KR102294402B1 - Aligner for multi-prober system and multi-prober system having the same - Google Patents

Abstract

An aligner for a multi-probe system according to an embodiment of the present invention is an aligner for a multi-prover system for aligning and combining a chuck assembly on which a wafer is seated and a probe card assembly on which a probe is formed to inspect the wafer. , an alignment chuck for aligning the wafer and the probe, and a photographing unit positioned at one side of the alignment chuck to photograph the positions of the probe card assembly and the chuck assembly.

Description

An aligner for a multi-prober system and a multi-prober system having the same

The present invention relates to an aligner for a multi prober system and a multi prober system having the same.

In general, semiconductor devices such as integrated circuit devices may be formed by repeatedly performing a series of semiconductor processes on a semiconductor wafer. For example, a deposition process for forming a thin film on a wafer, an etching process for forming the thin film into patterns having electrical characteristics, an ion implantation process or diffusion process for implanting or diffusing impurities into the patterns, a wafer on which patterns are formed By repeatedly performing cleaning and rinsing processes to remove impurities from the semiconductor circuit devices, semiconductor circuit devices may be formed on the wafer.

After the semiconductor devices are formed through these series of processes, an inspection process for examining electrical characteristics of the semiconductor devices may be performed. The inspection process may be performed by a prober (Prober or Probe station) including a probe card having a plurality of probes and a tester connected to the probe card to provide an electrical signal.

For such wafer testing, the probe card and the wafer and the wafer chuck supporting the wafer are fastened to form a cartridge, and then multiple cartridges are loaded into the chamber to test multiple wafers at the same time. -Pober) system was used.

However, when the probe card and the chuck of the multi-probe system are approached to each other to configure the cartridge, if the test probe of the probe card and the wafer pad of the chuck do not match, the precision of the test may be lowered or the test may fail. In addition, there was a problem that the coupling of the probe card and the chuck may be incompletely made.

An embodiment of the present invention provides an aligner for a multi-probe system capable of improving test accuracy and stability by aligning a probe card assembly, a wafer, and a chuck assembly, contacting them at an accurate position, and locking them to form a cartridge We would like to provide a multiprover system that

An aligner for a multi-probe system according to an embodiment of the present invention is an aligner for a multi-probe system for aligning and combining a chuck assembly on which a wafer is seated and a probe card assembly in which a probe is formed to inspect the wafer, and an alignment chuck for aligning the wafer and the probe, and a photographing unit positioned at one side of the alignment chuck to photograph the positions of the probe card assembly and the chuck assembly.

In addition, the photographing unit may include a first photographing unit and a second photographing unit, the first photographing unit may be formed to detect the position of the probe, and the second photographing unit may be formed to detect the position of the chuck assembly.

Also, the second photographing unit may be disposed to be spaced apart from the aligner.

In addition, the first positioning part and the alignment chuck formed on one surface of the chuck assembly are disposed to coincide with the position of the first positioning part on one surface, and a first position corresponding to the first positioning part is formed to correspond to the first positioning part may include wealth.

In addition, the first positioning part may be formed in a pin shape protruding from one surface of the chuck assembly, and the first positioning part may be formed in a hole or groove shape to correspond to the pin.

In addition, the alignment chuck is located inside the rim portion is formed to be rotatable based on the alignment chuck, the rim portion is located below the rim portion, coupled to the align chuck and the rim portion may include a locking portion for rotating the rim portion. have.

In addition, the second positioning part formed on one surface of the edge part and the second positioning part are disposed to coincide with the position of the second positioning part on one surface of the chuck assembly, and a second positioning part is formed to correspond to the second positioning part. can

In addition, the second positioning part may be formed in a pin shape protruding from one surface of the edge part, and the second positioning part may be formed in a hole or groove shape to correspond to the pin.

In addition, a connector formed in a central portion of the align chuck to receive an electrical signal from the chuck assembly may be included.

In addition, the align chuck may have a hollow hole formed in the center, and a hollow portion formed in the center of the locking part, and the hollow hole and the hollow portion may be located on a concentric axis such that an electrical wiring connected to the connector is coupled.

In addition, the locking unit may include: an inner body connected to the align chuck; An outer body coupled to the edge portion and formed to be rotatable at the same time as the edge portion and the inner body are coupled to an inner ring and the outer body is coupled to the outer ring to rotate the inner body and the outer body. can

In addition, it may include a locking driving unit coupled to the outer surface of the outer body to rotate the outer body.

