KR102291011B1 - Liquid drop ejecting apparatus having structure for preventing fume inflow - Google Patents

Liquid drop ejecting apparatus having structure for preventing fume inflow Download PDF

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KR102291011B1
KR102291011B1 KR1020190080181A KR20190080181A KR102291011B1 KR 102291011 B1 KR102291011 B1 KR 102291011B1 KR 1020190080181 A KR1020190080181 A KR 1020190080181A KR 20190080181 A KR20190080181 A KR 20190080181A KR 102291011 B1 KR102291011 B1 KR 102291011B1
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inkjet head
head
pressure gas
sealing cover
panel
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KR1020190080181A
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KR20210004182A (en
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김명진
양진우
최기훈
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세메스 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/67225—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one lithography chamber

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)

Abstract

본 발명은 액적토출과정에서 발생되는 흄이 헤드쪽으로 유입되는 것을 방지하기 위한 흄유입방지구조를 갖는 액적토출장치에 관한 것이다. 이를 위하여, 본 발명은 액적을 토출하는 잉크젯 헤드; 상기 잉크젯 헤드가 삽입되어 고정되는 헤드패널; 상기 잉크젯 헤드를 감싸고 상기 헤드패널의 상부를 밀폐시키는 밀폐커버를 포함하는액적토출장치를 제공한다.
따라서, 본 발명에 의하면, 잉크젯 헤드가 동작할 때 흄성분이 잉크젯 헤드 쪽으로 유입되는 것이 방지되기 때문에 헤드오염 및 헤드 상부의 기판 및 밸드 등의 장비 손상을 방지할 수 있다.The present invention relates to a droplet discharging device having a fume inflow prevention structure for preventing fumes generated in the droplet discharging process from flowing toward a head. To this end, the present invention provides an inkjet head for discharging droplets; a head panel into which the inkjet head is inserted and fixed; It provides a droplet discharging device including a sealing cover for enclosing the inkjet head and sealing an upper portion of the head panel.
Therefore, according to the present invention, since fume components are prevented from flowing into the inkjet head when the inkjet head is operated, head contamination and damage to equipment such as the substrate and the valve above the head can be prevented.

Description

흄유입방지구조를 갖는 액적토출장치{Liquid drop ejecting apparatus having structure for preventing fume inflow}TECHNICAL FIELD Liquid drop ejecting apparatus having structure for preventing fume inflow

본 발명은 흄유입방지구조를 갖는 액적토출장치에 관한 것이며, 구체적으로 액적토출과정에서 발생되는 흄이 헤드쪽으로 유입되는 것을 방지하기 위한 흄유입방지구조를 갖는 액적토출장치에 관한 것이다.The present invention relates to a droplet discharging device having a fume inflow prevention structure, and more particularly, to a droplet discharging device having a fume inflow preventing structure for preventing fumes generated in the droplet discharging process from flowing toward a head.

LCD 등의 디스플레이 장치를 제조하기 위해서 배향막의 형성이나 UV잉크를 도포할 경우, 또는 기판상에 컬러필터를 도포할 경우 등 액적을 토출하기 위해 잉크젯 설비를 많이 이용하고 있다.In order to manufacture display devices such as LCD, inkjet equipment is widely used for discharging droplets, such as when forming an alignment layer, applying UV ink, or applying a color filter on a substrate.

잉크젯 헤드 내부에는 액적을 토출시키기 위한 노즐이 구비되어 있고 상기 노즐은 압전센서 등을 이용하여 구동된다. A nozzle for discharging droplets is provided inside the inkjet head, and the nozzle is driven using a piezoelectric sensor or the like.

도 1을 참조하면, 잉크젯 헤드(10)는 헤드패널(20)에 삽입되어 고정되며, 잉크젯 헤드 상부에는 액적 공급을 제어하기 위한 밸브 및 케이블 커넥터 등이 연결된다. 이러한 구조에서 잉크젯 헤드와 헤드패널 사이에는 잉크젯 헤드 설치 및 조정작업을 위한 개구부가 형성된다.Referring to FIG. 1 , the inkjet head 10 is inserted and fixed in the head panel 20 , and a valve and a cable connector for controlling droplet supply are connected to the upper portion of the inkjet head. In this structure, an opening for installing and adjusting the inkjet head is formed between the inkjet head and the head panel.

