KR102330898B1 - Touch Panel and Preparing Method of Touch Panel - Google Patents

Abstract

A capacitive touch panel disposed on a display panel and operated by touching an operation surface, a transparent substrate, a plurality of X electrodes formed on a rear surface of the operation surface of the transparent substrate in the X direction, It has a plurality of Y electrodes formed in an orthogonal Y direction. A plurality of transparent electrodes in which the plurality of X electrodes and the plurality of Y electrodes are formed on the same surface on the back side, and a transparent electrode of the X electrode adjacent to an intersection where the X electrode and the Y electrode cross each other through an insulating part Alternatively, it has a jumper wire that three-dimensionally connects one of the transparent electrodes of the adjacent Y electrode. The jumper wire has a first layer connected to the transparent electrode and a second layer laminated on the first layer. The first layer is made of a first metal oxide film, and the second layer is made of a second metal oxide film. The refractive index of the first layer is lower than the refractive index of the second layer.

Description

{Touch Panel and Preparing Method of Touch Panel}

The present invention relates to a touch panel formed integrally with a cover sheet and to a technique preferred for use in a method of manufacturing the touch panel.

The touch panel is a component of an input device capable of detecting a contact position by an operator touching a transparent surface on a display screen with a finger or a pen and inputting data, and enables direct and intuitive input than a key input. Therefore, recently, it has been widely used in the operation unit of various electronic devices, including mobile phones, portable information terminals, and car navigation systems.

The touch panel can be used as an input device by being pasted on the display screen of a flat display device such as a liquid crystal panel. There are various detection methods of the touch panel, such as a resistive type, a capacitive type, an ultrasonic type, an optical type, and the like, and the structure thereof is various.

The capacitive touch panel can be roughly divided into a surface type and a projection type. In the surface type, it is difficult to detect two or more contact points at the same time. The projection type can detect two or more contact points at the same time. The projection type is an electrode plate for a capacitive touch panel, which is a transparent substrate, a first transparent electrode pattern layer, a first insulating layer, a second transparent electrode pattern layer, a metal electrode pattern layer used as a terminal electrode, and a second insulating layer, respectively. It usually has a laminated structure formed in this order.

In addition to the form in which the projected capacitive touch panel is superimposed on the display screen of the flat display device, there is a cover glass integrated type capable of reducing the overall thickness separately from the touch panel stand alone type.

That is, in the independent touch panel, the independent touch panel is attached to the display surface of the flat display device through an air gap, and additionally, it has a decorative pattern such as a picture frame on its front surface to protect the surface, represented by a cover glass (front panel). Install the transparent cover sheet (refer to Japanese Patent Laid-Open No. 2012-084025).

On the other hand, the cover glass-integrated touch panel is attached to the cover glass-integrated touch panel through a similar air gap on the display surface side of the flat-type display device. In addition, the direction of the pattern such as electrodes, terminals, and wiring constituting the touch panel is inversely proportional to the position of the substrate directly supporting the pattern between the touch panel independent type and the cover glass integrated type, so the direction is opposite on the viewing side. .

The electrode structure of the projected capacitive touch panel includes a plurality of transparent conductive film patterns and a transparent conductive film that are sensor electrodes that are two-dimensionally arranged on the same plane of the transparent cover sheet as shown in the example of the transparent cover sheet integrated type represented by the cover glass integrated type. It consists of a jumper part that electrically connects between patterns, an insulating part that prevents electrical short circuit between layers in the jumper part, and a wiring part that leads the wiring from the sensor electrode to the terminal part. A transparent conductive film such as ITO (indium tin oxide) is used for the sensor electrode. On the other hand, a metal material with better conductivity than ITO is used for the jumper (refer to Japanese Patent Application Laid-Open No. 2013-020347).

In such a touch panel, the structure of the insulating part and the jumper part for three-dimensionally connecting the sensor electrodes regularly arranged on the same plane is indispensable. , there has been a demand to improve the visibility of the display device. In Japanese Patent Application Laid-Open No. 2013-020347, as shown in Fig. 6, from the surface of the transparent cover sheet 2, a thin film composed of a three-layer structure of a molybdenum film 71 / an aluminum film 81 / a molybdenum film 91. Compared with the case where the laminate material is used, it appears that the reflectance is small in the case of three layers of molybdenum oxide film 7 / aluminum film 8 / molybdenum film 9 .

