KR102360216B1 - Apparatus and method for generating nano or micro bubble using porous membrane and ultrasonic transducer - Google Patents

Abstract

The present invention relates to an apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied, and more particularly, to a chamber in which a fluid is accommodated; a gas supply line for supplying gas into the fluid accommodated in the chamber; a microbubble discharging unit installed inside the chamber, the gas supplied through the gas supply line is introduced into the inside to generate bubbles to the outside; and an ultrasonic wave applying unit that applies ultrasonic waves to the air bubbles generated through the microbubble releasing unit and emits them in the form of microbubbles.

Description

Apparatus and method for generating nano or micro bubble using porous membrane and ultrasonic transducer}

The present invention relates to an apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied. More particularly, it relates to an apparatus and method for generating microbubbles or ultra-fine bubbles having a membrane having a nano-sized porous membrane and an ultrasonic wave applying unit.

A bubble refers to a bag of gas present in a liquid, that is, a bubble. A microbubble is much smaller than a normal bubble among them, and refers to a bubble whose size is so small that its size must be expressed in nanometers.

Microbubbles have different characteristics from normal bubbles in the following three aspects.

First, normal air bubbles with a size or diameter of several millimeters or more in a liquid rise up at the same time as they are created and burst on the surface of the liquid. Bubbles float upward because their buoyancy is greater than the resistance of the liquid.

On the other hand, microbubbles stay in the liquid for a long time. The reason is that the buoyancy force of microbubbles is very small and cannot overcome the resistance of the liquid.

Second, when the microbubbles stay in the liquid for a long time, the gas inside the microbubbles gradually dissolves into the liquid through the surface and the size becomes smaller. Moreover, if the solubility of the gas in the microbubble in the liquid is high, the bubble itself is completely dissolved and disappears.

Third, the smaller the bubble size, the larger the ratio of surface area to volume increases, so the efficiency of application fields utilizing the surface properties of microbubbles, such as water purification, where the trapping effect of microbubbles can be used, increases.

These three characteristics of microbubbles enable various applications of nanobubbles.

In the case of water treatment, it is possible to shorten the treatment time to improve water quality by effectively injecting air into the water. It is opening the way to effectively decompose or remove It dramatically shortens the time. In addition to this, it can be used in various fields requiring sterilization, cleaning, purification, and the like.

As a conventional device for generating fine bubbles, there are disclosed Patent Publication No. 10-2015-0040134 'A device for generating fine bubbles', and Patent Registration No. 10-1036227 'A device for generating fine bubbles'. These patents have a problem in that the structure for generating microbubbles is complicatedly designed, making it difficult to manufacture the device and increasing the manufacturing cost.

In addition, conventional techniques for generating bubbles through a porous plate, a porous tube, etc. are described in Patent Registration Nos. 1795907 and 1505917.

1 is a cross-sectional view showing a process in which bubbles are generated through a conventional membrane in which a plurality of micropores are formed. As shown in FIG. 1 , when gas is generally supplied to the membrane, it can be seen that the bubbles grown on the membrane surface due to the surface tension of water grow 5 to 10 times the size of the pores and are desorbed. Therefore, there is a problem that nano-sized microbubbles cannot be generated even if the membrane pore size is designed to be nano-sized.

Republic of Korea Patent Publication No. 2015-0040134 Republic of Korea Patent No. 1036227 Republic of Korea Patent No. 1795907, Republic of Korea Patent No. 1505917

Therefore, the present invention has been devised to solve the conventional problems as described above. According to an embodiment of the present invention, by applying an ultrasonic wave applying unit, the bubbles are desorbed before the growth of the bubbles from the membrane surface to generate microbubbles. An object of the present invention is to provide an apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied.

According to an embodiment of the present invention, in the generation of microbubbles, air bubbles are formed on the surface of the membrane by gas supply, and at this time, the bubbles repeat contraction and expansion by the applied ultrasound, and shear force is applied to the air bubbles exposed to the continuous ultrasound wavelength. It is an object of the present invention to provide an apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied, in which bubbles are desorbed from the membrane surface to form microbubbles.

And, according to an embodiment of the present invention, by installing a plurality of ultrasonicators, it is possible to diversify the nanobubble gas through selective gas supply, and to control the membrane porous size to generate nanobubbles of various sizes. Therefore, an object of the present invention is to provide an apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied, which can be applied to a wide range of applications.

