KR102335845B1 - Heat exchanger and heat exchange method for cooling hot gas - Google Patents

Abstract

A condensing heat exchanger which is used to cool a high-temperature gas emitted after processing comprises: a large diameter pipe arranged in a vertical direction in the center; a plurality of first small diameter pipes radially disposed around the outer periphery of the large diameter pipe; a plurality of second small diameter pipes radially disposed around the outer periphery of the large diameter pipe; a housing surrounding the plurality of first small diameter pipes and the plurality of second small diameter pipes, and having a cooling water inlet formed in an upper outer circumferential surface and a cooling water outlet formed in a lower outer circumferential surface; an upper cover mounted on an upper end of the housing; a lower cover mounted on a lower end of the housing; an upper partition plate sealing between upper edges of the plurality of first small diameter pipes and upper edges of the plurality of second small diameter pipes and the inner circumferential surface of the housing; and a lower partition plate sealing between the lower edge of the large diameter pipe and the lower edge of the plurality of first small diameter pipes and the inner circumferential surface of the housing. The present invention can reduce the shortage of industrial water in factories by dramatically reducing the amount of wastewater used.

Description

HEAT EXCHANGER AND HEAT EXCHANGE METHOD FOR COOLING HOT GAS

The present invention relates to a method for indirectly cooling waste heat used in an incinerator, a scrubber, etc., and a heat exchanger using the same.

More specifically, one large-diameter pipe is disposed in the center of the inside of the cylindrical housing and a plurality of small-diameter pipes are disposed around the cylindrical housing, and a high-temperature gas flows from top to bottom through the large-diameter pipe in the center, and a plurality of Cooling water is distributed around the large-diameter pipe and the plurality of small-diameter pipes inside the cylindrical housing while flowing from bottom to top again through a portion of the small-diameter pipe and again from top to bottom through the remainder of the plurality of small-diameter pipes It relates to a method for indirectly heat-exchanging a high-temperature gas with cooling water multiple times by using the method and a heat exchanger using the same.

In the incinerator, the temperature is raised to 1400℃ to remove environmental hormones and dioxins that are generated when incineration of waste vinyl, etc. in the process of processing waste.

In the case of the semiconductor scrubber, the temperature is raised to 1400℃ to treat the PFC gas. The high temperature of the incinerator incinerates the waste and releases it into the atmosphere. To cool the temperature of the gas, water is sprayed to lower the temperature and remove the dust. In the process of waste treatment and cooling in the scrubber, toxic and strongly acidic substances react with water and the water becomes strongly acidic wastewater. Also, when water and gas by-products meet, it causes corrosion of the pipe, so the best method is to collect the dust, etc.

The cooling method is the same for scrubbers used in semiconductor factories, etc. The cooling method using water spray is a classic method, but it is still used because it is economical and the environmental regulations are relatively relaxed. However, when the environment changes, environmental regulations, greenhouse gas treatment problems, water shortages, etc. are taken into consideration, it is time to change the conventional cooling method using water spray.

The history of heat exchangers started at the same time as the Industrial Revolution.

When lowering the heat of an engine, etc. and raising the temperature, the method of indirectly transferring heat by a heat exchanger is one of the very effective methods.

There are various types of heat exchangers, but representative methods include: i) a method in which a thin pipe is placed in a cylindrical shape and a fluid flows to the outside (refer to FIG. 1); ii) a plate heat exchanger using different fluid flows using multiple plates (see Fig. 2), iii) a method of passing different fluids through a thin tube and a thick tube through two tubes (see Fig. 3) have. These methods were very good for use in existing machinery. However, in order to use energy efficiently, a method with higher efficiency, easier maintenance and lower manufacturing cost was required.

Therefore, a cylindrical heat exchanger was selected, and the dimensions of the pipe were selected to facilitate cooling and gas flow inside the pipe. If the pipe is large, there is less accumulation of dust such as powder, and if there are several small pipes, the diameter of the pipe is small and clogged quickly. Existing cylindrical heat exchangers used several tubes with an inner diameter of about 25 mm or less. It is very important to ensure good gas flow and to avoid powder clogging in the pipeline. In addition, it should be easy to disassemble and clean when the pipe is clogged by powder.

The scrubber used in the semiconductor process is thermally decomposed at 1400°C, and wastewater is generated by spraying water to cool the high-temperature heat. Incinerators use a lot of energy to raise the temperature required for dioxin removal to about 1400° C., and use water to lower the exhaust gas temperature, and cool the emitted temperature, so a lot of energy was wasted. In the experiment, it can be seen that the temperature is cooled as about 80 liters of about 1400°C gas passes through the chamber. The gas at about 1400°C went down to about 600°C from the lower part through the pipe in the center, and then moved to the upper part again and went down to about 150°C. As it descended from the upper part to the lower part, the temperature was cooled to about 45 °C. If the size of the chamber is large or the length of the pipe is long, the efficiency is very good, and it is possible to further lower the temperature to about 30°C or less.

The new heat exchanger that did not exist in the past satisfies the heat exchanger required for incinerators, semiconductors, petrochemicals, etc.

Wastewater needs to be purified at a wastewater treatment plant or outsourced to an external waste treatment company, which incurs a lot of cost. In addition, even if wastewater is treated as purified water or treated by a waste treatment company, the treated water cannot be reused as cooling water in factories, so it is inevitably discharged into rivers or rivers as it is.

For example, in the noxious gas combustion apparatus using plasma disclosed in Korean Patent No. 10-0877726 as shown in FIG. 5, the distance between the spiral inlet pipe through which the noxious gas is introduced and the anode electrode body is controlled. A main unit including an electrode body and a primary water treatment unit, a water storage tank 400 connected to the main unit and storing water therein, and a secondary water treatment unit connected to the water storage tank to remove moisture in the harmful gas It includes an auxiliary unit including a water removal unit and a neutralizing unit for neutralizing harmful gases. In such a conventional apparatus, since a lower water storage tank is used to cool the high-temperature gas after the process has been completed, the high-temperature gas is in direct contact with water to exchange heat, thereby generating a large amount of wastewater.