However, as shown in Fig. 6 of Japanese Patent Application Laid-Open No. 2013-020347, when the jumper part is made of three layers of molybdenum oxide film 7 / aluminum film 8 / molybdenum film 9, in a strict sense, The reflectance does not decrease all over the world. In particular, since the increase of the reflectance near 400 nm affects the reflective properties, especially the color of the touch panel in the display device, there has been a strong demand for improving this and realizing an almost uniform reflectance in the visible ray region.

In addition, there is a strong demand for the reflectance to be 10% or less in the entire visible light region.

The present invention has been made in view of the above circumstances, and aims to achieve the following objects:

1. Reduction of reflectance to less than 10% throughout the visible region;

2. Reducing the wavelength dependence and making the reflectance uniform throughout the visible region; and

3. Maintaining the same level of characteristics as in the past with respect to etching characteristics, sheet resistance, and adhesion to the substrate.

A touch panel according to an embodiment of the present invention is a capacitive touch panel disposed on a display panel and operated by touching an operation surface, wherein the transparent substrate and the rear surface of the operation surface of the transparent substrate are directed in the X direction. It has a plurality of X electrodes formed and a plurality of Y electrodes formed in a Y direction orthogonal to the X direction. A plurality of transparent electrodes in which the plurality of X electrodes and the plurality of Y electrodes are formed on the same surface on the back side, and a transparent electrode of the X electrode adjacent to an intersection where the X electrode and the Y electrode cross each other through an insulating part Alternatively, it has a jumper wire that three-dimensionally connects one of the transparent electrodes of the adjacent Y electrode. The jumper wire has a first layer connected to the transparent electrode and a second layer laminated on the first layer. The first layer is made of a first metal oxide film, and the second layer is made of a second metal oxide film. The refractive index of the first layer is lower than the refractive index of the second layer.

According to the above-mentioned touch panel, it is possible to reduce the reflectance of the intersection portion as viewed from the viewer side with respect to the entire visible light wavelength and to uniformly suppress it.

It is preferable that the oxygen content of the first layer is higher than that of the second layer.

In this case, a desired reflectance can be obtained at the intersection.

It is preferable that the resistivity of the first layer is higher than that of the second layer.

In this case, a desired reflectance can be obtained at the intersection.

Preferably, the first layer and the second layer are the same metal oxide.

In this case, a desired reflectance can be obtained at the intersection.

Preferably, the first layer and the second layer are molybdenum alloy oxide containing niobium (Nb) in an amount of 1 atm% to 15 atm%.

In this case, the desired reflectivity can be obtained at the intersection.

When the complex refractive indices of the first and second metal oxide films are defined as m = n-ik (n is the refractive index, k is the extinction coefficient),

In the first metal oxide film constituting the first layer,

2.0 ≤ n1 ≤ 2.2

0.015 ≤ k1 ≤ 0.1,

In the second metal oxide film constituting the second layer,

2.5 ≤ n2 ≤ 3.8

0.3 ≤ k2 ≤ 3.0

It is preferable to be

Preferably, the jumper wire has a third layer made of a third metal film laminated on the second layer.

Preferably, the third layer is made of aluminum or an aluminum alloy.

The jumper wire preferably has a fourth layer made of a fourth metal film laminated on the third layer.

The fourth layer may be made of molybdenum or a molybdenum alloy.

According to the embodiment of the present invention, by configuring the intersection as described above, almost uniform reflectance is realized in the visible ray region to improve visibility, and at the same time, the reflectance is set to 10% or less in the entire visible ray region to reduce the color tone. can guarantee the accuracy of

1 is a plan view schematically showing a touch panel according to an embodiment of the present invention;
2 is a cross-sectional view showing a touch panel according to an embodiment of the present invention;
3 is an enlarged cross-sectional view showing the vicinity of an intersection of a touch panel according to an embodiment of the present invention;
4 is a conceptual diagram showing a film configuration example and sheet resistance evaluation and reflectance evaluation in a touch panel jumper wire according to an embodiment of the present invention;
5 is a graph showing measurement results for a touch panel according to an embodiment of the present invention;
6 is a graph showing an experimental example for a touch panel according to an embodiment of the present invention;
7 is a graph showing a simulation result for a touch panel according to an embodiment of the present invention; and
8 is a graph illustrating a simulation result for a touch panel according to an embodiment of the present invention.

Hereinafter, a touch panel according to an embodiment of the present invention will be described with reference to the drawings.

Fig. 1 is a plan view schematically showing a touch panel according to the present embodiment, Fig. 2 is a cross-sectional view showing the touch panel, and Fig. 3 is an enlarged cross-sectional view showing the vicinity of an intersection of the touch panel.

