KR20220111384A - Chemical drum coupler automatic connecting apparatus and method - Google Patents

Abstract

Disclosed are a device and a method for automatically fastening a coupler of a chemical drum. According to one embodiment, the device for automatically fastening a coupler of a chemical drum comprises: an articulated robot having a support body and an articulated arm connected to the support body; a gripper module connected to an end part of the articulated arm and separating a cap from an injection hole of the chemical drum; and a processor controlling operation of the articulated robot and the gripper module. The gripper module is connected to the cap in an aligned state by the articulated robot and enables the cap to be separated from the injection hole through rotation.

Description

Chemical drum coupler automatic fastening device and method {CHEMICAL DRUM COUPLER AUTOMATIC CONNECTING APPARATUS AND METHOD}

The following description relates to a coupler automatic fastening device for a chemical drum and a method therefor.

Various types of chemicals are used in semiconductor factories or chemical factories. Since these chemicals are harmful to the human body or the environment, they are stored and stored in a closed state in a chemical storage tank. Chemicals stored in chemical storage tanks are fed to the production facility through a coupler system.

On the other hand, the manufactured chemical is stored in the chemical drum and transported, and then supplied to the chemical storage tank in a sealed state through a coupler. A dip tube introduced into the chemical drum is installed at the inlet of the chemical drum, and the inlet may be opened and closed by a cap. Therefore, in order to connect the coupler to the chemical drum, after removing the cap from the inlet, a series of work is required to align and connect the coupler to the dip tube.

The above-mentioned background art is possessed or acquired by the inventor in the process of deriving the disclosure of the present application, and it cannot necessarily be said to be a known technology disclosed to the general public prior to the present application.

An object according to an embodiment is to provide a coupler automatic fastening device and method capable of automatically fastening a coupler to a chemical drum.

An object according to an embodiment is to provide an automatic coupler fastening device and method capable of preventing damage to the cap through precise alignment while automatically separating the cap for closing the inlet of the chemical drum.

An object according to an embodiment is to provide a coupler automatic fastening device and method capable of implementing flexible and accurate automatic fastening of the coupler by aligning the positions of the coupler through the articulated robot.

An automatic coupling device for a chemical drum according to an embodiment includes: a multi-joint robot including a support body and a multi-joint arm connected to the support body; a gripper module connected to the end of the articulated arm and configured to separate the cap from the inlet of the chemical drum; and a processor for controlling the operation of the articulated robot and the gripper module, wherein the gripper module is connected to the cap by the articulated robot in an aligned state, and the cap is separated from the inlet through a rotation operation can do.

The gripper module may include: a gripper for contacting an upper surface of the cap through a gripping surface, and rotating about a central axis penetrating the gripping surface to separate the cap from the inlet; and a gripper actuator for rotating the gripper through the central axis.

The gripper module may further include one or more grip parts connected to the gripping part to be disposed along the periphery of the gripping surface, and supporting a side surface of the cap in the process of separating the cap from the inlet.

The grip portion includes a pin housing; a pin finger connected to the pin housing so as to be movable in a direction parallel to the central axis and contacting a side surface of the cap during the separation process of the cap through a contact member formed at an end thereof; and an elastic member that connects the pin housing and the pin finger and applies an elastic force so that the contact member protrudes out of the pin housing.

When an external force is applied to the pin fingers in the direction of the pin housing, the contact member may be inserted into the pin housing.

The grip portion may be formed in plurality, and the plurality of grip portions may be symmetrically disposed along the circumference of the gripping surface.

The gripper may further include a suction pad installed on the gripping surface and configured to adsorb the cap to the gripping surface.

The gripping surface may have substantially the same shape as the top surface of the cap.

The gripper module further includes a tilt sensor for detecting an inclination of a top surface of the cap with respect to a reference plane, and the processor is configured such that the inclination of the gripper module is aligned with the cap based on a detection result of the inclination sensor. It can control the operation of the articulated robot.

and a vision sensor disposed adjacent to the gripper module and configured to detect a position of the cap, wherein the processor is configured to place the multi-joint joint so that the gripper module is positioned above the cap based on a detection result of the vision sensor. You can control the robot.

The articulated arm may have six different axes.

a coupler coupled to the inlet to discharge the chemical from the chemical drum; and a coupling module connected to the articulated robot, gripping the coupler, and coupling the coupler to the inlet.

According to an embodiment, a method for automatically fastening a coupler for a chemical drum includes detecting a position of a cap connected to an inlet of a chemical drum; adjusting the position of the gripper module for separating the cap from the inlet so that it is positioned at the upper end of the detected cap; measuring the inclination of the cap with respect to the reference plane through a tilt sensor; adjusting the position of the gripper module so that the inclination of the gripper module matches the measured inclination of the cap; and after fastening the gripper module to the cap, separating the cap from the inlet through a rotation operation.

The position of the gripper module may be controlled by an articulated robot having a plurality of different axes.

The coupler automatic fastening method may further include coupling a coupler connected to the storage tank to the inlet after separating the cap from the inlet.

Coupler automatic fastening device and method according to an embodiment may automatically perform a coupler fastening operation for discharging the chemical from the chemical drum.

Automatic coupler fastening apparatus and method according to an embodiment by precisely performing a cap removal and coupler fastening operation from a chemical drum, it is possible to prevent damage to the device and prevent the operator from exposure to danger.

