CN113265648B - Integral type powder vapor deposition spraying device - Google Patents
Integral type powder vapor deposition spraying device Download PDFInfo
- Publication number
- CN113265648B CN113265648B CN202110355186.2A CN202110355186A CN113265648B CN 113265648 B CN113265648 B CN 113265648B CN 202110355186 A CN202110355186 A CN 202110355186A CN 113265648 B CN113265648 B CN 113265648B
- Authority
- CN
- China
- Prior art keywords
- seat
- electric sliding
- electric
- cabin body
- sealed cabin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45568—Porous nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Abstract
The invention relates to the field of powder preparation by vapor deposition, in particular to an integrated powder vapor deposition spraying device. The technical problem of the invention is that: an integrated powder vapor deposition spray coating device is provided. The technical implementation scheme of the invention is as follows: an integrated powder vapor deposition spraying device comprises a second fixed clamping seat, a micro-diameter pore plate to be processed, an annular gas supply system, an outer-center spraying gas supply system, an outer-pore cleaning system, a waste gas outlet pipe and the like; the upper part of the sealing cabin body is connected with the sealing top cover through bolts. The invention realizes the effects of conveying two reaction raw material gases to the inside of the through hole, enabling one gas to pass through the air curtain formed by the other gas, reacting in the process of passing through the air curtain to generate solid particles, directly spraying the solid particles on the surface to be treated, and controlling the flow of the gas to replace the existing control solid for surface treatment, thereby greatly reducing the complexity of the device and being simpler and more reliable.
Description
Technical Field
The invention relates to the field of powder preparation by vapor deposition, in particular to an integrated powder vapor deposition spraying device.
Background
Chemical Vapor Deposition (CVD), which refers to a process in which chemical gases or vapors react to synthesize coatings or nanomaterials on the surface of a substrate, is the most widely used technique in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metallic materials and metal alloy materials. Theoretically, it is simple: two or more gaseous starting materials are introduced into a reaction chamber and then chemically react with each other to form a new material that is deposited on the wafer surface. A good example is the deposition of a silicon nitride film (Si3N4) which is formed by the reaction of silane and nitrogen.
At present, when the plate surface coating treatment is carried out by adopting ultrafine powder particle spraying in the prior art, because the coated material is solid powder, the requirements on a conveying structure and a spraying nozzle in the device are higher, when the area with a larger space range is treated, the device has larger volume, the influence caused by the defect is not obvious, but when the inner surface of a through hole with a small aperture is required to be treated, the influence caused by the defect is very obvious, the device has exquisite volume, the internal structure is more complex, the damage is extremely easy, and the treatment work of the tiny area is difficult to deal with. However, different gases are different from solid particles, and the transportation conditions and control difficulty of the gases are far lower than those of the solid particles, so that the gases are more suitable for processing micro areas, and related technologies are not shown in the prior art.
In view of the above problems, we propose an integrated powder vapor deposition spraying device.
Disclosure of Invention
In order to overcome the defects that when the plate surface coating treatment is carried out by adopting ultrafine powder particle spraying in the prior art, the coated material is solid powder, and has higher requirements on a conveying structure and a spraying nozzle in the device, the device has larger volume when the area with larger space range is treated, the influence caused by the defect is not obvious, but the influence caused by the defect when the inner surface of a through hole with small aperture is required to be treated is very obvious, the device has exquisite volume and more complex internal structure, and is extremely easy to damage, so the treatment work of the tiny area is difficult to deal with. However, different gases, compared with solid particles, the transportation conditions and control difficulty of the gases are far lower than those of the solid particles, so that the gases are more suitable for processing micro areas, the prior art does not have the defects shown by the related technologies, and the technical problems of the invention are as follows: an integrated powder vapor deposition spray coating device is provided.
The technical implementation scheme of the invention is as follows: an integrated powder vapor deposition spraying device comprises a sealed cabin body, a sealed top cover, an operation control screen, a first fixed clamping seat, a second fixed clamping seat, a micro-diameter pore plate to be treated, an annular air supply system, an outer central spraying air supply system, an outer pore cleaning system and a waste gas outlet pipe; the upper part of the sealed cabin body is connected with the sealed top cover through bolts; the sealed cabin body is connected with the operation control screen through bolts; the inner side of the sealed cabin body is welded with the first fixed clamping seat; the inner side of the sealed cabin body is welded with the second fixed clamping seat; the first fixed clamping seat is contacted with the micro-diameter pore plate to be processed; the second fixed clamping seat is contacted with the micro-diameter pore plate to be processed; the sealed cabin body is connected with the annular gas supply system; the sealed cabin body is connected with a central outer spraying and gas-sending system; the sealed cabin body is connected with the cleaning system outside the hole; the sealed cabin body is spliced with the exhaust gas outlet pipe.