On the other hand, the technical problems to be achieved in the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned are clearly to those of ordinary skill in the art to which the present invention belongs from the description below. can be understood

A first object of the present invention is to provide an apparatus for generating microbubbles, comprising: a chamber in which a fluid is accommodated; a gas supply line for supplying a gas into the fluid accommodated in the chamber; a microbubble discharging unit installed inside the chamber, the gas supplied through the gas supply line is introduced into the inside to generate bubbles to the outside; and an ultrasonic wave applying unit that applies ultrasonic waves to the bubbles generated through the microbubble releasing unit and emits them in the form of microbubbles.

And the ultrasonic application unit is installed on one side or the other side of the chamber in which the microbubble discharging unit is installed, it may be characterized in that it applies the ultrasound in a direction crossing the emission direction of the microbubbles.

In addition, the microbubble releasing unit may be characterized in that it is composed of a membrane unit having an inner space and having fine pores formed on the outer surface.

And the ultrasonic wave applying unit may be characterized in that it applies ultrasonic waves in a direction parallel to the plane direction of the membrane unit.

In addition, the membrane unit may have a circular cross-section, and a plurality of the ultrasonic application units may be positioned in a radial form spaced apart from each other in a circumferential direction in proximity to the outer surface of the membrane unit.

The membrane unit may have a circular cross-section, and the ultrasonic wave applying unit may have a circular cross-section so as to surround the outer surface of the membrane unit closely.

In addition, the membrane unit may have a rectangular cross-section, and a plurality of the ultrasonic application units may be positioned radially adjacent to the outer surface of the membrane unit.

In addition, the membrane unit may have a rectangular cross-section, and the ultrasonic wave applying unit may have a rectangular cross-section so as to surround the outer surface of the membrane unit closely.

In addition, it may be characterized in that it further comprises a detachable member for attaching and detaching the microbubble discharging unit to the chamber.

And it may be characterized in that it further comprises a detachable means for attaching and detaching the ultrasonic applying unit to the chamber.

In addition, it may further include a vibration absorber provided between the ultrasonic wave applying unit and the chamber to absorb the vibration generated by the ultrasonic wave applying unit and transmitted to the chamber.

and a pressure sensor provided on one side of the gas supply line to measure the pressure of the supplied gas, and a control valve for controlling the flow rate of the gas supplied from the gas supply line to the microbubble discharging unit. can

In addition, an output control unit for controlling the output of the ultrasound applied through the ultrasound applying unit, and controlling the control valve based on the value measured by the pressure sensor to adjust the flow rate of the gas supplied to the microbubble discharging unit It may be characterized in that it further comprises a control unit.

A second object of the present invention is to provide a method for generating microbubbles, comprising: a first step of supplying gas into a microbubble discharging unit installed in a chamber through a gas supply line; a second step of generating air bubbles to the outside through the membrane unit in which micropores are formed and constituting the outer surface of the microbubble discharging unit; and a third step in which the microbubbles are detached from the surface of the membrane unit by applying an ultrasonic wave through an ultrasonic wave applying unit in a direction crossing the direction in which the bubbles are generated and applying a shear force to the bubbles. It can be achieved as a method of generating microbubbles applying

And the ultrasonic application unit is installed on one side or the other side of the chamber in which the microbubble emitting unit is installed, and in the third step, it may be characterized in that it applies ultrasonic waves in a direction parallel to the plane direction of the membrane unit. .

In addition, in the first step, the control unit controls the control valve based on the pressure value of the gas measured by the pressure sensor provided on one side of the gas supply line to adjust the flow rate of the gas supplied to the microbubble discharging unit, characterized in that can do.

And in the third step, the control unit may control to selectively drive the plurality of ultrasound application units, and control the output control unit to adjust the output of the ultrasound applied through the ultrasound application unit.

According to the apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied according to an embodiment of the present invention, the effect of generating microbubbles by applying an ultrasonic wave applying unit to desorb the air bubbles before growth of the air bubbles from the membrane surface has

According to the apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied according to an embodiment of the present invention, in the microbubble generation, air bubbles are formed on the surface of the membrane by gas supply, and at this time, the air bubbles contract and expand by the applied ultrasound. is repeated, and a shear force is applied to the bubbles exposed to the continuous ultrasonic wave, which has the effect of desorbing from the membrane surface and forming microbubbles.

