KR102338166B1 - 밸브를 위한 낮은 히스테리시스의 다이어프램 - Google Patents

밸브를 위한 낮은 히스테리시스의 다이어프램 Download PDF

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Publication number
KR102338166B1
KR102338166B1 KR1020177035877A KR20177035877A KR102338166B1 KR 102338166 B1 KR102338166 B1 KR 102338166B1 KR 1020177035877 A KR1020177035877 A KR 1020177035877A KR 20177035877 A KR20177035877 A KR 20177035877A KR 102338166 B1 KR102338166 B1 KR 102338166B1
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South Korea
Prior art keywords
valve
diaphragm
valve diaphragm
control
strain hardening
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KR1020177035877A
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English (en)
Korean (ko)
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KR20180009341A (ko
Inventor
킴 은곡 부
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비스타델텍, 엘엘씨
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/123—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on the bottom of the fluid line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • H01L21/02—
    • H01L21/67005—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
  • Fluid-Driven Valves (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
KR1020177035877A 2015-06-17 2016-06-15 밸브를 위한 낮은 히스테리시스의 다이어프램 Active KR102338166B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562180867P 2015-06-17 2015-06-17
US62/180,867 2015-06-17
PCT/US2016/037522 WO2016205294A1 (en) 2015-06-17 2016-06-15 Low hysteresis diaphragm for a valve

Publications (2)

Publication Number Publication Date
KR20180009341A KR20180009341A (ko) 2018-01-26
KR102338166B1 true KR102338166B1 (ko) 2021-12-09

Family

ID=57546127

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177035877A Active KR102338166B1 (ko) 2015-06-17 2016-06-15 밸브를 위한 낮은 히스테리시스의 다이어프램

Country Status (11)

Country Link
US (2) US10113665B2 (https=)
EP (1) EP3311049B1 (https=)
JP (1) JP6663935B2 (https=)
KR (1) KR102338166B1 (https=)
CN (1) CN107709857B (https=)
DE (1) DE202016008955U1 (https=)
IL (1) IL255809B (https=)
MY (2) MY199148A (https=)
SG (1) SG10201911554XA (https=)
TW (1) TWI678490B (https=)
WO (1) WO2016205294A1 (https=)

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US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
EP3610181B1 (en) 2017-06-05 2024-08-07 Illinois Tool Works Inc. Control plate for a high conductance valve
EP3714189B1 (en) 2017-11-21 2023-11-15 Illinois Tool Works Inc. Compact circular linkage for a pushing actuator
JP7133945B2 (ja) * 2018-03-02 2022-09-09 株式会社堀場エステック 流体制御弁及び流体制御装置
CN110735930A (zh) * 2018-07-18 2020-01-31 北京七星华创流量计有限公司 气体流量调节装置及质量流量控制器
JP7061794B2 (ja) * 2018-08-10 2022-05-02 アドバンス電気工業株式会社 ダイヤフラム部材
TWI800553B (zh) * 2018-11-01 2023-05-01 美商依利諾器具機械公司 用於高傳導性閥之控制板
DE102019107630A1 (de) * 2019-03-25 2020-10-01 Vat Holding Ag Membranbalg
BE1028145B1 (nl) * 2020-03-11 2021-10-12 Atlas Copco Airpower Nv Klep voor een vacuüminrichting en vacuüminrichting voorzien van zo een klep
US11982377B1 (en) * 2021-11-08 2024-05-14 Meta Platforms Technologies, Llc Fluidic devices
US12578021B2 (en) * 2021-12-24 2026-03-17 Horiba Stec, Co., Ltd. Flow rate control valve, manufacturing method of flow rate control valve, and flow rate control apparatus
USD1054535S1 (en) * 2023-01-31 2024-12-17 Bueno Technology Co., Ltd. Diaphragm valve
USD1054534S1 (en) * 2023-01-31 2024-12-17 Bueno Technology Co., Ltd. Diaphragm valve

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JP2008286361A (ja) * 2007-05-21 2008-11-27 Ckd Corp 流体制御弁

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JP2008286361A (ja) * 2007-05-21 2008-11-27 Ckd Corp 流体制御弁

Also Published As

Publication number Publication date
IL255809A (en) 2018-01-31
US20160369915A1 (en) 2016-12-22
SG10201911554XA (en) 2020-02-27
US10281056B2 (en) 2019-05-07
JP6663935B2 (ja) 2020-03-13
IL255809B (en) 2021-03-25
US20180283577A1 (en) 2018-10-04
EP3311049B1 (en) 2021-03-10
MY183458A (en) 2021-02-18
US10113665B2 (en) 2018-10-30
WO2016205294A1 (en) 2016-12-22
TW201704666A (zh) 2017-02-01
CN107709857A (zh) 2018-02-16
TWI678490B (zh) 2019-12-01
KR20180009341A (ko) 2018-01-26
MY199148A (en) 2023-10-18
EP3311049A4 (en) 2018-06-27
DE202016008955U1 (de) 2021-01-15
CN107709857B (zh) 2020-05-12
HK1247654A1 (zh) 2018-09-28
EP3311049A1 (en) 2018-04-25
JP2018517879A (ja) 2018-07-05

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