KR102414417B9 - 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법 - Google Patents
다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법Info
- Publication number
- KR102414417B9 KR102414417B9 KR1020210001404A KR20210001404A KR102414417B9 KR 102414417 B9 KR102414417 B9 KR 102414417B9 KR 1020210001404 A KR1020210001404 A KR 1020210001404A KR 20210001404 A KR20210001404 A KR 20210001404A KR 102414417 B9 KR102414417 B9 KR 102414417B9
- Authority
- KR
- South Korea
- Prior art keywords
- porous silicon
- nanosensor
- metal nanoparticle
- manufacturing same
- porous
- Prior art date
Links
- 229910021426 porous silicon Inorganic materials 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002082 metal nanoparticle Substances 0.000 title 1
Priority Applications (1)
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KR1020210001404A KR102414417B1 (ko) | 2021-01-06 | 2021-01-06 | 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법 |
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KR1020210001404A KR102414417B1 (ko) | 2021-01-06 | 2021-01-06 | 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법 |
Publications (2)
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KR102414417B1 KR102414417B1 (ko) | 2022-06-28 |
KR102414417B9 true KR102414417B9 (ko) | 2023-11-13 |
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KR1020210001404A KR102414417B1 (ko) | 2021-01-06 | 2021-01-06 | 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법 |
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KR (1) | KR102414417B1 (ko) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101087267B1 (ko) * | 2009-10-13 | 2011-11-29 | 고려대학교 산학협력단 | 실리콘 나노와이어/탄소나노튜브/징크옥사이드 코어/다중쉘 나노복합체의 제조방법 및 상기 나노복합체를 포함하는 태양전지 |
PL219706B1 (pl) * | 2010-03-23 | 2015-06-30 | Inst Chemii Fizycznej Polskiej Akademii Nauk | Platforma do pomiarów powierzchniowo wzmocnionego efektu Ramana |
KR101396823B1 (ko) * | 2012-12-10 | 2014-05-20 | 재단법인대구경북과학기술원 | 국소 표면 플라즈몬 공명 센서 |
KR101544105B1 (ko) * | 2015-03-12 | 2015-08-12 | 가천대학교 산학협력단 | 플라워 형태의 금 나노입자가 포함된 적층체 및 그의 제조방법 |
KR101991563B1 (ko) * | 2017-06-13 | 2019-06-20 | 중앙대학교 산학협력단 | 도파민 검출용 센서 및 이의 제조 방법 |
US11083902B2 (en) * | 2018-05-29 | 2021-08-10 | International Business Machines Corporation | Biosensor package |
KR20200006455A (ko) * | 2018-07-10 | 2020-01-20 | 재단법인 아산사회복지재단 | 표면증강 라만분광용 기판 및 이의 제조방법 |
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2021
- 2021-01-06 KR KR1020210001404A patent/KR102414417B1/ko active IP Right Grant
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KR102414417B1 (ko) | 2022-06-28 |
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