KR102498114B1 - Cutting device, and method of manufacturing cut product - Google Patents

Abstract

A conveyance module capable of reliably conveying a plurality of cut products, a cutting device, and a method for manufacturing cut products are provided.
A movable body 44 disposed on the cutting table 12b and movable while contacting a plurality of cut products Sa formed by cutting the package substrate S, and a drive mechanism 46 for driving the movable body 44, , A transport mechanism 47 for transporting a plurality of cut products Sa is provided, and the transport mechanism 47 moves the cut products Sa in contact with the movable body 44 by the movable body 44 to the cutting table 12b. ) is separated from and transported.

Description

Cutting device and manufacturing method of cut product {CUTTING DEVICE, AND METHOD OF MANUFACTURING CUT PRODUCT}

The present invention relates to a conveying module, a cutting device provided with the conveying module, and a method of manufacturing a cut product.

A lead frame or a substrate on which a chip is mounted is generally used as an electronic component by sealing with a resin. Conventionally, a cutting device is known that manufactures a package substrate by encapsulating a substrate on which a plurality of chips are mounted and wired with resin at once, and then cuts (individualizes) the package substrate to produce a plurality of cut products (electronic components). There is (for example, refer to Patent Documents 1 and 2).

The cutting device described in Patent Literature 1 includes a holding table for adsorbing and holding a package substrate with a holding tape, a cutting blade for cutting the package substrate on the holding table into a plurality of cut products, and a plurality of cuts on the holding table. It is provided with a suction recovery means for sucking and conveying the product. In this suction recovery means, a plurality of cut products are sucked in by compressed air supplied to the tubular member, peeled off from the holding tape, and the cut products fall in a spiral shape along the inner wall surface of the cyclone container arranged on the exit side of the tubular member. While doing so, it is collected in the receiving box.

The cutting device disclosed in Patent Literature 2 includes a suction source for sucking a package substrate from below the holding table, a cutting blade for cutting the package substrate on the holding table into a plurality of cut products, and a plurality of cutting pieces on the holding table. A suction unit for sucking and conveying the article by the suction head disposed above is provided. After shutting off the negative pressure of the suction source, negative pressure is applied to the suction head of the suction unit to suck a plurality of cut products, and the cut products are transported on a stream of gas or liquid.

Japanese Unexamined Patent Publication No. 2014-220459 Japanese Unexamined Patent Publication No. 2017-152442

In the conventional cutting device, when the size of the cut product becomes smaller than a square with one side of 2 mm, for example, conveyance becomes difficult. Like the cutting device described in Patent Literature 1, when a plurality of cut products are peeled from the holding tape by suction force, if the suction force is too weak, the cut products that cannot be conveyed remain, and if the suction force is too strong, there is a risk that the cut products will be damaged. there is. Also, in the cutting device described in Patent Literature 2, when suction is performed by the suction head, cut products that cannot be conveyed remain if the suction force is too weak, and cut products may be damaged if the suction force is too strong.

Then, the manufacturing method of the conveyance module, the cutting device, and the cut product which can reliably convey a some cut product is desired.

Characteristic features of the transport module according to the present invention are a movable body disposed on a cutting table and movable while contacting a plurality of cut products formed by cutting a package substrate, a drive mechanism for driving the movable body, and a plurality of the cut products. It is provided with a transport mechanism for transporting, and the cutting product in contact with the movable body is separated from the cutting table by rotation of the movable body and transferred.

A characteristic configuration of the cutting device according to the present invention is that it includes the conveying module, a cutting mechanism for cutting the cut product, and a cleaning mechanism for cleaning the cut product transported by the transfer mechanism.

A feature of the method for producing a cut product according to the present invention is that the cut product is manufactured using the cutting device.

ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the conveying module, cutting device, and cut product which can reliably convey a plurality of cut products is provided.

1 is a schematic diagram showing a cutting device.
2 is a schematic diagram showing a conveying module;
3 is a schematic perspective view showing a cleaning module.
FIG. 4 is a cross-sectional view along line IV-IV of FIG. 3 .
Fig. 5 is a schematic diagram showing a state in which the movable block is moved to a conveyance start position.
Fig. 6 is a schematic view showing a state in which cutting products are being transported;
Fig. 7 is a schematic diagram showing a state in which the movable block has been moved to a conveyance end position.
8 is a cross-sectional view showing a state in which the container of the cleaning module is moved.
9 is a plan view showing a state in which the container of the cleaning module is moved.
10 is a schematic perspective view showing an inversion mechanism of the cleaning module.
Fig. 11 is a schematic diagram showing a conveyance module according to another embodiment 1;
Fig. 12 is a schematic diagram showing a conveyance state of a cut product according to another embodiment 1;
Fig. 13 is a schematic diagram showing a conveyance module according to another embodiment 2;
14 is an explanatory diagram of the liquid flow principle according to another embodiment 2;
Fig. 15 is a schematic diagram showing a conveyance state of a cut product according to another embodiment 2;

EMBODIMENT OF THE INVENTION Below, embodiment of the manufacturing method of the conveyance module concerning this invention, a cutting device, and a cut product is described based on drawing. However, it is not limited to the following embodiment, and various modifications are possible within a range that does not deviate from the gist.

[Device Configuration]

An object to be molded, such as a lead frame or substrate on which chips are mounted, is used as an electronic component by sealing with resin. As a technique for resin-sealing the object to be molded, a compression method and a transfer method are exemplified. The compression method is, for example, a method in which liquid or granular resin is supplied onto a release film, then the release film is loaded in a cavity of a molding die, and an object to be molded is immersed in the resin on the release film to perform resin molding. The transfer method is, for example, a method in which an object to be molded is accommodated in a cavity of a molding die, a resin tablet is supplied to a port of the molding die, heated and melted, and then molten resin is supplied to the cavity to perform resin molding.

Compression type and transfer type resin molding devices are used to manufacture package substrates such as MAP (molded array packaging), which collectively resin-seals a substrate on which a plurality of chips are mounted and wired, from the viewpoint of increasing production efficiency. There are cases. After the package substrate is manufactured in this device, it is cut (individualized) in a cutting device, and the formed cut product is used as an electronic component after passing quality inspection. In the cutting device, a plurality of cut products formed by cutting the package substrate are transported, cleaned, and dried. However, when the size of the cut products becomes smaller than a square with a side of 2 mm, for example, transport becomes difficult. So, in this embodiment, the manufacturing method of the conveyance module, cutting device, and cut product which can reliably convey a some cut product is provided. In the following, a package substrate on which a plurality of semiconductor chips are mounted is described as an example of an object to be cut, and the direction of gravity is described as downward and the direction opposite to the direction of gravity as upward in some cases.

