KR102656432B1 - Coupler automatic connecting system - Google Patents

Abstract

An automatic coupling system that facilitates maintenance of robot modules is disclosed. The automatic coupling system is coupled to a chemical drum and has a coupler for transferring the chemical liquid from the chemical drum, an end effector to which the coupler is coupled, and a plurality of different axes to enable multiple degrees of freedom movement, and the end effector at the end. It is configured to include a robot module including a multi-joint arm to which is connected, and a control unit that controls the operation of the robot module and adjusts the position and posture of the end effector.

Description

Automatic coupling system {COUPLER AUTOMATIC CONNECTING SYSTEM}

The following description relates to an automatic coupling system that controls a robot module that automatically couples a coupler to a chemical drum.

Various types of chemicals are used in the manufacturing process of semiconductor devices. Since most of these chemicals are harmful to the environment and the human body, it is necessary to minimize leakage of chemicals to the outside at all stages and to be careful when handling them. For example, the chemical solution is stored and stored in a sealed state in a chemical drum. A coupling system (ACQC, automatic clean quick coupler unit, automatic cleaning chemical transfer unit) is used to transfer and supply the chemical liquid stored in the chemical drum.

Meanwhile, a chemical drum has a dip tube installed in the inlet, and a cap to open and close the inlet. In order to supply a chemical liquid from a chemical drum to a process chamber, a series of operations are performed: removing the cap from the inlet, aligning the coupler with the inlet and dip tube, and then connecting them. For this purpose, a robot module is used to open and close the cap of the chemical drum and align and fasten the coupler.

The above-mentioned background technology is possessed or acquired by the inventor in the process of deriving the disclosure of the present application, and cannot necessarily be said to be known technology disclosed to the general public before the present application.

The purpose of the embodiment is to provide an automatic coupling system that facilitates maintenance work on the robot module.

The problems to be solved in the embodiments are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

An automatic coupling system according to an embodiment will be described.

The automatic coupling system is coupled to a chemical drum and has a coupler for transferring the chemical liquid from the chemical drum, an end effector to which the coupler is coupled, and a plurality of different axes to enable multiple degrees of freedom movement, and the end effector at the end. It is configured to include a robot module including a multi-joint arm to which is connected, and a control unit that controls the operation of the robot module and adjusts the position and posture of the end effector.

According to embodiments, the automatic coupling system can adjust the position and posture of the end effector to facilitate maintenance work by the operator.

The effects of the automatic coupling system according to the embodiment are not limited to those mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description below.

1 is a schematic diagram of an automatic coupling system according to an embodiment.
FIG. 2 is a perspective view explaining the operation of the automatic coupling system of FIG. 1.
FIG. 3 is a block diagram illustrating the automatic coupling system of FIG. 1.

Hereinafter, embodiments will be described in detail with reference to the attached drawings. However, various changes can be made to the embodiments, so the scope of the patent application is not limited or limited by these embodiments. It should be understood that all changes, equivalents, or substitutes for the embodiments are included in the scope of rights.

The terms used in the examples are for descriptive purposes only and should not be construed as limiting. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by a person of ordinary skill in the technical field to which the embodiments belong. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.

In addition, when describing with reference to the accompanying drawings, identical components will be assigned the same reference numerals regardless of the reference numerals, and overlapping descriptions thereof will be omitted. In describing the embodiments, if it is determined that detailed descriptions of related known technologies may unnecessarily obscure the gist of the embodiments, the detailed descriptions are omitted.

Additionally, in describing the components of the embodiment, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the component from other components, and the nature, sequence, or order of the component is not limited by the term. When a component is described as being "connected," "coupled," or "connected" to another component, that component may be directly connected or connected to that other component, but there is no need for another component between each component. It should be understood that may be “connected,” “combined,” or “connected.”

Components included in one embodiment and components including common functions will be described using the same names in other embodiments. Unless stated to the contrary, the description given in one embodiment may be applied to other embodiments, and detailed description will be omitted to the extent of overlap.

Hereinafter, the automatic coupling system 100 according to embodiments will be described with reference to FIGS. 1 to 3. For reference, FIG. 1 is a perspective view of an automatic coupling system 100 according to an embodiment, and FIG. 2 is a perspective view explaining the operation of the automatic coupling system 100 of FIG. 1. And FIG. 3 is a block diagram illustrating the control unit 130 in the automatic coupling system 100 of FIG. 1.