1 and 2, the touch panel 10 according to the present embodiment is disposed on a display panel 2 such as liquid crystal or organic EL, and is operated by touching the operation surface 10A. As a touch panel, the transparent substrate 11 and a plurality of X electrodes 12X formed in the X direction on the back surface 11b side of the operation surface 10A of the transparent substrate 11 and formed in the Y direction orthogonal to the X direction It has a plurality of Y electrodes 12Y.

As shown in Figs. 1 to 3, the capacitive touch panel of the present embodiment extends in the Y direction on the back surface 11b opposite to the viewing side of the transparent substrate 11 and extends in the Y direction, for example. It has a plurality of X electrodes juxtaposed at a predetermined arrangement pitch in an intersecting X direction, and a plurality of Y electrodes intersecting the plurality of X electrodes and arranged at a predetermined arrangement pitch in a Y direction extending in the X direction. As the transparent substrate 11 , a transparent substrate such as glass or heat-resistant transparent plastic may be used. The plurality of X electrodes 12X and the plurality of Y electrodes 12Y are formed of a material having high transmittance, for example, a transparent conductive material such as ITO (Indium Tin Oxide).

The plurality of X electrodes 12X and the plurality of Y electrodes 12Y are insulated from the plurality of transparent electrodes 12 formed on the same surface of the rear surface 11b side, the X electrode 12X and the Y electrode 12Y A jumper wire 15 is provided that three-dimensionally connects one of the transparent electrodes 12 of the adjacent X electrode 12X or the adjacent Y electrode 12Y at the intersection 14 that crosses each other through the portion 13 .

An area in which the plurality of Y electrodes 12Y and X electrodes 12X are disposed is an effective touch area 16, and the periphery of the effective touch area 16 is a plurality of Y electrodes as shown in FIG. and a plurality of wiring portions 17 from each of the plurality of X electrodes leading to a peripheral portion in the longitudinal and lateral directions leading to a terminal (not shown).

Each of the plurality of X electrodes is formed in an electrode pattern in which a thin wire portion 12Xa and a pad portion 12Xb having a width wider than the width of the thin wire portion 12Xa are alternately arranged in the Y direction. Each of the plurality of Y electrodes is formed in an electrode pattern in which a thin wire portion 12Ya and a pad portion 12Yb having a width wider than the width of the thin wire portion 12Ya are alternately arranged in the X direction.

In a plan view, the pad portion 12Yb of the Y electrode 12Y is disposed between the thin wire portions 12Xa of two adjacent X electrodes 12X, and the pad portion 12Xb of the X electrode 12X is adjacent to two adjacent X electrodes 12X. It is disposed between the thin wire portions 12Ya of the Y electrodes 12Y.

Further, the insulating portion 13 is made of, for example, a film made of SiO, SiN, SiON, or a resin.

In the intersection portion 14, the jumper wire 15 and the wiring portion (wiring) 17, which are the thin wire portions 12Ya of the Y electrode 12Y, have a multilayer structure having the same configuration as shown in Figs. At the interface between the electrode 12 and the insulating portion 13 , the reflectance when viewed from the viewer is reduced to optimize the reflection characteristics and increase the conductivity of the jumper wire 15 and the wiring portion 17 .

The jumper line 15 is sequentially from the transparent substrate 11 side as shown in FIG. 4 , the lower molybdenum-niobium oxide laminate film (first layer, M1), and the upper molybdenum-niobium oxide laminate film (second layer, M2) , an aluminum-neodymium film (third layer, A3), and a molybdenum-niobium film (fourth layer, M4) may have a laminated structure.

The first layer M1 and the second layer M2 consist of first and second metal oxide films which are the same metal oxide, for example molybdenum, and the first layer M1 and the second layer M2 are made of niobium. 1 atm% to 15 atm%. In the first layer M1 and the second layer M2, the refractive index of the first layer M1 is lower than that of the second layer M2, and the oxygen content of the first layer M1 is lower than that of the second layer. (M2), and the resistivity of the first layer (M1) is higher than that of the second layer (M2).

In the first layer M1 and the second layer M2, when the complex refractive index is defined as m = n-ik (n is the refractive index, k is the extinction coefficient), the first layer constituting the first layer M1 In the metal oxide film,

2.0 ≤ n1 ≤ 2.2

0.015 ≤ k1 ≤ 0.1

In the second metal oxide film constituting the second layer (M2),

2.5 ≤ n2 ≤ 3.8

0.3 ≤ k2 ≤ 3.0

am.

