KR102454759B1 - Dispenser using magnetic seal and dispensing system with the same - Google Patents

Abstract

The present invention relates to a precision dispenser capable of responding to a vacuum environment by using a magnetic fluid seal and a dispensing system including the same. The precision dispenser capable of responding to a vacuum environment by using a magnetic fluid seal according to the present invention comprises: a discharge unit which is disposed inside a vacuum chamber forming a place where a dispensing process is performed in a vacuum environment and through which fluid is discharged; a driving unit which is spaced apart from the discharge unit and disposed in an external atmospheric environment of the vacuum chamber; and a magnetic fluid seal which is disposed between the discharge unit and the driving unit to detachably connect the discharge unit and the driving unit.

Description

A precision dispenser capable of responding to a vacuum environment using a magnetic fluid seal and a dispensing system including the same

The present invention relates to a precision dispenser capable of responding to a vacuum environment using a magnetic fluid seal and a dispensing system including the same, and more particularly, to prevent damage to a driving unit and to be used in a vacuum environment, disassemble, assemble, and maintain It relates to a precision dispenser capable of responding to a vacuum environment using a magnetic fluid seal, which can be much easier than the prior art, and a dispensing system including the same.

Active attempts are being made on various materials for the manufacture of electric/electronic components for continuous thinning and weight reduction. Accordingly, the demand for a dispensing process in a vacuum environment outside the atmospheric pressure environment is increasing.

Referring to FIG. 1 , the dispenser according to the prior art is roughly divided into a discharging unit 10 and a driving unit 20 .

A rotor 11 , which is a metal rotor, is disposed in the discharge part 10 , and a driving part 21 made of a combination of a precision motor, a gearbox and an encoder is provided in the driving part 20 .

In this prior art, since the rotor 11, which is a metal rotor, rotates and controls a precise discharge amount, the driving part 21 made of a combination of a precision motor, a gearbox, and an encoder is connected and rotated together.

Accordingly, a liquid lubricant is inevitably injected into the driving part 21 , but when the driving unit 20 is used in a vacuum environment, there is a problem in that the driving part 21 is damaged because the lubricant escapes.

Korean Intellectual Property Office Application No. 10-2008-0012465 Korean Intellectual Property Office Application No. 10-2016-0088325 Korean Intellectual Property Office Application No. 10-2019-0132175 Korean Intellectual Property Office Application No. 20-1996-0048477

An object of the present invention is to prevent damage to the driving unit and to use it in a vacuum environment, and to make disassembly and assembly and maintenance much easier than in the prior art, a precision dispenser capable of responding to a vacuum environment using a magnetic fluid seal and a dispenser including the same To provide a fencing system.

The object is, the dispensing (Dispensing) in a vacuum environment is disposed in the interior of the vacuum chamber to form a place where the process is performed, the discharge unit for discharging the fluid; a driving unit spaced apart from the discharge unit and disposed in an external atmospheric environment of the vacuum chamber; and a magnetic fluid seal that detachably connects the discharge unit and the driving unit between the discharge unit and the driving unit. do.

The discharge unit may include: a discharge housing; a discharge head coupled to the discharge housing and having a discharge port formed at an end thereof; a rotor as a metal rotor that is rotatably disposed in the discharge housing and discharges the liquid to the discharge port while rotating while rotating; and a stator as an elastomer stator which is disposed outside the rotor in the radial direction in the discharge housing and allows the rotational movement of the rotor.

The driving unit includes a precision motor, and the magnetic fluid seal includes: a fluid seal body coupled to a wall of the vacuum chamber; and a magnetic body provided in the fluid seal body and magnetically connecting the motor and the rotor, and a removable cap may be coupled to an end of the driving unit.

The above object is, a vacuum chamber to form a place where the dispensing process is performed in a vacuum environment; A discharge unit disposed inside the vacuum chamber, a driving unit disposed to be spaced apart from the discharge unit and disposed in an external atmospheric environment of the vacuum chamber, and the discharge unit and the driving unit may be separated between the discharge unit and the driving unit Precision dispenser having a magnetic fluid seal (magnetic seal) to connect; and a fluid supply line for supplying a fluid from the outside of the vacuum chamber to the discharge part area of the precision dispenser through the inside of the vacuum chamber, wherein the driving part includes a precision motor, and the magnetic fluid seal comprises: , a fluid seal body coupled to the wall of the vacuum chamber; and a magnetic body provided in the fluid seal body to magnetically connect the motor and the rotor, wherein a removable cap is coupled to an end of the driving unit.

The vacuum chamber may further include a controller disposed outside the vacuum chamber, connected to the driving unit of the precision dispenser outside the vacuum chamber, and controlling an operation of the precision dispenser.

