KR102506657B1 - Electron emission source and x-ray apparatus having the same - Google Patents

Abstract

An electron emission source of an X-ray apparatus disclosed in the present invention includes a source unit for emitting electrons in both directions and a pair of gate members facing each other with the source unit interposed therebetween, and a gate for extracting electrons emitted from the source unit in both directions. and an electron emission source including a gate portion including a negative electrode, and an anode portion generating X-rays by collision with electrons emitted from the electron emission source. According to this configuration, the output of emitted electrons can be improved, and highly efficient electron emission is possible.

Description

Electron emission source and X-ray device including the same {ELECTRON EMISSION SOURCE AND X-RAY APPARATUS HAVING THE SAME}

The present invention relates to an electron emission source and an X-ray device including the same, and more particularly, to an electron emission source capable of generating a high level of current output by emitting electrons in both directions from one electron emission source, and to an X-ray device including the same will be.

X-rays include an X-ray tube, which is a vacuum tube, to emit X-rays. The cathode of this X-ray tube is formed of a tungsten filament, and is heated by an electric current to emit thermal electrons. In contrast, when a high voltage of tens of thousands of volts or more is applied to the anode of the X-ray tube, the electron current emitted from the cathode moves toward the anode at high speed. At this time, when the electron flow collides with the counter electrode made of tungsten or molybdenum, the energy it has is released as X-rays.

Meanwhile, an electron emission source for generating X-rays is generally a chemical vapor deposition (CVD) method. Chemical vapor deposition grows carbon nanotubes (CNT), a nanomaterial, as a field emitter of X-rays on various types of substrates, from metals to non-metals. Here, the carbon nanotube is a carbon allotrope made of carbon, and one carbon atom is bonded to another carbon atom in a hexagonal honeycomb pattern to form a tube shape, which is applied in various electric and electronic fields. Due to low conductivity of a commonly used silicon (Si) substrate, CNTs are grown on a metal substrate containing iron (Fe), nickel (Ni) or carbon monoxide (CO ₁ ). At this time, the CNT grown on the metal substrate is applied to the emitter.

On the other hand, X-rays generated by a substrate on which CNTs are grown have somewhat low quality uniformity and stability. Accordingly, in recent years, various studies to improve the electron emission efficiency of an electron emission source for generating X-rays have been continuously conducted.

Korea Patent No. 10-0892366 Korean Patent Publication No. 2007-0102117

An object of the present invention is to provide an electron emission source with improved electron emission efficiency by emitting electrons generated from one source unit in both directions.

Another object of the present invention is to provide an X-ray apparatus including an electron emission source in which the above object is achieved.

An electron-emitting device according to the present invention for achieving the above object includes a source part for emitting electrons in both directions, and a pair of gate members facing each other with the source part interposed therebetween, and emitting electrons in both directions from the source part. and a gate unit for extracting electrons in one direction or in both directions.

In addition, the source unit has at least one shape of a honeycomb, a square, and a line shape, and is made of a metal material to emit electrons, and supports an edge of the electrode mesh, and a cathode to which an electrode is applied. It includes an electrode, and carbon nanotubes (CNTs) may be grown in all directions with respect to the electrode mesh.

In addition, a first gate member including a first gate mesh facing one surface of the source part and a first gate electrode supporting an edge of the first gate mesh and to which an electrode is applied, and a second facing the other surface of the source part It may include a gate mesh and a second gate member including a second gate electrode to which an electrode is applied while supporting an edge of the second gate mesh.

Further, the first and second gate members may have the same or different distances from the source part.

In addition, a distance between one surface of the source part and the first gate member may be shorter than a distance between the other surface of the source part and the second gate member.

In addition, any one of the first and second gate members may deflect the emission direction of the electrons emitted from one surface or the other surface of the source part so that the electrons emitted from one surface and the other surface of the source part are emitted in one direction. can

In addition, the first and second gate members may emit the electrons respectively emitted from one surface and the other surface of the source part in different directions.

In addition, a pair of ITO (Indium Tin Oxide) films facing the first and second gate members and coated with a phosphorescent conductive material are included, and the pair of ITO films cover the first and second gate members. The electrons that have passed through each can pass through.