Furthermore, the annular air supply system comprises a first electric sliding rail, a first electric sliding seat, a second electric sliding rail, a second electric sliding seat, a third electric sliding rail, a mounting plate, an annular air outlet pipe and a first air inlet pipe; the first electric slide rail is connected with the sealed cabin body through bolts; the first electric sliding seat is in sliding connection with the first electric sliding rail; the second electric slide rail is connected with the first electric slide seat through a bolt; the second electric sliding seat is in sliding connection with the second electric sliding rail; the third electric sliding seat is connected with the second electric sliding rail through a bolt; the third electric sliding rail is in sliding connection with the third electric sliding seat; the third electric slide rail is connected with the sealed cabin body through bolts; the mounting plate is connected with the second electric sliding seat through bolts; the annular air outlet pipe is inserted with the mounting plate; the first air inlet pipe is connected with the annular air outlet pipe in an inserting mode.
Furthermore, the central outer spraying and gas sending system comprises a fourth electric sliding rail, a fourth electric sliding seat, a fifth electric sliding rail, a fifth electric sliding seat, a sixth electric sliding rail, an electric push rod, a connecting seat plate, a second gas inlet pipe, a connecting pipe seat, a fixing ring, a ring-surface porous gas outlet cylinder, a hemispherical shell flow guide box and a flow guide pipe; the fourth electric slide rail is connected with the sealed cabin body through a bolt; the fourth electric sliding seat is in sliding connection with the fourth electric sliding rail; the fifth electric sliding rail is connected with the fourth electric sliding seat through a bolt; the fifth electric sliding seat is in sliding connection with the fifth electric sliding rail; the sixth electric sliding seat is in sliding connection with the fifth electric sliding rail; the sixth electric sliding rail is in sliding connection with the sixth electric sliding seat; the sixth electric slide rail is connected with the sealed cabin body through bolts; the electric push rod is fixedly connected with the fifth electric sliding seat; the connecting seat board is fixedly connected with the electric push rod; the second air inlet pipe is inserted into the connecting seat plate; the connecting pipe seat is inserted with the second air inlet pipe; the fixing ring is fixedly connected with the connecting pipe seat; the annular surface porous air outlet cylinder is connected with the fixed ring in a screwing way; the hemispherical shell flow guide box is fixedly connected with the connecting seat plate; the hemispherical shell flow guide box is sleeved with the connecting pipe seat; the diversion pipe is spliced with the hemispherical shell diversion box.
Further, the hole outside cleaning system comprises a protective shell power motor, a first rotating shaft rod, a first driving wheel, a second rotating shaft rod, a screw rod, a third rotating shaft rod, an internal thread sliding seat, a long strip mounting plate, a limiting sliding seat, a limiting sliding strip and a cleaning scraping strip; the power motor of the protective shell is connected with the sealed cabin body through bolts; the first rotating shaft rod is fixedly connected with an output shaft of a power motor of the protective shell; the axle center of the first driving wheel is fixedly connected with the first rotating shaft rod; the outer ring surface of the second driving wheel is in transmission connection with the first driving wheel through a belt; the outer surface of the second rotating shaft rod is fixedly connected with a second driving wheel; the second rotating shaft rod is rotationally connected with the sealed cabin body; the screw rod is fixedly connected with the second rotating shaft rod; the third rotating shaft rod is fixedly connected with the screw rod; the third rotating shaft rod is rotationally connected with the sealed cabin body; the inner side of the internal thread sliding seat is in transmission connection with the screw rod; mounting the strip plate and fixedly connecting the strip plate with the internal thread sliding seat; the limiting sliding seat is fixedly connected with the mounting strip plate; the limiting slide bar is connected with the limiting slide seat in a sliding manner; the lower part of the limiting slide bar is connected with the sealed cabin body through bolts; the cleaning scraping strip is fixedly connected with the long strip plate.
Furthermore, the first fixed clamping seat and the second fixed clamping seat are in a group, and two groups are arranged in total and are respectively positioned at the upper part and the lower part of the inner side surface of the sealed cabin body.
The invention has the following beneficial effects:
(1) when the plate surface coating treatment is carried out by adopting ultrafine powder spraying particles in the prior art, because the coated material is solid powder, the plate surface coating treatment device has higher requirements on a conveying structure and a spraying nozzle in the device, when the plate surface coating treatment device is used for treating a region with a larger space range, the device has larger volume, the influence caused by the defect is not obvious, but the influence caused by the defect when the inner surface of a through hole with a small aperture is required to be treated is very obvious, the device has exquisite volume, and the inner structure is more complex and is extremely easy to damage, so that the plate surface coating treatment device is difficult to deal with the treatment work of the micro region. However, different gases are different from solid particles, and the transportation conditions and the control difficulty of the gases are far lower than those of the solid particles, so that the gases are more suitable for processing micro areas, and the prior art does not have the problems shown by the related technologies.
