KR102241854B1 - System for measuring gas - Google Patents

Abstract

The present invention relates to a precision gas measurement system, the present invention is a common suction line; Region-of-interest suction pipes having one end connected to the common suction line at a set interval and the other end being respectively positioned in the target regions of interest; Common vacuum line; Branch vacuum connection lines, each of which one end is connected to the common vacuum line and the other end is connected to the region of interest suction pipes at a set interval; A vacuum supply pipe having one end connected to the middle portion of the common vacuum line; A vacuum supply unit connected to the other end of the vacuum supply pipe; An analyzer connection pipe having one end connected to the middle portion of the common suction line; An analyzer connected to the other end of the analyzer connector; A buffer connection line connecting the vacuum supply pipe and the analyzer connection pipe; A differential pressure buffer unit connected to the buffer connection line to provide a uniform pressure by absorbing a pressure difference; And opening/closing units provided in each of the region of interest suction pipes to open and close the region of interest suction pipe. According to the present invention, when the gas leaks in the areas of interest in the equipment installation room in which the equipment(s) using chemicals is installed, the amount of gas leaked is accurately measured.

Description

Precise gas measurement system{SYSTEM FOR MEASURING GAS}

The present invention relates to a precision gas measurement system.

Even if a small amount of toxic gas leaks in factories that use harmful chemicals such as petrochemical plants or semiconductor manufacturing lines, it causes fatal accidents. Therefore, it is essential to measure the leakage of toxic gas in a closed equipment installation room (space) where equipment using such harmful chemicals is installed, and take prompt action in case of gas leakage.

Korean Patent Registration No. 10-1909862 (announced on October 12, 2018) (hereinafter referred to as prior art) discloses a system for finding a place where gas leaks from a factory using harmful chemicals.

However, the prior art uses the suction power of a single vacuum pump to inhale and collect air containing gas through a large number of ports located in the region of interest for gas leakage and the air collecting pipes to which the ports are connected. Since the amount of gas in each collected air is measured, the difference in the amount of air containing gas collected through each of the air collection pipes occurs due to the difference in suction power due to the difference in length of the air collection pipes, resulting in an error in the measured amount of gas. There is a problem that occurs.

An object of the present invention is to provide a precise gas measurement system that accurately measures the amount of gas leaked when gas leaks in areas of interest in an equipment installation room in which equipment(s) using chemicals are installed.

Another object of the present invention is a simple configuration for measuring the amount of gas leakage for working in a pleasant environment where there is no harmful gas by workers working in a region of interest and a semiconductor manufacturing line in an equipment installation room in which semiconductor manufacturing equipment is installed. In addition, it is to provide a precise gas measurement system that accurately collects harmful components of the measurement point in collecting measurement gas and prevents the generation of pollutants due to leakage of the system.

In order to achieve the object of the present invention, a common suction line; Region-of-interest suction pipes having one end connected to the common suction line at a set interval and the other end being respectively positioned in the target regions of interest; Common vacuum line; Branch vacuum connection lines, each of which one end is connected to the common vacuum line and the other end is connected to the region of interest suction pipes at a set interval; A vacuum supply pipe having one end connected to the middle portion of the common vacuum line; A vacuum supply unit connected to the other end of the vacuum supply pipe; An analyzer connection pipe having one end connected to the middle portion of the common suction line; An analyzer connected to the other end of the analyzer connector; A buffer connection line connecting the vacuum supply pipe and the analyzer connection pipe; A differential pressure buffer unit connected to the buffer connection line to provide a uniform pressure by absorbing a pressure difference; And opening/closing units provided in each of the region-of-interest suction pipes to open and close the region-of-interest suction pipes.

The differential pressure buffer unit expands and contracts according to pressure, and the expansion and contraction container to which the buffer connection line is connected, the non-expandable and contracted casing surrounding the expansion and contracting container, and the non-expanding and contracting casing are penetrated to expand the expansion and contraction container. It is preferable to include an orifice tube provided with an orifice portion in which air in the inner space of the non-expanding and contracting casing flows out or inflows to the outside due to volume change due to over-contraction.