The present invention is to solve the above problems, and an object of the present invention is to arrange a single large-diameter pipe in the center of the inside of a cylindrical housing and a plurality of small-diameter pipes around it, and a large-diameter pipe in the center. the large diameter inside the cylindrical housing, flowing hot gas from top to bottom through To provide a method for indirectly heat-exchanging a high-temperature gas with cooling water multiple times by circulating cooling water around a pipe and a plurality of small-diameter pipes, and a heat exchanger using the same. However, these problems are exemplary, and the scope of the present invention is not limited thereto.

According to one embodiment of the present invention for achieving the above object, there is provided a heat exchanger for indirectly cooling a high-temperature gas discharged after processing, comprising: a large-diameter pipe arranged in a vertical direction in the center; a plurality of first small-diameter pipes arranged in a state of being spaced apart from the large-diameter pipe by a predetermined distance on the outer periphery of the large-diameter pipe; a plurality of second small-diameter pipes arranged radially with a predetermined distance from the large-diameter pipe on the outer periphery of the large-diameter pipe; The plurality of first small-diameter pipes and the plurality of second small-diameter pipes are spaced apart from each other by a predetermined distance and surround the plurality of first small-diameter pipes and the plurality of second small-diameter pipes, and on the upper outer peripheral surface a housing in which a cooling water inlet is formed and a cooling water outlet is formed on a lower outer circumferential surface; It is mounted on the upper end of the housing and an opening formed in the center is engaged with the inlet of the large-diameter pipe, and a predetermined distance is spaced apart from the upper ends of the plurality of first small-diameter pipes and the upper ends of the plurality of second small-diameter pipes. an upper cover disposed as; A plurality of openings mounted on the lower end of the housing and formed on the periphery are engaged with the outlets of the plurality of second small-diameter pipes, and the lower ends of the large-diameter pipes and the lower ends of the plurality of first small-diameter pipes are spaced apart by a predetermined distance The lower cover is disposed in a true state; an upper partition plate sealing between upper edges of the plurality of first small-diameter pipes and upper edges of the plurality of second small-diameter pipes and an inner circumferential surface of the housing; and a lower partition plate sealing between the lower edge of the large-diameter pipe and the lower edge of the plurality of first small-diameter pipes and the inner circumferential surface of the housing.

In addition, according to an embodiment of the present invention, the number of the plurality of first pipes and the number of the plurality of second pipes are the same, and the plurality of first pipes are disposed on one side of the housing in the housing, The plurality of second pipes may be provided with a heat exchanger disposed on the other side of the housing.

In addition, according to an embodiment of the present invention, the number of the plurality of first pipes and the number of the plurality of second pipes are the same, and the plurality of first pipes and the plurality of second pipes in the housing are Alternately arranged heat exchangers may be provided.

In addition, according to an embodiment of the present invention, the length of the large-diameter pipe, the length of the plurality of first small-diameter pipes, and the length of the plurality of second small-diameter pipes are the amount of heat of the high-temperature gas to be cooled and the powder product. can be adjusted according to the amount of

In addition, according to an embodiment of the present invention, the diameter of the large-diameter pipe, the diameters of the plurality of first small-diameter pipes, and the diameters of the plurality of second small-diameter pipes are the amount of heat of the high-temperature gas to be cooled and the powder product. can be adjusted according to the amount of

Also, according to an embodiment of the present invention, the plurality of second small-diameter pipes may include an upper second small-diameter pipe disposed in the housing and a lower second small-diameter pipe disposed in the lower cover.

Further, according to an embodiment of the present invention, the coupling between the upper end of the housing and the upper cover and the lower end of the housing and the lower cover may be coupled by a clamping means.

Further, according to an embodiment of the present invention, the upper cover and the upper end of the housing each include a flange, the flanges may be coupled to each other by a clamping means.

Further, according to an embodiment of the present invention, the lower cover and the lower end of the housing each include a flange, the flanges may be coupled to each other by a clamping means.

In addition, according to an embodiment of the present invention, annular concave grooves are respectively formed on the lower surface of the flange of the upper cover and the upper surface of the flange of the lower cover, and O-rings are formed in the concave grooves. can be mounted

In addition, according to an embodiment of the present invention, one or more coolant circulation paths may be formed inside the upper cover and inside the lower cover.

On the other hand, according to another embodiment of the present invention, as a device for cooling gas using water, the high-temperature gas flows from top to bottom through the central pipe, and from the bottom rises through about 50% of the central peripheral pipe, and , through the remaining about 50% of the peripheral pipe, indirect heat exchange with water is exchanged with the surrounding water from top to bottom again, and cooling water flows through the central pipe and the double pipe around the peripheral pipe. The cooling water whose temperature has risen is discharged through the cooling water outlet.

According to another embodiment of the present invention, one large-diameter pipe is disposed in the center of the inside of the cylindrical housing, and a plurality of small-diameter pipes are disposed around the large-diameter pipe, and the large-diameter pipe is disposed at an upper portion of the cylindrical housing. A portion other than the portion to which the upper end of the pipe is coupled is sealed by the upper cover, and a portion in the lower portion of the cylindrical housing other than the portion to which the lower ends of the plurality of small-diameter pipes are coupled is closed by the lower cover, and the A heat exchange method for indirectly cooling a high-temperature gas by circulating cooling water around the large-diameter pipe and the plurality of small-diameter pipes in a cylindrical housing, wherein the high-temperature gas flows from top to bottom in the large-diameter pipe in the center. Primary indirect heat exchange with the coolant flowing around the large diameter pipe; Secondary indirect heat exchange with cooling water flowing around the plurality of first small-diameter pipes while flowing the high-temperature gas cooled in the above step from bottom to top in the plurality of first small-diameter pipes disposed around the large-diameter pipes step; and thirdly indirect heat exchange with cooling water flowing around the plurality of second small-diameter pipes while allowing the high-temperature gas cooled in the above step to flow from top to bottom in the plurality of second small-diameter pipes disposed around the large-diameter pipes. There is provided a heat exchange method comprising the step of:

Further, according to another embodiment of the present invention, the number of the plurality of first pipes and the number of the plurality of second pipes are the same, and the plurality of first pipes are disposed on one side of the housing in the housing, The plurality of second pipes may be disposed on the other side of the housing.