(2) The annular gas supply system, the central outer spraying gas supply system and the outer hole cleaning system are designed, when the annular gas supply system is controlled to be matched with the central outer spraying gas supply system to carry out vapor deposition spraying on the inner surface of the round hole of the micro-diameter pore plate to be processed in sequence, and the outer hole cleaning system is controlled to remove powder, which is generated by reaction deposition of part of gas in the vapor deposition process and is generated on the outer surface of the edge of the round hole of the micro-diameter pore plate to be processed, from the outer surface of the round hole.
(3) After having realized building suitable reaction environment, to the inside two kinds of reaction raw material gas of carrying of through hole, then make one of them gas pass the air curtain that another kind of gas formed, the in-process of passing the air curtain reacts and directly sprays behind the formation solid particle and is treating the surface of handling, flow through control gas replaces current control solid to carry out surface treatment, the control degree of difficulty greatly reduced, the also greatly reduced of the complexity of device, simple and easy reliable effect more.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic perspective view of a portion of the present invention;
FIG. 3 is a schematic perspective view of the annular gas delivery system of the present invention;
FIG. 4 is a schematic perspective view of a portion of the annular gas delivery system of the present invention;
FIG. 5 is a schematic perspective view of the outer center jet air delivery system of the present invention;
FIG. 6 is a schematic perspective view of a first portion of the off-center gas injection system of the present invention;
FIG. 7 is a schematic perspective view of a second portion of the off-center gas injection system of the present invention;
fig. 8 is a schematic perspective view of the extraforaminal cleaning system of the present invention.
In the above drawings: 1. a sealed cabin body, 2, a sealed top cover, 3, an operation control screen, 4, a first fixed clamping seat, 5, a second fixed clamping seat, 6, a micro-diameter pore plate to be processed, 7, an annular air supply system, 8, a central outer spraying air supply system, 9, an outer pore cleaning system, 10, a waste gas outlet pipe, 701, a first electric slide rail, 702, a first electric slide seat, 703, a second electric slide rail, 704, a second electric slide seat, 705, a third electric slide seat, 706, a third electric slide seat, 707, a mounting plate, 708, an annular air outlet pipe, 709, a first air inlet pipe, 801, a fourth electric slide rail, 802, a fourth electric slide seat, 803, a fifth electric slide seat, 804, a fifth electric slide seat, 805, a sixth electric slide seat, 806, a sixth electric slide seat, 807, an electric push rod, 808, a connecting seat plate, 809, a second air inlet pipe, 8010, a connecting seat, 8011, a fixed ring, 8012 and a ring-shaped porous air outlet cylinder, 8013. the device comprises a hemispherical shell flow guide box, 8014, a flow guide pipe, 901, a protective shell power motor, 902, a first rotating shaft rod, 903, a first driving wheel, 904, a second driving wheel, 905, a second rotating shaft rod, 906, a screw rod, 907, a third rotating shaft rod, 908, an internal thread sliding seat, 909, a long strip mounting plate, 9010, a limiting sliding seat, 9011, a limiting sliding strip, 9012 and a cleaning scraping strip.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Example 1
An integrated powder vapor deposition spraying device is shown in figures 1-8 and comprises a sealed cabin body 1, a sealed top cover 2, an operation control screen 3, a first fixed clamping seat 4, a second fixed clamping seat 5, a micro-diameter pore plate 6 to be treated, an annular gas supply system 7, an outer-center spraying gas supply system 8, an outer-pore cleaning system 9 and an exhaust gas outlet pipe 10; the upper part of the sealed cabin body 1 is connected with the sealed top cover 2 through bolts; the sealed cabin body 1 is connected with the operation control screen 3 through bolts; the inner side of the sealed cabin body 1 is welded with the first fixed clamping seat 4; the inner side of the sealed cabin body 1 is welded with the second fixed clamping seat 5; the first fixed clamping seat 4 is contacted with a micro-diameter pore plate 6 to be processed; the second fixed clamping seat 5 is contacted with the micro-diameter pore plate 6 to be processed; the sealed cabin body 1 is connected with an annular air supply system 7; the sealed cabin body 1 is connected with a central outer spraying and gas-sending system 8; the sealed cabin body 1 is connected with an extraoral cleaning system 9; the sealed cabin body 1 is spliced with the exhaust gas outlet pipe 10.