The buffer connection line is divided into two, and both ends thereof are connected to the expansion and contraction container, respectively, and one end is preferably connected to protrude into the expansion and contraction container by being bent vertically.

It is preferable that a gravity type check valve for opening and closing a flow path by its own weight is provided in the buffer connection line so as to be located between the non-expandable and contracting casing and the vacuum supply pipe.

The gravity-type check valve has a flow path therein and a first block connected to one side of the buffer connection line, and a flow path is provided inside to be connected to the first block, and a first block connected to the other side of the buffer connection line. 2 blocks, a stopper that is provided with a plurality of air passages therein to be fixed inside the flow paths of the first and second blocks, and is located so as to move up and down inside the flow paths of the first and second blocks, so that the pressure difference and its own weight It is preferable to include a valve cone for opening and closing the flow path.

It is preferable that an orifice pipe provided with an orifice part is connected to the buffer connection line so as to be located between the non-expandable and contracting casing and the gravity-type check valve.

The vacuum supply pipe is connected to a common vacuum line, and is connected to be located in the middle of the connection parts of the branch vacuum connection lines connected to the common vacuum line, and the analyzer connection pipe is connected to a common suction line, but connected to a common suction line. It is preferable to be connected so as to be located in the middle of the connecting portions of the region of interest suction pipes.

It is preferable that a purge unit for cleaning the contaminated line is connected to the common suction line.

The purge unit includes a purge line having both ends connected to a common suction line, a purge supply pipe having one end connected to the purge line, and a high-pressure air supply unit connected to the other end of the purge supply pipe to supply pressurized air. It is preferable to include an opening/closing unit connected to the purge supply pipe.

It is preferable that the common suction line is heated to 70 to 100 degrees.

In the present invention, a uniform vacuum acts on each of the region of interest suction pipes located in the regions of interest in the equipment installation room, and at the same time, the same amount of air is introduced into the analyzer and measured through the analyzer. It is possible to accurately measure whether or not harmful gas is generated (existence) in the target areas.

In addition, since the differential pressure buffer unit of the present invention includes an expansion and contraction container, a non-expansion and contraction casing, and an orifice pipe, it effectively absorbs the pressure difference that occurs temporarily in the suction pipes and the common suction line in the region of interest. Maintain uniform pressure in the line.

In addition, in the present invention, when a gravity type check valve is provided, since the gravity type check valve includes a first block, a second block, a stopper, and a valve cone, even when a small pressure difference occurs, the flow of air is prevented from flowing backward. do.

1 is a piping diagram showing an embodiment of a precision gas measurement system according to the present invention,
Figure 2 is a front cross-sectional view showing a differential pressure buffer unit constituting an embodiment of the precise gas measurement system according to the present invention,
3 is a front view showing a gravity-type check valve constituting an embodiment of the precise gas measurement system according to the present invention,
Figure 4 is a front view showing an exploded gravity-type check valve constituting an embodiment of the precise gas measurement system according to the present invention;
5 is a plan view showing a stopper of a gravity type check valve constituting an embodiment of a precision gas measurement system according to the present invention;
Figure 6 is a front view showing an open state of the gravity-type check valve constituting an embodiment of the precise gas measurement system according to the present invention.

Hereinafter, an embodiment of a precision gas measurement system according to the present invention will be described with reference to the accompanying drawings.

1 is a piping diagram showing an embodiment of a precision gas measurement system according to the present invention.

As shown in Figure 1, an embodiment of the precise gas measurement system according to the present invention, a common suction line 10, a region of interest suction pipes 11, a common vacuum line 20, a branch vacuum connection line ( 21), a vacuum supply pipe (22), a vacuum supply unit (30), an analyzer connector (12), an analyzer (40), a buffer connection line (13), a differential pressure buffer unit (50), an opening/closing unit (60). do.

