KR102335014B1 - Electrode material for solid oxide fuel cell and method for manufacturing the same - Google Patents

Abstract

The present invention is a metal comprising the step of depositing a ceramic having nano-sized particles on a porous metal using electrochemical plating, which is an electrochemical deposition method, simple, short process time, and crystallinity without additional high-temperature heat treatment. - A method of manufacturing a ceramic porous composite nanostructure, a metal-ceramic porous composite nanostructure manufactured by the method, and an electrode including the same.

Description

Electrode material for a solid oxide fuel cell and its manufacturing method TECHNICAL FIELD

The present invention relates to a method of manufacturing an electrode material for a solid oxide fuel cell (SOFC) having high performance and high durability capable of directly injecting hydrocarbon fuel at medium and low temperatures (400° C. or higher, 700° C. or lower).

A solid oxide fuel cell (SOFC) is a highly efficient and environmentally friendly electrochemical power generation technology that directly converts chemical energy of fuel gas into electrical energy. SOFC has many advantages over other types of fuel cells, such as a relatively inexpensive material, a relatively high tolerance for impurities in the fuel, hybrid power generation capability, and high efficiency. Hydrocarbon-based fuel can be directly used without the need for simplification and cost reduction of the fuel cell system. SOFCs include a cathode in which a fuel such as hydrogen or hydrocarbon is oxidized, an anode in which oxygen gas is ^{reduced to oxygen ions (O 2 −} ), and a ceramic solid electrolyte in which oxygen ions are conducted.

Because the existing SOFC operates at a high temperature ranging from 800°C to 1,000°C, high-temperature alloys or expensive ceramic materials that can withstand high temperatures must be used, the initial operation time of the system is long, and the durability of the material decreases during long-term operation There is a problem that In addition, the biggest obstacle to commercialization follows the problem of an increase in overall cost.

For this purpose, an anode that is thermally stable and has excellent electrical conductivity and catalytic activity even at a low temperature is required. For this purpose, the oxide-metal composite nanostructure has recently been attracting attention. In particular, Pt has excellent micromachinability and excellent catalytic activity, as well as interacting with oxides on an oxide support to operate at medium and low temperatures (400°C or higher, 700°C or lower) It can be used for electrodes for fuel cells that maintain high performance even under conditions.

However, metal nanoparticles including Pt agglomerate at a high temperature or decrease in activity due to carbon deposition and a phenomenon in which some are separated, so there is a problem in that thermal stability is low.

Accordingly, the present inventors have repeatedly studied a method for manufacturing an electrode material for a solid oxide fuel cell that is stable even at high temperatures, has high performance and high durability, and as a result, an oxide thin film is deposited on a porous metal substrate using an atomic layer deposition method. By stabilizing platinum nanoparticles, it was found that the catalytic activity of platinum nanoparticles can be maintained even when high-temperature hydrocarbon fuel is injected, and thus the present invention has been completed.

An object of the present invention is to provide a method for manufacturing an electrode material for a solid oxide fuel cell having high performance and high durability capable of directly injecting hydrocarbon fuel.

Another object of the present invention is to provide a solid oxide fuel cell comprising the electrode material for a solid oxide fuel cell.

In order to solve the above problems, the present invention provides a method for manufacturing an electrode material for a solid oxide fuel cell, comprising the following steps:

forming a porous structure on a substrate;

applying metal nanoparticles on the surface of the porous structure; and

Depositing an oxide thin film through atomic layer deposition (ALD).

Specifically, the 'electrode material for a solid oxide fuel cell' to be manufactured in the present invention is related to an anode of a solid oxide fuel cell.

An anode used in a thin film or thick film type fuel cell is required to have thermal stability and excellent catalytic activity. However, there is a problem in that the metal nanoparticles are agglomerated or partly separated from each other at high temperatures, resulting in low thermal stability.