Further, according to another embodiment of the present invention, the number of the plurality of first pipes and the number of the plurality of second pipes are the same, and the plurality of first pipes and the plurality of second pipes in the housing are may be alternately placed.

Further, according to another embodiment of the present invention, the length of the large-diameter pipe, the length of the plurality of first small-diameter pipes, and the length of the plurality of second small-diameter pipes are the amount of heat of the high-temperature gas to be cooled and the powder product. can be adjusted according to the amount of

Also, according to another embodiment of the present invention, the method may further include cooling the upper cover and the lower cover of the cylindrical housing with cooling water, respectively.

If the condensing heat exchanger proposed in the present invention is applied, the amount of wastewater generated during the existing operation can be drastically reduced, thereby reducing the shortage of industrial water in factories. It is very important to control the temperature by cooling the high-temperature gas through indirect heat exchange multiple times with cooling water without generating wastewater to control the temperature and reuse the heat-exchanged cooling water. In addition, as the amount of wastewater used is small, the environmental burden will be reduced. In addition, it will help a lot in reducing maintenance costs as it prevents the corrosion of the pipe. In addition, it is easy to clean the powder and by-products, so it is possible to reduce the dust scattered in the air. Of course, the scope of the present invention is not limited by these effects.

1 is a schematic view showing a cylindrical heat exchanger according to the prior art.
2 is a schematic view showing a plate heat exchanger according to the prior art.
3 is a schematic view showing a double tube heat exchanger according to the prior art.
4 is a schematic cross-sectional view of a heat exchange chamber in a prior art heat exchanger device;
5 is a schematic view of a state in which a coolant reservoir tank is disposed at a lower portion of a gas outlet in a heat exchanger device of the prior art.
6 is a schematic cross-sectional view illustrating a flow of gas in a heat exchanger according to an embodiment of the present invention.
7 is a schematic cross-sectional view illustrating a flow of gas and a flow of cooling water in a heat exchange chamber of a heat exchanger according to an embodiment of the present invention.
8 is a flowchart illustrating each step in a heat exchange method according to another embodiment of the present invention.
9A is a graph showing the exhaust gas temperature over time at the gas outlet of the heat exchange chamber of the conventional heat exchanger.
9B is a graph showing the exhaust gas temperature over time at the gas outlet of the heat exchange chamber of the heat exchanger according to an embodiment of the present invention.
10A is a top perspective view of a heat exchanger according to an embodiment of the present invention.
10B is a state diagram before assembling the upper cover of the heat exchanger according to an embodiment of the present invention.
10C is a view illustrating a state in which a lower cover of a heat exchanger according to an embodiment of the present invention is separated.
10D is a view of an assembled state of the lower cover of the heat exchanger according to an embodiment of the present invention.
11A is a view of a state in which the lower cover of the exchanger is removed according to an embodiment of the present invention.
11B is a view of a lower cover of a heat exchanger according to an embodiment of the present invention.
11C is an enlarged cross-sectional view of portion “A” of FIG. 11B .
12 is a cross-sectional view of an upper cover of a heat exchanger according to an embodiment of the present invention.
13 is a perspective view of a plasma torch mounted on a heat exchanger according to the prior art;
14 is a schematic cross-sectional view illustrating a state in which a plasma torch is coupled to a heat exchanger according to an embodiment of the present invention.

The objects, features and advantages of the present invention described above will become more apparent through the following examples in conjunction with the accompanying drawings.

The specific structural or functional descriptions below are only exemplified for the purpose of describing embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention may be implemented in various forms and described in the present specification or application. It should not be construed as being limited to the examples.

Since the embodiment according to the concept of the present invention may have various changes and may have various forms, specific embodiments are illustrated in the drawings and described in detail in the present specification or application. However, this is not intended to limit the embodiments according to the concept of the present invention to a specific disclosed form, and should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention.

Terms such as first and/or second may be used to describe various elements, but the elements are not limited to the terms. The above terms are used only for the purpose of distinguishing one component from other components, for example, without departing from the scope of rights according to the concept of the present invention, a first component may be named as a second component, and similar The second component may also be referred to as the first component.

When it is said that a certain element is "connected" or "connected" to another element, it may be directly connected or connected to the other element, but other elements may exist in between. will have to be understood On the other hand, when it is mentioned that a certain element is "directly connected" or "directly connected" to another element, it should be understood that no other element is present in the middle. Other expressions for describing the relationship between elements, that is, expressions such as “between” and “immediately between” or “adjacent to” and “directly adjacent to”, should be interpreted similarly.

The terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. As used herein, terms such as “comprise” or “have” are intended to designate that the described feature, number, step, action, component, part, or combination thereof is present, and includes one or more other features or numbers, It should be understood that the existence or addition of steps, operations, components, parts or combinations thereof is not precluded in advance.

Unless defined otherwise, all terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present specification. does not

Hereinafter, the present invention will be described in detail by describing preferred embodiments of the present invention with reference to the accompanying drawings. Like reference numerals in each figure indicate like elements.

In general, in the semiconductor process, in the process of manufacturing a chip by processing a wafer, silane, arsine, and boron chloride, which are gases used while depositing and etching a thin film on the wafer repeatedly, tungsten forming a circuit, Copper, aluminum, NF3, CF4, and other corrosive gases and foreign substances are mixed with nitrogen in the process chamber and vacuum pump, and in this process, numerous by-products and dust powder are generated.

Here, the by-product and the dust powder are collectively referred to as waste gas. The waste gas flows into the scrubber through the vacuum pump after the process is carried out in the main equipment. The temperature of the gas passing through the vacuum pump is about 25°C, and a large amount of electrical energy is required to heat it up to about 1400°C in the scrubber.

According to one embodiment of the present invention, a heat exchanger for cooling that can increase energy efficiency by using a heat exchange method multiple times is used to absorb heat emitted to the atmosphere and cool it. Scrubbers used for semiconductors, LEDs, solar power, etc. spray water to cool high temperatures, so water consumption is very high, which causes plant investment to be put on hold. For example, one semiconductor plant uses more than 15,000 tons of wastewater per day.

