KR102476588B1 - Fluid permeable apparatus using anodic oxidation film - Google Patents

Abstract

The present invention relates to a fluid permeable body using an anodic oxide film in which a fluid permeable anodic oxide film having a permeable hole having a larger inner width than a pore hole is formed and coupled to a fluid permeable member.

Description

Fluid permeable apparatus using anodic oxidation film { Fluid permeable apparatus using anodic oxidation film }

The present invention relates to a fluid permeable body using an anodic oxide film in which a fluid permeable anodic oxide film is coupled to a fluid permeable member.

The fluid-permeable member allows fluid (gas or liquid) to pass through and is used for purposes such as diffusion, separation, purification, filtration, analysis, and reaction.

The fluid-permeable member generally has a plurality of through-holes through which fluid can pass. In order for the fluid to be evenly diffused after passing through the fluid-permeable member, it is advantageous to have a small inner width of the hole and a large number of the hole. However, there are many difficulties in manufacturing to form a small inner width of the hole.

On the other hand, as the fluid-permeable member as described above, there is a diffuser (shower head) that uniformly sprays gas onto the glass inside a vacuum chamber for manufacturing a liquid crystal display (LCD). A liquid crystal display device (LCD) is a non-light emitting device that obtains an image effect by injecting liquid crystal between an array substrate and a color filter substrate, and using its characteristics. These array substrates and color filter substrates are manufactured through several processes of deposition, patterning, and etching of thin films on transparent glass made of materials such as glass, respectively. When the process is to be performed, the introduced gas passes through a diffuser (shower head) and is deposited on the glass installed on the upper surface of the susceptor to form a film.

A conventional diffuser (shower head), which is a fluid-permeable member as described above, is described in Korean Patent Registration No. 0653442.

As shown in FIG. 1, the reaction gas introduced through the introduction part 18 passes through (permeates) the diffuser 15 and sprays the reaction gas onto the glass installed on the upper surface of the susceptor S.

However, there is a problem in that the reactive gas cannot be uniformly sprayed onto the glass with the hole formed in the conventional diffuser. In order to improve this problem, a method of reducing the inner width of the hole and increasing the number of holes may be proposed, but there is a limitation in manufacturing.

Korean Registered Patent No. 0653442

The present invention has been made to solve the above problems, and an object of the present invention is to provide a fluid transmission body using an anodic oxide film capable of improving the uniformity of fluid diffusion.

In order to achieve the above object, a fluid permeable member using an anodic oxide film of the present invention includes a fluid permeable member having a hole through which fluid passes; and a fluid permeable anodic oxide film coupled to the fluid permeable member. The fluid-permeable anodic oxide film includes regularly arranged pore holes formed by anodic oxidation of metal and penetration holes having an inner width greater than the inner width of the pore holes and penetrating the fluid-permeable anodic oxide film, The hole is characterized in that it communicates with the transmission hole.

In addition, the fluid-permeable anodic oxide film is characterized in that it is coupled to either the upper surface or the lower surface of the fluid-permeable member.

In addition, the fluid permeable anodic oxide film is characterized in that coupled to the upper and lower surfaces of the fluid permeable member.

In addition, the fluid-permeable member is characterized in that at least two or more members are coupled, and the fluid-permeable anodic oxide film is coupled to one surface of at least one of the fluid-permeable members between the fluid-permeable members.

In addition, a seating portion having a seating groove is formed on an upper surface of the fluid-permeable member, and the fluid-permeable anodic oxide film is seated on the seating portion.

In addition, a first metal part is formed on an outer circumference of the fluid-permeable anodic oxide film, and the first metal part is coupled to the fluid-permeable member.

In addition, the fluid-permeable anodic oxide film is positioned between the fluid-permeable members that are stacked and coupled to each other, so that the fluid-permeable anodic oxide film is fixed in position while the fluid-permeable members are coupled to each other.

In addition, the fluid-permeable anodic oxide film is characterized in that it is formed by anodizing a base material made of metal and then removing the base material made of metal.

In addition, it is characterized in that it includes a metal portion formed on the upper or lower surface of the fluid-permeable anodic oxide film.

