KR102414098B1 - 주변-미만 온도 증기 센서 및 이용 방법 - Google Patents

주변-미만 온도 증기 센서 및 이용 방법 Download PDF

Info

Publication number
KR102414098B1
KR102414098B1 KR1020167024600A KR20167024600A KR102414098B1 KR 102414098 B1 KR102414098 B1 KR 102414098B1 KR 1020167024600 A KR1020167024600 A KR 1020167024600A KR 20167024600 A KR20167024600 A KR 20167024600A KR 102414098 B1 KR102414098 B1 KR 102414098B1
Authority
KR
South Korea
Prior art keywords
sensor element
vapor
sensor
delete delete
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020167024600A
Other languages
English (en)
Korean (ko)
Other versions
KR20160127020A (ko
Inventor
스테판 에이치 그리스카
미카엘 씨 팔라조토
저스틴 퉁준야탐
명찬 강
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 쓰리엠 이노베이티브 프로퍼티즈 캄파니 filed Critical 쓰리엠 이노베이티브 프로퍼티즈 캄파니
Publication of KR20160127020A publication Critical patent/KR20160127020A/ko
Application granted granted Critical
Publication of KR102414098B1 publication Critical patent/KR102414098B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226Construction of measuring vessels; Electrodes therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G01N2027/222Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020167024600A 2014-02-27 2015-02-19 주변-미만 온도 증기 센서 및 이용 방법 Expired - Fee Related KR102414098B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461945583P 2014-02-27 2014-02-27
US61/945,583 2014-02-27
PCT/US2015/016620 WO2015130548A1 (en) 2014-02-27 2015-02-19 Sub-ambient temperature vapor sensor and method of use

Publications (2)

Publication Number Publication Date
KR20160127020A KR20160127020A (ko) 2016-11-02
KR102414098B1 true KR102414098B1 (ko) 2022-06-29

Family

ID=53005625

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167024600A Expired - Fee Related KR102414098B1 (ko) 2014-02-27 2015-02-19 주변-미만 온도 증기 센서 및 이용 방법

Country Status (6)

Country Link
US (1) US10161896B2 (https=)
EP (1) EP3111203A1 (https=)
JP (1) JP6576356B2 (https=)
KR (1) KR102414098B1 (https=)
CN (1) CN106062545A (https=)
WO (1) WO2015130548A1 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107709998A (zh) 2015-04-27 2018-02-16 虚拟流体监测服务有限责任公司 用于流体分析与监测的系统、装置和方法
US10591388B2 (en) 2015-04-27 2020-03-17 Virtual Fluid Monitoring Services LLC Fluid analysis and monitoring using optical spectroscopy
US9780554B2 (en) * 2015-07-31 2017-10-03 Apple Inc. Moisture sensors
US10083883B2 (en) * 2016-06-20 2018-09-25 Applied Materials, Inc. Wafer processing equipment having capacitive micro sensors
WO2019246099A1 (en) * 2018-06-19 2019-12-26 Virtual Fluid Monitoring Services LLC Fluid analysis and monitoring using optical spectroscopy
CN109142185B (zh) * 2018-08-30 2020-05-05 上海大学 一种水汽透过率测试系统和方法
CN111122185A (zh) * 2019-06-28 2020-05-08 浙江荷清柔性电子技术有限公司 旋转部件健康监测系统及机车
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles
WO2025115398A1 (ja) * 2023-11-29 2025-06-05 パナソニックIpマネジメント株式会社 回路基板用フィルム、回路基板、伝送方法、及び回路基板用フィルムの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012141883A1 (en) * 2011-04-13 2012-10-18 3M Innovative Properties Company Method of using an absorptive sensor element
US20130186177A1 (en) * 2010-09-30 2013-07-25 3M Innovative Properties Company Sensor Element, Method of Making the Same, and Sensor Device Including the Same
KR101367887B1 (ko) * 2012-03-16 2014-03-03 주식회사삼영에스앤씨 정전용량형 습도센서

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794347B2 (ja) * 1991-03-11 1998-09-03 新コスモス電機株式会社 ガス濃度検出方法及び検知素子並びに検出装置
JP2853622B2 (ja) * 1995-12-12 1999-02-03 横河電機株式会社 ガス測定装置
EP0787985A1 (de) * 1996-02-03 1997-08-06 Cerberus Ag Verfahren und Vorrichtung für den Nachweis von organischen Dämpfen und Aerosolen
US5792938A (en) 1996-12-13 1998-08-11 Panametrics, Inc. Humidity sensor with differential thermal detection and method of sensing
GB2328556A (en) * 1997-08-21 1999-02-24 Univ Cardiff Thermoelectric cooler for semiconductor devices
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US7498802B2 (en) 2006-07-10 2009-03-03 3M Innovative Properties Company Flexible inductive sensor
US20080018424A1 (en) 2006-07-10 2008-01-24 3M Innovative Properties Company Inductive sensor
JP2010540966A (ja) * 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
CN103477217B (zh) 2011-04-13 2015-12-23 3M创新有限公司 包含校准信息的电子器件及其使用方法
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
US9506888B2 (en) * 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
CN103528603A (zh) * 2012-07-05 2014-01-22 北斗电子工业株式会社 静电电容式水分检测装置
CN102944325B (zh) 2012-11-29 2014-03-12 东南大学 一种无源无线温、湿度集成传感器
WO2015047750A1 (en) 2013-09-26 2015-04-02 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130186177A1 (en) * 2010-09-30 2013-07-25 3M Innovative Properties Company Sensor Element, Method of Making the Same, and Sensor Device Including the Same
WO2012141883A1 (en) * 2011-04-13 2012-10-18 3M Innovative Properties Company Method of using an absorptive sensor element
KR101367887B1 (ko) * 2012-03-16 2014-03-03 주식회사삼영에스앤씨 정전용량형 습도센서

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Sensors and Actuators, vol.79, pp.189-193 (2000) 1부.*

Also Published As

Publication number Publication date
JP2017506751A (ja) 2017-03-09
JP6576356B2 (ja) 2019-09-18
EP3111203A1 (en) 2017-01-04
KR20160127020A (ko) 2016-11-02
US20170016843A1 (en) 2017-01-19
CN106062545A (zh) 2016-10-26
US10161896B2 (en) 2018-12-25
WO2015130548A1 (en) 2015-09-03

Similar Documents

Publication Publication Date Title
KR102414098B1 (ko) 주변-미만 온도 증기 센서 및 이용 방법
CN103154712B (zh) 传感器元件及其制备方法和包括所述传感器元件的传感器装置
CN103492872B (zh) 使用吸收性传感器元件的方法
EP2791667B1 (en) Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
CN103477217B (zh) 包含校准信息的电子器件及其使用方法
EP2864770B1 (en) Sensor element, method of making, and method of using the same
US9506888B2 (en) Vapor sensor including sensor element with integral heating
JP5932806B2 (ja) センサー素子、その製造方法、及びそれを含むセンサー装置
EP2697635A1 (en) Method of detecting volatile organic compounds
Weiss et al. Surface-modified CAU-10 MOF materials as humidity sensors: impedance spectroscopic study on water uptake
Korotcenkov Humidity-sensitive materials

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20250624

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

H13 Ip right lapsed

Free format text: ST27 STATUS EVENT CODE: N-4-6-H10-H13-OTH-PC1903 (AS PROVIDED BY THE NATIONAL OFFICE); TERMINATION CATEGORY : DEFAULT_OF_REGISTRATION_FEE

Effective date: 20250624

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20250624