An X-ray apparatus according to a preferred embodiment of the present invention includes a source unit for emitting electrons for generating X-rays in both directions, and a pair of gate members facing each other with the source unit interposed therebetween, so that the source unit is bi-directionally connected to the source unit. It includes an electron emission source including a gate part for extracting electrons emitted from the electron emission source in one or both directions, and an anode part generating X-rays by collision with the electrons emitted from the electron emission source.

In addition, the anode unit may be provided singly to face one side of the source unit, or may be provided as a pair to face both sides of the source unit, respectively.

An X-ray apparatus according to another preferred aspect of the present invention includes a source unit for emitting electrons for generating X-rays in both directions, and a pair of gate members facing each other with the source unit interposed therebetween, so that the source unit is bi-directionally connected to the source unit. It includes an electron emission source including a gate portion including a gate portion to extract electrons emitted from the electron emission source, and an anode portion to generate X-rays by collision with the electrons emitted from the electron emission source.

In addition, the anode unit may be provided singly to face one side of the source unit, or may be provided as a pair to face both sides of the source unit, respectively.

In addition, the source unit has at least one shape of a honeycomb, a square, and a line shape, and is made of a metal material to emit electrons, and supports an edge of the electrode mesh, and a cathode to which an electrode is applied. It includes an electrode, and carbon nanotubes (CNTs) may be grown in all directions with respect to the electrode mesh.

In addition, the gate unit includes a first gate mesh facing one surface of the source unit and a first gate member including a first gate electrode supporting an edge of the first gate mesh and to which an electrode is applied, and the other surface of the source unit. A second gate member including a second gate mesh facing and a second gate electrode supporting an edge of the second gate mesh and to which an electrode is applied, wherein the first and second gate members are turned on/off The electrons emitted in both directions from the source unit may be extracted in one direction or in both directions by (On/Off) control.

Further, the first and second gate members may have the same or different distances from the source part.

In addition, the anode unit faces the first gate member, and a distance between one surface of the source unit and the first gate member may be shorter than a distance between the other surface of the source unit and the second gate member.

In addition, any one of the first and second gate members may deflect the emission direction of the electrons emitted from one surface or the other surface of the source part so that the electrons emitted from one surface and the other surface of the source part are emitted in one direction. can

In addition, the first and second gate members may emit the electrons respectively emitted from one surface and the other surface of the source part in different directions.

In addition, a pair of ITO (Indium Tin Oxide) films facing the first and second gate members and coated with a phosphorescent conductive material are included, and the pair of ITO films cover the first and second gate members. The electrons that have passed through each can pass through.

According to the present invention having the configuration as described above, first, since electrons can be emitted and extracted in both directions with respect to the source part, the electron emission efficiency increased by more than two times can be obtained.

Second, since a single electron emission source can emit and extract electrons in both directions, various types of X-ray devices such as tomography X-ray imaging or dual displays can be provided. In particular, a synthesized X-ray image may be analyzed by taking tomographic X-ray images of the phantom from two different angles.

Third, it is possible to implement high output with a simple structure, thereby providing an economical and highly reliable X-ray device.

1 is a perspective view schematically illustrating an X-ray apparatus having an electron emission source according to an embodiment of the present invention.
FIG. 2 is diagrams schematically comparing electron directions according to various embodiments of electron emission sources of the X-ray apparatus shown in FIG. 1 .
FIG. 3 is a graph comparing anode current according to gate voltage of the X-ray apparatus shown in FIG. 1 .
FIG. 4 is a diagram schematically showing an X-ray apparatus having two anodes shown in FIG. 1 . and,
5 is a diagram schematically showing a modified example of the electron emission source shown in FIG. 1;

Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings. However, the spirit of the present invention is not limited to such embodiments, and the spirit of the present invention may be proposed differently by adding, changing, and deleting components constituting the embodiments, but this is also included in the spirit of the present invention. It will be.

1 schematically shows an x-ray apparatus 1 according to a preferred embodiment of the present invention.

As shown in FIG. 1 , an X-ray apparatus 1 according to an embodiment of the present invention includes an electron emission source 100 and an anode unit 200 .

For reference, although not shown in detail, the electron emission source 100 and the anode unit 200 of the X-ray apparatus 1 may be provided inside a hollow vacuum chamber (not shown). A window (not shown) capable of guiding the generated X-rays (see FIG. 4 ) to the outside may be provided in the vacuum chamber (not shown). Since the configuration of such a vacuum chamber (not shown) is not the gist of the present invention, detailed illustration and description thereof will be omitted.