The third layer A3 may be made of aluminum or an aluminum alloy containing neodymium (Nd).

The fourth layer M4 is a film made of the same metal as the first layer M1 and the second layer M2, and may be formed of molybdenum or a molybdenum alloy.

By making the film configuration of the jumper wire 15 in this way, it is also possible to reduce the reflectance when viewed from the viewer side by the interference effect of light.

Here, the characteristics such as the film thickness of each of the films M1, M2, A3, and M4 may be set as follows in one example. In addition, as an electrical characteristic of the jumper wire 15 laminated|stacked here, the sheet resistance Rs [Ω/□] is shown. Moreover, it can be set as the range of +/-10% of the value described in FIG. 4 with the film thickness of each layer. In addition, the first layer (M1): 20 nm to 40 nm, the second layer (M2): 40 nm to 50 nm.

Fig. 4 shows an example of an actual film configuration of the jumper wire 15 in this embodiment, and is a conceptual diagram showing evaluation of sheet resistance and evaluation of reflectance.

In addition, specific films used in the jumper wire 15 of this embodiment are molybdenum-niobium oxide stacked films (M1, M2), aluminum-neodymium film (conductive film, A3), molybdenum-niobium film (M4) from bottom to top. ) is not limited to the composition and thickness of Table 1, but it is preferable in terms of manufacturing that the metal oxide layers M1 and M2 and the protective metal layer M4 are based on a common metal.

In this embodiment, when forming such a multilayer film by the sputtering method, a sputter target is prepared with a binary component of molybdenum-niobium and aluminum-neodymium, and a predetermined amount of oxygen gas and an inert gas such as argon are introduced when forming an oxide film. Through reactive sputtering, it is possible without increasing the source power.

5 is a graph simultaneously showing a change in resistivity and deposition rate with respect to a change in an oxygen flow rate in sputter deposition of the metal oxide films M1 and M2 in the present embodiment.

In the jumper wire 15 of this embodiment, as shown in FIG. 5, the resistivity of the molybdenum-niobium oxide laminate film M2 below and the molybdenum-niobium oxide laminate film M1 below are configured to increase as shown in FIG. Specifically, when the lower molybdenum-niobium oxide laminate film M1 is formed by sputtering, the lower molybdenum-niobium oxide laminate film M1 is formed from the transparent substrate 11 side to a predetermined thickness, and then, FIG. 5 As shown in , the flow rate of the supplied oxygen gas is decreased to increase the deposition rate, and the above molybdenum-niobium oxide stacked film M2 is formed to a predetermined thickness. Threshold SO exists in the oxygen gas flow rate ratio supplied here, and the specific resistance of the film|membrane formed into a film and the film-forming speed|rate change with this threshold SO as a boundary.

* When the oxygen gas flow rate ratio is smaller than the threshold SO, the film formation rate is high and the specific resistance is small.

* When the oxygen gas flow rate ratio is larger than the threshold SO, the film formation rate is low and the specific resistance is very large.

Specifically, in the film formation of the molybdenum-niobium oxide laminate film M1 below, the gas flow rate among the film formation conditions is argon: oxygen flow rate of 200: 120 (sccm), and in this state, the molybdenum-niobium oxide laminate film above is formed in this state. In the film formation of (M2), it is preferable to change it to 200:80 (sccm).

In addition, in this embodiment, the resistivity of the lower molybdenum-niobium oxide stacked film (first layer, M1) and the upper molybdenum-niobium oxide stacked film (second layer, M2) is connected to the transparent electrode 12 . It may be configured to continuously decrease from the aluminum-neodymium film (third layer, A3) side.

One specific example of the touch panel manufacturing method of this embodiment will be described.

The touch panel manufacturing method of this embodiment includes a process of forming a transparent electrode 12 , which is a sensor conductive film pattern, on a transparent substrate 11 , a process of forming an insulating part 13 , a jumper wire 15 and a wiring part 17 . It has a process of collectively forming.

In addition, the touch panel manufacturing method of this embodiment includes the steps of collectively forming the jumper wire 15 and the wiring portion 17, the step of forming the insulating portion 13, and the step of forming the transparent electrode 12, can be done in order.

Further, in another specific example of the manufacturing method of the touch panel, the step of pattern forming the wiring portion 17, the step of forming the transparent electrode 12, the step of forming the insulating portion 13, the jumper wire 15 is It may have a forming process.

In addition, in this method, as a final process, a uniform protective film 13A can be formed over the entire surface by using a transparent resin or the like.