The working steps are as follows: when the device is used, firstly, the device is stably fixed to a working plane, then a power supply is connected externally, the controllable device of the operation control screen 3 is manually opened to operate, the waste gas outlet pipe 10 is connected to an external waste gas collecting device, then the sealing top cover 2 is opened to insert and fix the micro-diameter pore plate 6 to be processed to the inner sides of the first fixing clamping seat 4 and the second fixing clamping seat 5, then required pipe fittings are assembled and connected to carry out gas transmission, the sealing top cover 2 is covered, then the annular gas supply system 7 is controlled to be matched with the central external spraying gas supply system 8 to carry out vapor deposition spraying on the inner surface of the circular hole of the micro-diameter pore plate 6 to be processed in sequence, the external cleaning system 9 is controlled to remove powder of reaction deposition of partial gas on the outer surface of the edge of the circular hole of the micro-diameter pore plate 6 to be processed in the vapor deposition process, and after a proper reaction environment is created, two kinds of reaction raw material gas are conveyed to the inside of the through hole, then one kind of gas passes through an air curtain formed by another kind of gas, the gas passes through the air curtain, the gas reacts to generate solid particles and then is directly sprayed on the surface to be processed, the existing control solid is replaced by the flowing of control gas for surface processing, the control difficulty is greatly reduced, the complexity of the device is greatly reduced, and the effect is simpler and more reliable.
In the present invention, the annular air supply system 7 includes a first electric slide rail 701, a first electric slide carriage 702, a second electric slide rail 703, a second electric slide carriage 704, a third electric slide carriage 705, a third electric slide rail 706, a mounting plate 707, an annular air outlet pipe 708, and a first air inlet pipe 709; the first electric slide rail 701 is connected with the sealed cabin 1 through bolts; the first electric slide carriage 702 is connected with the first electric slide rail 701 in a sliding manner; the second electric slide rail 703 is bolted to the first electric slide carriage 702; the second electric slide carriage 704 is connected with the second electric slide rail 703 in a sliding manner; the third electric slide 705 is connected with the second electric slide 703 by bolts; the third electric slide rail 706 is in sliding connection with the third electric slide carriage 705; the third electric slide rail 706 is connected with the sealed cabin 1 through bolts; the mounting plate 707 is bolted to the second electric carriage 704; the annular air outlet pipe 708 is inserted into the mounting plate 707; the first inlet pipe 709 is inserted into the annular outlet pipe 708.
Firstly, a small gas supply tank is placed in a sealed cabin body 1, the small gas supply tank is connected with a first gas inlet pipe 709 through a hose, a gas outlet valve of the small gas supply tank is opened, then first reaction gas is sprayed out from the first gas inlet pipe 709 and is sprayed out from the annular position of an annular gas outlet pipe 708 to form annular gas flow, then a second electric slide rail 703 can be controlled to drive a second electric slide carriage 704 to move horizontally, namely the second electric slide carriage 704 drives a mounting plate 707, the annular gas outlet pipe 708 and the first gas inlet pipe 709 to adjust the horizontal position, meanwhile, the first electric slide rail 701 and a third electric slide rail 706 can be controlled to respectively drive a first electric slide carriage 702 and a third electric slide carriage 705 to move up and down, further the first electric slide carriage 702 and the third electric slide carriage 705 drive the second electric slide rail 703 to adjust the vertical position, and the horizontal position of the annular gas outlet pipe 708 and the first gas inlet pipe 709 are adjusted, the circular holes of the micro-diameter pore plate 6 to be processed are processed in sequence, so that the annular air outlet pipe 708 is aligned with the circular holes of the micro-diameter pore plate 6 to be processed to spray annular air flow to match with the central outer spraying air supply system 8 for operation, and the annular air flow spraying of the first reaction gas is completed.
The central outer spraying gas-sending system 8 comprises a fourth electric sliding rail 801, a fourth electric sliding seat 802, a fifth electric sliding rail 803, a fifth electric sliding seat 804, a sixth electric sliding seat 805, a sixth electric sliding rail 806, an electric push rod 807, a connecting seat plate 808, a second gas inlet pipe 809, a connecting pipe seat 8010, a fixing ring 8011, a ring surface porous gas outlet cylinder 8012, a hemispherical shell flow guide box 8013 and a flow guide pipe 8014; the fourth electric slide rail 801 is connected with the sealed cabin 1 through bolts; the fourth electric sliding base 802 is connected with the fourth electric sliding rail 801 in a sliding manner; the fifth electric slide rail 803 is connected with the fourth electric slide carriage 802 by bolts; the fifth electric sliding base 804 is connected with the fifth electric sliding rail 803 in a sliding manner; the sixth electric sliding base 805 is connected with the fifth electric sliding rail 803 in a sliding manner; the sixth electric slide rail 806 is connected with the sixth electric slide 805 in a sliding manner; the sixth electric slide rail 806 is connected with the sealed cabin 1 by bolts; the electric push rod 807 is fixedly connected with the fifth electric slide seat 804; the connecting seat plate 808 is fixedly connected with the electric push rod 807; the second air inlet pipe 809 is spliced with the connecting seat plate 808; the connecting pipe seat 8010 is inserted in the second air inlet pipe 809; the fixing ring 8011 is fixedly connected with the connecting pipe seat 8010; the annular surface porous air outlet cylinder 8012 is in screwed connection with the fixed ring 8011; the hemispherical shell flow guide box 8013 is fixedly connected with the connecting seat plate 808; the hemispherical shell flow guide box 8013 is sleeved with the connecting pipe seat 8010; the draft tube 8014 is spliced with the hemispherical shell draft box 8013.