In order to save energy, a heat exchanger with high thermal efficiency has become an essential condition. In the existing scrubber treatment method, water was used to lower the temperature by spraying spray to lower the high temperature heat after waste treatment. Water reacted with gas is wastewater that cannot be reused because it has high acidity and contains a lot of dust. A new type of heat exchanger was needed to release the gas at an unfamiliar temperature and reuse the water because there is a risk of an accident if the high-temperature gas is released into the atmosphere. The conventional heat exchanger as shown in FIG. 5 has a small suction and discharge pipe diameter, and the gas passes only once, so the pipe is clogged and cannot be used. Accordingly, the heat exchanger has a large pipe diameter, is not clogged with dust or powder, has excellent heat exchange, and must be easy to maintain, such as cleaning.

To solve this, in the heat exchanger according to an embodiment of the present invention, as shown in FIGS. 6 and 7, the structure of the heat exchanger 1 descends from the top to the bottom, goes up again, and flows from the top to the bottom. It cools and absorbs high temperature heat. In order to increase efficiency, it is repeated up and down to create a structure in which high-temperature gas moves, and the outer wall has a cylindrical housing 40, and a large-diameter pipe 10 is disposed in the center of the cylindrical housing 40, and the A plurality of small-diameter pipes 20 and 30 are arranged on the periphery to flow the high-temperature gas G from top to bottom through the large-diameter pipe 10 in the center, and a portion 20 of the plurality of small-diameter pipes The large diameter pipe 10 and the plurality of small diameter pipes 20, inside the cylindrical housing 40, while flowing from bottom to top again through and from top to bottom again through the remainder 30 of the plurality of small diameter pipes, 30) by circulating the cooling water (W) around the high-temperature gas (G) is indirectly heat-exchanged with the cooling water (W) a plurality of times. This is an indirect heat exchange type heat exchanger that does not simply cool high temperature gas with cold water cooling water, but high temperature gas (G) between about 1400 ° C.

The heat exchanger according to an embodiment of the present invention is, for example, a heat exchanger 1 that indirectly cools a high-temperature gas (G) discharged after processing by a cooling water (W), which is disposed in a vertical direction in the center large diameter pipe (10); a plurality of first small-diameter pipes 20 and a plurality of second small-diameter pipes 30 arranged around the large-diameter pipe; a cylindrical housing 40 enclosing the large-diameter pipe and the plurality of first and second small-diameter pipes to be accommodated therein; an upper cover 50 and a lower cover 60 sealing the upper and lower portions of the cylindrical housing; It includes an upper partition plate 70 and a lower partition plate 80 .

The large-diameter pipe 10 is vertically disposed in the center of the cylindrical housing 40 , and the upper end of the large-diameter pipe 10 is open and connected to the upper cover 50 of the cylindrical housing, so that the upper end A high-temperature gas (G) generated from an incinerator, a scrubber, etc. flows through the opening and flows from top to bottom. The lower end of the large-diameter pipe 10 is opened while being separated from the lower cover 60 of the cylindrical housing.

The dimensions of the large-diameter pipe 10 are, for example, a diameter of about 40 - 70 mm and a length of about 400 - 600 mm, but is not limited thereto, and the amount of heat of the hot gas to be cooled, the amount of powder product It may be set to other dimensions depending on the like.

The plurality of first small-diameter pipes 20 may be arranged radially in a state in which a predetermined distance is spaced apart from the large-diameter pipe on the outer periphery of the large-diameter pipe 10 . In FIGS. 10A to 11B , the number of the plurality of first small-diameter pipes 20 is 4, but is not limited thereto, and may be 4 or less or 4 or more. The upper ends of the plurality of first small-diameter pipes 20 are opened apart from the upper cover 50 of the cylindrical housing, and the lower ends of the plurality of first small-diameter pipes 20 are also opened apart from the lower cover 60 of the cylindrical housing. With this configuration, the high-temperature gas G discharged through the lower opening of the large-diameter pipe 10 flows in through the lower openings of the plurality of first small-diameter pipes 20 and flows from the bottom to the upper opening. is emitted through

The dimensions of the plurality of first small-diameter pipes 20 are, for example, a diameter of about 20-40 mm and a length of about 350-550 mm, but is not limited thereto, and the amount of heat of the hot gas to be cooled; It can be set to different dimensions according to the amount of powder product, etc.

The plurality of second small-diameter pipes 30 may be radially disposed with a predetermined distance from the large-diameter pipe 10 on the outer periphery of the large-diameter pipe 10 . Although the number of the plurality of second small-diameter pipes 30 is shown as 4 in FIGS. 10A to 11B , the number is not limited thereto, and may be 4 or less or 4 or more. The upper ends of the plurality of second small-diameter pipes 30 are opened apart from the upper cover 50 of the cylindrical housing, and the opening 32 of the lower end is connected to the lower cover 60 of the cylindrical housing, , the high-temperature gas (G) may be discharged out of the heat exchanger (1). With this configuration, the high-temperature gas G discharged through the upper openings of the plurality of second small-diameter pipes 30 is introduced through the upper openings of the plurality of second small-diameter pipes 30 and flows from top to bottom. It flows to and is discharged out of the heat exchanger (1) through the lower opening.

In addition, the plurality of second small-diameter pipes 30 include an upper second small-diameter pipe 30a disposed in the housing 40 and a lower second small-diameter pipe 30b disposed in the lower cover 60 ). It may be made possible to combine and separate. With this configuration, as shown in FIGS. 11A and 11B , when the lower cover 60 to be described later is separated from the housing 40, the lower second small-diameter pipe 30b becomes the upper second small-diameter pipe ( 30a). In this case, the plurality of openings 32 formed in the periphery of the lower cover 60 engage the outlet of the lower second small-diameter pipe 30b.

The dimensions of the plurality of second small-diameter pipes 30 are, for example, a diameter of about 20 - 40 mm and a length of about 350 - 550 mm, but is not limited thereto, and the amount of heat of the hot gas to be cooled; Other dimensions may be determined depending on the amount of powder product and the like.