Automatic coupler fastening apparatus and method according to an embodiment by aligning the position of the coupler through an articulated robot, it is possible to implement a flexible and accurate automatic fastening of the coupler.

1 is a perspective view of a coupler automatic fastening system of a chemical drum according to an embodiment.
2 is a perspective view of an automatic coupler fastening device according to an embodiment.
3 is a side view of an automatic coupler fastening device illustrating an operation process of an articulated robot according to an embodiment.
4A and 4B are perspective views of a gripper module and a coupling module according to an exemplary embodiment.
5A is a bottom perspective view of a gripper module according to an exemplary embodiment;
5B is a bottom view of a gripper module according to an embodiment.
6 is a cross-sectional view illustrating an operation process of a grip unit according to an exemplary embodiment.
7 is a perspective view illustrating a bottom surface of a coupling module according to an embodiment.
8 is an operation diagram illustrating an operation of detecting a cap of a chemical drum by a coupler automatic fastening device according to an embodiment;
9 is an operation diagram illustrating an operation of detecting the inclination of the cap with respect to the reference plane by the coupler automatic fastening device according to an embodiment.
10 is an operation diagram illustrating an operation in which a gripper module separates a cap from a chemical drum according to an exemplary embodiment.
11 is an operation diagram illustrating an operation of detecting a drum key code by an automatic coupler fastening device according to an embodiment.
12 is an operation diagram illustrating a process in which a coupling module aligns a coupler according to an embodiment.
13 is an operation diagram illustrating a process in which a coupling module connects a coupler to an inlet according to an embodiment.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. However, since various changes may be made to the embodiments, the scope of the patent application is not limited or limited by these embodiments. It should be understood that all modifications, equivalents and substitutes for the embodiments are included in the scope of the rights.

Terms used in the examples are used only for the purpose of description, and should not be construed as limiting. The singular expression includes the plural expression unless the context clearly dictates otherwise. In this document, terms such as “comprise” or “have” are intended to designate that a feature, number, step, action, component, part, or combination thereof described on the document is present, but one or more other features It is to be understood that this does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by those of ordinary skill in the art to which the embodiment belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in this document. does not

In addition, in the description with reference to the accompanying drawings, the same components are assigned the same reference numerals regardless of the reference numerals, and the overlapping description thereof will be omitted. In the description of the embodiment, if it is determined that a detailed description of a related known technology may unnecessarily obscure the gist of the embodiment, the detailed description thereof will be omitted.

In addition, in describing the components of the embodiment, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the elements from other elements, and the essence, order, or order of the elements are not limited by the terms. When it is described that a component is “connected”, “coupled” or “connected” to another component, the component may be directly connected or connected to the other component, but between each component another component It will be understood that may also be "connected", "coupled" or "connected".

Components included in one embodiment and components having a common function will be described using the same names in other embodiments. Unless otherwise stated, descriptions described in one embodiment may be applied to other embodiments as well, and detailed descriptions within the overlapping range will be omitted.

1 is a perspective view of a coupler automatic fastening system of a chemical drum according to an embodiment, FIG. 2 is a perspective view of an automatic coupler fastening device according to an embodiment, and FIG. 3 is an operation process of an articulated robot according to an embodiment It is a side view of an automatic coupler fastening device, in which FIGS. 4A and 4B are perspective views of a gripper module and a coupling module according to an embodiment, FIG. 5A is a bottom perspective view of the gripper module according to an embodiment, and FIG. 5B is one It is a bottom view of a gripper module according to an embodiment, FIG. 6 is a cross-sectional view illustrating an operation process of a grip part according to an embodiment, and FIG. 7 is a perspective view illustrating a bottom surface of the coupling module according to an embodiment.

1 to 7, the coupler automatic fastening system according to an embodiment may be used to automatically fasten the coupler 100 for discharging the chemical to the inlet (I) of the chemical drum (D).

The chemical drum (D) is formed in a cylindrical shape, and may store a chemical solution therein. The chemical solution stored in the chemical drum D may be used in a semiconductor or display manufacturing process. A dip tube extending to the bottom of the internal space may be embedded in the chemical drum (D). In this case, the chemical drum (D) may have an inlet (I) communicating with the upper inlet of the dip tube formed on the top surface. The injection hole (I) of the chemical drum (D) may be sealed through the cap (C), the cap (C) may be connected to engage the thread formed around the injection hole (I). The cap (C) may open or close the inlet (I) by rotating about the central axis of the inlet (I).

The coupler 100 may be coupled to the inlet (I) of the chemical drum (D) to communicate with the upper inlet of the dip tube. The coupler 100 may discharge the chemical solution inside the chemical drum (D) to the outside through the dip tube, or supply the chemical solution to the inside of the chemical drum (D). For example, the coupler 100 may discharge the chemical solution stored in the chemical drum D and supply it to the chemical solution storage tank of the semiconductor processing apparatus. A detailed description of the coupler 100 will be described later.

On the other hand, since the chemical solution stored inside the chemical drum (D) is harmful to the human body or the environment, it is necessary to discharge the chemical solution from the chemical drum (D) or prevent leakage and safety accidents in the process of supplying the chemical solution. . The coupler automatic fastening device 10 according to an embodiment performs the fastening operation of the coupler 100 to the target chemical drum D through an automated method, thereby improving safety between processes, and an accurate and precise coupler 100 Through the fastening operation, it is possible to prevent damage to equipment or the chemical drum (D) that may occur during the fastening process, and the risk of chemical leakage.

