KR102302620B1 - Vacuum exhaust device for vacuum carburizing furnace - Google Patents

Abstract

The present invention relates to a vacuum carburizing heat treatment device. An objective of the present invention is to provide a vacuum exhaust device for a vacuum carburizing furnace which can prevent shooting or tar from being attached to and deposited on a mechanical booster pump in a vacuum exhaust device. The vacuum exhaust device for a vacuum carburizing furnace comprises: a vacuum carburizing furnace body allowing an object to be heat-treated to be inserted thereinto, and having a pressure sensor measuring vacuum pressure; a nitrogen gas supply unit communicating with the inside of the vacuum carburizing furnace body and supplying nitrogen; a carburizing gas supply unit supplying carburizing gas to the vacuum carburizing furnace body; a mechanical booster pump connected to the vacuum carburizing furnace body by a main exhaust pipe to discharge gas in the vacuum carburizing furnace body; and an oil rotary pump connected to an outlet side of the mechanical booster pump. The vacuum exhaust device for a vacuum carburizing furnace further comprises a cleaning unit consisting of a cleaning pipe connected to an inlet side of the mechanical booster pump, a cleaning valve mounted on the cleaning pipe, a shower head connected to the cleaning pipe and mounted to communicate with the main exhaust pipe, and a cleaning solution storage tank connected to an outlet side of the mechanical booster pump to store a cleaning solution.

Description

Vacuum exhaust device for vacuum carburizing furnace

The present invention relates to a vacuum carburizing heat treatment device, and to a vacuum exhaust device for a vacuum carburizing furnace for removing vacuum pump contamination generated during carburizing treatment.

In general, in a vacuum carburizing furnace for vacuum carburizing steel materials or the like, a vacuum exhaust device equipped with a vacuum pump for exhausting atmospheric gas such as air or carburizing gas in a carburizing furnace (reaction chamber) is used.

And in the vacuum carburizing furnace, since shooting (sooting) and tar may be generated in the carburizing furnace depending on the type and supply amount of the carburizing gas, it is necessary to prevent the shooting and the tar from being sucked into the vacuum pump together with the atmospheric gas. To this end, methods such as installing a filter on the suction side of the vacuum pump or installing a cup-shaped recovery vessel and a gas cooler in the piping from the carburizing furnace to the vacuum pump are being applied.

When an oil rotary pump (rotary pump) is used as a vacuum pump for vacuum exhaust, even a small amount of shooting or tar that has not been recovered by the filter or the like enters the vacuum pump, but it cannot be a major obstacle.

However, if a mechanical booster pump is installed on the front end of the oil rotary pump to increase the vacuum exhaust ability, unrecovered shooting or tar will accumulate in the mechanical booster pump. As a result, there is a problem that causes abrasion of the pump or an accident of non-rotation.

However, in the above patent document, the oil of the oil rotary pump is raised and sprayed to the mechanical booster pump to solve the problem, which has a problem in that shooting or tar is accumulated inside the oil rotary pump without being discharged to the outside.

Japanese Patent Application Laid-Open No. 2007-177312

The present invention has been devised to solve the problems of the prior art, and in a vacuum exhaust device in which a mechanical booster pump is installed on the front end of an oil rotary pump, a cleaning solution to prevent shooting or tar from attaching and depositing to the mechanical booster pump An object of the present invention is to provide a vacuum evacuation device for a vacuum carburizing furnace having a structure for spraying.

The object of the present invention described above, the object to be heat treated is charged, the vacuum carburizing furnace body in which a pressure sensor for measuring the vacuum pressure is formed; a nitrogen gas supply unit passing through the vacuum carburizing furnace body and supplying nitrogen; a carburizing gas supply unit for supplying carburizing gas to the vacuum carburizing furnace body; a mechanical booster pump connected to the vacuum carburizing furnace body through a main exhaust pipe to discharge gas in the body; and an oil rotary pump connected to the outlet side of the mechanical booster pump, a washing pipe connected to the inlet side of the mechanical booster pump, a washing valve mounted to the washing pipe, and a main exhaust pipe connected to the washing pipe. and a cleaning unit comprising a shower head mounted to communicate with the mechanical booster pump and a cleaning liquid storage tank connected to the outlet side of the mechanical booster pump to store the cleaning liquid; a cleaning liquid storage tank for collecting and storing the deposit mixed in the gas in the cleaning liquid by sucking the cleaning liquid from the cleaning liquid storage tank together with the suction of the gas and spraying it through the showerhead; It can be achieved by the vacuum exhaust device of the vacuum carburizing furnace, characterized in that it is installed on the side of the main exhaust pipe to include a nitrogen gas supply for drying the residual cleaning liquid.