Referring to the drawing, the automatic coupling system 100 includes a pallet 110 on which the chemical drum 10 is mounted, a robot module 120 for fastening the coupler 20 to the chemical drum 10, and a robot module. It is configured to include a control unit 130 that controls 120.

The chemical drum 10 stores a chemical liquid therein and is formed, for example, in a cylindrical shape. The chemical liquid stored in the chemical drum 10 may be a chemical liquid used in a semiconductor or display manufacturing process. In addition, the chemical drum 10 may have an inlet (not shown) formed on the upper surface into which the coupler 20 is fastened, and may be provided with a cap 11 to open and close the inlet. Additionally, the chemical drum 10 may be provided with a dip tube (not shown) extending from the injection port to the bottom of the internal space.

The coupler 20 is coupled to the chemical drum 10 to supply the chemical solution into the chemical drum 10 or discharge it to the outside. Here, the coupler 20 has a structure sealed to the chemical drum 10 to prevent the chemical liquid from leaking to the outside during the transfer process.

In addition, the automatic coupling system 100 transfers the chemical liquid by aligning and coupling the coupler 20 to the chemical drum 10, and separates the coupler 20 from the chemical drum 10 when the chemical liquid transfer is completed. Performed automatically.

The pallet 110 is equipped with a plurality of chemical drums 10, and the mounted chemical drums 10 are brought into the process chamber P or taken out. For example, the pallet 110 is equipped with four chemical drums 10, and the four chemical drums 10 may be arranged in a square shape. However, in the drawing, it is illustrated that four chemical drums 10 are mounted on the pallet 110, but this is only for convenience of explanation, and the number of chemical drums 10 mounted on the pallet 110 varies substantially. can be changed.

Here, a detection unit (not shown) that can detect that the pallet 110 has been introduced into the process chamber (P) may be provided inside the process chamber (P).

The robot module 120 is provided inside the process chamber (P) and automatically aligns and fastens the coupler 20 to the chemical drum 10.

The robot module 120 includes a base 123, an articulated arm 121, and an end effector 122. Additionally, the robot module 120 may be equipped with a vision sensor 223 to align the end effector 122 with respect to the chemical drum 10.

The base 123 is installed at a fixed position inside the process chamber P, and may be equipped with a device such as a motor to operate the articulated arm 121 and the end effector 122. However, the base 123 may not be fixedly installed, but may be provided to move forward and backward or linearly with respect to the chemical drum 10.

The multi-joint arm 121 has one end provided at the base 123 and an end effector 122 at the other end. The multi-joint arm 121 has six different axes and is configured to enable six-degree of freedom (6-DOE) movement. In addition, the multi-joint arm 121 can adjust the three-dimensional position (e.g., x, y, and z axis directions) and angles in three directions (e.g., roll, yaw, pitch) of the end effector 122. there is.

Here, since the articulated arm 121 is capable of operating at 6 degrees of freedom, the end effector 122 can be aligned with the chemical drum 10 and the angle can be changed by simply rotating the end effector 122, and the gripper The positions of the unit 221 and the coupling unit 222 can be changed so that they can be used.

The end effector 122 includes a gripper unit 221 that separates or fastens the cap 11 from the chemical drum 10, and a coupling unit 222 that aligns and couples the coupler 20 to the chemical drum 10. ) includes.

The vision sensor 223 determines whether the chemical drum 10 is the object to which the coupler 20 is to be fastened. For example, the vision sensor 223 may be a camera or sensor capable of recognizing the key code of the chemical drum 10. And the robot module 120 recognizes the key code of the chemical drum 10 through the vision sensor 223 and compares it with the key code of the coupler 20. If the two key codes match, the end effector 122 Separate the cap 11 from the chemical drum 10 and fasten the coupler 20.

The control unit 130 controls the operation of the robot module 120 and adjusts the position and posture of the end effector 122. Additionally, the control unit 130 changes the position and posture of the end effector 122 when maintenance work on the end effector 122 is required.

The control unit 130 includes an abnormality detection unit 131 that detects whether an abnormality occurs in the end effector 122 and the location of the abnormality, and a detection unit 132 that detects the position or posture of the end effector 122. Additionally, the control unit 130 may be provided with an input unit 133 through which an operator can input the position and posture of the end effector 122.

