KR102414417B9 - 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법 - Google Patents

다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법

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Publication number
KR102414417B9
KR102414417B9 KR1020210001404A KR20210001404A KR102414417B9 KR 102414417 B9 KR102414417 B9 KR 102414417B9 KR 1020210001404 A KR1020210001404 A KR 1020210001404A KR 20210001404 A KR20210001404 A KR 20210001404A KR 102414417 B9 KR102414417 B9 KR 102414417B9
Authority
KR
South Korea
Prior art keywords
porous silicon
nanosensor
metal nanoparticle
manufacturing same
porous
Prior art date
Application number
KR1020210001404A
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English (en)
Other versions
KR102414417B1 (ko
Inventor
이상화
Original Assignee
가천대학교 산학협력단
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Priority to KR1020210001404A priority Critical patent/KR102414417B1/ko
Application granted granted Critical
Publication of KR102414417B1 publication Critical patent/KR102414417B1/ko
Publication of KR102414417B9 publication Critical patent/KR102414417B9/ko

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KR1020210001404A 2021-01-06 2021-01-06 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법 KR102414417B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020210001404A KR102414417B1 (ko) 2021-01-06 2021-01-06 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020210001404A KR102414417B1 (ko) 2021-01-06 2021-01-06 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법

Publications (2)

Publication Number Publication Date
KR102414417B1 KR102414417B1 (ko) 2022-06-28
KR102414417B9 true KR102414417B9 (ko) 2023-11-13

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KR1020210001404A KR102414417B1 (ko) 2021-01-06 2021-01-06 다공성 실리콘 및 금속 나노입자를 포함하는 다공성 실리콘 나노센서 및 그의 제조방법

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101087267B1 (ko) * 2009-10-13 2011-11-29 고려대학교 산학협력단 실리콘 나노와이어/탄소나노튜브/징크옥사이드 코어/다중쉘 나노복합체의 제조방법 및 상기 나노복합체를 포함하는 태양전지
PL219706B1 (pl) * 2010-03-23 2015-06-30 Inst Chemii Fizycznej Polskiej Akademii Nauk Platforma do pomiarów powierzchniowo wzmocnionego efektu Ramana
KR101396823B1 (ko) * 2012-12-10 2014-05-20 재단법인대구경북과학기술원 국소 표면 플라즈몬 공명 센서
KR101544105B1 (ko) * 2015-03-12 2015-08-12 가천대학교 산학협력단 플라워 형태의 금 나노입자가 포함된 적층체 및 그의 제조방법
KR101991563B1 (ko) * 2017-06-13 2019-06-20 중앙대학교 산학협력단 도파민 검출용 센서 및 이의 제조 방법
US11083902B2 (en) * 2018-05-29 2021-08-10 International Business Machines Corporation Biosensor package
KR20200006455A (ko) * 2018-07-10 2020-01-20 재단법인 아산사회복지재단 표면증강 라만분광용 기판 및 이의 제조방법

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