It includes a nitrogen gas supply unit for drying the inside of the pump after cleaning.

According to an embodiment, a main exhaust pipe connected to the vacuum carburizing furnace body and equipped with a main exhaust valve; an auxiliary exhaust pipe communicating with the vacuum carburizing furnace body, connected to the main exhaust pipe, and equipped with an auxiliary exhaust valve; A pump pipe connected at right angles to the side of the main exhaust pipe connected in a vertical direction to the outlet side of the mechanical booster pump, and an oil rotation pump disposed below the mechanical booster pump so as to be connected to the pump pipe to generate suction force; It is characterized in that it comprises a discharge pipe for discharging gas to the outside connected to the discharge side of the oil rotary pump.

It is characterized in that the pump pipe is bent upward so that the liquid passing through the main exhaust pipe does not flow back into the pump pipe.

It characterized in that it comprises a drain pipe connected to the end of the main exhaust pipe and connected to the cleaning liquid storage tank, and a drain valve mounted on the drain pipe.

On the other hand, according to one embodiment, the angle sensor formed inside the case mounted on the pump pipe, the angle sensor is connected to the angle sensor and adjusting means for adjusting the inclination angle of the pump pipe; characterized in that it further comprises.

According to one embodiment, the adjustment means, the shaft bracket disposed inside the case; a shaft shaft connected to the shaft bracket, a protruding spherical part is formed on the central side, a curvature is formed inside the spherical part, and an open shaft housing is formed on at least a part of the surface;

a spherical shaft end bearing having one end connected to the hinge shaft and disposed on the shaft housing; a cam motor disposed inside the case;

a cam having a part connected to the cam motor and the gearbox, and a cam bearing housing having a curved cam bearing housing formed on an inner surface that is penetrated and opposite to the other part; and

It may include; disposed in the cam bearing housing, a circular ring-shaped inter-bearing through which the hinge shaft passes to the center side.

On the other hand, according to another embodiment, the angle sensor formed inside the case mounted on the pump pipe, and the angle sensor is connected to the adjustment means for controlling the inclination angle of the pump pipe; characterized in that it further comprises.

The adjustment means, a center motor disposed inside the case; a shaft bracket connected to the rotation shaft of the center motor;

a shaft shaft connected to the shaft bracket, a protruding spherical part is formed on the central side, a curvature is formed inside the spherical part, and an open shaft housing is formed on at least a part of the surface;

a spherical shaft end bearing having one end connected to the hinge shaft and disposed on the shaft housing; a guide block formed with a guide hole for guiding the movement in a curved direction of the hinge shaft; and

and a guide bearing disposed in a bearing groove formed on the hinge shaft and moving along the guide hole.

According to the present invention, it is possible to prevent soot or tar from adhering and depositing by the cleaning process of the suction side of the mechanical booster pump, thereby preventing accidents and reducing operating costs.

1 is a block diagram showing a vacuum exhaust device of a vacuum carburizing furnace according to the present invention;
Figure 2 is an enlarged view showing the shower head in Figure 1,
3 is a process flow chart of a vacuum exhaust device of a vacuum carburizing furnace according to the present invention;
4 is a view showing a first embodiment of the 'adjustment means' in the vacuum exhaust device of the vacuum carburizing furnace according to the invention;
5 is a view showing a second embodiment of the 'adjustment means' in the vacuum exhaust device of the vacuum carburizing furnace according to the present invention.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. However, since various changes may be made to the embodiments, the scope of the patent application is not limited or limited by these embodiments. It should be understood that all modifications, equivalents and substitutes for the embodiments are included in the scope of the rights.

Specific structural or functional descriptions of the embodiments are disclosed for purposes of illustration only, and may be changed and implemented in various forms. Accordingly, the embodiments are not limited to a specific disclosure form, and the scope of the present specification includes changes, equivalents, or substitutes included in the technical spirit.

Although terms such as first or second may be used to describe various elements, these terms should be interpreted only for the purpose of distinguishing one element from another. For example, a first component may be termed a second component, and similarly, a second component may also be termed a first component.

When a component is referred to as being “connected to” another component, it may be directly connected or connected to the other component, but it should be understood that another component may exist in between.