In one embodiment, the coupler automatic fastening system may automatically perform a series of operations for fastening the coupler 100 with respect to the chemical drum D to which the coupler 100 is to be fastened. Hereinafter, for convenience of description, the chemical drum D to which the coupler 100 is to be coupled is referred to as a 'target chemical drum (D)'. In one embodiment, the coupler automatic fastening system removes the cap (C) from the inlet (I) of the target chemical drum (D) to open and close the inlet (I), the coupler 100 to the open inlet (I) The fastening operation may be performed in an automated manner.

In addition, the coupler automatic fastening system separates the coupler 100 from the chemical drum (D) when it is necessary to replace the chemical drum (D) that has been used, and inserts the cap (C) into the inlet (I) of the chemical drum (D). A series of motions for mounting can also be performed automatically. In the process of replacing the used chemical drum (D), the operation of fastening the coupler 100 to the target chemical drum (D) is performed in the reverse order, so a description thereof will be omitted below.

The coupler automatic fastening system according to an embodiment may include a process chamber P, a pallet 20 and an automatic coupler fastening device 10 .

The process chamber P may provide a space in which the coupling operation of the coupler 100 to the chemical drum D is performed. In other words, a coupling or separation operation between the chemical drum D and the coupler 100 may be performed in the process chamber P. The process chamber (P) may block the internal space from the outside in case the chemical liquid inside the chemical drum (D) leaks.

The pallet 20 may seat the chemical drum D by supporting the lower end of the chemical drum D. In this case, one or more chemical drums D may be seated on the pallet 20 . The pallet 20 may be transferred into the process chamber P from the outside through an entrance formed in the process chamber P, or may be transferred from the inner space of the process chamber P to the outside. In other words, the pallet 20 may put the chemical drum D into the process chamber P, or the chemical drum D that has been used may be taken out of the process chamber P.

The coupler automatic fastening device 10 may fasten the coupler 100 to the inlet (I) of the chemical drum (D) so as to discharge the chemical from the chemical drum (D) put into the process chamber (P). In one embodiment, the coupler automatic fastening device 10 may perform a coupler 100 fastening operation when confirming that the input of the pallet 20 into the process chamber P is completed. The coupler automatic fastening device 10 includes a coupler 100 , an articulated robot 130 , a gripper module 110 , a coupling module 140 , a processor (not shown), a vision sensor 170 , and a tilt sensor 115 . and a keycode sensor 160 .

The coupler 100 may be coupled to the chemical drum (D) to discharge the chemical liquid inside the chemical drum (D). In one embodiment, the coupler 100 may include a coupler body 102 and a nozzle 101 protruding from an end of the coupler body 102 and inserted into the injection hole I. In a state where the coupler 100 is coupled to the inlet (I) of the chemical drum (D), the nozzle 101 communicates with the dip tube to flow the chemical liquid inside the chemical drum (D) to the coupler body (102). have. Although omitted from the drawing, the coupler body 102 may be connected to a supply pipe for flowing the chemical solution flowing into the outside, for example, to the chemical solution storage tank.

In one embodiment, the coupler 100 may be coupled in an aligned state with respect to the injection hole (I) of the chemical drum (D). For example, the coupler 100 is coupled to the inlet (I), that is, in a state in which the nozzle 101 is inserted into the inlet (I), it is necessary to maintain a sufficient sealing state so that the chemical does not leak. . For example, the nozzle 101 may be inserted into the inlet I in a manner that is fitted into the inlet of the dip tube, in this case, the nozzle 101 and the inlet of the dip tube may have substantially the same shape. Accordingly, in order for the nozzle 101 to be inserted into the injection hole I, the central axis A1 of the nozzle 101 needs to be aligned with the central axis of the injection hole I. For example, the nozzle 101 may be inserted into the injection hole I only in a state in which the central axis A1 coincides with the central axis of the injection hole I.

In one embodiment, the drum key code (K) may be disposed in the injection hole (I) of the chemical drum (D). For example, a dip tube may be mounted on the inlet (I) of the chemical drum (D), and a drum key code (K) may be formed on the top surface of the dip tube in which the inlet is formed. In an embodiment, the coupler 100 may include a coupler key code 105 (refer to FIG. 7 ) formed on the lower end surface, that is, the lower end surface of the coupler body 102 in which the nozzle 101 is formed. The coupler key code 105 may be engaged and fastened with the drum key code K in an angle aligned state. In this case, the coupler 100 may be completely coupled to the chemical drum (D) injection hole (I) only in a state in which the coupler key code 105 is engaged with the drum key code (K). Therefore, in order for the coupler 100 to be coupled to the injection port I of the chemical drum D, in addition to aligning the spatial position of the central axis A1 of the nozzle 101 with respect to the injection port I, the nozzle (101) A rotation angle based on the central axis A1, that is, an alignment process for matching the coupler key code 105 to the drum key code K may be required.

The articulated robot 130 may be installed in the process chamber P. The articulated robot 130 may adjust the positions and angles of the gripper module 110 and the coupling module 140 to be described later. The articulated robot 130 may include a guide rail 150 , a support body 120 , and an articulated arm.