In addition, the metal portion is characterized in that formed on the outer periphery of the fluid-permeable anodic oxide film.

In addition, the metal part is characterized in that formed in a plurality of spaced apart from each other.

In addition, a through hole communicating with the through hole is formed in the metal part.

In addition, the permeation hole is characterized in that it is formed in a direction parallel to the direction of the pore hole by etching the fluid-permeable anodic oxide film.

In addition, it is characterized in that a plurality of pore holes are located between the spaced apart penetration holes.

In addition, the fluid permeable member is characterized in that it comprises aluminum metal.

In addition, the pore holes are characterized in that they pass through the upper and lower portions of the fluid-permeable anodic oxide film.

In addition, the fluid-permeable anodic oxide film is characterized in that it is composed of a porous layer in which the pore holes are formed, and a barrier layer formed under the porous layer to close one end of the pore hole.

In addition, the metal includes aluminum metal, and the fluid-permeable anodic oxide film is characterized in that aluminum oxide formed by anodizing the aluminum metal.

In addition, the penetration hole is characterized in that it has a constant inner width from one end of the fluid-permeable anodic oxide film to the other end of the fluid-permeable anodic oxide film.

In addition, the separation distance between the pore holes is characterized in that it is smaller than the separation distance between the permeation holes.

In addition, it is characterized in that one said hole communicates with a plurality of said permeation holes.

In addition, the fluid permeable member using an anodic oxide film, characterized in that the diffuser installed in the vacuum chamber.

According to the present invention, it has the following effects.

The uniformity of spreading of the fluid is improved.

In addition, since it can be manufactured by combining with a conventionally used fluid-permeable member, the manufacturing process is simple and easy.

In addition, while maintaining structural strength, penetration holes are formed.

In addition, the fluid-permeable anodic oxide film is flexible and can be bent in the direction of fluid flow when the fluid passes through, thereby improving the diffusion width of the fluid.

1 is a cross-sectional view of a vacuum chamber including a conventional fluid-permeable member (diffuser).
Figure 2 is a cross-sectional view of a fluid transmission body using an anodic oxide film according to a first preferred embodiment of the present invention.
Figure 3 (a) is a cross-sectional view showing an enlarged portion of Figure 2;
Fig. 3(b) is a bottom view of Fig. 3(a);
4 is a modified example of a fluid permeable anodic oxide film
Figure 5 is a modified example of Figure 2;
6 is a cross-sectional view of a fluid transmission body using an anodic oxide film according to a second preferred embodiment of the present invention.
Figure 7 (a) is a cross-sectional view showing an enlarged portion of Figure 6.
Fig. 7(b) is a bottom view of Fig. 7(a);
8 and 9 are cross-sectional views illustrating a fluid-permeable anodic oxide film and a first metal part and a second metal part formed on one surface thereof.
10 is a cross-sectional view showing an example of a method for installing a fluid permeable anodic oxide film.
11 is a cross-sectional view showing a state in which the fluid permeable body of the present invention is installed inside the vacuum chamber.
12 to 14 are photographs of a fluid permeable anodic oxide film according to a preferred embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and methods for achieving them will become clear with reference to the detailed embodiments described below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in different forms. Rather, the embodiments introduced herein are provided so that the disclosed content will be thorough and complete, and the spirit of the present invention will be sufficiently conveyed to those skilled in the art, and the present invention is only defined by the scope of the claims. Like reference numbers designate like elements throughout the specification.

Terms used in this specification are for describing embodiments and are not intended to limit the present invention. In this specification, singular forms also include plural forms unless specifically stated otherwise in a phrase. As used herein, 'comprises' and/or 'comprising' means that a stated component, step, operation, and/or element is the presence of one or more other components, steps, operations, and/or elements. or do not rule out additions. In addition, since it is according to a preferred embodiment, the reference numerals presented according to the order of description are not necessarily limited to the order.

Embodiments described in this specification will be described with reference to cross-sectional views and/or plan views, which are ideal exemplary views of the present invention. In the drawings, the size and thickness of films and regions are exaggerated for effective description of technical content. Accordingly, the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes. Accordingly, the regions illustrated in the drawings have schematic properties, and the shapes of the regions illustrated in the drawings are intended to illustrate a specific shape of a region of a device and are not intended to limit the scope of the invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In describing various embodiments, the same names and the same reference numbers will be given to components performing the same functions even if the embodiments are different. In addition, configurations and operations already described in other embodiments will be omitted for convenience.

