KR102427474B1 - LED Transfer device and transferring method using the same - Google Patents

LED Transfer device and transferring method using the same Download PDF

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KR102427474B1
KR102427474B1 KR1020180011083A KR20180011083A KR102427474B1 KR 102427474 B1 KR102427474 B1 KR 102427474B1 KR 1020180011083 A KR1020180011083 A KR 1020180011083A KR 20180011083 A KR20180011083 A KR 20180011083A KR 102427474 B1 KR102427474 B1 KR 102427474B1
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led
vacuum
unit
seating
transfer
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KR20190091923A (en
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서용곤
윤형도
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한국전자기술연구원
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • H01L27/153Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages

Abstract

화소정밀도가 높은 LED디스플레이 기판 제조가 가능한 LED전사장치 및 전사방법이 제안된다. 본 발명에 따른 LED전사장치는 제1컬러를 발광하는 제1LED가 안착되는 제1LED안착부, 제2컬러를 발광하는 제2LED가 안착되는 제2LED안착부 및 제3컬러를 발광하는 제3LED가 안착되는 제3LED안착부를 포함하는 LED픽업부; 제1LED안착부, 제2LED안착부 및 제3LED안착부와 진공인가관으로 연결되어 진공상태를 인가하는 진공부; 및 진공인가관 및 진공부 사이에 위치하여 진공상태의 인가를 조절하는 스위치부;를 포함한다. An LED transfer device and a transfer method capable of manufacturing an LED display substrate with high pixel precision are proposed. In the LED transfer device according to the present invention, a first LED seating portion on which a first LED emitting a first color is seated, a second LED seating portion on which a second LED emitting a second color is seated, and a third LED emitting a third color are seated an LED pickup unit including a third LED mounting unit; a vacuum part connected to the first LED seating part, the second LED seating part, and the third LED seating part by a vacuum application tube to apply a vacuum state; and a switch unit positioned between the vacuum application tube and the vacuum unit to control the application of a vacuum state.

Description

LED전사장치 및 전사방법{LED Transfer device and transferring method using the same}LED Transfer device and transferring method using the same}

본 발명은 LED전사장치 및 전사방법에 관한 것으로, 상세하게는 화소정밀도가 높은 LED디스플레이 기판 제조가 가능한 LED전사장치 및 전사방법에 관한 것이다.The present invention relates to an LED transfer apparatus and a transfer method, and more particularly, to an LED transfer apparatus and a transfer method capable of manufacturing an LED display substrate with high pixel precision.

현재 가장 널리 이용되는 디스플레이는 액정을 이용한 액정 디스플레이(LCD)이다. 그러나, LCD 기반 디스플레이들은 백라이트 소스(예를 들어, LED 또는 CFL 등)로부터 광의 5%이하만을 통과시켜, 낮은 전력 효율, 불충분한 데이라이트 디스플레이 조명 및 빈약한 시야 각도들의 문제점들이 제기되었다. 유기 발광 다이오드(OLED)를 이용한 OLED 디스플레이는 LCD 디스플레이에 비하여 디스플레이 전력 효율을 개선하였지만, OLED 기술은 컬러 페이딩 현상이 발생하고, 디스플레이 내구성이 낮고, 수명이 적은 문제가 있다. Currently, the most widely used display is a liquid crystal display (LCD) using liquid crystal. However, LCD based displays only pass less than 5% of the light from the backlight source (eg, LED or CFL, etc.), presenting problems of low power efficiency, insufficient daylight display illumination and poor viewing angles. OLED displays using organic light emitting diodes (OLEDs) have improved display power efficiency compared to LCD displays, but OLED technology has problems in that color fading occurs, display durability is low, and lifespan is short.

무기 LED(iLED)를 이용한 디스플레이가 이러한 문제를 해결하기 위해 개발되고 있다. 무기 LED를 이용한 디스플레이는 저전력 구동 및 장시간 사용이 가능하고 고휘도의 장점 때문에 많은 연구가 진행 중이다. 무기 LED 디스플레이(이하 LED디스플레이라고 함)는 예를 들어, 하나의 화상 요소, 또는 화소를 위해 하나의 LED 칩을 이용한다. LED 칩은 마이크로 사이즈의 작은 크기를 갖는데, Full color 마이크로 LED 디스플레이를 구현하기 위해서는 수십 마이크로미터 크기의 적색(Red), 녹색(Green), 청색(Blue) LED를 기판 상에 배치시켜야 하며, LED 크기 및 간격은 해상도 및 배치 방법에 달라진다. A display using an inorganic LED (iLED) is being developed to solve this problem. A lot of research is being conducted on displays using inorganic LEDs because of the advantages of low-power driving, long-term use, and high luminance. Inorganic LED displays (hereinafter referred to as LED displays) use, for example, one LED chip for one picture element, or pixel. The LED chip has a small size of micro size. In order to realize a full color micro LED display, red, green, and blue LEDs with a size of several tens of micrometers must be placed on a substrate, and the size of the LED and spacing depends on resolution and placement method.

도 1은 종래 기술에 따라 LED 디스플레이 기판을 제조하는 방법을 설명하는 도면이다. LED 특성상 적색 LED(21), 녹색 LED(22) 및 청색 LED(23)를 동일 기판에서 제작할 수 없고, 하나의 기판에는 하나의 색상의 LED만 제작이 가능하다. 따라서 RGB LED를 구현하기 위해서는 적색, 녹색 및 청색 LED를 각각 따로 제작한 후, 세가지 칩을 하나의 기판에 전사시켜야 한다. 적색 LED기판(11)으로부터 먼저 적색 LED(21)를 점착특성이 있는 탄성고무 전사장치(30)에 부착시켜 전사기판(40)에 전사시키고, 다시 녹색LED기판(12)으로부터 녹색LED(22) 및 청색LED기판(13)으로부터 청색LED를 순차적으로 전사장치에 부착시켜 전사기판(40)으로 전사한다. 1 is a view for explaining a method of manufacturing an LED display substrate according to the prior art. Due to the characteristics of the LED, the red LED 21 , the green LED 22 , and the blue LED 23 cannot be manufactured on the same substrate, and only one color LED can be manufactured on one substrate. Therefore, in order to implement RGB LEDs, it is necessary to separately manufacture red, green, and blue LEDs, and then transfer three chips to one substrate. First, from the red LED substrate 11, the red LED 21 is attached to the elastic rubber transfer device 30 having an adhesive characteristic, and transferred to the transfer substrate 40, and again the green LED 22 from the green LED substrate 12. and the blue LEDs are sequentially attached to the transfer device from the blue LED substrate 13 and transferred to the transfer substrate 40 .