According to the present invention, it is possible to use in a vacuum environment while preventing damage to the driving unit, and there is an effect that disassembly and assembly and maintenance can be much easier than in the prior art.

1 is a structural diagram of a general dispenser.
2 is a structural diagram of a dispensing system according to an embodiment of the present invention.
3 is an enlarged view of the precision dispenser shown in FIG.
FIG. 4 is a partially exploded view of FIG. 3 .
FIG. 5 is a perspective view of FIG. 4 ;
6 and 7 are views illustrating FIG. 5 from different angles.
FIG. 8 is a cross-sectional view taken along line AA of FIG. 4 .
9 is a control block diagram of a dispensing system according to an embodiment of the present invention.
10 is a block diagram of a controller in a dispensing system according to another embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, the embodiments of the present invention will be described in detail so that those of ordinary skill in the art can easily implement them.

However, since the description of the present invention is merely an embodiment for structural or functional description, the scope of the present invention should not be construed as being limited by the embodiment described in the text.

For example, the embodiment is capable of various changes and may have various forms, so it should be understood that the scope of the present invention includes equivalents capable of realizing the technical idea.

In addition, the object or effect presented in the present invention does not mean that a specific embodiment should include all of them or only such effects, so the scope of the present invention should not be construed as being limited thereby.

In the present specification, the present embodiment is provided to complete the disclosure of the present invention, and to completely inform those of ordinary skill in the art to the scope of the present invention. And the invention is only defined by the scope of the claims.

Thus, in some embodiments, well-known components, well-known operations, and well-known techniques have not been specifically described to avoid obscuring the present invention.

Meanwhile, the meaning of the terms described in the present invention is not limited to the dictionary meaning, and should be understood as follows.

When a component is referred to as being “connected to” another component, it should be understood that the component may be directly connected to the other component, but another component may exist in between. On the other hand, when it is mentioned that a certain element is "directly connected" to another element, it should be understood that the other element does not exist in the middle. Meanwhile, other expressions describing the relationship between elements, that is, “between” and “immediately between” or “neighboring to” and “directly adjacent to”, etc., should be interpreted similarly.

The singular expression is to be understood as including the plural expression unless the context clearly dictates otherwise, and terms such as "comprises" or "have" refer to the specified feature, number, step, action, component, part or these It is intended to indicate that a combination exists, and it is to be understood that it does not preclude the possibility of the existence or addition of one or more other features or numbers, steps, operations, components, parts, or combinations thereof.

All terms used herein have the same meanings as commonly understood by those of ordinary skill in the art to which the present invention belongs, unless otherwise defined.

Terms defined in the dictionary should be interpreted as being consistent with the meaning of the context of the related art, and cannot be interpreted as having an ideal or excessively formal meaning unless explicitly defined in the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the description of the embodiment, the same reference numerals are assigned to the same components, and descriptions of the same reference numerals will be omitted in some cases.

(one embodiment)

Figure 2 is a structural diagram of a dispensing system according to an embodiment of the present invention, Figure 3 is an enlarged view of the precision dispenser shown in Figure 2, Figure 4 is a partial exploded view of Figure 3, Figure 5 is a perspective view of Figure 4, Figure 6 and 7 are views showing FIG. 5 from different angles, FIG. 8 is a cross-sectional view taken along line A-A of FIG. 4, and FIG. 9 is a control block diagram of a dispensing system according to an embodiment of the present invention.

Referring to these drawings, the present invention can be used in a vacuum environment while preventing damage to the driving unit 130, and disassembly and assembly and maintenance can be much easier than in the prior art.

Dispensing including a precision dispenser 100 capable of responding to a vacuum environment using a magnetic fluid seal as shown in FIGS. 3 to 8, and a precision dispenser 100 as shown in FIGS. The scope of rights can be applied to the system.

Referring to FIG. 2 for a dispensing system including the precision dispenser 100, the dispensing system according to the present embodiment is provided over the vacuum chamber 1 and the inside and outside of the vacuum chamber 1, but is substantially It includes a precision dispenser 100 for performing a dispensing process, and a fluid supply line 3 .

The vacuum chamber 1 forms a place where the dispensing process is performed in a vacuum environment. Although schematically shown in the drawings, the vacuum chamber 1 may be provided with a pump or the like for vacuum.

Prior to the description of the precision dispenser 100, the fluid supply line 3 is first identified. The fluid supply line 3 is from the outside of the vacuum chamber 1 through the inside of the vacuum chamber 1 to the precision dispenser 100. It serves to supply the fluid to the discharge part 110 of the area.

The dispensing process may proceed in the vacuum chamber 1 due to the fluid supply through the fluid supply line 3 .

