KR102404385B1 - 레이저가공장치 - Google Patents

레이저가공장치 Download PDF

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Publication number
KR102404385B1
KR102404385B1 KR1020180083468A KR20180083468A KR102404385B1 KR 102404385 B1 KR102404385 B1 KR 102404385B1 KR 1020180083468 A KR1020180083468 A KR 1020180083468A KR 20180083468 A KR20180083468 A KR 20180083468A KR 102404385 B1 KR102404385 B1 KR 102404385B1
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KR
South Korea
Prior art keywords
optical
laser beam
polarization direction
branching
optical path
Prior art date
Application number
KR1020180083468A
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English (en)
Korean (ko)
Other versions
KR20190052603A (ko
Inventor
토모유키 야마구치
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 스미도모쥬기가이고교 가부시키가이샤 filed Critical 스미도모쥬기가이고교 가부시키가이샤
Publication of KR20190052603A publication Critical patent/KR20190052603A/ko
Application granted granted Critical
Publication of KR102404385B1 publication Critical patent/KR102404385B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Laser Beam Processing (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Laser Surgery Devices (AREA)
KR1020180083468A 2017-11-08 2018-07-18 레이저가공장치 KR102404385B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017215395A JP7190808B2 (ja) 2017-11-08 2017-11-08 レーザ加工装置及びレーザ加工方法
JPJP-P-2017-215395 2017-11-08

Publications (2)

Publication Number Publication Date
KR20190052603A KR20190052603A (ko) 2019-05-16
KR102404385B1 true KR102404385B1 (ko) 2022-05-31

Family

ID=66449856

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180083468A KR102404385B1 (ko) 2017-11-08 2018-07-18 레이저가공장치

Country Status (4)

Country Link
JP (1) JP7190808B2 (ja)
KR (1) KR102404385B1 (ja)
CN (1) CN109759694B (ja)
TW (1) TWI798238B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021187042A1 (ja) * 2020-03-16 2021-09-23 住友重機械工業株式会社 ビーム分岐装置及び分岐比調整方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013071136A (ja) * 2011-09-27 2013-04-22 Hitachi Via Mechanics Ltd レーザ加工装置
JP2017159317A (ja) * 2016-03-09 2017-09-14 住友重機械工業株式会社 レーザ加工装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003200279A (ja) * 2001-10-24 2003-07-15 Seiko Epson Corp 基板の電気配線切断方法及びその装置、並びに電子デバイスの製造方法及びその装置
US6947454B2 (en) * 2003-06-30 2005-09-20 Electro Scientific Industries, Inc. Laser pulse picking employing controlled AOM loading
JP2005095936A (ja) * 2003-09-25 2005-04-14 Matsushita Electric Ind Co Ltd レーザ加工装置及びレーザ加工工法
US7511247B2 (en) * 2004-03-22 2009-03-31 Panasonic Corporation Method of controlling hole shape during ultrafast laser machining by manipulating beam polarization
US7227098B2 (en) * 2004-08-06 2007-06-05 Electro Scientific Industries, Inc. Method and system for decreasing the effective pulse repetition frequency of a laser
WO2006062766A2 (en) * 2004-11-29 2006-06-15 Electro Scientific Industries, Inc. Efficient micro-machining apparatus and method employing multiple laser beams
US20060114948A1 (en) * 2004-11-29 2006-06-01 Lo Ho W Workpiece processing system using a common imaged optical assembly to shape the spatial distributions of light energy of multiple laser beams
JP2011180039A (ja) * 2010-03-02 2011-09-15 Sigma Koki Kk 被検体損傷分析装置
WO2015087564A1 (ja) * 2013-12-10 2015-06-18 三菱電機株式会社 レーザレーダ装置
JPWO2015118829A1 (ja) * 2014-02-05 2017-03-23 パナソニックＩｐマネジメント株式会社 レーザ加工装置
JP6234296B2 (ja) * 2014-03-27 2017-11-22 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
CN204012178U (zh) * 2014-07-07 2014-12-10 上海朗研光电科技有限公司 基于偏振分束的光纤式脉冲展宽与压缩装置
JP6430790B2 (ja) * 2014-11-25 2018-11-28 株式会社ディスコ レーザー加工装置
CN204470782U (zh) * 2015-02-10 2015-07-15 昆山乙盛机械工业有限公司 一种可调节的激光加工装置
CN107221830B (zh) * 2017-07-27 2019-02-22 中国科学院长春光学精密机械与物理研究所 一种非稳腔单频激光输出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013071136A (ja) * 2011-09-27 2013-04-22 Hitachi Via Mechanics Ltd レーザ加工装置
JP2017159317A (ja) * 2016-03-09 2017-09-14 住友重機械工業株式会社 レーザ加工装置

Also Published As

Publication number Publication date
CN109759694A (zh) 2019-05-17
JP7190808B2 (ja) 2022-12-16
TWI798238B (zh) 2023-04-11
JP2019084567A (ja) 2019-06-06
KR20190052603A (ko) 2019-05-16
CN109759694B (zh) 2022-02-01
TW201918310A (zh) 2019-05-16

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