이러한 방식으로 LED를 전사하는 경우 각 색상별로 픽업공정과 배치공정이 각각 수행되어야 한다. 또한, 점착특성의 탄성고무 전사장치는 사용횟수가 많아질수록 점착 능력이 떨어지는 단점이 있다. 아울러, 적색LED기판, 녹색LED기판, 및 청색LED기판에서의 LED간 피치정렬이 부정확할 경우, 부정확한 피치대로 픽업되므로 최종적인 LED 디스플레이기판에서도 피치가 부정확해져 품질에 영향을 미친다.When the LED is transferred in this way, a pickup process and a batch process must be performed for each color, respectively. In addition, the elastic rubber transfer device having an adhesive property has a disadvantage in that the adhesive ability decreases as the number of times of use increases. In addition, when the pitch alignment between the LEDs in the red LED substrate, the green LED substrate, and the blue LED substrate is incorrect, the pitch is inaccurate even in the final LED display substrate because it is picked up at the incorrect pitch, which affects the quality.

또한, 디스플레이 기판에 LED를 전사하여 배치할 때는 LED와 디스플레이 기판의 배선을 전기적으로 연결시키는 접합공정이 필요하다. 이에 일반적으로 액상의 솔더페이스트를 도포한 후 그 위에 LED를 배치한 후 열을 가해 고상화시킨다. 종래전사방법은 적색LED, 녹색LED, 청색LED를 각각 따로 배치하기 때문에 적색LED를 배치한 후 녹색LED를 배치할 경우, 적색LED는 고상상태로 솔더페이스트에 고정이 되어 있지 않기 때문에 작은 충격에도 LED 배치 간격이 틀어질 수 있는 단점이 있다. 이를 보완하기 위해 임의의 접착필름기판에 적색LED, 녹색LED, 청색LED를 각각 전사시킨 후 디스플레이 기판과 접합시키는 공정을 수행하는데 이러한 경우 공정횟수가 증가하는 단점이 있다.In addition, when transferring and disposing the LED on the display substrate, a bonding process for electrically connecting the LED and the wiring of the display substrate is required. In general, after applying liquid solder paste, an LED is placed on it, and then heat is applied to solidify it. In the conventional transfer method, since the red LED, green LED, and blue LED are separately placed, when the green LED is placed after the red LED is placed, the red LED is in a solid state and is not fixed to the solder paste, so the LED is even in a small impact. There is a disadvantage that the arrangement interval may be wrong. In order to compensate for this, red LED, green LED, and blue LED are transferred to an arbitrary adhesive film substrate, respectively, and then the process of bonding to the display substrate is performed. In this case, there is a disadvantage in that the number of processes increases.

본 발명은 상기와 같은 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은, 화소정밀도가 높은 LED디스플레이 기판 제조가 가능한 LED전사장치 및 전사방법을 제공함에 있다. The present invention has been devised to solve the above problems, and an object of the present invention is to provide an LED transfer device and a transfer method capable of manufacturing an LED display substrate with high pixel precision.

상기 목적을 달성하기 위한 본 발명의 일 실시예에 따른 LED전사장치는 제1컬러를 발광하는 제1LED가 안착되는 제1LED안착부, 제2컬러를 발광하는 제2LED가 안착되는 제2LED안착부 및 제3컬러를 발광하는 제3LED가 안착되는 제3LED안착부를 포함하는 LED픽업부; 제1LED안착부, 제2LED안착부 및 제3LED안착부와 진공인가관으로 연결되어 진공상태를 인가하는 진공부; 및 진공인가관 및 진공부 사이에 위치하여 진공상태의 인가를 조절하는 스위치부;를 포함한다. An LED transfer device according to an embodiment of the present invention for achieving the above object includes a first LED seating part on which a first LED emitting a first color is seated, a second LED seating part on which a second LED emitting a second color is seated, and an LED pickup unit including a third LED mounting unit on which a third LED emitting a third color is mounted; a vacuum part connected to the first LED seating part, the second LED seating part, and the third LED seating part by a vacuum application tube to apply a vacuum state; and a switch unit positioned between the vacuum application tube and the vacuum unit to control the application of a vacuum state.

LED픽업부는 투명할 수 있다. The LED pickup unit may be transparent.

제1LED안착부는 제1진공인가관을 통해 진공부와 연결되고, 제2LED안착부는 제2진공인가관을 통해 진공부와 연결되고, 제3LED안착부는 제3진공인가관을 통해 진공부와 연결되고, 제1진공인가관, 제2진공인가관 및 제3진공인가관의 높이는 제1LED안착부의 높이를 기준으로 서로 상이할 수 있다. The first LED mounting unit is connected to the vacuum unit through a first vacuum applying pipe, the second LED mounting unit is connected to the vacuum unit through a second vacuum applying pipe, and the third LED mounting unit is connected to the vacuum unit through a third vacuum applying pipe, and , the height of the first vacuum applied pipe, the second vacuum applied pipe, and the third vacuum applied pipe may be different from each other based on the height of the first LED mounting part.

제1LED안착부, 제2LED안착부 및 제3LED안착부 사이의 거리는 전사기판에서의 제1LED, 제2LED 및 제3LED 사이의 피치와 동일할 수 있다. The distance between the first LED seating portion, the second LED seating portion, and the third LED seating portion may be the same as a pitch between the first LED, the second LED, and the third LED on the transfer substrate.

LED픽업부는 3D프린터에 의해 형성된 것일 수 있다. The LED pickup unit may be formed by a 3D printer.

