating layer,
The seed layer is any one selected from the group consisting of titanium (Ti), titanium-tungsten (Ti-W), molybdenum (Mo), chromium (Cr), nickel (Ni), and nickel (Ni)-chromium (Cr). Including one or an alloy comprising one or more metals selected from the group,
The plating layer is any one selected from the group consisting of copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), and lead (Pd), or the group A device manufacturing method comprising an alloy comprising one or more metals selected from. A support member having a coil pattern disposed on one side or both sides;
a first coating layer disposed on a surface of the coil pattern;
a second coating layer disposed on the first coating layer;
a magnetic layer that surrounds both surfaces of the second coating layer and the support member and includes a magnetic material; and
An electrode disposed on the magnetic layer and electrically connected to the coil pattern;
The first coating layer is one or more self-assembled layers selected from non-fluorine-based acrylic compounds and derivatives thereof, aromatic heterocyclic compounds and derivatives thereof containing unsaturated functional groups, aromatic cyclic compounds containing unsaturated functional groups and polar functional groups, and derivatives thereof. layer),
The second coating layer includes a parylene-based polymer grafted to an unsaturated functional group included in the first coating layer,
The device, wherein the first coating layer and the second coating layer are conformal coating layers.

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