이러한 상태에서 잉크젯 장치를 가동하면 액적이 토출되는 과정에서 흄(fume,증기)이 발생되고, 상기 흄이 상기 개구부를 통해 잉크젯 헤드 모듈로 유입된다. 이렇게 유입된 흄은 케이블 및 기판을 손상시키고 잉크젯 헤드의 오염을 유발시킬 우려가 크다. 또한, 유입된 흄 성분이 고착화되어 노즐을 막거나 손상을 줄 염려가 크다.When the inkjet device is operated in this state, fume is generated in the process of discharging droplets, and the fume is introduced into the inkjet head module through the opening. The fumes introduced in this way are highly likely to damage cables and substrates and cause contamination of the inkjet head. In addition, there is a high risk of clogging or damaging the nozzle as the introduced fume component is solidified.

따라서, 상기 흄이 잉크젯 헤드쪽으로 유입되는 것을 방지해야 할 필요성이 커지고 있다.Accordingly, there is a growing need to prevent the fumes from flowing toward the inkjet head.

특허문헌 : 공개특허공보 제10-2013-0015612호Patent Literature: Patent Publication No. 10-2013-0015612

본 발명은 상기한 문제점을 해결하기 위한 것이며, 구체적으로 액적으로 정확하게 토출시키면서 발생되는 흄이 잉크젯 헤드쪽으로 유입되는 것을 방지할 수 있는 구조를 제공하기 위한 것이다.The present invention is to solve the above problems, and specifically, to provide a structure capable of preventing fumes generated while accurately discharging droplets from flowing into the inkjet head.

상기한 문제점을 해결하기 위하여, 본 발명은 액적을 토출하는 잉크젯 헤드; 상기 잉크젯 헤드가 삽입되어 고정되는 헤드패널; 상기 잉크젯 헤드를 감싸고 상기 헤드패널의 상부를 밀폐시키는 밀폐커버를 포함하는액적토출장치를 제공한다.In order to solve the above problems, the present invention provides an inkjet head for discharging droplets; a head panel into which the inkjet head is inserted and fixed; It provides a droplet discharging device including a sealing cover for enclosing the inkjet head and sealing an upper portion of the head panel.

상기 액적토출장치는 상기 밀폐커버 내부로 압력기체를 공급하는 압력기체공급부를 더 포함하는 것이 바람직하다.Preferably, the droplet discharging device further includes a pressure gas supply unit for supplying the pressure gas to the inside of the sealing cover.

상기 밀폐커버의 상단에는 외부로부터의 압력기체를 내부로 통과시키는 압력기체관통부가 구비되며, 상기 압력기체관통부를 통해 상기 압력기체가 아래방향으로 이송되는 것이 바람직하다.It is preferable that a pressure gas passing portion for passing the pressure gas from the outside to the inside is provided at the upper end of the sealing cover, and the pressure gas is transferred downward through the pressure gas passing portion.

상기 압력기체공급부에는 상기 압력기체를 넓은 범위로 분사시키는 확산노즐이 구비된 것이 바람직하다.Preferably, the pressure gas supply unit is provided with a diffusion nozzle for spraying the pressure gas in a wide range.

본 발명에 의하면, 잉크젯 헤드가 동작할 때 흄성분이 잉크젯 헤드 쪽으로 유입되는 것이 방지되기 때문에 헤드오염 및 헤드 상부의 기판 및 밸드 등의 장비 손상을 방지할 수 있다.According to the present invention, since fume components are prevented from flowing toward the inkjet head when the inkjet head is operated, head contamination and damage to equipment such as the substrate and the valve above the head can be prevented.

또한, 외부의 이물질로부터 잉크젯 헤드 모듈을 보호하여 장비의 내구성을 향상시킬 수 있다.In addition, it is possible to improve the durability of the equipment by protecting the inkjet head module from foreign substances.