The common suction line 10 has a set length. It is preferable that a heater is provided in the common suction line 10 so that the common suction line 10 is heated to 70 to 100 degrees.

The region of interest suction pipes 11 have one end connected to each of the common suction lines 10 at a set interval, and the other end of the region of interest is respectively located in the region of interest. Each one end of the region of interest suction pipes 11 is preferably connected to the common suction line 10 at a uniform interval. The other end of each of the region-of-interest suction pipes 11 includes a port, through which air of the region of interest is sucked.

Since the distances of the regions of interest from the common suction line 10 are different, the region of interest suction pipes 11 have different lengths.

The common vacuum line 20 has a set length.

One end is connected to the common vacuum line 20 of the branch vacuum connection lines 21 at a set interval, and the other end is connected to the region of interest suction pipes 11, respectively. Each one end of the branch vacuum connection lines 21 is preferably connected to the common vacuum line 20 at a uniform interval. It is preferable that the branch vacuum connection lines 21 have the same length. It is preferable that the flow gauge (F) is connected to the branch vacuum connection lines (21), respectively. Each of the branch vacuum connection lines 21 is provided with a gravity type check valve 70. The gravity type check valve 70 will be described later. It is preferable that the region of interest suction pipes 11 and the branch vacuum connection lines 21 are configured in the same number so as to correspond one-to-one. The gravity type check valve 70 is preferably provided in the branch vacuum connection line 21 so as to be located between the connection point of the branch vacuum connection line 21 and the region of interest suction pipe 11 and the flow gauge F.

The vacuum supply pipe 22 is connected to the middle portion of the common vacuum line 20. It is preferable that the vacuum supply pipe 22 is connected to the common vacuum line 20, and is connected to be located in the middle of the connection portions of the branch vacuum connection lines 21 connected to the common vacuum line 20. That is, when eight branch vacuum connection lines 21 connected to the common vacuum line 20 are connected, the vacuum supply pipe 22 is located between the fourth and fifth of the branch vacuum connection lines 21 so that the common vacuum line ( 20).

The vacuum supply unit 30 is connected to the other end of the vacuum supply pipe 22 to generate a vacuum.

The analyzer connector 12 is connected to the middle part of the common suction line 10. The analyzer connector 12 is connected to the common suction line 10 and is preferably connected to be located in the middle of the connection portions of the region of interest suction pipes 11 connected to the common suction line 10. That is, when eight of the region-of-interest suction pipes 11 connected to the common suction line 10 are connected, the analyzer connector 12 is positioned between the fourth and fifth of the region-of-interest suction pipes 11. ). The region of interest suction pipes 11 may be 16 or 24.

The analyzer 40 is connected to the other end of the analyzer connector 12 and analyzes the harmful gas mixed with the air sucked through the analyzer connector 12.

The buffer connection line 13 connects the vacuum supply pipe 22 and the analyzer connection pipe 12. That is, the buffer connection line 13 has a set length, one end of which is connected to the vacuum supply pipe 22 and the other end is connected to the analyzer connection pipe 12.

