KR102338166B1 - 밸브를 위한 낮은 히스테리시스의 다이어프램 - Google Patents

밸브를 위한 낮은 히스테리시스의 다이어프램 Download PDF

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Publication number
KR102338166B1
KR102338166B1 KR1020177035877A KR20177035877A KR102338166B1 KR 102338166 B1 KR102338166 B1 KR 102338166B1 KR 1020177035877 A KR1020177035877 A KR 1020177035877A KR 20177035877 A KR20177035877 A KR 20177035877A KR 102338166 B1 KR102338166 B1 KR 102338166B1
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KR
South Korea
Prior art keywords
valve
diaphragm
valve diaphragm
control
strain hardening
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Application number
KR1020177035877A
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English (en)
Korean (ko)
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KR20180009341A (ko
Inventor
킴 은곡 부
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비스타델텍, 엘엘씨
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/123—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on the bottom of the fluid line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
  • Fluid-Driven Valves (AREA)
  • Fluid Mechanics (AREA)
KR1020177035877A 2015-06-17 2016-06-15 밸브를 위한 낮은 히스테리시스의 다이어프램 Active KR102338166B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562180867P 2015-06-17 2015-06-17
US62/180,867 2015-06-17
PCT/US2016/037522 WO2016205294A1 (en) 2015-06-17 2016-06-15 Low hysteresis diaphragm for a valve

Publications (2)

Publication Number Publication Date
KR20180009341A KR20180009341A (ko) 2018-01-26
KR102338166B1 true KR102338166B1 (ko) 2021-12-09

Family

ID=57546127

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177035877A Active KR102338166B1 (ko) 2015-06-17 2016-06-15 밸브를 위한 낮은 히스테리시스의 다이어프램

Country Status (11)

Country Link
US (2) US10113665B2 (enExample)
EP (1) EP3311049B1 (enExample)
JP (1) JP6663935B2 (enExample)
KR (1) KR102338166B1 (enExample)
CN (1) CN107709857B (enExample)
DE (1) DE202016008955U1 (enExample)
IL (1) IL255809B (enExample)
MY (2) MY199148A (enExample)
SG (1) SG10201911554XA (enExample)
TW (1) TWI678490B (enExample)
WO (1) WO2016205294A1 (enExample)

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US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US10323754B2 (en) 2017-06-05 2019-06-18 Vistadeltek, Llc Control plate for a high conductive valve
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
WO2019104066A1 (en) 2017-11-21 2019-05-31 Vistadeltek, Llc Compact circular linkage for a pushing actuator
JP7133945B2 (ja) * 2018-03-02 2022-09-09 株式会社堀場エステック 流体制御弁及び流体制御装置
CN110735930A (zh) * 2018-07-18 2020-01-31 北京七星华创流量计有限公司 气体流量调节装置及质量流量控制器
JP7061794B2 (ja) * 2018-08-10 2022-05-02 アドバンス電気工業株式会社 ダイヤフラム部材
KR102639971B1 (ko) * 2018-11-01 2024-02-22 일리노이즈 툴 워크스 인코포레이티드 하이 컨덕턴스 밸브용 제어 플레이트
DE102019107630A1 (de) * 2019-03-25 2020-10-01 Vat Holding Ag Membranbalg
BE1028145B1 (nl) * 2020-03-11 2021-10-12 Atlas Copco Airpower Nv Klep voor een vacuüminrichting en vacuüminrichting voorzien van zo een klep
US11982377B1 (en) * 2021-11-08 2024-05-14 Meta Platforms Technologies, Llc Fluidic devices
WO2023119828A1 (ja) * 2021-12-24 2023-06-29 株式会社堀場エステック 流量制御弁、流量制御弁の製造方法および流量制御装置
USD1054534S1 (en) * 2023-01-31 2024-12-17 Bueno Technology Co., Ltd. Diaphragm valve
USD1054535S1 (en) * 2023-01-31 2024-12-17 Bueno Technology Co., Ltd. Diaphragm valve

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JP2008286361A (ja) * 2007-05-21 2008-11-27 Ckd Corp 流体制御弁

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JP2008286361A (ja) * 2007-05-21 2008-11-27 Ckd Corp 流体制御弁

Also Published As

Publication number Publication date
CN107709857B (zh) 2020-05-12
EP3311049A4 (en) 2018-06-27
KR20180009341A (ko) 2018-01-26
US10281056B2 (en) 2019-05-07
US20160369915A1 (en) 2016-12-22
JP2018517879A (ja) 2018-07-05
JP6663935B2 (ja) 2020-03-13
DE202016008955U1 (de) 2021-01-15
US10113665B2 (en) 2018-10-30
WO2016205294A1 (en) 2016-12-22
SG10201911554XA (en) 2020-02-27
TW201704666A (zh) 2017-02-01
TWI678490B (zh) 2019-12-01
HK1247654A1 (zh) 2018-09-28
EP3311049A1 (en) 2018-04-25
CN107709857A (zh) 2018-02-16
MY183458A (en) 2021-02-18
US20180283577A1 (en) 2018-10-04
EP3311049B1 (en) 2021-03-10
MY199148A (en) 2023-10-18
IL255809A (en) 2018-01-31
IL255809B (en) 2021-03-25

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