In addition, the locking driving unit may include a locking belt formed to surround the outer circumferential surface of the outer body to rotate the outer body and a locking motor providing a driving force for driving the locking belt.

In addition, the outer body may have a locking groove formed along the outer surface so that the locking belt is inserted into the outer surface.

In addition, the locking driving unit may further include a locking detection member for detecting the rotation angle of the external body.

In addition, a scale tape may be formed on the outer peripheral surface of the outer body so that the locking detection member can calculate the rotation angle of the outer body.

According to another aspect of the present invention a probe card assembly in which a probe for inspecting a wafer is formed; There is provided a multi-probe system including a chuck assembly for supporting the wafer, and the above-described aligner for coupling the probe card assembly and the chuck assembly after aligning the probe card assembly and the chuck assembly.

An aligner for a multi-probe system and a multi-prover system having the same according to an embodiment of the present invention can improve test accuracy and stability by aligning a probe card assembly, a wafer, and a chuck assembly and contacting them at an accurate position. have.

An aligner for a multi-probe system and a multi-probe system including the same according to an embodiment of the present invention can form a multi-probe cartridge with complete locking by aligning and fastening a probe card assembly and a chuck assembly. , the test accuracy and stability of the wafer can be improved.

1 is a perspective view of a multi-probe system according to an embodiment of the present invention.
2 is a perspective view illustrating another side of a multi-probe system according to an embodiment of the present invention.
3 is a perspective view of an aligner for a multi-probe system according to an embodiment of the present invention.
4 is a perspective view illustrating another side of the aligner for a multi-probe system according to an embodiment of the present invention;
FIG. 5 is a cross-sectional view AA′ of the aligner for the multiprover system shown in FIG. 4 .
FIG. 6 is a BB′ cross-sectional view of the aligner for the multiprover system shown in FIG. 4 .
7 is a front view of the aligner for the multi-probe system shown in FIG. 3 .
FIG. 8 is a right side view of the aligner for the multiprover system shown in FIG. 3 .
FIG. 9 is a rear view of the aligner for the multiprover system shown in FIG. 3 .
FIG. 10 is a left side view of the aligner for the multiprover system shown in FIG. 3 .

Hereinafter, with reference to the accompanying drawings, the embodiments of the present invention will be described in detail so that those of ordinary skill in the art to which the present invention pertains can easily implement them. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and the same reference numerals are assigned to the same or similar components throughout the specification.

In the present specification, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, but one or more other features It is to be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof. Further, when a part of a layer, film, region, plate, etc. is said to be “on” another part, this includes not only the case where the other part is “directly on” but also the case where there is another part in between. Conversely, when a part of a layer, film, region, plate, etc. is said to be “under” another part, this includes not only cases where it is “directly under” another part, but also a case where another part is in between.

1 is a perspective view of a multi-probe system according to an embodiment of the present invention. 2 is a perspective view illustrating another side of a multi-probe system according to an embodiment of the present invention.

The multi-probe system 1 is for testing a wafer by forming a multi-probe cartridge by aligning and bonding a probe card assembly (not shown) and a chuck assembly 10 through an aligner 100 .

In the probe card assembly, a probe may be formed to inspect the wafer and the same, and the chuck assembly 10 may be formed so that the probe card assembly and the wafer may be seated therein. An upper locking clasp (not shown) may be fixed to a lower portion of the probe card assembly, and a lower locking clasp (not shown) may be rotatably installed to an upper portion of the chuck assembly 10 .

A specific alignment mark may be formed on the chuck assembly 10 so that the aligner 100 for the multiprover system may align the chuck assembly 10 . For example, a positioning pin 12 and an insertion groove 13 may be formed at a lower portion of the chuck assembly 10 . In this case, the positioning pin 12 may be a first positioning part, and the insertion groove 13 may be a second positioning part.

The positioning pin 12 is formed to correspond to the alignment hole 122 of the aligner 100 , so that the alignment hole 122 and the positioning pin 122 may be aligned by driving the aligner 100 . . In this case, the alignment hole 122 may be a first position-corresponding part formed to correspond to the first positioning part.

