KR102335036B1 - Heat supply device having a reflector and an application device using the same - Google Patents

Abstract

The present invention relates to a heat supply device having a reflector that can be used in a thermal vacuum test device for bake-out. According to the present invention, the heat supply device comprises: a heat source (100) for dissipating heat; a reflector (200) reflecting the heat emitted from the heat source; and a powder (300) which is sintered on a rear surface of the reflector.

Description

Heat supply device having a reflector and an application device using the same

The present invention relates to an invention capable of increasing the efficiency of heat supply and absorbing or removing unnecessary gas by rotation of the reflector and powder serving as a getter in a heat supply device having a reflector.

Patent Document 001 relates to a temperature control apparatus for a thermal vacuum chamber and a method for temperature control of a thermal vacuum chamber using the same, and more particularly, to a compressor for compressing external air to a desired pressure; a dehumidifier connected to the compressor and drying the compressed air supplied from the compressor; and a temperature controller connected to the dehumidifier, heating or cooling compressed and dried air to a set temperature, and supplying it to the shroud of the thermal vacuum chamber. A temperature control device for a thermal vacuum chamber that controls the temperature inside the thermal vacuum chamber by compressing the compressed air, drying the compressed air, and supplying it to a set temperature, and a method for temperature control of the thermal vacuum chamber using the same. are doing

Patent Document 002 relates to a method and apparatus for reducing dust in a semiconductor processing chamber. The apparatus includes a shield for lining a portion of the interior of the vacuum processing chamber. The interior of the shield forms a shield passage. A heater element is disposed within the shield path. The gas inlet is used to supply gas to the interior of the shield path. The usable temperature range is wide and is usually tailored to the process. For example, the present invention can be used to provide fast cooling and bakeout. Once the temperature is selected, an isothermal state is maintained in order to minimize the strain caused by the thermal cycle process, thereby suggesting a technique that can reduce cracking and delamination.

Patent Document 003 relates to a thermal vacuum chamber that simulates a space environment on the ground, and relates to an expandable thermal vacuum chamber capable of flexibly expanding the size of the chamber according to the size of a satellite. According to the present invention, in an open-door thermal vacuum chamber in which a door is separated from a body chamber, an expansion chamber having a cylindrical shape and having the same diameter as the body chamber, both sides of the expansion chamber, and a fixing means for sealing and fixing between the body chamber and the door And, it proposes a technology having a moving means for moving the expansion chamber to the front of the body chamber.

KR 10-1456848 (October 27, 2014) KR 10-0538661 (December 19, 2005) KR 10-0267025 (June 30, 2000)

The present invention relates to a heat supply device, and an object of the present invention is to provide a heat supply device having an effect of effectively providing heat to a space in a vacuum state, adjusting an angle of a reflector through a hinge, or removing unnecessary gas through powder.

The present invention relates to a heat supply device having a reflector, and specifically a heat source for dissipating heat; a reflector for reflecting the heat emitted from the heat source; composed of

The present invention relates to a heat supply device having a reflecting plate, and in the invention presented above, the reflecting plate is a first reflecting plate located immediately and behind the heat source; and extending to one side of the first reflecting plate and forming an angle a second reflecting plate; a third reflecting plate extending to the other side of the first reflecting plate and forming an angle; It consists of a composition comprising

The present invention relates to a heat supply device having a reflector, and in the invention presented above, the powder is configured to include a titanium component.

The present invention relates to a thermal vacuum test apparatus using the invention presented above. Specifically, an inner shroud having an internal space for housing a mechanical device; an outer shroud surrounding the inner shroud; and the heat supply device for supplying heat.

The present invention relates to a heat supply device that can be used in a thermal resonance test device for bake-out, and provides an effect of effectively supplying heat by providing a reflector at the rear of the heat source.

In addition, the present invention provides an effect of removing unnecessary gas from the space in a vacuum state by using the powder of the titanium component.

1 is a perspective view of a heat supply device according to an embodiment of the present invention.
2 is a perspective view of a heat supply device according to another embodiment of the present invention.
3 is a perspective view of a heat supply device according to another embodiment of the present invention.
4 is a configuration diagram of a reflector according to an embodiment of the present invention.
5 is a perspective view of a heat supply device including an absorption plate according to an embodiment of the present invention.
6 is a perspective view of a heat supply device including an auxiliary plate according to an embodiment of the present invention.
7 is a perspective view illustrating a thermal vacuum test apparatus according to an embodiment of the present invention.
8 is a cross-sectional view of a thermal vacuum test apparatus including a heat supply apparatus according to an embodiment of the present invention.

Hereinafter, the most preferred embodiment of the present invention will be described in detail in order to explain in detail enough that a person of ordinary skill in the art can easily carry out the present invention.