The differential pressure buffer unit 50 is connected to the buffer connection line 13 to absorb the pressure difference and provide a uniform pressure. As an example of the differential pressure buffering unit 50, as shown in FIG. 2, the differential pressure buffering unit 50 includes an expansion and contraction container 51, a non-expansion and contraction casing 52, and an orifice pipe 53. The contraction container 51 expands and contracts according to the pressure, and a buffer connection line 13 is connected. It is preferable that a corrugated portion is provided on the top of the expansion and contraction container 51. It is preferable that the material of the expansion and contraction container 51 includes an elastic material. It is preferable that the non-expansion and contraction casing 52 has a predetermined internal space and includes an inelastic material that is not deformed by pressure. The expansion and contraction container 51 is located inside the non-expansion and contraction casing 52 and its lower surface. It is connected to the lower surface of this non-expanding and contracting casing 52. One end of the orifice pipe 53 is penetrated to one side of the non-expanded and contracted casing 52 so as to communicate with the inner space of the non-expanded and contracted casing 52. The orifice pipe 53 is formed to have a set length and an inner diameter, and an orifice portion having an inner diameter small or small in the middle portion is provided, and the orifice portion preferably includes a needle valve. It is preferable that a filter is provided at the other end of the orifice pipe 53. The buffer connection line 13 is separated into two, a first connection pipe connected to the analyzer connection pipe 12 side, and a vacuum supply pipe 22 Consisting of a second connection pipe connected to, one of the first connection pipe is connected to the expansion and contraction container 51, and one of the second connection pipe is connected to the expansion and contraction container 51, so that the buffer connection line 13 ) Is preferably connected to the differential pressure buffer unit (50). It is preferable to connect the end 6 of the first connection pipe so that it does not protrude into the expansion and contraction container 51, and the end 7 of the second connection pipe protrudes into the interior of the expansion and contraction container 51 of a certain length. However, it is preferable that it protrudes in the vertical direction and forms a right angle with the other part of the second connection pipe.

The differential pressure buffer unit 50 is a buffer connection line 13 and a line connected to the buffer connection line 13 and the line connected thereto as the expansion and contraction container 51 expands when a pressure greater than the set pressure acts on the buffer connection line 13 and the lines connected to the buffer connection line. When the pressure acting on the buffer connection line 13 and the line connected thereto is reduced and a pressure less than the set pressure is applied to the buffer connection line 13 and the line connected thereto, the expansion and contraction container 51 contracts and the pressure acting on the buffer connection line 13 and the line connected thereto Will increase. When the expansion and contraction container 51 expands, the air inside the non-expansion and contraction casing 52 is slowly discharged through the orifice pipe 53 to suppress the rapid expansion of the expansion and contraction container 51, and the expansion and contraction container 51 When) is contracted, external air slowly flows into the interior of the non-expandable and contracted casing 52 through the orifice tube 53, thereby suppressing the rapid contraction of the expansion and contraction container 51.

On the other hand, it is preferable that a gravity type check valve 70 is provided in the buffer connection line 13 so as to be located between the non-expansion and contraction casing 52 and the vacuum supply pipe 22. That is, the gravity type check valve 70 is provided in the second connection pipe of the buffer connection line 13. As an example of the gravity type check valve 70, as shown in Figs. 3 and 4, the gravity type check valve 70 includes a first block 71, a second block 72, a stopper 73, and a valve cone. Includes (74). The first block 71 has a flow path 71a therein. The flow path 71a of the first block 71 has a uniform inner diameter and is formed in a nieun shape to communicate the upper surface and the side surface of the first block 71. That is, the flow path 71a of the first block 71 is composed of a vertical flow path part in communication with the upper surface and a horizontal flow path part in communication with the side surface, and the upper part of the vertical flow path part has a stopper insertion hole having a large inner diameter with a predetermined depth. , A valve cone insertion hole smaller than the inner diameter of the stopper insertion hole is provided, and the inner diameter of the valve cone insertion hole is larger than that of the vertical flow path. The buffer connection line 13 is connected to the horizontal flow path portion of the flow path of the first block 71. The second block 72 has a flow path 72a therein. The flow path 72a of the second block 72 is formed to pass through the upper and lower surfaces, and has the same midline as the flow path 72a on the lower surface, but has an expansion hole having an inner diameter larger than that of the flow path 72a, and the second block ( The buffer connection line 13 is connected to the upper portion of the flow path 72a of the 72). The first block 71 and the second block 72 are fastened by fastening means. At this time, in a state in which the lower surface of the second block 72 is in contact with the upper surface of the first block 71 so that the flow path 72a of the second block 72 and the flow path 71a of the first block 71 communicate with each other. It is fastened by fastening means. As an example of the fastening means, the fastening means may be a plurality of screws. The stopper 73 is provided with a plurality of air passages therein and is fixed inside the passages 71a and 72a of the first and second blocks 71 and 72. As an example of the stopper 73, the stopper 73 includes a disk portion 1 having a uniform thickness, and a plurality of air passages formed through a virtual circle of the disk portion 1 at a predetermined interval in the circumferential direction. (2) and a stopper protrusion 3 formed protruding to a predetermined length in the form of a round bar in the middle of the lower surface of the disk portion 1. The size of the circle connecting the outer tangent lines of the air passages 2 is smaller than the inner diameter of the diameter expansion hole of the second block 72. The stopper 73 is inserted into the stopper insertion hole of the first block 71 so that the stopper protrusion 3 is positioned downward. The valve cone 74 is positioned to be vertically movable inside the flow paths 71a and 72a of the first and second blocks 71 and 72 to open and close the flow path by the pressure difference and its own weight. As an example of the valve cone 74, the valve cone 74 includes a disk portion having a uniform thickness, and a cone portion protruding in a conical shape from a lower surface of the disk portion. The valve cone 74 is inserted to be movable vertically into the valve cone insertion hole of the flow path of the first block 71 so that the cone portion is positioned downward. It is preferable that the sealing 75 is inserted into the valve cone insertion hole into which the valve cone 74 is inserted.