The insertion groove 13 is formed on the lower side of the lower locking latch and is formed to correspond to the alignment member 139 of the aligner 100 , and the alignment member 139 and the insertion groove 130 are driven by the aligner 100 . ) can be sorted. In addition, the lower locking latch may be rotated when the aligner 100 is rotationally driven while the alignment member 139 is inserted into the insertion groove 130 . In addition, the alignment hole 122 and the insertion groove 13 may be formed in a groove or a hole shape, respectively.

At this time, as the lower locking clasp rotates, the lower locking clasp may be engaged with or separated from the upper locking clasp, and through this, the probe card assembly and the chuck assembly 10 may be locked or unlocked.

That is, in order to form such a multi-prover cartridge, the aligner 100 for a multi-probe system aligns the positions of the probe card assembly, the wafer, and the chuck assembly 10 so that they can be in contact with each other at the correct positions. and locking or unlocking each component by rotational driving to form or separate the multi prober cartridge.

3 is a perspective view of an aligner for a multi-probe system according to an embodiment of the present invention. 4 is a perspective view illustrating another side of an aligner for a multi-probe system according to an embodiment of the present invention. FIG. 5 is a cross-sectional view taken along line A-A' of the aligner for the multiprover system shown in FIG. 4 . FIG. 6 is a cross-sectional view taken along line B-B' of the aligner for the multi-prover system shown in FIG. 4 .

As shown in FIG. 3 , in the alignment chuck 120 , the locking motor 142 side is defined forward, and the alignment chuck 120 side is defined and described as the rear side in the locking motor 142, and the transfer motor In (171), the alignment chuck 120 side is defined upward, and the transfer motor 171 side is defined downward in the alignment chuck 120, and the locking detection member 148 is the alignment chuck 120. The left side is defined, and the locking detection member 148 side in the alignment chuck 120 is defined as the right side.

3 to 6 , the aligner 100 according to an embodiment of the present invention includes a frame part 110 , an align chuck 120 , a locking part 130 , a rotating part 150 , and a support part 180 . , a locking drive unit 140 , a rotation drive unit 160 , and a vertical transfer unit 170 may be included.

The frame unit 110 may include a first frame 112 and a second frame 114 to form an exterior of the aligner 100 . The first frame 112 may be coupled to both side surfaces of the second frame 114 in a plate shape to constitute both side surfaces of the aligner 100 . The second frame may constitute the bottom, front, and rear surfaces of the aligner 100 with a rectangular cross-section.

That is, the frame part 110 is formed in the form of a hollow rectangular frame by the first frame 112 and the second frame 114 , and inside the frame part 110 , an alignment chuck 120 and a locking part (to be described later) ( 130 ), the rotating unit 150 , the supporting unit 180 , the locking driving unit 140 , the rotating driving unit 160 , and the vertical transfer unit 170 may be installed.

The align chuck 120 may be positioned below the chuck assembly 10 to support the chuck assembly 10 . The align chuck 120 is formed in a cylindrical shape, and the chuck assembly 10 may contact an upper surface thereof. As shown in FIG. 3 , an alignment hole 122 into which a positioning pin 12 protruding below the chuck assembly 10 is inserted may be formed on the upper surface of the alignment chuck 120 . The alignment holes 122 may be formed to correspond to the number of positioning pins 12 .

A connector 124 may be formed in the center of the upper surface of the align chuck 120 . The connector 124 is formed to receive an electrical signal from the chuck assembly, and in detail, an external controller (not shown) transmits an electrical signal to the chuck assembly 10 or externally transmits an electrical signal received from the chuck assembly 10 . can be sent to the controller.

In this case, a hollow hole 120a may be formed below the connector 124 . That is, a hollow hole 120a may be formed in the center of the align chuck 120 . In this case, the upper side of the hollow hole 120a may be closed and the lower side may be open. Signal wires, vacuum hoses, and power wires are inserted through the hollow hole 120a to be connected to the connector 124 .

The locking unit 130 is disposed below the alignment chuck 120 , and includes a first inner body 132 , a first rotating bearing 134 and a first outer body 136 , an edge portion 138 , and an alignment member. (139).

5 and 6 , the first inner body 132 has a plate shape having a ring-shaped cross section, and a first hollow portion 132a may be formed in the center. The first outer body 136 may be formed in a plate shape having a ring-shaped cross-section to surround the outer circumferential surface of the first inner body 132 . At this time, the first inner body 132 may be fixed to the inner ring of the first rotating bearing 134 , and the first outer body 136 may be rotatably coupled to the outer ring of the first rotating bearing 134 .