As shown in FIGS. 2 to 4, a fluid permeable body using an anodic oxide film according to a first preferred embodiment of the present invention includes a fluid permeable member 400 having a hole 410 through which fluid passes; and a fluid permeable anodic oxide film 200 coupled to the fluid permeable member 400; Including, the fluid permeable anodic oxide film 200 is formed by anodic oxidation of metal and has regularly arranged pore holes 310 and an inner width greater than the inner width of the pore holes 310, while the fluid permeable anodic oxide film ( 200, and a penetration hole 350 penetrating through, and the hole 410 is characterized in that it communicates with the transmission hole 350.

The sizes and thicknesses of the fluid-permeable member 400, the hole 410, the fluid-permeable anodic oxide films 200 and 200', the pore hole 310 and the permeation hole 350 shown in FIGS. 2 to 11 are effective for technical content. It is shown exaggerated for explanatory purposes.

In an embodiment of the present invention, the fluid permeable member 400 may be a diffuser installed in the vacuum chamber 600 as shown in FIG. 11 . The diffuser serves to spray the reaction gas onto the glass 620 installed on the upper surface of the susceptor 630 by permeating (passing) the reaction gas introduced through the introduction part 610 . Since the diffuser in the vacuum chamber 600 has been widely disclosed in the prior art, including the above-described prior art, a detailed description thereof will be omitted in this description.

The fluid permeable member 400 in this embodiment may be a diffuser installed in a vacuum chamber 600 for manufacturing LCD, and in this case, a rectangular parallelepiped shape is preferable. In the case of semiconductor manufacturing equipment, the diffuser may be formed in a disc shape. Of course, the shape of the fluid permeable member 400 may be changed according to the installation environment and conditions.

As shown in FIGS. 2 and 3 , a plurality of through holes 410 are formed in the fluid permeable member 400 . Fluid may be permeated (through) through the hole 410 .

As shown in FIG. 3(a), the hole 410 has a central portion of an inner width narrower than upper and lower portions.

The hole 410 includes a first portion 412 located at an upper portion through which reaction gas is introduced, a second portion 414 extending from the lower end of the first portion 412 so that the inner width decreases toward the lower side, and It includes a third part 416 extending vertically downward from the lower end of the second part 414, and a fourth part 418 extending so that the inner width increases from the lower end of the third part 416 to the lower side. .

The reaction gas flows into the first portion 412 of the hole 410 and sequentially passes through the second portion 414, the third portion 416, and the fourth portion 418 to form the fluid-permeable anodic oxide film 200. flows towards

As shown in FIG. 3(a), the first part 412 has an inner wall formed vertically.

The second part 414 is located between the first part 412 and the third part 416, and the inner wall is formed to be inclined so that the inner width decreases toward the lower side.

In addition, the third part 416 is located between the second part 414 and the fourth part 418, so that the inner wall is formed vertically. The inner width of the third part 416 is smaller than the inner widths of the upper end of the first part 412 and the lower end of the fourth part 418 . The third portion 416 increases the flow rate by increasing the pressure of the reaction gas.

The upper end of the fourth part 418 is connected to the lower end of the third part 416, and the inner width increases toward the lower side. The reaction gas passing through the third portion 416 may be diffused and sprayed toward the fluid-permeable anodic oxide film 200 through the fourth portion 418 . The lower end of the fourth portion 418 may contact the upper surface 210 of the fluid permeable anodic oxide film 200 .

A fluid-permeable anodic oxide film 200 is coupled to the lower surface of the fluid-permeable member 400 .

In this embodiment, it is preferable that the fluid permeable anodic oxide film 200 has a shape corresponding to the fluid permeable member 400 . Also, the outer circumference of the fluid-permeable anodic oxide film 200 may be formed to be close to the outer circumference of the fluid-permeable member 400 .