Accordingly, the present invention is characterized in that the oxide thin film is coated on the metal nanoparticles as described below in order to supplement the thermal stability of the metal nanoparticles as described above. Through this, it is possible to suppress aggregation of metal nanoparticles even at high temperatures, relaxation of carbon deposition, and a phenomenon in which some are separated. In addition, in the present invention, by controlling the thickness of the oxide thin film to secure pores of a certain level or more, the catalytic activity of platinum nanoparticles for the oxidation reaction of hydrocarbon-based fuel in molecular units is maintained, and at the same time, it occurs on a larger scale. Coking phenomenon can be suppressed.

Therefore, the electrode material for a solid oxide fuel cell according to the present invention not only improves the thermal stability of the porous structure coated with metal nanoparticles on the surface, but also secures pores of a certain level or more as an anode of the solid oxide fuel cell to obtain a solid oxide It is possible to improve the performance of the fuel cell.

Hereinafter, the present invention will be described in detail for each step.

Forming a porous structure on a substrate (Step 1)

The meaning of the substrate referred to in the present specification means an electrolyte support in the case of an electrolyte-supported cell, and a metal support in the case of a metal-supported cell.

The present invention is to deposit an oxide thin film using atomic layer deposition on a porous structure having metal nanoparticles applied to the surface, wherein step 1 is a step of preparing a porous structure to which metal nanoparticles are applied.

The substrate is not particularly limited as long as a porous electrode thin film or a thick film can be deposited. In particular, in the case of an electrolyte-supported cell, oxygen ion conductor Y and/or Sc-doped ZrO ₂ , Gd, Sm and/or Sc-doped CeO ₂ , Er and/or Y-doped Bi ₂ O ₃ , Proton conductor Y and/or Yb-doped BaCeO ₃ , Y and/or Yb-doped BaZrO _{3 It} is not particularly limited as long as it is an oxygen ion conductor or proton conductor material with low electronic conductivity.

A method of forming the porous structure on the substrate is not particularly limited, and for example, spin coating, spraying, screen printing, gravuring, and tape casting. The porous structure may be formed on the substrate by chemical solution deposition (CSD) using, for example, the like.

Specifically, the porous structure may be formed on the substrate by screen printing (screen printing).

In addition, the porous structure may be used in which pores of 20 nm or more are formed, but is not necessarily limited thereto. In the present invention, since the particle size of the metal nanoparticles applied to the surface of the porous structure is about 20 nm or less, the size of the pores of the porous structure must be 20 nm or more so that the metal nanoparticles can be properly applied to the pores of the porous structure.

The porous structure is not particularly limited as long as it is a material having sufficient electronic conductivity or mixed ionic and electronic conductivity. For example, Ni, Cu, Pt, and/or Sm-doped CeO ₂ , LSCF (Lanthanum strontium cobalt ferrite), LSSM (Lanthanum strontium scandium manganite), LST (Lanthanum strontium titanate), LSTM (Lanthanum strontium LSCM titanium manganite), (Lanthanum strontium cobalt manganite) and PBMO (Layered-praseodymium barium manganite) may include one or more selected from the group consisting of metals and oxides. The porous structure can be composed of a single layer or a multilayer structure of two or more using these materials, and in order to maximize the efficiency of nanoparticles, the use of a mixed conducting ceramic is more effective.

Specifically, the porous structure may be lanthanum strontium chromium manganese oxide (LSCM). More specifically, the porous structure may be La _0.75 Sr _0.25 Cr _0.5 Mn _0.5 O ₃ .

The lanthanum strontium chromium manganese oxide (LSCM) has excellent oxygen ion conductivity and electron ion conductivity at the same time, has excellent resistance to carbon deposition, and has excellent compatibility with YSZ used as a substrate.

Applying metal nanoparticles on the surface of the porous structure (step 2)

Step 2 is a step of applying metal nanoparticles on the surface of the porous structure prepared in step 1.