In FIG. 1, the schematic diagram of the cutting device D is shown. The cutting device D in the present embodiment is configured as a separate body from the resin molding device E, and a package substrate S sealed with resin is introduced in the resin molding device E, and the package substrate S ) is cut, washed, and dried to produce a plurality of cut products Sa. This manufactured cut product Sa is used as an electronic component after passing through a prescribed quality test.

The cutting device D has a cutting module 1, a cleaning module 2, and a control unit 3. The cutting module 1 and the cleaning module 2 can be installed or separated independently. In addition, the cutting device D has a conveyance module 4 across the cutting module 1 and the cleaning module 2 . The control unit 3 is software that controls the operation of the cutting device D, and is composed of a program stored in hardware such as an HDD or memory, and is executed by a CPU of a computer. That is, the controller 3 controls the operation of the cutting module 1, the cleaning module 2, and the conveying module 4.

The cutting module 1 has an introduction part 11 and a cutting mechanism 12 . In addition, the number of the introduction part 11 and the cutting mechanism 12 may be formed 1 or 2 or more, and is not specifically limited.

The introduction portion 11 introduces a package substrate S having a rectangular shape in plan view as an object to be cut from the resin molding apparatus E. The introduced package substrate S is loaded onto the free stage 11a. The cutting mechanism 12 includes two cutting transport mechanisms 12a for transporting the package substrate S, two cutting tables 12b disposed on the cutting transport mechanism 12a, and two cutting parts ( 12c) is included. The transfer mechanism 12a for cutting is comprised so that rotation in theta direction is possible while being movable in the Y direction, in the state where the package board|substrate S was fixed on the cutting table 12b. Although the drive source of the feed mechanism 12a for cutting and the cutting part 12c is not specifically limited, For example, an electric motor, such as a servo motor, can be used.

On the cutting table 12b, the package substrate S received from the introduction part 11 is fixed by air adsorption or the like with the resin-sealed side as the lower surface. The cutting portion 12c includes a spindle portion 12c1 and a rotary blade 12c2, and cuts the package substrate S fixed to the cutting table 12b by means of the rotary blade 12c2. In addition, a groove is formed on the upper surface of the cutting table 12b, that is, the fixed surface to which the package substrate S is fixed, so that the rotary blade 12c2 can enter. The rotating blade 12c2 is fixed to the rotating shaft of the spindle portion 12c1, and is configured to be movable in the X and Z directions and capable of high-speed rotation. The cutting transfer mechanism 12a moves and rotates in the Y and θ directions, and the rotary blade 12c2 moves in the X and Z directions, so that the relative positions of the rotary blade 12c2 and the package substrate S are adjusted. do. While repeating the adjustment of this relative position, the rotary blade 12c2 cuts the package substrate S so as to penetrate from the upper surface to the lower surface, and a plurality of cut products Sa having a rectangular shape in plan view are formed. . At this time, cutting may be performed while supplying cutting water to the contact portion between the rotary blade 12c2 and the package substrate S. Moreover, you may adjust the relative position by moving any of the feed mechanism 12a for cutting|disconnection or rotary blade 12c2. In addition, the two cutting parts 12c can be positioned so that the spindle part 12c1 is straight and the rotary blades 12c2 are opposed to each other, the distance between the two rotary blades 12c2 is variable, and the X direction It is movable to any upper part of the two cutting tables 12b in .

The cleaning module 2 has a cleaning mechanism 2A, a fluid supply/discharge mechanism 2B, and a collection box 2C having a rectangular shape in plan view. The cleaning mechanism 2A accommodates a plurality of cut products Sa together with a cleaning liquid such as water in a container 21, generates a liquid flow by rotating the container 21, and cleans the plurality of cut products Sa. do. The fluid supply/discharge mechanism 2B includes a gas supply/discharge pump (not shown) that supplies compressed air into the container 21 of the cleaning mechanism 2A or suctions and discharges air in the flexible pipe 47a described later. are doing In addition, the fluid supply/discharge mechanism 2B is capable of supplying the cleaning liquid into the container 21 from a water supply source (for example, water supply, a pure water supply pipe in a factory). Details of the cleaning module 2 will be described later.

As shown in FIG. 2, the conveyance module 4 is placed on the cutting table 12b of the cutting mechanism 12, and the package substrate S is cut while contacting a plurality of cut products Sa formed. A movable body 44 that is movable, a movable box B supporting the movable body 44, a drive mechanism 46 that drives the movable body 44, and a transport mechanism 47 that transports a plurality of cutting products Sa. ) has

The movable body 44 includes a rotating shaft 44a1, a rotating main body 44a fixed to the rotating shaft 44a1, and a plurality of protrusions 44b projecting outward in the radial direction from the circumference of the rotating main body 44a. . The plurality of protrusions 44b are made of nylon, PBT (polybutylene terephthalate), etc., which are difficult to deform when coming into contact with the cutting product Sa and separating from the cutting table 12b and do not damage the cutting product Sa. It is made of resin material. As the movable body 44, it can be set as the brush-shaped structure which arrange|positioned multiple protrusions 44b made from resin with a diameter of 0.10 mm - 0.13 mm, for example.

The movable box B is a housing that supports the rotary shaft 44a1 via a bearing (not shown) or the like, and a flexible pipe 47a of a transfer mechanism 47 described later is fixed to the upper portion. The movable box B is configured to be slidable in the X direction and the Z direction by a slide drive mechanism 46b described later.

The drive mechanism 46 includes a rotation drive mechanism 46a that rotates the movable body 44 around the rotating shaft 44a1 and a slide drive mechanism 46b that slides the movable box B in the X and Z directions. I have it. The rotational driving mechanism 46a rotates the front of the moving body 44 in a rotational direction R (counterclockwise direction in FIG. 2 ) intersecting upwardly with respect to the traveling direction (+X direction). That is, as for the movable body 44, the rotation tangential direction in the position closest to the cutting table 12b in a rotating state is the same as the moving direction. A drive source of this drive mechanism 46 is constituted by an electric motor such as a servo motor, an air cylinder, or the like.