Firstly, another small-sized gas supply tank and a waste gas collecting chamber are placed in the sealed cabin 1, the small-sized gas supply tank is connected with the second gas inlet pipe 809 through a hose, the four flow guide pipes 8014 are connected with the waste gas collecting chamber through hoses, then the gas outlet valve of another small-sized gas supply tank is opened, and further a second reaction gas enters from the first gas inlet pipe 709, and then the second reaction gas is ejected from the micropores on the surface of the ring-surface porous gas outlet cylinder 8012 through the connecting pipe seat 8010, at this time, the diameter of the ring-surface porous gas outlet cylinder 8012 is smaller than the inner diameter of the ring-shaped gas flow ejected from the ring-shaped gas outlet pipe 708, and then the fifth electric slide rail 803 can be controlled to drive the fifth electric slide 804 to move, and simultaneously the fourth electric slide rail 801 and the sixth electric slide rail 806 can respectively drive the fourth electric slide carriage 802 and the sixth electric slide carriage 805 to move up and down, and further the fifth electric slide carriage 804 can drive the electric push rod 807, and the waste gas collecting chamber, The connecting seat plate 808, the second air inlet pipe 809, the connecting seat 8010, the fixing ring 8011, the annular surface porous air outlet cylinder 8012, the hemispherical shell flow guiding box 8013 and the flow guiding pipe 8014 are adjusted in position, so that the annular surface porous air outlet cylinder 8012 and the annular air outlet pipe 708 are aligned to the round hole of the same micro-diameter pore plate 6 to be processed from two sides, then the electric push rod 807 is controlled to push out, further the electric push rod 807 drives the connecting seat plate 808, the second air inlet pipe 809, the connecting seat 8010, the fixing ring 8011, the annular surface porous air outlet cylinder 8012, the hemispherical shell flow guiding box 8013 and the flow guiding pipe 8014 to move integrally, further the annular surface porous air outlet cylinder 8012 is driven to be inserted into the round hole of the micro-diameter pore plate 6 to be processed to spray second reaction gas to the inner surface of the round hole, meanwhile, annular gas flow sprayed out from the annular air outlet pipe 708 meets with gas sprayed out from the annular surface porous air outlet cylinder 8012, and ultrafine powder for spraying is formed after the reaction and deposited on the inner surface of the round hole of the micro-diameter pore plate 6 to be processed, the circular holes of the micro-diameter pore plate 6 to be processed are processed in sequence, then redundant airflow ejected by the annular air outlet pipe 708 enters the inner side of the hemispherical shell flow guide box 8013 and is discharged to the waste gas collecting chamber through the four flow guide pipes 8014, and vapor deposition of two reaction gases is completed.
The invention relates to an outside-hole cleaning system 9, which comprises a protective shell power motor 901, a first rotating shaft rod 902, a first driving wheel 903, a second driving wheel 904, a second rotating shaft rod 905, a screw rod 906, a third rotating shaft rod 907, an internal thread sliding seat 908, an installation strip 909, a limiting sliding seat 9010, a limiting sliding strip 9011 and a cleaning scraping strip 9012; the power motor 901 of the protective shell is connected with the sealed cabin 1 through bolts; the first rotating shaft rod 902 is fixedly connected with an output shaft of a power motor 901 of the protective shell; the axle center of the first transmission wheel 903 is fixedly connected with the first rotating shaft rod 902; the outer ring surface of the second transmission wheel 904 is in transmission connection with the first transmission wheel 903 through a belt; the outer surface of the second rotating shaft lever 905 is fixedly connected with the second driving wheel 904; the second rotating shaft lever 905 is rotatably connected with the sealed cabin 1; the screw 906 is fixedly connected with a second rotating shaft lever 905; the third rotating shaft rod 907 is fixedly connected with the screw rod 906; the third rotating shaft rod 907 is rotatably connected with the sealed cabin 1; the inner side of the internal thread sliding seat 908 is in transmission connection with the screw rod 906; the mounting strip plate 909 is fixedly connected with the internal thread sliding seat 908; the limiting slide seat 9010 is fixedly connected with the mounting strip plate 909; the limiting slide bar 9011 is in sliding connection with the limiting slide seat 9010; the lower part of the limiting slide bar 9011 is connected with the sealing cabin body 1 through bolts; the cleaning scraper 9012 is fixedly connected with the mounting strip 909.