도 1은 종래기술에 의한 잉크젯 헤드 모듈을 나타내는 구성도;
도 2는 본 발명에 의한 잉크젯 헤드 모듈을 나타내는 구성도;
도 3은 잉크젯 헤드의 상부에서 바라본 예시도;
도 4는 본 발명에 의한 잉크젯 헤드 모듈의 다른 실시예를 나타내는 구성도.1 is a block diagram showing an inkjet head module according to the prior art;
2 is a block diagram showing an inkjet head module according to the present invention;
3 is an exemplary view seen from the top of the inkjet head;
4 is a block diagram showing another embodiment of the inkjet head module according to the present invention.

본 발명의 실시예의 구성 및 작용에 대하여 첨부한 도면을 참조하여 상세하게 설명한다.The configuration and operation of the embodiment of the present invention will be described in detail with reference to the accompanying drawings.

도 2를 참조하면, 본 발명에 의한 흄유입방지구조를 갖는 액적토출장치는 잉크젯 헤드(100), 헤드패널(500), 밸브(200), 커넥터(400), 밀폐커버(600), 밀폐커버제어부(미도시)를 포함하여 구성된다.2, the droplet discharge device having a fume inflow prevention structure according to the present invention is an inkjet head 100, a head panel 500, a valve 200, a connector 400, a sealing cover 600, a sealing cover. It is configured to include a control unit (not shown).

상기 잉크젯 헤드(100)는 액정등이 저장되어 있는 탱크로부터 기판에 액정을 도포하는 역할을 한다. 상기 기판은 액정표시패널의 컬러필터기판 또는 박막트랜지스터 기판일 수 있으며, 액정은 컬러필터기판 또는 박막트랜지스터기판의 전면에 도포될 수 있다.The inkjet head 100 serves to apply liquid crystal to a substrate from a tank in which liquid crystal is stored. The substrate may be a color filter substrate or a thin film transistor substrate of a liquid crystal display panel, and the liquid crystal may be applied to the entire surface of the color filter substrate or the thin film transistor substrate.

도 3은 도2의 위쪽(A)에서 바라본 도면이다. 이와 같이 본 실시예에 의한 잉크젯 헤드는 헤드패널(500)에 의하여 병렬적으로 복수 개가 일정 간격으로 배치될 수 있다. 또한, 상기 잉크젯 헤드(100)는 측면으로 돌출된 헤드고정부(110)를 통해 헤드패널(500)에 고정될 수 있다.FIG. 3 is a view viewed from the upper side (A) of FIG. 2 . As described above, a plurality of inkjet heads according to the present embodiment may be arranged in parallel by the head panel 500 at regular intervals. In addition, the inkjet head 100 may be fixed to the head panel 500 through the head fixing part 110 protruding to the side.

상기 잉크젯 헤드(100)의 상부에는 밸브(200) 및 커넥터(400)가 구비되며, 입력관(210) 및 배출관(220)이 연결된다.A valve 200 and a connector 400 are provided at an upper portion of the inkjet head 100 , and an input pipe 210 and an exhaust pipe 220 are connected to each other.

상기 밸브(200)는 액정이나 약액이 잉크젯 헤드(100)의 내부로 들어가는 것을 제어한다. 즉, 상기 밸브(200)는 잉크젯 헤드(100)를 통해 토출되는 액정이나 약액이 일정량으로 공급될 수 있도록 제어하는 역할을 한다.The valve 200 controls that liquid crystal or chemical liquid enters the inkjet head 100 . That is, the valve 200 serves to control the liquid crystal or chemical liquid discharged through the inkjet head 100 to be supplied in a predetermined amount.

상기 커넥터(400)는 잉크젯 헤드(100)에 전기적인 신호를 입력하여 주는 역할을 한다. 즉, 상기 커넥터(400)는 압전소자와 같은 전기신호에 의해 작동되는 부품들에게 정해진 전기신호를 입력시켜 주어 잉크젯 헤드가 정확하게 작동될 수 있도록 한다.The connector 400 serves to input an electrical signal to the inkjet head 100 . That is, the connector 400 inputs a predetermined electric signal to parts operated by an electric signal, such as a piezoelectric element, so that the inkjet head can be operated accurately.