On the other hand, the precision dispenser 100 is a means for carrying out the actual dispensing process. The precision dispenser 100 is disposed inside a vacuum chamber that forms a place where the dispensing process is performed in a vacuum environment, and the discharge unit 110 through which the fluid is discharged, and the discharge unit 110 are spaced apart from the vacuum chamber ( 1), a magnetic fluid seal (150, magnetic) that detachably connects the discharge unit 110 and the drive unit 130 between the drive unit 130 disposed in the external atmospheric environment and the discharge unit 110 and the drive unit 130. seal) may be included.

The discharge unit 110 is a means for receiving the fluid required for the dispensing process from the fluid supply line 3 and discharging a quantity of the fluid. In other words, the discharge unit 110 is a part (unit) in charge of the dispensing process.

The discharge unit 110 is coupled to the discharge housing 111 and the discharge housing 111 , and includes a discharge head 112 having a discharge port 112a formed at an end thereof, and is rotatably disposed in the discharge housing 111 to rotate. A rotor 113 as a metal rotor that discharges the liquid to the discharge port 112a while moving while controlling the precise discharge amount, and is disposed radially outside the rotor 113 in the discharge housing 111, the rotor ( 113) may include a stator 114 as an elastomeric stator allowing rotational motion.

The driving unit 130 is disposed in an external atmospheric environment of the vacuum chamber 1 . The driving unit 130 may include a precise motor 131 (motor).

The magnetic fluid seal 150 detachably connects the discharge unit 110 and the driving unit 130 between the discharge unit 110 and the driving unit 130 .

For reference, in the case of the prior art, a method of applying various seal materials and structures according to the chemical/physical properties of the liquid has been applied. However, this approach does not solve the fundamental problem and causes replacement cost (purchase cost of replacement/replacement labor cost) and replacement time according to the life of the seal. In addition, it is necessary to select a sealing material and change the structural design in consideration of the chemical/physical properties of numerous liquids used in the dispensing process.

Accordingly, in the present embodiment, the magnetic fluid seal 150 is applied to solve the conventional fundamental problem.

The magnetic fluid seal 150 is provided in the fluid seal body 151 coupled to the wall of the vacuum chamber 1 and the fluid seal body 151, and magnetically connects the motor 131 and the rotor 113. It may include a magnetic material 152 .

Due to the application of the magnetic fluid seal 150 , there is an advantage capable of responding to a vacuum environment through the rotor 113 and the stator 114 . That is, due to the structural characteristics of the discharge unit 110 separated by the magnetic fluid seal 150, perfect sealing may be possible in a vacuum environment, and therefore, it can be used without liquid leakage even in a vacuum environment. have.

In addition, while minimizing the time required for user maintenance and disassembly/assembly, precise dispensing control becomes possible.

Meanwhile, in the dispensing system according to the present embodiment, the controller 180 is further mounted as a means for controlling the system.

The controller 180 is disposed outside the vacuum chamber 1 , is connected to the driving unit 130 of the precision dispenser 100 from the outside of the vacuum chamber 1 , and controls the operation of the precision dispenser 100 . That is, it is connected to the motor 131 to control the operating time and intensity of the motor 131 as an organic mechanism.

The controller 180 performing this role may include a central processing unit 181 (CPU), a memory 182 (MEMORY), and a support circuit 183 (SUPPORT CIRCUIT).

The central processing unit 181 is disposed outside the vacuum chamber 1 in this embodiment and is connected to the driving unit 130 of the precision dispenser 100 from the outside of the vacuum chamber 1, and the operation of the precision dispenser 100 It may be one of various computer processors that can be industrially applied to control the

The memory 182 (MEMORY) is connected to the central processing unit (181). The memory 182 is a computer-readable recording medium, which may be installed locally or remotely, and may be easily available such as, for example, random access memory (RAM), ROM, floppy disk, hard disk, or any digital storage form. It may be at least one memory.

The support circuit 183 (SUPPORT CIRCUIT) is coupled with the central processing unit 181 to support typical operation of the processor. The support circuit 183 may include a cache, a power supply, a clock circuit, an input/output circuit, a subsystem, and the like.

In this embodiment, the controller 180 is disposed outside the vacuum chamber 1 and is connected to the driving unit 130 of the precision dispenser 100 from the outside of the vacuum chamber 1 , and controls the operation of the precision dispenser 100 . However, such a series of control processes may be stored in the memory 182 . Typically, software routines may be stored in memory 182 . Software routines may also be stored or executed by other central processing units (not shown).

Although the process according to the present invention has been described as being executed by a software routine, it is also possible that at least some of the processes of the present invention are performed by hardware. As such, the processes of the present invention may be implemented in software executed on a computer system, implemented in hardware such as an integrated circuit, or implemented by a combination of software and hardware.