In the gravity-type check valve 70, as shown in Figs. 3 and 6, the pressure acting on the flow path 72a of the second block 72 is the pressure acting on the flow path 71a of the first block 71 If it is larger than the valve cone 74 moves downward, it blocks the flow paths 71a and 72a, and the pressure acting on the flow path 72a of the second block 72 is applied to the flow path 71a of the first block 71 When the pressure applied to the valve cone 74 moves toward the second block 72 and is caught by the stopper 73, the flow paths 71a and 72a are opened. Since the valve cone 74 opens and closes the flow paths 71a and 72a due to its own weight and pressure difference, it reacts to a minute pressure difference.

It is preferable that an orifice pipe 76 is provided in the buffer connection line 13 so as to be located between the non-expansion and contraction casing 52 and the gravity check valve 70. The orifice pipe 76 is formed to have a set length and an inner diameter, and it is preferable that an orifice portion capable of having a small or small inner diameter is provided in the middle portion. It is preferable that the orifice portion includes a needle valve. It is preferable that one end of the orifice tube 76 is connected to the buffer connection line 13 and a filter is provided at the other end of the orifice tube 76.

The opening/closing unit 60 is provided in each of the region of interest suction pipes 11 to open and close the region of interest suction pipe 11. The opening and closing unit 60 is a region of interest suction pipe 11 to be located between the connection point of the region of interest suction pipe 11 and the branch vacuum connection line 21 and the connection point of the common suction line 10 and the region of interest suction pipe 11 Is connected to

Meanwhile, it is preferable that a purge unit 80 for cleaning the contaminated line is connected to the common suction line 10. As an example of the purge unit 80, the purge unit 80 includes a purge line 81 having both ends connected to a common suction line 10, and a purge supply pipe 82 having one end connected to the purge line 81. ), and a high-pressure air supply unit 83 connected to the other end of the purge supply pipe 82 to supply pressurized air, and a purge opening/closing unit 84 connected to the purge supply pipe 82. . Both ends of the purge line 81 are preferably connected to both ends of the common suction line 10, respectively. When the purge unit 80 opens the purge opening/closing unit 84 of the purge supply pipe 82 while the opening/closing unit 60 of the area of interest suction pipe 11 in which the harmful gas is measured is opened, the high-pressure air is transferred to the purge supply pipe 82. As it is discharged toward the analyzer connection pipe 12 through the purge line 81, the harmful gas of the region of interest suction pipe 11 and the light common suction pipe 10 into which the harmful gas is introduced is discharged.