A method of applying the metal nanoparticles is not particularly limited, and physical vapor deposition (PVD) such as pulsed laser deposition (PLD) and sputtering, atomic layer deposition, It can be applied by chemical vapor deposition (CVD), which is based on vapor deposition such as ALD), or infiltration, in which a solution in which metal ions to be deposited is dissolved into the porous structure and then heat treatment is performed. .

Specifically, the metal nanoparticles may be applied on the surface of the porous structure by infiltration.

The metal nanoparticles are gold (Au), silver (Ag), cobalt (Co), copper (Cu), iron (Fe), nickel (Ni), palladium (Pd), rhodium (Rd), ruthenium (Rh), Metal nanoparticles including at least one selected from the group consisting of osmium (Os) or platinum (Pt) may be used. Specifically, the metal nanoparticles may be platinum (Pt).

Depositing an oxide thin film through atomic layer deposition (ALD) (step 3)

Step 3 is a step of depositing an oxide thin film through atomic layer deposition (ALD) on the porous structure coated with metal nanoparticles on the surface prepared in step 2 above.

The atomic layer deposition (ALD) may include adding an oxide precursor and an oxidizing agent to the porous structure coated with the metal nanoparticles.

In the case of depositing an oxide thin film using physical vapor deposition (PVD), such as pulsed laser deposition (PLD) and sputtering, instead of the above-described atomic layer deposition, it is performed under high temperature conditions. Due to the deposition, there may be a problem in that the porosity of the substrate changes, and it is difficult to uniformly coat according to the size or depth of the pores, as well as technical problems in which it is difficult to increase the area.

In addition, in the case of depositing an oxide thin film using the impregnation method, the deposition amount cannot be quantitatively analyzed, and in order to deposit a large amount, it is necessary to perform high-temperature heat treatment several times with the same manufacturing method, and it is difficult to secure reproducibility. This can happen.

Therefore, by depositing the oxide thin film through the atomic layer deposition (ALD), it is possible to control the shape, thickness and porosity of the oxide thin film, as well as excellent technical effects that are not limited by various support structures. can be implemented.

The oxide is Al ₂ O ₃ , TiO ₂ , ZrO ₂ , HfO ₂ , Ta ₂ O5, Nb ₂ O ₅ , Y ₂ O ₃ , MbO, CeO ₂ , SiO ₂ , La ₂ O ₃ , Lu ₂ O ₃ , PrAlO ₃ , Er ₂ O ₃ , HfAlO, HfSiO, ZrSiO, ZrAlO, HfON, HfSiON, SrTiO ₃ , and BaTiO ₃ may include one or more selected from the group consisting of. Specifically, the oxide thin film may be a thin film deposited with _{Al 2} O _{3 .}

The oxide thin film may have a thickness of 1.1 nm or more and 2.9 nm or less, or 1.2 nm or more and 2.5 nm or less, or 1.3 nm or more and 1.7 nm or less.

The thickness of the oxide thin film may be adjusted by controlling the number of times the oxide is deposited in an atomic layer deposition (ALD) step by injecting the oxide precursor and adding an oxidizing agent.

As the thickness of the oxide thin film is controlled to be 1.1 nm or more and 2.9 nm or less, the performance of the solid oxide fuel cell can be improved by stabilizing the metal nanoparticles and securing a certain level of pores at the same time.

If the thickness of the oxide thin film is too thin (less than 1.1 nm), the metal nanoparticles are not stabilized, so that the metal nanoparticles are sintered and coking at a high temperature, thereby increasing the electrode resistance, thereby causing a technical problem in which the performance of the fuel cell is deteriorated. have.

In addition, when the thickness of the oxide thin film is excessively thick (over 2.9 nm), pores are not sufficiently secured and the electrode resistance increases as the absolute area of the electrode surface exposed to the reaction decreases, resulting in a decrease in the performance of the fuel cell. Problems can arise.