The transport mechanism 47 is cut by the driving force of the gas supply/discharge pump included in the flexible pipe 47a (an example of a suction path) through which gas and liquid flow together with the cut product Sa, and the fluid supply/discharge mechanism 2B. It has a vacuum mechanism 29 that sucks a plurality of cut products Sa on the table 12b and a liquid supply mechanism 43 that supplies liquid such as water to the flexible pipe 47a. One end 47b of the flexible pipe 47a is connected to a liquid supply mechanism 43 for supplying liquid such as water, and the other end 47c of the flexible pipe 47a communicates with the inside of the container 21. there is. The vacuum mechanism 29 has one end connected to the gas supply/discharge pump provided in the fluid supply/discharge mechanism 2B and the gas supply/discharge pump to be able to exhaust, and the other end connected to the bottom wall of the outer cylinder 28a and the intermediate cylinder T described later. It is composed of a vacuum tube (29a). The vacuum tube 29a of the vacuum mechanism 29 is provided with an on-off valve Vf composed of a solenoid valve or the like. A plurality of cutting products Sa separated from the cutting table 12b by contacting the protruding portion 44b of the moving body 44 receives negative pressure acting on the flexible tube 47a by the vacuum mechanism 29, and the flexible tube ( It flows into 47a) and is transported to the container 21 by the liquid flow from the liquid supply mechanism 43.

Hereinafter, the cleaning mechanism 2A of the cleaning module 2 will be described in detail with reference to FIGS. 3 and 4 .

The cleaning mechanism 2A of the cleaning module 2 includes a container 21 for accommodating a plurality of cut products Sa formed by cutting the package substrate S, and a rotation mechanism 22 for rotating the container 21 And, a liquid supply mechanism 23 for supplying the washing liquid into the container 21, a drain mechanism 24 for discharging the washing liquid in the container 21, and an air supply mechanism 25 for supplying compressed air into the container 21, , an exhaust mechanism 26 for discharging air in the container 21, and a rotation reversal mechanism 27 for rotating and inverting the container 21. In addition, the cleaning mechanism 2A includes a drain mechanism 28 for draining cleaning liquid containing minute particles such as cutting chips that have passed through an intermediate cylinder T described later when the water level in the container 21 exceeds a predetermined level. may have

The container 21 is disposed inclined at a predetermined angle with respect to the direction of gravity. This predetermined angle is set within the range of 5° to 50°, preferably 10° to 40°, more preferably 20° to 30°. The container 21 has a bottomed cylindrical inner cylinder 21b with a conical bottom wall and an outer cylinder 28a disposed on the outer circumferential side of the inner cylinder 21b, and the inner cylinder 21b and the outer cylinder 28a ) is configured to be integrally rotatable. The inner surface of the bottom wall of the inner cylinder 21b is formed with an inclined surface 21b1 that inclines towards the direction of gravity as it approaches the center (rotation shaft 22b of the rotation mechanism 22).

Between the inner cylinder 21b and the outer cylinder 28a, the intermediate cylinder T is fixed non-rotatably. In the inner cylinder 21b, from a position slightly higher than the upper end surface of the intermediate cylinder T in the side wall (predetermined water level) to the bottom wall, minute particles such as cutting chips pass through, but the cut product Sa does not pass through. A large number of fine holes 21c are formed. That is, the inner cylinder 21b has a mesh structure extending from the side wall near the upper end surface of the intermediate cylinder T to the bottom wall. In addition, an annular flange 21d extending annularly outward in the radial direction is formed in the inner cylinder 21b, and on the lower surface of this annular flange 21d, a plurality of inclined projections 21d1 having inclined surfaces when viewed from the rotational direction are provided. is formed (refer to the enlarged view of FIG. 3). The bottom wall of the intermediate cylinder T is configured in the shape of a truncated cone to which the drain pipe 24a of the drain mechanism 24 is fixed. In the outer cylinder 28a, when the water level in the container 21 exceeds a predetermined level, minute particles such as cutting chips that have crossed the upper end surface (top) of the intermediate cylinder T through the fine hole 21c of the inner cylinder 21b are removed. It is constituted as a drain mechanism 28 for draining cleaning liquid containing dust. The bottom wall of the outer cylinder 28a is a truncated cone protruding from the inner tube 28a1 inserted inside so as to be able to rotate relative to the drain pipe 28b for discharging the washing liquid to a drain (for example, a drain pipe in a sewer or a factory). It is composed of a shape (see Fig. 4). Further, on the outer surface of the upper end of the outer cylinder 28a, a plurality of inclined projections 28a2 having inclined surfaces contacting in the rotational direction with respect to the inclined surface of the inclined projection 21d1 of the inner cylinder 21b are protruded (see FIG. 3). See enlarged view).

In addition, the cleaning module 2 is provided with a lid 30 that closes the upper opening of the inner cylinder 21b, and a lid moving mechanism 31 composed of an air cylinder or the like that moves the lid 30 up and down. there is. To the cover 30, a flexible pipe 47a of the transport module 4, a liquid supply pipe 23a of the liquid supply mechanism 23, and an air supply pipe 25a of the air supply mechanism 25 are fixed. In a state where the cover 30 is in close contact with the inner cylinder 21b, a plurality of cut parts Sa are supplied by liquid flow from the flexible pipe 47a into the inner cylinder 21b, and the liquid supply pipe 23a is formed in the inner cylinder 21b The washing liquid is supplied from At this time, since many fine holes 21c are formed in the inner cylinder 21b, the washing liquid in the inner cylinder 21b flows into the middle cylinder T, but the cut product Sa does not pass through the fine holes 21c. . In this embodiment, since a plurality of cut products Sa are supplied into the inner cylinder 21b by liquid flow, problems such as the cut products Sa sticking and remaining in the tube of the flexible tube 47a can be prevented. there is.

The rotating mechanism 22 is composed of an electric motor 22a that rotates the inner cylinder 21b and the outer cylinder 28a around the rotating shaft 22b, and the inclined projection 21d1 of the inner cylinder 21b and the outer cylinder 28a described above. It includes an inclined protrusion 28a2. When the outer cylinder 28a rotates by the driving force of the electric motor 22a, the inclined projection 28a2 of the outer cylinder 28a abuts against the inclined projection 21d1 of the inner cylinder 21b, and the inner cylinder 21b also rotates integrally. . The inner cylinder 21b and the outer cylinder 28a are rotated by the rotating mechanism 22 to generate a liquid flow inside the inner cylinder 21b having a mesh structure, and a plurality of cut items Sa immersed in the cleaning liquid in the inner cylinder 21b. ) is cleaned by the swirling cleaning liquid.

