KR102388979B1 - 터치 센서 장치 - Google Patents

터치 센서 장치 Download PDF

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Publication number
KR102388979B1
KR102388979B1 KR1020167008753A KR20167008753A KR102388979B1 KR 102388979 B1 KR102388979 B1 KR 102388979B1 KR 1020167008753 A KR1020167008753 A KR 1020167008753A KR 20167008753 A KR20167008753 A KR 20167008753A KR 102388979 B1 KR102388979 B1 KR 102388979B1
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KR
South Korea
Prior art keywords
touch sensor
sensor device
layer
contact structure
metal
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KR1020167008753A
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English (en)
Korean (ko)
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KR20160067849A (ko
Inventor
하랄트 쾨슈텐바우어
도미니크 로렌츠
브루스 쳉
외르크 빈클러
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플란제 에스이
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Publication of KR20160067849A publication Critical patent/KR20160067849A/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412—Digitisers structurally integrated in a display

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Position Input By Displaying (AREA)
  • Physical Vapour Deposition (AREA)
KR1020167008753A 2013-10-04 2014-10-01 터치 센서 장치 Active KR102388979B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ATGM319/2013 2013-10-04
ATGM319/2013U AT13879U1 (de) 2013-10-04 2013-10-04 Berührungssensoranordnung
PCT/AT2014/000178 WO2015048828A1 (de) 2013-10-04 2014-10-01 Berührungssensoranordnung

Publications (2)

Publication Number Publication Date
KR20160067849A KR20160067849A (ko) 2016-06-14
KR102388979B1 true KR102388979B1 (ko) 2022-04-20

Family

ID=51660823

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167008753A Active KR102388979B1 (ko) 2013-10-04 2014-10-01 터치 센서 장치

Country Status (6)

Country Link
JP (1) JP6747970B2 (https=)
KR (1) KR102388979B1 (https=)
CN (1) CN105593800B (https=)
AT (1) AT13879U1 (https=)
TW (1) TWI623871B (https=)
WO (1) WO2015048828A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11926558B2 (en) 2015-03-27 2024-03-12 Lg Chem Ltd. Conductive structure, manufacturing method therefor, and electrode comprising conductive structure
WO2017099476A1 (ko) * 2015-12-07 2017-06-15 주식회사 엘지화학 전도성 구조체, 이의 제조방법 및 전도성 구조체를 포함하는 전극
WO2017170862A1 (ja) 2016-04-01 2017-10-05 凸版印刷株式会社 印刷体、印刷体管理装置、情報出力システム、及び印刷体のページ識別方法
KR102573333B1 (ko) * 2016-06-28 2023-08-31 삼성디스플레이 주식회사 표시 장치
US10151953B2 (en) * 2017-02-22 2018-12-11 A. U. Vista, Inc. In-plane switching display having protrusion electrodes with metal enhanced adhesion
CN108121098B (zh) 2017-12-19 2019-08-06 友达光电股份有限公司 金属结构及其制作方法与应用的显示面板
CN110872687B (zh) * 2018-09-03 2022-07-19 大同特殊钢株式会社 层叠体及靶材
TWI722860B (zh) * 2020-04-08 2021-03-21 新唐科技股份有限公司 氣體感測材料與氣體感測器
CN114510167B (zh) * 2020-11-17 2024-04-12 瀚宇彩晶股份有限公司 触控感测面板
CN112680967B (zh) * 2020-12-15 2022-02-18 武汉纺织大学 具有单向导湿作用的压阻传感织物及其制备方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012134174A2 (ko) * 2011-03-28 2012-10-04 주식회사 엘지화학 전도성 구조체， 터치패널 및 이의 제조방법

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4071849B2 (ja) * 1997-10-08 2008-04-02 アルバック成膜株式会社 ブランクス及びブラックマトリクス
US7378146B1 (en) * 1998-08-05 2008-05-27 International Business Machines Corporation Transparent hard coats for optical elements
JP3735814B2 (ja) * 2001-09-28 2006-01-18 Ｈｏｙａ株式会社 液晶表示パネル用対向基板、及び液晶表示パネル
US8552989B2 (en) 2006-06-09 2013-10-08 Apple Inc. Integrated display and touch screen
TWI450237B (zh) * 2010-01-14 2014-08-21 Wintek Corp 觸控顯示裝置
AT11941U1 (de) * 2010-02-12 2011-07-15 Plansee Metall Gmbh Berührungssensoranordnung
CN102243553B (zh) * 2010-05-16 2015-06-10 宸鸿科技(厦门)有限公司 电容式触控面板及降低其金属导体可见度的方法
EP2402481A1 (en) * 2010-06-29 2012-01-04 Applied Materials, Inc. Method and system for manufacturing a transparent body for use in a touch panel
US8449817B2 (en) * 2010-06-30 2013-05-28 H.C. Stark, Inc. Molybdenum-containing targets comprising three metal elements
CN103168285B (zh) * 2010-10-19 2016-05-11 Lg化学株式会社 包括导电图形的触摸面板及其制备方法
KR101367569B1 (ko) * 2010-12-29 2014-02-28 주식회사 엘지화학 터치 스크린 및 이의 제조방법
JP2012173799A (ja) * 2011-02-17 2012-09-10 Sumitomo Chemical Co Ltd 透明導電性基板、それを用いた電子デバイスおよびタッチパネル
KR101385898B1 (ko) * 2011-03-28 2014-04-16 주식회사 엘지화학 전도성 기판 및 이를 포함하는 터치스크린
JP2013020347A (ja) * 2011-07-08 2013-01-31 Toppan Printing Co Ltd タッチパネルおよびタッチパネルの製造方法
KR101415583B1 (ko) * 2011-12-16 2014-07-07 엘지이노텍 주식회사 터치 패널 및 그 제조 방법
TWM472245U (zh) * 2013-07-31 2014-02-11 Wintek Corp 觸控面板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012134174A2 (ko) * 2011-03-28 2012-10-04 주식회사 엘지화학 전도성 구조체， 터치패널 및 이의 제조방법

Also Published As

Publication number Publication date
CN105593800B (zh) 2019-11-08
JP2016533562A (ja) 2016-10-27
JP6747970B2 (ja) 2020-08-26
KR20160067849A (ko) 2016-06-14
TW201528096A (zh) 2015-07-16
CN105593800A (zh) 2016-05-18
AT13879U1 (de) 2014-10-15
TWI623871B (zh) 2018-05-11
WO2015048828A1 (de) 2015-04-09

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