The fluid permeable anodic oxide film 200 includes a plurality of regularly arranged pore holes 310 formed by anodic oxidation of a metal; and a permeation hole 350 penetrating the fluid permeable anodic oxide film 200 while having an inner width greater than that of the pore hole 310 .

The fluid-permeable anodic oxide film 200 is formed by anodizing a base material made of metal and then removing the base material made of metal.

The fluid-permeable anodic oxide film 200 may be formed only of the porous layer 300 in which the pore holes 310 are formed, as shown in FIGS. 3 and 4(a). In other words, after anodizing the metal, not only the metal but also the barrier layer 380 may be removed and formed. Thus, the pore hole 310 of FIGS. 3 and 4(a) penetrates the fluid permeable anodic oxide film 200 above and below it. In other words, it is formed to pass through the upper surface 210 and the lower surface 230 of the fluid permeable anodic oxide film 200 .

On the other hand, as shown in FIG. 4 (b), the fluid-permeable anodic oxide film 200' is formed on the porous layer 300 in which the pore holes 310 are formed, and on the lower part of the porous layer 300 to form the pore holes ( 310) may be composed of a barrier layer 380 that closes one end.

A plurality of pore holes 310 are also formed in the vertical direction in the fluid permeable anodic oxide film 200' of FIG. 4(b). The upper end of the pore hole 310 is formed to pass through the upper surface 210 of the fluid permeable anodic oxide film 200, that is, the upper surface 210 of the porous layer 300. In addition, the lower end of the pore hole 310 is closed by the barrier layer 380 .

As shown in FIG. 4 , the inner width d4 of the pore hole 310 formed in the fluid-permeable anodic oxide films 200 and 200' ranges from several nm (nanometers) to 300 nm (nanometers).

In addition, the metal that is the base material of the fluid-permeable anodic oxide films 200 and 200' includes aluminum metal. That is, aluminum or an aluminum alloy may be preferred. Further, the fluid-permeable anodic oxide films 200 and 200' may preferably be aluminum oxide formed by anodizing aluminum metal.

Meanwhile, penetration holes 350 are formed to pass through the upper and lower surfaces 210 and 230 of the fluid-permeable anodic oxide films 200 and 200'. The penetration hole 350 of FIGS. 3 and 4(a) is formed to penetrate the porous layer 300. And the penetration hole 350 of FIG. 4 (b) is formed through both the porous layer 300 and the barrier layer 380.

A plurality of penetration holes 350 penetrate through the upper and lower surfaces 210 and 230 of the fluid-permeable anodic oxide films 200 and 200'.

As shown in FIGS. 3 and 4 , a plurality of pore holes 310 are positioned between the plurality of penetration holes 350 spaced apart. In other words, a plurality of pore holes 310 are positioned between two adjacent penetration holes 350 . In addition, as shown in FIG. 4 (a), the distance d2 between the two adjacent pore holes 310 is smaller than the distance d1 between the two adjacent penetration holes 350 ( d1>d2).

In addition, the inner width of the penetration hole 350 is larger than the inner width of the pore hole 310 as shown in FIGS. 3 and 4 . As shown in the cross-sectional view of FIG. 4(a), the inner width d3 of the permeation hole 350 is larger than the inner width d4 of the pore hole 310 (d3>d4).

In addition, since the permeation hole 350 can be formed by etching the anodic oxide film 200, the permeation hole 350 is formed vertically in a direction parallel to the pore hole 310. As shown in FIG. 4(a), the penetration hole 350 has a constant inner width from one end of the fluid-permeable anodic oxide film 200 to the other end of the fluid-permeable anodic oxide film 200 (d3 = d5). In other words, the penetration hole 350 has a constant inner width from the top to the bottom. The inner width d3 of the transmission hole 350 ranges from 300 nm (nanometers) to several mm (millimeters).

Meanwhile, as shown in FIG. 3(a), the thickness t of the fluid permeable anodic oxide film 200 ranges from 0.4 μm (micrometer) to 200 μm (micrometer).

In addition, since the fluid-permeable anodic oxide film 200 is manufactured in a semi-transparent state, it is possible to check the degree of impurities caught in the penetration hole 350 .