The liquid supply mechanism 23 includes a liquid supply pipe 23a having one end connected to water supply or a pure water supply pipe in a factory and the other end connected to the cover 30 . The drainage mechanism 24 includes a drainage pipe 24a having one end connected to a sewage system or a drain pipe in a factory and the other end connected to the bottom wall of the intermediate cylinder T. The liquid supply pipe 23a of the liquid supply mechanism 23 and the drain pipe 24a of the liquid discharge mechanism 24 are provided with an on-off valve Va and an on-off valve Vb composed of solenoid valves or the like, respectively.

The air supply mechanism 25 includes a gas supply/discharge pump provided in the fluid supply/discharge mechanism 2B and an air supply pipe 25a having one end connected to the gas supply/discharge pump and the other end connected to the lid 30 so as to be able to introduce compressed air or the like. are doing The exhaust mechanism 26 includes an exhaust pipe 26a having one end connected to the outside air and the other end connected to the bottom wall of the intermediate cylinder T and the outer cylinder 28a via the branching portion 20a. The air supply pipe 25a of the air supply mechanism 25 and the exhaust pipe 26a of the exhaust mechanism 26 are provided with an on-off valve Vc and an on-off valve Vd constituted by solenoid valves or the like, respectively. In addition, the air supply mechanism 25 does not need to include a gas supply/discharge pump, and any structure capable of introducing compressed air or the like into the air supply pipe 25a is sufficient. It is good also as a structure connected to one end of 25a) via a solenoid valve.

The rotation reversal mechanism 27 includes a chuck mechanism 27a that operates the clamp member 27a1 holding the inner cylinder 21b, and an inner cylinder that vertically moves the inner cylinder 21b clamped between the clamp member 27a1. A vertical mechanism 27d, a rotation mechanism 27b for rotating the inner cylinder 21b around the rotation axis 27b1, and an inner cylinder reversing mechanism 27c for vertically inverting the inner cylinder 21b around the reversal axis 27c1 ) is included. The driving source of the rotation reversal mechanism 27 is constituted by an electric motor, an air cylinder, or the like.

The drain mechanism 28 includes an outer cylinder 28a and a drain pipe 28b having one end connected to a sewage system or a drain pipe in a factory and the other end connected to the bottom wall of the outer cylinder 28a. The vacuum mechanism 29 has a gas supply/discharge pump provided in the fluid supply/discharge mechanism 2B, one end of which is connected to the gas supply/discharge pump so that exhaustion is possible, and the other end of the intermediate cylinder T and an outer cylinder 28a via a branching portion 20a. ) and a vacuum tube 29a connected to the bottom wall. The drain pipe 28b of the drain mechanism 28 and the vacuum pipe 29a of the vacuum mechanism 29 are provided with an on-off valve Ve and an on-off valve Vf constituted by solenoid valves or the like, respectively. The aforementioned drain pipe 28b joins the drain pipe 24a at the branching portion 20a and extends downward, and the exhaust pipe 26a and the vacuum tube 29a join the drain pipe 28b at the branching portion 20a. So it is extended upwards. With this configuration, the liquid flows through the drain pipe 24a and the drain pipe 28b, and the gas flows through the exhaust pipe 26a and the vacuum pipe 29a. The branching part 20a in this embodiment is located above the upper end surface of the intermediate cylinder T (the highest water level 20b that climbs over the upper end surface of the intermediate cylinder T), and cuts the product Sa During washing and drying, the washing liquid that has passed over the upper surface of the intermediate cylinder T is discharged from the exhaust pipe 26a and the vacuum tube 29a due to the water head difference between the branching part 20a and the highest water level 20b in the container 21. There is no inflow into In addition, during washing of the cut product Sa, when the opening/closing valve Vb of the draining mechanism 24 is in a closed state, the washing liquid remaining in the draining pipe 24a is at the highest water level in the branching part 20a and the container 21. The water head difference of (20b) does not flow into the exhaust pipe 26a and the vacuum tube 29a. Even if the washing liquid remaining in the drain pipe 24a reaches the level of the branched portion 20a, it is drained from the drain pipe 28b connected to the branched portion 20a. In addition, the vacuum mechanism 29 does not need to include a gas supply/discharge pump as long as the inside of the outer cylinder 28a is not made negative, and may be configured to be capable of exhausting from the vacuum tube 29a through the branching portion 20a. For example, it is good also as a structure in which the exhaust duct in a factory is connected to one end of the vacuum tube 29a.

[Method of manufacturing cut products]

The manufacturing method of the cut product Sa is demonstrated using FIGS. 1-11.

As shown in FIG. 1, the package substrate S molded by resin in the resin molding apparatus E is conveyed to the introduction part 11, and this package substrate S is placed on the free stage 11a. Next, the conveying mechanism 12a for cutting fixes the package board|substrate S as an object to be cut received from the introduction part 11 to the cutting table 12b with the resin-sealed side as the lower surface, and to the cutting part 12c transfer Then, the relative position of the package substrate S and the rotating blade 12c2 is adjusted by the cutting transfer mechanism 12a and the cutting portion 12c, and the package substrate S is moved to the upper surface by the rotating blade 12c2. It is cut so as to penetrate from the lower surface toward the lower surface, and a plurality of cut products Sa having a rectangular shape in plan view are formed (cutting step).

Subsequently, the conveyance module 4 conveys the plurality of cut products Sa formed by being cut by the cutting mechanism 12 to the container 21 of the cleaning mechanism 2A (conveyance step). As shown in FIG. 5, the movable box B is slid and moved in the X direction and the Z direction by the slide drive mechanism 46b, so that the protrusion 44b of the moving body 44 is at one end of the cutting table 12b ( -Adjust the position to contact the cutting product (Sa) at the end in the X direction). Next, as shown in FIG. 6, the vacuum mechanism 29 for sucking a plurality of cut products Sa and the liquid supply mechanism 43 for supplying liquid such as water to the flexible pipe 47a are driven. While doing so, the front of the movable body 44 is rotated in the rotation direction R (counterclockwise direction in FIG. 6) intersecting upward with respect to the traveling direction (+X direction) by the rotation drive mechanism 46a. As a result, the plurality of cutting products Sa come into contact with the protruding portion 44b of the moving body 44, are separated from the cutting table 12b, and are sucked into the flexible tube 47a by the vacuum mechanism 29, liquid It is transported together with the liquid supplied by the supply mechanism 43. Then, the movable box B is advanced (moved in the +X direction) by the slide drive mechanism 46b in a state where the protrusion 44b of the movable body 44 is in contact with the cut product Sa. At this time, the projecting part 44b of the movable body 44 rotated by the rotary driving mechanism 46a comes into contact with the next cutting product Sa and is separated from the cutting table 12b. Separation of the cut product Sa on the cutting table 12b and suction by the vacuum mechanism 29 are repeated. And as shown in FIG. 7, the protruding part 44b of the movable body 44 advances to the other end (the end of the +X direction) of the cutting table 12b, and finally all the cut products Sa are moved to the container 21 are accepted in In this conveyance step, the rotation mechanism 22 is operated with the opening/closing valves Va to Ve of the liquid supply mechanism 23, the drainage mechanism 24, the air supply mechanism 25, the exhaust mechanism 26, and the drain mechanism 28 closed. The on-off valve Vf of the vacuum mechanism 29 is opened while it is in a non-driven state (see Fig. 3). Further, after the protrusion 44b of the movable body 44 advances to the other end of the cutting table 12b, the sliding movement of the movable box B by the slide drive mechanism 46b in the X direction is stopped, and the movable box B is stopped. After (B) is raised in the Z direction, it is moved in the -X direction and returned to the position shown in Fig. 5, and conveyance of the cut product Sa by the rotation of the moving body 44 and the movement in the +X direction described above. The operation may be repeated a plurality of times.