본 발명의 다른 측면에 따르면, 전사기판 상에, 제1컬러를 발광하는 제1LED가 안착되는 제1LED안착부, 제2컬러를 발광하는 제2LED가 안착되는 제2LED안착부 및 제3컬러를 발광하는 제3LED가 안착되는 제3LED안착부를 포함하는 LED픽업부, 제1LED안착부, 제2LED안착부 및 제3LED안착부와 진공인가관으로 연결되어 진공상태를 인가하는 진공부 및 진공인가관 및 진공부 사이에 위치하여 진공상태의 인가를 조절하는 스위치부를 포함하는 LED전사장치를 위치시키는 제1단계; 제1LED안착부, 제2LED안착부 및 제3LED안착부에 진공상태를 인가하여 제1LED, 제2LED 및 제3LED를 안착시키는 제2단계; 및 전사기판 상에 LED전사장치를 위치시키고, 진공상태를 제거하여 제1LED, 제2LED 및 제3LED를 전사기판 상에 전사하는 제3단계;를 포함하는 LED전사방법이 제공된다. According to another aspect of the present invention, on a transfer substrate, a first LED seating portion on which the first LED emitting a first color is seated, a second LED seating portion on which a second LED emitting a second color is seated, and a third color are emitted An LED pickup unit including a third LED mounting unit on which a third LED is mounted, a vacuum unit connected to the first LED mounting unit, the second LED mounting unit, and the third LED mounting unit through a vacuum application tube to apply a vacuum state, and a vacuum application tube and vacuum A first step of positioning the LED transfer device including a switch unit for controlling the application of a vacuum state located between the study; a second step of seating the first LED, the second LED and the third LED by applying a vacuum state to the first LED seating part, the second LED seating part, and the third LED seating part; and a third step of placing the LED transfer device on the transfer substrate and transferring the first LED, the second LED and the third LED onto the transfer substrate by removing the vacuum state.

제2단계는 제1LED안착부에 진공상태를 인가하여 제1LED를 제1LED안착부에 안착시키는 단계; 제2LED안착부에 진공상태를 인가하여 제2LED를 제2LED안착부에 안착시키는 단계; 및 제3LED안착부에 진공상태를 인가하여 제3LED를 제3LED안착부에 안착시키는 단계;가 순차 수행될 수 있다. The second step is to apply a vacuum state to the first LED seating portion to seat the first LED on the first LED seating portion; applying a vacuum state to the second LED seating portion to seat the second LED on the second LED seating portion; and applying a vacuum state to the third LED seating portion to seat the third LED on the third LED seating portion; may be sequentially performed.

전사기판은 LED전사위치에 솔더페이스트를 포함하고, 제3단계는, 제1LED, 제2LED 및 제3LED가 솔더페이스트 상에 위치하는 단계; 가열하여 솔더페이스트를 고상화시키는 단계; 및 진공상태를 제거하여 제1LED, 제2LED 및 제3LED를 전사기판에 전사하는 단계;를 포함할 수 있다. The transfer substrate includes solder paste at the LED transfer position, and the third step includes: locating the first LED, the second LED and the third LED on the solder paste; heating to solidify the solder paste; and transferring the first LED, the second LED, and the third LED to the transfer substrate by removing the vacuum state.

본 발명의 실시예들에 따르면, LED를 디스플레이 기판에 전사시킬 때 진공을 이용한 전사장치를 사용하므로 다회 사용이 가능하여 공정장비관련 비용절감이 가능한 효과가 있다. According to embodiments of the present invention, since a transfer device using a vacuum is used to transfer the LED to the display substrate, it can be used multiple times, thereby reducing the cost associated with the process equipment.

또한, LED전사장치의 안착부간 간격이 일정하여 LED 전사시 피치의 보정이 수행되어 LED 화소 정밀도 및 전사공정의 안전성을 높일 수 있는 효과가 있다. In addition, since the interval between the mounting portions of the LED transfer device is constant, the pitch is corrected during LED transfer, thereby increasing the accuracy of the LED pixel and the safety of the transfer process.

본 발명에 따른 전사장치를 이용하면, 적색LED, 녹색LED 및 청색LED를 각각 다른 공정을 통해 디스플레이 기판에 배치하는 것이 아니라 한번에 배치하게 되어 단계적으로 수행할 때, 이전 LED의 탈락 등을 방지할 수 있어 LED 디스플레이 기판의 생산성 및 제품 신뢰성을 높일 수 있는 효과가 있다.When the transfer device according to the present invention is used, the red LED, the green LED and the blue LED are disposed at once instead of being disposed on the display substrate through different processes, so that when performing step by step, it is possible to prevent the previous LED from falling off. This has the effect of increasing the productivity and product reliability of LED display substrates.

도 1은 종래 기술에 따라 LED 디스플레이 기판을 제조하는 방법을 설명하는 도면이다.
도 2는 본 발명의 일실시예에 따른 LED전사장치의 평면도이고, 도 3은 도 2의 A-A'의 단면도이다.
도 4 내지 도 11은 본 발명의 다른 실시예에 따른 LED전사방법을 설명하기 위한 도면들이다.
1 is a view for explaining a method of manufacturing an LED display substrate according to the prior art.
2 is a plan view of an LED transfer device according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view taken along line A-A' of FIG. 2 .
4 to 11 are views for explaining an LED transfer method according to another embodiment of the present invention.

이하, 첨부된 도면을 참조하여 본 발명의 실시형태를 설명한다. 그러나, 본 발명의 실시형태는 여러가지 다른 형태로 변형될 수 있으며, 본 발명의 범위가 이하 설명하는 실시형태로 한정되는 것은 아니다. 본 발명의 실시형태는 당업계에서 통상의 지식을 가진 자에게 본 발명을 보다 완전하게 설명하기 위해서 제공되는 것이다. 첨부된 도면에서 특정 패턴을 갖도록 도시되거나 소정두께를 갖는 구성요소가 있을 수 있으나, 이는 설명 또는 구별의 편의를 위한 것이므로 특정패턴 및 소정두께를 갖는다고 하여도 본 발명이 도시된 구성요소에 대한 특징만으로 한정되는 것은 아니다.DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, the embodiment of the present invention may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below. Embodiments of the present invention are provided in order to more completely explain the present invention to those of ordinary skill in the art. Although there may be components shown to have a specific pattern or a predetermined thickness in the accompanying drawings, this is for convenience of explanation or distinction, so even if the present invention has a specific pattern and a predetermined thickness, the characteristics of the components shown It is not limited to only.