In addition, a plurality of penetration holes 350 may correspond to one hole 410 formed in the fluid permeable member 400 and communicate with each other. In the cross-sectional view of FIG. 3 (a), two penetration holes 350 are shown on the lower side within the inner width range of one hole 410, but a plurality of penetration holes 350 beyond that are one hole 410. ) can be communicated in correspondence within the inner width range of

As described above, since the fluid-permeable anodic oxide film 200 having the permeable hole 350 is coupled to the fluid-permeable member 400 having the hole 410, the uniformity of diffusion of the fluid is improved.

In addition, since it can be manufactured by combining the fluid-permeable anodic oxide film 200 with the fluid-permeable member 400 used in the past, the manufacturing process is simple and easy.

Hereinafter, a modified example of the installation position of the fluid permeable anodic oxide film 200 will be described with reference to FIG. 5 .

First, the fluid permeable anodic oxide film 200 may be coupled to either the lower surface or the upper surface of the fluid permeable member 400, as shown in FIGS. 5(a) and 5(b).

5(a) is a form in which the fluid permeable anodic oxide film 200 is coupled to the lower surface of the fluid permeable member 400 as in the first embodiment shown in FIG. 2, and FIG. 5(b) shows the fluid permeable member 400 ) It is a form in which the fluid permeable anodic oxide film 200 is coupled to the upper surface of the.

Also, as shown in FIG. 5(c), the fluid permeable anodic oxide film 200 may be coupled to the upper and lower surfaces of the fluid permeable member 400. In addition, as shown in FIG. 5(d), at least two or more fluid-permeable members 400 are coupled, and the fluid-permeable anodic oxide film 200 is formed between the fluid-permeable members 400 by at least one of the fluid-permeable members 400. Can be coupled to one side of. In FIG. 5(d), two fluid-permeable members 400 are vertically spaced apart, and a fluid-permeable anodic oxide film 200 is coupled therebetween. In addition, the fluid-permeable anodic oxide film 200 is coupled to the facing surfaces of the two spaced fluid-permeable members 400 in contact with each other.

On the other hand, the fluid-permeable anodic oxide film 200 has flexibility that can be bent in the direction of fluid flow.

3(a) and 5(a), when the fluid-permeable anodic oxide film 200 is coupled to the lower surface of the fluid-permeable member 400, the fluid passes through the hole 410 of the fluid-permeable member 400. When it flows into the upper surface 210 of the fluid-permeable anodic oxide film 200, the portion corresponding to the hole 410 and not fixed to the fluid-permeable member 400 is convexly bent downward. In other words, the radius of curvature of the upper surface 210 and the lower surface 230 of the portion not fixed to the fluid permeable member 400 corresponding to the lower side of the hole 410 is reduced. Therefore, the lower end of the permeable hole 350 adjacent to the lower surface 230 of the fluid-permeable anodic oxide film 200 has an effect of expanding the diffusion range of the fluid passing through the permeable hole 350.

As described above, the fluid permeable anodic oxide films 200 and 200' are formed with permeation holes 350 having a larger inner width than the pore holes 310 formed therein, and fluid passes through the permeation holes 350 without clogging and evenly. may spread. In addition, since the inner wall forming the pore hole 310 is not demolished as in the case of expanding a part of the pore hole 310, the penetration hole can be formed while maintaining structural strength. In addition, since the penetration hole 350 can be formed by etching, manufacturing is also easy.

Meanwhile, metal parts 510 , 520 , 525 , and 540 may be included on the upper surface 210 or the lower surface 230 of the fluid-permeable anodic oxide film 200 .

The fluid permeable body according to the second embodiment of the present invention shown in FIGS. 6 and 7 includes a metal portion on the lower surface 230 of the fluid permeable anodic oxide film 200 . The metal portion of FIGS. 6 and 7 will be referred to as a base metal portion 540 for description.

In addition, the metal part shown in FIG. 8 will be referred to as the first metal part 510, and the metal part shown in FIG. 9 will be referred to as the second metal parts 520a, 520b, and 520c.

In the fluid permeable body according to the second embodiment of FIGS. 6 and 7 , the fluid permeable anodic oxide film 200 is integral with the base metal portion 540 formed on the lower surface. More specifically, it is a form in which the base material of a metal material is anodized and then the base material is not removed. The base material corresponds to the base metal portion 540 on the lower surface of the fluid permeable anodic oxide film 200 .

