KR102278675B9 - 엑스레이를 이용한 도금두께 측정 장치 - Google Patents
엑스레이를 이용한 도금두께 측정 장치Info
- Publication number
- KR102278675B9 KR102278675B9 KR20190023427A KR20190023427A KR102278675B9 KR 102278675 B9 KR102278675 B9 KR 102278675B9 KR 20190023427 A KR20190023427 A KR 20190023427A KR 20190023427 A KR20190023427 A KR 20190023427A KR 102278675 B9 KR102278675 B9 KR 102278675B9
- Authority
- KR
- South Korea
- Prior art keywords
- plating
- ray
- measuring thickness
- measuring
- thickness
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/02—Dosimeters
- G01T1/023—Scintillation dose-rate meters
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20180036089 | 2018-03-28 | ||
KR1020180036089 | 2018-03-28 |
Publications (3)
Publication Number | Publication Date |
---|---|
KR20190113561A KR20190113561A (ko) | 2019-10-08 |
KR102278675B1 KR102278675B1 (ko) | 2021-07-16 |
KR102278675B9 true KR102278675B9 (ko) | 2021-09-17 |
Family
ID=68208520
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020190023473A KR102170972B1 (ko) | 2018-03-28 | 2019-02-27 | 엑스레이를 이용한 물질두께 측정 장치 |
KR1020190023427A KR102278675B1 (ko) | 2018-03-28 | 2019-02-27 | 엑스레이를 이용한 도금두께 측정 장치 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020190023473A KR102170972B1 (ko) | 2018-03-28 | 2019-02-27 | 엑스레이를 이용한 물질두께 측정 장치 |
Country Status (1)
Country | Link |
---|---|
KR (2) | KR102170972B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102554824B1 (ko) | 2023-03-21 | 2023-07-12 | 알에프머트리얼즈 주식회사 | 도금 두께 측정 시스템 및 방법 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002107134A (ja) * | 2000-07-27 | 2002-04-10 | Seiko Instruments Inc | 蛍光x線膜厚計 |
TW565604B (en) | 2001-04-25 | 2003-12-11 | Toray Industries | Pyrromethene metal complex, material of luminescent element using it and luminescent element |
WO2007041639A2 (en) * | 2005-10-04 | 2007-04-12 | Thermo Niton Analyzers Llc | Analysis of elemental composition and thickness in multilayered materials |
EP2893331B1 (en) * | 2012-09-07 | 2020-01-15 | Carl Zeiss X-Ray Microscopy, Inc. | Combined confocal x-ray fluorescence and x-ray computerised tomographic system and method |
-
2019
- 2019-02-27 KR KR1020190023473A patent/KR102170972B1/ko active IP Right Grant
- 2019-02-27 KR KR1020190023427A patent/KR102278675B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20190113562A (ko) | 2019-10-08 |
KR20190113561A (ko) | 2019-10-08 |
KR102278675B1 (ko) | 2021-07-16 |
KR102170972B1 (ko) | 2020-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E902 | Notification of reason for refusal | ||
E90F | Notification of reason for final refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
G170 | Publication of correction |