Electrodes for Solid Oxide Fuel Cells

In addition, the present invention provides an electrode for a solid oxide fuel cell comprising a porous structure formed on a substrate, metal nanoparticles coated with a surface of the porous structure, and an oxide thin film. The electrode for the solid oxide fuel cell may be manufactured by the above manufacturing method.

Preferably, the electrode for the solid oxide fuel cell is manufactured by the manufacturing method according to the present invention described above.

In addition, the present invention provides a solid oxide fuel cell including the electrode.

The electrode for a solid oxide fuel cell manufactured according to the present invention has a form in which metal nanoparticles are coated on a porous structure formed on a substrate, and an oxide thin film is coated thereon. In addition, in the electrode for a solid oxide fuel cell manufactured according to the present invention, as the oxide thin film is deposited through the atomic layer deposition method, the thickness of the oxide thin film can be adjusted to 1.1 nm or more and 2.9 nm or less. Accordingly, while physically stabilizing the metal nanoparticles, there is an effect of securing the pores exposed to the porous structure to a certain level or more.

Accordingly, when the electrode for a solid oxide fuel cell manufactured according to the present invention is used in a solid oxide fuel cell, the performance of the solid oxide fuel cell is improved and thermal stability is excellent, so that stability can be maintained even at high temperature for a long period of time.

The method for manufacturing a material for an electrode for a solid oxide fuel cell according to the present invention can control the shape, thickness, and porosity of the oxide thin film deposited on the porous structure by depositing the oxide thin film by an atomic layer deposition method.

In addition, since the material for an electrode for a solid oxide fuel cell of the present invention is coated with an oxide thin film on a porous structure having metal nanoparticles on the surface, it is possible to minimize performance degradation due to thermal instability of the electrode and maintain long-term stability at high temperature. .

1 schematically shows a manufacturing process of a material for an electrode for a solid oxide fuel cell according to the present invention.
2 is an SEM photograph of the porous structure prepared in Example according to the present invention.
3 is a SEM photograph of a porous structure coated with platinum nanoparticles prepared in Example according to the present invention.
4 is a graph showing the measurement of the electrical conductivity of the electrode material for a solid oxide fuel cell in Experimental Example 1 according to the present invention.
5 is a graph showing the measurement of the electrochemical performance of the electrode material for a solid oxide fuel cell according to the thickness of the oxide thin film in Experimental Example 2 according to the present invention.
6 a) to 6 d) are SEM photographs after exposing the electrode for a solid oxide fuel cell to 700° C. for 1 hour in Experimental Example 3 according to the present invention.
6 e) to 6 h) are SEM photographs after exposing the solid oxide fuel cell electrode to room temperature wet methane condition for 25 hours in Experimental Example 3 according to the present invention.

Hereinafter, preferred examples are presented to help the understanding of the present invention. However, the following examples are only provided for easier understanding of the present invention, and thus the content of the present invention is not limited thereto.

Preparation Example 1: Preparation of LSCM powder

La(NO ₃ ) ₃ ·6H ₂ O (Alfa Aesar, 99.99%), Sr(NO ₃ ) ₂ (Alfa Aesar, 99.97%), Cr(NO ₃ ) ₃ 9H ₂ O (Sigma-aldrich, Ltd., 99%), Mn(NO ₃ ) ₂ .6H ₂ O (Alfa Aesar, 98+%), and glycine (Junsei, 99%) were added to an aqueous solution and concentrated by heating until a dark green gel was obtained. . After the excess water was evaporated, the gel was converted to ash by spontaneous combustion. At this time, (number of moles of glycine)/(number of moles of metal) was 1.5. The batch was immediately calcined at 1100° C. for 8 hours to prepare LSCM powder.

Example: Preparation of electrode material for solid oxide fuel cell

(Step 1) The LSCM powder prepared in Preparation Example 1 was mixed with an ink vehicle (SOFC material) by ball-milling to form a slurry. The mixture was coated on both sides of a YSZ substrate (1 cm x 1 cm and 1 mm thick), dried, and fired at 1200° C. for 1 hour at a heating rate of 4° C./min to form a porous LSCM electrode structure. SEM pictures of the porous LSCM electrode structure were taken and shown in FIG. 2 .