The guide rail 150 may be disposed in the process chamber P. The guide rail 150 may be disposed along a moving direction toward the pallet 20 . The guide rail 150 may be, for example, an LM-GUIDE. In this case, the guide rail 150 may be disposed at a higher position than the pallet 20 with respect to the ground. In one embodiment, as shown in FIG. 2 , the support body 120 is movably connected to the guide rail 150 so as to move along the guide rail 150 . Accordingly, the position of the support body 120 relative to the pallet 20 can be adjusted. When a plurality of chemical drums (D) are seated on the pallet (20), the support body (120) moves along the guide rail (150), so that the coupler (100) is fastened to the target chemical drum (D) to a suitable position. can be moved On the other hand, unlike this, the support body 120 is not connected to the guide rail 150 and may be fixedly installed on the installation surface in the process chamber P.

The articulated arm is connected to the support body 120 and can move the gripper module 110 and the coupling module 140 to be described later. The articulated arm may have multiple degrees of freedom by including a plurality of different axes. For example, the articulated arm may have six different axes as shown in FIG. 2 . In one embodiment, the articulated arm may implement six-degree of freedom (6-DOE) motion. In one embodiment, the gripper module 110 and the coupling module 140, which will be described later, are adjusted in three-dimensional position (eg, x, y, z-axis direction) with respect to the ground through the operation of the articulated arm. , angles in three directions (eg roll, yaw, pitch) can be adjusted.

In one embodiment, the articulated robot 130 is the target chemical drum (D) seated on the pallet 20 through the movement of the support body 120 through the guide rail 150 and the movement of the multi-degree of freedom of the articulated arm. ) to align the coupler 100, and the aligned coupler 100 may be coupled to the inlet (I) of the chemical drum (D). In this case, the articulated robot 130 may adjust the position of the coupler 100 on the entire area of the pallet 20 . That is, no matter where the chemical drum (D) is disposed on the pallet 20, the articulated robot 130 can connect the coupler 100 to the target chemical drum (D). Therefore, when you want to replace the connection of the coupler 100 between the plurality of chemical drums (D) seated on the pallet (20), without the need to move the chemical drum (D) through the operation of the multi-joint robot 130, the chemical It is possible to move the coupler 100 between the drums (D).

In an embodiment, the gripper module 110 and the coupling module 140 may be connected to the articulated robot 130 . For example, a fixed frame may be connected to an end of the articulated arm, and each of the gripper module 110 and the coupling module 140 may be fixedly connected to the fixed frame. In this case, since the articulated robot 130 has multiple degrees of freedom, it can be switched to a mode using one of the gripper module 110 and the coupling module 140 through a simple rotation operation. For example, when removing the cap (C) from the inlet (I) of the chemical drum (D), the gripper module 110 is used as shown in FIG. 4A, and a coupler ( In the process of connecting 100), the mode may be switched so that the coupling module 140 is used as shown in FIG. 4B. In one embodiment, the central axis A2 of the gripper 111 of the gripper module 110 to be described later and the central axis A1 of the nozzle 101 of the coupler 100 gripped by the coupling module 140 are mutually exclusive. can be vertical. For example, in the process of using the gripper module 110 , the articulated robot 130 moves the central axis A2 of the gripper 111 toward the ground as shown in FIG. 4A , that is, the drum inlet (I). can be directed toward In this case, the central axis A1 of the nozzle 101 of the coupler 100 gripped by the coupling module 140 may face a direction parallel to the ground. On the other hand, in the process of using the coupling module 140, the articulated robot 130 moves the central axis A1 of the nozzle 101 gripped by the coupling module 140 to the ground, that is, the drum injection hole ( I), and in this case, the central axis A2 of the gripper 111 of the gripper module 110 may face a direction parallel to the ground.

In an embodiment, the gripper module 110 may separate the cap C from the injection hole I of the chemical drum D. The gripper module 110 is connected to the cap C in an aligned state by the articulated robot 130, and in the connected state, the cap C can be separated from the injection port I through a one-way rotation operation.

4A, 5A, 5B, and 6 , the gripper module 110 includes a gripper 111 for gripping the cap C, a grip portion 112 for supporting the side of the cap C, and a wave A gripper actuator 113 for rotating the branch 111 and a tilt sensor 115 may be included.

In a state in which the gripper module 110 is used as shown in FIG. 4A , the gripper 111 may include a gripping surface 1111 formed at the lower end thereof. The grip part 111 may contact the upper surface of the cap C through the grip surface 1111 . The gripper 111 may rotate about a central axis penetrating vertically through the center of the gripping surface 1111 . In one embodiment, based on the state in which the gripper 111 grips the upper end of the cap C, the gripper 111 rotates about the central axis to separate the cap C from the injection hole I. have.

In an embodiment, the gripping surface 1111 of the gripping part 111 for contacting the cap C may be formed to have substantially the same shape as the top surface of the cap C. For example, when the cap (C) has a circular top surface, the gripping surface 1111 may be formed in a circular shape having the same size as the top surface of the cap (C). In an embodiment, a suction pad may be installed on the gripping surface 1111 . The suction pad 114 may adsorb the upper surface of the cap C in the direction of the gripping surface 1111 , thereby attaching the cap C separated from the inlet I to the gripping surface 1111 . The suction pad 114 may be, for example, a vacuum pad that applies a negative pressure.