That is, the first rotational bearing 134 is positioned between the first outer body 136 and the first inner body 132 so that the first outer body 136 rotates around the first inner body 132 . It can be formed so that

The edge portion 138 may have a plate shape having a ring-shaped cross-section, and may be disposed to correspond to the edge of the upper surface of the first outer body 136 . The edge portion 138 may be formed to have a predetermined thickness so as to have a step difference from the upper surface of the first outer body 136 . For example, the thickness of the edge portion 138 may be formed to correspond to the thickness of the align chuck 120 . In this case, the align chuck 120 may be disposed inside the edge portion 138 , and at the same time may be disposed on the first outer body 136 and the first inner body 132 .

The alignment member 139 may be formed on the edge portion 138 and may have a rod shape protruding upward. The alignment member 139 is to be inserted into the insertion groove 13 at the lower end of the lower locking latch of the chuck assembly 10, and is aligned for aligning the alignment chuck 120 and the lower locking latch of the chuck assembly 10. It can serve as a marker. In this case, the alignment member 139 may be a second positioning unit formed to correspond to the second position corresponding unit.

The first inner body 132 is fixedly coupled to the align chuck 120 through a fastening member such as a bolt, and the first outer body 136 is connected to the first inner body 132 by driving the locking driving unit 140 to be described later. ) can be rotated about At this time, the positions of the alignment member 139 of the first outer body 136 and the insertion groove 13 of the chuck assembly 10 may be aligned according to the rotation of the first outer body 136 .

The rotating part 150 may include a second inner body 152 , a second rotating bearing 154 , and a second outer body 156 .

The second inner body 152 has a plate shape having a ring-shaped cross section, and a second hollow part 152a may be formed in the center, and the second outer body 156 is a plate shape having a ring-shaped cross section. It may be formed in a shape surrounding the outer peripheral surface of the (152).

At this time, the second inner body 152 may be fixed to the inner ring of the second rotary bearing 154 , and the second outer body 156 may be rotatably coupled to the outer ring of the second rotary bearing 154 .

That is, the second rotational bearing 154 is positioned between the second outer body 156 and the second inner body 152 so that the second outer body 156 rotates around the second inner body 152 . It can be formed so that

Meanwhile, referring to FIG. 6 , the second inner body 152 is fixedly coupled to the support unit 180 and the second conversion unit 164 , and the second outer body 156 is the first inner body of the locking unit 130 . It may be fixedly coupled to (132). In this case, the second conversion unit 164 may be located below the support unit 180 .

At this time, the second external body 156 is rotated by the driving of the rotation driving unit 160 , the first internal body 132 connected to the second external body 156 is rotated, and the first internal body 132 and The connected align chuck 120 may be rotated.

That is, as the driving force of the rotation driving unit 160 is transmitted to the second outer body 156, the first inner body 132, and the align chuck 120, the rotation of each component may occur simultaneously, and accordingly, the align chuck ( By matching the positions of the alignment holes 122 of the 120 and the positioning pins 12 of the chuck assembly 10 , the positions of the alignment chuck 120 with respect to the chuck assembly 10 may be aligned.

5 and 6 , the support unit 180 has a plate shape having a ring-shaped cross section, and a third hollow portion 180a may be formed in the center. The support unit 180 may be installed below the rotating unit 150 , and may be fixedly coupled to the second inner body 152 of the rotating unit 150 .

The support unit 180 may be made of a metal material having a predetermined thickness to support the alignment chuck 120 , the locking unit 130 , and the lower portion of the rotating unit 150 .

At this time, the support unit 180 may be transferred upward or downward by the driving of the vertical transfer unit 170 , and accordingly, the align chuck 120 , the locking unit 130 and the rotating unit ( 130 ) supported by the support unit 180 . 150) may be simultaneously transferred upward or downward.

On the other hand, the hollow hole 120a of the align chuck 120 , the first hollow part 132a of the locking part 130 , the second hollow part 152a of the rotating part 150 , and the third hollow part of the support part 180 . (180a) may be formed of a circular hole disposed on the concentric axis. Accordingly, signal wiring, vacuum hose and power wiring may be inserted through the hollow hole 120a and the first to third hollow portions 132a, 152a, and 180a to be connected to the connector 124 .

7 is a front view of the aligner for the multi-probe system shown in FIG. 3 . FIG. 8 is a right side view of the aligner for the multiprover system shown in FIG. 3 . FIG. 9 is a rear view of the aligner for the multiprover system shown in FIG. 3 . FIG. 10 is a left side view of the aligner for the multiprover system shown in FIG. 3 .