After vapor deposition and spraying are finished on the inner surface of the round hole of the micro-diameter orifice plate 6 to be treated, the electric push rod 807 is controlled to contract, then the electric push rod 807 drives the annular surface porous air outlet cylinder 8012 to be drawn out from the inside of the round hole of the micro-diameter orifice plate 6 to be treated, then the power supply of the protective shell power motor 901 is controlled to be switched on, further the protective shell power motor 901 drives the first rotating shaft rod 902 and the first driving wheel 903 to rotate, the first driving wheel 903 drives the second driving wheel 904 to rotate, the second driving wheel 904 drives the second rotating shaft rod 905 to rotate, the second rotating shaft rod 905 drives the screw rod 906 to rotate, the screw rod 906 rotates to drive the internal thread seat 908 to move, then the internal thread sliding seat 908 drives the installation long strip 909, the limiting sliding seat 9010 and the cleaning scraper 9012 to synchronously move, the limiting sliding seat 9010 slides on the surface of the limiting sliding strip 9011, at the cleaning scraper 9012 is attached to the surface of the micro-diameter orifice plate 6 to be treated, which is close to the central external spraying and air delivery system 8, and part of gas in the vapor deposition process is removed from the powder which is subjected to reaction deposition on the outer side surface of the edge of the round hole of the micro-diameter pore plate 6 to be treated, and then the powder is scraped during the movement process of the cleaning scraping strip 9012, so that the surface of the micro-diameter pore plate 6 to be treated is cleaned.
In the invention, the first fixed clamping seat 4 and the second fixed clamping seat 5 are a group, and two groups are arranged in total and are respectively positioned at the upper part and the lower part of the inner side surface of the sealed cabin body 1.
So that the micro-aperture plate 6 to be processed is stably kept in a vertical state by fixing the four parts.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (2)
1. An integrated powder vapor deposition spraying device comprises a sealed cabin body (1), a sealed top cover (2) and an operation control screen (3), and is characterized by further comprising a first fixed clamping seat (4), a second fixed clamping seat (5), a micro-diameter pore plate to be treated (6), an annular air supply system (7), an outer central spraying air supply system (8), an outer pore cleaning system (9) and a waste gas outlet pipe (10); the upper part of the sealed cabin body (1) is connected with the sealed top cover (2) through bolts; the sealed cabin body (1) is connected with the operation control screen (3) through bolts; the inner side of the sealed cabin body (1) is welded with the first fixed clamping seat (4); the inner side of the sealed cabin body (1) is welded with the second fixed clamping seat (5); the first fixed clamping seat (4) is contacted with the micro-diameter pore plate (6) to be processed; the second fixed clamping seat (5) is contacted with the micro-diameter pore plate (6) to be processed; the sealed cabin body (1) is connected with an annular air supply system (7); the sealed cabin body (1) is connected with a central outer spraying and gas-sending system (8); the sealed cabin body (1) is connected with an extraoral cleaning system (9); the sealed cabin body (1) is spliced with the waste gas outlet pipe (10);
the annular air supply system (7) comprises a first electric sliding rail (701), a first electric sliding seat (702), a second electric sliding rail (703), a second electric sliding seat (704), a third electric sliding seat (705), a third electric sliding rail (706), a mounting plate (707), an annular air outlet pipe (708) and a first air inlet pipe (709); the first electric slide rail (701) is connected with the sealed cabin body (1) through bolts; the first electric sliding seat (702) is in sliding connection with the first electric sliding rail (701); the second electric slide rail (703) is connected with the first electric slide seat (702) through a bolt; the second electric sliding seat (704) is in sliding connection with the second electric sliding rail (703); the third electric sliding seat (705) is connected with the second electric sliding rail (703) through a bolt; the third electric sliding rail (706) is in sliding connection with the third electric sliding seat (705); the third electric sliding rail (706) is connected with the sealed cabin body (1) through bolts; the mounting plate (707) is in bolt connection with the second electric sliding seat (704); the annular air outlet pipe (708) is spliced with the mounting plate (707); the first air inlet pipe (709) is spliced with the annular air outlet pipe (708);