The grip part 112 may support the side surface of the cap C while the gripping surface 1111 is in contact with the top surface of the cap C to separate the cap C from the injection hole I. In one embodiment, a protrusion protruding in the circumferential direction may be formed on the side surface of the cap (C), and the grip part 112 transmits a force to the protrusion while supporting the side surface of the cap (C). can assist in the rotation of In one embodiment, the grip portion 112 may be formed of one or more. In this case, one or more grip parts 112 may be disposed along the circumference of the gripping surface 1111 as shown in FIG. 5B . For example, four grip parts 112 may be formed, and the four grip parts 112 may be disposed along the circumference of the gripping surface 1111 at intervals of 90 degrees.

The grip part 112 may include a pin housing 1121 , a pin finger 1122 , and an elastic member 1123 .

The pin housing 1121 may be disposed along the circumferential direction of the support surface. The pin housing may include an interior space 1124 . The pin fingers 1122 may be movably connected relative to the pin housing 1121 . In this case, the moving direction of the pin fingers 1122 may be parallel to the central axis. A contact member 1125 may be formed at the end of the pin finger 1122. The contact member 1125 may directly contact the side of the cap C during the separation process of the cap C with respect to the inlet I. can As shown in FIG. 6 , the contact member 1125 may protrude to the outside of the pin housing 1121 or retract into the inside of the pin housing 1121 according to a movement operation of the pin finger 1122 with respect to the pin housing 1121 .

Between the pin housing 1121 and the pin finger 1122, at least a portion of the pin finger 1122, for example, an elastic member 1123 that applies an elastic force to push the contact member 1125 toward the outside of the pin housing 1121. ) can be placed. Except for the elastic member 1123, when an external force parallel to the movement direction does not act on the pin finger 1122, the contact member 1125 is positioned below the gripping surface 1111 to the outside of the pin housing 1121. can protrude. On the other hand, when an external force in the direction of the pin housing 1121 is applied to the pin finger 1122, the pin finger 1122 compresses the elastic member 1123, and the contact member 1125 moves into the pin housing 1121. It can be moved to enter. According to such a structure, when the pin finger 1122 is positioned on the upper surface of the protrusion on the side of the cap C, the contact member ( Since the 1125 is drawn into the pin housing 1121 , the gripper 111 may contact the top surface of the cap C. In this case, when the gripper 111 rotates while in contact with the cap C, the contact member 1125 releases the contact state with the protrusion, and the empty space between the plurality of protrusions is formed by the elastic member 1123 . can be protruded into Therefore, the contact member 1125 can release the screw coupling of the cap (C) to the injection hole (I) according to the rotation of the grip portion 111 while engaged with the side surface of the protrusion.

The inclination sensor 115 may detect the inclination of the cap C with respect to the reference plane. For example, the sensor may be an optical sensor that irradiates light to the upper surface of the cap (C) and receives the reflected light to measure the inclination. In general, the cap (C) is fastened to the inlet (I) of the chemical drum (D) in a state parallel to the ground, but the external temperature change, the phase change of the internal chemical solution, the quality in the drum manufacturing process, There may be cases in which the cap (C) is fastened to the inlet (I) in a non-parallel state to the ground due to influences in the transport process. When the gripping surface 1111 of the gripping part 111 is in contact with the top surface of the cap C in a state that is not parallel to the top surface of the cap C, a forced rotational force greater than or equal to the reference force is required in the separation process of the cap C with respect to the inlet I This forced rotation may cause damage by applying excessive stress to the cap (C) and the inlet (I). The inclination sensor 115 is a reference plane, for example, by detecting the inclination of the cap (C) with respect to the ground, to provide information for aligning the grip portion 111 according to the inclination of the cap (C) to the processor described later. can

4B and 7 , the coupling module 140 may be coupled to the injection hole I of the chemical drum D by gripping the coupler 100 . The coupler 100 may be detachably mounted to the coupling module 140 . In one embodiment, the coupling module 140 aligns the position of the coupler 100 to the inlet (I) of the chemical drum (D) according to the operation of the articulated robot 130, and the coupler 100 to the nozzle ( 101) It is possible to align the coupler key code 105 with the drum key code K by rotating it based on the central axis A1.

In an embodiment, the coupling module 140 may include a coupler holder 141 , a coupler actuator 142 , and a power transmission unit 143 .

The coupler holder 141 may hold the outer surface of the coupler 100 . For example, the coupler holder 141 may include a hollow in which the coupler body 102 is fitted. In a state in which the coupler 100 is fitted in the hollow, the coupler holder 141 may support the coupler 100 by wrapping a portion of the outer circumferential surface of the coupler body 102 . In an embodiment, the coupler holder 141 is provided in the form of a clamp capable of opening and closing the hollow, thereby facilitating the coupler 100 mounting and separation. In a state in which the coupler holder 141 grips the outer surface of the coupler 100 , the nozzle 101 formed at the end of the coupler 100 may be exposed to the outside. In this case, the coupler 100 may be held by the coupler holder 141 to be able to rotate with respect to the central axis A1 of the nozzle 101 .