The touch panel manufacturing method of this embodiment will be described more specifically, (a) on the premise that the pattern of the transparent electrode 12, which is a sensor electrode, is aligned with the position of the pattern in the previous step after, for example, ITO film formation, in the photolithography method. A photoresist patterning process is performed according to the pattern, and thereafter, etching and residual resist removal are performed to form it. Next, (b) a photosensitive resin material for forming the insulating portion 13 is applied, and a pattern is formed in alignment with the intersection portion 14 by a photolithography method. Next, (c) performing multilayer film formation of the same configuration as described above to configure the jumper wire 15 and the wiring portion 17, a photolithography method including application of a photoresist, exposure, and development, followed by etching, And it can be collectively formed by removing the residual resist.

6 is a graph of spectral reflectance measurement results for comparing the effect of lowering the reflectance of the touch panel multilayer film according to an embodiment of the present invention with a conventional example.

Measurement of spectral reflectance is possible using a commercially available spectrophotometer. As shown in FIG. 4, the irradiated light that is spectralized from the light source (monochrome meter, L1) is irradiated to the measurement sample film, and the specularly reflected light is received by the measuring device LS to measure the light intensity. The spectral reflectance is measured by continuously changing the wavelength of the spectral irradiation light from the monochrome meter L1.

Here, the reference of the measurement is a given film with known absolute reflectance. That is, the standard of 100% of each sample is set as a value obtained by dividing the intensity obtained with, for example, an aluminum monolayer by the known absolute reflectance.

Next, as shown in FIG. 4 , as an example of the multilayer film, a multilayer film consisting of an aluminum-neodymium film and a molybdenum-niobium film is formed on a transparent substrate (glass 11), and from the side opposite to the film-forming surface of the transparent substrate 11 Spectral reflectance measurement of a multilayer film composed of an aluminum-neodymium film and a molybdenum-niobium film is performed. This result is shown by the dashed-dotted line in FIG.

Next, a multilayer film composed of a molybdenum oxide film, an aluminum film, and a molybdenum film is similarly formed on the transparent substrate 11 , and the multilayer film consisting of a molybdenum oxide film, an aluminum film, and a molybdenum film is spectroscopy from the non-filmed side of the transparent substrate 11 . Measure the reflectance. This result is shown by a dotted line in FIG.

And, as an example of the multilayer film of the touch panel according to an embodiment of the present invention, a molybdenum-niobium oxide laminate film (M1) under the transparent substrate 11, a molybdenum-niobium oxide laminate film (M2) above, aluminum-neodymium A multilayer film composed of a film A3 and a molybdenum-niobium film M4 is formed, and from the non-filmed side of the transparent substrate 11, a molybdenum-niobium oxide laminate film M1 below, and a molybdenum-niobium oxide laminate above The spectral reflectance of the multilayer film composed of the film (M2), the aluminum-neodymium film (A3), and the molybdenum-niobium film (M4) is measured. This result is shown by a solid line in FIG.

As shown in Fig. 6, the multilayer film constituting the present embodiment suppresses the reflectance to 10% or less in the entire visible light region where the measurement wavelength is 380 nm to 780 nm, compared with the conventional multilayer film, and at the same time, the visible light region It is possible to make the reflectance almost uniform over the entire area of . In Japanese Patent Application Laid-Open No. 2013-020347, measurement results in the ultraviolet region with a wavelength of less than 400 nm are not referred to in order not to show an accurate value for the measurement results. The reflectance was able to be in the range of 5% to 8% in almost the entire visible light range.

7 and 8 are CIELAB color space graphs showing simulation results for defining the film thicknesses of the first layer and the second layer for realizing a desired reflectivity in a multilayer film of a touch panel according to an embodiment of the present invention; .

Reflectance (R%) at 550 nm: 6% or less, chromaticity coordinates a*: - 5 to 5, b*: In a film thickness range that meets - 5 to 5, the first layer is MoNbOx1 as shown in Figure 7, Thickness range: 20 nm to 40 nm (standard condition: 35 nm), the second layer can be MoNbOx2 thickness range: 40 nm to 50 nm (standard condition: 45 nm), as shown in FIG. 8 . Here, in the CIELAB color space (CIE1976L*a*b* color space to be more precise), among the three axes L*, a*, and b*, L* represents the lightness, and a* and b* represent the colors in the red, green, and blue-yellow directions. .

On the other hand, in the conventional example shown in FIG. 6, there were L*: 35, a*: 0.54, b*: -13.5, (blue).