According to this embodiment, which acts based on the structure as described above, it is possible to use in a vacuum environment while preventing damage to the driving unit 130, and disassembly and assembly and maintenance can be much easier than in the prior art.

(Other Examples)

10 is a block diagram of a controller in a dispensing system according to another embodiment of the present invention.

Referring to this figure, the controller 280 applied to this embodiment is a dispenser controller 280, which includes a master controller 280a and a plurality of slave controllers 280b. .

In other words, the controller 280 for controlling the dispenser should be developed for precise dispensing. Unlike the dispenser controller 180 (refer to FIG. 9 ) that is currently manufactured and marketed, the dispenser controller 280 of the present invention was developed to enable connection by extending several controllers 280a and 280b.

The configuration includes a master controller (280a, master controller) and a plurality of slave controllers (280b, slave controller) as described above. One master controller 280a communicates with several slave controllers 280b to control the dispensing process. This enables a plurality of dispensers 100 to be operated simultaneously or individually, and occupies a small installation space compared to existing products, thereby providing many advantages in terms of installation and control.

In addition, it not only provides a function to check the status of each controller 280a, 280b through wireless communication with the application (app) of the smartphone, but also strengthens the communication function to enable direct control according to the authority setting, designing and manufacturing the display It is possible to provide user convenience by enabling immediate confirmation of problems and alarms occurring during the fencing process.

Even if this embodiment is applied, it can be used in a vacuum environment while preventing damage to the driving unit 130, and disassembly and assembly and maintenance can be much easier than in the prior art.

As such, the present invention is not limited to the described embodiments, and it is apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the present invention. Accordingly, it should be said that such modifications or variations shall fall within the scope of the claims of the present invention.

1: vacuum chamber 3: fluid supply line
100: precision dispenser 110: discharge part
111: discharge housing 112: discharge head
112a: outlet 113: rotor
114: stator 130: driving unit
131: motor 150: magnetic fluid seal
151: fluid seal body 152: magnetic material
160: removable cap 180: controller

Claims (5)

a discharge unit disposed inside a vacuum chamber that forms a place where a dispensing process is performed in a vacuum environment, the fluid being discharged;
a driving unit spaced apart from the discharge unit and disposed in an external atmospheric environment of the vacuum chamber; and
A precision dispenser capable of coping with a vacuum environment using a magnetic fluid seal, characterized in that it includes a magnetic seal that detachably connects the discharge unit and the driving unit between the discharge unit and the driving unit.
According to claim 1,
The discharge unit,
discharge housing;
a discharge head coupled to the discharge housing and having a discharge port formed at an end thereof;
a rotor as a metal rotor that is rotatably disposed in the discharge housing and discharges the liquid to the discharge port while rotating while rotating; and
A precision dispenser capable of responding to a vacuum environment using a magnetic fluid seal, characterized in that it includes a stator as an elastomer stator that is disposed outside the rotor in the radial direction in the discharge housing and allows the rotational movement of the rotor.
3. The method of claim 2,
The driving unit includes a precision motor,
The magnetic fluid seal,
a fluid seal body coupled to the wall of the vacuum chamber; and
It is provided in the fluid seal body and includes a magnetic body that magnetically connects the motor and the rotor,
A precision dispenser capable of responding to a vacuum environment using a magnetic fluid seal, characterized in that a removable cap is coupled to the end of the driving unit.
a vacuum chamber forming a place where a dispensing process is performed in a vacuum environment;
A discharge unit disposed inside the vacuum chamber, a driving unit disposed to be spaced apart from the discharge unit and disposed in an external atmospheric environment of the vacuum chamber, and the discharge unit and the driving unit may be separated between the discharge unit and the driving unit Precision dispenser having a magnetic fluid seal (magnetic seal) to connect; and
a fluid supply line for supplying a fluid from the outside of the vacuum chamber to the discharge part area of the precision dispenser through the inside of the vacuum chamber;
The discharge unit,
discharge housing;
a discharge head coupled to the discharge housing and having a discharge port formed at an end thereof;
a rotor as a metal rotor that is rotatably disposed in the discharge housing and discharges the liquid to the discharge port while rotating while rotating; and
and a stator as an elastomer stator which is disposed radially outside the rotor in the discharge housing and allows the rotational movement of the rotor,
The driving unit includes a precision motor,
The magnetic fluid seal,
a fluid seal body coupled to the wall of the vacuum chamber; and
It is provided in the fluid seal body and includes a magnetic body that magnetically connects the motor and the rotor,
Dispensing system, characterized in that the removable cap is coupled to the end of the driving unit.
5. The method of claim 4,
and a controller disposed outside the vacuum chamber and connected to the driving unit of the precision dispenser outside the vacuum chamber, and further comprising a controller for controlling the operation of the precision dispenser.

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