The numbers cited in the examples below are not limited only to the objects of reference, and may be applied to all examples. An object that exhibits the same purpose and effect as the configuration presented in the embodiment corresponds to an equivalent replacement object. The higher-level concept presented in the examples includes sub-concept objects that are not described.

(Embodiment 1-1) In a heat supply device having a reflector, a heat source 100 that radiates heat; a reflector 200 that reflects heat emitted from the heat source; is sintered on the rear surface of the reflector Including the powder 300;

The heat supply device of the present invention may include a heat source 100 , a reflector 200 , and a powder 300 . The heat source 100 is a device that emits light and heat, and the reflector 200 reflects the heat emitted from the heat source to reflect the light and heat to a desired place. The powder 300 is sintered on the rear surface 201 of the reflector 200 , and as will be described later, it may react with surrounding oxygen and nitrogen gases to absorb the corresponding gases. An object that plays such a role is called a getter, which means a substance that absorbs the gas remaining in the vacuum device or makes a compound with the gas.

(Embodiment 1-2) In Embodiment 1-1, the heat source includes an infrared lamp 110 .

Infrared rays generally refer to electromagnetic waves having a wavelength longer than visible light and shorter than microwaves, that is, in a wavelength range of 800 nm to 1000 nm. A lamp using such infrared rays as a main heat source is an infrared lamp, and the infrared lamp may be used for medical purposes, heating, etc. by using the thermal effect of infrared rays. In the present invention, an infrared lamp is used to increase the temperature of a desired place.

(Embodiment 1-3) In Embodiment 1-1, the reflection plate 200 may be located at the rear of the heat source 100 .

(Embodiment 1-4) In Embodiment 1-1, the reflective plate 200 has a rectangular shape.

The reflector 200 may be located at the rear of the heat source 100 , and a space to increase the temperature may be located in front of the heat source 100 . The heat emitted from the heat source 100 generally spreads in all directions, and the light and heat directed to the rear are incident back to the front by the reflector 200 .

The reflective plate 200 may have a rectangular, square, or circular plate shape in some cases, but preferably a rectangular plate shape.

(Embodiment 2-1) In Embodiment 1-1, the reflective plate 200 includes a first reflective plate 210 positioned immediately behind the heat source 100; each extending to one side of the first reflective plate and a second reflecting plate 220 forming the , and a third reflecting plate 230 extending to the other side of the first reflecting plate and forming an angle.

The reflecting plate 200 of the present invention may be divided into a first reflecting plate 210 , a second reflecting plate 220 , and a third reflecting plate 230 . The second reflecting plate 220 and the third reflecting plate 230 are the first It may be a reflective plate extending to both sides with respect to the reflective plate 210 and forming an angle. The first reflecting plate 210 may be a reflecting plate positioned immediately behind the heat source. Accordingly, the rear of the heat source `00 may be surrounded by the first to third reflecting plates 220 and 230 . Through this, the energy emitted from the heat source 100 may be effectively incident to the front of the heat source.

(Embodiment 2-2) In Embodiment 2-1, the reflection plate 200 is made of copper.

The reflector 200 may be formed of copper, and copper may be used as a heat reflector with good efficiency. In addition to copper, it may be composed of a lens such as a mirror capable of reflecting heat, and may be formed of another material exhibiting the same effect.

(Embodiment 2-3) In Embodiment 2-1, a first hinge 215 connecting the first reflecting plate 210 and the second reflecting plate 220; the first reflecting plate 210 and the The third reflecting plate 230 includes a second hinge 225 that connects.

The second reflecting plate 220 and the third reflecting plate 230 may be connected to the first reflecting plate 210 through a hinge. If it is formed to extend through the hinge, the angle with the first reflecting plate 210 can be adjusted. In addition, it may further include a control unit 240 for adjusting the angle with the first reflecting plate 210 by adjusting the first and second hinges 215 and 225 .

(Example 2-4) In Example 2-1, the rear surface 201 of the reflection plate 200 is coated with chrome.

(Example 2-5) In Example 2-1, a part of the front surface 202 of the reflection plate is coated with chrome.

In the present invention, the direction in which the heat source 100 is located relative to the reflector 200 may be defined as the front surface 202 of the reflector 200 , and the opposite direction to the heat source 100 may be defined as the rear surface 201 of the reflector 200 . . The rear surface 201 of the reflector 200 may be coated with chrome. Chrome is a heat absorber, and when light or heat is incident on the rear surface of the reflector 200, it is absorbed rather than reflected, and then, since it can better match the desired effect to block the radiant heat, of the reflector 200 The back side may be coated with chrome.

In addition, a portion of the front surface 202 of the reflector 200 may be coated with chrome. The front surface of the reflector 200 is made of a heat reflector such as copper, and when all the front surfaces do not need to be reflected, a part of the reflecting plate 200 may be coated with chrome.

However, in addition to chromium, it may be made of other metals having good heat absorption, such as nickel, or a combination thereof.