In the heat exchanger 1 according to an embodiment of the present invention, the large-diameter pipe 10 and the plurality of first and second pipes 20 and 30 may be manufactured using a cylindrical tube made of STS304 material. , but is not limited thereto, and may be made of other metal materials having high heat resistance and corrosion resistance.

In the heat exchanger 1 according to an embodiment of the present invention, the number of the plurality of first pipes 20 and the number of the plurality of second pipes 30 are the same, and in the housing, One pipe 20 may be disposed on one side of the housing 40 , and the plurality of second pipes 30 may be disposed on the other side of the housing 40 .

In addition, in the heat exchanger 1 according to an embodiment of the present invention, the number of the plurality of first pipes 20 and the number of the plurality of second pipes 30 are the same, and the plurality of The first pipe 20 and the plurality of second pipes 30 may be alternately disposed.

As shown in FIGS. 11A and 11B , the cylindrical housing 40 is spaced apart from the plurality of first small-diameter pipes 20 and the plurality of second small-diameter pipes 30 by a predetermined distance. to surround the plurality of first small-diameter pipes 20 and the plurality of second small-diameter pipes 30, a cooling water inlet 41 is formed on the upper outer circumferential surface, and a cooling water outlet 42 is formed on the lower outer circumferential surface. can The housing 40 may be manufactured using a cylindrical tube made of STS304, but is not limited thereto and may be manufactured of other metal materials having high heat resistance and corrosion resistance.

In the heat exchanger (1) according to an embodiment of the present invention, the upper edge of the plurality of first small-diameter pipes (20) and the upper edge of the plurality of second small-diameter pipes (30) and the housing (40) between the inner circumferential surfaces is sealed by the upper partition plate 70; A lower partition plate 80 may seal between the lower edge of the large-diameter pipe 10 and the lower edge of the plurality of first small-diameter pipes 20 and the inner circumferential surface of the housing 40 . With this configuration, the inner peripheral surface of the cylindrical housing 40, the peripheral portion of the large-diameter pipe 10, the plurality of first small-diameter pipes 20, and the plurality of second small-diameter pipes 30, the A cooling water circulation path is formed by the upper partition plate 70 and the lower partition plate 80 . Accordingly, the cooling water (W) introduced through the cooling water inlet (41) formed on the upper outer peripheral surface of the cylindrical housing (40) is the large diameter pipe (10), the plurality of first small in the cylindrical housing (40). While circulating around the diameter pipe 20 and the plurality of second small-diameter pipes 30 , the large-diameter pipe 10 → the plurality of first small-diameter pipes 20 → the plurality of second small-diameter pipes 30 . The high-temperature gas is cooled by indirect heat exchange with the high-temperature gas G flowing through the inside of the Since the cooling water discharged after heat exchange with the product is not in direct contact with the high-temperature gas, it is not contaminated, so it can be reused for heating or cooled to a predetermined temperature by an appropriate means such as a cooling tower or a refrigerator and reused in the factory. Therefore, if the present invention is used, wastewater is not generated when the high-temperature gas generated from incinerators, scrubbers, etc. is cooled with cold water, thereby reducing the shortage of industrial water in factories, as well as spending of environmental charges. can also be reduced.

In addition, in the heat exchanger 1 according to an embodiment of the present invention, the upper ends of the plurality of first small-diameter pipes 20 and the plurality of second small-diameter pipes 30 inside the cylindrical housing 40 . A predetermined space is formed by being spaced apart from the upper end of the space by a predetermined distance, and the upper cover 50 is disposed in the upper opening of the space. As shown in FIGS. 10A and 10B , the upper cover 50 has an opening formed in the center, and the central opening is engaged with the inlet of the large-diameter pipe 10, and the edge of the upper cover 50 is the housing. (40) is coupled to the upper end. With this configuration, the high-temperature gas discharged through the upper openings of the plurality of first small-diameter pipes 20 may be introduced through the upper openings of the plurality of second small-diameter pipes 30 .

The upper cover 50 and the upper end of the housing 40 may each include a flange, and the flanges may be coupled to each other by a clamping means (not shown). Here, the flanges may have a trapezoidal cross-sectional shape in which the thickness of the flange increases from the outside to the inside, and the shape of the clamping surfaces of the clamping means may have a concave trapezoidal cross-sectional shape corresponding to the trapezoidal cross-section of the flange. According to this configuration, when the flanges of the upper cover 50 and the flanges of the upper end of the housing 40 are placed in contact with each other and the flanges are coupled by a clamping means, the flanges move in an axial direction approaching each other. Thus, the flanges can be closely coupled. In this case, an annular concave groove is formed on the lower surface of the flange of the upper cover 50, and an O-ring may be mounted in the concave groove.

In addition, as shown in FIG. 12 , in the upper cover 50 of the heat exchanger 1 according to an embodiment of the present invention, internal grooves 53 and 54 through which the cooling water W is circulated are made, and the inlet 51 is formed. ) and the outlet 52 may flow the cooling water. In this case, the coolant circulation inner grooves 53 and 54 may be configured to communicate with each other. With this configuration, it is possible to prevent the temperature rise of the upper cover 50 and prevent deformation of the O-ring disposed on the upper surface of the upper cover 50 .

In the heat exchanger 1 according to an embodiment of the present invention, a predetermined distance from the lower end of the large-diameter pipe 10 and the lower end of the plurality of first small-diameter pipes 20 in the cylindrical housing 40 . It is arranged in this floating state to form a predetermined space, and the lower cover 60 is disposed in the lower opening of the space. As shown in FIGS. 10C, 11A and 11B, the lower cover 60 has a plurality of openings 32 formed at a periphery thereof, and the plurality of openings 32 are the plurality of second small-diameter pipes 30 . ), and the edge of the lower cover 60 is coupled to the lower end of the housing 40 . With this configuration, the high-temperature gas discharged through the lower end opening of the large-diameter pipe 10 may be introduced through the lower end opening of the plurality of first small-diameter pipes 20 .