The abnormality detection unit 131 detects whether an abnormality occurs in the robot module 120 or the end effector 122 or the location of the abnormality. Alternatively, the abnormality detection unit 131 may detect when interference occurs between the robot module 120 and the chemical transfer hose 21.

Here, the chemical transfer hose 21 is connected to the coupler 20 and extends to the outside of the process chamber (P). However, while the robot module 120 is operating, the position of the end effector 122 changes, and in particular, during the rotation of the end effector 122, the chemical transfer hose 21 is twisted or the chemical transfer hose 21 ) may interfere with the movement line of the articulated arm 121 and the end effector 122.

In this way, the abnormality detection unit 131 can detect that an abnormality occurs in the operation of the robot module 120 or the end effector 122 due to the chemical transfer hose 21. When an abnormality is detected by the abnormality detection unit 131, the control unit 130 adjusts the position and posture of the end effector 122 to perform maintenance work.

The control unit 130 may be provided with a notification unit 134 so that when an abnormality is detected in the abnormality detection unit 131, it can be notified to an operator or the like.

The detection unit 132 can detect the position and posture of the end effector 122. Alternatively, the detection unit 132 may detect the location of the worker performing maintenance work on the end effector 122 and transmit this to the control unit 130. That is, the control unit 130 adjusts the position and posture of the end effector 122 so that maintenance work on the end effector 122 is convenient with respect to the operator's position detected through the detection unit 132.

Alternatively, the control unit 130 may adjust the position and posture of the end effector 122 according to the value input from the input unit 133. Here, the input unit 133 inputs the position and posture of the end effector 122, and the control unit 130 adjusts the position and posture of the end effector 122 according to the input values. Alternatively, the operator's position may be input to the input unit 133, and the control unit 130 may adjust the position and posture of the end effector 122 to correspond to the input operator's position.

Meanwhile, in the above-described embodiment, when a problem occurs in the robot module 120 or the end effector 122, the control unit 130 adjusts the end effector 122 to a position where maintenance work is possible. However, even when no problem occurs in the robot module 120, it may be possible for the operator to adjust the end effector 122 to a position where maintenance work is possible or to a desired position through the control unit 130, as needed. Additionally, even during regular maintenance work on the robot module 120, the control unit 130 can adjust the position and posture of the end effector 122.

Below, the operation of the automatic coupling system 100 will be described.

The pallet 110 is introduced into the process chamber (P) with a plurality of chemical drums 10 mounted thereon.

When the pallet 110 is inserted, the robot module 120 recognizes this and moves the end effector 122 to the upper part of the chemical drum 10.

And the vision sensor 223 recognizes the key code of the chemical drum 10 and compares it with the key code of the coupler 20, and if the two key codes match, the gripper unit 221 removes the cap ( 11) Separate.

Next, the robot module 120 rotates the end effector 122 so that the coupling unit 222 faces the chemical drum 10, and fastens the coupler 20 to the chemical drum 10.

When the coupler 20 is fastened to the chemical drum 10, the chemical liquid inside the chemical drum 10 flows out and is transported to the outside through the coupler 20.

And when the transfer of the chemical liquid from the chemical drum 10 is completed, the above-described chemical transfer operation is repeatedly performed on the plurality of chemical drums 10 on the pallet 110.

Next, when the chemical transfer is completed, the above-described chemical transfer operation is performed in reverse order to separate the coupler 20 from the chemical drum 10, fasten the cap 11 to the chemical drum 10, and then connect the robot module. (120) returns to the initial position.

Meanwhile, when a problem occurs in the robot module 120 or regular maintenance work is required, the control unit 130 adjusts the position and posture of the end effector 122.

The control unit 130 calculates the position and posture of the end effector 122 to enable maintenance work on the part where the abnormality was detected, according to the value detected by the abnormality detection unit 131, and adjusts the end effector 122 accordingly. Adjust the position and posture. Alternatively, the control unit 130 calculates the position and posture of the end effector 122 to enable maintenance work based on the position of the end effector 122 detected by the detection unit 132 or the position of the operator, and calculates the position and posture of the end effector 122 to enable maintenance work. It can be adjusted accordingly. Alternatively, the control unit 130 may adjust the position and posture of the end effector 122 according to the position of the end effector 122 input from the input unit 133 or the position of the operator.