(Step 2) On the surface of the porous LSCM electrode, Pt nanoparticles from an ethanol solution of chloroplatinic acid were deposited by wet infiltration, gold paste was applied using a current collector, and calcined at 700° C. for 1 hour. A porous LSCM electrode structure coated with was prepared. The SEM picture of the porous LSCM electrode structure coated with the Pt nanoparticles was taken and shown in FIG. 3 .

(Step 3) Distilled water as an oxidizing agent and _{trimethylaluminum as an Al 2} O ₃ precursor were added to the anode of the porous LSCM electrode structure coated with the platinum nanoparticles at 200 ° C. Atomic layer deposition (ALD) ) through a 1.5 nm Al ₂ O ₃ thin film was deposited. Specifically, by placing the porous LSCM electrode structure coated with the platinum nanoparticles on a metal holder located in the middle of the reactor, trimethylaluminum input (0.5 s) - Ar purge (15 s) - distilled water input (1 s) - An electrode material for a solid oxide fuel cell was prepared by performing an atomic layer deposition step in a coating cycle in the order of Ar purge (15 s). An Al ₂ O ₃ thin film was deposited at a rate of 0.12 nm per one coating cycle, and a 1.5 nm Al ₂ O ₃ thin film was deposited through 17 coating cycles.

Comparative Example 1: Preparation of electrode material for solid oxide fuel cell

In the above example, the porous LSCM electrode structure prepared in the same manner except for omitting steps 2 and 3 was used as an electrode material for a solid oxide fuel cell.

Comparative Example 2: Preparation of electrode material for solid oxide fuel cell

In the above example, the porous LSCM electrode structure prepared in the same manner except for omitting step 3 was used as an electrode material for a solid oxide fuel cell.

Comparative Examples 3 and 4: Preparation of electrode materials for solid oxide fuel cells

In the above example, in step 3, _{the porous LSCM electrode structure prepared in the same manner except for adjusting the thickness of the Al 2} O ₃ thin film as described in Table 1 was used as an electrode material for a solid oxide fuel cell.

Example Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Whether Pt nanoparticles are applied ○ X ○ ○ ○ Al ₂ O ₃ thin film thickness (nm) 1.5 0 0 One 3

Experimental Example 1: Electrical Conductivity Relaxation Measurement Test

The electrical conductivity of the electrode material for a solid oxide fuel cell according to the thickness of the Al ₂ O _{3 thin film was confirmed through Electrical conductivity relaxation (ECR).}

Specifically, two platinum electrodes were deposited on the electrode material for a solid oxide fuel cell prepared in Examples and Comparative Examples with a thickness of 200 nm and a distance of 2 mm by DC magnetron sputtering to prepare an electrode for a solid oxide fuel cell. At this time, DC power of 10 W, 30 sccm Ar flow rate, 10 mTorr, and deposition rate were adjusted to 60 nm/min.

Using a tube furnace equipped with a K-type thermocouple, at 650 °C and ^{an oxygen partial pressure of 1.3 · 10 -21} atm, the total flow rate was controlled by a mass flow controller to 190 sccm, at 0.1 second intervals until a new equilibrium was reached. Electrical conductivity was measured, and voltage was measured by chronopotentiometric (VSP-300, Biologic). The electrical conductivity measured as described above is shown in FIG. 4 .

_{The surface oxygen exchange rate k s} (cm·sec ⁻¹ ) was calculated from the relationship between the electrical conductivity measured as described above and the following Equation (1).

[Equation 1]

In Equation 1 above,

σ(t) is the electrical conductivity measured at time t,

k _s is the surface oxygen exchange rate,

a is the thickness of the sample.

The coverage (%) of the surface was inferred by Equation 2 below.