도 2는 본 발명의 일실시예에 따른 LED전사장치의 평면도이고, 도 3은 도 2의 A-A'의 단면도이다. 본 발명에 따른 LED전사장치(100)는 제1컬러를 발광하는 제1LED가 안착되는 제1LED안착부(111), 제2컬러를 발광하는 제2LED가 안착되는 제2LED안착부(112) 및 제3컬러를 발광하는 제3LED가 안착되는 제3LED안착부(113)를 포함하는 LED픽업부(110); 제1LED안착부(111), 제2LED안착부(112) 및 제3LED안착부(113)와 진공인가관(121, 122, 123)으로 연결되어 진공상태를 인가하는 진공부(120); 및 진공인가관(121, 122, 123) 및 진공부(120) 사이에 위치하여 진공상태의 인가를 조절하는 스위치부(130);를 포함한다. 2 is a plan view of an LED transfer device according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view taken along line A-A' of FIG. 2 . The LED transfer device 100 according to the present invention includes a first LED seating portion 111 on which a first LED emitting a first color is seated, a second LED seating portion 112 on which a second LED emitting a second color is seated, and a second LED transfer device 100 according to the present invention. an LED pickup unit 110 including a third LED mounting unit 113 on which a third LED emitting 3 colors is mounted; a vacuum unit 120 connected to the first LED mounting unit 111 , the second LED mounting unit 112 , and the third LED mounting unit 113 by vacuum application tubes 121 , 122 and 123 to apply a vacuum state; and a switch unit 130 positioned between the vacuum application tubes 121 , 122 , 123 and the vacuum unit 120 to control the application of a vacuum state.

LED픽업부(110)는 LED를 기판으로부터 픽업하여 전사될 기판으로 이동시킨다. LED는 제조기판으로부터 전사될 기판(이하, 전사기판이라 한다)으로 직접 전사될 수 있고, 제조기판에서 1차적으로 다른 기판에 이동된 후, 다시 본 발명에 따른 LED전사장치(100)에 의해 전사기판으로 전사될 수 있다. 이하에서는 편의상 LED는 제조기판으로부터 전사기판으로 직접 전사되는 것으로 설명하나 이상과 같이 제조기판이 아닌 다른 기판에 위치하는 LED도 LED전사장치(100)를 이용하여 전사기판으로 전사될 수 있다. The LED pickup unit 110 picks up the LED from the substrate and moves it to the substrate to be transferred. The LED can be directly transferred from a manufacturing substrate to a substrate to be transferred (hereinafter referred to as a transfer substrate), and after being first moved from the manufacturing substrate to another substrate, transferred again by the LED transfer device 100 according to the present invention It can be transferred to a substrate. Hereinafter, for convenience, it will be described that the LED is directly transferred from the manufacturing substrate to the transfer substrate, but as described above, LEDs located on a substrate other than the manufacturing substrate may also be transferred to the transfer substrate using the LED transfer device 100 .

LED픽업부(110)는 각각 적색, 녹색 및 청색 중 어느 하나의 색을 발광하는 LED를 픽업하기 위하여 LED가 안착되는 안착부가 형성되어 있다. 도 2에는 안착부가 도시되어 있지 않은데, 안착부는 LED픽업부(110)가 제조기판과 대향하는 면에 형성되어 LED의 형상과 동일유사하게 LED픽업부(110) 내측으로 인입되어 형성된 캐비티이므로 도 2를 기준으로 LED픽업부(110)의 하면에 형성된 안착부는 보이지 않고, 상면의 진공인가관(121, 122, 123)이 도시되어 있다. 진공인가관(121, 122, 123)은 각각 적색, 녹색, 청색으로 표시되었으나 실제 진공인가관(121, 122, 123)이 색을 나타낼 필요가 없으므로 어떠한 색으로도 구현될 수 있다. The LED pickup unit 110 has a seating portion on which the LED is mounted in order to pick up an LED that emits any one of red, green, and blue, respectively. Although the seating part is not shown in FIG. 2, the seating part is a cavity formed on the surface where the LED pickup part 110 is opposite to the manufacturing substrate and is drawn into the LED pickup part 110 in the same manner as the shape of the LED. Based on , the mounting portion formed on the lower surface of the LED pickup unit 110 is not visible, and the vacuum application tubes 121 , 122 , and 123 on the upper surface are shown. Although the vacuum application tubes 121, 122, and 123 are displayed in red, green, and blue, respectively, since the actual vacuum application tubes 121, 122, and 123 do not need to display a color, any color may be implemented.

진공부(120)는 LED픽업부(110)의 안착부와 각각 연결되어 진공상태를 인가한다. 본 명세서에서 '진공상태'는 실제 완벽한 진공상태를 의미하는 것이 아니라 진공부(120)가 진공펌프 등과 같은 장치를 이용하여 형성하는 안착부 내부의 압력을 감소시켜 각각의 안착부내부로 LED를 안착시킬 수 있는 정도의 압력상태를 의미한다. The vacuum unit 120 is respectively connected to the seating unit of the LED pickup unit 110 to apply a vacuum state. In this specification, 'vacuum state' does not mean an actual perfect vacuum state, but the vacuum unit 120 reduces the pressure inside the mounting unit formed by using a device such as a vacuum pump, etc. to seat the LED into each mounting unit. It means the level of pressure that can make it happen.

진공부(120)는 안착부(111, 112, 113)와 진공인가관(121, 122, 123)으로 연결된다. 스위치부(130)는 진공인가관(121, 122, 123) 및 진공부(120) 사이에 위치하여 진공상태의 인가를 조절한다. The vacuum unit 120 is connected to the seating units 111 , 112 , 113 and vacuum application tubes 121 , 122 , 123 . The switch unit 130 is positioned between the vacuum application tubes 121 , 122 , 123 and the vacuum unit 120 to control the application of a vacuum state.