the central outer spraying gas delivery system (8) comprises a fourth electric sliding rail (801), a fourth electric sliding seat (802), a fifth electric sliding rail (803), a fifth electric sliding seat (804), a sixth electric sliding seat (805), a sixth electric sliding rail (806), an electric push rod (807), a connecting seat plate (808), a second gas inlet pipe (809), a connecting seat (8010), a fixing ring (8011), a ring-surface porous gas outlet cylinder (8012), a hemispherical shell flow guide box (8013) and a flow guide pipe (8014); the fourth electric sliding rail (801) is connected with the sealed cabin body (1) through bolts; the fourth electric sliding seat (802) is in sliding connection with the fourth electric sliding rail (801); the fifth electric sliding rail (803) is connected with the fourth electric sliding base (802) through a bolt; the fifth electric sliding seat (804) is in sliding connection with the fifth electric sliding rail (803); the sixth electric sliding seat (805) is in sliding connection with the fifth electric sliding rail (803); the sixth electric sliding rail (806) is in sliding connection with the sixth electric sliding seat (805); the sixth electric sliding rail (806) is connected with the sealing cabin body (1) through bolts; the electric push rod (807) is fixedly connected with the fifth electric sliding seat (804); the connecting seat board (808) is fixedly connected with the electric push rod (807); the second air inlet pipe (809) is spliced with the connecting seat plate (808); the connecting pipe seat (8010) is spliced with the second air inlet pipe (809); the fixing ring (8011) is fixedly connected with the connecting pipe seat (8010); the ring surface porous air outlet cylinder (8012) is connected with the fixed ring (8011) in a screwing way; the hemispherical shell flow guide box (8013) is fixedly connected with the connecting seat plate (808); the hemispherical shell flow guide box (8013) is sleeved with the connecting pipe seat (8010); the draft tube (8014) is spliced with the hemispherical shell draft box (8013);
the hole outside cleaning system (9) comprises a protective shell power motor (901), a first rotating shaft rod (902), a first transmission wheel (903), a second transmission wheel (904), a second rotating shaft rod (905), a screw rod (906), a third rotating shaft rod (907), an internal thread sliding seat (908), a long strip mounting plate (909), a limiting sliding seat (9010), a limiting sliding strip (9011) and a cleaning scraping strip (9012); the protective shell power motor (901) is connected with the sealed cabin body (1) through bolts; the first rotating shaft rod (902) is fixedly connected with an output shaft of a power motor (901) of the protective shell; the axle center of the first driving wheel (903) is fixedly connected with the first rotating shaft rod (902); the outer ring surface of the second transmission wheel (904) is in transmission connection with the first transmission wheel (903) through a belt; the outer surface of the second rotating shaft rod (905) is fixedly connected with a second driving wheel (904); the second rotating shaft rod (905) is rotationally connected with the sealed cabin body (1); the screw rod (906) is fixedly connected with a second rotating shaft rod (905); the third rotating shaft rod (907) is fixedly connected with the screw rod (906); the third rotating shaft rod (907) is rotationally connected with the sealed cabin body (1); the inner side of the internal thread sliding seat (908) is in transmission connection with the screw rod (906); the long strip plate (909) is fixedly connected with the internal thread sliding seat (908); the limiting sliding seat (9010) is fixedly connected with the mounting strip plate (909); the limiting slide bar (9011) is in sliding connection with the limiting slide seat (9010); the lower part of the limiting slide bar (9011) is connected with the sealed cabin body (1) through bolts; the cleaning scraping strip (9012) is fixedly connected with the mounting long strip plate (909).
2. An integral powder vapor deposition spray coating device as claimed in claim 1, wherein: the first fixed clamping seat (4) and the second fixed clamping seat (5) are a group, and two groups are arranged and are respectively positioned at the upper part and the lower part of the inner side surface of the sealed cabin body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110355186.2A CN113265648B (en) | 2021-04-01 | 2021-04-01 | Integral type powder vapor deposition spraying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110355186.2A CN113265648B (en) | 2021-04-01 | 2021-04-01 | Integral type powder vapor deposition spraying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113265648A CN113265648A (en) | 2021-08-17 |
| CN113265648B true CN113265648B (en) | 2022-09-16 |
Family
ID=77228447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110355186.2A Active CN113265648B (en) | 2021-04-01 | 2021-04-01 | Integral type powder vapor deposition spraying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113265648B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997014179A1 (en) * | 1995-10-13 | 1997-04-17 | Advanced Semiconductor Materials America, Inc. | Semiconductor processing system with gas curtain |