From this result, while the color tone deviates from the chromaticity coordinates a*: - 5 to 5, b*: - 5 to 5 in the conventional example, the color is not modulated in the multilayer film of the touch panel according to one embodiment of the present invention. It can be seen that it was not

Next, Table 2 shows the results of comprehensive comparison of the multilayer film of the touch panel according to an embodiment of the present invention with the conventional multilayer film. For each evaluation item, for each evaluation item, the judgment of good or bad is shown in the table by ○ (OK) / × (NG). While the multilayer film of the touch panel according to one embodiment of the present invention shows a significant improvement over the conventional multilayer film in reflectance across the wavelength region of 380 nm to 780 nm of visible light, etching time, sheet resistance, and adhesion to the substrate As for several items, it can be seen that they are equivalent.

According to the embodiment of the present invention, the interface between the transparent substrate and the multilayer wiring pattern can be made low in reflectance by a simple method, and at the same time, the uniformity of the reflectance in the visible ray region can be improved, thereby reducing the visibility of the wiring pattern from the viewer side. have. It is thought that it will be easy to improve the characteristic quality related to the display performance of another electronic component etc. by the same measure. For example, the visibility of the auxiliary wiring pattern including the metal layer for lowering the resistance of the transparent conductive layer may be improved. In addition, it is possible to expand the range of application of the metal layer to various wiring patterns of electronic components including wiring related to display devices in general, and it is possible to significantly improve the degree of freedom in product design.

10 ... touch panel
10A ... operating surface
11 ... transparent substrate
12 ... transparent electrode
12X...X electrode
12Y ... Y electrode
12Xa, 12Ya ... fine wire
12Xb, 12Yb ... Pad part
13 ... insulation
14 ... intersection
15 ... jumper wire
17 ... wiring
Molybdenum-niobium oxide layered film under M1... (1st layer)
M2...Molybdenum-niobium oxide laminated film (2nd layer) above
A3...aluminum-neodymium film (3rd layer)
M4...Molybdenum-niobium film (4th layer)

Claims (10)

A capacitive touch panel disposed on a display panel and operated by touching an operation surface, comprising:
transparent substrate,
Having a plurality of X electrodes formed in the X direction on the back side of the operation surface of the transparent substrate and a plurality of Y electrodes formed in a Y direction orthogonal to the X direction,
The plurality of X electrodes and the plurality of Y electrodes are
A plurality of transparent electrodes formed on the same side of the back side,
and a jumper wire that three-dimensionally connects either the transparent electrode of the X electrode or the transparent electrode of the adjacent Y electrode adjacent to the intersection where the X electrode and the Y electrode cross each other through an insulating part,
The jumper wire has a first layer connected to the transparent electrode and a second layer laminated on the first layer,
The first layer consists of a first metal oxide film, the second layer consists of a second metal oxide film,
A touch panel, characterized in that the refractive index of the first layer is lower than the refractive index of the second layer. The touch panel according to claim 1, wherein the oxygen content of the first layer is higher than that of the second layer. The touch panel according to claim 1 or 2, wherein the resistivity of the first layer is higher than that of the second layer. The touch panel according to claim 1 or 2, wherein the first layer and the second layer are oxides of the same type of metal. The touch panel according to claim 4, wherein the first layer and the second layer are molybdenum alloy oxide containing niobium (Nb) in an amount of 1 atm% to 15 atm%. 3. The method according to claim 1 or 2,
When the complex refractive indices of the first and second metal oxide films are defined as m = n-ik (n is refractive index, k is extinction coefficient),
In the first metal oxide film constituting the first layer,
2.0 ≤ n1 ≤ 2.2
0.015 ≤ k1 ≤ 0.1,
In the second metal oxide film constituting the second layer,
2.5 ≤ n2 ≤ 3.8
0.3 ≤ k2 ≤ 3.0
, wherein n1 and k1 are the refractive index and extinction coefficient of the first metal oxide film, respectively, and n2 and k2 are the refractive index and extinction coefficient of the second metal oxide film, respectively. The touch panel according to claim 1 or 2, wherein the jumper wire has a third layer made of a third metal film laminated on the second layer. The touch panel according to claim 7, wherein the third layer is made of aluminum or an aluminum alloy. The touch panel according to claim 7, wherein the jumper wire has a fourth layer formed of a fourth metal film laminated on the third layer. The touch panel according to claim 9, wherein the fourth layer is made of molybdenum or a molybdenum alloy.

Images