The electron emission source 100 is provided to face an anode unit 200 to be described later, and emits electrons to generate predetermined light including X-rays. The electron emission source 100 may include an electron emission module or an electron gun. Meanwhile, the electron emission source 100 according to the present embodiment is exemplified as emitting electrons in a field emission method based on a carbon nanotube (CNT).

This electron emission source 100 includes a source part 110 and a gate part 120.

The source unit 110 emits electrons for generating X-rays in both directions. The source unit 110 includes an electrode mesh 111 and a cathode electrode 112 .

The electrode mesh 111 has a honeycomb shape and is made of a metal material to emit electrons (E). The electrode mesh 111 is a kind of emitter that emits electrons (E) and is provided as a thin plate-shaped surface light source. The electrode mesh 111 may be made of a metal or a carbon-based material such as metal alloy, stainless steel (SUS), molybdenum, and Kovar.

On the surface of the electrode mesh 111, carbon nanotubes (CNTs), which are nanomaterials, are grown by chemical vapor deposition (CVD) to emit electrons (E). For reference, the electrode mesh 111, which is a type of cathode substrate exemplified in the present invention, may have a thickness of approximately 0.1 mm.

On the other hand, since the electrode mesh 111 is provided in a honeycomb shape, carbon nanotubes (C) are not grown only on one side facing the anode unit 200 to be described later based on the existing stacking direction, and carbon nanotubes are grown in all directions. Growth of tube C is possible (see Fig. 2). Therefore, an area where electrons E are actually emitted from the electrode mesh 111 may be 90% or more of the entire area of the electrode mesh 111 . For reference, the electrode mesh 111 is not limited to a honeycomb shape, and may be changed to various shapes such as a square shape and a line shape that can increase an emission area of electrons E.

The cathode electrode 112 supports the edge of the electrode mesh 111, and the electrode is applied. In this embodiment, the electrode mesh 111 is provided in a disk shape having a honeycomb shape, and the cathode electrode 112 has a donut shape in which a cathode hole 113 passes through a central region. Here, the electrode mesh 111 is provided in the cathode hole 113 of the cathode electrode 112 . The cathode electrode 112 may also be changed to at least one of a rectangular shape and a line shape as well as a honeycomb shape.

On the other hand, the shape of the source unit 110 having a disk shape as described above is only an example, and is not a limitation.

The gate unit 120 includes a pair of gate members 130 and 140 facing each other with the source unit 110 interposed therebetween, so that electrons E emitted from the source unit 110 in both directions are transmitted in one direction or extract in both directions. In this embodiment, for convenience of explanation, it will be described that the gate unit 120 includes the first and second gate members 130 and 140 .

The first gate member 130 includes a first gate mesh 131 facing one surface of the source unit 110 and a first gate electrode 132 supporting an edge of the first gate mesh 131 and to which an electrode is applied. includes In addition, the second gate member 140 supports the second gate mesh 141 facing the other surface of the source unit 110 and the edge of the second gate mesh 141 and the second gate electrode to which the electrode is applied ( 142). These first and second gate members 130 and 140 are provided in a disk shape, and face one surface and the other surface of the electrode mesh 111, respectively.

For reference, the first and second gate meshes 141 are provided in a relatively thin plate shape and have a metal mesh shape. Only the edges of the first and second gate meshes 131 and 141 are supported by the first and second gate electrodes 141 and 142 to pass through the first and second gate meshes 131 and 141. It does not interfere with the emission of electrons (E) extracted by doing so. At this time, since the first and second gate meshes 131 and 141 are also provided in a hexagonal honeycomb shape, it is more advantageous that the electrons E are stably discharged without colliding with the metal mesh. In addition, the first and second gate meshes 131 and 141 may also be changed into at least one of a rectangular shape and a line shape rather than a honeycomb shape.

The first and second gate members 130 and 140 have different distances from the source part 110 . More specifically, the first gate member 130 is a first distance D1 spaced apart from one surface of the electrode mesh 111 of the source unit 110 is the second gate member 140 from the other surface of the electrode mesh 111 is shorter than the spaced second distance D2. That is, the first gate member 130 is disposed closer to the electrode mesh 111 than the second gate member 140 with the electrode mesh 111 therebetween.