7 to 10, the first frame 112 and the second frame 114 of the aligner 100 for the multi-prover system shown in FIG. 3 are omitted.

3, 7 and 8 , the locking driving unit 140 rotates the locking unit 130 to provide power for driving the lower locking latch of the chuck assembly 10, and the locking motor 142 ), a locking belt 144 and a locking detection member 148 may be included.

The locking motor 142 may be installed on one side of the second frame 114 , and a locking belt 144 may be connected to a rotation shaft formed in the center.

The locking belt 144 may be connected to the rotation shaft of the locking motor 142 while being wound around the outer periphery of the locking unit 130 . For example, a locking groove 136a into which the locking belt 144 can be inserted may be formed on the outer periphery of the first outer body 136 of the locking part 130, so that the locking belt 144 is connected to the locking part 130. deviation from it can be prevented. In addition, the locking belt 144 may be formed of a material having a large frictional force so that slip with the locking unit 130 does not occur.

The locking belt 144 may be rotated in one direction or the other direction by the rotational force of the locking motor 142 , and at the same time, the first external body 136 of the locking unit 130 may be rotated at the same time. In addition, the rotation angle of the first outer body 136 may be 10° or less.

At this time, as the first outer body 136 of the locking unit 130 is rotated, the positions of the alignment member 139 and the insertion groove formed under the chuck assembly 10 may be accurately aligned.

In addition, when the aligned alignment member 139 is inserted into the insertion groove and the first external body 136 of the locking part 130 rotates in a state in which the locking part 130 and the chuck assembly 10 are coupled, the chuck The lower locking latch of the assembly 10 may be rotated at the same time to lock or unlock the chuck assembly 10 and the probe card assembly.

That is, the locking motor 142 and the locking belt 144 provide power for driving the lower locking latch of the chuck assembly 10 to lock or unlock the chuck assembly 10 and the probe card assembly. A burr cartridge can be formed or separated.

Meanwhile, referring to FIG. 8 , the locking detection member 148 may be installed on the upper portion of the connection part 177a to detect the rotation angle of the locking part 130 . For example, the locking detection member 148 may be an encoder. A band-type scale tape may be attached to the outer periphery of the locking unit 130 in the circumferential direction. The position, rotation amount, rotation direction, etc. of the locking unit 130 may be detected through the locking detection member 148 and the scale tape.

8 and 9 , the rotation driving unit 160 may include a rotation transfer motor 162 , a first conversion unit 164 , and a rotation detection member 168 .

The rotation transfer motor 162 may be installed on one side of the movable member 177 to provide a driving force for rotating the rotating unit 150 . For example, the rotational transfer motor 162 may be a 42-angle 5-phase stepping motor. At this time, the axis of the rotary transfer motor 162 may be arranged in a horizontal direction.

The first conversion unit 164 may be installed on one side of the second external body 156 of the rotating unit 150 to convert the rotational force generated by the rotational transfer motor 162 into linear motion. As an example, the first conversion unit 164 may be composed of a rack and a pinion. Accordingly, the first converting unit 164 may rotate the rotating unit 150 in one direction or the other in a state in which it is in mechanical contact with the rotating unit 150 . In this case, the rotation angle of the rotating part 150 may be 7° or less.

On the other hand, as described above, the second outer body 156 of the rotating unit 150 is fixedly coupled to the first inner body 132 of the locking unit 130 , and the first inner body 132 of the locking unit 130 . may be fixedly coupled to the align chuck 120 .

At this time, the second outer body 156 is rotated by the driving of the rotation transfer motor 162 and the first conversion unit 164 , and the first inner body of the locking unit 130 connected to the second outer body 156 . The alignment chuck 120 connected to the 132 and the first inner body 132 may be rotated at the same time.

That is, as the driving force of the rotation transfer motor 162 and the first conversion unit 164 is transmitted to the second outer body 156 , the first inner body 132 and the align chuck 120 , the rotation of each component is simultaneously performed. may occur, and thus the alignment hole 122 of the alignment chuck 120 and the position of the positioning pin 12 of the chuck assembly 10 are matched to each other, so that the position of the alignment chuck 120 with respect to the chuck assembly 10 is made. can be sorted.