As shown in FIGS. 6 and 7 , the base metal portion 540 corresponds to the entire lower surface of the fluid permeable anodic oxide film 200 and is formed on the lower side thereof. In addition, a through hole 545 communicating with the through hole 350 is formed in the base metal part 540 .

A plurality of through holes 545 are formed. The inner width of the through hole 545 is larger than the inner width of the through hole 350 . In addition, the inner width of the through hole 545 decreases from the bottom to the top. In other words, the inner width becomes smaller as it is closer to the lower surface of the fluid-permeable anodic oxide film 200 . The inner width of the upper end of the through hole 545 in contact with the lower surface of the fluid permeable anodic oxide film 200 is larger than the inner width of the through hole 350 . In this structure, the anodic oxide film 200 is formed on the base metal portion 54, a portion of the base metal portion 540 is etched to form a through hole 545, and thereafter the anodic oxide film 200 is additionally formed. It may be formed by etching to form the through hole 350 .

As shown in FIG. 7, the through hole 545 is disposed below the permeation hole 350 and the pore hole 310, and a plurality of permeation holes 350 within the inner width range of one through hole 545. ) can be communicated in correspondence with each other. On the upper side of the through hole 545, at least one or more through holes 350 correspond to and communicate with each other.

After passing through (permeating) the hole 410 , the reaction gas passing through the through hole 350 passes through the through hole 545 and is injected downward. In the second embodiment, the same parts as the first embodiment are omitted from separate descriptions.

Hereinafter, the first metal portion 510 and the second metal portion 520a, 520b, and 520c will be described with reference to FIGS. 8 and 9 . The first metal part 510 and the second metal part 520a, 520b, and 520c reinforce the strength of the anodic oxide film 200 or perform a function for combining with other parts.

As shown in FIG. 8 , the first metal part 510 among the metal parts is formed on the outer periphery of the fluid permeable anodic oxide film 200 . In more detail, the lower surface of the fluid permeable anodic oxide film 200 is formed on the outer periphery. The first metal part 510 may be formed by anodizing the metal and then removing the central part (or inner part) of the metal, leaving only the outer peripheral part of the metal. Therefore, as shown in FIG. 8(a), the first metal part 510 protrudes downward from the outer circumference of the lower surface of the fluid-permeable anodic oxide film 200. In addition, the lower center (inner side) of the fluid-permeable anodic oxide film 200 has an open lower side. That is, as shown in FIG. 8(b), which is a bottom view, the center of the lower surface of the fluid-permeable anodic oxide film 200 is open.

The first metal part 510 of FIG. 8 may be used to couple the fluid-permeable anodic oxide film 200 to the fluid-permeable member 400, as shown in FIG. 10(b). The first metal part 510 may be coupled to the fluid permeable member 400 by, for example, welding.

Among the metal parts, as shown in FIG. 9 , the second metal parts 520a, 520b, and 520c may be spaced apart from each other and formed in plurality. The second metal parts 520a, 520b, and 520c are spaced apart from each other with a space 550 interposed therebetween, but some may be connected.

More specifically, as shown in FIG. 9(d), the second metal parts 520a, 520b, and 520c are formed on the outer periphery of the lower surface of the fluid-permeable anodic oxide film 200 and the second metal part a 520a. , a second metal portion b 520b formed inside the second metal portion a 520a and spaced apart from each other and formed side by side, and a plurality of second metal portions b 520b formed perpendicularly to the second metal portion b 520b and spaced apart from each other and formed side by side. A second metal portion c 520c is included.

Both ends of the plurality of second metal parts b 520b and second metal parts c 520c are connected to the second metal part a 520a, and the remaining parts are spaced apart from the second metal part a 520a. . The second metal portion b 520b and the second metal portion c 520c are orthogonal to each other to form a lattice shape. A space 550 surrounded by the second metal part a 520a, the second metal part b 520b, and the second metal part c 520c is included. The space 550 is located below the fluid permeable anodic oxide film 200, and the penetration hole 350 communicates with the space 550. The reaction gas passing through (permeating) the penetration hole 350 may pass through the space 550 and be injected downward.