Hereinafter, the operation and effect of the precise gas measurement system according to the present invention will be described.

Ports of the region-of-interest suction pipes 11 are respectively located in regions of interest of the equipment installation room in which equipment using chemicals is installed. On/off valves provided in each of the region of interest suction pipes 11 to sequentially inhale air from the regions of interest from each of the ports of the region of interest suction pipes 11 in a state in which the vacuum supply unit 30 operates (supplies) (60) is sequentially opened and closed according to the set time. It is preferable that the time to open the on/off valve 60 is about 3 minutes. There are 8 areas of interest, and ports of the area of interest suction pipes 11 are located in each of the 8 areas of interest, and the area of interest suction tubes 11 are referred to as 1, 2, 3, 4, 5, 6, 7, 8. In this case, when the opening/closing valve 60 provided in the first region of interest suction pipe 11 is opened for a certain period of time, the vacuum vacuum supply pipe 22 generated from the vacuum supply unit 30-the common vacuum line 20-branch The air in the region of interest (the first region of interest) around the port of the first region of interest suction pipe 11 is sucked by acting through the vacuum connection line 21-the first region of interest suction pipe 11. The air of the region of interest sucked through the port of the first region of interest suction pipe 11 is introduced into the analyzer 40 through the first region of interest suction pipe 11-common suction line 10-analyzer connector 12 . The air introduced into the analyzer 40 is analyzed through the analyzer 40 to analyze whether harmful gas is contained in the air. And after the set time has elapsed, the opening/closing valve 60 provided in the first region of interest suction pipe 11 is closed, and the opening/closing valve 60 provided in the second region of interest suction pipe 11 is opened for a set time. 2 The air in the region of interest (the second region of interest) is analyzed through the port of the region of interest suction pipe 11. Through the above process, the air of 8 areas of interest is analyzed. The vacuum supply pipe 22 connected to the vacuum supply unit 30 is connected to the middle of the common vacuum line 20 to which the branch vacuum connection lines 21 are connected, so that a uniform vacuum acts on the branch vacuum connection lines 21 In addition, the analyzer connector 12 is connected to the middle part of the common suction line 10 to which the region of interest suction pipes 11 are connected, so that air is sucked at a uniform pressure from the region of interest suction pipes 11, respectively. When the opening/closing valve 60 of the first region of interest suction pipe 11 is closed and the opening/closing valve 60 of the second region of interest suction pipe 11 is opened, the first and second region of interest suction pipes 11 The pressure applied to the first and second region of interest suction pipes 11 is the same, but the pressure applied to the first and second region of interest suction pipes 11 is the same, but the first region of interest suction pipe 11 and the second region of interest suction pipe 11 ) When a pressure difference occurs temporarily due to the difference in length, the pressure applied to the second region of interest suction pipe 11 is the same pressure applied to the first region of interest suction pipe 11 as the pressure difference is absorbed by the differential pressure buffer unit 50 This comes into play. Due to this, the amount of air sucked into the analyzer 40 in each region of interest becomes uniform, so that the measurement is accurate.

On the other hand, when harmful gas is generated in the third region of interest and the harmful gas is measured by the analyzer 40, an alarm is generated so that the manager takes action. Then, the purge unit 80 is operated to purify the third area of interest suction pipe 11 and other flow paths.

As described above, the present invention applies a uniform vacuum to each of the region-of-interest suction pipes 11 located in the regions of interest in the equipment installation room, and at the same time, the same amount of air from the regions of interest is transferred to the analyzer 40. Since it is introduced and measured through the analyzer 40, it is possible to accurately measure whether or not harmful gas is generated (existence) in the regions of interest.