LED전사장치(100)는 적색LED, 녹색LED 및 청색LED를 각각의 기판으로부터 픽업하여 전사하여야 하므로, 동시에 서로 다른 색상의 LED를 픽업할 수 없다. 따라서, 예를 들어 먼저 적색LED를 픽업한다고 하면, 스위치부(130)는 적색LED가 위치할 안착부에 진공상태를 인가하기 위하여 녹색LED 및 청색LED가 위치할 안착부와 연결된 진공인가관은 OFF시키고, 적색LED가 위치할 안착부와 연결된 진공인가관만 ON한다. 스위치부(130)는 해당 LED를 픽업할 때, 해당 진공인가관만 ON하게 되어 다른 색상의 LED에는 영향을 미치지 않게 한다. LED전사방법에 대하여는 이하 더욱 상세히 설명하기로 한다. Since the LED transfer device 100 has to pick up and transfer the red LED, the green LED and the blue LED from each substrate, it is impossible to simultaneously pick up LEDs of different colors. Therefore, for example, if a red LED is picked up first, the switch unit 130 turns off the vacuum application tube connected to the seating part where the green LED and the blue LED are to be located in order to apply a vacuum state to the seating part where the red LED is to be located. and turn ON only the vacuum application tube connected to the seating part where the red LED will be located. When the switch unit 130 picks up the corresponding LED, only the corresponding vacuum application tube is turned on, so that the LED of another color is not affected. The LED transfer method will be described in more detail below.

LED픽업부(110)의 단면은 도 3에 도시되어 있다. 도면을 기준으로 하면에 LED가 안착될 안착부(111, 112, 113)가 형성되어 있고, 안착부(111, 112, 113)는 진공인가관(121, 122, 123)과 각각 연결되어 있다. 진공인가관(121, 122, 123)은 각 색상의 LED에 따라 서로 독립적으로 스위치부(130)와 연결되어야 하므로 서로 물리적으로 교차하지 않도록 형성되는 것이 바람직하다. A cross-section of the LED pickup unit 110 is shown in FIG. 3 . Referring to the drawings, mounting portions 111 , 112 , 113 on which the LED is to be mounted are formed on the lower surface, and the mounting portions 111 , 112 , 113 are connected to the vacuum application tubes 121 , 122 , 123 , respectively. Since the vacuum application tubes 121 , 122 , and 123 must be connected to the switch unit 130 independently of each other according to the LED of each color, it is preferable that they are formed so as not to physically cross each other.

따라서, 제1LED안착부(111)는 제1진공인가관(121)을 통해 진공부(120)와 연결되고, 제2LED안착부(112)는 제2진공인가관(122)을 통해 진공부(120)와 연결되고, 제3LED안착부(113)은 제3진공인가관(123)을 통해 진공부(120)와 연결되는데, 제1진공인가관(121), 제2진공인가관(122) 및 제3진공인가관의 높이는 제1LED안착부(111)의 높이를 기준으로 서로 상이할 수 있다. 이와 달리, 제1진공인가관(121), 제2진공인가관(122) 및 제3진공인가관(123)의 높이는 모두 같게 설정될 수 있는데, 이 경우에는 LED픽업부(110)내에서의 일부 영역에서만 교차시 물리적으로 중복되지 않도록 높이를 서로 다르게 조절할 수 있다. Accordingly, the first LED mounting unit 111 is connected to the vacuum unit 120 through the first vacuum application pipe 121 , and the second LED mounting unit 112 is connected to the vacuum unit 120 through the second vacuum application pipe 122 . 120), and the third LED seating part 113 is connected to the vacuum part 120 through the third vacuum applying pipe 123, the first vacuum applying pipe 121, the second vacuum applying pipe 122. and the height of the third vacuum application tube may be different from each other based on the height of the first LED seating part 111 . Alternatively, the heights of the first vacuum applied pipe 121 , the second vacuum applied pipe 122 , and the third vacuum applied pipe 123 may be set to be the same. In this case, in the LED pickup unit 110 , the When crossing only in some areas, the height can be adjusted differently so that they do not overlap physically.

LED픽업부(110)는 각각의 안착부(111, 112, 113)에 LED들이 안착되고, 전사기판으로 이동되어 전사되므로 안착부(111, 112, 113)에 위치한 LED 사이의 간격이 전사기판 상에서의 피치로 조절될 수 있다. In the LED pickup unit 110, the LEDs are seated on each of the mounting units 111, 112, and 113 and transferred to the transfer substrate. can be adjusted to the pitch of

LED픽업부(110)는 투명할 수 있는데, LED픽업부(110)의 상면에서 이미지를 촬상하여 기판에 위치한 LED와 안착부를 정렬하여 픽업할 수 있기 때문이다. LED픽업부(110)가 투명하면 상부에서 이미지 확보가 가능하므로 LED 픽업이 정확하게 이루어질 수 있다. The LED pickup unit 110 may be transparent, because an image can be captured from the upper surface of the LED pickup unit 110 to align and pick up the LED positioned on the substrate and the seating portion. When the LED pickup unit 110 is transparent, it is possible to secure an image from the upper portion, so that the LED pickup can be performed accurately.

LED픽업부(110)는 3D프린터에 의해 형성된 것일 수 있다. LED는 마이크로 LED이므로 크기가 미세하고, 안착부(111, 112, 113)와 진공인가관(121, 122, 123)을 형성하기 위해서는 금형을 이용한 정밀한 성형이 불가능하다. 특히, 진공인가관(121, 122, 123)의 높이가 서로 다른 경우에는 더욱 정밀한 성형이 필요하므로 3D프린터를 이용하여 LED픽업부(110)를 형성하는 것이 바람직하다. The LED pickup unit 110 may be formed by a 3D printer. Since the LED is a micro LED, the size is fine, and precise molding using a mold is impossible to form the seating portions 111 , 112 , 113 and the vacuum application tube 121 , 122 , 123 . In particular, when the heights of the vacuum application tubes 121, 122, and 123 are different from each other, more precise molding is required, so it is preferable to form the LED pickup unit 110 using a 3D printer.