| US6022602A (en) * | 1994-01-26 | 2000-02-08 | Neomecs Incorporated | Plasma modification of lumen surface of tubing |
| CN1958170A (en) * | 2005-10-31 | 2007-05-09 | 东京毅力科创株式会社 | Gas supplying unit and substrate processing apparatus |
| KR20120051415A (en) * | 2010-11-12 | 2012-05-22 | 엘아이지에이디피 주식회사 | Chemical vapor deposition device |
| KR20120073782A (en) * | 2010-12-27 | 2012-07-05 | 국제엘렉트릭코리아 주식회사 | Cvd for the growth of gan-based led |
| KR20120079307A (en) * | 2011-01-04 | 2012-07-12 | 삼성엘이디 주식회사 | Chemical vapor deposition apparatus and method of forming semiconductor superlattice structure using the same |
| CN103436857A (en) * | 2013-08-08 | 2013-12-11 | 光垒光电科技（上海）有限公司 | Spray header and vapor deposition reaction chamber |
| CN103805964A (en) * | 2012-11-02 | 2014-05-21 | 财团法人工业技术研究院 | Gas spraying device capable of generating gas curtain and film deposition device thereof |
| CN109661714A (en) * | 2016-09-06 | 2019-04-19 | 周星工程股份有限公司 | Gas spraying equipment and substrate processing apparatus for substrate processing apparatus |
| CN212834020U (en) * | 2020-08-19 | 2021-03-30 | 无锡展硕科技有限公司 | Gas distributor structure of chemical vapor deposition equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6787194B2 (en) * | 2002-04-17 | 2004-09-07 | Science Applications International Corporation | Method and apparatus for pulsed detonation coating of internal surfaces of small diameter tubes and the like |
| JP4725543B2 (en) * | 2007-03-26 | 2011-07-13 | トヨタ自動車株式会社 | Thermal spray equipment |
| US9677176B2 (en) * | 2013-07-03 | 2017-06-13 | Novellus Systems, Inc. | Multi-plenum, dual-temperature showerhead |
-
2021
- 2021-04-01 CN CN202110355186.2A patent/CN113265648B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6022602A (en) * | 1994-01-26 | 2000-02-08 | Neomecs Incorporated | Plasma modification of lumen surface of tubing |
| WO1997014179A1 (en) * | 1995-10-13 | 1997-04-17 | Advanced Semiconductor Materials America, Inc. | Semiconductor processing system with gas curtain |
| CN1958170A (en) * | 2005-10-31 | 2007-05-09 | 东京毅力科创株式会社 | Gas supplying unit and substrate processing apparatus |
| KR20120051415A (en) * | 2010-11-12 | 2012-05-22 | 엘아이지에이디피 주식회사 | Chemical vapor deposition device |
| KR20120073782A (en) * | 2010-12-27 | 2012-07-05 | 국제엘렉트릭코리아 주식회사 | Cvd for the growth of gan-based led |
| KR20120079307A (en) * | 2011-01-04 | 2012-07-12 | 삼성엘이디 주식회사 | Chemical vapor deposition apparatus and method of forming semiconductor superlattice structure using the same |
| CN103805964A (en) * | 2012-11-02 | 2014-05-21 | 财团法人工业技术研究院 | Gas spraying device capable of generating gas curtain and film deposition device thereof |
| CN103436857A (en) * | 2013-08-08 | 2013-12-11 | 光垒光电科技（上海）有限公司 | Spray header and vapor deposition reaction chamber |
| CN109661714A (en) * | 2016-09-06 | 2019-04-19 | 周星工程股份有限公司 | Gas spraying equipment and substrate processing apparatus for substrate processing apparatus |
| CN212834020U (en) * | 2020-08-19 | 2021-03-30 | 无锡展硕科技有限公司 | Gas distributor structure of chemical vapor deposition equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113265648A (en) | 2021-08-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9039840B2 (en) | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | |
| US7913706B2 (en) | Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses | |
| JP3672321B2 (en) | Rotating and moving spray nozzle | |
| JP2008186864A (en) | Cleaning method of gate valve, and substrate treatment system | |
| US9887107B2 (en) | Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces | |
| CN113265648B (en) | Integral type powder vapor deposition spraying device | |
| CN112735989B (en) | High-cleanness wet process equipment suitable for acid supply system | |
| CN218655128U (en) | Air draft mechanism capable of preventing powder accumulation and coating spray room | |
| CN219052240U (en) | Cleaning device and cleaning equipment | |
| KR102302620B1 (en) | Vacuum exhaust device for vacuum carburizing furnace | |
| JPH06254453A (en) | Circular coating booth | |
| CN115739473A (en) | Air draft mechanism capable of preventing powder accumulation and coating spray room | |
| JP2002096006A (en) | Coating material mist scattering prevention type coating device | |
| JP2001129503A (en) | Method and apparatus for cleaning of piping and manufacturing method for semiconductor apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20220826 Address after: Room 516, Building 1, Innovation and Entrepreneurship Center, No. 31, Dongfeng Road, Heping Street, Xiangtan Economic and Technological Development Zone, Xiangtan City, Hunan Province 411100 Applicant after: Hunan Zhuorong metal material technology Co.,Ltd. Address before: 044000 No. 102, building 2, zone B, Guangxia market, Yuncheng City, Shanxi Province Applicant before: Qiu Haichu |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |