KR102468828B1 - Module for injecting chemical - Google Patents

Abstract

The present invention relates to a chemical injecting module and, more specifically, to a chemical injecting module for discharging foreign substances, accommodated therein, from a drum container to the outside and charging the drum container with chemicals. According to an embodiment of the present invention, the chemical injecting module comprises: a detachable unit provided on an upper side of a drum container to attach or detach caps coupled to a pair of male couplers, respectively; a female coupler unit provided on the upper side of the drum container and coupled to the male couplers to inject different fluids into the drum container; a photographing unit located between the detachable unit and the female coupler unit to photograph the drum container from the above; a transfer unit for transferring the detachable unit, the female coupler unit, and the photographing unit; and a control unit for controlling the detachable unit, the female coupler unit, and the transfer unit. Therefore, the chemical injecting module can improve the accuracy and efficiency of injection of chemicals into the drum container.

Description

Chemical injection module {MODULE FOR INJECTING CHEMICAL}

The present invention relates to a chemical injection module, and more particularly, to a chemical injection module for discharging foreign substances contained inside from a drum container to the outside and filling the drum container with chemicals.

In the semiconductor production process, various types of chemicals such as sulfuric acid, hydrofluoric acid, ammonia, hydrochloric acid, photoresist, and slurry are used. These chemicals often have a risk of fire and explosion or are harmful to the human body, so special care is required when handling them.

In general, chemicals are injected into drum containers from supply facilities and transported to semiconductor factories. In order to prevent accidents on property and human life due to chemical spills, coupling between drum containers and supply facilities is very important.

Conventionally, after the operator directly pushes the drum container into the supply facility, and then separates the cap coupled to the male coupler of the drum container, the female coupler is connected to the male coupler to connect to the supply facility. However, such manual work not only increases the risk of accidents, but also has a problem of low productivity.

Therefore, there is a need for a chemical injection module that recognizes the position of the male coupler formed on the drum container and automatically separates the cap and injects the chemical.

Korean Patent Registration No. 10-1757575

A technical problem to be achieved by the present invention is to provide a chemical injection module that recognizes the position of a coupler formed on a drum container and automatically separates a cap and injects a chemical.

The technical problem to be achieved by the present invention is not limited to the above-mentioned technical problem, and other technical problems not mentioned can be clearly understood by those skilled in the art from the description below. There will be.

In order to achieve the above technical problem, one embodiment of the present invention is provided on the upper side of the drum container having a pair of male couplers, a detachable unit for simultaneously detaching the caps respectively coupled to the pair of male couplers, and the drum A female coupler portion provided on the upper side of the container and coupled with the male coupler to inject different fluids into the drum container, and a photographing unit positioned between the detachable portion and the female coupler portion and photographing the drum container from the upper side; The chemical injection module includes a transfer unit that transports the detachable unit, the female coupler unit, and the photographing unit, and a control unit that controls the detachable unit, the female coupler unit, and the transfer unit.

In one embodiment of the present invention, the transfer unit has a through hole formed therein, and a central stage having a pair of rails extending in the left and right directions with the through hole therebetween, located above the through hole and seated on the rail, , An upper stage movable along the rail, a lower stage located below the through hole, connected to the upper stage through a vertical connecting bar provided at each corner, and coupled to a detachable part, a female coupler part, and a shooting part, and a central stage It may include a left and right driver coupled to and moving the upper stage left and right, and a vertical driver coupled to the upper stage and moving the lower stage up and down.

In one embodiment of the present invention, the transfer unit is coupled to the upper stage, and further includes a fixing unit for fixing the vertical connecting bars to be slidably movable up and down, respectively, and a horizontal connecting bar connecting a pair of fixing units located adjacent to each other. can do.

In one embodiment of the present invention, a worm gear is formed on the outer periphery of the center of one horizontal connecting bar, a pinion gear is formed on the outer periphery of both ends, and the vertical drive unit has a worm engaged with the worm gear on the rotation axis of the motor Formed, a vertical connecting bar in contact with any one horizontal connecting bar and each end may be formed with a rack gear engaged with the pinion gear along the longitudinal direction.

In one embodiment of the present invention, the control unit receives an image taken in real time from the photographing unit, recognizes the presence or absence of a drum container through image analysis, and if the recognized drum container does not move for a certain period of time, image analysis is performed. Through this, it is possible to determine the position of the male coupler and control the detachable part, the female coupler part, and the transfer part according to a predetermined algorithm in consideration of the identified position of the male coupler.

According to an embodiment of the present invention, since the present invention automatically proceeds with the separation of the cap, the coupling between the couplers, and the coupling of the cap in sequence according to the recognition of the position of the male coupler through the photographing unit, the accuracy of the chemical injection operation in the drum container efficiency can be improved.

The effects of the present invention are not limited to the above effects, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the configuration of the invention described in the claims.

1 is a front perspective view of a chemical injection module according to an embodiment of the present invention.
2 is a plan view of a chemical injection module according to an embodiment of the present invention.
3 is a bottom view of a chemical injection module according to an embodiment of the present invention.
4 is a block diagram of a chemical injection module according to an embodiment of the present invention.
5 is a schematic exploded perspective view of a transfer unit according to an embodiment of the present invention.
6 is an exemplary operation diagram of a chemical injection module according to an embodiment of the present invention.
7 is a diagram illustrating use of a chemical injection module according to an embodiment of the present invention.

Hereinafter, the present invention will be described with reference to the accompanying drawings. However, the present invention may be embodied in many different forms and, therefore, is not limited to the embodiments described herein. And in order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and similar reference numerals are attached to similar parts throughout the specification.

Throughout the specification, when a part is said to be "connected (connected, contacted, combined)" with another part, this is not only "directly connected", but also "indirectly connected" with another member in between. "Including cases where In addition, when a part "includes" a certain component, it means that it may further include other components without excluding other components unless otherwise stated.

Terms used in this specification are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "include" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.

Prior to a detailed description of the chemical injection module 1, a drum container (D, see FIG. 7) to which the chemical injection module 1 is applied will be described. The drum container D has an inner space (not shown) capable of storing chemicals, and a pair of male couplers (not shown) for chemical injection into the inner space may be formed on an upper surface. At this time, a cap (not shown) for opening and closing may be detachably coupled to each male coupler, and when the cap is separated, the female coupler 21 provided in the chemical injection module 1 may be inserted into the inside.

Chemicals may include various chemicals such as hydrofluoric acid, sulfuric acid, salt ginseng, ammonia, hydrogen peroxide, liquid compounds such as plating solutions and photoresists, or paste-like chemicals such as slurries used in chemical mechanical polishing (CMP).

Hereinafter, the chemical injection module 1 will be described in detail.

1 is a front perspective view of a chemical injection module 1 according to an embodiment of the present invention, FIG. 2 is a plan view of the chemical injection module 1 according to an embodiment of the present invention, and FIG. It is a bottom view of the chemical injection module 1 according to the embodiment.

The chemical injection module 1 is a module for removing foreign substances from the inner space of the drum container D and injecting chemicals into the inner space, and includes a detachable part 10, a female coupler part 20, and a photographing part 30 , It may include a transfer unit 40 and a control unit 50 (see FIG. 4).

The detachable part 10 is a component for opening and closing the cap coupled to the male coupler of the drum container D, and may be provided to be located on the upper side of the drum container D. The detachable part 10 includes a pair of grippers 11 that grip or release the cap, a gripping cylinder 12 that provides a gripping force or a gripping releasing force to each gripper 11, and a gripping cylinder 12, respectively. Alternatively, it may include a rotating cylinder 13 providing rotational force in a clockwise or counterclockwise direction at the same time.

The cap can be separated from the male coupler by rotating the gripper 11 counterclockwise by driving the rotary cylinder 13 forward while gripping the cap coupled to the drum container D through the gripper 11. have. Conversely, by gripping the separated cap through the gripper 11 and rotating the gripper 11 clockwise by driving the rotating cylinder 13 in the reverse direction while in contact with the top of the male coupler, the cap is attached to the male coupler. can be combined

The female coupler part 20 is a component that is detachably engaged with the male coupler of the drum container D, and may be provided to be located on the upper side of the drum container D, the upper part of which is a supply facility (not shown) and can be connected through a tube.