The terms used in the examples are used for description purposes only, and should not be construed as limiting. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present specification, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, but one or more other features It should be understood that this does not preclude the existence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the embodiment belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

In addition, in the description with reference to the accompanying drawings, the same components are given the same reference numerals regardless of the reference numerals, and the overlapping description thereof will be omitted. In the description of the embodiment, if it is determined that a detailed description of a related known technology may unnecessarily obscure the gist of the embodiment, the detailed description thereof will be omitted.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be embodied in various different forms, only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

In the embodiments of the present invention, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. have meaning Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in an embodiment of the present invention, an ideal or excessively formal meaning is not interpreted as

The shapes, sizes, proportions, angles, numbers, etc. disclosed in the drawings for explaining the embodiments of the present invention are exemplary, and thus the present invention is not limited to the illustrated matters. In addition, in describing the present invention, if it is determined that a detailed description of a related known technology may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. When 'include', 'have', 'consist', etc. mentioned in this specification are used, other parts may be added unless 'only' is used. When a component is expressed in the singular, the case in which the plural is included is included unless otherwise explicitly stated.

In interpreting the components, it is interpreted as including an error range even if there is no separate explicit description.

In the case of a description of the positional relationship, for example, when the positional relationship of two parts is described as 'on', 'on', 'on', 'beside', etc., 'right' Alternatively, one or more other parts may be positioned between the two parts unless 'directly' is used.

Reference to an element or layer “on” another element or layer includes any intervening layer or other element directly on or in the middle of another element. Like reference numerals refer to like elements throughout.

The size and thickness of each component shown in the drawings are illustrated for convenience of description, and the present invention is not necessarily limited to the size and thickness of the illustrated component.

Each feature of the various embodiments of the present invention may be partially or wholly combined or combined with each other, and technically various interlocking and driving are possible, as will be fully understood by those skilled in the art, and each embodiment may be independently implemented with respect to each other, It may be possible to implement together in a related relationship.

Among the accompanying drawings, FIG. 1 is a block diagram showing a vacuum exhaust device of a vacuum carburizing furnace according to the present invention, FIG. 2 is an enlarged view showing the shower head in FIG. 1, and FIG. 3 is a vacuum of a vacuum carburizing furnace according to the present invention. Process flow chart of the exhaust device, Figure 4 is a view showing the first embodiment of the 'adjustment means' in the vacuum exhaust device of the vacuum carburizing furnace according to the invention, Figure 5 is the 'adjustment' in the vacuum exhaust device of the vacuum carburizing furnace according to the invention It is a view showing a second embodiment of 'means'.

1 and 2, the vacuum exhaust device of the vacuum carburizing furnace according to the present invention,

a vacuum carburizing furnace body (2) in which the object to be heat treated (M) is charged, and a pressure sensor (21) for measuring vacuum pressure is formed;

a nitrogen gas supply unit 22 for supplying nitrogen through the inside of the vacuum carburizing furnace body 2;

a carburizing gas supply unit 24 for supplying a carburizing gas (eg, acetylene) to the vacuum carburizing furnace body 2 ;

a mechanical booster pump (3) connected to the vacuum carburizing furnace body (2) by a main exhaust pipe passage (L1) to discharge gas in the vacuum carburizing furnace body (2);

and an oil rotary pump (5) connected to the outlet side of the mechanical booster pump (3).

In addition, the cleaning pipe line 71 connected to the inlet side of the mechanical booster pump 3, the cleaning valve 712 mounted on the cleaning pipe line 71, and the cleaning pipe line 71 are connected to the main exhaust pipe Includes a shower head 714 mounted to pass through the furnace L1, and a cleaning liquid storage tank 72 connected to the outlet side of the mechanical booster pump 3 to store the cleaning liquid. do.

The showerhead 714 is inserted into the main exhaust pipe path L1, is vertically coupled to the main exhaust pipe path L1, and is bent downward after being inserted into the main exhaust pipe path L1 in the direction in which the gas flows. Spray the cleaning solution towards

When the cleaning liquid is sprayed, the soot or tar particles accumulated or attached inside the mechanical booster pump 3 are separated and removed.

As shown in FIG. 2 , the showerhead 714 may be a single tube end or an expanded tube 714 ′.

Therefore, the gas is sucked in the vacuum carburizing furnace body 2 by the mechanical booster pump 3 by the suction force of the oil rotary pump 5 and the cleaning liquid is sucked from the cleaning liquid storage tank 72, so that the shower head 714 ) can be stored as a cleaning liquid storage tank 72 so that the precipitate mixed in the gas is collected and stored in the cleaning liquid.
A drain 723 is formed in the lower portion of the cleaning liquid storage tank 72 to discharge the internal solution.