And, according to the apparatus and method for generating microbubbles to which a membrane and ultrasonic waves are applied according to an embodiment of the present invention, a plurality of ultrasonicators can be installed to diversify the nanobubble gas through selective gas supply, and the membrane porous size (porous size) is provided. size) can be adjusted to create nanobubbles of various sizes, so it has the advantage of enabling a wide range of applications and examples.

On the other hand, the effects obtainable in the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those of ordinary skill in the art to which the present invention belongs from the following description. will be able

The following drawings attached to the present specification illustrate a preferred embodiment of the present invention, and serve to further understand the technical spirit of the present invention together with the detailed description of the present invention, so the present invention is limited to the matters described in those drawings It should not be construed as being limited.
1 is a cross-sectional view showing a process in which bubbles are generated through a membrane in which a plurality of micropores are formed in the prior art;
2 is a cross-sectional view of an apparatus for generating microbubbles to which a membrane and ultrasonic waves are applied according to a first embodiment of the present invention;
3 is a cross-sectional view of an apparatus for generating microbubbles to which a membrane and ultrasonic waves are applied according to a second embodiment of the present invention;
4 is a cross-sectional view showing a process of generating microbubbles according to an embodiment of the present invention;
5A is a cross-sectional view of a microbubble generating device having a circular cross-section membrane unit and four ultrasonic wave applying units around it according to an embodiment of the present invention;
5B is a cross-sectional view of a microbubble generating device having a circular cross-section membrane unit and eight ultrasonic wave applying units around it according to an embodiment of the present invention;
5C is a cross-sectional view of a microbubble generating device having a circular cross-section membrane unit and an ultrasonic wave applying unit having four annular cross-sections around it according to an embodiment of the present invention;
5D is a cross-sectional view of an apparatus for generating microbubbles having a circular cross-section membrane unit and an ultrasonic wave applying unit having a circular cross-section according to an embodiment of the present invention;
5E is a cross-sectional view of a microbubble generating device having a membrane unit having a rectangular cross section and four ultrasonic wave applying units around it according to an embodiment of the present invention;
5f is a cross-sectional view of a microbubble generating device having a rectangular cross-section membrane unit and an ultrasonic wave applying unit having a square cross-section according to an embodiment of the present invention;
6 is a cross-sectional view of a microbubble generating device to which an ultrasonic wave is applied and a membrane having a detachable member and detachable means according to an embodiment of the present invention;
7 is a cross-sectional view of a microbubble generating device to which an integrated membrane and ultrasonic waves are applied according to an embodiment of the present invention;
8 is a block diagram illustrating a signal flow of a control unit according to an embodiment of the present invention.

The above objects, other objects, features and advantages of the present invention will be easily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed subject matter may be thorough and complete, and that the spirit of the present invention may be sufficiently conveyed to those skilled in the art.

In this specification, when a component is referred to as being on another component, it means that it may be directly formed on the other component or a third component may be interposed therebetween. In addition, in the drawings, the thickness of the components is exaggerated for effective description of the technical content.

Embodiments described herein will be described with reference to cross-sectional and/or plan views, which are ideal illustrative views of the present invention. In the drawings, thicknesses of films and regions are exaggerated for effective description of technical content. Accordingly, the shape of the illustrative drawing may be modified due to manufacturing technology and/or tolerance. Therefore, embodiments of the present invention are not limited to the specific form shown, but also include changes in the form generated according to the manufacturing process. For example, the region shown at right angles may be rounded or have a predetermined curvature. Accordingly, the regions illustrated in the drawings have properties, and the shapes of the illustrated regions in the drawings are intended to illustrate specific shapes of regions of the device and not to limit the scope of the invention. In various embodiments of the present specification, terms such as first, second, etc. are used to describe various components, but these components should not be limited by these terms. These terms are only used to distinguish one component from another. Embodiments described and illustrated herein also include complementary embodiments thereof.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, the terms 'comprises' and/or 'comprising' do not exclude the presence or addition of one or more other components.

In describing the specific embodiments below, various specific contents have been prepared to more specifically describe the invention and help understanding. However, a reader having enough knowledge in this field to understand the present invention may recognize that it can be used without these various specific details. In some cases, it is mentioned in advance that parts that are commonly known and not largely related to the invention are not described in order to avoid confusion without any reason in describing the present invention.

Hereinafter, the configuration and function of the microbubble generating apparatus 100 to which the membrane and ultrasonic waves are applied according to an embodiment of the present invention will be described.