The lower end portions of the lower cover 60 and the housing 40 may each include a flange, and the flanges may be coupled to each other by a clamping means (not shown). Here, the flanges may have a trapezoidal cross-sectional shape in which the thickness of the flange increases from the outside to the inside, and the shape of the clamping surfaces of the clamping means may have a concave trapezoidal cross-sectional shape corresponding to the trapezoidal cross-section of the flange. With this configuration, when the flanges of the lower cover 50 and the flanges of the lower end of the housing 40 are placed in contact with each other and the flanges are coupled by a clamping means, the flanges move in an axial direction approaching each other. Thus, the flanges can be closely coupled. In this case, as shown in FIGS. 11B and 11C , an annular concave groove 65 is formed on the upper surface of the flange 63 of the lower cover 60, and the O-ring is mounted in the concave groove. can

In addition, in the lower cover 60 of the heat exchanger 1 according to an embodiment of the present invention, internal grooves (not shown) through which the cooling water W is circulated are made and through the inlet 61 and the outlet 62 . Coolant can flow. In this case, the internal coolant circulation grooves may be configured to communicate with each other. With this configuration, the temperature rise of the lower cover 60 can be prevented.

Next, an operation of the indirect heat exchanger 1 according to an embodiment of the present invention will be described with reference to FIGS. 10A to 10D .

Heat exchanger 1 according to an embodiment of the present invention, for example, a high-temperature gas flowing from top to bottom through a large-diameter pipe 10 disposed in the center, the housing 40 among eight small-diameter pipes It flows from bottom to top again through the four first small-diameter pipes 20 disposed on one side of the inside of the housing 40, and the other four second small-diameter pipes 30 disposed on the other side of the housing 40 provide It is a structure in which the gas of the gas flows from top to bottom again and then is discharged to the outside through the outlet. Eight small-diameter pipes 20 and 30 communicate with each other at the upper portion of the inside of the housing 40 and are gathered in the same space. A large blower (not shown) is connected to the rear end of the heat exchanger 1 , so that the high-temperature gas G is heat-exchanged through the openings 32 of the four second small-diameter pipes 30 whose lower ends are open. Air (1) is discharged to the outside.

As shown in FIG. 10A , for example, a hot gas of about 1400° C. or higher generated from an incinerator, a scrubber, etc. is introduced into the inlet of the large-diameter pipe 10 disposed at the center. The gas flows from top to bottom and is cooled through cold water (cooling water) W flowing between the large-diameter pipe 10 and the plurality of small-diameter pipes 20 and 30 . FIG. 10B shows a state before assembling the upper cover 50 in FIG. 10A . 10c shows a state in which the lower cover 60 of the heat exchanger 1 of the present invention is separated. In FIG. 10C , the central large-diameter pipe 10 and the surrounding four first small-diameter pipes 20 are hermetically welded to the lower partition plate 80 in a state away from the lower cover 60 .

The hot gas G rises up again from the central large-diameter pipe 10 through the first four small-diameter pipes 30 on the right side in FIG. 10B . In FIG. 11B , except for the central large-diameter pipe 10 , the eight small-diameter pipes 20 and 30 are all connected to allow the high-temperature gas to pass therethrough. Cooling water (W) flows to the outside of all the pipes (10, 20, 30), and the cooling water absorbs heat from the high-temperature gas (G).

As shown in FIG. 10C , the central large-diameter pipe 10 and the four first small-diameter pipes 20 communicate with each other so that gas can flow.

10D shows a state in which the lower cover 60 is assembled to the lower end of the housing 40 . The lower cover 60 may be fixed by screws, but is not limited thereto. The lower cover 60 maintains airtightness with the housing 60 by arranging an O-ring on the inside.

The heat exchanger 1 according to an embodiment of the present invention has excellent heat exchange efficiency, but since the pipe may be clogged by dust such as powder, when the pressure of the pipe inlet is lowered, the upper cover 50 and the lower cover 60 must be disassembled from the housing 40 to clean the inside of the heat exchanger 1 .

11A and 11B, the heat exchanger device according to an embodiment of the present invention can be manufactured in a detachable manner so that the upper and lower covers can be opened to clean the powder dust, and can be fixed with a clamp type. can In addition, an O-ring groove may be made in the upper cover 50 and the lower cover 60 and the O-ring may be inserted.

Next, a heat exchange method according to another embodiment of the present invention will be described with reference to FIG. 14 .

Heat exchange in the heat exchange method according to another embodiment of the present invention is performed as follows.

One large-diameter pipe 10 is arranged in the center of the inside of the cylindrical housing 40, and a plurality of small-diameter pipes 20 and 30 are arranged around the large-diameter pipe 10, and the cylindrical housing ( In the upper part of 40), a portion other than the portion to which the upper end of the large-diameter pipe is coupled is sealed by the upper cover 50, and a portion 30 of the plurality of small-diameter pipes is closed in the lower part of the cylindrical housing 40. A portion other than the portion where the lower ends are coupled is sealed by the lower cover 60, and the cooling water (W) around the large-diameter pipe 10 and the plurality of small-diameter pipes 20 and 30 inside the cylindrical housing. ) to indirectly cool the high-temperature gas (G).

First, a high-temperature gas (G) generated from an incinerator, a scrubber, etc. is introduced into the inlet of the large-diameter pipe 10 in the center, and the large-diameter gas (G) flows from the top to the bottom in the large-diameter pipe 10 Primary indirect heat exchange with the coolant (W) flowing around the pipe (S10).

Next, while flowing the high-temperature gas (G) cooled in step S10 from bottom to top in the plurality of first small-diameter pipes 20 disposed around the large-diameter pipe 10, the plurality of first small Secondary indirect heat exchange with the coolant (W) flowing around the diameter pipe (20) (S20).

Next, while flowing the high-temperature gas (G) cooled in step S20 from top to bottom in the plurality of second small-diameter pipes 30 arranged around the large-diameter pipe 10, the plurality of second small Indirect heat exchange with the cooling water (W) flowing around the diameter pipe is tertiary.