A view illustrating the operation of the mechanical booster pump 3 is shown in an enlarged view of the lower side of FIG. 1 .

On the other hand, the main exhaust pipe (L1) connected to the vacuum carburizing furnace body (2) and connected to the mechanical booster pump (3) for sucking the gas in the vacuum carburizing furnace body (2) is mounted.

In addition, an auxiliary exhaust pipe path (L2) connected to the vacuum carburizing furnace body (2) while passing through the main exhaust pipe path (L1) is provided.

The main exhaust valve (L12) is equipped with a main exhaust pipe (L1) to control the amount of gas transfer or to exhibit an on-off function.

The auxiliary exhaust pipe L2 is equipped with an auxiliary exhaust valve L22 and is exhausted for several minutes in the initial stage of vacuum exhaust, and then exhausted through the main valve and the pipe.

_{A nitrogen supply pipe (L3) for supplying nitrogen gas (N 2} gas) is connected to the main exhaust pipe path (L1), and a nitrogen supply valve (L33) is mounted to the nitrogen supply pipe path (L3).

Preferably, the inner end of the nitrogen supply pipe (L3) includes a nozzle (not shown), and is disposed above the cleaning pipe (71).

As shown in FIG. 1 , the main exhaust pipe path L1 and the auxiliary exhaust pipe path L2 are connected to the lower part of the vacuum carburizing furnace body 2 in parallel and in the vertical direction.

A pump pipe line (L4) is connected perpendicularly to the side of the main exhaust pipe path (L1') connected in a vertical direction to the outlet side of the mechanical booster pump (3).

The oil rotary pump 5 is connected to the pump pipe line L4, and the oil rotary pump 5 generates a suction force and is discharged from the outlet side of the mechanical booster pump 3 (a gas mixed with tar or soot) is sucked through the main exhaust pipe (L1').

And it may include a discharge pipe (L5) connected to the discharge side of the oil rotary pump (5) for discharging gas to the outside.

Preferably, as shown in the upper right enlarged view of FIG. 1 , the pump pipe L4 is connected to the side of the main exhaust pipe L1 ′ and is formed to have an upward inclination θ.

Therefore, the liquid in the main exhaust pipe path (L1') does not flow into the pump pipe path (L4) formed to have an upward inclination, and by preventing the washing liquid from flowing into the oil rotary pump (5), it is possible to protect the pump oil from contamination.

Alternatively, as shown in the lower right enlarged view of FIG. 1 , the pump pipe line L4 is horizontally connected to the side of the main exhaust pipe path L1 ′ and a shut-off valve V may be mounted thereon.

By the opening/closing operation of the shut-off valve (V), the discharge of gas can be turned on-off.

On the other hand, it includes a drain pipe (L6) connected to the distal end of the main exhaust pipe (L1') and connected to the cleaning solution storage tank (72), and a drain valve (L61) mounted on the drain pipe (L6). The cleaning liquid discharged from the distal end of the main exhaust passage L1 ′ through the drain pipe L6 may be recovered and stored in the cleaning liquid storage tank 72 .

A cleaning method using the vacuum exhaust device of the vacuum carburizing furnace according to the present invention configured as described above will be described as follows.

Step 1 (S1): Carburizing is completed, nitrogen purge, product loading, and charging. Thereafter, the auxiliary exhaust valve (L22) and the main exhaust valve (L12) are closed.

Step 2 (S2): The cleaning valve 712 is opened, and the cleaning liquid rises by the vacuum suction pressure. At this time, the cleaning valve 712 is opened.

Step 3 (S3): The cleaning liquid is sprayed on the suction side of the mechanical booster pump 3 by the shower head 714 by the suction force, so that foreign substances such as shooting or tar can be washed.

After that, the nitrogen supply valve (L33) is opened to supply nitrogen gas, and while drying the inside of the pump, the liquid moves downward to remove the remaining liquid (S3-1).

Step 4 (S4): The mixed solution and gas generated after washing are discharged through the main exhaust pipe (L1').

The cleaning valve 712 is closed, and the drain valve L61 is opened.

Step 5 (S5): The gas flows into the oil rotary pump 5 through the pump pipe line L4, and then is discharged to the atmosphere through the discharge pipe L5.

Step 6 (S6): The cleaning liquid discharged from the distal end of the main exhaust passage (L1') flows into the cleaning liquid storage tank 72 and is stored, and the sediment is settled.

Step 7 (S7): The drain 723 of the cleaning liquid storage tank 72 is opened to discharge the sediment.