상기 밀폐커버(600)는 알루미늄 재질로 구비될 수 있으며, 상기 잉크젯 헤드(100)를 감싸고 헤드패널의 상부를 밀폐시키는 역할을 한다. 즉, 상기 밀폐커버는 직육면체 형상으로 이루어질 수 있으며, 헤드패널과 결합될 수 있도록 하는 것이 바람직하다.The sealing cover 600 may be made of an aluminum material, and serves to surround the inkjet head 100 and seal the upper part of the head panel. That is, the sealing cover may be formed in a rectangular parallelepiped shape, and it is preferable to be coupled to the head panel.

한편, 상기 밀폐커버(600)의 일측에는 밀폐커버의 내부압력을 높일 수 있는 압력기체공급부(610)가 구비될 수 있다. 상기 압력기체공급부(610)는 밀폐커버 내측으로 공기나 질소와 같은 기체를 공급하여 주는 역할을 하며, 외부 펌프와 연결되어 압력기체를 밀폐커버 내부로 공급하여 줄 수 있다. 상황에 따라, 상기 압력기체공급부(610)에는 팬이 설치될 수도 있다.On the other hand, one side of the sealing cover 600 may be provided with a pressure gas supply unit 610 capable of increasing the internal pressure of the sealing cover. The pressure gas supply unit 610 serves to supply a gas such as air or nitrogen to the inside of the sealing cover, and may be connected to an external pump to supply the pressure gas to the inside of the sealing cover. According to circumstances, a fan may be installed in the pressure gas supply unit 610 .

상기 압력기체공급부(610)의 주변에는 씰부재가 설치되어 밀폐효과를 극대화할 수 있다.A sealing member is installed around the pressure gas supply unit 610 to maximize the sealing effect.

상기 압력기체공급부(610)는 밀폐커버(600)의 상면에 구비되어 압력기체를 아래방향으로 이송시키는 것이 바람직하다. 즉, 상기 밀폐커버(600)의 상면에는 압력기체를 내부로 통과시키는 중공의 압력기체관통부가 형성되며, 상기 압력기체공급부는 상기 압력기체관통부를 통해 압력기체를 밀폐커버 내부로 이송시킨다.The pressure gas supply unit 610 is preferably provided on the upper surface of the sealing cover 600 to transport the pressure gas in the downward direction. That is, the upper surface of the sealing cover 600 is formed with a hollow pressure gas passing through the pressure gas inside, the pressure gas supply unit conveys the pressure gas through the pressure gas through the pressure gas into the sealing cover.

한편, 상기 입력관(210) 및 배출관(220)과 밀폐커버의 관통 부분에도 배관밀폐부(620)가 구비되며, 커넥터 관통 부분에도 커넥터밀폐부(630)가 구비되는 것이 바람직하다.On the other hand, it is preferable that the pipe sealing part 620 is provided in the penetration part of the input pipe 210 and the discharge pipe 220 and the sealing cover, and the connector sealing part 630 is also provided in the connector penetration part.

상기 압력기체공급부(610)에는 밀폐커버(600) 내부로 공급되는 압력기체를 넓은 범위로 확산시킬 수 있는 확산노즐(미도시)이 구비될 수 있다. 상기 확산노즐은 한쪽 방향에서 분사되는 압력기체에 의하여 밀폐커버 내부의 압력이 불균일화되는 것을 방지하여 밀폐커버(600) 내부의 압력을 균일화함으로써 효율적인 제어를 용이하게 한다.The pressure gas supply unit 610 may be provided with a diffusion nozzle (not shown) capable of diffusing the pressure gas supplied into the sealing cover 600 in a wide range. The diffusion nozzle prevents the pressure inside the sealing cover from being non-uniform by the pressure gas injected from one direction, thereby facilitating efficient control by equalizing the pressure inside the sealing cover 600 .

상기 밀폐커버(600)로 인하여 잉크젯 헤드가 작동할 때, 발생되는 흄이 다시 잉크젯 헤드쪽으로 유입되는 것이 차단되어 내구성이 향상되는 효과가 있다.When the inkjet head operates due to the sealing cover 600 , the generated fumes are prevented from flowing back toward the inkjet head, thereby improving durability.

도 4를 참조하면, 상기 압력기체공급부(610)에는 압력기체분사관(650)이 밀폐커버 내부로 연장될 수 있다. 잉크젯 헤드쪽으로 유입되는 흄은 주로 잉크젯 헤드와 헤드패널 사이의 개구부(550)를 통해 유입되기 때문에 상기 압력기체분사관(650)의 끝단은 상기 잉크젯 헤드와 헤드패널 사이의 개구부에 인접하게 설치된다. 이러한 구성은 적은 양의 압력기체로 효율적인 흄의 차단이 이루어질수 있도록 한다.Referring to FIG. 4 , a pressure gas injection pipe 650 may extend into the sealing cover in the pressure gas supply unit 610 . Since the fume flowing toward the inkjet head is mainly introduced through the opening 550 between the inkjet head and the head panel, the end of the pressure gas injection pipe 650 is installed adjacent to the opening between the inkjet head and the head panel. This configuration makes it possible to effectively block the fume with a small amount of pressure gas.

한편, 상기 압력기체공급부(610)에는 통과되는 압력기체의 온도를 상승시키기 위한 히터가 구비될 수 있다. 외부에 비해 상승된 온도의 압력기체는 밀폐커버 내부의 압력을 강한 기류없이 상승시켜 잉크젯 헤드를 통해 토출되는 액적에는 영향이 없이 흄과 같은 이물질이 내부로 유입되는 것이 효과적으로 차단된다.On the other hand, the pressure gas supply unit 610 may be provided with a heater for increasing the temperature of the passing pressure gas. The pressure gas at an elevated temperature compared to the outside raises the pressure inside the sealing cover without a strong airflow, so that foreign substances such as fume are effectively blocked from entering the inside without affecting the droplets discharged through the inkjet head.

상기 밀폐커버의 내부에는 압력센서가 구비되며, 밀폐커버제어부는 압력센서에 의한 압력데이터를 전송받아 압력기체공급부를 제어할 수 있다.A pressure sensor is provided inside the sealing cover, and the sealing cover control unit may control the pressure gas supply unit by receiving pressure data from the pressure sensor.

다음으로, 본 발명에 의한 흄유입방지구조를 갖는 액적토출장치의 작동과정에 대해 설명한다.Next, an operation process of the droplet discharge device having a fume inflow prevention structure according to the present invention will be described.

액적토출장치의 작동이 시작되면, 제어부에 의해 잉크젯 헤드가 정해진 위치로 움직이기 시작한다. 그리고, 잉크탱크에 저장된 액정과 같은 토출액이 입력관을 통해 잉크젯 헤드로 입력된다.When the operation of the droplet discharging device starts, the inkjet head starts to move to a predetermined position by the control unit. Then, the discharge liquid such as liquid crystal stored in the ink tank is input to the inkjet head through the input tube.

그러면, 잉크젯 헤드 내의 압전소자가 커넥터로부터의 전기신호를 입력받아 움직이면서 잉크젯 헤드의 노즐을 작동시켜 토출액을 기판으로 토출시킨다. 이와 함께, 밀폐커버제어부에서는 압력기체공급부를 통해 압력기체가 밀폐커버 내부로 주입될 수 있도록 한다. Then, the piezoelectric element in the inkjet head receives the electrical signal from the connector and moves, operating the nozzle of the inkjet head to discharge the discharge liquid to the substrate. At the same time, the sealing cover control unit allows the pressure gas to be injected into the sealing cover through the pressure gas supply unit.

밀폐커버 내부로 주입된 압력기체에 의하여 밀폐커버 내부의 압력이 외부보다 상승하여 밀폐커버 외부의 이물질들이 밀폐커버 내부로 유입되는 것이 차단된다. 예를 들어, 잉크젯 헤드에서 토출되는 토출액에 의해 발생되는 흄이 다시 밀폐커버 내부로 유입되는 것이 방지된다.By the pressure gas injected into the sealing cover, the pressure inside the sealing cover rises from the outside, and foreign substances outside the sealing cover are blocked from flowing into the sealing cover. For example, fume generated by the ejection liquid ejected from the inkjet head is prevented from flowing back into the sealing cover.

밀폐커버제어부에서는 밀폐커버 내부에 구비된 압력센서로부터의 데이터를 전송받아 일정 압력범위를 유지하도록 압력기체공급부를 제어한다. 즉, 밀폐커버제어부에서는 압력기체로 인하여 잉크젯 헤드에서 토출되는 토출액이 영향을 받지 않으면서 흄과 같은 이물질이 유입되지 않도록 하는 범위에서 압력기체공급부를 제어하여야 한다.The sealing cover control unit receives data from the pressure sensor provided inside the sealing cover and controls the pressure gas supply unit to maintain a predetermined pressure range. That is, the airtight cover control unit must control the pressure gas supply unit within a range so that foreign substances such as fume do not flow in while the discharge liquid discharged from the inkjet head is not affected by the pressure gas.

이때, 확산노즐을 통해 밀폐커버 내부로 주입되는 압력기체로 인한 밀폐커버 내부의 압력이 균일화되는 것이 바람직하며, 압력기체의 방향은 상단에서 아래방향으로 향하는 것이 바람직하다.At this time, the pressure inside the sealing cover due to the pressure gas injected into the sealing cover through the diffusion nozzle is preferably equalized, and the direction of the pressure gas is preferably from the top to the bottom.

상기에서는 본 발명의 실시예들을 참조하여 설명하였지만, 해당 기술 분야에서 통상의 지식을 가진 자라면 하기의 특허 청구범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 및 변경시킬 수 있음을 이해할 수 있을 것이다.Although the above has been described with reference to embodiments of the present invention, those of ordinary skill in the art can variously modify and modify the present invention within the scope without departing from the spirit and scope of the present invention described in the claims below. You will understand that it can be changed.

100 : 잉크젯 헤드 200 : 밸브
210 : 입력관 220 : 배출관
300 : 커넥터 500 : 헤드패널
600 : 밀폐커버 610 : 압력기체공급부100: inkjet head 200: valve
210: input pipe 220: exhaust pipe
300: connector 500: head panel
600: sealing cover 610: pressure gas supply unit

Claims (4)

액적을 토출하는 잉크젯 헤드;
상기 잉크젯 헤드가 삽입되어 고정되는 헤드패널;
상기 잉크젯 헤드를 감싸고 상기 헤드패널의 상부를 밀폐시키는 밀폐커버;
상기 밀폐커버 내부로 압력기체를 공급하는 압력기체공급부; 및
상기 압력기체공급부에서 상기 밀폐커버 내부로 연장되며, 끝단이 상기 잉크젯 헤드와 상기 헤드패널 사이의 개구부에 인접하게 구비되는 압력기체분사관을 포함하는 흄유입방지구조를 갖는 액적토출장치.an inkjet head that ejects droplets;
a head panel into which the inkjet head is inserted and fixed;
a sealing cover surrounding the inkjet head and sealing an upper portion of the head panel;
a pressure gas supply unit for supplying pressure gas into the sealing cover; and
A droplet discharging device having a fume inflow prevention structure including a pressure gas injection pipe extending from the pressure gas supply unit into the sealing cover and having an end adjacent to an opening between the inkjet head and the head panel. 삭제delete 삭제delete 삭제delete
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008093849A (en) 2006-10-06 2008-04-24 Canon Inc Droplet discharge head and droplet discharge device
JP2009298076A (en) * 2008-06-16 2009-12-24 Kishu Giken Kogyo Kk Head covering device of inkjet printer
KR101634685B1 (en) 2014-12-24 2016-06-30 주식회사 선익시스템 Nozzle jet head module and nozzle jet system having the same
JP2016137672A (en) * 2015-01-29 2016-08-04 理想科学工業株式会社 Ink jet printer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005074836A (en) * 2003-09-01 2005-03-24 Seiko Epson Corp Inkjet head unit
CN108466426A (en) * 2017-02-23 2018-08-31 三纬国际立体列印科技股份有限公司 Ink gun protective device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008093849A (en) 2006-10-06 2008-04-24 Canon Inc Droplet discharge head and droplet discharge device
JP2009298076A (en) * 2008-06-16 2009-12-24 Kishu Giken Kogyo Kk Head covering device of inkjet printer
KR101634685B1 (en) 2014-12-24 2016-06-30 주식회사 선익시스템 Nozzle jet head module and nozzle jet system having the same
JP2016137672A (en) * 2015-01-29 2016-08-04 理想科学工業株式会社 Ink jet printer

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