도 4 내지 도 11은 본 발명의 다른 실시예에 따른 LED전사방법을 설명하기 위한 도면들이다. 본 발명의 다른 측면에 따르면, LED기판(141, 142, 143) 상에, 제1컬러를 발광하는 제1LED(210)가 안착되는 제1LED안착부(111), 제2컬러를 발광하는 제2LED(220)가 안착되는 제2LED안착부(112) 및 제3컬러를 발광하는 제3LED(230)가 안착되는 제3LED안착부(113)를 포함하는 LED픽업부(110), 제1LED안착부(111), 제2LED안착부(112) 및 제3LED안착부(113)와 진공인가관(121, 122, 123)으로 연결되어 진공상태를 인가하는 진공부 및 진공인가관(121, 122, 123) 및 진공부 사이에 위치하여 진공상태의 인가를 조절하는 스위치부를 포함하는 LED전사장치를 위치시키는 제1단계; 제1LED안착부(111), 제2LED안착부(112) 및 제3LED안착부(113)에 진공상태를 인가하여 제1LED(210), 제2LED(220) 및 제3LED(230)를 안착시키는 제2단계; 및 전사기판(150) 상에 LED전사장치를 위치시키고, 진공상태를 제거하여 제1LED(210), 제2LED(220) 및 제3LED(230)를 전사기판(150) 상에 전사하는 제3단계;를 포함하는 LED전사방법이 제공된다. 4 to 11 are views for explaining an LED transfer method according to another embodiment of the present invention. According to another aspect of the present invention, on the LED substrates (141, 142, 143), the first LED seating portion 111 on which the first LED 210 emitting a first color is seated, and a second LED emitting a second color. An LED pickup unit 110 including a second LED seat 112 on which 220 is seated, and a third LED seat 113 on which a third LED 230 emitting a third color is seated, a first LED seat ( 111), the second LED seating part 112 and the third LED seating part 113 are connected to the vacuum applying tubes 121, 122, 123 to apply a vacuum state and vacuum applying tubes 121, 122, 123 and a first step of positioning the LED transfer device including a switch unit positioned between the vacuum units to control the application of a vacuum state; The first LED 210, the second LED 220, and the third LED 230 are seated by applying a vacuum state to the first LED seating part 111, the second LED seating part 112, and the third LED seating part 113. Step 2; and a third step of placing the LED transfer device on the transfer substrate 150 and removing the vacuum state to transfer the first LED 210 , the second LED 220 and the third LED 230 onto the transfer substrate 150 . There is provided an LED transfer method including;

제1단계는 LED기판(141, 142, 143)으로부터 LED전사장치로 LED를 이동시키기 위해, LED기판(141, 142, 143) 상에, LED전사장치를 위치시키는 단계이고, 제2단계는 진공부가 진공인가관(121, 122, 123)을 통해 안착부(111, 112, 113)에 진공상태를 순차 인가하여 LED들을 안착부(111, 112, 113)에 안착시키는 단계이다. The first step is a step of positioning the LED transfer device on the LED substrate (141, 142, 143) in order to move the LED from the LED substrate (141, 142, 143) to the LED transfer device, and the second step is a vacuum This is a step of sequentially applying a vacuum state to the seating units 111 , 112 , and 113 through the additional vacuum application tubes 121 , 122 , and 123 to seat the LEDs on the mounting units 111 , 112 , 113 .

도 4에는 제1LED(210)가 위치한 제1LED기판(141)이 도시되어 있다. LED전사장치를 제1LED기판(141) 상에 정렬시키고, 제1진공인가관(121)을 통해 진공상태를 인가하면, 제1LED안착부(111)에 제1LED(210)가 안착된다(도 5). 4 shows the first LED substrate 141 on which the first LED 210 is located. When the LED transfer device is aligned on the first LED substrate 141 and a vacuum state is applied through the first vacuum application tube 121, the first LED 210 is seated on the first LED seat 111 (FIG. 5). ).

이 후, 제2LED(220)가 위치한 제2LED기판(142) 상에 다시 LED전사장치가 위치하게 되고(도 6), 스위치부에서는 제2진공인가관(122)을 ON한다. 이에 따라 제2진공인가관(122)을 통해 제2LED안착부(112)에 진공상태가 인가되고, 제2LED(220)는 제2LED안착부(112)에 안착된다(도7). Thereafter, the LED transfer device is placed again on the second LED substrate 142 on which the second LED 220 is located ( FIG. 6 ), and the second vacuum application tube 122 is turned on in the switch unit. Accordingly, a vacuum state is applied to the second LED mounting unit 112 through the second vacuum application pipe 122 , and the second LED 220 is seated on the second LED mounting unit 112 ( FIG. 7 ).

마지막으로 제3LED(230)가 위치한 제3LED기판(143) 상에 다시 LED전사장치가 위치하게 되고(도 8), 스위치부에서는 제3진공인가관(123)을 ON한다. 이에 따라 제3진공인가관(123)을 통해 제3LED안착부(113)에 진공상태가 인가되고, 제3LED(230)는 제3LED안착부(113)에 안착된다(도 9). 이에 따라, LED픽업부(110)의 안착부(111, 112, 113)내에는 제1LED(210), 제2LED(220), 제3LED(230)가 모두 안착되고, 모든 색상의 LED를 한번에 전사할 준비를 할 수 있다. Finally, the LED transfer device is placed again on the third LED substrate 143 on which the third LED 230 is located (FIG. 8), and the third vacuum application tube 123 is turned on in the switch unit. Accordingly, a vacuum state is applied to the third LED mounting unit 113 through the third vacuum application pipe 123 , and the third LED 230 is seated on the third LED mounting unit 113 ( FIG. 9 ). Accordingly, the first LED 210 , the second LED 220 , and the third LED 230 are all seated in the seating portions 111 , 112 , and 113 of the LED pickup unit 110 , and the LEDs of all colors are transferred at once. can be prepared to do