For reference, in this embodiment, the first distance D1 between the source part 110 and the first gate member 130 is approximately 370 um, and the second distance between the source part 110 and the second gate member 140 (D2) is illustrated as being approximately twice as large as 740um than the first distance (D1). In addition, the anode unit 200 to be described later is exemplified as spaced apart from the electron emission source 100 by about 20 mm, but is not limited thereto.

Here, the first gate member 130 is spaced apart from the source unit 110 by a first distance D1 and faces the anode unit 200 to be described later, so that the second gate member 140 is connected to the source unit 110. ), the electrons E emitted from the electrode mesh 111 are deflected toward the first gate member 130 without being extracted. As a result, the electrons (E) emitted by the growth of the carbon nanotubes (C) in all directions of the electrode mesh 111 can be concentrated and extracted to the anode unit 200, so that the output can be improved.

On the other hand, as shown in FIG. 2, the first and second gate members 130 and 140 control the application of the electrodes by on/off, thereby generating electrons E emitted from the source unit 110. You can control the extraction direction. For example, as shown in (a) of FIG. 2, when the electrode is controlled to be applied to the first gate member 130 and the electrode is controlled not to be applied to the second gate member 140, the electrode mesh 111 grows. Electrons (E) emitted from the carbon nanotubes (C) are extracted through only the first gate mesh 131 . In addition, contrary to FIG. 2 (a), that is, as shown in FIG. 2 (b), electrode application to the first gate member 130 is turned off and electrodes are applied to the second gate member 140. When controlled, electrons E are extracted through the second gate member 140 .

In addition, as shown in (c) of FIG. 2, when the electrode is controlled to be applied to both the first and second gate members 130 and 140, from the carbon nanotubes (C) grown from the electrode mesh 111 The emitted electrons E pass through both the first and second gate members 130 and 140 and are extracted.

Here, in the case of FIG. 2 (a), among the carbon nanotubes (C) grown in all directions from the electrode mesh 111, the carbon nanotubes (C) facing the first gate member 130 to which the electrode is applied ) is activated. In addition, in the case of (b) of FIG. 2 , the number of activated carbon nanotubes (C) among the carbon nanotubes (C) facing the second gate member 140 is increased. In this case, among the carbon nanotubes (C), the activated carbon nanotubes (C) grown from one side or the other side of the electrode mesh 111 facing the first or second gate member 130, 140 to which the electrode is applied The carbon nanotubes (C) in the region except for emit electrons (E), but may be in a non-movable state.

On the other hand, as shown in (c) of FIG. 2, in a state in which electrodes are applied to both the first and second gate members 130 and 140, the activated carbon nanotubes (C) in all directions of the carbon nanotubes (C) ) is increased, high-output electron (E) emission is possible.

On the other hand, as shown in (a), (b) and (c) of FIG. 2, the distance between the electrode mesh 111 of the source unit 110 and the first and second gate meshes 131 and 141 ( As an electric field is induced in D1 and D2, electrons E can be uniformly extracted. At this time, as shown in FIG. 1, when the first and second gate members 130 and 140 are set so that the second interval D2 is longer than the first interval D1, the electrons E It is more advantageous to be deflected toward the first gate member 130 and extracted.

The electron emission source 100 as described above includes a spacer 150 for mutually stacking and supporting the source part 110 and the gate part 120 . The spacer 150 is ceramic to prevent electrical interference caused by contact between the cathode electrode 112 of the source part 110 and the first and second gate electrodes 132 and 142 of the gate part 120. It is good to be provided with an insulating material such as

As shown in FIG. 1 , one spacer 150 is interposed between the source part 110 and the first gate part 120, and two spacers 150 are interposed between the second gate member 140 and the source part 110. When the dog is interposed, the first and second distances D1 and D2 between the first and second gate members 130 and 140 with respect to the source unit 110 may be adjusted.

The anode unit 200 collides with the electrons E emitted from the electron emission source 100 to generate light such as X-rays (X). Light including X-rays (X) generated from the anode unit 200 may vary depending on the material of the anode unit 200 and the magnitude of the voltage applied to the X-ray device 1, specifically, X-rays, visible rays, and infrared rays. , can be any one of the ultraviolet rays.