According to the apparatus 100 for generating microbubbles to which a membrane and ultrasonic waves are applied according to an embodiment of the present invention, by applying the ultrasonic wave applying unit 40, the microbubbles are generated by desorbing the air bubbles before the growth of the air bubbles on the membrane surface. be able to do

And in the generation of microbubbles, air bubbles are formed on the membrane surface by gas supply. At this time, the bubbles repeat contraction and expansion by the applied ultrasonic wave, and shear force is applied to the air bubbles exposed to the continuous ultrasonic wave waves. It is desorbed from the membrane surface to form microbubbles.

In addition, by installing a plurality of ultrasonicators 40, it is possible to diversify the nanobubble gas through selective gas supply, and it is possible to generate nanobubbles of various sizes by adjusting the porous size of the membrane porous 31. A wide range of applications and applications are possible.

2 is a cross-sectional view of a microbubble generating apparatus 100 to which a membrane and ultrasonic waves are applied according to a first embodiment of the present invention. As shown in FIG. 2 , the microbubble generating apparatus 100 to which the membrane and ultrasonic waves are applied according to the first embodiment of the present invention is premised into a chamber 10 in which a fluid is accommodated, and a fluid accommodated in the chamber 10 . A gas supply line 20 for supplying gas, a microbubble discharge unit installed inside the chamber 10, the gas supplied through the gas supply line 20 flows into the inside to generate bubbles to the outside; It can be seen that it can be configured to include an ultrasonic wave applying unit 40 that applies ultrasonic waves to the bubbles generated through the bubble releasing unit and emits them in the form of microbubbles.

The fluid accommodated in the chamber 10 may be water 1 in a specific embodiment, and the ultrasonic wave applying unit 40 may be composed of a vibrator such as a piezoelectric element, and if it has ultrasonic waves, it can be applied. The configuration is not limited.

As shown in FIG. 2 , it can be seen that a plurality of ultrasonic application units 40 may be installed on the side of the chamber 10 in which the microbubble discharging unit is installed.

3 is a cross-sectional view of a microbubble generating apparatus 100 to which a membrane and ultrasonic waves are applied according to a second embodiment of the present invention. As shown in FIG. 3 , it can be seen that a plurality of ultrasonic application units 40 may be installed on the other side opposite to the side surface of the chamber 10 in which the microbubble discharging unit is installed.

The microbubble discharging unit according to an embodiment of the present invention is composed of a membrane unit 30 having an inner space and having fine pores 31 formed on an outer surface thereof.

The ultrasonic wave applying unit 40 excites the ultrasonic waves in a direction crossing the emission direction of the microbubbles. Preferably, the ultrasonic wave is applied in a direction parallel to the plane direction of the membrane unit 30 . That is, the ultrasonic wave is applied in a direction in which a shear force is applied to the bubbles generated on the surface of the membrane unit 30 .

4 is a cross-sectional view illustrating a process of generating microbubbles according to an embodiment of the present invention. As shown in FIG. 4 , in the generation of microbubbles, air bubbles are formed on the surface of the membrane unit 30 by gas supply, and at this time, the air bubbles repeat contraction and expansion by the applied ultrasound, and are continuously exposed to ultrasonic waves. A shear force is applied to the formed bubbles, which causes the bubbles to be detached from the surface of the membrane unit 30 to form microbubbles.

A plurality of ultrasonic wave applying units 40 are installed close to the surface of the membrane unit 30 to excite the ultrasonic waves in parallel to the plane direction of the membrane unit 30 , the membrane unit 30 and the ultrasonic wave applying unit 40 are It may be configured in various forms.

5A is a cross-sectional view of a microbubble generating apparatus 100 having a circular cross-section membrane unit 30 and four ultrasonic wave applying units 40 around it according to an embodiment of the present invention. 5B is a cross-sectional view of a microbubble generating device 100 having a circular cross-section membrane unit 30 and eight ultrasonic wave applying units 40 around it according to an embodiment of the present invention. As shown in FIGS. 5A and 5B , the membrane unit 30 may be configured to have a circular cross-section, and spaced apart from the membrane unit 30 by a predetermined distance, a plurality of ultrasonically applied units may be radially installed. .

The controller 55 may selectively drive the plurality of ultrasonic wave applying units 40 to generate microbubbles of various sizes.