As such, according to another embodiment of the present invention, rather than heat-exchanging the high-temperature gas by direct contact with the cooling water, the high-temperature gas (G) is a large-diameter pipe (10) → a plurality of first small-diameter pipes (20) → Indirectly heat-exchange with cooling water (W) flowing outside the pipes (10, 20, 30) while repeatedly flowing up and down inside the plurality of second small-diameter pipes (30), and high-temperature gas flows through the large-diameter pipes (10) ) in the primary cooling, secondary cooling in the first small-diameter pipe (20), and third cooling in the second small-diameter pipe (30).

Therefore, in the heat exchange method according to another embodiment of the present invention, by cooling the high-temperature gas through indirect heat exchange a plurality of times with cooling water, the high-temperature gas is cooled without generating waste water to control the temperature and reuse the heat-exchanged cooling water. do.

In addition, in the heat exchange method according to another embodiment of the present invention, the number of the plurality of first pipes 20 and the number of the plurality of second pipes 30 are the same, and the plurality of first pipes 30 in the housing The pipe 20 may be disposed on one side of the housing 40 , and the plurality of second pipes 30 may be disposed on the other side of the housing 40 . In addition, the plurality of first pipes 20 and the plurality of second pipes 30 may be alternately disposed in the housing.

In addition, in the heat exchange method according to another embodiment of the present invention, the length of the large-diameter pipe 10 , the length of the plurality of first small-diameter pipes 20 , and the plurality of second small-diameter pipes 30 . The length can be adjusted according to the amount of heat of the hot gas to be cooled and the amount of powder product.

In addition, the heat exchange method according to another embodiment of the present invention may further include cooling the upper cover 50 and the lower cover 60 of the cylindrical housing with cooling water, respectively.

<Experimental example>

Next, the results of experiments using the heat exchanger according to the present invention and the heat exchanger of the prior art will be described. As a result of these experiments, when the heat exchanger according to the present invention was used under the same conditions, it was possible to suppress the generation of wastewater compared to the case where the heat exchanger of the prior art was used.

For the test, using a plasma scrubber, the gas supplied from the vacuum pump was treated at a temperature of about 1400° C. required for toxic gas treatment.

Since the experiment was conducted based on about 1400℃ where 80L of NF3 and CF4 gas can be processed in the scrubber, it is a condition that can satisfy the processing efficiency of NF3 and CF4.

In the conventional conventional chamber, the temperature rises from about 25° C. before operation of the plasma scrubber to about 100° C. after 5 seconds of operation, and to about 200° C. after 30 seconds.

On the other hand, the heat exchanger chamber newly fabricated according to the present invention recorded about 45° C. after 30 minutes at about 25° C. before operating the plasma scrubber, and maintained about 45° C. even after 2 hours thereafter. Of course, the temperature at the lower end of the chamber is 45°C, but the internal temperature of the reservoir tank is maintained at about 35°C. As the gas descended, the temperature decreased due to the throttling action in the reservoir tank with a large internal area.

[Table 1] below is the temperature test result at the gas outlet at the bottom of the heat exchange chamber.

item inlet
gas temperature
(℃) outside air flow nitrogen
(LPM) power used
(kw)
elapsed time before operation 5 seconds 30 seconds 30 minutes 60 minutes conventional
heat exchange chamber
1,400℃
80
6.5
25℃
100℃
200℃
800℃
1000℃ heat exchange chamber of the present invention
1,400℃
80
6.5
25℃
25℃
25℃
45℃
45℃

As can be seen from [Table 1], in the conventional heat exchange chamber, the temperature at the gas outlet at the bottom of the heat exchange chamber rises to about 100° C. 200°C, about 800°C after 30 minutes, and increased to about 1000°C after 60 minutes. 9A is a graph illustrating a temperature change with the lapse of operating time at a gas outlet of a conventional heat exchange chamber. When the temperature at the gas outlet of the heat exchange chamber is about 60°C or higher, the gas cannot be discharged to the atmosphere as it is. The temperature of the gas is lowered to 60°C or lower by cooling by contacting it and discharged to the atmosphere. There is a problem in that a large amount of wastewater is generated in this process.

In contrast, the temperature at the gas outlet of the heat exchange chamber of the heat exchanger 1 according to an embodiment of the present invention is about 25° C. when about 5 seconds have elapsed after the operation of the heat exchange chamber, and about 25° C. for 30 seconds after operation of the heat exchanger 1 The temperature was maintained at about 45° C. and at about 45° C. after 60 minutes. 9B is a graph illustrating a temperature change over an operating time at a gas outlet of a heat exchange chamber of a condensing heat exchanger according to an embodiment of the present invention. As can be seen from Table 1 and FIG. 9B, according to an embodiment of the present invention, high-temperature gas flows alternately up and down in the condensing heat exchanger and indirectly exchanges heat with cooling water so that the temperature at the gas outlet of the heat exchange chamber is about Since it is maintained at 45°C, it has been investigated that it is in a state that can be released into the atmosphere as it is. In particular, according to an embodiment of the present invention, since the gas in the heat exchange chamber and the cooling water perform indirect heat exchange, the cooling water after the heat exchange is completed can be recycled again, thereby preventing the generation of wastewater.

By using the heat exchanger and heat exchange method according to the present invention, it is possible to reduce the waste water generated in the conventional heat exchange method, thereby improving the water shortage in the production plant, and also improving the environmental problems caused by the generation of waste water. Depending on the situation, since the cooling water becomes hot water when the hot gas is cooled, when such hot water is used for heating, the operation of the boiler can be reduced and carbon emission can be reduced.

When the heat exchanger device according to an embodiment of the present invention is compared with the conventional heat exchanger device, there are advantages as follows.

(1) There is a difference of about 3 times the passage section of the reaction section.

(2) The cooling effect is also three times more effective.

(3) Do not use water spray on the tank or the rear end of the pipe, as the hot gas (flame) does not directly go down to the water tank, but the cooled gas goes down.

(4) Compared to the conventional heat exchanger, there is no wastewater generation, and it is easy to collect and clean dry powder.

(5) In the heat exchanger, the part that is in contact with high-temperature gas is not exposed to moisture or moisture, so there is no corrosion and the product has a long lifespan.

