KR102416879B9 - 순차적 공정 압력 측정 시스템 - Google Patents

순차적 공정 압력 측정 시스템

Info

Publication number
KR102416879B9
KR102416879B9 KR1020200143966A KR20200143966A KR102416879B9 KR 102416879 B9 KR102416879 B9 KR 102416879B9 KR 1020200143966 A KR1020200143966 A KR 1020200143966A KR 20200143966 A KR20200143966 A KR 20200143966A KR 102416879 B9 KR102416879 B9 KR 102416879B9
Authority
KR
South Korea
Prior art keywords
pressure measurement
process pressure
sequential process
sequential
measurement
Prior art date
Application number
KR1020200143966A
Other languages
English (en)
Other versions
KR102416879B1 (ko
KR20220058330A (ko
Inventor
노주환
윤상진
Original Assignee
(주)에스디플렉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)에스디플렉스 filed Critical (주)에스디플렉스
Priority to KR1020200143966A priority Critical patent/KR102416879B1/ko
Publication of KR20220058330A publication Critical patent/KR20220058330A/ko
Application granted granted Critical
Publication of KR102416879B1 publication Critical patent/KR102416879B1/ko
Publication of KR102416879B9 publication Critical patent/KR102416879B9/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/02—Measuring force or stress, in general by hydraulic or pneumatic means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020200143966A 2020-10-31 2020-10-31 순차적 공정 압력 측정 시스템 KR102416879B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020200143966A KR102416879B1 (ko) 2020-10-31 2020-10-31 순차적 공정 압력 측정 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200143966A KR102416879B1 (ko) 2020-10-31 2020-10-31 순차적 공정 압력 측정 시스템

Publications (3)

Publication Number Publication Date
KR20220058330A KR20220058330A (ko) 2022-05-09
KR102416879B1 KR102416879B1 (ko) 2022-07-05
KR102416879B9 true KR102416879B9 (ko) 2023-03-23

Family

ID=81582170

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200143966A KR102416879B1 (ko) 2020-10-31 2020-10-31 순차적 공정 압력 측정 시스템

Country Status (1)

Country Link
KR (1) KR102416879B1 (ko)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060094204A (ko) * 2005-02-23 2006-08-29 삼성전자주식회사 공정 챔버의 압력 측정 장치
KR20060094326A (ko) * 2005-02-24 2006-08-29 삼성전자주식회사 압력 측정 장치 및 이의 동작 상태 검사 방법
US20090137192A1 (en) * 2007-11-28 2009-05-28 Mks Instruments, Inc. Multi-zone pressure control system
KR101439919B1 (ko) 2014-06-12 2014-09-15 엘앤텍(주) 밀폐 제품의 대용량 리크와 소용량 리크 모두를 검출할 수 있는 기밀 검사 장치

Also Published As

Publication number Publication date
KR102416879B1 (ko) 2022-07-05
KR20220058330A (ko) 2022-05-09

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Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]