(Embodiment 2-6) In Embodiment 2-1, an absorption plate 250 extending from the rear surface 201 while orthogonal to the reflection plate 200 is included.

(Example 2-7) In Example 2-6, a titanium plating layer is formed on the surface of the absorption plate 250 .

(Embodiment 2-8) In Embodiment 2-6, auxiliary plates 260 extending from both surfaces while being perpendicular to the absorption plate 250 are included.

(Example 2-9) In Example 2-8, a titanium plating layer is formed on the surface of the auxiliary plate 260 .

(Example 3-1) In Example 1-1, the powder 300 may include a titanium component.

(Example 3-2) In Example 3-1, the powder 300 is applied to the rear surface 201 of the reflector 200 and then heated to be combined between the powders 300 to be solidified; include

The powder 300 may be included in the rear surface 201 of the reflector of the present invention, and the powder 300 may include a titanium component. As described above, titanium acts as a getter and can absorb unwanted gases in the surrounding space or form compounds. The heat supply device of the present invention may be used as a device for supplying heat to a corresponding space in a vacuum space, and by the titanium component acting as a getter, it may serve to assist in maintaining a vacuum state. The titanium powder may be coated on the rear surface 201 of the reflection plate 200 and then heated to bind to the rear surface 201 of the reflection plate 200 through a process of solidification after bonding between the powders.

(Example 3-3) In Example 3-1, pores 310 formed in the rear surface 201 of the reflection plate 200; and the powder 300 is located in the pores 310 .

The rear surface 201 of the reflector 200 includes pores 310 , and the powder 300 may be sintered in these pores 310 . Through this, it is possible to increase the contact area with air, thereby increasing the efficiency of the getter.

(Embodiment 4-1) In the thermal vacuum test apparatus 400 using the heat supply device of Embodiment 3-1, an inner shroud 410 having an internal space for housing a mechanical device; and the inner shroud 410 ) and an outer shroud 420 surrounding the inner shroud 410, and the heat supply device 430 for supplying heat.

The thermal vacuum test apparatus may include an inner layer shroud 410 , an outer layer shroud 420 , and a heat supply device 430 . The inner shroud 410 has an inner space. After seating a mechanically sensitive mechanical device such as an artificial satellite in this inner space, the inner space can be sealed and the temperature of the inner space can be set to high or low. The present invention can determine whether the mechanical device operates normally even in such a wide range of temperature changes. When making the inner space at a high temperature, the heat supply device of <Example 3-1> of the present invention may be used.

)를 생성한다.(Example 4-2) In Example 4-1, the powder 300 reacts with oxygen at high temperature to obtain titanium dioxide (

) is created.

When the thermal vacuum test apparatus of the present invention is heated to a high temperature, oxygen or nitrogen gas can be released from the mechanical device located in the inner space. In order to remove such unnecessary gas, the heat supply device may use the titanium component powder 300 sintered in the reflector 200 . The powder 300 may be formed in layers. As a material, titanium reacts with oxygen at high temperatures to produce titanium dioxide. As such, the heat supply device 430 may not only supply heat but also absorb and remove the released oxygen gas or measure how much oxygen is absorbed.

In the above, preferred embodiments of the present invention have been illustrated and described, but the present invention is not limited to the specific embodiments described above, and it is common in the technical field to which the present invention pertains without departing from the gist of the present invention as claimed in the claims. Various modifications may be made by those having the knowledge of, of course, and these modifications should not be individually understood from the technical spirit or perspective of the present invention.

100: heat source 110: infrared ram
200: reflector 210: first reflector
220: second reflecting plate 230; third reflector
215: first hinge 225: second hinge
250: absorption plate 260: auxiliary plate
300: powder 310: pores

Claims (4)

In the heat supply device having a reflector,
a heat source 100 for dissipating heat;
a reflective plate 200 that reflects the heat emitted from the heat source;
Containing; powder 300 that is sintered on the back side of the reflector;
The reflective plate 200 includes a first reflective plate 210 located immediately behind the heat source 100;
a second reflecting plate 220 extending to one side of the first reflecting plate and forming an angle;
and a third reflecting plate 230 extending to the other side of the first reflecting plate and forming an angle;
and an absorption plate 250 extending from the rear surface while being orthogonal to the reflection plate,
A titanium plating layer is formed on the surface of the absorption plate 250,
The powder 300 includes a titanium component, and the powder is applied to the rear surface of the reflector and then heated, and the powder is combined and solidified to form a heat supply device.
delete delete In the thermal vacuum test apparatus 400 using the heat supply device of claim 1,
an inner layer shroud 410 having an inner space to house a mechanical device;
an outer shroud 420 surrounding the inner shroud 410; and
The thermal vacuum test apparatus including a; located inside the inner layer shroud (410), the heat supply device (430) for supplying heat.

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