The anode unit 200 is provided to face the electron emission source 100, and faces the first gate member 130, which is advantageous in extracting electrons E, at a position close to the source unit 110 as shown in FIG. can be arranged to do so. Meanwhile, the anode unit 200 includes a reflective surface on which electrons E collide, and since the configuration of the anode unit 200 is not the gist of the present invention, a detailed description thereof will be omitted.

An X-ray generation operation of the X-ray apparatus 1 having the above configuration will be summarized with reference to FIG. 1 as follows.

When a cathode is applied to the cathode electrode 112 of the source unit 110, carbon nanotubes (C) grow from the electrode mesh 111 provided in the cathode hole 113. At this time, since the electrode mesh 111 has a honeycomb shape, carbon nanotubes (C) are grown from the entire exposed area to emit electrons (E). here,

Electrons (E) emitted from the carbon nanotubes (C) are emitted from one side and the other side of the electrode mesh 111 . At this time, electrons E pass through the first gate member 130 provided between the anode unit 200 and one surface of the source unit 110 to output electrons E to the anode unit 200 . At this time, the second gate member 140 deflects the traveling direction of the electrons E toward the first gate member 130 without extracting the electrons E, thereby generating high electrons E without wasting the electrons E. output of can be expected.

Meanwhile, as shown in Table 1 below, leakage rates and effective current gains in the case of providing the electron emission sources 100 in four types were compared.

In Table 1, No. 1 to 4 have a maximum applied gate voltage of 1040V, 1040V, 840V and 840V, respectively. In this condition, the effective current gain is the first gate member 130, which is a front gate facing the anode unit 200, which is generally applied in a mode in which the first and second gate members 130 and 140 are simultaneously operated. ) is the difference in current between modes of operation. Current leakage can be determined through the effective current gain.

For reference, in Table 1, the first and second gate members 130 and 140 have the same material and transparency ratio. 1 has the lowest gate leakage and the highest effective current gain. Through this, it can be confirmed that the highest efficiency gate current output can be expected when the material and transparency of the first and second gate members 130 and 140 are the same.

In addition, referring to the graph in which gate voltage and anode current are mutually compared as shown in FIG. 3, the X-ray apparatus 1 according to the present invention having first and second gate members 130 and 140 at the same time has first and second gate members 130 and 140, respectively. Compared to the case where only one of the second gate members 130 and 140 is provided, it can be confirmed that the anode current according to the gate voltage is relatively high. That is, the output efficiency of the X-ray apparatus 1 having the first and second gate members 130 and 140 according to the present invention is excellent.

Meanwhile, in the embodiment of FIG. 1, the X-ray apparatus 1 is illustrated as including one anode unit 200, but is not necessarily limited thereto. For example, as shown in FIG. 4, a modified example in which the anode unit 200 includes two anodes 210 and 220 is also possible. That is, the anode unit 200 may include first and second anodes 210 and 220 . Here, the first anode 210 faces the source part 110 and the first gate member 130 therebetween, and the second anode 220 connects the source part 110 and the second gate member 140. face each other

As a result, electrons emitted from the carbon nanotubes (C) growing in the forward direction from the source unit 110 are extracted through the first and second gate members 130 and 140, respectively, and then face each other. It is reflected as X-rays (X) at the first and second anodes 210 and 220. At this time, the first and second anodes 210 and 220 reflect X-rays (X) toward the phantom P, so that the first and second anodes 210 and 220 simultaneously generate electrons toward the phantom P. (E) can be emitted and photographed with X-rays (X). Therefore, a tomographic X-ray (X) image can be obtained using electrons E generated from the electron emission source 100 having one source unit 110 .

Also, referring to FIG. 6, a modified example of the electron emission source 100 is schematically shown. In the modified example, the electron emission source 100 is provided so that the first and second gate members 130 and 140 are spaced apart from each other at the same interval with respect to the source unit 110, and the first and second gate members 130 140 may face an indium tin oxide (ITO) film 160 coated with a phosphorescent conductive material, respectively. Here, the pair of ITO films 160 are provided to allow electrons E extracted from the first and second gate members 130 and 140 to pass through. In this case, a dual display is possible with one electron emission source 100 .

As described above, although it has been described with reference to the preferred embodiments of the present invention, those skilled in the art will variously modify and change the present invention within the scope not departing from the spirit and scope of the present invention described in the claims below. You will understand that it can be done.