제3단계에서는, 전사기판(150) 상에 LED전사장치를 위치시키고, 진공상태를 제거하여 제1LED(210), 제2LED(220) 및 제3LED(230)를 전사기판(150) 상에 전사시킨다. In the third step, the LED transfer device is placed on the transfer substrate 150 , and the vacuum state is removed to transfer the first LED 210 , the second LED 220 , and the third LED 230 onto the transfer substrate 150 . make it

전사기판(150)은 LED전사위치에 솔더페이스트(160)를 포함할 수 있다(도 10). 전사기판(150)이 솔더페이스트(160)를 포함하는 경우, 제3단계는, 제1LED(210), 제2LED(220) 및 제3LED(230)가 솔더페이스트(160) 상에 위치하는 단계; 가열하여 솔더페이스트(160)를 고상화시키는 단계; 및 진공상태를 제거하여 제1LED(210), 제2LED(220) 및 제3LED(230)를 전사기판에 전사하는 단계;를 포함할 수 있다. 즉, 전사기판(150)상에 LED의 부착을 위한 솔더페이스트(160)가 위치하는 경우, LED전사장치(100)의 LED를 한꺼번에 솔더페이스트(160)위에 위치시키고, 솔더페이스트(160)를 가열하여 고상화시킨 후 LED전사장치(100)를 제거하여 LED의 전사를 완료할 수 있다(도 11). The transfer substrate 150 may include a solder paste 160 at the LED transfer position (FIG. 10). When the transfer substrate 150 includes the solder paste 160 , the third step may include locating the first LED 210 , the second LED 220 , and the third LED 230 on the solder paste 160 ; heating to solidify the solder paste 160; and transferring the first LED 210 , the second LED 220 , and the third LED 230 to the transfer substrate by removing the vacuum state. That is, when the solder paste 160 for attaching the LED is located on the transfer substrate 150, the LEDs of the LED transfer device 100 are placed on the solder paste 160 at once, and the solder paste 160 is heated. After solidification, the LED transfer device 100 may be removed to complete the LED transfer (FIG. 11).

본 발명에 따른 LED전사방법에 따르면, 공정공정의 용이성 때문에 대면적의 디스플레이에도 적용가능하므로 이를 이용하여 직접발광형 LED 디스플레이 장치를 제조하면 저전력 구동, 장시간 사용 가능 및 고휘도의 장점을 나타내면서도 저가격의 대면적 고품질 디스플레이의 제조가 가능하다. According to the LED transfer method according to the present invention, since it can be applied to a large-area display due to the ease of the process process, when a direct light emitting LED display device is manufactured using the same, it shows advantages of low power operation, long-term use, and high luminance, while exhibiting the advantages of low price. It is possible to manufacture a large-area, high-quality display.

이상, 본 발명의 실시예들에 대하여 설명하였으나, 해당 기술 분야에서 통상의 지식을 가진 자라면 특허청구범위에 기재된 본 발명의 사상으로부터 벗어나지 않는 범위 내에서, 구성 요소의 부가, 변경, 삭제 또는 추가 등에 의해 본 발명을 다양하게 수정 및 변경시킬 수 있을 것이며, 이 또한 본 발명의 권리범위 내에 포함된다고 할 것이다.In the above, although embodiments of the present invention have been described, those of ordinary skill in the art can add, change, delete or add components within the scope that does not depart from the spirit of the present invention described in the claims. The present invention may be variously modified and changed by such as, and it will be said that it is also included within the scope of the present invention.

11, 141: 제1LED기판
12, 142: 제2LED기판
13, 143: 제3LED기판
21, 210: 제1LED
22, 220: 제2LED
23, 230: 제3LED
40, 150: 전사기판
100: LED전사장치
110: LED픽업부
111: 제1LED안착부
112: 제2LED안착부
113: 제3LED안착부
120: 진공부
121: 제1진공인가관
122: 제2진공인가관
123: 제3진공인가관
130: 스위치부
160: 솔더페이스트
11, 141: first LED substrate
12, 142: second LED substrate
13, 143: third LED substrate
21, 210: first LED
22, 220: second LED
23, 230: third LED
40, 150: transfer board
100: LED transfer device
110: LED pickup unit
111: first LED seating part
112: second LED seating part
113: third LED seating part
120: vacuum unit
121: first vacuum authorization tube
122: second vacuum authorization tube
123: third vacuum authorization tube
130: switch unit
160: solder paste

Claims (8)