Step 8 (S8): The auxiliary exhaust valve (L22) and the main exhaust valve (L12) are opened again, and steps 1 (S1) to (S7) are continuously repeated.

On the other hand, as shown in Figures 4 and 5, the angle sensor (S) formed inside the case (C) mounted on the pump pipe line (L4), and connected to the angle sensor (S) to adjust the inclination angle of the pump pipe line Adjustment means 500; may further include.

As shown in FIG. 4 , the adjustment means 500 according to an embodiment includes a shaft bracket 511 , a shaft shaft 512 , a shaft end bearing 515 , a cam motor 521 , a gear box 522 , and a cam 531 and may be configured to include an inter-bearing 533 .

The shaft bracket 511 may be disposed inside the case C, and both sides may be bent upward in order to couple the shaft shaft 512 .

Both ends of the shaft shaft 512 may be rotatably connected to the shaft bracket 511 . And a protruding spherical portion 513 may be formed on the central side of the shaft shaft 512, and a curvature is formed on the inner side of the spherical portion 513 and at least part of the shaft housing 514 is open. can be formed.

The shaft end bearing 515 is disposed in the shaft housing 514, one end of the shaft end bearing 515 is connected to the hinge shaft 300, and an angle sensor S is formed at the end of the hinge shaft.

The remaining part except for one end of the shaft end bearing 515 has a spherical shape corresponding to the inner surface curvature of the shaft housing 514, so that various movements in the inside of the shaft housing 514 may be possible up, down, left and right.

It can be seen that the shaft end bearing 515 is not separated from the inside of the shaft housing 514 and relatively free movement is possible. This can confirm that free movement of the hinge shaft 300 connected to the shaft end bearing 515 is possible.

The cam motor 521 may be disposed in the pump pipe L4. The cam motor 521 may be a step motor capable of precise angle adjustment, but is not limited thereto.

The cam 531 may have an elliptical shape. And a part of the cam 531 may be connected to the cam motor 521 and the gearbox 522, and the other part of the cam 531 is penetrated and the opposite inner surface of the cam bearing housing 532 has a curvature formed therein. can be formed.

The gearbox 522 includes a first gear 523 connected to the rotation shaft of the cam motor 521 , a first support bearing 525 supporting the first gear 523 , and a part of the cam 531 . The connected second gear 524 and the second support bearing 526 supporting the second gear 524 may be built-in.

The cam 531 may rotate according to the driving of the cam motor 521 while the first gear 523 and the second gear 524 are engaged with each other and rotate.

The inter-bearing 533 may be disposed in the cam bearing housing 532 and may have a circular ring shape through which the hinge shaft 300 passes at the center side. The outer circumferential surface of the inter-bearing 533 may have a curvature corresponding to the inner circumferential curvature of the cam bearing housing 532 .

Therefore, the angle sensor (S) detects the inclination of the pump pipe line (L4), and when an angle change of the hinge shaft 300 occurs, the manager may be notified.

On the other hand, as shown in Figure 5, according to another embodiment, on the other hand, the angle sensor (S') formed in the inside of the case (C) mounted on the pump pipe line (L4), and the angle sensor (S') is connected to the pump It further includes; an adjustment means (500') for controlling the posture of the conduit (L4).

The adjusting means 500 ′ according to another embodiment includes a center motor 540 , a shaft bracket 511 , a shaft shaft 512 , a shaft end bearing 515 , a guide block 552 , and a guide bearing 551 . is composed by

The center motor 540 may be disposed inside the pump pipe line L4, and the rotation shaft may be disposed upward. In an embodiment of the present invention, the center motor 540 may be a step motor.

The shaft bracket 511 may be connected to the rotation shaft of the center motor 540 , and both sides may be bent upward in order to couple the shaft shaft 512 .

Both ends of the shaft shaft 512 may be rotatably connected to the shaft bracket 511 .

And a spherical portion 513 of a protruding shape may be formed on the central side of the shaft shaft 512, and a curvature is formed on the inner side of the spherical portion 513 and at least a part of the shaft housing 514 is open. can be formed.

The shaft end bearing 515 may be disposed on the shaft housing 514 , and one end of the shaft end bearing 515 may be connected to the hinge shaft 300 . The rest of the shaft end bearing 515 except for one end has a spherical shape corresponding to the curvature of the inner surface of the shaft housing 514, so that various movements in the shaft housing 514 up, down, left and right may be possible. The shaft end bearing 515 according to the embodiment may be in the form of a spherical ball bearing.