Meanwhile, referring to FIG. 8 , the rotation detection member 168 may be installed at the lower end of the connection part 177a to detect the rotation angle of the rotation part 150 . For example, the rotation detecting member 168 may be an encoder. A band-type scale tape may be attached to the outer periphery of the rotating part 150 in the circumferential direction. The position, rotation amount, rotation direction, and the like of the rotation unit 150 may be detected through the rotation detection member 168 and the scale tape.

Referring to FIGS. 5, 6 and 10 , the vertical transfer unit 170 includes a transfer motor 171 , a shaft member 172 , a second conversion unit 174 , a transfer guide 176 , and a movable member 177 . and a transfer detection member 178 .

The transfer motor 171 is installed on the lower inner side of the frame unit 110 , and a shaft member 172 disposed in the left and right directions may be connected to the center of the transfer motor 171 . For example, the transfer motor 171 may be a servo motor generating an output of 400W or more, and the shaft member 172 may be a ball screw with a lead of 4 mm or less. The shaft member 172 may be rotated in one direction or the other according to the driving of the transfer motor 171 .

At this time, referring to FIGS. 5 and 6 , a first movable member 173a and a second movable member 173b that can move according to the rotation of the shaft member 172 may be connected to the shaft member 172 .

The first moving member 173a may be formed so that the shaft member 172 passes therein, and the second moving member 173b may be connected to the upper surface of the first moving member 173a. That is, as the shaft member 172 rotates in one direction or the other direction, the first moving member 173a and the second moving member 173b may horizontally move left or right.

5 and 6 , the second conversion unit 174 may include a first conversion member 174a, a second conversion member 174b, and a third conversion member 174c.

The first conversion member 174a and the second conversion member 174b may each have first and second inclined surfaces having a predetermined inclination on one side thereof, and may be, for example, in the form of a block having a right-angled cross-section.

The inclined surfaces of the first conversion member 174a and the second conversion member 174b may be disposed to face each other. In addition, the first conversion member 174a may be fixed to the upper surface of the second moving member 173b, and the second conversion member 174b may be fixed to the lower surface of the support unit 180 .

The third conversion member 174c may be disposed between the first conversion member 174a and the second conversion member 174b. The cross-sectional area of the third conversion member 174c may be smaller than the cross-sectional areas of the first conversion member 174a and the second conversion member 174b. Through this, the frictional force may be smaller than that of the first converting member 174a and the second converting member 174b moving through the inclined surfaces of each other. The upper surface of the third conversion member 174c may be in contact with the inclined surface of the first conversion member 174a, and the lower surface may be in contact with the inclined surface of the second conversion member 174b.

In this case, the third conversion member 174c may be coupled to be fixed with the first conversion member 174a. Accordingly, the first conversion member 174a and the second conversion member 174b may be disposed to be spaced apart by the third conversion member 174c.

On the other hand, referring to FIG. 6 , the second conversion unit 174 is formed in two pairs, and the two pairs of the second conversion units 174 may be disposed to be spaced apart from each other under the support unit 180 .

At this time, the first conversion member 174a may be simultaneously moved according to the horizontal movement of the first moving member 173a and the second moving member 173b, and as the first conversion member 174a moves in the horizontal direction, The second conversion member 174b in contact with the upper surface of the third conversion member 174c may be slid.

Accordingly, the position is raised or lowered while the second conversion member 174b is slid with respect to the first conversion member 174a, and at the same time, the support unit 180 fixedly coupled to the second conversion member 174b is raised or lowered. can be

That is, the align chuck 120 , the rotating unit 150 , the locking unit 130 , and the support unit 180 can be raised or lowered vertically by the second converting unit 174 that converts the rotational motion into a linear motion.

3 and 8 , the transfer guide 176 is formed to have a predetermined length in the vertical direction, and may be disposed inside the frame unit 110 . A transfer rail 176a formed in the vertical direction is installed on one side of the transfer guide 176, and a guide member 176b capable of sliding along the transfer rail may be connected to the transfer rail 176a. For example, the transfer guide 176 may be an LM guide.

6 to 8 , the movable member 177 may be formed as a pair in a plate shape having a predetermined size. The pair of movable members 177 may be disposed below the support unit 180 and may be disposed in the left and right directions as shown in FIG. 7 .