5C is a cross-sectional view of a microbubble generating device 100 having a circular cross-section membrane unit 30 and an ultrasonic wave applying unit 40 having four annular cross-sections around it according to an embodiment of the present invention. FIG. 5D is a cross-sectional view of a microbubble generating apparatus 100 having a circular cross-section membrane unit 30 and an ultrasonic wave applying unit 40 having a circular cross-section according to an embodiment of the present invention. As shown in FIG. 5C , a plurality of ultrasonic wave applying units 40 having an annular cross-section are arranged radially or, as shown in FIG. 5D , an ultrasonic wave applying unit 40 having a circular cross-section is installed to form a membrane unit 30 ), it can be seen that it can be configured so that a shear force can be applied to the bubbles by applying ultrasonic waves more parallel to the plane direction.

FIG. 5E is a cross-sectional view of a microbubble generating apparatus 100 having a membrane unit 30 having a square cross section and four ultrasonic waves applying units 40 around it according to an embodiment of the present invention. And FIG. 5f is a cross-sectional view showing a microbubble generating apparatus 100 having a rectangular cross-section membrane unit 30 and an ultrasonic wave applying unit 40 having a square cross-section according to an embodiment of the present invention. As shown in FIG. 5E , it can be seen that the membrane unit 30 may have a rectangular cross-section, and a plurality of ultrasonic wave applying units 40 may be installed adjacent to the outer surface of the membrane unit 30 . In addition, as shown in FIG. 5F , an ultrasonic wave applying unit 40 having a rectangular cross section is installed to surround the front end side of the membrane unit 30 to apply ultrasonic waves more parallel to the planar direction of the membrane unit 30 . It can be seen that it can be configured so that a shear force can be applied to the bubble.

6 is a cross-sectional view of a microbubble generating apparatus 100 to which an ultrasonic wave is applied and a membrane having a detachable member 32 and a detachable means 41 according to an embodiment of the present invention. As shown in FIG. 6 , the ultrasonic application unit 40 may be detachably attached to the chamber 10 and assembled with the detachable means 41 . Therefore, the ultrasonic application unit 40 having various outputs and shapes is designed so that it can be installed and replaced. In addition, the membrane unit 30 may also be configured to be detachable from the chamber 10 through the detachable member 32 . Therefore, microbubbles of various sizes can be generated by replacing, changing, and adjusting the membrane unit 30 having various pore 31 sizes.

In addition, a vibration absorbing unit 42 composed of a damper or the like is provided between the ultrasonic wave applying unit 40 and the chamber 10 so that vibration by the ultrasonic applying unit 40 is not transmitted to the membrane unit 30 side. . That is, the ultrasonic wave applied in the embodiment of the present invention is configured to apply a shear force to the air bubbles generated on the surface of the membrane unit 30 without applying vibration to the membrane unit 30 .

7 is a cross-sectional view of the microbubble generating apparatus 100 to which an integrated membrane and ultrasonic waves are applied according to an embodiment of the present invention. 7, in the embodiment of the present invention, a connecting plate 33 is provided between the membrane unit 30 and the chamber 10, and a plurality of ultrasonic application units are provided on the outer side of the connecting plate 33. It can be seen that the membrane unit 30 and the ultrasonic wave applying unit 40 can be integrally configured by installing 40 . At this time, it is preferable to install a vibration absorbing part composed of a damper or the like between the ultrasonic applying part 40 and the connecting plate 33 so that the vibration according to the ultrasonic applying part 40 is not transmitted to the membrane unit 30 .

8 is a block diagram illustrating a signal flow of the control unit 55 according to an embodiment of the present invention. The apparatus 100 for generating fine bubbles according to an embodiment of the present invention may be configured to include a pressure sensor 21 on one side of the gas supply line 20 to measure the pressure of the supplied gas in real time. In addition, the flow rate of the gas supplied into the membrane unit 30 through the control valve 22 provided in the gas supply line 20 can be adjusted. And it may be configured to adjust the output of the ultrasonic wave applied through the ultrasonic wave applying unit 40 through the output adjusting unit (43).

Therefore, as shown in FIG. 8 , the control unit 55 may control to selectively drive the plurality of ultrasonic application units 40 , and may operate the control valve 22 based on the value measured by the pressure sensor 21 . By controlling the flow rate of the gas supplied into the membrane unit 30 can be adjusted, and also by controlling the output control unit 43 to adjust the output of the ultrasound applied through the ultrasound applying unit 40, various sizes of It can be controlled to generate microbubbles.

In addition, in the apparatus and method described above, the configuration and method of the above-described embodiments are not limitedly applicable, but all or part of each embodiment is selectively combined so that various modifications can be made to the embodiments. may be configured.