Thus, in this embodiment, when the conveying mechanism 47 conveys the cutting product Sa, the cutting table 12b cuts the product Sa by the movable body 44 which moves while making contact with the cutting product Sa. ) is separated from As a result, even when the size of the cut product Sa is reduced, if the cut product Sa separated by the moving body 44 is transported by the transport mechanism 47, the transport module 4 is complicatedly configured. A plurality of cutting products Sa can be conveyed reliably without work. That is, in this embodiment, as in the past, poor separation of the cut product Sa from the cutting table 12b due to negative pressure and damage to the cut product Sa are less likely to occur.

Next, as shown in FIG. 4 , the washing mechanism 2A supplies the washing liquid into the container 21 (inner cylinder 21b) by the liquid supply mechanism 23, so that the plurality of cut products Sa are separated from the washing liquid. Together, they are accommodated in the container 21 (inner cylinder 21b), and the washing liquid exists inside the intermediate cylinder T through the fine holes 21c. And by rotating the container 21 (the inner cylinder 21b and the outer cylinder 28a) with the rotating mechanism 22, the some cutting product Sa is wash|cleaned (washing process). At this time, while keeping the on-off valves Vb and Vc of the drainage mechanism 24 and the air supply mechanism 25 in the closed state, the on-off valve Vf of the vacuum mechanism 29 is closed and the rotation mechanism 22 is driven, The opening/closing valves Va, Vd, and Ve of the liquid supply mechanism 23, exhaust mechanism 26, and drain mechanism 28 are opened (see Fig. 3). In addition, the cleaning liquid containing minute dirt such as cutting chips that has crossed the upper end surface of the intermediate cylinder T through the minute hole 21c of the inner cylinder 21b is drained by the drain mechanism 28, and the inner cylinder ( The air in 21b) is exhausted by the exhaust mechanism 26.

Next, after cleaning the plurality of cut products Sa in the cleaning process, the cleaning liquid containing minute particles such as cutting chips is discharged by the drainage mechanism 24 and the drain mechanism 28, and the air supply mechanism 25 While supplying a gas into the inner cylinder 21b of the container 21 by this, while rotating the container 21 (the inner cylinder 21b and the outer cylinder 28a) by the rotation mechanism 22, several cut products Sa are made. Dry (drying process). At this time, the closed state of the on-off valve Vf of the vacuum mechanism 29 and the open state of the on-off valves Vd and Ve of the exhaust mechanism 26 and drain mechanism 28 are maintained, while the rotation mechanism 22 continues to drive. , the opening/closing valve Va of the liquid supply mechanism 23 is closed, and the opening/closing valves Vb and Vc of the drainage mechanism 24 and the air supply mechanism 25 are opened (see Fig. 3).

Next, the opening/closing valves Vb to Ve of the drainage mechanism 24, air supply mechanism 25, exhaust mechanism 26, and drain mechanism 28 are closed, driving of the rotation mechanism 22 is stopped, and then the rotation reversal mechanism By (27), the inner cylinder 21b is rotated and vertically inverted, and a plurality of cutting products Sa are taken out (taking out step). This extraction step is explained using FIGS. 8 to 10 .

As shown in Fig. 8, while the cover 30 is raised by the cover moving mechanism 31, the inner cylinder 21b is clamped and supported by the clamp member 27a1 of the chuck mechanism 27a. The inner cylinder 21b is raised by the up-and-down mechanism 27d, and the inner cylinder 21b is separated from the intermediate cylinder T. Next, as shown in FIG. 9 , the inner cylinder 21b is rotated around the rotation shaft 27b1 by the rotation mechanism 27b and moved upward of the collection box 2C. Next, as shown in FIG. 10, the inner cylinder 21b is vertically inverted around the inversion shaft 27c1 by the inner cylinder reversal mechanism 27c, and the plurality of cut products Sa accommodated in the inner cylinder 21b are placed in a collection box. Drop it to (2C) and take it out. Then, the washed and dried cut products Sa stored in the collection box 2C are recovered. In this way, since the inner cylinder 21b of the container 21 is upside down and the cut product Sa is taken out, the cut product Sa is reliably recoverable.

[Other embodiments]

Hereinafter, the same members as those in the above-described embodiment will be described using the same terms and symbols in order to facilitate understanding.

<1> As shown in FIGS. 11 and 12, the conveying mechanism 47 has a storage part 45b for storing a plurality of cutting products Sa, and the number of the plurality of cutting products Sa is accommodated. The feed 45b may be moved to the container 21, and a plurality of cutting products Sa may be moved from the accommodating portion 45b to the container 21. More specifically, the transport mechanism 47 in the present embodiment is arranged on the cutting table 12b of the cutting mechanism 12, and a plurality of cut products Sa formed by cutting the package substrate S are formed. ), a movable body 44 capable of moving while in contact with the movable body 44, a movable box Bb supporting the movable body 44, a housing portion 45 capable of accommodating a plurality of cutting products Sa, and driving the movable body 44. It has a driving mechanism (46). These movable body 44, storage part 45b, and drive mechanism 46 are comprised as an integral unit in movable box Bb.

The movable body 44 supports a rotating body 44a rotating around the rotating shaft 44a1, a plurality of protrusions 44b protruding outward in the radial direction from the circumference of the rotating body 44a, and the rotating shaft 44a1. , a guide groove 44c for guiding the slide movement of the rotating body 44a. The plurality of protrusions 44b are made of nylon, PBT (polybutylene terephthalate), etc., which are difficult to deform when coming into contact with the cutting product Sa and separated from the cutting table 12b and do not damage the cutting product Sa. It is made of resin material. By the slide drive mechanism 46b mentioned later, the movable body 44 is comprised so that forward or backward movement on the cutting table 12b along the guide groove 44c is possible.