At this time, referring to FIG. 8 , a connecting member 177a for connecting each movable member 177 may be installed on the pair of movable members 177 . The connecting member 177a may be formed to a predetermined height or may have a portion protruding upward. A locking detection member 148 may be installed at an upper end of the connecting member 177a, and a rotation detecting member 168 may be installed at a lower end of the connecting member 177a.

Meanwhile, as shown in FIG. 8 , one side of the movable member 177 may be connected to the guide member 176b and the other side may be connected to the support unit 180 .

Accordingly, when the support unit 180, the alignment chuck 120, the locking unit 130, and the rotating unit 150 are raised or lowered by the transfer motor 171 and the second conversion unit 174, the movable member 177 And the guide member (176b) can move in the vertical direction along the transfer rail (176a).

That is, the conveying guide 176 can guide the above components so that they can accurately linearly move without a gap.

Referring to FIG. 10 , the transfer detection member 178 may be installed on one side of the movable member 177 to detect the position of the movable member 177 . For example, the transfer detection member 178 may be an encoder. A band-type scale tape may be attached to one side of the transfer guide 176 in the longitudinal direction. The position of the movable member 177 may be detected through the transfer detection member 178 and the scale tape.

Meanwhile, the aligner 100 for a multi-probe system may further include a first photographing unit 190 and a second photographing unit (not shown).

The first photographing unit 190 and the second photographing unit may detect positions of the probe card assembly and the chuck assembly 10 when they are aligned with the probe card assembly and the chuck assembly 10 .

The first photographing unit 190 may be attached to the aligner 100 for a multi-probe system as shown in FIG. 3 . The first photographing unit 190 may recognize the position of the test probe of the probe card assembly, and may also recognize the alignment mark member of the upper locking latch fixed to the probe card assembly.

The second photographing unit may be installed on a structure spaced apart from the aligner 100 for the multi-prover system to detect the position of the chuck assembly. The second photographing unit is installed independently of the aligner 100 for the multi-probe system, thereby minimizing external forces such as vibrations generated by the transfer and change of the aligner 100 for the multi-prover system to reduce the chuck assembly. The position can be accurately detected.

Accordingly, by measuring the distance between the prober card assembly, the chuck assembly 10 and the aligner 100 and recognizing the shape of the alignment mark through the combination of the first photographing unit 190 and the second photographing unit, the probe card assembly Alignment and locking and unlocking between the chuck assembly 10 and the aligner 100 may be easy.

With reference to the foregoing, the sequence of the alignment method for the aligner 100 for a multi-probe system according to an embodiment of the present invention is to combine the probe card assembly and the chuck assembly 10 to form a cartridge. As follows.

First, after the wafer and the probe card assembly transferred to the upper part of the aligner 100 by the robot handler are aligned, the wafer may be transferred to another position by the robot handler.

Then, the chuck assembly 10 disposed above the aligner 100 by the robot handler may be coupled to the aligner 100 .

More specifically, in order for an electrical connector (not shown) formed on the lower portion of the chuck assembly 10 to be aligned with the connector 124 formed on the aligner chuck 120 of the aligner 100 , the lower portion of the chuck assembly 10 . The positioning pin 12 present in the aligner may be aligned with the alignment hole 122 formed on the upper surface of the alignment chuck 120 .

Next, the alignment member 139 of the aligner 100 and the insertion groove 13 under the chuck assembly 10 may be aligned. At this time, since the alignment hole 122 is formed in the alignment chuck 120 and the alignment member 139 is formed in the first outer body 136 of the rotationally driven locking unit 130 , the alignment chuck 120 and the locking unit 130 are formed. ) can be aligned to enable independent positioning.

Then, the aligner 100 and the chuck assembly 10 are combined, the aligner 100 vertically transports the chuck assembly 10, and then aligns and locks with the probe card assembly to configure a cartridge.

That is, the aligner for a multi-probe system according to an embodiment of the present invention can improve test accuracy and stability by aligning the probe card assembly, the wafer, and the chuck assembly, contacting them at an accurate position, and then locking the cartridge to form a cartridge.