Here, the position of the end effector 122 may be adjusted inside the process chamber (P) or outside the process chamber (P). For example, the control unit 130 may adjust the position of the end effector 122 on the area on the pallet 110 or on the area outside the pallet 110. Alternatively, the control unit 130 may adjust the position of the end effector 122 outside the process chamber P (eg, near the entrance). This is just for convenience of explanation, and the control unit 130 can adjust the position of the end effector 122 to substantially various positions to facilitate the operator's work.

Additionally, the posture of the end effector 122 is adjusted to a posture that facilitates the operator's work. In this case, the posture of the end effector 122 is opposite to the posture during work of separating/attaching the cap 11 to the chemical drum 10 or coupling the coupler 20, and the posture of the gripper unit 221 or the coupler is Ring unit 222 faces upward. For example, the end effector 122 causes the gripper unit 221 or the coupling unit 222 to face the front of the worker, and the posture is adjusted to a height corresponding to the worker's eye level. Here, “height corresponding to the worker's eye level” does not only mean that the end effector 122 is located at the same height as the worker's eyes, but is lower than the eyes so that the worker can work while lowering his head or looking down. It will also include the height located at.

By adjusting the posture of the end effector 122 in this way, the worker can maintain the upper and lower parts of the end effector 122 in a comfortable posture. In addition, by adjusting the posture of the end effector 122, the end effector 122 can be viewed from the outside of the process chamber (P) where the drum is located through a transparent or translucent window provided in the process chamber (P), allowing the operator to perform the process. The state of the end effector 122 can be easily checked from outside the chamber P. Ultimately, after the worker determines the state of the end effector 122 from outside the process chamber (P) where chemicals are blocked, the worker adjusts the posture of the end effector 122 to a position that is comfortable for work and safe from chemicals to ensure the worker's safety. can be guaranteed.

Although the embodiments have been described with limited drawings as described above, those skilled in the art can apply various technical modifications and variations based on the above. For example, the described techniques are performed in a different order than the described method, and/or components of the described system, structure, device, circuit, etc. are combined or combined in a different form than the described method, or other components are used. Alternatively, appropriate results may be achieved even if substituted or substituted by an equivalent.

Therefore, other implementations, other embodiments, and equivalents of the claims also fall within the scope of the following claims.

10: Chemical drum
11: cap
20: Coupler
21: Chemical transfer hose
100: automatic coupling system
110: palette
120: Robot module
121: Multi-joint arm
122: End effector
221: Gripper unit
222: Coupling unit
223: Vision sensor
123: base
130: control unit
131: Abnormality detection unit
132: detection unit
133: input unit
134: Notification unit

Claims (9)

In the automatic coupling system for chemical drums,
A coupler coupled to the chemical drum to transfer the chemical solution from the chemical drum;
a robot module including an end effector to which the coupler is coupled, a multi-joint arm having a plurality of different axes to enable movement in multiple degrees of freedom, and to which the end effector is connected to an end; and
A control unit that controls the operation of the robot module, directs the end effector toward the front of the worker, and adjusts the position and posture of the end effector to a height corresponding to the worker's eye level;
Including,
The control unit,
An abnormality detection unit that detects whether an abnormality occurs in the robot module and the location of the abnormality; and
A detection unit that detects the position of the end effector;
Automatic coupling system including.
delete According to paragraph 1,
The multi-joint arm is provided with six different axes to enable movement in six degrees of freedom,
The end effector is an automatic coupling system including a gripper unit that separates and fastens the cap from the chemical drum, and a coupling unit that grips the coupler and couples it to the chemical drum.
According to paragraph 3,
The control unit is an automatic coupling system that adjusts the position of the end effector on an area corresponding to a pallet on which the chemical drum is mounted or an area outside the pallet.
delete According to paragraph 3,
The detection unit detects the position of the end effector or the position of the operator,
An automatic coupling system in which the control unit adjusts the position and posture of the end effector according to the results detected by the sensor.
According to paragraph 3,
The control unit further includes an input unit capable of inputting input from an operator,
An automatic coupling system in which the control unit adjusts the position and posture of the end effector according to the results input from the input unit.
In clause 7,
The input unit is an automatic coupling system in which a position to which the end effector is to be moved is input, or a position of an operator is input.
According to paragraph 3,
The automatic coupling system wherein the control unit further includes a notification unit that notifies the operator of the results detected by the abnormality detection unit.

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