In the present invention, the female coupler unit 20 may be provided as a pair to correspond to each male coupler. The female coupler unit 20 may include a female coupler 21 insertable into the male coupler and an elevating cylinder 22 providing a driving force to the female coupler 21 in a vertical direction.

One of the female couplers (21a) is for supplying chemicals from the supply facility to the drum container (D), and the other female coupler (21b) is a supply facility to facilitate the discharge of foreign substances inside the drum container (D). It is for supplying a filling gas such as nitrogen from the drum container (D).

The photographing unit 30 is a component for photographing the upper surface of the drum container D and outputting the photographed image to the controller 50 in order to determine the location of the cap coupled to the drum container D, ) It may be provided to be located between the female coupler part 20 and the detachable part 10 on the upper side. At this time, the photographing unit 30 may be spaced apart from the female coupler unit 20 and the detachable unit 10 at the same distance, and may include a CCD (Charge Coupled Device) or CMOS (Complementary Metal-Oxide Semiconductor) camera. can

The transfer unit 40 is a component for transferring the detachable unit 10, the female coupler unit 20, and the photographing unit 30, and may be provided to be located on the upper side of the drum container D, and the detachable unit 10 ), the female coupler unit 20 and the photographing unit 30 may be combined.

In the present invention, the transfer unit 40 includes a central stage 41, an upper stage 42 located above the central stage 41, a lower stage 43 located below the central stage 41, and an upper stage 42 ) It will include a left and right driving unit 44 for moving left and right, a vertical driving unit 45 for moving the lower stage 43 up and down, and a vertical connecting bar 46 connecting the upper stage 42 and the lower stage 43. can

The central stage 41 may be formed in the form of a flat plate in which a through hole 411 is formed on one side, and a pair of rails 412 are formed along the longitudinal direction with the through hole 411 interposed therebetween. It can be.

The upper stage 42 may be formed in a flat plate shape, and a movable member 421 may be formed to correspond to the rail 412 on the lower surface. At this time, the movable member 421 may be formed in a form seated on the rail 412 and may slide along the rail 412 .

The lower stage 43 may be formed in a flat plate shape and may be connected to the upper stage 42 through a plurality of vertical connection bars 46 disposed to pass through the through holes 411 . At this time, the vertical connection bar 46 may be provided at each corner of the lower stage 43 . In addition, the detachable part 10, the female coupler part 20, and the photographing part 30 may be coupled through the lower stage 43.

The center stage 41 may have a larger area than the upper stage 42 and the lower stage 43, but may have a shape extending further in the longitudinal direction than these. The upper stage 42 may have a larger area than the through hole 411 , and the lower stage 43 may have a smaller area than the through hole 411 and may pass through the through hole 411 .

In the drawings of the present invention, the central stage 41, the upper stage 42, and the lower stage 43 are shown as rectangular flat plates, but are not limited thereto and various shapes may be applied.

The left and right driver 44 may be coupled to the center stage 41 and may move the upper stage 42 left and right according to the drive. The left and right drive unit 44 is coupled to the upper surface of the center stage 41 and is coupled to the left and right drive motor 441 and the upper stage 42 that provide rotational force to the rotation shaft 442 when driven, and drives the left and right drive motor 441 It may include a moving block 443 that moves linearly along the rotation axis 442 according to.

At this time, the rotating shaft 442 is formed with a thread along the outer periphery, and the moving block 443 is formed with a hollow 4431 through which the rotating shaft 442 passes, and is engaged with the screw thread of the rotating shaft 442 along the inner periphery. Threads may be formed.

The up and down driver 45 may be coupled to the upper stage 42 and may move the lower stage 43 up and down according to the drive. The vertical driving unit 45 is coupled to the upper surface of the upper stage 42 and may include a vertical driving motor 451 providing rotational force to the rotating shaft 452 during driving and a fixing block 454 into which the rotating shaft 452 is inserted. have. At this time, the rotating shaft 452 may have a screw thread 453 for transmitting rotational force to the lower stage 43 along the outer periphery.