1: multiprover system 10: chuck assembly
12: positioning pin 13: insertion groove
90: tilting module
100: aligner for multiprover system
110: frame portion 112: first frame
114: second frame
120: align chuck 120a: hollow hole
122: alignment hole 124: connector
130: locking unit 132: first inner body
132a: first hollow part 134: first rotating bearing
136: first outer body 136a: locking groove
138: edge portion 139: alignment member
140: locking driving unit 142: locking motor
144; Locking belt 148: locking detection member
150: rotating part 152: second inner body
152a: second hollow part 154: second rotating bearing
156: second outer body
160: rotation driving unit 162: rotation motor
164: first conversion unit 168: rotation detection member
170: vertical transfer unit 171: transfer motor
172: shaft member 174: second conversion unit
174a: first conversion member 174b: second conversion member
174c: third conversion member 176: transfer guide
176a: transfer rail 176b: guide member
177: movable member 178: transfer detection member
180: support part 180a: third hollow part
190: first recording unit

Claims (17)

An aligner for a multi-probe system for aligning and bonding a chuck assembly on which a wafer is seated and a probe card assembly on which a probe is formed for inspecting the wafer, comprising:
frame part;
an alignment chuck installed inside the frame unit to align the wafer and the probe;
The alignment chuck is located inside. an edge portion rotatably formed based on the align chuck and having a first positioning portion corresponding to a first positioning portion formed on one surface of the chuck assembly;
a locking part positioned under the rim part and coupled to the align chuck and the rim part to rotate the rim part based on the alignment chuck;
a vertical transfer unit formed to elevate the locking unit;
a first photographing unit fixed to the frame unit to detect a first position that is the position of the probe; and
and a second photographing unit disposed to be spaced apart from the frame unit and configured to detect a second position, which is the position of the chuck assembly,
The rim portion,
As it rotates, the positions of the first positioning unit and the first position-corresponding unit are aligned to be mutually coupled to the chuck assembly, and rotated while being coupled to the chuck assembly to mutually fasten the chuck assembly and the probe card assembly. or to separate
The vertical transfer unit,
The multi prober is controlled to raise and lower the alignment chuck based on the detected first and second positions, and transports the chuck assembly to a predetermined position to contact or separate the chuck assembly and the probe card assembly An aligner for the system. delete delete According to claim 1,
a second positioning part formed on one surface of the chuck assembly; and
The aligner for a multi-prover system including a second position-corresponding part disposed on one surface of the aligning chuck to coincide with the position of the second positioning part, and formed to correspond to the second positioning part. 5. The method of claim 4,
The second positioning part is formed in a pin shape protruding from one surface of the chuck assembly,
The second position-corresponding portion is an aligner for a multi-probe system formed in a hole or groove shape to correspond to the second positioning portion. delete delete According to claim 1,
The first positioning part is formed in a pin shape protruding from one surface of the edge part,
The first position-corresponding portion is an aligner for a multi-probe system that is formed in a hole or groove shape to correspond to the first positioning portion. According to claim 1,
and a connector formed at a central portion of the aligner chuck to receive an electrical signal from the chuck assembly. 10. The method of claim 9,
A hollow hole is formed in the center of the alignment chuck, and a hollow portion is formed in the center of the locking part,
The hollow hole and the hollow part are located on a concentric axis so that the electrical wiring connected to the connector is coupled to the aligner for a multi prober system. According to claim 1,
The locking unit,
an inner body connected to the align chuck;
An outer body coupled to the edge portion to be rotatable at the same time as the edge portion, and
The aligner for a multi prober system comprising a rotating bearing, wherein the inner body is coupled to the inner ring and the outer body is coupled to the outer ring to rotate the inner body and the outer body. 12. The method of claim 11,
An aligner for a multi-probe system including a locking driving unit coupled to an outer surface of the outer body to rotate the outer body. 13. The method of claim 12,
The locking drive unit,
A locking belt formed to surround the outer circumferential surface of the outer body to rotate the outer body, and
An aligner for a multi prober system comprising a locking motor providing a driving force for driving the locking belt. 14. The method of claim 13,
The outer body,
An aligner for a multi prober system in which a locking groove is formed along the outer surface so that the locking belt is inserted into the outer surface. 13. The method of claim 12,
The locking drive unit,
The aligner for a multi prober system further comprising a locking detection member for detecting the rotation angle of the outer body. 16. The method of claim 15,
An aligner for a multi prober system in which a scale tape is formed on the outer circumferential surface of the outer body so that the locking detection member can calculate the rotation angle of the outer body. a probe card assembly on which a probe for inspecting a wafer is formed;
a chuck assembly supporting the wafer; and
17. After aligning the probe card assembly and the chuck assembly, the aligner according to any one of claims 1, 4, 5, 8 to 16 is included for coupling the probe card assembly and the chuck assembly. multiprover system.

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