The coupler actuator 142 may provide rotational power. The rotational power of the coupler actuator 142 may be transmitted to the coupler 100 through the power transmission unit 143 . The power transmission unit 143 may rotate the coupler 100 by the coupler actuator 142 by connecting the coupler actuator 142 and the coupler 100 .

In one embodiment, the power transmission unit 143 is a driving gear 1431 connected to the rotation shaft of the coupler actuator 142 and a driven gear connected to the coupler 100 and receiving power from the driving gear 1431 to rotate. (1432). In this case, the driven gear 1432 may be formed with a fastener into which the coupler 100 is fitted. The driven gear 1432 may be rotated by being directly engaged with the driving gear 1431 as shown in FIG. 7 , but unlike this, power may be indirectly transmitted by another member. In an embodiment, the power transmission unit may further include a protective cover 1433 connected to surround the outer surfaces of the driving gear 1431 and the driven gear 1432 .

The coupler 100 may be rotated with respect to the central axis A1 of the nozzle 101 while being held by the coupler holder 141 by the power transmission unit. Since the coupler key code 105 matching the drum key code K is formed at the lower end of the coupler body 102, the coupler key code 105 is engaged with the drum key code K through the rotation of the coupler 100. It can be arranged so as to

The processor may control operation of the automatic coupling device. For example, the processor may control the operation of the articulated robot 130 or control the operation of each of the gripper module 110 or the coupling module 140 . The processor may control the operation of the automatic coupling device according to the input user's operation information, or may control the operation of the automatic coupling device according to a set program. For example, the processor controls the operation of the articulated robot 130 so that the central axis A2 of the gripping surface 1111 faces the chemical drum D when the cap C is mounted on the inlet I. And, after the cap (C) is separated from the injection port (I), the operation of the articulated robot 130 can be controlled so that the center of the nozzle 101 of the coupler 100 faces the chemical drum (D).

The vision sensor 170 may be disposed at an end of the articulated robot 130 . The vision sensor 170 may be disposed on a fixed frame to be adjacent to the gripper module 110 , for example. The vision sensor 170 may detect information about the target chemical drum D. For example, the vision sensor 170 may recognize information about the chemical drum D by scanning a barcode displayed on the upper surface of the chemical drum D. In an embodiment, the vision sensor 170 may detect the position of the cap C connected to the injection hole I of the chemical drum D by scanning the upper portion of the target chemical drum D. Information scanned by the vision sensor 170 may be provided to the processor.

The keycode sensor 160 may be mounted on the coupling module 140 . The keycode sensor 160 may recognize the drum keycode (K) located at the inlet (I) of the drum from which the cap (C) is removed. The keycode sensor 160 may be, for example, a vision sensor 170 . In a state where the coupling module 140 is located above the injection hole I, the key code sensor 160 recognizes the drum key code K, thereby providing information for aligning the coupler key code 105 to the processor. can do.

Hereinafter, the coupler 100 fastening process through the coupler automatic fastening device 10 according to an embodiment will be described.

8 is an operation diagram illustrating an operation of the automatic coupler fastening device 10 according to an embodiment to detect the cap C of the chemical drum D, and FIG. 9 is an automatic coupler fastening device 10 according to an embodiment. ) is an operation diagram illustrating an operation of detecting the inclination of the cap (C) with respect to the reference plane, and FIG. 10 is an operation of the gripper module 110 separating the cap (C) from the chemical drum (D) according to an embodiment 11 is an operation diagram showing an operation of the automatic coupler fastening device 10 according to an embodiment to detect the drum key code (K), and FIG. 12 is a coupling module 140 according to an embodiment. ) is an operational diagram illustrating a process of aligning the coupler 100, and FIG. 13 is an operational diagram illustrating a process in which the coupling module 140 connects the coupler 100 to the inlet (I) according to an embodiment.

Referring to FIG. 8 , the automatic coupler fastening device 10 connects the vision sensor 170 through the operation of the articulated robot 130 to the chemical drum (D) when the chemical drum (D) is put into the process chamber (P). can be moved to the upper part of the , and the chemical drum D can be scanned through the vision sensor 170 . The vision sensor 170 may recognize the barcode displayed on the upper end of the chemical drum D through scanning of the chemical drum D. In this case, the processor may determine whether the chemical drum D is a target to which the coupler 100 is fastened through the recognized barcode. In one embodiment, the vision sensor may detect the position of the cap (C) formed on the upper end of the chemical drum (D) through the scanning of (D). In this case, the processor may control the operation of the articulated robot 130 so that the gripper module 110 is positioned above the cap C based on the detection result of the vision sensor.

Referring to FIG. 9 , the coupler automatic fastening device 10 may detect the inclination of the cap C with respect to the reference plane before removing the cap C from the inlet I of the chemical drum D. The gripper module 110 may detect the inclination of the cap C with respect to the reference plane through the inclination sensor 115 in a state located above the cap C. The processor may align the position of the gripper module 110 to correspond to the cap C based on the information detected by the inclination sensor 115 . For example, the processor controls the operation of the articulated robot 130 so that the central axis A2 of the gripping surface 1111 of the gripper module 110 coincides with the central axis of the cap C, so that the gripper module 110 Position and tilt can be aligned.