A manufacturing method of the second metal parts 520a, 520b, and 520c will be described with reference to FIG. 9 .

First, as shown in FIG. 9(a), the base material of a metal material to be anodized to form the fluid-permeable anodic oxide film 200 is a second metal portion a 520a and a second metal portion b 520b. and a third metal part 525 closing the space 550 as well as the second metal part c (520c, not shown in FIG. 9A).

After anodizing the base material as shown in FIG. 9(a) to form the fluid permeable anodic oxide film 200, the third metal portion 525 is removed to form as shown in FIG. 9(b).

After that, as shown in FIG. 9(c), the penetration hole 350 is formed to pass through the fluid permeable anodic oxide film 200 vertically. Thus, the second metal parts 520a, 520b, and 520c and the penetration hole 350 are formed as shown in FIGS. 9(c) and 9(d).

The second metal parts 520a, 520b, and 520c support the lower surface of the fluid-permeable anodic oxide film 200 to prevent the fluid-permeable anodic oxide film 200 from being excessively bent downward during fluid penetration (passing).

Meanwhile, referring to FIG. 10 , a method of coupling the fluid-permeable anodic oxide film 200 to the fluid-permeable member 400 will be described.

As shown in FIG. 10 (a) , a seating portion having a seating groove 430 may be formed on the upper surface of the fluid permeable member 400 . Then, the fluid permeable anodic oxide film 200 is seated on the seating portion. The seating part also includes a seating groove 430 and an upper surface of the fluid permeable member 400 adjacent to an upper end of the seating groove 430 .

In more detail, the seating groove 430 may be formed concavely with a quadrangular circumference so that the fluid permeable anodic oxide film 200 can be inserted therein. Therefore, as shown in FIG. 9(a), the entire fluid-permeable anodic oxide film 200 may be inserted and seated in the seating groove 430, and as another example, only a portion of the fluid-permeable anodic oxide film 200 may be inserted and seated. can

As described above, FIG. 10(b) shows that the fluid-permeable anodic oxide film 200 is formed by combining the first metal part 510 of FIG. 8 with the fluid-permeable member 400 by welding or the like. how to connect to

In addition, as shown in FIG. 10(c), the fluid-permeable anodic oxide film 200 is positioned between the fluid-permeable members 400 that are stacked and coupled to each other, and the fluid-permeable anodic oxide film 200 is coupled to each other while the fluid-permeable members 400 are coupled to each other. ) can be fixed.

Referring to FIG. 10(c) in more detail, the two fluid-permeable members 400 spaced apart vertically are coupled to each other via a coupling member 530 disposed on the outer circumference. Also, the fluid permeable anodic oxide film 200 is positioned between the two fluid permeable members 400 spaced apart from each other. Upper and lower surfaces of the fluid-permeable anodic oxide film 200 may come into contact with and be compressed by the fluid-permeable members 400 disposed on the upper and lower sides.

In this description, the fluid permeable member 400 is described as an example of a diffuser installed inside a vacuum chamber 600 for LCD manufacturing, as shown in FIG. 11 . The reaction gas introduced through the introduction part 610 passes through the hole 410 of the fluid-permeable member 400 as a diffuser and the penetration hole 350 of the fluid-permeable anodic oxide film 200, and then passes through the susceptor 630. ) The reaction gas is sprayed to spread uniformly on the glass 620 installed on the upper surface.

As described above, although it has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify or transform the present invention within the scope not departing from the spirit and scope of the present invention described in the claims below. can be carried out.