The guide block 552 is formed on the inner circumferential surface of the case C, and a guide hole for guiding the movement in the curved direction of the hinge shaft 300 may be formed.

The guide bearing 551 may be disposed in a bearing groove formed in the hinge shaft 300 . In the hinge shaft 300 , the bearing groove may be machined along the circumference at a portion corresponding to the guide hole 553 , and the bearing groove is to prevent the guide bearing 551 from being separated. The guide bearing 551 may be configured so that the hinge shaft 300 can smoothly move in a curved direction along the guide hole 553 having an arcuate shape.

Therefore, the angle sensor (S') detects the inclination of the pump pipe line (L4), and when the angle change of the hinge shaft 300 occurs, the manager may be notified.

Although the embodiments of the present invention have been described in more detail with reference to the accompanying drawings, the present invention is not necessarily limited to these embodiments, and various modifications may be made within the scope without departing from the technical spirit of the present invention. . Therefore, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

2: body 3: mechanical booster pump
5: oil rotary pump 7: cleaning unit
71: cleaning pipe path 72: cleaning liquid storage tank
714: shower head L1: main exhaust pipe
L2: Auxiliary exhaust pipe L3: Nitrogen supply pipe
L4: pump pipe L5: discharge pipe
L6: drain pipe L61: drain valve

Claims (6)

a vacuum carburizing furnace body in which the object to be heat treated is charged, and a pressure sensor for measuring vacuum pressure is formed;
a nitrogen gas supply unit passing through the vacuum carburizing furnace body and supplying nitrogen;
a carburizing gas supply unit for supplying carburizing gas to the vacuum carburizing furnace body;
a mechanical booster pump connected to the vacuum carburizing furnace body through a main exhaust pipe to discharge gas in the body;
Including; oil rotary pump connected to the outlet side of the mechanical booster pump;
A washing pipe connected to the inlet side of the mechanical booster pump, a washing valve mounted to the washing pipe path, a showerhead connected to the washing pipe path and mounted to communicate with the main exhaust pipe, and an outlet side of the mechanical booster pump. and a cleaning unit comprising a cleaning liquid storage tank for storing the cleaning liquid.
Gas is sucked into the body by the mechanical booster pump by the suction power of the oil rotary pump, and the cleaning liquid is sucked from the cleaning liquid storage tank and sprayed through the shower head so that the sediment mixed with the gas is collected and stored in the cleaning liquid cleaning liquid storage tank;
a nitrogen gas supply unit installed on the side of the main exhaust pipe to dry the residual cleaning solution; and
a main exhaust pipe connected to the vacuum carburizing furnace body and equipped with a main exhaust valve;
an auxiliary exhaust pipe communicating with the vacuum carburizing furnace body, connected to the main exhaust pipe, and equipped with an auxiliary exhaust valve;
a pump pipe connected at right angles to the side of the main exhaust pipe connected in a vertical direction to the outlet side of the mechanical booster pump;
an oil rotation pump disposed below the mechanical booster pump so as to be connected to the pump pipe to generate suction force;
A vacuum exhaust device for a vacuum carburizing furnace, comprising a discharge pipe connected to the discharge side of the oil rotary pump to discharge gas to the outside. delete The method of claim 1,
The pump pipe is connected to the side of the main exhaust pipe and is formed to have an upward slope so that the liquid passing through the main exhaust pipe does not flow back into the pump pipe;
Alternatively, the pump pipe is connected to the side of the main exhaust pipe and is a vacuum exhaust device for a vacuum carburizing furnace, characterized in that it is formed horizontally. The method of claim 1,
A drain pipe connected to the end of the main exhaust pipe and connected to the cleaning solution storage tank, and a drain valve mounted on the drain pipe,
The shower head is vertically coupled to the main exhaust pipe, and is bent downward after being inserted into the main exhaust pipe to spray the cleaning liquid in the direction in which the gas flows. The method of claim 1,
A nitrogen supply pipe for supplying nitrogen gas is connected to the main exhaust pipe, and a nitrogen supply valve is mounted on the nitrogen supply pipe,
A vacuum exhaust device for a vacuum carburizing furnace, comprising a nozzle at the inner end of the nitrogen supply pipe, and disposed above the cleaning pipe. The method of claim 1,
A vacuum evacuation apparatus for a vacuum carburizing furnace, comprising: an angle sensor formed inside a case mounted on the pump pipe; and an adjustment means connected to the angle sensor and adjusting an inclination angle of the pump pipe.

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