[Equation 2]

The evaluation results for the above are shown in Table 2 below.

Al ₂ O ₃ thin film thickness (nm) k _s (cm·sec ^-1 ) Coverage (%) Example 1.5 1.210 ^-6 84 Comparative Example 2 0 7.310 ^-6 0 Comparative Example 3 One 2.910 ^-6 60 Comparative Example 4 3 5.310 ^-7 93

Experimental Example 2: Electrochemical performance measurement test

The electrochemical performance of the electrode material for a solid oxide fuel cell was measured through electrochemical impedance spectroscopy (EIS). Specifically, after reaching 650° C., where pure platinum is thermally quite fragile, atmospheric conditions are maintained as wet (2% H ₂ O) methane conditions, and the gas flow is allowed to stabilize for 10 minutes. The impedance was measured by AC impedance spectroscopy (ACIS, VSP-300, Biologic) in a frequency range of 1 mHz to 1 MHz, an AC amplitude of 20 mV, and a total flow rate of 100 sccm, and displayed in FIG. 5 a).

In addition, the area specific resistance (ASR) of the electrode material for a solid oxide fuel cell measured for 25 hours at wet (2% H _{2 O) and 650 ° C conditions was measured under the same conditions as above, FIG. 5 b)} indicated in

5, Pt/1.5 nm ALD LSCM means Example, Bare LSCM means Comparative Example 1, Pt LSCM means Comparative Example 2, Pt/1 nm ALD LSCM means Comparative Example 3, Pt/ 3 nm ALD LSCM means Comparative Example 4.

The electrode material for a solid oxide fuel cell prepared according to Comparative Example 1 shows a very large resistance value, and the electrode material for a solid oxide fuel cell prepared according to Comparative Example 2 has a very small resistance value due to the application of platinum nanoparticles, Specifically, as compared with the electrode material for a solid oxide fuel cell prepared according to Comparative Example 1, the electrode resistance was decreased by about 300 times. The electrode material for the solid oxide fuel cell prepared in Comparative Example 3 did not sufficiently stabilize the platinum nanoparticles from sintering and coking as _{the Al 2} O _{3 thin film of 1 nm thinner than 1.5 nm of Example was deposited, and thus the electrode resistance was large.} On the other hand, in the electrode material for the solid oxide fuel cell prepared in Comparative Example 4, as the Al ₂ O ₃ thin film of 3 nm thicker than 1.5 nm of Example was deposited, the coverage was too high, and the absolute area of the electrode surface exposed to the reaction was reduced, so that the electrode resistance appeared large.

The electrode material for a solid oxide fuel cell prepared according to the embodiment of the present application, as _{the thickness of the Al 2} O ₃ thin film is adjusted to 1.5 nm, sufficiently stabilizes the platinum nanoparticles from sintering and coking and at the same time has a certain level of coverage. As this was sufficiently secured, the initial electrode resistance was about 4.2 Ω·m ^{2 , which} was shown to be as small as the electrode material for a solid oxide fuel cell prepared according to Comparative Example 1.

In addition, in the _{case of the example in which an Al 2} O ₃ thin film having a thickness of 1.5 nm was deposited, a small area resistivity value of ^{14.6 Ω/cm 2} was exhibited at the same level as the conventional LSCM electrode used at 800°C. _{Accordingly, by adjusting the thickness of the Al 2} O ₃ thin film of the electrode material for a solid oxide fuel cell to 1.5 nm, the reactivity as an electrode for a solid oxide fuel cell can be maintained even at an operating temperature of 650° C. Confirmed.

Experimental Example 3: Thermal and chemical stability measurement test

In order to measure the thermal stability of the electrode material for a solid oxide fuel cell, the electrode material for a solid oxide fuel cell prepared according to Examples and Comparative Examples was exposed to air at 700° C. for 1 hour, and then SEM photographs were taken to show a ) to d).