Referring to FIG. 10 , the gripper module 110 may move to grip the cap C through the operation of the articulated robot 130 in a state aligned with the cap C. Since the gripper module 110 has a movement of multiple degrees of freedom by the articulated robot 130, the gripper module 110 has the central axis A2 of the gripping surface 1111 coincident with the central axis of the cap C. In the state, the gripping surface 1111 may be moved to contact the top surface of the cap (C). In this case, the gripper module 110 may rotate the gripper 111 along the central axis by the processor. The holding part 111 may be separated by rotating the cap C with respect to the injection hole I while rotating while the cap C is gripped. When the separation of the cap (C) from the inlet (I) is completed, the position of the gripper 111 may be adjusted to be spaced apart from the inlet (I) while holding the cap (C) through the suction pad.

11 and 12, when the cap (C) is removed from the inlet (I) of the chemical drum (D), the processor can use the coupling module 140 through the operation of the articulated robot 130 . state can be rotated. In other words, the processor may rotate the coupling module 140 in a state in which the central axis A1 of the nozzle 101 of the coupler 100 faces the injection port I through the operation of the articulated robot 130 .

When the cap (C) is removed from the inlet (I) of the chemical drum (D), the drum key code (K) formed on the dip tube may be exposed at the top of the drum. The exposed drum keycode K may be recognized by the keycode sensor 160 . The processor may control the operation of the coupling module 140 so that the coupler key code 105 can be connected to the drum key code K based on the information recognized by the key code sensor 160 . The coupling module 140 rotates the coupler 100 along the central axis A1 of the nozzle 101 as shown in FIG. It can be aligned at an angle that can be connected to K).

The processor may align the position of the coupler 100 to the inlet (I) in a coupling possible state by adjusting the position of the coupling module 140 through the operation of the articulated robot 130 . For example, the processor may match the central axis A1 of the nozzle 101 of the coupler 100 to the central axis of the injection hole I.

Referring to FIG. 13 , the processor performs the position and angle alignment of the coupler 100 with respect to the inlet (I) through the articulated robot 130 so that the coupler 100 can be coupled to the inlet (I). The coupling module 140 may be moved. For example, the articulated robot 130 may move the nozzle 101 in the injection port I direction while maintaining the state in which the central axis A1 of the nozzle 101 coincides with the central axis of the injection port I. .

When the coupling of the coupler 100 to the chemical drum D is completed, the chemical liquid inside the chemical drum D may be discharged to the outside through the coupler 100 . When the supply of the chemical solution is completed, the coupler automatic fastening device 10 performs the above-described operation in the reverse order, thereby separating the coupler 100 from the chemical drum (D), and holding the cap (C) gripped by the gripper 111 . After fastening to the inlet (I), it can return to the initial state.

Hereinafter, an automatic coupling method for a chemical drum according to an embodiment will be described. In describing the automatic coupling method for the chemical drum, the descriptions described above may be understood to be the same unless otherwise noted.

The automatic coupling method for the chemical drum according to an embodiment may be performed through operation of an articulated robot having a plurality of different axes. For example, the articulated robot may perform cap removal and coupling of a coupler to the chemical drum through movement of 6 degrees of freedom. The automatic coupling method according to an embodiment includes the steps of recognizing whether a chemical drum is inserted, recognizing a barcode of the chemical drum, measuring the position of the cap, moving the gripper module to the measured position of the cap, measuring the inclination of the cap, aligning the gripper module with the cap, separating the cap from the inlet through the gripper module, aligning the nozzle central axis of the coupler with the inlet, detecting the drum keycode; It may include aligning the coupler keycode to the drum keycode, and coupling the coupler to the inlet.

In the step of recognizing whether or not the chemical drum is inserted, it may be recognized whether the input of the chemical drum in the process chamber is completed. The chemical drum is seated on the pallet, and may be introduced into the process chamber through the transfer of the pallet. When the inlet of the process chamber is closed after the pallet transfer is completed, it may be recognized that the input of the chemical drum is complete.

The step of recognizing the barcode of the chemical drum may be performed through a vision sensor. The vision sensor can be mounted on the articulated robot, and the barcode can be recognized while moving the upper part of the chemical drum by the articulated robot. If the recognized barcode is confirmed to be correct, a later step may be performed. On the other hand, if the recognized barcode does not match the information of the set barcode, the coupler automatic fastening process may be stopped.

Measuring the position of the cap may be performed through a vision sensor. The vision sensor may detect the position of the cap located on the upper part of the chemical drum.

In the step of moving the gripper module to the measured position of the cap, the gripper module for removing the cap from the inlet of the chemical drum may be moved to the upper part of the cap. The gripper module may be connected to the articulated robot, and according to the operation of the articulated robot, the position of the gripper module may be adjusted to a usable state, for example, a state connectable to a cap.

Measuring the inclination of the cap may be performed through a tilt sensor provided in the gripper module. The inclination sensor may detect the inclination of the cap with respect to the reference plane by irradiating light to the cap and receiving the reflected light.

In the step of aligning the gripper module with respect to the cap, the inclination of the gripper module may be adjusted to correspond to the inclination of the cap. The articulated robot can align the gripper module in a state where it can be connected to the cap by adjusting the inclination of the gripper module with respect to the ground. The articulated robot allows the gripper module to contact the cap while aligned with the cap.