The vertical connection bar 46 may be formed in the form of a long circular or polygonal column, and may be disposed perpendicularly to the lower stage 43 . The vertical connection bar 46 may be provided at each corner of the lower stage 43 and may pass through the upper stage 42 .

According to one embodiment of the present invention, the transfer unit 40 includes a fixing unit 47 for fixing the vertical connecting bar 46 so as to slide vertically and a pair of fixing units 47 positioned adjacent to each other. A horizontal connection bar 48 for interconnection may be further included.

The fixing part 47 is formed as a polygonal block body and can be coupled to the upper surface of the upper stage 42, and a through hole 471 through which the vertical connecting bar 46 can pass is formed, so that the upper and lower portions of the vertical connecting bar 46 are formed. movement can be guided.

The horizontal connecting bar 48 may be formed in the form of a long circular or polygonal column, and may be disposed horizontally with the upper stage 42 . The horizontal connecting bar 48 may be provided between a pair of mutually adjacent fixing parts 47, and both ends may be inserted into the fixing part 47 so that they come into contact with the different vertical connecting bars 46, respectively. .

Referring to FIG. 5, one of the horizontal connecting bars 48a is provided to pass through the fixing block 454, and a worm gear 481 may be formed on the outer periphery of the center in the longitudinal direction, and the outer periphery of both ends in the longitudinal direction Each pinion gear 482 may be formed. At this time, the worm gear 481 is meshed with the worm 453 formed in the form of a screw thread on the rotary shaft 452 of the vertical driving unit 45 and the inside of the fixing block 454 to receive the rotational force of the vertical driving motor 451 have.

The vertical connecting bar 46a in contact with each end of any one horizontal connecting bar 48a has a rack gear 461 engaged with the pinion gear 482 of the horizontal connecting bar 48a in the longitudinal direction of a certain area. can be formed according to That is, the rotational motion of the horizontal connecting bar 48a may be converted into linear motion of the vertical connecting bar 46a.

Referring to FIG. 4, the control unit 50 is a component that controls the overall operation of the chemical injection module 1 and performs a data processing function, including the detachable unit 10, the female coupler unit 20, and the transfer unit ( 40) and can control them.

The controller 50 may receive an image captured in real time from the photographing unit 30 and determine the position of the male coupler through image analysis. At this time, the control unit 50 preferentially proceeds to recognize the existence of the drum container (D) through image analysis, and if the recognized drum container (D) does not move for a certain period of time, it may proceed to determine the position of the male coupler.

When the positioning of the male coupler is completed, the control unit 50 may control the detachable unit 10, the female coupler unit 20, and the transfer unit 40 according to a predetermined algorithm in consideration of the identified position of the male coupler.

The control unit 50 drives the transfer unit 40 to move the gripper 11 to a position corresponding to the position of the male coupler to separate the cap coupled to the male coupler, and drives the transfer unit 40 again to move the female coupler 21 ) can be coupled with the male coupler by moving it to a position corresponding to the position of the male coupler.

When the foreign matter is discharged from the drum container D and the chemical is injected, the control unit 50 drives the transfer unit 40 to separate the female coupler 21 and the male coupler, and then drives the transfer unit 40 again to grip the gripper. The cap can be coupled to the male coupler by moving (11) to a position corresponding to the position of the male coupler.

6 is an exemplary operation view of the chemical injection module 1 according to an embodiment of the present invention.

6(a) is a view showing a state in which the lower stage 43 is lowered, the up and down drive motor 451 is driven to rotate forward, and the rotational force is vertically connected through one horizontal connecting bar 48a. It is transmitted to the bar 46, and the lower stage 43 may be in a lowered state to be separated from the upper stage 42 by the vertical connecting bar 46.

6(b) is a view showing a state in which the lower stage 43 is raised, the vertical drive motor 451 is driven to rotate in reverse, and the rotational force is vertically connected through one horizontal connecting bar 48a. It is transmitted to the bar 46, and the lower stage 43 may be in a raised state so as to be closer to the upper stage 42 by the vertical connecting bar 46.