제1컬러를 발광하는 제1LED가 안착되는 제1LED안착부, 제2컬러를 발광하는 제2LED가 안착되는 제2LED안착부 및 제3컬러를 발광하는 제3LED가 안착되는 제3LED안착부를 포함하는 LED픽업부;
제1LED안착부, 제2LED안착부 및 제3LED안착부와 진공인가관으로 연결되어 진공상태를 인가하는 진공부; 및
진공인가관 및 진공부 사이에 위치하여 진공상태의 인가를 조절하는 스위치부;를 포함하는 LED전사장치로서,
제1LED안착부, 제2LED안착부 및 제3LED안착부는 LED픽업부가 제조기판과 대향하는 면에 형성되어 LED픽업부 내측으로 인입되어 형성된 캐비티이고,
제1LED안착부는 제1진공인가관을 통해 진공부와 연결되고, 제2LED안착부는 제2진공인가관을 통해 진공부와 연결되고, 제3LED안착부는 제3진공인가관을 통해 진공부와 연결되어,
LED전사장치는 제1LED, 제2LED 및 제3LED를 서로 독립적으로 픽업할 수 있는 것을 특징으로 하는 LED전사장치.
An LED comprising a first LED seating part on which the first LED emitting a first color is seated, a second LED seating part on which a second LED emitting a second color is seated, and a third LED seating part on which the third LED emitting a third color is seated. pickup unit;
a vacuum part connected to the first LED seating part, the second LED seating part, and the third LED seating part by a vacuum application tube to apply a vacuum state; and
An LED transfer device comprising a; a switch unit positioned between the vacuum application tube and the vacuum unit to control the application of a vacuum state,
The first LED seating part, the second LED seating part, and the third LED seating part are cavities formed when the LED pickup part is formed on a surface opposite to the manufacturing substrate and is drawn into the LED pickup part,
The first LED seating unit is connected to the vacuum unit through the first vacuum application pipe, the second LED seating unit is connected to the vacuum unit through the second vacuum application pipe, and the third LED seating unit is connected to the vacuum unit through the third vacuum application pipe. ,
The LED transfer device is an LED transfer device, characterized in that the first LED, the second LED and the third LED can be picked up independently of each other.
청구항 1에 있어서,
LED픽업부는 투명한 것을 특징으로 하는 LED전사장치.
The method according to claim 1,
LED transfer device, characterized in that the LED pickup unit is transparent.
청구항 1에 있어서,
제1진공인가관, 제2진공인가관 및 제3진공인가관의 높이는 제1LED안착부의 높이를 기준으로 서로 상이한 것을 특징으로 하는 LED전사장치.
The method according to claim 1,
The height of the first vacuum application tube, the second vacuum application tube, and the third vacuum application tube are different from each other based on the height of the first LED mounting part.
청구항 1에 있어서,
제1LED안착부, 제2LED안착부 및 제3LED안착부 사이의 거리는 전사기판에서의 제1LED, 제2LED 및 제3LED 사이의 피치와 동일한 것을 특징으로 하는 LED전사장치.
The method according to claim 1,
The distance between the first LED seating portion, the second LED seating portion and the third LED seating portion is the same as the pitch between the first LED, the second LED and the third LED on the transfer substrate.
청구항 1에 있어서,
LED픽업부는 3D프린터에 의해 형성되는 것을 특징으로 하는 LED전사장치.
The method according to claim 1,
LED transfer device, characterized in that the LED pickup unit is formed by a 3D printer.
LED기판 상에, 제1컬러를 발광하는 제1LED가 안착되는 제1LED안착부, 제2컬러를 발광하는 제2LED가 안착되는 제2LED안착부 및 제3컬러를 발광하는 제3LED가 안착되는 제3LED안착부를 포함하는 LED픽업부, 제1LED안착부, 제2LED안착부 및 제3LED안착부와 진공인가관으로 연결되어 진공상태를 인가하는 진공부 및 진공인가관 및 진공부 사이에 위치하여 진공상태의 인가를 조절하는 스위치부를 포함하는 LED전사장치를 위치시키는 제1단계;
제1LED안착부, 제2LED안착부 및 제3LED안착부에 진공상태를 인가하여 제1LED, 제2LED 및 제3LED를 안착시키는 제2단계; 및
전사기판 상에 LED전사장치를 위치시키고, 진공상태를 제거하여 제1LED, 제2LED 및 제3LED를 전사기판 상에 전사하는 제3단계;를 포함하는 LED전사방법으로서,
제1LED안착부, 제2LED안착부 및 제3LED안착부는 LED픽업부가 제조기판과 대향하는 면에 형성되어 LED픽업부 내측으로 인입되어 형성된 캐비티이고,
제1LED안착부는 제1진공인가관을 통해 진공부와 연결되고, 제2LED안착부는 제2진공인가관을 통해 진공부와 연결되고, 제3LED안착부는 제3진공인가관을 통해 진공부와 연결되어, 제1LED, 제2LED 및 제3LED를 서로 독립적으로 픽업할 수 있는 것을 특징으로 하는 LED전사방법.
On the LED substrate, a first LED seating part on which the first LED emitting a first color is seated, a second LED seating part on which a second LED emitting a second color is seated, and a third LED on which a third LED emitting a third color is seated The LED pickup unit including the mounting unit, the first LED mounting unit, the second LED mounting unit, and the third LED mounting unit are connected to the vacuum applying tube and are located between the vacuum unit and the vacuum applying tube and the vacuum unit for applying a vacuum state. A first step of positioning the LED transfer device including a switch for controlling the application;
a second step of seating the first LED, the second LED and the third LED by applying a vacuum state to the first LED seating part, the second LED seating part, and the third LED seating part; and
A third step of transferring the first LED, the second LED and the third LED onto the transfer substrate by placing the LED transfer device on the transfer substrate and removing the vacuum state,
The first LED seating part, the second LED seating part, and the third LED seating part are cavities formed when the LED pickup part is formed on a surface opposite to the manufacturing substrate and is drawn into the LED pickup part,
The first LED seating unit is connected to the vacuum unit through the first vacuum application pipe, the second LED seating unit is connected to the vacuum unit through the second vacuum application pipe, and the third LED seating unit is connected to the vacuum unit through the third vacuum application pipe. , LED transfer method, characterized in that the first LED, the second LED and the third LED can be picked up independently of each other.
청구항 6에 있어서,
제2단계는 제1LED안착부에 진공상태를 인가하여 제1LED를 제1LED안착부에 안착시키는 단계;
제2LED안착부에 진공상태를 인가하여 제2LED를 제2LED안착부에 안착시키는 단계; 및
제3LED안착부에 진공상태를 인가하여 제3LED를 제3LED안착부에 안착시키는 단계;가 순차 수행되는 것을 특징으로 하는 LED전사방법.
7. The method of claim 6,
The second step is to apply a vacuum state to the first LED seating portion to seat the first LED on the first LED seating portion;
applying a vacuum state to the second LED seating portion to seat the second LED on the second LED seating portion; and
The step of applying a vacuum state to the third LED seating portion to seat the third LED on the third LED seating portion; LED transfer method, characterized in that sequentially performed.
청구항 7에 있어서,
전사기판은 LED전사위치에 솔더페이스트를 포함하고,
제3단계는, 제1LED, 제2LED 및 제3LED가 솔더페이스트 상에 위치하는 단계;
가열하여 솔더페이스트를 고상화시키는 단계; 및
진공상태를 제거하여 제1LED, 제2LED 및 제3LED를 전사기판에 전사하는 단계;를 포함하는 것을 특징으로 하는 LED전사방법.
8. The method of claim 7,
The transfer substrate contains solder paste at the LED transfer position,
The third step is to place the first LED, the second LED and the third LED on the solder paste;
heating to solidify the solder paste; and
Transferring the first LED, the second LED and the third LED to the transfer substrate by removing the vacuum state; LED transfer method comprising the.
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