The movable box Bb is a housing that supports the rotary shaft 44a1 via a bearing (not shown) or the like, and has an accommodating portion 45b fixed thereto. The movable box Bb is configured to be slidable in the X direction and the Z direction by a slide drive mechanism 46b described later.

The drive mechanism 46 slides the rotational drive mechanism 46a which rotates the movable body 44 and the movable box Bb in the X direction and the Z direction, and moves the movable body 44 to the cutting table 12b. It has a slide drive mechanism 46b for sliding along the surface of the . The rotational driving mechanism 46a rotates the front of the moving body 44 in a rotational direction R (counterclockwise direction in FIG. 11 ) intersecting upwardly with respect to the traveling direction (+X direction). The slide driving mechanism 46b slides the movable body 44 (rotational shaft 44a1) along the guide groove 44c. A drive source of this drive mechanism 46 is constituted by an electric motor such as a servo motor.

As a conveyance method of the cut product Sa, as shown in FIG. 11, the movable box Bb is slid in the X direction and the Z direction by the slide drive mechanism 46b, and the projecting part 44b of the moving body 44 ) is adjusted to a position where it contacts the cutting product Sa at one end (the end in -X direction) of the cutting table 12b. Then, the plurality of cut products Sa formed by cutting the package substrate S are brought into contact with the protruding portion 44b of the moving body 44 rotated by the rotary drive mechanism 46a to separate them from the cutting table 12b. Next, in a state where the protruding portion 44b of the movable body 44 is in contact with the cut product Sa, it is advanced by the slide drive mechanism 46b to extrude the cut product Sa toward the accommodating portion 45b. At this time, the projecting part 44b of the movable body 44 rotated by the rotary driving mechanism 46a comes into contact with the next cutting product Sa and is separated from the cutting table 12b. Separation and extrusion of the cut products Sa on the cutting table 12b are repeated, and finally all the cut products Sa are accommodated in the accommodating portion 45b. Moreover, also in this embodiment, you may repeat the rotation of the moving body 44 mentioned above and the conveyance operation|movement of the cut product Sa by the movement to the +X direction in multiple times.

Next, as shown in FIG. 12, the conveyance module 4 sets the movable box Bb (accommodating section 45b in which a plurality of cut products Sa are stored), and the opening of the container 21 is the accommodating section. It is moved to the vicinity of the container 21 of the cleaning mechanism 2A so as to be below (45b). Then, the conveyance module 4 vibrates while tilting the movable box Bb, and makes the some cut product Sa fall into the container 21. In this way, if the cut products Sa are stored in the accommodating portion 45b before moving to the container 21, it is only necessary to move the accommodating portion 45b in which the plurality of cut products Sa are stored, and the conveyance efficiency is improved. can be raised In addition, when the movable box Bb is tilted and vibrated, since it becomes possible to accommodate a plurality of cut products Sa in the container 21 at once, compared to the case of conveying the cut products Sa by liquid flow or suction, Recovery failure or damage of the cut product Sa is less likely to occur. In addition, in the structure shown in FIGS. 11-12, it is different from description of the conveyance of the cut product Sa after cutting in the above-mentioned embodiment, and accommodation to the container 21. That is, instead of accommodating a plurality of cut products Sa into the inside of the container 21 from the other end 47c of the flexible pipe 47a, a plurality of cut products Sa is moved to a movable box of the transfer mechanism 47 ( Bb) is accommodated in the interior of the container 21 directly.

<2> As shown in Figs. 13 to 15, the conveying mechanism 47 has a liquid passage 48a through which liquid such as water flows, and passes the cut product Sa inside the liquid passage 48a. You may transfer to (21b). More specifically, the transport mechanism 47 in the present embodiment is arranged on the cutting table 12b of the cutting mechanism 12, and a plurality of cut products Sa formed by cutting the package substrate S are formed. ), a movable body 44 capable of moving while in contact with the movable body 44, a movable box Ba supporting the movable body 44, a housing portion 45a capable of accommodating a plurality of cutting products Sa, and driving the movable body 44. A drive mechanism 46, a liquid passage 48a composed of a flexible pipe and transporting the cut product Sa by flowing the liquid therein, and a supply passage for supplying the liquid into the movable box Ba ( 48b) and a liquid supply mechanism 49 for supplying liquid to the liquid passage 48a and the supply passage 48b. These movable body 44, storage part 45a, liquid flow path 48a, supply path 48b, and drive mechanism 46 are comprised as an integral unit in the movable box Ba.

The movable body 44 supports a rotating body 44a rotating around the rotating shaft 44a1, a plurality of protrusions 44b protruding outward in the radial direction from the circumference of the rotating body 44a, and the rotating shaft 44a1. , a guide groove 44c for guiding the slide movement of the rotating body 44a. The plurality of protrusions 44b are made of nylon, PBT (polybutylene terephthalate), etc., which are difficult to deform when coming into contact with the cutting product Sa and separated from the cutting table 12b and do not damage the cutting product Sa. It is made of resin material. By the slide drive mechanism 46b mentioned later, the movable body 44 is comprised so that forward or backward movement on the cutting table 12b along the guide groove 44c is possible.

The movable box Ba is a housing that supports the rotating shaft 44a1 via a bearing (not shown) or the like, and has a housing portion 45a fixed thereto. Further, the liquid passage 48a is supported by the movable box Ba so as to be switchable between a closed state and an open state within the storage portion 45a. The movable box Ba is comprised so that sliding in the X direction and the Z direction is possible by the slide drive mechanism 46b mentioned later.

The drive mechanism 46 slides the rotational drive mechanism 46a which rotates the movable body 44 and the movable box Ba in the X direction and the Z direction, and moves the movable body 44 to the cutting table 12b. It has a slide drive mechanism 46b for sliding along the surface of the . The rotational drive mechanism 46a rotates the front of the moving body 44 in a rotational direction R (counterclockwise direction in FIG. 13) intersecting upwardly with respect to the traveling direction (+X direction). The slide driving mechanism 46b slides the movable body 44 (rotational shaft 44a1) along the guide groove 44c. The driving mechanism 46 also has a switching mechanism 46c that switches the liquid passage 48a between a closed state and an open state. A drive source of this drive mechanism 46 is constituted by an electric motor such as a servo motor.