In the step of removing the cap, the cap may be rotated with respect to the inlet through the rotation operation of the gripper module. Since the cap is screwed to the inlet, the cap can be separated from the inlet through rotation of the cap. The gripper module may be spaced apart from the inlet while gripping the cap separated from the inlet.

In the step of aligning the nozzle central axis of the coupler with respect to the inlet, the coupling module may be switched to a usable state. For example, the articulated robot may rotate a coupling module that grips the coupler so that the nozzle center axis of the coupler faces the chemical drum. The articulated robot can align the central axis of the nozzle of the coupler with the central axis of the inlet. For example, the position of the coupling module may be aligned so that the central axis of the nozzle of the coupler coincides with the central axis of the inlet.

In the step of detecting the drum key code, the drum key code exposed to the outside as the cap is removed may be detected. The drum key code may be formed, for example, on the top surface of the dip tube installed in the inlet.

In the step of aligning the coupler keycode with the drum keycode, the coupler may be rotated through the central axis of the nozzle so that the coupler keycode can be engaged with the drum keycode. Rotation of the coupler may be performed by a coupling module that grips the coupler.

In the coupling of the coupler to the inlet, the nozzle may be inserted into the inlet of the dip tube by moving the coupler aligned with the inlet in the direction of the inlet. When the coupling of the coupler to the inlet is completed, the chemical solution inside the chemical drum may be transferred to the storage tank through the coupler.

As described above, although the embodiments have been described with reference to the limited drawings, those skilled in the art may apply various technical modifications and variations based on the above-described contents. For example, the described techniques are performed in an order different from the described method, and/or the described components of the system, structure, apparatus, circuit, etc. are combined or combined in a different form than the described method, or other components Or substituted or substituted by equivalents may achieve an appropriate result.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

C: process chamber
D: chemical drum
10: coupler automatic fastening device
100: coupler
110: gripper module
130: articulated robot
140: coupling module

Claims (15)

In the automatic coupling device of the chemical drum,
a multi-joint robot comprising a support body and an articulated arm connected to the support body;
a gripper module connected to the end of the articulated arm and configured to separate the cap from the inlet of the chemical drum; and
A processor for controlling the operation of the articulated robot and the gripper module,
The gripper module is connected to the cap in an aligned state by the articulated robot, and separates the cap from the inlet through a rotational operation. According to claim 1,
The gripper module comprises:
a gripper that contacts the upper surface of the cap through a gripping surface and rotates about a central axis penetrating the gripping surface to separate the cap from the inlet; and
and a gripper actuator for rotating the gripper through the central axis. 3. The method of claim 2,
The gripper module comprises:
The automatic coupling device of the chemical drum, which is connected to the grip part so as to be disposed along the periphery of the gripping surface, and further includes one or more grip parts for supporting a side surface of the cap in the process of separating the cap from the inlet. 4. The method of claim 3,
The grip part,
pin housing;
a pin finger connected to the pin housing so as to be movable in a direction parallel to the central axis and contacting a side surface of the cap during the separation process of the cap through a contact member formed at an end thereof; and
and an elastic member connecting the pin housing and the pin finger and applying an elastic force so that the contact member protrudes out of the pin housing. 5. The method of claim 4,
When an external force is applied to the pin finger in the direction of the pin housing,
The contact member is insertable into the pin housing, automatic coupling device of the chemical drum. 4. The method of claim 3,
The grip portion is formed in plurality,
The automatic coupling device of the chemical drum, wherein the plurality of grip parts are symmetrically disposed along the circumference of the gripping surface. 3. The method of claim 2,
The grip part,
Installed on the gripping surface, the automatic coupling device of the chemical drum further comprising a suction pad for adsorbing the cap to the gripping surface. 3. The method of claim 2,
and the gripping surface has substantially the same shape as the top surface of the cap. 3. The method of claim 2,
The gripper module further includes a tilt sensor for detecting the tilt of the top surface of the cap with respect to the reference surface,
The processor, based on the detection result of the inclination sensor, controls the operation of the articulated robot so that the inclination of the gripper module is aligned with the cap, the automatic coupling device of the chemical drum. According to claim 1,
and a vision sensor disposed adjacent to the gripper module and configured to detect a position of the cap,
and the processor controls the articulated robot so that the gripper module is positioned above the cap based on the detection result of the vision sensor. According to claim 1,
and the articulated arm has six different axes. According to claim 1,
a coupler coupled to the inlet to discharge the chemical from the chemical drum; and
The automatic coupling device of the chemical drum, connected to the articulated robot, and further comprising a coupling module for coupling the coupler to the inlet by gripping the coupler. In the automatic coupler fastening method for the chemical drum,
detecting the position of the cap connected to the inlet of the chemical drum;
adjusting the position of the gripper module for separating the cap from the inlet so that it is positioned at the upper end of the detected cap;
measuring the inclination of the cap with respect to the reference plane through the inclination sensor;
adjusting the position of the gripper module so that the inclination of the gripper module matches the measured inclination of the cap; and
and, after fastening the gripper module to the cap, separating the cap from the inlet through a rotational operation. 14. The method of claim 13,
The gripper module, the position of which is controlled through an articulated robot having a plurality of different axes, is an automatic coupler fastening method for a chemical drum. 14. The method of claim 13,
After separating the cap from the inlet,
Further comprising the step of coupling a coupler connected to the storage tank to the inlet, the automatic coupler fastening method for the chemical drum.

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