7 is a diagram illustrating the use of the chemical injection module 1 according to an embodiment of the present invention.

7(a) is a view showing a state in which the detachable part 10 is moved to a position corresponding to the male coupler and the gripper 11 grips the cap of the male coupler, and the cap is separated from the male coupler. A cap may be fastened to the coupler.

The detachable part 10 may be moved to a position corresponding to the male coupler by changing the positions of the upper plate 42 and the lower plate 43 by driving the left and right driving motors 441 . In addition, the gripper 11 may grip the cap by driving the gripping cylinder 12 and may separate or fasten the cap from the male coupler by driving the rotating cylinder 13 .

7(b) is a view showing a state in which the female coupler 20 is moved to a position corresponding to the male coupler and the female coupler 21 is inserted into the male coupler, and the male coupler and the female coupler 21 are coupled. It may be in a ringed state.

The position of the upper plate 42 and the lower plate 43 of the female coupler 20 is changed by driving the left and right driving motors 441 and may be moved to a position corresponding to the male coupler. Also, the female coupler 21 may be inserted into the male coupler by driving the elevating cylinder 22 .

For this reason, since the chemical injection module 1 automatically proceeds with the separation of the cap, the coupling between the couplers, and the coupling of the cap in sequence according to the recognition of the position of the male coupler through the photographing unit 30, the chemical injection operation in the drum container accuracy and efficiency can be improved.

The above description of the present invention is for illustrative purposes, and those skilled in the art can understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present invention is indicated by the following claims, and all changes or modifications derived from the meaning and scope of the claims and equivalent concepts should be interpreted as being included in the scope of the present invention.

1: Chemical injection module
10: detachable part
20: female coupler part
30: shooting unit
40: transfer unit
50: control unit

Claims (5)

In the chemical injection module for injecting chemicals into a drum container having a pair of male couplers,
A detachable portion provided on the upper side of the drum container and simultaneously detaching caps respectively coupled to a pair of male couplers;
A female coupler portion provided on the upper side of the drum container and coupled to the male coupler to inject different fluids into the drum container;
A photographing unit located between the detachable part and the female coupler part and photographing the drum container from the upper side;
A transfer unit for transporting the detachable unit, the female coupler unit, and the photographing unit;
The chemical injection module, characterized in that it comprises a control unit for controlling the detachable unit, the female coupler unit, and the transfer unit.
According to claim 1,
The transfer unit,
A center stage having a through hole formed therebetween and having a pair of rails extending in left and right directions with the through hole interposed therebetween;
an upper stage positioned above the through hole, seated on the rail, and movable along the rail;
A lower stage located below the through hole, connected to the upper stage through vertical connecting bars provided at each corner, and coupled to the detachable part, the female coupler part, and the photographing part;
Left and right driving units coupled to the center stage and moving the upper stage left and right;
characterized in that it comprises a vertical driver coupled to the upper stage and vertically moving the lower stage, the chemical injection module.
According to claim 2,
The transfer unit,
A fixing part coupled to the upper stage and fixing the vertical connecting bars so as to slide vertically, respectively;
The chemical injection module, characterized in that it further comprises a horizontal connecting bar inserted into the pair of fixing parts positioned adjacent to each other at both ends.
According to claim 3,
In any one horizontal connecting bar, a worm gear is formed on the outer periphery of the center and a pinion gear is formed on the outer periphery of both ends,
In the vertical driving unit, a worm meshed with the worm gear is formed on the rotational axis of the motor,
The chemical injection module, characterized in that the vertical connecting bar in contact with any one of the horizontal connecting bars and each end is formed with a rack gear engaged with the pinion gear along the longitudinal direction.
According to claim 1,
The control unit,
Receiving an image captured in real time from the photographing unit, recognizing the presence or absence of a drum container through image analysis, and determining the location of a male coupler through image analysis when the recognized drum container does not move for a certain period of time Characterized in that, the chemical injection module controls the detachable part, the female coupler part, and the transfer part according to a predetermined algorithm in consideration of the position of the male coupler.

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