200,200': fluid permeable anodic oxide film 210: upper surface
230: lower surface 300: porous layer
310: pore hole 350: permeation hole
380: barrier layer 400: fluid permeable member
410: hole 412: first part
414: second part 416: third part
418: fourth part 430: seating groove
510: first metal part 520a: second metal part a
520b: second metal part b 520c: second metal part c
525: third metal part 530: coupling member
540: base metal part 545: through hole
600: vacuum chamber 610: inlet
620: glass 630: susceptor

Claims (22)

a fluid-permeable member formed with a plurality of holes through which fluid passes in order to uniformly eject gas; and
A fluid-permeable anodic oxide film including regularly arranged pore holes and penetration holes penetrating upper and lower surfaces while having an inner width greater than the inner width of the pore holes; Including,
The fluid-permeable anodic oxide film is formed by anodizing a separate metal base material and then removing the metal base material, and the transmission hole is formed to have an inner width smaller than the inner width of the hole, and the transmission hole is formed inside the hole. A fluid permeable body using an anodic oxide film, characterized in that coupled to the fluid permeable member to communicate within a width range.
The method of claim 1,
The fluid permeable anodic oxide film is a fluid permeable body using an anodic oxide film, characterized in that coupled to either the upper or lower surface of the fluid permeable member.
The method of claim 1,
The fluid permeable anodic oxide film is a fluid permeable body using an anodic oxide film, characterized in that coupled to the upper and lower surfaces of the fluid permeable member.
The method of claim 1,
The fluid permeable member is a fluid permeable body using an anodic oxide film, characterized in that at least two or more members are coupled, and the fluid permeable anodic oxide film is coupled to one surface of at least one of the fluid permeable members between the fluid permeable members. .
The method of claim 1,
A seating portion having a seating groove is formed on an upper surface of the fluid-permeable member,
The fluid permeable anodic oxide film is a fluid permeable body using an anodic oxide film, characterized in that seated on the seating portion.
The method of claim 1,
A first metal part is formed on the outer periphery of the fluid-permeable anodic oxide film,
A fluid permeable body using an anodic oxide film, characterized in that the first metal part is coupled to the fluid permeable member.
The method of claim 4,
The fluid-permeable anodic oxide film is located between the fluid-permeable members that are laminated and coupled to each other, and the fluid-permeable anodic oxide film is fixed in position while the fluid-permeable members are coupled to each other. A fluid permeable body using an anodic oxide film.
delete The method of claim 1,
A fluid permeable body using an anodic oxide film, characterized in that it comprises a metal portion formed on the upper or lower surface of the fluid permeable anodic oxide film.
The method of claim 9,
The fluid permeable body using an anodic oxide film, characterized in that the metal portion is formed on the outer periphery of the fluid permeable anodic oxide film.
The method of claim 9,
The fluid transmission body using an anodic oxide film, characterized in that the metal parts are spaced apart from each other and formed in plurality.
The method of claim 9,
A fluid transmission body using an anodic oxide film, characterized in that the through hole communicating with the transmission hole is formed in the metal part.
The method of claim 1,
The fluid permeable body using an anodic oxide film, characterized in that the permeation hole is formed in a direction parallel to the direction of the pore hole by etching the fluid permeable anodic oxide film.
The method of claim 1,
A fluid permeable body using an anodic oxide film, characterized in that a plurality of pore holes are located between the permeation holes spaced apart.
The method of claim 1,
The fluid permeable member is a fluid permeable body using an anodic oxide film, characterized in that it comprises aluminum metal.
The method of claim 1,
The fluid permeable body using an anodic oxide film, characterized in that the pore hole passes through the top and bottom of the fluid permeable anodic oxide film.
The method of claim 1,
The fluid permeable anodic oxide film is a fluid permeable body using an anodic oxide film, characterized in that composed of a porous layer in which the pore holes are formed, and a barrier layer formed below the porous layer to close one end of the pore hole.
The method of claim 1,
The fluid permeable body using an anodic oxide film, characterized in that the metal includes aluminum metal, and the fluid-permeable anodic oxide film is aluminum oxide formed by anodizing the aluminum metal.
The method of claim 1,
The fluid permeable body using an anodic oxide film, characterized in that the penetration hole has a constant inner width from one end of the fluid permeable anodic oxide film to the other end of the fluid permeable anodic oxide film.
The method of claim 1,
A fluid transmission body using an anodic oxide film, characterized in that the distance between the pores is smaller than the distance between the permeation holes.
The method of claim 1,
A fluid transmission body using an anodic oxide film, characterized in that one said hole communicates with a plurality of said permeation holes.
The method of claim 1,
The fluid permeable member is a fluid permeable body using an anodic oxide film, characterized in that the diffuser installed in the vacuum chamber.

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