(6) Although the use of cooling water increases significantly, there is no problem of excessive consumption of cooling water because the used cooling water can be recovered and reused.

In the heat exchanger device according to an embodiment of the present invention, the supply temperature of the cooling water is 18 ℃, and the discharge temperature is 30 ℃. However, the temperature may differ depending on the flow rate and pressure of the cooling water.

Since a reservoir tank is located at the lower end of the chamber of the conventional heat exchanger as shown in FIG. 13, when using the existing chamber, water must be sprayed to prevent damage due to overheating. Therefore, wastewater is generated. Since the heat exchange chamber is cooled inside the chamber, temperature control is possible without separate spraying.

A plasma torch of the prior art may be used in combination with the heat exchanger 1 according to an embodiment of the present invention. 14 is a schematic cross-sectional view showing the plasma torch 300 is coupled to the heat exchanger 1 according to an embodiment of the present invention. In FIG. 14, the upper part shows the plasma torch 300 of the prior art, and the lower part in FIG. 14 shows a schematic cross-section of the heat exchanger of the present invention as shown in FIG.

Although the present invention has been described with reference to the embodiment shown in the drawings, which is only exemplary, those of ordinary skill in the art to which the present invention pertains will understand that various modifications and equivalent other embodiments are possible therefrom. will be. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

1: heat exchanger 10: large diameter pipe
20: a plurality of first small-diameter pipes 30: a plurality of second small-diameter pipes
30a: upper second small-diameter pipe 30b: lower second small-diameter pipe
32: opening of the second small-diameter pipe 40: cylindrical housing
41, 51, 61: coolant inlet 42, 52, 62: coolant outlet
42: coolant outlet of cylindrical housing 50: top cover
60: lower cover 70: upper compartment plate
80: lower compartment plate 300: plasma torch
400: reservoir tank G: hot gas
W: coolant

Claims (15)

In the heat exchanger for indirect cooling the hot gas discharged after processing,
A large-diameter pipe 10 disposed in the vertical direction in the center;
a plurality of first small-diameter pipes 20 disposed radially in a state spaced apart from the large-diameter pipe by a predetermined distance on the outer periphery of the large-diameter pipe 10;
a plurality of second small-diameter pipes (30) radially arranged at a predetermined distance from the large-diameter pipe (30) on the outer periphery of the large-diameter pipe (10);
The plurality of first small-diameter pipes 20 and the plurality of second small-diameter pipes 20 and the plurality of second small-diameter pipes 20 are spaced apart from the plurality of first small-diameter pipes 20 and the plurality of second small-diameter pipes 30 by a predetermined distance. a housing 40 surrounding the diameter pipe 30 and having a cooling water inlet 41 formed on an upper outer circumferential surface and a cooling water outlet 42 formed on a lower outer circumferential surface;
It is mounted on the upper end of the housing 40 and an opening formed in the center engages the inlet of the large-diameter pipe 10, the upper end of the plurality of first small-diameter pipes 20 and the plurality of second small-diameter pipes ( 30) the upper cover and the upper cover 50 is disposed in a spaced state with a predetermined distance;
A plurality of openings 32 mounted on the lower end of the housing 40 and formed on the periphery are engaged with the outlets of the plurality of second small-diameter pipes 30, the lower end of the large-diameter pipe 10 and the plurality of first 1 A lower cover 60 disposed in a state spaced apart from the lower end of the small-diameter pipe 20 by a predetermined distance;
an upper partition plate (70) sealing the upper edges of the plurality of first small-diameter pipes (20) and the upper edges of the plurality of second small-diameter pipes (30) and the inner peripheral surface of the housing (40); and
a lower partition plate (80) sealing the lower edge of the large-diameter pipe (10) and the lower edge of the plurality of first small-diameter pipes (20) and the inner peripheral surface of the housing (40);
The plurality of second small-diameter pipes 30 includes an upper second small-diameter pipe 30a disposed in the housing 40 and a lower second small-diameter pipe 30b disposed in the lower cover 60 . heat exchanger.
According to claim 1,
The number of the plurality of first small-diameter pipes 20 and the number of the plurality of second small-diameter pipes 30 are the same,
In the housing, the plurality of first small-diameter pipes 20 are disposed on one side of the housing 40 , and the plurality of second small-diameter pipes 30 are disposed on the other side of the housing 40 . .
According to claim 1,
The number of the plurality of first small-diameter pipes 20 and the number of the plurality of second small-diameter pipes 30 are the same,
A heat exchanger in which the plurality of first small-diameter pipes (20) and the plurality of second small-diameter pipes (30) are alternately arranged in the housing.
4. The method according to any one of claims 1 to 3,
The length of the large-diameter pipe 10, the lengths of the plurality of first small-diameter pipes 20, and the lengths of the plurality of second small-diameter pipes 30 depend on the amount of heat of the hot gas to be cooled and the amount of powder product. heat exchanger regulated accordingly.
4. The method according to any one of claims 1 to 3,
The diameter of the large-diameter pipe 10, the diameters of the plurality of first small-diameter pipes 20, and the diameters of the plurality of second small-diameter pipes 30 depend on the amount of heat of the hot gas to be cooled and the amount of powder product. heat exchanger regulated accordingly.
delete 4. The method according to any one of claims 1 to 3,
A heat exchanger in which the upper end of the housing 40 and the upper cover 50 are coupled and the lower end of the housing 40 and the lower cover 60 are coupled by a clamping means.
8. The method of claim 7,
the upper end portions of the upper cover 50 and the housing 40 each include a flange, the flanges being coupled to each other by means of clamping means;
The lower cover (60) and the lower end of the housing (40) each include a flange, and the flanges are coupled to each other by a clamping means.
9. The method of claim 8,
Annular concave grooves are respectively formed on the lower surface of the flange of the upper cover (50) and the upper surface of the flange of the lower cover (60), and O-rings are mounted in the concave grooves.
4. The method according to any one of claims 1 to 3,
One or more cooling water circulation paths are formed inside the upper cover (50) and the lower cover (60).
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