1: X-ray device 100: electron emission source
110: source unit 111: electrode mesh
112: cathode electrode 113: cathode hole
120: gate part 130: first gate member
131: first gate mesh 132: first gate electrode
140: second gate member 141: second gate mesh
142: second gate electrode 150: spacer
160: ITO 200: anode part
210: first anode 220: second anode
E: electronic X: x-ray
C: carbon nanotube

Claims (19)

a source unit that emits electrons in both directions; and
a gate unit for extracting electrons emitted in both directions from the source unit in one direction or both directions, including a pair of gate members facing each other with the source unit interposed therebetween;
Including,
the gate part,
a first gate member including a first gate mesh facing one surface of the source part and a first gate electrode supporting an edge of the first gate mesh and to which an electrode is applied; and
A second gate member including a second gate mesh facing the other surface of the source part and a second gate electrode supporting an edge of the second gate mesh and to which an electrode is applied;
Electron emission source comprising a. According to claim 1,
the source part,
an electrode mesh having at least one of a honeycomb shape, a square shape, and a line shape, and made of a metal material to emit electrons; and
a cathode electrode supporting an edge of the electrode mesh and to which an electrode is applied;
Including,
An electron emission source in which carbon nanotubes (CNTs) are grown in all directions with respect to the electrode mesh. delete According to claim 1,
wherein the first and second gate members have equal or different distances from the source part. According to claim 1,
A distance between one surface of the source part and the first gate member is shorter than a distance between the other surface of the source part and the second gate member. According to claim 1,
Any one of the first and second gate members deflects the emission direction of the electrons emitted from one side or the other side of the source portion so that the electrons emitted from one side and the other side of the source portion are emitted in one direction. sauce. According to claim 1,
wherein the first and second gate members emit the electrons respectively emitted from one surface and the other surface of the source part in different directions. According to claim 1,
It includes a pair of ITO (Indium Tin Oxide) films facing the first and second gate members and coated with a phosphorescent conductive material,
The electron emission source through which the electrons passing through the first and second gate members respectively pass through the pair of ITO films. an electron emission source according to any one of claims 1, 2, and 4 to 8; and
an anode unit generating X-rays by collision with the electrons emitted from the electron emission source;
X-ray device comprising a. According to claim 9,
The anode unit is provided singly to face one side of the source unit, or is provided as a pair to face both sides of the source unit, respectively. A gate including one source part for emitting electrons for generating X-rays in both directions, and a gate part for extracting electrons emitted in both directions from the source part, including a pair of gate members facing each other with the source part interposed therebetween an electron emission source comprising a negative; and
an anode unit generating X-rays by collision with the electrons emitted from the electron emission source;
Including,
the source part,
an electrode mesh having at least one of a honeycomb shape, a square shape, and a line shape, and made of a metal material to emit electrons; and
a cathode electrode supporting an edge of the electrode mesh and to which an electrode is applied;
Including,
An X-ray device in which carbon nanotubes (CNTs) are grown in all directions with respect to the electrode mesh. According to claim 11,
The anode unit is provided singly to face one side of the source unit, or is provided as a pair to face both sides of the source unit, respectively. delete According to claim 11,
the gate part,
a first gate member including a first gate mesh facing one surface of the source part and a first gate electrode supporting an edge of the first gate mesh and to which an electrode is applied; and
A second gate member including a second gate mesh facing the other surface of the source part and a second gate electrode supporting an edge of the second gate mesh and to which an electrode is applied;
Including,
The first and second gate members extract the electrons emitted in both directions from the source part in one direction or in both directions by an on / off control. According to claim 14,
Wherein the first and second gate members have equal or different distances from the source unit. According to claim 14,
The anode portion faces the first gate member,
A distance between one surface of the source part and the first gate member is shorter than a distance between the other surface of the source part and the second gate member. According to claim 14,
Any one of the first and second gate members is an X-ray device that deflects the emission direction of the electrons emitted from one side or the other side of the source portion so as to emit the electrons respectively emitted from one side and the other side of the source portion in one direction. . According to claim 14,
The first and second gate members emit the electrons emitted from one surface and the other surface of the source part in different directions. According to claim 14,
It includes a pair of ITO (Indium Tin Oxide) films facing the first and second gate members and coated with a phosphorescent conductive material,
The pair of ITO films passes the electrons passing through the first and second gate members, respectively.

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