1: water
10: chamber
20: gas supply line
21: pressure sensor
22: control valve
30: membrane unit
31: perforated
32: detachable member
33: connecting plate
40: Ultrasound
41: detachable means
42: vibration absorption unit
43: output control unit
50: control unit
100: Micro-bubble generating device applying membrane and ultrasound

Claims (17)

In the microbubble generating device,
a chamber in which the fluid is received;
a gas supply line for supplying gas into the fluid accommodated in the chamber;
a microbubble discharging unit installed inside the chamber, the gas supplied through the gas supply line is introduced into the inside to generate microbubbles to the outside; and
Including; and an ultrasonic wave applying unit that applies ultrasonic waves to the microbubbles generated and emitted through the microbubble releasing unit to generate ultrafine bubbles.
The ultrasound applying unit is installed on one side or the other side of the chamber in which the microbubble discharging unit is installed, and applies the ultrasound in a direction crossing the discharging direction of the microbubbles,
The microbubble releasing unit is composed of a membrane unit having an inner space and having fine pores formed on the outer surface, and the ultrasonic wave applying unit applies ultrasonic waves in a direction parallel to the plane direction of the membrane unit,
The membrane unit has a circular cross section, and a plurality of the ultrasonic wave applying units are spaced apart from each other at a specific distance on the outer surface of the membrane unit and positioned radially spaced apart from each other in the circumferential direction, or are spaced apart from each other at a specific distance to surround the outer surface of the membrane unit. have a cross section or
The membrane unit has a rectangular cross section, and a plurality of the ultrasonic application units are spaced apart from each other at a specific interval on the outer surface of the membrane unit and positioned in a radial shape. An apparatus for generating microbubbles to which a membrane and ultrasonic waves are applied, characterized in that it has a rectangular cross section to surround the outer surface of the membrane unit at a specific interval.
delete delete delete delete delete delete delete The method of claim 1,
Micro-bubble generating device to which a membrane and ultrasonic waves are applied, characterized in that it further comprises a detachable member for attaching and detaching the micro-bubble discharging unit to the chamber.
The method of claim 1,
The apparatus for generating microbubbles using a membrane and ultrasonic waves, characterized in that it further comprises a detachable means for attaching and detaching the ultrasonicator to the chamber.
The method of claim 1,
The apparatus for generating microbubbles using a membrane and ultrasonic waves, characterized in that it further comprises a vibration absorber provided between the ultrasonicator and the chamber to absorb vibrations generated by the ultrasonicator and transmitted to the chamber.
The method of claim 1,
Membrane characterized in that it further comprises a pressure sensor provided on one side of the gas supply line to measure the pressure of the supplied gas, and a control valve for controlling the flow rate of the gas supplied from the gas supply line to the microbubble discharging unit. A microbubble generating device using and ultrasonic waves.
13. The method of claim 12,
an output control unit for adjusting the output of the ultrasound applied through the ultrasound application unit, and a control unit for controlling the control valve based on the value measured by the pressure sensor to adjust the flow rate of the gas supplied to the microbubble discharging unit; Microbubble generating device to which a membrane and ultrasonic waves are applied, characterized in that it further comprises.
14. A method for generating microbubbles using the membrane according to any one of claims 1 and 9 to 13 and the device for generating microbubbles to which ultrasonic waves are applied,
a first step of supplying gas into the microbubble discharging unit installed in the chamber through the gas supply line;
a second step of generating air bubbles to the outside through the membrane unit in which micropores are formed and constituting the outer surface of the microbubble discharging unit; and
A third step of desorption of microbubbles from the surface of the membrane unit by applying an ultrasonic wave through an ultrasonic wave applying unit in a direction crossing the direction in which the bubbles are generated and applying a shear force to the bubbles;
The ultrasound application unit is installed on one side or the other side of the chamber in which the microbubble discharging unit is installed, and in the third step, the membrane and ultrasound, characterized in that it applies the ultrasound in a direction parallel to the plane direction of the membrane unit A method of generating microbubbles using
delete 15. The method of claim 14,
In the first step,
The control unit controls the control valve based on the pressure value of the gas measured by the pressure sensor provided on one side of the gas supply line to adjust the flow rate of the gas supplied to the microbubble discharging unit. creation method.
17. The method of claim 16,
in the third step
A method for generating microbubbles to which a membrane and ultrasonic waves are applied, characterized in that the control unit controls to selectively drive the plurality of ultrasound application units, and controls the output control unit to adjust the output of the ultrasound applied through the ultrasound application unit.

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