In addition, since the differential pressure buffering unit 50 of the present invention includes an expansion and contraction container 51, a non-expandable contraction casing 52, and an orifice tube 53, the region of interest suction pipes 11 and the common suction line 10 By effectively absorbing the pressure difference temporarily generated in the region of interest, a uniform pressure is maintained in the suction pipe 11 and the common suction line 10 in the region of interest.

In addition, in the present invention, when the gravity-type check valve 70 is provided, the gravity-type check valve 70 includes a first block 71, a second block 72, a stopper 73, and a valve cone 74. Therefore, even when a small pressure difference occurs, the flow of air is prevented from flowing backward.

10; Common suction line 11; Region of Interest Suction Pipe
12; Analyzer connector 13; Buffer connection line
20; Common vacuum line 21; Branch vacuum connection line
22; Vacuum supply pipe 30; Vacuum supply unit
40; Analyzer 50; Differential pressure buffer unit
60; Opening and closing unit

Claims (8)

Common suction line;
Region-of-interest suction pipes having one end connected to the common suction line at a set interval and the other end being respectively positioned in the target regions of interest;
Common vacuum line;
Branched vacuum connection lines each having one end connected to the common vacuum line and the other end connected to each of the region of interest suction pipes at a set distance from the common vacuum line;
A vacuum supply pipe having one end connected to the middle portion of the common vacuum line;
A vacuum supply unit connected to the other end of the vacuum supply pipe;
An analyzer connection pipe having one end connected to the middle portion of the common suction line;
An analyzer connected to the other end of the analyzer connector;
A buffer connection line connecting the vacuum supply pipe and the analyzer connection pipe;
A differential pressure buffer unit connected to the buffer connection line to provide a uniform pressure by absorbing a pressure difference; And
It includes opening and closing units provided in each of the region of interest suction pipes to open and close the region of interest suction pipe,
The differential pressure buffer unit expands and contracts according to pressure, and the expansion and contraction container to which the buffer connection line is connected, the non-expandable and contracted casing surrounding the expansion and contracting container, and the non-expanding and contracting casing are penetrated to expand the expansion and contraction container. A precise gas measurement system including an orifice tube provided with an orifice part, and the air in the inner space of the non-expanding and contracting casing flows out or inflows to the outside due to volume change due to over-contraction. delete The method of claim 1, wherein the buffer connection line is divided into two, and both ends thereof are connected to the expansion and contraction container, and one end is vertically bent and connected to protrude into the expansion and contraction container. Precision gas measurement system. The method of claim 1, wherein a gravity type check valve is provided in the buffer connection line to open and close a flow path by its own weight so as to be located between the non-expandable contraction casing and the vacuum supply pipe, and the gravity type check valve has a flow path therein. And a first block connected to one side of the buffer connection line, a second block connected to the first block by being provided with a flow path therein, and connected to the other side of the buffer connection line, and a plurality of air passages therein. A precision type including a stopper provided and fixed in the flow path of the first and second blocks, and a valve cone that is positioned so as to move up and down in the flow path of the first and second blocks to open and close the flow path by a pressure difference and its own weight. Gas measurement system. delete The method of claim 1, wherein the vacuum supply pipe is connected to a common vacuum line, and is connected to be located in the middle of the connection parts of the branch vacuum connection lines connected to the common vacuum line, and the analyzer connection pipe is connected to a common suction line. , Precise gas measurement system, characterized in that connected to be located in the middle of the connection portions of the region of interest suction pipes connected to the common suction line. The purge unit of claim 1, wherein a purge unit for cleaning a contaminated line is connected to the common suction line, and the purge unit includes a purge line having both ends connected to a common suction line, and one end connected to the purge line. A precision gas measurement system comprising a supply pipe, a high-pressure air supply unit connected to the other end of the purge supply pipe to supply pressurized air, and an opening/closing unit connected to the purge supply pipe. The precise gas measurement system according to claim 1, wherein the common suction line is heated to 70 to 100 degrees.

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