As a conveyance method of the cut product Sa, as shown in FIG. 13, the movable box Ba is slid in the X direction and the Z direction by the slide drive mechanism 46b, and the projecting part 44b of the moving body 44 ) is adjusted to a position where it contacts the cutting product Sa at one end (the end in -X direction) of the cutting table 12b. Then, as shown in Fig. 14, liquid is supplied into the movable box Ba by the liquid supply mechanism 49, and the liquid flow passage 48a is switched to a closed state by the switching mechanism 46c, resulting in a siphon effect. As a result, the liquid is stored in the liquid passage 48a. Next, as shown in FIGS. 13 and 14, the liquid flow path 48a is switched to an open state by the switching mechanism 46c, and a plurality of cut products Sa formed by cutting the package substrate S, It comes into contact with the protrusion 44b of the movable body 44 rotated by the rotation drive mechanism 46a and is separated from the cutting table 12b. Next, as shown in FIG. 15, the projecting part 44b of the movable body 44 is moved forward by the slide drive mechanism 46b in a state in contact with the cut product Sa, and the liquid flow by the liquid supply mechanism 49 Together with, the cut product Sa is extruded toward the housing portion 45. At this time, the projecting part 44b of the movable body 44 rotated by the rotary driving mechanism 46a comes into contact with the next cutting product Sa and is separated from the cutting table 12b. The cut product Sa extruded to the accommodating part 45 is transferred to the container 21 by the liquid flow in the liquid flow path 48a. And the projecting part 44b of the movable body 44 advances to the other end (+X direction end) of the cutting table 12b, and finally all the cut products Sa are accommodated in the container 21. Moreover, also in this embodiment, you may repeat the rotation of the moving body 44 mentioned above and the conveyance operation|movement of the cut product Sa by the movement to the +X direction in multiple times.

<3> In the embodiment described above, the intermediate cylinder T is provided in the container 21, but the intermediate cylinder T may be omitted. In this case, the drain pipe 24a of the drain mechanism 24 is connected to the inner cylinder 21b. Alternatively, the intermediate cylinder T and the outer cylinder 28a may be omitted, the container 21 may be constituted only with the inner cylinder 21b, and the supply amount of the washing liquid may be controlled by the liquid supply mechanism 23 or the liquid drainage mechanism 24.

<4> In the embodiment described above, the inner cylinder 21b of the container 21 was rotated and reversed by the rotation reversal mechanism 27 to drop a plurality of cutting products Sa, but the rotation reversal mechanism 27 was omitted. And you may take out the cut product Sa in the container 21 by suction etc.

<5> In the conveyance module 4 in the embodiment described above, the liquid supply mechanism 43 is connected to one end 47b of the flexible pipe 47a, and a plurality of cut products Sa are conveyed by a liquid flow However, the liquid supply mechanism 43 may be omitted and the plurality of cut products Sa may be conveyed only by suction by the vacuum mechanism 29 .

<6> In the embodiment described above, the inner cylinder 21b and the outer cylinder 28a of the container 21 were rotated by the rotation mechanism 22, but only the inner cylinder 21b of the container 21 may be rotated, and the container ( The inner cylinder 21b and the intermediate cylinder T of 21) may be rotated, and the object of rotation is not particularly limited.

<7> In the above-described embodiment, one end of the supply pipe 23a is connected to a water supply pipe or a pure water supply pipe in a factory, and ends of the drain pipe 24a and the drain pipe 28b are connected to a sewage pipe or a drain pipe in a factory. Alternatively, a washing liquid tank may be provided in the fluid supply/discharge mechanism 2B, and ends of the liquid supply pipe 23a, the drain pipe 24a, and the drain pipe 28b may be connected to the washing liquid tank to circulate the washing liquid. In this case, it is preferable to provide a filtration mechanism for filtering the washing liquid in the liquid supply pipe 23a or the drain pipe 24a and the drain pipe 28b.

<8> The container 21 may be in an upright posture along the direction of gravity without inclining it with respect to the direction of gravity. In addition, you may form the bottom wall of the inner cylinder 21b flat, without providing the inclined surface 21b1.

<9> Although the movable body 44 is provided with a plurality of protruding portions 44b protruding around the rotating body 44a, the protruding portion 44b is omitted and an elastic material such as rubber wound around the rotating body 44a. may be provided, or the movable body 44 may be constituted only by the rotating body 44a.

[Overview of the above embodiment]

Hereinafter, the outline of the manufacturing method of the conveyance module 4 demonstrated in the above-mentioned embodiment, the cutting device D, and the cut product Sa is demonstrated.

(1) The characteristic configuration of the transfer module 4 is a movable body 44 disposed on the cutting table 12b and movable while contacting a plurality of cut products Sa formed by cutting the package substrate S, A drive mechanism 46 for driving the movable body 44 and a transport mechanism 47 for transporting a plurality of cut products Sa are provided, and the transport mechanism 47 is a cut product that is in contact with the movable body 44 ( Sa) is separated from the cutting table 12b by the movable body 44 and transferred.

According to this structure, when the conveying mechanism 47 conveys the cutting product Sa, the cutting product Sa is transferred to the cutting table 12b by the rotation of the moving body 44 moving while contacting the cutting product Sa. are separated from As a result, even when the size of the cut product Sa is reduced, if the cut product Sa separated by the moving body 44 is transported by the transport mechanism 47, the transport module 4 is complicatedly configured. A plurality of cutting products Sa can be conveyed reliably without work. Moreover, if the movable body 44 is rotated, separation control of the cutting product Sa from the cutting table 12b is simple.

That is, in this configuration, as in the prior art, poor peeling of the cut product Sa from the cutting table 12b due to negative pressure and damage to the cut product Sa are less likely to occur. Thus, the conveyance module 4 which can reliably convey several cut products Sa was able to be provided.

(2) The movable body 44 may have a rotating main body 44a fixed to the rotating shaft 44a1 and a plurality of projecting portions 44b protruding radially outward from the periphery of the rotating main body 44a.

If the some protrusion part 44b is provided to the moving body 44 like this structure, the some protrusion part 44b can be brought into contact with the cutting product Sa, and can be separated from the cutting table 12b reliably.

(3) As for the movable body 44, the rotational tangential direction in the position closest to the cutting table 12b in a rotating state may be the same as the moving direction.