In order to measure the chemical stability of electrode materials for solid oxide fuel cells, the electrode materials for solid oxide fuel cells prepared according to Examples and Comparative Examples _{were exposed to wet (2% H 2} O) methane conditions at room temperature for 25 hours, followed by SEM. The pictures were taken and shown in e) to h) of FIG. 6 .

In FIG. 6, 1.5 nm Al ₂ O ₃ coating means Example, No ALD means Comparative Example 2, 1 nm Al ₂ O ₃ coating means Comparative Example 3, 3 nm Al ₂ O ₃ coating means Comparative Example 4 is meant.

In the case of the electrode material for a solid oxide fuel cell prepared according to Comparative Example 2, it _{was confirmed that, as there was no Al 2} O ₃ thin film, the platinum nanoparticles were agglomerated at a high temperature, and thermal and chemical stability were remarkably deteriorated.

In addition, in _{the case of Comparative Example 3 in which a 1 nm Al 2} O ₃ thin film was deposited, it was confirmed that the platinum nanoparticles were agglomerated to some extent at a high temperature, resulting in poor thermal and chemical stability.

On the other hand, in _{the case of Example 4 in which a 1.5 nm Al 2} O ₃ thin film was deposited and Comparative Example 4 in which a 3 nm Al ₂ O _{3 thin film was deposited, as the thickness of the Al 2} O ₃ thin film was increased, the carbon coking resistance could be improved. In addition, it was shown that the platinum nanoparticles were stabilized to improve thermal and chemical stability.

In particular, the electrode material for a solid oxide fuel cell prepared according to the embodiment of the present application _{has excellent electrochemical performance as described above as the thickness of the Al 2} O ₃ thin film is adjusted to 1.5 nm, and at the same time, thermal and chemical stability are significantly improved. improvement could be confirmed.

Claims (6)

forming a porous structure on a substrate;
applying metal nanoparticles on the surface of the porous structure;
and depositing an oxide thin film through atomic layer deposition (ALD),
The oxide is
Al ₂ O ₃ , TiO ₂ , ZrO ₂ , HfO ₂ , Ta ₂ O ₅ , Nb ₂ O ₅ , Y ₂ O ₃ , MbO, CeO ₂ , SiO ₂ , La ₂ O ₃ , Lu ₂ O ₃ , PrAlO ₃ , Er ₂ O ₃ , HfAlO, HfSiO, ZrSiO, ZrAlO, HfON, HfSiON, SrTiO ₃ , contains at least one selected from the group consisting of _{BaTiO 3}
The metal nanoparticles include gold (Au), silver (Ag), cobalt (Co), copper (Cu), iron (Fe), nickel (Ni), palladium (Pd), rhodium (Rd), ruthenium (Rh), It contains at least one selected from the group consisting of osmium (Os) or platinum (Pt),
The porous structure is, Sm-doped CeO ₂ , LSCF (Lanthanum strontium cobalt ferrite), LSSM (Lanthanum strontium scandium manganite), LST (Lanthanum strontium titanate), LSTM (Lanthanum strontium titanium manganite), LSCM (Lanthanum strontium titanium manganite), LSCM (Lanthanum strontium manganite) PBMO (Layered-praseodymium barium manganite) containing at least one selected from the group consisting of metals and oxides thereof,
A method for manufacturing an electrode material for a solid oxide fuel cell.
The method of claim 1,
The substrate is
Y and/or Sc-doped ZrO ₂ , Gd, Sm and/or Sc-doped CeO ₂ , Er and/or Y-doped Bi ₂ O _{3 ,} Y and/or Yb-doped BaCeO ₃ , Y and/or Yb- at least one of doped BaZrO _{3 ,}
A method for manufacturing an electrode material for a solid oxide fuel cell.
delete delete According to claim 1,
The oxide thin film has a thickness of 1.1 nm or more and 2.9 nm or less,
A method for manufacturing an electrode material for a solid oxide fuel cell.
delete

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