As for the movable body 44 in this structure, the rotational tangential direction in the position closest to the cutting table 12b in a rotating state is the same as the moving direction. That is, since the front of the movable body 44 is rotated in the rotational direction R intersecting upward with respect to the traveling direction, the cut product Sa is separated toward the front of the traveling direction while moving the movable body 44 . As a result, separation and extrusion of the cut product Sa by the moving body 44 can be realized simultaneously. Further, as described above, a groove is formed in the fixing surface of the cutting table 12b for fixing the package substrate S so that the rotary blade 12c2 can enter. In this configuration, since the movable body 44 is rotated in the rotation direction R, even if the movable body 44 moves forward, it is difficult for the cut product Sa to get caught in this groove, and the cut product Sa can be easily separated. there is.

(4) The conveying mechanism 47 has a flexible pipe 47a (suction path) on which negative pressure acts, and cuts the product Sa separated from the cutting table 12b by contacting the moving body 44 with the flexible pipe ( 47a) may be transferred.

Like this structure, if the cut product Sa is conveyed within the flexible pipe 47a, scattering of the cut product Sa can be prevented.

(5) The conveying mechanism 47 has a storage part 45b for accommodating the cutting product Sa separated from the cutting table 12b in contact with the moving body 44, and the number of times the cutting product Sa is accommodated. You may transfer the payment 45b.

If the accommodating part 45b itself which accommodated the cut product Sa like this structure is conveyed, scattering of the cut product Sa can be prevented.

(6) The transfer mechanism 47 has a liquid passage 48a through which liquid flows, and the cut product Sa separated from the cutting table 12b in contact with the moving body 44 is moved within the liquid passage 48a. can be transported

Like this configuration, when the cut product Sa is transported within the liquid passage 48a, while being able to prevent the cut product Sa from scattering, the liquid flow becomes a buffer function between the cut products Sa, Damage to the cut product Sa can be prevented.

(7) The characteristic configuration of the cutting device D is the transport module 4 described in any one of (1) to (6) above, the cutting mechanism 12 for cutting the cut product Sa, and the conveying mechanism ( 47) is provided with a cleaning mechanism 2A for cleaning the cut product Sa.

In this structure, since the some cut product Sa is conveyed to 2 A of cleaning mechanisms by the above-mentioned conveyance mechanism 47, the some cut product Sa can be conveyed reliably.

(8) The characteristic of the manufacturing method of the cut product Sa is that the cut product Sa is manufactured using the cutting device D described in the above (7).

In this method, since a plurality of cutting products Sa are manufactured by the above-mentioned cutting device D, manufacturing efficiency can be improved.

In addition, a configuration disclosed in the above-described embodiment (including other embodiments, the same applies hereinafter) can be applied in combination with a configuration disclosed in other embodiments, as long as no contradiction occurs. In addition, the embodiment disclosed in this specification is an example, and the embodiment of the present invention is not limited to this, and can be appropriately modified within a range not departing from the purpose of the present invention.

The present invention can be used for a conveyance module, a cutting device provided with the conveyance module, and a method for producing a cut product, and is particularly effective when the size of the cut product is smaller than a square of 2 mm on one side.

1: Cutting module
2: cleaning module
2A: cleaning mechanism
3: control unit
4: conveying module
12: cutting mechanism
12b: cutting table
21: Courage
22: rotation mechanism
23: liquid feeding mechanism
24: drainage mechanism
25: air supply mechanism
26: exhaust mechanism
27: rotation reversal mechanism
28: drain mechanism
29: vacuum mechanism
43: liquid supply mechanism
44: mobile body
44a: rotating body
44a1: axis of rotation
44b: protrusion
45b: storage unit
46: driving mechanism
47: transport mechanism
47a: flexible tube (suction path)
48a liquid flow
D: cutting device
E: resin molding device
S: package substrate
Sa: cutting

Claims (8)

In a state where a plurality of cut products formed by cutting a package substrate by a cutting mechanism are disposed on a cutting table, a movable body that is movable while contacting the plurality of cut products is supported and accommodated, and the movable body is supported and placed on the cutting table. A transport module comprising a movable box for moving the movable body by moving the movable body, a drive mechanism for driving the movable body, and a transport mechanism for transporting a plurality of the cut products;
A cutting mechanism for cutting the cut product;
A cleaning mechanism for cleaning the cut product transported by the conveying mechanism
It is a cutting device having a,
The movable body includes a rotating body fixed to the rotating shaft, and protruding radially outward from the circumference of the rotating body and made of a resin material to contact the plurality of cutting products to separate the plurality of cutting products from the cutting table. It has a plurality of protrusions,
After the plurality of cut products are separated from the cutting table upward by contacting the protruded portion of the moving body with the cutting product, the transfer mechanism moves the plurality of cut products separated from the cutting table upwards from the cutting table. Suction from and transferred to the upper part of the cutting table,
The transfer mechanism includes a suction path in which negative pressure acts, a vacuum mechanism for suctioning the cut product separated from the cutting table in contact with the movable body by a driving force of a gas supply/discharge pump so as to transfer the cut product within the suction path, and the suction path. having a liquid supply mechanism connected to the furnace to supply liquid, and transporting the cut product separated from the cutting table in contact with the moving body within the suction furnace;
One end of the suction passage is connected to the movable box, and the other end of the suction passage is connected to the vacuum mechanism via the cleaning mechanism, so that the cut product sucked into the suction passage and the liquid supplied by the supply mechanism The liquid is sucked by the vacuum mechanism and accommodated in a container of the cleaning mechanism;
The cutting device characterized in that the cleaning mechanism includes a drainage mechanism for discharging a cleaning liquid, and uses the cleaning liquid to clean the cut product. delete According to claim 1,
The cutting device according to claim 1 , wherein the movable body has the same rotational tangent direction as the moving direction at a position closest to the cutting table in a rotating state. delete According to claim 1,
The cutting device according to claim 1 , wherein the transfer mechanism has an accommodating portion for accommodating the cut product separated from the cutting table in contact with the movable body, and transports the accommodating portion in which the cut product is stored. According to claim 1,
The cutting device according to claim 1 , wherein the transfer mechanism has a liquid flow path through which liquid flows, and transports the cut product separated from the cutting table by contacting the movable body within the liquid flow path. delete A method for producing a cut product, wherein the cut product is manufactured using the cutting device according to claim 1,
A cutting step in which the package substrate disposed on the cutting table is cut by a cutting mechanism to form a plurality of cut products;
A conveying step of conveying the plurality of cut products cut and formed by the cutting mechanism to a container of the cleaning mechanism by the conveying module;
A method for manufacturing a cut product comprising a cleaning step of cleaning the plurality of cut products accommodated in the container by supplying a cleaning liquid into the container of the cleaning mechanism.

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